A four-probe resistivity monitor sheet for a four-probe resistivity tester and a four-probe resistivity tester

Abstract

A kind of four-probe resistivity tester with resistivity monitoring sheet, including the disc that can be placed on the test platform of four-probe resistance tester and multiple different resistance standard sample, multiple placing grooves are set on the first side of disc, and multiple placing grooves are evenly distributed around the axis of disc, and standard sample is placed in placing groove, and first positioning lug is vertically fixed on the second side of disc, and the axis of first positioning lug coincides with the axis of disc.The utility model discloses when testing different resistance standard sample, it is not necessary to replace standard sample in turn, improve test efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material testing technology, specifically a resistivity monitoring chip for a four-probe resistivity tester and a four-probe resistivity tester. Background Technology

[0002] In semiconductor material production and chip manufacturing, accurate measurement of material resistivity is a crucial step in quality control. Four-probe resistivity meters, due to their non-destructive nature and high reliability, have become the mainstream technology for resistivity measurement. To ensure the accuracy of the meter, existing technologies typically employ periodic calibration, using multiple standard samples with known resistance values ​​as reference samples for instrument calibration. The specific calibration procedure is as follows:

[0003] Multiple standard samples with known resistance values ​​are placed sequentially on the test bench;

[0004] The four probes of the tester are brought into stable contact with the standard sample for measurement.

[0005] The measured resistance value is compared with the resistance value of the standard sample, and the relative error is calculated.

[0006] The parameters of the tester are corrected based on the error results.

[0007] However, in actual testing, it is necessary to replace the standard sample with different resistance values ​​one by one. Each replacement will cause the test to be interrupted, resulting in low testing efficiency. Utility Model Content

[0008] To address the shortcomings of existing technologies, this invention provides a resistivity monitoring chip for a four-probe resistivity tester and a four-probe resistivity tester. When testing standard samples with different resistance values, it is not necessary to replace the standard samples sequentially, thus improving testing efficiency.

[0009] The technical solution adopted by this utility model to solve the above-mentioned technical problems is as follows: a resistivity monitoring chip for a four-probe resistivity tester, including a disc that can be placed on the test stage of the four-probe resistivity tester and multiple standard samples with different resistance values. Multiple placement slots are opened on the first side of the disc, and the multiple placement slots are evenly distributed around the axis of the disc. The standard samples are placed in the placement slots accordingly. A first positioning protrusion is vertically fixed on the second side of the disc, and the axis of the first positioning protrusion coincides with the axis of the disc.

[0010] As a further optimization of the resistivity monitoring plate for a four-probe resistivity tester, the disk has several raised strips on its peripheral sidewall.

[0011] As a further optimization of the resistivity monitoring plate for a four-probe resistivity tester, the bottom of the disk is provided with a plurality of second positioning protrusions, which are distributed around the first positioning protrusion.

[0012] As a further optimization of the resistivity monitoring chip for a four-probe resistivity tester, the first side of the disk is provided with a circular receiving groove, and the placement groove is located at the bottom of the receiving groove.

[0013] As a further optimization of the resistivity monitoring strip for a four-probe resistivity tester, all the standard samples are the same size, and the diameter of the standard samples is set to 19-21 mm.

[0014] As a further optimization of the resistivity monitoring plate for a four-probe resistivity tester, the diameter of the standard sample is set to 20mm.

[0015] The technical solution adopted by this utility model to solve the above-mentioned technical problems is: a four-probe resistivity tester, which includes a base, a test platform rotatably mounted on the base with a fixed rotation angle, a probe assembly, and the aforementioned resistivity monitoring sheet. A positioning hole is provided in the center of the test platform, and the resistivity monitoring sheet can be placed on the test platform, with the first positioning protrusion inserted into the positioning hole.

[0016] As a further optimization of the utility model four-probe resistivity tester: the test stage is set as a circle, and multiple strip grooves extending radially along the test stage are opened on the test stage, and the strip grooves are evenly distributed around the axis of the test stage.

[0017] As a further optimization of the utility model four-probe resistivity tester: the depth of the strip groove is 1 / 4 to 1 / 5 of the thickness of the test stage.

[0018] As a further optimization of the utility model four-probe resistivity tester: the second positioning protrusion corresponds one-to-one with the strip groove, and when the resistivity monitoring sheet is placed on the test platform, the second positioning protrusion is inserted into the strip groove.

[0019] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0020] This invention features a disc that can be placed on the test stage of a four-probe resistance tester, along with multiple standard samples of different resistance values. Multiple placement slots are evenly distributed around the disc's axis on its first side. The standard samples are placed in the corresponding slots on the disc. The disc is then transferred to the test stage of the four-probe resistance tester. During testing, the four-probe resistance tester can continuously test different resistance values ​​of the standard samples in one go, avoiding the problem of low testing efficiency caused by constantly switching standard samples during the testing process. Attached Figure Description

[0021] Figure 1 It is a top view of the disk;

[0022] Figure 2 This is a schematic diagram of the bottom of the disc;

[0023] Figure 3 This is a schematic diagram of the cross-section of the disk.

[0024] Figure 4 This is a schematic diagram of a four-probe resistance tester.

[0025] The markings in the diagram are: 1. Disc, 2. Receiving groove, 3. Standard sample, 4. First positioning protrusion, 5. Second positioning protrusion, 6. Protrusion strip, 7. Placement groove, 8. Base, 9. Test stage, 10. Strip groove, 11. Positioning hole, 12. Probe assembly, 13. Servo motor. Detailed Implementation

[0026] The technical solution of this utility model will be further described in detail below with reference to specific embodiments. Parts not described or disclosed in detail in the following embodiments of this utility model should be understood as prior art known or should be known by those skilled in the art, such as the testing principle of the four-probe resistance tester and the specific structure of the probe assembly 12.

[0027] This utility model first provides a resistivity monitoring chip for a four-probe resistivity tester. The following are embodiments of this resistivity monitoring chip:

[0028] Example 1

[0029] A resistivity monitoring chip for a four-probe resistivity meter, such as Figures 1 to 3 As shown, the device includes a disc 1 that can be placed on a test stage 9 of a four-probe resistance tester and multiple standard samples 3 with different resistance values. Multiple placement slots 7 are provided on the first side of the disc 1, and the multiple placement slots 7 are evenly distributed around the axis of the disc 1. The standard samples 3 are placed in the placement slots 7 respectively. A first positioning protrusion 4 is vertically fixed on the second side of the disc 1, and the axis of the first positioning protrusion 4 coincides with the axis of the disc 1.

[0030] The multiple standard samples 3 with different resistance values ​​in this invention are cut from original samples with different resistance values, and each standard sample 3 is cut into a circle of the same size. The placement groove 7 on the disk 1 is also set to be circular, and the diameter of the placement groove 7 is the same as the diameter of the standard sample 3, ensuring that the standard sample 3 will not wobble in the placement groove 7. The standard samples 3 are evenly distributed around the axis of the disk 1, and there is a gap between each standard sample 3 to avoid mutual interference between adjacent standard samples 3.

[0031] The disc 1 is made of an insulating transparent acrylic sheet. When the disc 1 is placed on the test table 9, the first positioning protrusion 4 on the second side of the disc 1 can be seen through the first side of the disc 1, ensuring that the first positioning protrusion 4 can be accurately placed on the test table 9.

[0032] Multiple standard samples 3 are placed in the placement slots 7 on the disk 1, and then the disk 1 is transferred to the test stage 9 of the four-probe resistance tester. When the four-probe resistance tester performs the test, it can complete the continuous test of different resistance values ​​of different standard samples 3 at one time, avoiding the problem of low test efficiency caused by constantly switching standard samples 3 during the test.

[0033] The above are the basic embodiments of this utility model. Further improvements, optimizations, and limitations can be made based on the above to obtain the following embodiments:

[0034] Example 2

[0035] This embodiment is an improvement on embodiment 1. Its main structure is the same as embodiment 1, but the improvement lies in the following: to increase the friction of the peripheral wall of the disk 1 and prevent the disk 1 from falling off when moved, several protrusions 6 are provided on the peripheral wall of the disk 1. Alternatively, threads can be provided on the peripheral wall of the disk 1.

[0036] Example 3

[0037] This embodiment is an improvement on Embodiment 1. Its main structure is the same as Embodiment 1, but the improvement lies in the following: to further increase the accuracy of placing the disk 1 on the test table 9, several second positioning protrusions 5 are provided on the bottom of the disk 1, distributed around the first positioning protrusion 4. There are six second positioning blocks, allowing the operator to see the second positioning protrusions 5 on the second side of the disk 1 through the first side, ensuring that the second positioning protrusions 5 are accurately placed on the test table 9.

[0038] Example 4

[0039] This embodiment is an improvement on Embodiment 1. Its main structure is the same as Embodiment 1, but the improvement lies in the following: to further prevent damage or contamination of the standard sample 3 when moving the disc 1, a circular receiving groove 2 is provided on the first side of the disc 1, and the placement groove 7 is located at the bottom of the receiving groove 2. All standard sample 3 protrude from the placement groove 7 while remaining within the receiving groove 2.

[0040] Example 5

[0041] This embodiment is an improvement on Embodiment 1. Its main structure is the same as Embodiment 1, but the improvement lies in that all the standard samples 3 have the same size, and the diameter of the standard sample 3 is set to 19-21 mm. Alternatively, the diameter of the standard sample 3 may be 20 mm.

[0042] This utility model also provides a four-probe resistivity tester, and the following are embodiments of this four-probe resistivity tester:

[0043] Example 1

[0044] Four-probe resistivity meter, such as Figure 2 and Figure 4 As shown, the four-probe resistivity tester includes a base 8, a test platform 9 rotatably mounted on the base 8 with a fixed rotation angle, a probe assembly 12, and the aforementioned resistivity monitoring plate. The test platform 9 has a positioning hole 11 at its center, and the resistivity monitoring plate can be placed on the test platform 9. The first positioning protrusion 4 is inserted into the positioning hole 11.

[0045] A servo motor 13 is mounted on the base 8. The output shaft of the servo motor 13 is fixedly connected to the center of the bottom of the test platform 9. During the rotation of the output shaft of the servo motor 13, it can drive the test platform 9 to rotate. After the test platform 9 rotates to a suitable angle, the output shaft of the servo motor 13 stops rotating, and at this time, the angle of the test platform 9 is fixed. The servo motor 13 is conventional prior art in this field and will not be described in detail here.

[0046] The test platform 9 has a positioning hole 11 at its center. The positioning hole 11 cooperates with the first positioning protrusion 4 to fix the position of the disk 1.

[0047] The above are the basic embodiments of this utility model. Further improvements, optimizations, and limitations can be made based on the above to obtain the following embodiments:

[0048] Example 2

[0049] This embodiment is an improvement on Embodiment 1. Its main structure is the same as Embodiment 1, but the improvement lies in the following: the test platform 9 is circular, and multiple radially extending slots 10 are formed on the test platform 9, evenly distributed around its axis. The diameter of the test platform 9 is larger than the diameter of the disk 1, improving the stability of the support for the disk 1. When the test platform 9 actually tests the resistivity of the product, the product is in contact with the test platform 9, and the slots 10 provide some air venting while reducing the adhesion between the product and the test platform 9. The depth of the slots 10 is 1 / 4 to 1 / 5 of the thickness of the test platform 9, preferably 1 / 5 of the thickness of the test platform 9.

[0050] Example 3

[0051] This embodiment is an improvement on embodiment 2. Its main structure is the same as embodiment 2, but the improvement lies in the following: the second positioning protrusion 5 corresponds one-to-one with the strip groove 10. When the resistivity monitoring sheet is placed on the test platform 9, the second positioning protrusion 5 is inserted into the strip groove 10. In addition to its venting function, the strip groove 10 also has a positioning function. The first positioning protrusion 4 enters the positioning hole 11, and the second positioning protrusion 5 is correspondingly inserted into the strip groove 10, further increasing the stability of the disk 1 on the test platform 9 and preventing the disk 1 from twisting, which could lead to deviations in the test results.

[0052] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A sheet for resistivity monitoring for a four-probe resistivity tester, characterized by: The utility model provides a resistance monitor piece, which comprises a disc (1) capable of being placed on a test table (9) of a four-probe resistance tester and a plurality of standard samples (3) of different resistance values, a plurality of placing grooves (7) are formed on a first side of the disc (1), and the plurality of placing grooves (7) are uniformly distributed around an axis of the disc (1), the standard samples (3) are placed in the placing grooves (7) correspondingly, and a first positioning protrusion (4) is vertically and fixedly arranged on a second side of the disc (1), and an axis of the first positioning protrusion (4) coincides with the axis of the disc (1).

2. The sheet for resistivity monitor of four-probe resistivity tester according to claim 1, wherein: The circumferential side wall of the disc (1) is provided with a plurality of convex strips (6).

3. The sheet for resistivity monitor of four-probe resistivity tester according to claim 1, wherein: The bottom of the disc (1) is provided with a plurality of second positioning protrusions (5) which are distributed around the first positioning protrusion (4).

4. The sheet for resistivity monitor of four-probe resistivity tester according to claim 1, wherein: The first side of the disc (1) is provided with a circular accommodating groove (2), and the placing grooves (7) are formed in the bottom of the accommodating groove (2).

5. The sheet for resistivity monitor of four-probe resistivity tester according to claim 1, wherein: All the standard samples (3) have the same size, and the diameter of the standard sample (3) is 19-21 mm.

6. The sheet for resistivity monitor of four-probe resistivity tester according to claim 5, wherein: The diameter of the standard sample (3) is 20 mm.

7. A four-probe resistivity tester characterized by: The four-probe resistivity tester comprises a base (8), a test table (9) rotatably arranged on the base (8) and capable of being fixed at a rotation angle, a probe assembly (12), and the resistance monitor piece according to any one of claims 1-6, a positioning hole (11) is arranged at the center of the test table (9), the resistance monitor piece can be placed on the test table (9), and the first positioning protrusion (4) is inserted into the positioning hole (11).

8. The four-point resistivity probe of claim 7, wherein: The test table (9) is circular, a plurality of strip-shaped grooves (10) extending along the radial direction of the test table (9) are formed in the test table (9), and the strip-shaped grooves (10) are uniformly distributed around the axis of the test table (9).

9. The four-point resistivity probe of claim 8, wherein: The depth of the strip-shaped groove (10) is 1 / 4-1 / 5 of the thickness of the test table (9).

10. The four-point resistivity probe of claim 8, wherein: The second positioning protrusion (5) corresponds to the strip-shaped groove (10) one by one, and when the resistance monitor piece is placed on the test table (9), the second positioning protrusion (5) is inserted into the strip-shaped groove (10).

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