A single drive reflectivity measurement device

Abstract

The application relates to a single-drive reflectivity measuring device and relates to the technical field of space optics. The device comprises a measuring base, a driving part, a first driven shaft, a second driven shaft, a first transmission assembly, a second transmission assembly, a sample fixing part and a detecting part. The driving part is arranged on the measuring base, and the first driven shaft and the second driven shaft are rotatably arranged on the measuring base. The first transmission assembly is arranged between the driving end of the driving part and the first driven shaft. The second transmission assembly is arranged between the driving part of the driving part and the second driven shaft. The sample fixing part and the detecting part are arranged on the first driven shaft and the second driven shaft respectively. The transmission ratio of the first transmission assembly is twice that of the second transmission assembly, and the center distance from the driving part to the first driven shaft is equal to the center distance from the driving part to the second driven shaft. The problems that the existing reflectivity measuring device can only adopt double-motor driving to realize the 2 times angle relationship rotation of a sample and a detector are solved.

Description

Technical Field

[0001] This utility model relates to the field of space optics technology, and in particular to a single-drive reflectivity measurement device. Background Technology

[0002] Reflectivity measurement devices offer convenient, fast, and stable testing performance, and continue to play an important role in the performance testing of optical components. Their working principle involves incident light illuminating the sample surface, the detector receiving the reflected light, and the reflectivity of the sample being determined by comparing the intensity of the incident light with the intensity of the reflected light. Since the reflectivity of the sample needs to be tested at different incident angles, the sample needs to be rotated from 0° to 90°. During this process, the detector needs to rotate twice the incident angle in order to receive the reflected light in real time.

[0003] Existing reflectivity measurement equipment typically uses two motor systems, which control the rotation of the sample and the detector respectively, to achieve rotational relationships at different angles.

[0004] This dual-motor drive scheme increases costs, and since reflectivity testing is generally conducted under ultra-high vacuum, increasing the number of drives will affect the vacuum level of the device.

[0005] Regarding the aforementioned technologies, existing reflectivity measurement devices can only achieve a 2-fold angular rotation between the sample and the detector using dual-motor drive. Utility Model Content

[0006] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a single-drive reflectivity measuring device, which aims to solve the problem that existing reflectivity measuring devices can only use dual motor drives to achieve a 2-fold angular relationship between the sample and the detector.

[0007] The single-drive reflectivity measuring device provided in this application adopts the following technical solution: A single-drive reflectivity measuring device, comprising:

[0008] Measurement substrate;

[0009] A driving element, which is disposed on the measuring base;

[0010] A first driven shaft is rotatably mounted on the measuring base.

[0011] The second driven shaft is rotatably mounted on the measuring base.

[0012] A first transmission assembly is disposed between the driving end of the driving member and the first driven shaft.

[0013] The second transmission assembly is disposed between the driving member of the driving member and the second driven shaft;

[0014] A sample holder is disposed on the first driven shaft and is used to fix the sample.

[0015] A detector element is disposed on the second driven shaft and is used to receive reflected light reflected from the sample;

[0016] Wherein, the transmission ratio of the first transmission component is twice the transmission ratio of the second transmission component, and the center distance from the driving member to the first driven shaft is equal to the center distance from the driving member to the second driven shaft.

[0017] Optionally, the first transmission assembly includes a first driving gear and a first driven gear;

[0018] The first driving gear is disposed on the driving end of the driving member;

[0019] The first driven gear is mounted on the first driven shaft, and the first driven gear meshes with the first driving gear;

[0020] The second transmission assembly includes a second driving gear and a second driven gear;

[0021] The second driving gear is disposed on the driving end of the driving member;

[0022] The second driven gear is mounted on the second driven shaft, and the second driven gear meshes with the second driving gear;

[0023] Wherein, the sum of the pitch circle radii of the first driving gear and the first driven gear is equal to the sum of the pitch circle radii of the second driving gear and the second driven gear, and the transmission ratio of the first driving gear to the first driven gear is twice the transmission ratio of the second driving gear to the second driven gear.

[0024] Optionally, the first transmission assembly includes a first driving drive wheel, a first driven drive wheel, and a first conveyor belt;

[0025] The first active transmission wheel is disposed on the driving end of the driving component;

[0026] The first driven transmission wheel is mounted on the first driven shaft;

[0027] The first conveyor belt is sleeved on the outer periphery of the first driving drive wheel and the first driven drive wheel;

[0028] The second transmission assembly includes a second driving drive wheel, a second driven drive wheel, and a second conveyor belt;

[0029] The second active transmission wheel is disposed on the driving end of the driving member;

[0030] The second driven transmission wheel is mounted on the second driven shaft;

[0031] The second conveyor belt is fitted around the outer periphery of the second driving drive wheel and the second driven drive wheel;

[0032] Wherein, the transmission ratio between the first driving drive wheel and the first driven drive wheel is twice the transmission ratio between the second driving drive wheel and the second driven drive wheel.

[0033] Optionally, the first driven shaft and the second driven shaft are coaxially arranged.

[0034] Optionally, the first driven shaft is provided with a first rotation channel, the first rotation channel is coaxially arranged with the first driven shaft, and the second driven shaft is rotatably arranged within the first rotation channel.

[0035] Optionally, the measuring substrate is provided with a shaft protective shell, and a second rotation channel is formed inside the shaft protective shell, wherein the first driven shaft is rotatably disposed in the second rotation channel.

[0036] Optionally, the single-drive reflectivity measuring device includes a drive shaft, which is disposed at the output end of the drive component, and the active end of the first transmission component and the active end of the second transmission component are both disposed on the drive shaft.

[0037] Optionally, the single-drive reflectivity measuring device includes a drive shaft holder, which is disposed on the measuring substrate and is rotatably connected to the drive shaft.

[0038] Optionally, the drive shaft cage includes a cage body and a retaining part. The cage body is disposed on the measuring base, and at least one retaining part is disposed on the cage body. The drive shaft is rotatably disposed on the retaining part.

[0039] Optionally, the single-drive reflectivity measuring device is a stainless steel single-drive reflectivity measuring device.

[0040] Compared with the prior art, the embodiments of this utility model have the following advantages:

[0041] When the drive unit is activated, it can simultaneously drive the first transmission component and the second transmission component to rotate. Under the transmission of the first transmission component and the second transmission component, the first driven shaft and the second driven shaft can be driven to rotate. Since the transmission ratio of the first transmission component is twice that of the second transmission component, and the center distance from the drive unit to the first driven shaft is equal to the center distance from the drive unit to the second driven shaft, a 2-degree rotation relationship between the sample and the detector can be achieved.

[0042] This application achieves a double-angle rotation relationship between the sample and the detector through a single driving component, under the transmission action of the first and second transmission components. This replaces the traditional dual-turntable mechanism, reduces equipment costs, and improves the vacuum level of the device. At the same time, it achieves the important indicator of reflectivity measurement in a relatively simple way, solving the problem that existing reflectivity measurement devices can only use dual-motor drive to achieve a double-angle rotation relationship between the sample and the detector. Attached Figure Description

[0043] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0044] Figure 1 This is a schematic diagram of the overall structure of the single-drive reflectivity measurement device in the embodiments of this application;

[0045] Figure 2 This is a schematic diagram of the connection relationship between the driving component, the first driven shaft, the second driven shaft, the first transmission assembly, and the second transmission assembly of the single-drive reflectivity measuring device in this embodiment of the application.

[0046] Figure 3 This is an exploded view of the first driven shaft, the second driven shaft, and the shaft protective housing of the single-drive reflectivity measuring device in the embodiments of this application;

[0047] Figure 4 This is a schematic diagram of the structure of the measuring substrate, drive shaft holder, and drive shaft of the single-drive reflectivity measuring device in the embodiments of this application.

[0048] Explanation of reference numerals in the attached figures:

[0049] 1. Measuring substrate; 11. Top wall; 12. Side wall; 13. Shaft protective shell; 131. Second rotation channel; 2. Driving component; 3. First driven shaft; 31. First rotation channel; 4. Second driven shaft; 5. First transmission assembly; 51. First driving gear; 52. First driven gear; 6. Second transmission assembly; 61. Second driving gear; 62. Second driven gear; 7. Sample holder; 8. Detector; 9. Drive shaft; 91. Coupling; 10. Drive shaft cage; 101. Cage body; 102. Holding part. Detailed Implementation

[0050] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0051] The present application will be further described in detail below with reference to the accompanying drawings.

[0052] This application discloses a single-drive reflectivity measurement device.

[0053] like Figure 1 and Figure 2 As shown, a single-drive reflectivity measuring device includes a measuring base 1, a driving component 2, a first driven shaft 3, a second driven shaft 4, a first transmission assembly 5, a second transmission assembly 6, a sample holder 7, and a detector 8. The housing of the driving component 2 is disposed on the measuring base 1. The first driven shaft 3 is rotatably disposed on the measuring base 1. The second driven shaft 4 is rotatably disposed on the measuring base 1. The first transmission assembly 5 is disposed between the driving end of the driving component 2 and the first driven shaft 3. The second transmission assembly 6 is disposed between the driving component 2 and the second driven shaft 4. The sample holder 7 is disposed on the first driven shaft 3 and is used to fix the sample. The detector 8 is disposed on the second driven shaft 4 and is used to receive reflected light reflected from the sample. The transmission ratio of the first transmission assembly 5 is twice the transmission ratio of the second transmission assembly 6, and the center distance from the driving component 2 to the first driven shaft 3 is equal to the center distance from the driving component 2 to the second driven shaft 4.

[0054] When the drive unit 2 is activated, it can simultaneously drive the first transmission component 5 and the second transmission component 6 to rotate. Under the transmission of the first transmission component 5 and the second transmission component 6, the first driven shaft 3 and the second driven shaft 4 can be driven to rotate. Since the transmission ratio of the first transmission component 5 is twice the transmission ratio of the second transmission component 6, and the center distance between the drive unit 2 and the first driven shaft 3 is equal to the center distance between the drive unit 2 and the second driven shaft 4, a 2-degree rotation relationship between the sample and the detector can be achieved.

[0055] This application achieves a double-angle rotation relationship between the sample and the detector through a single driving component 2, under the transmission action of the first transmission component 5 and the second transmission component 6. This replaces the traditional dual-turntable mechanism, reduces equipment costs, and achieves the important indicator of reflectivity measurement in a simpler way. It solves the problem that existing reflectivity measurement devices can only use dual motor drives to achieve a double-angle rotation relationship between the sample and the detector.

[0056] Specifically, the measuring substrate 1 includes sidewalls 12 and a top wall 11. There are two sidewalls 12, which are respectively located on both sides of the top wall 11.

[0057] The driving component 2 is a drive motor. The housing of the driving component 2 is screwed to the lower surface of the top wall 11. The top wall 11 is provided with a clearance hole. The output end of the driving component 2 extends to the upper surface of the top wall 11 through the clearance hole.

[0058] The first transmission component 5 and the second transmission component 6 are both one of gear transmission, belt transmission or chain transmission. To ensure the synchronization of the transmission of the first transmission component 5 and the second transmission component 6, the first transmission component 5 and the second transmission component 6 have the same transmission method.

[0059] The active end of the first transmission component 5 and the active end of the second transmission component 6 are both coaxially arranged at the output end of the drive component 2, and the driven end of the first transmission component 5 and the driven end of the second transmission component 6 are respectively arranged on the first driven shaft 3 and the second driven shaft 4.

[0060] When the driving component 2 starts working, the active end of the first transmission component 5 and the active end of the second transmission component 6 start to rotate simultaneously with the driving end of the driving component 2. Under the transmission action of the force of the first transmission component 5 and the second transmission component 6, the first driven shaft 3 and the second driven shaft 4 can be driven to rotate, which ultimately drives the sample fixing component 7 and the detector 8 to rotate.

[0061] Since the transmission ratio of the first transmission component 5 is twice the transmission ratio of the second transmission component 6 (the transmission ratio of the first transmission component 5 refers to the transmission ratio between the driving end and the driven end of the first transmission component 5, and the transmission ratio of the second transmission component 6 refers to the transmission ratio between the driving end and the driven end of the second transmission component 6), and the center distance between the driving member 2 and the first driven shaft 3 is equal to the center distance between the driving member 2 and the second driven shaft 4.

[0062] This allows for a 2x angle rotation relationship between the sample and the detector, meeting the requirements for sample reflectivity testing.

[0063] Compared to existing systems that use two separate motor systems to control the rotation of the sample and detector, this method achieves cost reduction and structural simplification.

[0064] Furthermore, the single-drive reflectivity measuring device includes a drive shaft 9, which is located at the output end of the drive component 2. The active end of the first transmission component 5 and the active end of the second transmission component 6 are both located on the drive shaft 9.

[0065] The drive shaft 9 is mounted on the drive end of the drive component 2 via a coupling 91. The drive shaft 9 is coaxial with the drive end of the drive component 2. By mounting the drive shaft 9, the installation length of the drive end of the drive component 2 can be extended, thereby facilitating the installation of the active end of the first transmission component 5 and the active end of the second transmission component 6.

[0066] like Figure 1 and Figure 2 As shown, in one implementation of this application embodiment, the first transmission assembly 5 includes a first driving gear 51 and a first driven gear 52; the first driving gear 51 is disposed on the driving end of the driving member 2; the first driven gear 52 is disposed on the first driven shaft 3, and the first driven gear 52 meshes with the first driving gear 51; the second transmission assembly 6 includes a second driving gear 61 and a second driven gear 62; the second driving gear 61 is disposed on the driving end of the driving member 2; the second driven gear 62 is disposed on the second driven shaft 4, and the second driven gear 62 meshes with the second driving gear 61; wherein, the sum of the pitch circle radii of the first driving gear 51 and the first driven gear 52 is equal to the sum of the pitch circle radii of the second driving gear 61 and the second driven gear 62, and the transmission ratio of the first driving gear 51 to the first driven gear 52 is twice the transmission ratio of the second driving gear 61 to the second driven gear 62.

[0067] Specifically, both the first transmission component 5 and the second transmission component 6 adopt gear transmission.

[0068] The first drive gear 51 and the second drive gear 61 are both coaxially mounted on the drive shaft 9. There is a certain gap between the first drive gear 51 and the second drive gear 61 to avoid contact between the first drive gear 51 and the second drive gear 61 and interference.

[0069] The first driven gear 52 and the second driven gear 62 are respectively mounted on the first driven shaft 3 and the second driven shaft 4.

[0070] Through the meshing between the first driving gear 51 and the first driven gear 52, and the meshing between the second driving gear 61 and the second driven gear 62, the first driven shaft 3 and the second driven shaft 4 can rotate with the rotation of the drive shaft 9, thereby driving the sample holder 7 and the detector 8 to rotate with the driven shaft.

[0071] Since the sum of the pitch circle radii of the first driving gear 51 and the first driven gear 52 is equal to the sum of the pitch circle radii of the second driving gear 61 and the second driven gear 62, and the transmission ratio of the first driving gear 51 and the first driven gear 52 is twice the transmission ratio of the second driving gear 61 and the second driven gear 62, a double-angle rotation relationship can be achieved between the sample and the detector, which meets the requirements of sample reflectivity testing.

[0072] Meanwhile, both the first transmission component 5 and the second transmission component 6 adopt a transmission relationship of active gear meshing, which is simple in structure and stable in transmission relationship. This simplifies the complexity of the overall structure of the device and ensures stable operation of the device while reducing costs, making operation more convenient.

[0073] In another implementation of this application, the first transmission assembly 5 includes a first driving transmission wheel, a first driven transmission wheel, and a first conveyor belt; the first driving transmission wheel is disposed on the driving end of the driving member 2; the first driven transmission wheel is disposed on the first driven shaft 3; the first conveyor belt is sleeved on the outer periphery of the first driving transmission wheel and the first driven transmission wheel; the second transmission assembly 6 includes a second driving transmission wheel, a second driven transmission wheel, and a second conveyor belt; the second driving transmission wheel is disposed on the driving end of the driving member 2; the second driven transmission wheel is disposed on the second driven shaft 4; the second conveyor belt is sleeved on the outer periphery of the second driving transmission wheel and the second driven transmission wheel; wherein the transmission ratio between the first driving transmission wheel and the first driven transmission wheel is twice the transmission ratio between the second driving transmission wheel and the second driven transmission wheel.

[0074] Specifically, both the first transmission component 5 and the second transmission component 6 adopt belt drive transmission.

[0075] The first and second drive wheels are both coaxially mounted on the drive shaft 9, with a certain gap between them to prevent interference caused by contact between the first and second drive wheels.

[0076] The first driven transmission wheel and the second driven transmission wheel are respectively mounted on the first driven shaft 3 and the second driven shaft 4.

[0077] A first transmission belt is fitted around the outer periphery of the first driving transmission wheel and the first driven transmission wheel, and a first transmission belt is fitted around the outer periphery of the second driving transmission wheel and the second driven transmission wheel.

[0078] The transmission between the first driving pulley and the first driven pulley is accomplished through the first transmission belt, and the transmission between the second driving pulley and the second driven pulley is accomplished through the second transmission belt.

[0079] Under the action of the first and second transmission belts, the first driven shaft 3 and the second driven shaft 4 can rotate with the rotation of the drive shaft 9, thereby driving the sample fixing piece 7 and the detector piece 8 to rotate with the driven shafts.

[0080] Since the transmission ratio between the first active drive wheel and the first driven drive wheel is twice that between the second active drive wheel and the second driven drive wheel, and the center distance between the driving component 2 and the first driven shaft 3 is equal to the center distance between the driving component 2 and the second driven shaft 4, a double-angle rotation relationship can be achieved between the sample and the detector, which meets the requirements for sample reflectivity testing.

[0081] The first transmission assembly 5 and the second transmission assembly 6 adopt belt drive, which has the advantages of simple structure, low cost, smooth operation and low noise.

[0082] The following explanation will take the example of the first transmission component 5 and the second transmission component 6 both being gear transmissions.

[0083] like Figure 2 and Figure 3 As shown, the first driven shaft 3 and the second driven shaft 4 are coaxially arranged.

[0084] Specifically, a first rotation channel 31 is provided on the first driven shaft 3, and the first rotation channel 31 is coaxially arranged with the first driven shaft 3. The second driven shaft 4 is rotatably arranged in the first rotation channel 31.

[0085] The cross-sectional radius of the first driven shaft 3 is larger than that of the second driven shaft 4. The first driven shaft 3 is rotatably mounted on the measuring base 1 via a bearing, and the first driven shaft 3 is arranged parallel to the drive shaft 9.

[0086] The first driven gear 52 is disposed on the outer periphery of the first driven shaft 3.

[0087] The second driven shaft 4 is rotatably disposed inside the first driven shaft 3 via a bearing. One end of the second driven shaft 4 extends out of the first rotation channel 31, and the second driven gear 62 is disposed on the outer periphery of the second driven shaft 4 extending out of the first rotation channel 31.

[0088] The coaxial arrangement of the first driven shaft 3 and the second driven shaft 4 enables the coaxial assembly of the sample and the detector.

[0089] Because existing methods using two separate motor systems to control the sample and detector struggle to achieve good coaxiality, and coaxiality is the most important indicator in reflectivity testing, this application proposes a method that achieves coaxial assembly and control of the sample and detector using a single drive and only requires a transmission assembly to coaxially configure the first driven shaft 3 and the second driven shaft 4.

[0090] Compared with existing technologies, it has advantages such as simple structure, high measurement accuracy, convenient operation and low cost.

[0091] Furthermore, a shaft protection shell 13 is provided on the measuring base 1, and a second rotation channel 131 is formed inside the shaft protection shell 13. The first driven shaft 3 is rotatably disposed in the second rotation channel 131.

[0092] The shaft protective shell 13 is screwed to the upper surface of the top wall 11 of the measuring base 1. The shaft protective shell 13 can cover the exposed part of the first driven shaft 3, thereby protecting the first driven shaft 3.

[0093] Furthermore, since the first driven shaft 3 and the second driven shaft 4 are coaxially designed, the axial distance from the first driven shaft 3 to the drive shaft 9 is the same as the axial distance from the second driven shaft 4 to the drive shaft 9.

[0094] like Figure 1 and Figure 4 As shown, the single-drive reflectivity measuring device includes a drive shaft holder 10, which is mounted on the measuring base 1 and is rotatably connected to the drive shaft 9.

[0095] Specifically, the drive shaft retainer 10 includes a retainer body 101 and a retaining part 102. The retainer body 101 is disposed on the top wall 11 of the measuring base 1 and is disposed perpendicular to the top wall 11.

[0096] At least one retaining part 102 is provided, and at least one retaining part 102 is provided on the retainer body 101. The retaining part 102 is provided parallel to the upper surface of the top wall 11, and the drive shaft 9 is rotatably provided on the retaining part 102 via a bearing.

[0097] The drive shaft cage 10 is designed to maintain the stability of the drive shaft 9 during rotation and prevent it from shaking during rotation.

[0098] In this embodiment, two retaining parts 102 are provided, and the two retaining parts 102 are rotatably connected to the end of the rotating shaft and a certain part of the shaft body of the rotating shaft, respectively.

[0099] like Figure 1 As shown, the single-drive reflectivity measuring device is a stainless steel single-drive reflectivity measuring device.

[0100] The single-drive reflectivity measuring device of this application is made entirely of stainless steel. In this embodiment, 304 stainless steel is selected.

[0101] Because the single-drive reflectivity measurement device of this application needs to be used in a vacuum environment when performing reflectivity tests.

[0102] Stainless steel is characterized by high strength, structural stability, low outgassing rate, and easy processing, which can meet the core requirements of the vacuum environment in reflectivity testing. It can stably maintain a high vacuum state and reduce interference with the test.

[0103] The parameter information for the first driving gear 51, the second driving gear 61, the first driven gear 52, and the second driven gear 62 in this application is as follows:

[0104] I. Relationship of the number of teeth

[0105] In this embodiment, the shaft spacing is 70 mm. Since the transmission ratio of the first driving gear 51 to the first driven gear 52 is twice the transmission ratio of the second driving gear 61 to the second driven gear 62, calculations show that the pitch circle diameter of the first driving gear 51 is 60 mm, the pitch circle diameter of the first driven gear 52 is 80 mm, the pitch circle diameter of the second driving gear 61 is 84 mm, and the pitch circle diameter of the second driven gear 62 is 56 mm. The module (m) of each gear is 1 mm.

[0106] By using the relationship between pitch circle, number of teeth, and module: pitch circle diameter = module * number of teeth, we can deduce that the number of teeth of the first driving gear 51 is 60, the number of teeth of the second driving gear 61 is 84, the number of teeth of the first driven gear 52 is 80, and the number of teeth of the second driven gear 62 is 56.

[0107] II. Precision Selection

[0108] To meet the requirements of vacuum conditions, all materials are made of 304 stainless steel, the gears are machined with an ISO5 precision and a module of 1 mm, and the bearings used for the rotational relationships between the various structures are all P4 grade, with a radial deviation of 5 micrometers.

[0109] The machining accuracy of drive shaft 9, first driven shaft 3 and second driven shaft 4 is IT6 grade. The tolerance of the shaft spacing between drive shaft 9 and first driven shaft 3 and the shaft spacing between drive shaft 9 and second driven shaft 4 is Δa = ±15 micrometers. The meshing pressure angle is 20 degrees and the gear mounting eccentricity is e = ±15 micrometers.

[0110] Calculations show that the worst-case statistical result for the normal backlash (normal backlash refers to the clearance between non-working tooth surfaces in the normal direction (perpendicular to the tooth surface) during gear meshing, while the normal backlash composite tolerance specifies the allowable range of variation for this clearance, and is an important indicator for ensuring the smoothness of gear transmission and avoiding jamming) is 28.93 micrometers. The worst-case statistical deviation for the angle of the first driven gear 52 is 0.13 degrees, and the worst-case statistical deviation for the angle of the second driven gear 62 is 0.186 degrees.

[0111] This application discloses a single-drive reflectivity measurement device, which has the following technical advantages compared to the prior art:

[0112] 1. This application achieves a 2-degree rotation relationship between the sample and the detector through a single motor drive and a gear transmission system. The sample and the detector are coaxially assembled, enabling the important indicator of reflectivity measurement to be achieved in a relatively simple way.

[0113] 2. Single motor drive replaces the dual turntable mechanism, reducing equipment costs.

[0114] 3. Single drive simplifies the control system and makes operation more convenient.

[0115] 4. Since reflectivity testing needs to be carried out in a vacuum environment, and the drive mechanism is the main component affecting the vacuum, reducing the number of drives can improve the vacuum level of the equipment. In other words, under the same vacuum requirements, the single-drive technical solution of this application can reduce the cost and difficulty of building a vacuum system, and at the same time greatly reduce the energy consumption of the equipment in the later stage of operation.

[0116] In summary, a single-drive reflectivity measuring device includes a measuring substrate 1, a driving component 2, a first driven shaft 3, a second driven shaft 4, a first transmission assembly 5, a second transmission assembly 6, a sample holder 7, and a detector 8. The housing of the driving component 2 is disposed on the measuring substrate 1. The first driven shaft 3 is rotatably disposed on the measuring substrate 1. The second driven shaft 4 is rotatably disposed on the measuring substrate 1. The first transmission assembly 5 is disposed between the driving end of the driving component 2 and the first driven shaft 3. The second transmission assembly 6 is disposed between the driving component 2 and the second driven shaft 4. The sample holder 7 is disposed on the first driven shaft 3 and is used to fix the sample. The detector 8 is disposed on the second driven shaft 4 and is used to receive reflected light reflected from the sample. The transmission ratio of the first transmission assembly 5 is twice the transmission ratio of the second transmission assembly 6, and the center distance from the driving component 2 to the first driven shaft 3 is equal to the center distance from the driving component 2 to the second driven shaft 4.

[0117] When the drive unit 2 is activated, it can simultaneously drive the first transmission component 5 and the second transmission component 6 to rotate. Under the transmission of the first transmission component 5 and the second transmission component 6, the first driven shaft 3 and the second driven shaft 4 can be driven to rotate. Since the transmission ratio of the first transmission component 5 is twice the transmission ratio of the second transmission component 6, and the center distance between the drive unit 2 and the first driven shaft 3 is equal to the center distance between the drive unit 2 and the second driven shaft 4, a 2-degree rotation relationship between the sample and the detector can be achieved.

[0118] This application achieves a double-angle rotation relationship between the sample and the detector through a single driving component 2, under the transmission action of the first transmission component 5 and the second transmission component 6. This replaces the traditional dual-turntable mechanism, reduces equipment costs, and achieves the important indicator of reflectivity measurement in a simpler way. It solves the problem that existing reflectivity measurement devices can only use dual motor drives to achieve a double-angle rotation relationship between the sample and the detector.

[0119] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0120] It should be noted that this utility model uses a single-drive reflectivity measuring device as an example to introduce the specific structure and working principle of this utility model, but the application of this utility model is not limited to a single-drive reflectivity measuring device, and can also be applied to the production and use of other similar workpieces.

[0121] It should be understood that this invention is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this invention is limited only by the appended claims.

[0122] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A single-drive reflectivity measuring device, characterized in that, include: Measurement substrate; A driving element, which is disposed on the measuring base; A first driven shaft is rotatably mounted on the measuring base. The second driven shaft is rotatably mounted on the measuring base. A first transmission assembly is disposed between the driving end of the driving member and the first driven shaft. The second transmission assembly is disposed between the driving member of the driving member and the second driven shaft; A sample holder is disposed on the first driven shaft and is used to fix the sample. A detector element is disposed on the second driven shaft and is used to receive reflected light reflected from the sample; Wherein, the transmission ratio of the first transmission component is twice the transmission ratio of the second transmission component, and the center distance from the driving member to the first driven shaft is equal to the center distance from the driving member to the second driven shaft.

2. The single-drive reflectivity measuring device according to claim 1, characterized in that, The first transmission assembly includes a first driving gear and a first driven gear; The first driving gear is disposed on the driving end of the driving member; The first driven gear is mounted on the first driven shaft, and the first driven gear meshes with the first driving gear; The second transmission assembly includes a second driving gear and a second driven gear; The second driving gear is disposed on the driving end of the driving member; The second driven gear is mounted on the second driven shaft, and the second driven gear meshes with the second driving gear; Wherein, the sum of the pitch circle radii of the first driving gear and the first driven gear is equal to the sum of the pitch circle radii of the second driving gear and the second driven gear, and the transmission ratio of the first driving gear to the first driven gear is twice the transmission ratio of the second driving gear to the second driven gear.

3. The single-drive reflectivity measuring device according to claim 1, characterized in that, The first transmission assembly includes a first driving drive wheel, a first driven drive wheel, and a first conveyor belt; The first active transmission wheel is disposed on the driving end of the driving component; The first driven transmission wheel is mounted on the first driven shaft; The first conveyor belt is sleeved on the outer periphery of the first driving drive wheel and the first driven drive wheel; The second transmission assembly includes a second driving drive wheel, a second driven drive wheel, and a second conveyor belt; The second active transmission wheel is disposed on the driving end of the driving member; The second driven transmission wheel is mounted on the second driven shaft; The second conveyor belt is fitted around the outer periphery of the second driving drive wheel and the second driven drive wheel; Wherein, the transmission ratio between the first driving drive wheel and the first driven drive wheel is twice the transmission ratio between the second driving drive wheel and the second driven drive wheel.

4. The single-drive reflectivity measuring device according to claim 2, characterized in that, The first driven shaft and the second driven shaft are coaxially arranged.

5. The single-drive reflectivity measuring device according to claim 4, characterized in that, The first driven shaft is provided with a first rotation channel, which is coaxial with the first driven shaft, and the second driven shaft is rotatably disposed within the first rotation channel.

6. The single-drive reflectivity measuring device according to claim 4, characterized in that, The measuring substrate is provided with a shaft protective shell, and a second rotation channel is formed inside the shaft protective shell. The first driven shaft is rotatably disposed in the second rotation channel.

7. The single-drive reflectivity measuring device according to claim 1, characterized in that, The single-drive reflectivity measuring device includes a drive shaft, which is disposed at the output end of the drive component. The active end of the first transmission component and the active end of the second transmission component are both disposed on the drive shaft.

8. The single-drive reflectivity measuring device according to claim 7, characterized in that, The single-drive reflectivity measuring device includes a drive shaft holder, which is disposed on the measuring base and is rotatably connected to the drive shaft.

9. The single-drive reflectivity measuring device according to claim 8, characterized in that, The drive shaft cage includes a cage body and a retaining part. The cage body is disposed on the measuring base, and at least one retaining part is disposed on the cage body. The drive shaft is rotatably disposed on the retaining part.

10. The single-drive reflectivity measuring device according to claim 1, characterized in that, The single-drive reflectivity measuring device is a stainless steel single-drive reflectivity measuring device.

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