A laser lens adjusting structure of an LDI photoetching machine
By introducing a positioning mechanism and a buffer assembly into the laser lens of the lithography machine, the problems of inconvenient lens adjustment and insufficient stability have been solved, enabling flexible adjustment and stable installation, and extending the service life.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DONGGUAN HECHUAN MASCH EQUIP TECH CO LTD
- Filing Date
- 2025-10-21
- Publication Date
- 2026-07-21
AI Technical Summary
The existing laser lens structure of lithography machines is not easy to adjust and has insufficient installation stability, resulting in insignificant protection and limiting its flexibility and lifespan.
A laser lens adjustment structure including a positioning mechanism, a buffer assembly, and an optical path switching mechanism was designed. The installation stability is improved by fastening bolts and buffer springs, and the adjustment operation is achieved through multiple light and shadow reflections, thereby enhancing the adjustment and protection effect of the lens.
It achieves stable adjustment of the laser lens and multiple light and shadow reflections, improving ease of use and installation stability, and extending service life.
Smart Images
Figure CN224536343U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of LDI lithography machines, specifically to an adjustment structure for the laser lens of an LDI lithography machine. Background Technology
[0002] A lithography LDI (Lithography-In-Distribution) machine refers to a lithography machine that uses direct-to-plate (DDI) technology. Lithography machines are one of the key pieces of equipment in semiconductor chip manufacturing. Their main working principle is to transfer a designed circuit pattern onto semiconductor materials through a series of lithography processes. The use of a lithography LDI machine can improve production efficiency and stability, meeting the needs of large-scale production. However, existing lithography machine laser lenses have a fixed structure, making it inconvenient to adjust the irradiation angle as needed, thus limiting their use. Therefore, it is necessary to provide an adjustment structure that facilitates laser lens adjustment. At the same time, the existing laser lens structure does not provide sufficient protection; therefore, it is necessary to provide an adjustment structure that can improve protection and extend service life. Utility Model Content
[0003] The present invention provides an adjustment structure for the laser lens of an LDI lithography machine, which aims to solve the problems of existing lithography machine laser lenses being inconvenient to adjust and having poor installation stability.
[0004] To achieve the above objectives, this utility model provides an adjustment structure for the laser lens of an LDI lithography machine, including a mounting assembly and a lithography machine assembly; The installation component includes a positioning mechanism, the surface of which is provided with a buffer component, and the front end of which is provided with a limiting mechanism; The positioning mechanism includes a U-shaped positioning strip, with several positioning plates installed inside the positioning strip. Positioning blocks are fixedly connected to both sides of the inner wall of the positioning strip, and positioning grooves are opened on the surface of the several positioning plates. The buffer assembly includes several fastening bolts, each of which is threaded in pairs to both sides of the surface of several positioning plates. The side surfaces of the fastening bolts are provided with buffer springs. The positioning mechanism has several lithography machine components installed inside. The lithography machine components include a projection mechanism installed inside the positioning mechanism, a stabilizing mechanism installed at the rear end of the projection mechanism, an imaging hole opened on the surface of the stabilizing mechanism, a light path switching mechanism installed at the lower end of the projection mechanism, a laser illumination mechanism provided on the surface of the light path switching mechanism, and an imaging mechanism installed at the upper end of the light path switching mechanism. The lithography machine components are installed inside the positioning slot.
[0005] As a preferred embodiment of this utility model, the limiting mechanism includes an upper mounting plate and a lower mounting plate installed at the upper and lower ends of the positioning mechanism, a first fixing plate and a second fixing plate are respectively installed at the front end of the positioning mechanism, and side plates are fixedly connected to both sides of the positioning strip.
[0006] As a preferred embodiment of the present invention, the projection mechanism includes a mounting shell, a first reflector is installed inside the mounting shell, a fixing frame is provided at the rear end of the mounting shell, and a first lens is embedded inside the fixing frame.
[0007] As a preferred embodiment of the present invention, the stabilizing mechanism includes a stabilizing plate installed on the back of the fixed frame, a stabilizing plate is provided inside the stabilizing plate, a positioning plate is fixedly connected to the surface of the stabilizing plate, and a connecting plate is provided at the upper end of the positioning plate.
[0008] As a preferred embodiment of this utility model, the optical path switching mechanism includes a fixed shell installed at the lower end of the mounting shell, a fixed cover fixedly connected to the lower end of the fixed shell, a second reflector provided inside the fixed shell, a first rotating ring installed at the upper end of the fixed shell, and a second lens provided inside the first rotating ring.
[0009] As a preferred embodiment of the present invention, the laser illumination mechanism includes a laser mounted on the surface of a fixed housing, and a laser head is mounted at the end of the laser.
[0010] In a preferred embodiment of the present invention, the imaging mechanism includes a first sleeve mounted on the surface of the mounting shell, a second sleeve provided at the front end of the first sleeve, a connecting end provided between the first sleeve and the second sleeve, a grip sleeve mounted at the rear end of the first sleeve, a second rotating ring rotatably connected inside the second sleeve, a protective ring rotatably connected inside the second sleeve, and a third lens provided inside the protective ring.
[0011] In a preferred embodiment of this utility model, a gasket is installed inside the mounting shell, a rotating ring is installed inside the fixing frame, and the first lens is installed inside the rotating ring.
[0012] Compared with the prior art, the beneficial effects of this utility model are: When the laser lens is in use, the laser in the laser illumination mechanism, together with the laser head, emits a laser beam, which is then emitted through the first reflector for illumination. At this time, the light and shadow are reflected onto the surface of the first lens by the second reflector with the tilted structure in the optical path switching mechanism, together with the second lens. The first reflector with the tilted structure in the projection mechanism, together with the third lens, can achieve multiple light and shadow reflections and lens adjustment operations. Compared with the adjustment structure in the prior art, this utility model can perform adjustment operations while ensuring the stability of the laser lens through the cooperation of the above structures, thereby enhancing the practicality of the adjustment structure. When the adjustment structure is in use, the limiting mechanism in the mounting assembly can improve the installation stability of the lens. At this time, the upper mounting plate, together with the lower mounting plate, the first fixing plate and the second fixing plate, can perform a positioning and installation operation of the lens without dead angles. At the same time, the fastening bolts in the buffer assembly, together with the buffer spring, can significantly enhance the installation stability and buffer protection effect of the lens adjustment structure. Compared with the adjustment structure in the prior art, this utility model can significantly improve the protection effect through the cooperation of the above structures, thereby extending the service life of the adjustment structure. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is an anatomical diagram of the installation component structure of this utility model; Figure 3 This is a structural disassembly diagram of the projection mechanism and stabilization mechanism of this utility model; Figure 4 This is a structural disassembly diagram of the optical path switching mechanism and laser illumination mechanism of this utility model; Figure 5 This is a structural disassembly diagram of the imaging mechanism of this utility model.
[0014] In the diagram: 100, Mounting component; 101, Positioning mechanism; 102, Buffer component; 103, Limiting mechanism; 1011, Positioning strip; 1012, Positioning plate; 1013, Positioning block; 1014, Positioning groove; 1021, Fastening bolt; 1022, Buffer spring; 1031, Upper mounting plate; 1032, Lower mounting plate; 1033, First fixing plate; 1034, Second fixing plate; 1035, Side plate; 200, Lithography machine component; 201, Projection mechanism; 202, Stabilizing mechanism; 205, Imaging aperture; 206, Optical path switching mechanism; 207, Laser illumination mechanism; 208, Imaging mechanism; 2011, Mounting... 2012. Housing; 2013. First reflector; 2014. Fixing frame; 2021. First lens; 2022. Stabilizing plate; 2023. Positioning plate; 2024. Connecting plate; 2061. Fixing shell; 2062. Fixing cover; 2063. Second reflector; 2064. First rotating ring; 2065. Second lens; 2071. Laser; 2072. Laser head; 2081. First sleeve; 2082. Second sleeve; 2083. Connecting end; 2084. Grip; 2085. Second rotating ring; 2086. Protective ring; 2087. Third lens; 211. Washer; 212. Rotating ring. Detailed Implementation
[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example
[0016] Please see Figures 1-5 This utility model provides an adjustment structure for the laser lens of an LDI lithography machine, including a mounting component 100 and a lithography machine component 200; The installation component 100 includes a positioning mechanism 101, a buffer component 102 is provided on the surface of the positioning mechanism 101, and a limiting mechanism 103 is provided at the front end of the positioning mechanism 101. The positioning mechanism 101 includes a U-shaped positioning strip 1011, with several positioning plates 1012 installed inside the positioning strip 1011. Positioning blocks 1013 are fixedly connected to both sides of the inner wall of the positioning strip 1011, and positioning grooves 1014 are opened on the surface of the several positioning plates 1012. The buffer assembly 102 includes a plurality of fastening bolts 1021, which are threaded in pairs to both sides of the surface of a plurality of positioning plates 1012. The side surface of the fastening bolts 1021 is provided with buffer springs 1022. The positioning mechanism 101 houses several lithography machine components 200, including a projection mechanism 201 installed inside the positioning mechanism 101. A stabilizing mechanism 202 is installed at the rear end of the projection mechanism 201. An imaging hole 205 is opened on the surface of the stabilizing mechanism 202. A light path switching mechanism 206 is installed at the lower end of the projection mechanism 201. A laser illumination mechanism 207 is provided on the surface of the light path switching mechanism 206. An imaging mechanism 208 is installed at the upper end of the light path switching mechanism 206. The lithography machine components 200 are installed inside the positioning groove 1014.
[0017] In one specific embodiment, the mounting component 100, in conjunction with the lithography machine component 200, not only facilitates angle adjustment while ensuring the stability of the laser lens, thus enhancing the practicality of the adjustment structure, but also ensures the stability and buffer protection effect of the adjustment structure, further enhancing its practicality. In use, the laser 2071 in the laser illumination mechanism 207, in conjunction with the laser head 2072, emits a laser beam, which is then emitted through the first reflecting mirror 2012 in the projection mechanism 201 for illumination. Next, the light and shadow are reflected onto the surface of the first lens 2014 by the tilted second reflecting mirror 2063 in the optical path switching mechanism 206, in conjunction with the second lens 2065. The tilted first reflecting mirror 2012 in the projection mechanism 201, in conjunction with the third lens 2087, enables multiple light and shadow reflections and lens adjustment operations, further enhancing the practicality of the adjustment structure. Simultaneously, the buffer component 102 in the mounting component 100, in conjunction with the limiting mechanism 103, significantly improves the installation stability of the laser lens, thereby extending the service life of the adjustment structure.
[0018] Please see Figure 2 The limiting mechanism 103 includes an upper mounting plate 1031 and a lower mounting plate 1032 installed at the upper and lower ends of the positioning mechanism 101. A first fixing plate 1033 and a second fixing plate 1034 are respectively installed at the front end of the positioning mechanism 101.
[0019] In one specific embodiment, the upper mounting plate 1031, together with the lower mounting plate 1032, the first fixing plate 1033, the second fixing plate 1034, and the side plate 1035, can significantly improve the protection effect and installation stability of the laser lens, thereby improving ease of use.
[0020] Please see Figures 3-5 The projection mechanism 201 includes a mounting shell 2011, a first reflector 2012 is installed inside the mounting shell 2011, a fixing frame 2013 is provided at the rear end of the mounting shell 2011, and a first lens 2014 is embedded inside the fixing frame 2013.
[0021] In one specific embodiment, the first reflector 2012, in conjunction with the first lens 2014, can perform a preliminary reflection angle adjustment operation, thereby improving the ease of use of the adjustment structure.
[0022] Please see Figures 3-5 The stabilizing mechanism 202 includes a stabilizing plate 2021 installed on the back of the fixed frame 2013. The stabilizing plate 2021 has a stabilizing piece 2022 inside. A positioning piece 2023 is fixedly connected to the surface of the stabilizing piece 2022. A connecting piece 2024 is provided at the upper end of the positioning piece 2023.
[0023] In one specific embodiment, the fixing frame 2013, together with the stabilizing plate 2022 and the positioning plate 2023, can enhance the installation and fastening of the laser lens.
[0024] Please see Figures 3-5 The optical path switching mechanism 206 includes a fixed housing 2061 installed at the lower end of the mounting housing 2011, a fixed cover 2062 fixedly connected to the lower end of the fixed housing 2061, a second reflector 2063 provided inside the fixed housing 2061, a first rotating ring 2064 installed at the upper end of the fixed housing 2061, and a second lens 2065 provided inside the first rotating ring 2064.
[0025] In one specific embodiment, the fixed housing 2061 and the fixed cover 2062 can enhance the protection of the second reflector 2063, and the second reflector 2063 and the second lens 2065 can further perform the illumination angle adjustment operation to enhance the practicality of the laser lens.
[0026] Please see Figures 3-5 The laser illumination mechanism 207 includes a laser 2071 mounted on the surface of a fixed housing 2061, and a laser head 2072 is mounted at the end of the laser 2071.
[0027] In one specific embodiment, the laser 2071, in conjunction with the laser head 2072, can perform laser irradiation operations, improving the ease of use of the lithography machine.
[0028] Please see Figures 3-5 The imaging mechanism 208 includes a first sleeve 2081 mounted on the surface of the mounting housing 2011, a second sleeve 2082 at the front end of the first sleeve 2081, a connecting end 2083 between the first sleeve 2081 and the second sleeve 2082, a grip 2084 mounted at the rear end of the first sleeve 2081, a second rotating ring 2085 rotatably connected inside the second sleeve 2082, a protective ring 2086 rotatably connected inside the second sleeve 2082, and a third lens 2087 disposed inside the protective ring 2086.
[0029] In one specific embodiment, the first sleeve 2081, in conjunction with the second sleeve 2082, can enhance the installation stability of the third lens 2087, and the protective ring 2086 can extend the service life of the laser lens.
[0030] Please see Figures 3-5 A gasket 211 is installed inside the mounting housing 2011, a rotating ring 212 is installed inside the fixing frame 2013, and the first lens 2014 is installed inside the rotating ring 212.
[0031] In one specific embodiment, the rotating ring 212, in conjunction with the washer 211, can enhance the protection of the first lens 2014.
[0032] Working principle: In use, the laser 2071 in the laser illumination mechanism 207, together with the laser head 2072, emits a laser beam, which is simultaneously emitted through the first reflector 2012 in the projection mechanism 201 for illumination. Finally, the light and shadow are reflected onto the surface of the first lens 2014 by the second reflector 2063 with its tilted structure in the optical path switching mechanism 206, together with the second lens 2065. The first reflector 2012 with its tilted structure in the projection mechanism 201, together with the third lens 2087, can achieve multiple light and shadow reflections and lens adjustment operations, thereby enhancing the practicality of the adjustment structure. Then, the buffer component 102 in the mounting component 100, together with the limiting mechanism 103, can significantly improve the installation stability of the laser lens, thereby extending the service life of the adjustment structure.
[0033] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.
[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A laser lens adjustment structure for an LDI lithography machine, characterized in that, include: The mounting assembly (100) includes a positioning mechanism (101), a buffer assembly (102) is provided on the surface of the positioning mechanism (101), and a limiting mechanism (103) is provided at the front end of the positioning mechanism (101). The positioning mechanism (101) includes a U-shaped positioning strip (1011), and several positioning plates (1012) are installed inside the positioning strip (1011). Positioning blocks (1013) are fixedly connected to both sides of the inner wall of the positioning strip (1011), and positioning grooves (1014) are opened on the surface of the several positioning plates (1012). The buffer assembly (102) includes a plurality of fastening bolts (1021), each of the plurality of fastening bolts (1021) being threaded in pairs to both sides of the surface of a plurality of positioning plates (1012), and the side surface of the fastening bolts (1021) is provided with a buffer spring (1022). The positioning mechanism (101) is equipped with a plurality of lithography machine components (200). The plurality of lithography machine components (200) include a projection mechanism (201) installed inside the positioning mechanism (101). A stabilizing mechanism (202) is installed at the rear end of the projection mechanism (201). An imaging hole (205) is opened on the surface of the stabilizing mechanism (202). A light path switching mechanism (206) is installed at the lower end of the projection mechanism (201). A laser illumination mechanism (207) is provided on the surface of the light path switching mechanism (206). An imaging mechanism (208) is installed at the upper end of the light path switching mechanism (206). The lithography machine components (200) are installed inside the positioning groove (1014).
2. The laser lens adjustment structure according to claim 1, characterized in that: The limiting mechanism (103) includes an upper mounting plate (1031) and a lower mounting plate (1032) installed at the upper and lower ends of the positioning mechanism (101). The front end of the positioning mechanism (101) is respectively equipped with a first fixing plate (1033) and a second fixing plate (1034). Both sides of the positioning strip (1011) are fixedly connected with side plates (1035).
3. The laser lens adjustment structure according to claim 2, characterized in that: The projection mechanism (201) includes a mounting shell (2011), a first reflector (2012) is installed inside the mounting shell (2011), and a fixing frame (2013) is provided at the rear end of the mounting shell (2011), and a first lens (2014) is embedded inside the fixing frame (2013).
4. The laser lens adjustment structure according to claim 1, characterized in that: The stabilizing mechanism (202) includes a stabilizing plate (2021) installed on the back of the fixed frame (2013). The stabilizing plate (2021) has a stabilizing piece (2022) inside. A positioning piece (2023) is fixedly connected to the surface of the stabilizing piece (2022). A connecting piece (2024) is provided at the upper end of the positioning piece (2023).
5. The laser lens adjustment structure according to claim 3, characterized in that: The optical path switching mechanism (206) includes a fixed shell (2061) installed at the lower end of the mounting shell (2011). A fixed cover (2062) is fixedly connected to the lower end of the fixed shell (2061). A second reflector (2063) is provided inside the fixed shell (2061). A first rotating ring (2064) is installed at the upper end of the fixed shell (2061). A second lens (2065) is provided inside the first rotating ring (2064).
6. The laser lens adjustment structure according to claim 5, characterized in that: The laser illumination mechanism (207) includes a laser (2071) mounted on the surface of a fixed housing (2061), and a laser head (2072) is mounted at the end of the laser (2071).
7. The laser lens adjustment structure according to claim 3, characterized in that: The imaging mechanism (208) includes a first sleeve (2081) mounted on the surface of the mounting shell (2011), a second sleeve (2082) at the front end of the first sleeve (2081), a connecting end (2083) between the first sleeve (2081) and the second sleeve (2082), a grip (2084) mounted at the rear end of the first sleeve (2081), a second rotating ring (2085) rotatably connected inside the second sleeve (2082), a protective ring (2086) rotatably connected inside the second sleeve (2082), and a third lens (2087) inside the protective ring (2086).
8. The laser lens adjustment structure according to claim 3, characterized in that: A gasket (211) is installed inside the mounting housing (2011), a rotating ring (212) is installed inside the fixing frame (2013), and the first lens (2014) is installed inside the rotating ring (212).