Optical detection device

Abstract

The application discloses an optical detection device, comprising a base, a lens seat for fixing an optical lens, the lens seat being mounted on the base, an adjusting assembly arranged on the base and used for multi-dimensionally adjusting the lens seat, the adjusting assembly comprising a first adjusting structure and a second adjusting structure arranged on the base, wherein the first adjusting structure is arranged along the circumference of the lens seat and used for height adjustment of the lens seat along a Z axis of the base in at least one direction of the circumference, and the second adjusting structure is in abutting cooperation with at least part of the area of the lens seat in the circumference and used for adjusting the rotation angle of the lens seat in a reference plane intersecting the Z axis. The optical detection device of the application simplifies the structure of the optical detection device, reduces the overall volume and manufacturing cost on the basis of ensuring multi-dimensional adjustment.

Description

Technical Field

[0001] This application belongs to the field of semiconductor testing technology, and in particular relates to an optical testing device. Background Technology

[0002] In the inspection of semiconductor wafers, optical inspection devices are required to detect defects. To ensure the accuracy of the optical path transmission of these devices, the precision of the optical lens mounting position and angle is crucial. However, current assembly conditions cannot fully meet the assembly requirements of optical lenses, necessitating adjustments to their mounting position and angle to meet these requirements.

[0003] To ensure that the optical lenses meet the assembly requirements, the inspection device usually needs to be able to adjust the optical lenses in multiple degrees of freedom. Current optical inspection devices need to use a rotation drive mechanism and a translation drive mechanism with the same number of degrees of freedom to adjust the optical lenses in multiple dimensions. The cooperation of multiple independent drive mechanisms makes the structure of the optical inspection device complex, the cost high, and the overall size large, occupying a lot of space. Utility Model Content

[0004] This application provides an optical detection device that simplifies the structure of the optical detection device and reduces the overall size and manufacturing cost while ensuring multi-dimensional adjustment.

[0005] This application provides an optical detection device, comprising a base; a lens mount for fixing an optical lens, the lens mount being mounted on the base; and an adjustment assembly disposed on the base for multi-dimensional adjustment of the lens mount, the adjustment assembly including a first adjustment structure and a second adjustment structure disposed on the base; wherein the first adjustment structure is distributed along the circumference of the lens mount and is used to adjust the height of the lens mount along the Z-axis of the base in at least one circumferential direction; the second adjustment structure abuts against at least a portion of the lens mount in the circumferential direction and is used to adjust the rotation angle of the lens mount in a reference plane, the reference plane intersecting the Z-axis.

[0006] In the optical inspection device described above, the first adjustment structure includes a mounting plate and a first adjustment member. The mounting plate moves along the Z-axis via the first adjustment member to adjust the height of the lens mount along the Z-axis of the base in at least one circumferential orientation.

[0007] In the optical detection device described above, there is one mounting plate arranged in a ring, which surrounds the lens mount. There are multiple first adjusting members that are spaced apart circumferentially on the mounting plate. Alternatively, there are multiple mounting plates arranged at intervals around the lens mount. There are multiple first adjusting members, and each mounting plate is provided with at least one first adjusting member.

[0008] In the optical inspection device described above, a mounting plate is used to form a semi-enclosed structure with an opening, which is arranged around the periphery of the lens mount.

[0009] In the optical detection device described above, the second adjustment structure includes at least one mounting plate and at least two second adjustment members, which are movably mounted on the mounting plate and abut against the lens mount to provide tangential force.

[0010] In the optical inspection device described above, there is one mounting plate and at least two second adjusting members are installed on the mounting plate at intervals along the circumference; or, there are at least two mounting plates, and the mounting plates are arranged at intervals around the lens mount, and there are at least two second adjusting members, with each mounting plate corresponding to at least one second adjusting member.

[0011] In the optical detection device described above, the second adjustment structure is disposed on the first adjustment structure; or, the second adjustment structure and the first adjustment structure are disposed separately on the base.

[0012] In the optical detection device described above, the lens mount has an abutment surface at an angle to the circumferential direction, and at least part of the second adjustment structure is movably disposed in the circumferential direction in a direction toward or away from the abutment surface to drive the lens mount to rotate via the abutment surface.

[0013] In the optical detection device described above, the lens holder includes a main body and a support portion. The main body is used to fix the optical lens, and the support portion protrudes from at least a portion of the outer peripheral surface of the main body for contacting and engaging with the first adjustment structure.

[0014] The optical inspection device described above has a main body with a support groove recessed along the Z-axis, which is used to accommodate and fix optical lenses.

[0015] The optical inspection device of this application includes a base, a lens mount, and an adjustment assembly. The lens mount, used to fix the optical lens, is mounted on the base. The lens mount is adjusted in multiple dimensions by the adjustment assembly disposed on the base. The adjustment assembly includes a first adjustment structure and a second adjustment structure disposed on the base. The first adjustment structure is distributed along the circumference of the lens mount. Through the adjustment of the first adjustment structure, different parts of the lens mount in the Z-axis direction can move along the Z-axis, thereby realizing the overall height adjustment of the lens mount in the Z-axis or the pitch angle adjustment with respect to the Z-axis. The second adjustment structure abuts against at least a portion of the circumferential area of ​​the lens mount, thereby pushing the lens mount to rotate in a reference plane intersecting the Z-axis, realizing the rotation angle adjustment in the reference plane.

[0016] Therefore, the optical inspection device of this application realizes the height and rotation adjustment of the optical lens on the Z-axis and the rotation adjustment in the reference plane intersecting the Z-axis, ensuring the function of multi-dimensional adjustment. Moreover, multi-dimensional rotation adjustment and movement adjustment can be realized by only the first adjustment structure distributed along the circumference of the lens seat and the second adjustment structure that abuts and cooperates with the lens seat. The structure of the adjustment component is simple, realizing the structural simplification effect of the optical inspection device and reducing the overall volume and manufacturing cost. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall structure of the optical detection device according to an embodiment of this application;

[0019] Figure 2 This is a cross-sectional view of the optical detection device according to an embodiment of this application;

[0020] Figure 3 This is a top view of the optical detection device according to an embodiment of this application;

[0021] Figure 4 This is a schematic diagram of the structure of the adjustment assembly of the optical detection device according to an embodiment of this application;

[0022] Figure 5 This is a schematic diagram of the lens mount of the optical detection device according to an embodiment of this application;

[0023] Figure 6 This is a schematic diagram of another lens mount of the optical detection device according to an embodiment of this application.

[0024] Explanation of icon numbers:

[0025] 1. Base; 11. Installation space; 12. Light inlet; 13. First light outlet; 14. Second light outlet;

[0026] 2. Lens mount; 2a. Abutment surface; 21. Main body; 211. First incident light-transmitting hole; 212. First feedback light-transmitting hole; 22. Supporting part; 221. Fixing hole; 23. Supporting groove; 231. First groove wall; 2311. Detection light-transmitting hole; 232. Second groove wall; 233. Third groove wall; 2331. Second incident light-transmitting hole; 234. Fourth groove wall; 2341. Second feedback light-transmitting hole; 235. First support part; 236. Second support part;

[0027] 3. Adjustment components;

[0028] 4. First adjusting structure; 41. Mounting plate; 42. First adjusting component;

[0029] 5. Second adjustment structure; 51. Mounting plate; 52. Second adjustment component;

[0030] 6. Optical lenses. Detailed Implementation

[0031] The features and exemplary embodiments of various aspects of this application will be described in detail below. To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain this application and not to limit it. For those skilled in the art, this application can be implemented without some of these specific details. The following description of the embodiments is merely to provide a better understanding of this application by illustrating examples.

[0032] In the process of inspecting semiconductor wafers using optical inspection devices, in order to ensure that the optical lenses of the optical inspection devices can meet the assembly position and angle requirements, complex adjustment components are usually used in optical inspection devices. These adjustment components typically include X-axis rotary slides, Y-axis rotary slides, Z-axis rotary slides, and lifting slides. Different drive slides are used to adjust the optical lenses in different dimensions. However, the multiple drive slides of the adjustment components are not only large in size, but also complex in splicing and matching. Furthermore, the Z-axis rotary slide is coaxial with the optical axis of the optical lens during use, which affects the light transmission effect of the optical lens.

[0033] like Figures 1 to 6 As shown, this application embodiment provides an optical detection device, which includes a base 1; a lens holder 2 for fixing an optical lens 6, the lens holder 2 being mounted on the base 1; and an adjustment component 3 disposed on the base 1 for multi-dimensional adjustment of the lens holder 2. The adjustment component 3 includes a first adjustment structure 4 and a second adjustment structure 5 disposed on the base 1. The first adjustment structure 4 is distributed along the circumference of the lens holder 2 and is used to adjust the height of the lens holder 2 along the Z-axis of the base 1 in at least one circumferential direction. The second adjustment structure 5 abuts against at least a portion of the lens holder 2 in the circumferential direction and is used to adjust the rotation angle of the lens holder 2 in a reference plane, the reference plane intersecting the Z-axis.

[0034] In specific implementation, the optical detection device of this application embodiment includes a base 1, a lens holder 2, and an adjustment component 3. The lens holder 2, which is used to fix the optical lens 6, is installed on the base 1. The lens holder 2 is adjusted in multiple dimensions by the adjustment component 3 set on the base 1, thereby realizing the multi-dimensional adjustment of the optical lens 6 on the lens holder 2, ensuring the accuracy of the installation position and angle of the optical lens 6, and thus ensuring the accuracy of the optical path transmission path of the optical detection device.

[0035] The adjustment assembly 3 includes a first adjustment structure 4 and a second adjustment structure 5 disposed on the base 1. The first adjustment structure 4 is distributed along the circumference of the lens holder 2. Through the adjustment of the first adjustment structure 4, different parts of the lens holder 2 in its axial direction can move along the Z-axis. When all the first adjustment structures 4 move along the Z-axis, the entire lens holder 2 moves along the Z-axis with the first adjustment structure 4, realizing the overall height adjustment of the lens holder 2 on the Z-axis. When a part of the first adjustment structure 4 moves along the Z-axis, the part of the lens holder 2 that cooperates with this part of the first adjustment structure 4 can move along the Z-axis, realizing the pitch angle adjustment between the lens holder 2 and the Z-axis. The second adjustment structure 5 abuts against at least a part of the lens holder 2 in the circumferential direction and provides tangential force, thereby enabling the lens holder 2 to rotate in the reference plane intersecting the Z-axis.

[0036] Therefore, the optical inspection device of this application realizes the height and rotation adjustment of the optical lens 6 on the Z-axis and the rotation adjustment in the reference plane intersecting the Z-axis, ensuring the function of multi-dimensional adjustment. Moreover, multi-dimensional rotation adjustment and movement adjustment can be realized only by the first adjustment structure 4 distributed along the circumference of the lens seat 2 and the second adjustment structure 5 that abuts and cooperates with the lens seat 2. The structure of the adjustment component 3 is simple, realizing the structural simplification effect of the optical inspection device and reducing the overall volume and manufacturing cost.

[0037] Furthermore, the first adjustment structure 4 is distributed along the circumference of the lens holder 2, and the second adjustment structure 5 abuts against at least part of the lens holder 2 in the circumferential direction. Neither of them blocks the rotation center of the lens holder 2. When the detection light passes through the optical lens 6 inside the lens holder 2 along the rotation axis of the lens holder 2 and emits light, the detection light will not be interfered with by the first adjustment structure 4 and the second adjustment structure 5, thereby ensuring the detection accuracy of the detection light.

[0038] like Figure 3 and Figure 4 As shown in the embodiment of the optical detection device of this application, the first adjustment structure 4 includes a mounting plate 41 and a first adjustment member 42. The mounting plate 41 moves along the Z-axis via the first adjustment member 42 to adjust the height of the lens mount 2 on the Z-axis in at least one circumferential position.

[0039] In specific implementation, the first adjustment structure 4 includes a mounting plate 41 and a first adjustment member 42. By setting the first adjustment member 42, the mounting plate 41 can be moved along the Z-axis, thereby driving at least a portion of the lens mount 2 to move along the Z-axis, realizing the adjustment of the height and pitch angle of the lens mount 2 along the Z-axis. During the adjustment of the lens mount 2, the first adjustment member 42 plays a driving and guiding role for the mounting plate 41, which in turn has a transmission function and can surround the periphery of the lens mount 2, thereby driving the lens mount 2 to move stably along the Z-axis, ensuring the accuracy of the adjustment of the lens mount 2 and the optical lens 6.

[0040] Specifically, the first adjusting member 42 is a set screw structure, including a screw structure fixed to the base 1 and extending along the Z-axis, and a bolt structure sleeved on the screw structure. One end of the screw structure is fixed to the base 1, and the other end passes through the mounting plate 41. The bolt structure can move along the extension direction of the screw structure, and the bolt structure abuts against the bottom of the mounting plate 41. When adjusting the height of the mounting plate 41, the installation position of the bolt structure on the screw structure can be adjusted, so that the mounting plate 41 moves together with the bolt structure.

[0041] Optionally, the first adjusting member 42 may be a bolt structure extending along the Z-axis, which is connected to the mounting plate 41 by a threaded connection. By rotating the first adjusting member 42, relative movement can occur between the mounting plate 41 and the first adjusting member 42, thereby adjusting the height of the mounting plate 41.

[0042] Optionally, the first adjusting member 42 may be a cylinder structure, including a cylinder body fixed to the base 1 and a rod that is telescopically disposed on the cylinder body along the Z-axis. The mounting plate 41 is connected to the rod, and the height of the mounting plate 41 can be adjusted by the telescopic movement of the rod along the Z-axis.

[0043] like Figure 3 and Figure 4 As shown in the embodiment of the optical detection device of this application, there is one mounting plate 41 arranged in a ring, the ring mounting plate 41 is arranged around the lens holder 2, and there are multiple first adjusting members 42, which are distributed at intervals along the circumference of the mounting plate 41.

[0044] In practice, the mounting plate 41 is circular in shape and is arranged around the lens holder 2. This arrangement increases the overall contact area between the first adjustment structure 4 and the outer periphery of the lens holder 2. As a result, when any part of the mounting plate 41 moves along the Z-axis, the part of the lens holder 2 corresponding to the moving part is more easily moved, and the two can move synchronously, thereby improving the accuracy of the pitch angle adjustment.

[0045] There are multiple first adjustment components 42, which are distributed circumferentially on the mounting plate 41. Each of the multiple first adjustment components 42 can move independently, thereby driving different parts of the mounting plate 41 to move along the Z-axis, thus achieving accurate adjustment of the pitch angle of the lens mount 2 in different directions.

[0046] In some alternative embodiments, there are multiple mounting plates 41, which are spaced apart around the lens holder 2. There are also multiple first adjusting members 42, with each mounting plate 41 having at least one first adjusting member 42.

[0047] In practice, multiple mounting plates 41 are spaced apart around the lens mount 2. The plate-like structure of the mounting plates 41 ensures the overall contact area between the first adjustment structure 4 and the lens mount 2. Therefore, when any mounting plate 41 moves along the Z-axis, the corresponding portion of the lens mount 2 is more easily moved, allowing for synchronized movement and improving the accuracy of the pitch angle adjustment. Furthermore, the arrangement of multiple mounting plates 41 spaced apart circumferentially facilitates disassembly and assembly with the lens mount 2, reducing the difficulty of installing and disassembling the first adjustment structure 4.

[0048] There are multiple first adjusting members 42, and each mounting plate 41 is provided with at least one first adjusting member 42. Each first adjusting member 42 can move independently, thereby driving different mounting plates 41 to move along the Z-axis, thereby realizing accurate adjustment of the pitch angle of the lens mount 2 in different directions.

[0049] In some alternative embodiments, the mounting plates 41 are connected by a deformable chain structure to facilitate the installation and connection of the first adjustment structure 4.

[0050] like Figure 3 and Figure 4 As shown in the embodiment of the optical detection device of this application, the mounting plate 41 forms a semi-enclosed structure with a notch and is arranged around the lens mount 2.

[0051] In practice, the mounting plate 41 forms a semi-enclosed structure with a notch. The notch allows the mounting plate 41 to adjust the pitch angle of the lens mount 2. The slight deformation of the mounting plate 41 at the notch can alleviate the relative stress between the lens mount 2 and the mounting plate 41, thereby improving the driving effect of the mounting plate 41 in tilting the lens mount 2 and further ensuring the adjustment effect of the pitch angle.

[0052] like Figures 1 to 4As shown in the embodiment of the optical detection device of this application, the second adjustment structure 5 includes at least one mounting plate 51 and at least two second adjustment members 52. The second adjustment members 52 are movably mounted on the mounting plate 51 and abut against the lens holder 2 to provide tangential force.

[0053] In practice, the mounting plate 51 provides a mounting base for the second adjusting member 52, enabling the second adjusting member 52 to move in a direction toward or away from the lens holder 2 to achieve contact with the lens holder 2 and thus provide tangential force.

[0054] The provision of at least two second adjustment members 52 can provide tangential forces in different directions to the lens holder 2 at different positions in the circumferential direction, so that the lens holder 2 can rotate in opposite directions, thereby ensuring the free adjustment effect of rotation adjustment.

[0055] Specifically, the mounting plate 51 is vertically connected to the mounting horizontal plate 41 and spaced apart from the lens holder 2, providing space for the second adjusting member 52 mounted on the mounting plate 51; the second adjusting member 52 is movably mounted on the mounting plate 51 in a direction parallel to the mounting horizontal plate 41, thereby providing a tangential force to the lens holder 2 in a direction perpendicular to the Z-axis, so that the lens holder 2 can rotate in a plane perpendicular to the Z-axis.

[0056] Specifically, the second adjusting member 52 is a bolt structure, which is rotatably installed in the screw hole of the mounting plate 51, thereby achieving movement relative to the mounting plate 51 by rotation.

[0057] Alternatively, the second adjusting member 52 may also be a cylinder or a set screw mechanism, which can achieve movement relative to the mounting plate 51 to drive the lens holder 2 to rotate.

[0058] like Figure 3 and Figure 4 As shown in the embodiment of the optical detection device of this application, the number of mounting plates 51 is at least two, and the mounting plates 51 are arranged at intervals around the lens holder 2. The number of second adjusting members 52 is at least two, and each mounting plate 51 is provided with at least one second adjusting member 52.

[0059] In practice, at least two mounting plates 51 can be set at the positions where the lens holder 2 needs to be adjusted. Each mounting plate 51 can make precise adjustments to the lens holder 2 through at least one corresponding second adjusting member 52, which not only allows the lens holder 2 to rotate in different directions, but also ensures the accuracy of the rotation adjustment of the lens holder 2.

[0060] In another embodiment of the optical detection device of this application, the number of mounting plates 51 is one, and at least two second adjusting members 52 are installed on the mounting plates 51 at circumferential intervals.

[0061] In practice, by setting up an overall mounting plate 51 and installing at least two second adjusting members 52 at different positions on the mounting plate 51, not only are the adjustment direction and adjustment accuracy requirements of the lens holder 2 met, but the process difficulty of setting up the mounting plate 51 is also reduced.

[0062] like Figure 3 and Figure 4 As shown in the embodiment of the present application, the optical detection device includes a second adjustment structure 5 disposed on the first adjustment structure 4.

[0063] In practice, the second adjustment structure 5 is integrated with the first adjustment structure 4, which reduces the difficulty of the production process of the adjustment component 3 and makes the overall structure of the adjustment component 3 simpler, thus achieving a structural simplification effect for the optical detection device and reducing the overall volume and manufacturing cost.

[0064] Specifically, the mounting plate 51 is vertically connected to the mounting plate 41, and the two are integrally formed. The first adjusting member 42 and the second adjusting member 52 are respectively movably installed on the mounting plate 41 and the mounting plate 51 to facilitate multi-dimensional adjustment of the lens holder 2.

[0065] In some optional embodiments, the second adjustment structure 5 and the first adjustment structure 4 are separately disposed on the base 1. The separate arrangement of the second adjustment structure 5 and the first adjustment structure 4 allows them to independently control the lens holder 2, ensuring their respective control accuracy.

[0066] like Figure 1 and Figure 3 As shown in the embodiment of the present application, the optical detection device has a lens holder 2 having an abutment surface 2a at an angle to the circumferential direction. At least a portion of the second adjustment structure 5 is movably disposed in the circumferential direction in a direction toward or away from the abutment surface 2a, so as to drive the lens holder 2 to rotate via the abutment surface 2a.

[0067] In specific implementation, when the second adjustment structure 5 rotates the lens holder 2, its second adjustment member 52 can move in a direction toward or away from the abutment surface 2a to abut against the abutment surface 2a and push the lens holder 2 to rotate. Since the abutment surface 2a is a planar structure that intersects the circumferential direction, when the second adjustment member 52 abuts against the abutment surface 2a, the probability of relative sliding between the second adjustment member 52 and the abutment surface 2a can be reduced, thereby improving the adjustment stability of the second adjustment member 52 for the lens holder 2.

[0068] like Figure 5As shown in the embodiment of the optical detection device of this application, the lens holder 2 includes a main body 21 and a support part 22. The main body 21 is used to fix the optical lens 6, and the support part 22 is provided to protrude from at least a portion of the outer peripheral surface of the main body 21 for abutting and cooperating with the first adjustment structure 4.

[0069] In specific implementation, the support part 22 protrudes from at least part of the outer peripheral surface of the main body part 21 and abuts against the first adjustment structure 4. When the first adjustment structure 4 moves along the Z-axis, the support part 22 abuts against the lens holder 2 and drives the entire lens holder 2 to move along the Z-axis, thereby avoiding relative sliding between the first adjustment structure 4 and the lens holder 2 when moving along the Z-axis, which would affect the adjustment accuracy.

[0070] Specifically, the outer peripheral surfaces of the main body 21 and the supporting part 22 are both arc-shaped. When the lens holder 2 rotates relative to the base 1, the arc-shaped surface can prevent interference between the lens holder 2 and the internal structure of the base 1, thus affecting the rotation adjustment of the lens holder 2.

[0071] Specifically, the support part 22 also has a plurality of fixing holes 221 through the Z-axis. Bolt structures can be inserted into the fixing holes 221. After the lens holder 2 rotates around the Z-axis, the lens holder 2 and the adjustment component 3 can be fixed by the bolt structures in the fixing holes 221, thereby fixing the rotation angle of the lens holder 2 and preventing the lens holder 2 from rotating in the future, which would affect the detection accuracy.

[0072] In the embodiments of this application, the abutting surface 2a is provided at the end of the bearing portion 22 near the second adjustment structure 5, which facilitates abutting and cooperating with the second adjustment structure 5; and the abutting surface 2a is provided at the bearing portion 22 so that when the second adjustment structure 5 is adjusted, interference with the first adjustment structure 4 can be avoided, thereby affecting the adjustment accuracy of both.

[0073] like Figure 1 and Figure 5 As shown in the embodiment of the optical detection device of this application, the main body 21 has a support groove 23 recessed along the Z-axis, which is used to accommodate and fix the optical lens 6.

[0074] In practice, when the optical lens 6 is installed on the main body 21, it can be installed in the bearing groove 23 recessed along the Z-axis, thereby achieving the effect of supporting and fixing the optical lens 6. When the lens holder 2 is rotated or moved for adjustment, the optical lens 6 can move together with the lens holder 2, thereby realizing multi-dimensional adjustment of the optical lens 6, ensuring the accuracy of the installation position and angle of the optical lens 6, and thus ensuring the accuracy of the optical path transmission path of the optical detection device.

[0075] The carrier groove 23 is connected to the bottom wall and side wall of the main body 21 so that the detection light can be incident from the bottom of the main body 21 into the carrier groove 23, and emitted and reflected by the optical lens 6 in the carrier groove 23. The light emitted through the optical lens 6 serves as the detection light for the semiconductor wafer, thereby achieving the detection effect on the semiconductor wafer. The light reflected through the optical lens 6 serves as the feedback signal of the detection light. By analyzing the feedback signal light, it can be determined whether the wafer detection light meets the detection requirements, and the incident light can be adjusted accordingly to ensure that the wafer detection light meets the detection requirements for the wafer.

[0076] In this embodiment, by adjusting the adjustment effect of the adjustment component 3 on the lens mount 2, the angle of the optical lens 6 in different directions and its position on the Z-axis can be adjusted to adjust the emission direction or emission angle of the feedback signal light, so that it can be emitted to the accurate position of the receiving end, thereby enabling the receiving end to accurately detect the feedback signal light, and thus achieving precise adjustment of the incident light and the wafer detection light.

[0077] like Figure 2 and Figure 5 As shown in this embodiment, the base 1 includes a mounting space 11 for mounting the lens holder 2 and the adjustment assembly 3, and has a light inlet 12, a first light outlet 13, and a second light outlet 14 connected to the mounting space 11. The light inlet 12 and the first light outlet 13 are respectively located on opposite sides of the base 1 on the Z-axis, and the second light outlet 14 is located on the side wall of the base 1. When incident light passes through the base 1, it enters the mounting space 11 through the light inlet 12 and is emitted and reflected by the optical lens 6 within the mounting space 11. The wafer detection light is emitted from the first light outlet 13, and the feedback signal is emitted from the second light outlet 14.

[0078] In this embodiment, the support groove 23 includes a first groove wall 231 for supporting the sheet-like optical lens 6. The first groove wall 231 is inclined to the Z-axis and has a detection light-transmitting hole 2311. The bottom wall and side wall of the main body 21 are respectively provided with a first incident light-transmitting hole 211 and a first feedback light-transmitting hole 212. In the plane of the first groove wall 231, the projection range of the first incident light-transmitting hole 211 and the projection range of the first feedback light-transmitting hole 212 are both within the projection range of the detection light-transmitting hole 2311, and the projection range of the first incident light-transmitting hole 211 and the projection range of the first feedback light-transmitting hole 212 at least partially overlap.

[0079] In specific implementation, the sheet-like optical lens 6 is integrally disposed on the surface of the first groove wall 231, thereby allowing the optical lens 6 to be tilted relative to the Z-axis. The first groove wall 231 has a detection light-transmitting hole 2311, and the bottom wall and side wall of the main body 21 have a first incident light-transmitting hole 211 and a first feedback light-transmitting hole 212, respectively. The incident light entering through the light inlet 12 can be incident along the Z-axis to the first incident light-transmitting hole 211 and reach the detection light-transmitting hole 2311 along the Z-axis. After the transmission and reflection of the optical lens 6 disposed at the detection light-transmitting hole 2311 and tilted to the Z-axis, it obtains wafer detection light and feedback signal light with different directions. The wafer detection light passes through the optical lens 6 and continues to be emitted along the Z-axis to the first light outlet 13 to achieve the wafer detection effect. The feedback signal light is emitted from the first feedback light-transmitting hole 212 to the second light outlet 14 to achieve the signal feedback effect.

[0080] The projection range of the first incident light-transmitting aperture 211 and the projection range of the first feedback light-transmitting aperture 212 are both within the projection range of the detection light-transmitting aperture 2311, and the projection ranges of the first incident light-transmitting aperture 211 and the first feedback light-transmitting aperture 212 overlap at least partially. This ensures that all light rays incident through the first incident light-transmitting aperture 211 are within the range of the detection light-transmitting aperture 2311, and all light rays reflected by the optical lens 6 at the detection light-transmitting aperture 2311 are within the range of the first feedback light-transmitting aperture 212. This avoids interference of light rays during transmission, which could affect the stability and accuracy of the detection or feedback signals.

[0081] Specifically, the first incident light-transmitting hole 211 is located at the rotation center of the lens holder 2. When the second adjustment structure 5 drives the lens holder 2 to rotate, the optical axis of the light passing through the first incident light-transmitting hole 211 can always keep coincident with the rotation axis of the lens holder 2, thereby avoiding interference of light during transmission and further improving the stability and accuracy of the detection signal or feedback signal.

[0082] Specifically, the support groove 23 also includes a second groove wall 232, which is connected to the first groove wall 231 at an inclined angle. When the optical lens 6 is placed on the first groove wall 231, the second groove wall 232 can abut against the edge of the optical lens 6, thereby achieving a stable placement of the optical lens 6 in the support groove 23. This ensures that the angle between the feedback signal light and the wafer detection light is accurate, further improving the detection accuracy of the optical detection device.

[0083] Specifically, the support groove 23 also includes a first support portion 235, which is inclinedly connected to the second groove wall 232, providing support for the other side surface of the sheet-like optical lens 6, thereby further improving the stability of the optical lens 6 in the support groove 23.

[0084] likeFigure 6 As shown, in another embodiment of the optical detection device of this application, the support groove 23 includes a third groove wall 233 and a fourth groove wall 234 that are vertically connected. The fourth groove wall 234 is perpendicular to the Z-axis. The third groove wall 233 and the fourth groove wall 234 together support the prism structure optical lens 6. The third groove wall 233 has a second incident light-transmitting hole 2331 that communicates with the bottom wall of the main body 21. The fourth groove wall 234 has a second feedback light-transmitting hole 2341 that communicates with the side wall of the main body 21.

[0085] In specific implementation, the fourth groove wall 234 is perpendicular to the Z-axis, and the bottom surface of the prism-structured optical lens 6 can be stably supported by the fourth groove wall 234. The third groove wall 233 is perpendicular to the fourth groove wall 234, and the third groove wall 233 can support the side of the prism-structured optical lens 6, thereby achieving support for at least the adjacent two sides of the prism-structured optical lens 6 to prevent it from tipping over and ensuring the stability of the prism-structured optical lens 6 inside the bearing groove 23.

[0086] The incident light entering through the light inlet 12 can be incident along the Z-axis to the second incident light transmission hole 2331. Under the transmission and refraction of the prism structure optical lens 6, it is divided into a wafer detection light extending along the Z-axis and a feedback signal light inclined along the Z-axis. The wafer detection light is directly emitted from the prism structure optical lens 6 to the first light outlet 13 to achieve the wafer detection effect. The feedback signal light is emitted from the first feedback light transmission hole 212 to the second light outlet 14 to achieve the signal feedback effect.

[0087] Specifically, the support groove 23 also includes a second support portion 236, which is inclinedly connected to the fourth groove wall 234 and supports the optical lens 6 of the prism structure on the opposite side surfaces of the third groove wall 233, thereby further improving the stability of the optical lens 6 of the prism structure in the support groove 23.

[0088] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0089] The above description is merely a specific implementation of this application. Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, modules, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here. It should be understood that the protection scope of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the protection scope of this application.

Claims

1. An optical detection device, characterized in that, include: Base (1); Lens holder (2) for fixing optical lens (6), the lens holder (2) is mounted on the base (1); An adjustment component (3) is disposed on the base (1) for multi-dimensional adjustment of the lens mount (2). The adjustment component (3) includes a first adjustment structure (4) and a second adjustment structure (5) disposed on the base (1). The first adjustment structure (4) is arranged circumferentially along the lens mount (2) and is used to adjust the height of the lens mount (2) along the Z-axis of the base (1) in at least one position in the circumferential direction. The second adjustment structure (5) abuts against at least a portion of the circumferential region of the lens mount (2) to adjust the rotation angle of the lens mount (2) in the reference plane, which intersects the Z-axis.

2. The optical detection device according to claim 1, characterized in that, The first adjustment structure (4) includes a mounting plate (41) and a first adjustment member (42), the mounting plate (41) being moved along the Z-axis by the first adjustment member (42) to adjust the height of the lens mount (2) along the Z-axis of the base (1) in at least one orientation in the circumferential direction.

3. The optical detection device according to claim 2, characterized in that, The number of mounting plates (41) is one and they are in a ring shape. The ring-shaped mounting plates (41) are arranged around the periphery of the lens holder (2). The number of the first adjusting members (42) is multiple and they are distributed at intervals along the circumference of the mounting plates (41). or, The number of mounting plates (41) is multiple, and the multiple mounting plates (41) are arranged at intervals around the lens holder (2). The number of first adjusting members (42) is multiple, and each mounting plate (41) is provided with at least one first adjusting member (42).

4. The optical detection device according to claim 2, characterized in that, The mounting plate (41) forms a semi-enclosed structure with a notch, and is arranged around the lens mount (2).

5. The optical detection device according to claim 1, characterized in that, The second adjustment structure (5) includes at least one mounting plate (51) and at least two second adjustment members (52), the second adjustment members (52) being movably mounted on the mounting plate (51) and abutting against the lens holder (2) to provide tangential force.

6. The optical detection device according to claim 5, characterized in that, The number of the mounting plate (51) is one, and the at least two second adjusting members (52) are installed at intervals along the circumferential direction on the mounting plate (51); or, The number of mounting plates (51) is at least two, and the mounting plates (51) are spaced apart around the lens holder (2). The number of second adjusting members (52) is at least two, and each mounting plate (51) is provided with at least one second adjusting member (52).

7. The optical detection device according to claim 1, characterized in that, The second adjustment structure (5) is disposed on the first adjustment structure (4); or, The second adjustment structure (5) and the first adjustment structure (4) are respectively disposed on the base (1).

8. The optical detection device according to claim 1, characterized in that, The lens holder (2) has an abutment surface (2a) that intersects the circumferential direction. At least part of the second adjustment structure (5) is movably disposed in the circumferential direction in a direction toward or away from the abutment surface (2a) to drive the lens holder (2) to rotate via the abutment surface (2a).

9. The optical detection device according to claim 1, characterized in that, The lens mount (2) includes a main body (21) and a support (22). The main body (21) is used to fix the optical lens (6). The support (22) is provided to protrude from at least part of the outer peripheral surface of the main body (21) and is used to abut against the first adjustment structure (4).

10. The optical detection device according to claim 9, characterized in that, The main body (21) has a support groove (23) recessed along the Z-axis, which is used to accommodate and fix the optical lens (6).

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