A laser hydrogen fluoride thermostat device

Abstract

The utility model provides a kind of laser hydrogen fluoride constant temperature device, it is related to the constant temperature equipment field for laser hydrogen fluoride gas analyzer, including detection component, including the optical gas chamber for providing gas detection space, optical gas chamber includes the shell of outside, the inner container located in shell interior, the interlayer between shell and inner container, and the end cap located in shell both sides, and inner container and end cap fixed connection, temperature control component includes the PID controller for temperature regulation, with the electric heater of inner container inner chamber temperature rise;The utility model realizes the accurate control to the temperature in optical gas chamber by the collaborative work of temperature control component, PID controller according to the real-time data of temperature sensor feedback, dynamically adjusts the output power of electric heater and heat tracing band, ensure that inner container and interlayer space maintain constant temperature range, effectively avoid the hydrogen fluoride gas absorption peak deviation problem caused by temperature fluctuation, significantly improve the measurement stability of laser hydrogen fluoride gas analyzer.

Description

Technical Field

[0001] This utility model belongs to the field of constant temperature equipment for laser hydrogen fluoride gas analyzers, specifically a laser hydrogen fluoride constant temperature device. Background Technology

[0002] The laser hydrogen fluoride gas analyzer is an online analytical instrument used to detect the concentration of hydrogen fluoride (HF) gas. It is mainly based on tunable semiconductor laser absorption spectroscopy (TDLAS) technology and cavity ring-down spectroscopy (CRDS) technology. It can accurately analyze the gas composition and concentration and is widely used in environmental monitoring, semiconductor manufacturing and scientific research experiments. The laser hydrogen fluoride gas analyzer mainly consists of a laser emitter, a receiver, an optical chamber, a control host, and auxiliary devices. The gas enters the optical chamber, and the laser emitter emits a laser of a specific wavelength. The receiver captures the attenuation signal of the laser after it passes through the gas, and the signal is processed by a digital lock-in amplifier to extract concentration information. However, in actual use, temperature fluctuations in the optical chamber can cause the absorption peak center of hydrogen fluoride gas to shift and the absorption linewidth to broaden. This affects the matching degree between the laser wavelength and the gas absorption peak, resulting in decreased sensitivity and making it impossible to accurately measure the gas concentration. Currently, the temperature in the chamber is mainly maintained by a stable gas flow of the gas being detected. If the gas flow rate of the gas being detected fluctuates, the temperature uniformity will be disrupted, causing temperature fluctuations in the chamber and affecting the accuracy of the measurement results.

[0003] In summary, this invention provides a laser hydrogen fluoride constant temperature device to solve the above problems. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides the following technical solution: A laser-controlled hydrogen fluoride thermostat includes a detection component comprising an optical chamber for providing a gas detection space, the optical chamber including an outer shell, an inner liner located inside the outer shell, a sandwich layer located between the outer shell and the inner liner, and end caps located on both sides of the outer shell, with the inner liner and the end caps fixedly connected. A temperature control component includes a PID controller for temperature regulation, an electric heater for heating the inner cavity of the inner liner, a heating tape for heating the inner cavity of the sandwich layer, and a temperature sensor for temperature detection.

[0005] Furthermore, in this invention, the detection component also includes a laser emitter and a laser receiver located on the front and back of the outer shell, respectively. Both the laser emitter and the laser receiver are fixedly connected to the outer shell, and one end of each laser emitter and laser receiver extends into the inner cavity of the inner liner.

[0006] Furthermore, in this invention, one-way solenoid valves are installed on the surfaces of both end caps, and the one-way solenoid valves are connected to the inner cavity of the inner liner. The end caps are fixedly connected to the outer shell by bolts.

[0007] Furthermore, in this invention, the electric heater is fixed to one end of the inner cavity of the liner, and the heat tracing cable is wrapped around the surface of the liner.

[0008] Furthermore, this invention also includes a support frame for supporting the detection component, the detection component being fixed to the top of the support frame, and a main unit being fixedly connected to the inner cavity of the support frame, and the main unit being electrically connected to the laser emitter and the laser receiver.

[0009] Furthermore, in this invention, the PID controller is fixed to the surface of the support frame, the output end of the temperature sensor is electrically connected to the input end of the PID controller, and the output end of the PID controller is electrically connected to the input ends of the electric heater and the heat tracing cable, respectively.

[0010] Furthermore, in this invention, two sets of temperature sensors are provided, both of which are fixed to the top of the outer shell, and the detection ends of the two sets of temperature sensors respectively penetrate into the inner liner and the inner cavity of the interlayer.

[0011] Beneficial effects: This utility model has the following beneficial effects: This invention achieves precise temperature control within the optical chamber through the coordinated operation of temperature control components. The PID controller dynamically adjusts the output power of the electric heater and the heat tracing cable based on real-time data from the temperature sensor, ensuring that the inner liner and interlayer space maintain a constant temperature range. This effectively avoids the problem of hydrogen fluoride gas absorption peak shift caused by temperature fluctuations, significantly improving the measurement stability of the laser hydrogen fluoride gas analyzer. Even when there are brief fluctuations in the detected gas flow rate, the temperature uniformity inside the chamber can still be maintained through rapid temperature adjustment, thereby ensuring the accuracy and reliability of the gas concentration detection results. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the main structure of this utility model; Figure 2 This is a schematic diagram of the main structure of the optical air cell of this utility model; Figure 3 This is a cross-sectional structural schematic diagram of the optical air cell of this utility model; Figure 4 This is a schematic diagram of the connection structure between the inner liner of this utility model and the laser emitter and laser receiver; Figure 5 This is a front view cross-sectional structural diagram of the optical air chamber of this utility model.

[0013] In the picture: 100. Detection component; 110. Optical chamber; 111. Outer shell; 112. Inner liner; 113. Interlayer; 114. End cap; 120. Laser emitter; 130. Laser receiver; 140. One-way solenoid valve; 150. Main unit; 200. Temperature control component; 210. PID controller; 220. Electric heater; 230. Heating tape; 240. Temperature sensor; 300. Support frame. Detailed Implementation

[0014] To better understand the technical content of this utility model, specific embodiments are described below in conjunction with the accompanying drawings. Various aspects of this utility model are described in this disclosure with reference to the accompanying drawings, which illustrate numerous illustrative embodiments. The embodiments of this disclosure are not necessarily defined to include all aspects of this utility model. It should be understood that the various concepts and embodiments described above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed in this utility model are not limited to any particular implementation. Furthermore, some aspects of this utility model can be used alone or in any suitable combination with other aspects disclosed in this utility model.

[0015] Example 1 like Figure 1-5 As shown, this is the first embodiment of the present invention. This embodiment provides a laser hydrogen fluoride constant temperature device, including a detection component 100, which includes an optical chamber 110 for providing a gas detection space. The optical chamber 110 includes an outer shell 111, an inner liner 112 located inside the outer shell 111, a sandwich layer 113 located between the outer shell 111 and the inner liner 112, and end caps 114 located on both sides of the outer shell 111. The inner liner 112 and the end caps 114 are fixedly connected. The temperature control component 200 includes a PID controller 210 for temperature regulation, an electric heater 220 for heating the inner cavity of the inner liner 112, a heating cable 230 for heating the inner cavity of the sandwich layer 113, and a temperature sensor 240 for temperature detection.

[0016] like Figure 1-5As shown, the optical gas chamber 110 in the detection component 100 adopts a double-layer design, consisting of an inner liner 112, an outer shell 111, and a sandwich layer 113. It is used to contain gas and realize laser penetration detection. The sandwich layer 113 is also filled with aerogel or vacuum insulation board to improve the heat preservation performance. The temperature control component 200 consists of a PID controller 210, an electric heater 220, a heating tape 230, and a temperature sensor 240. It is used to realize dual temperature control of the inner liner 112 and the sandwich layer 113. The electric heater 220 in the inner liner 112 directly heats the inner cavity of the inner liner 112. The heating tape 230 sets a temperature field around the inner liner 112 to reduce the temperature difference between the inside and outside and prevent heat loss, thereby forming a constant temperature barrier. It can effectively suppress the temperature gradient caused by changes in the external environment or fluctuations in gas flow and maintain the temperature uniformity inside the inner liner 112. Through dual temperature control and temperature feedback, the temperature inside the optical gas chamber 110 is stably controlled.

[0017] Example 2 Reference Figure 1-5 This is the second embodiment of the present invention, which is based on the previous embodiment.

[0018] In this embodiment, the detection component 100 also includes a laser emitter 120 and a laser receiver 130 located on the front and back of the outer shell 111. Both the laser emitter 120 and the laser receiver 130 are fixedly connected to the outer shell 111, and one end of both the laser emitter 120 and the laser receiver 130 extends into the inner cavity of the inner liner 112.

[0019] Both end caps 114 are equipped with one-way solenoid valves 140, and the one-way solenoid valves 140 are connected to the inner cavity of the inner liner 112. The end caps 114 are fixedly connected to the outer shell 111 by bolts.

[0020] An electric heater 220 is fixed to one end of the inner cavity of the inner liner 112, and a heat tracing cable 230 is wrapped around the surface of the inner liner 112.

[0021] It also includes a support frame 300 for supporting the detection component 100. The detection component 100 is fixed to the top of the support frame 300. The inner cavity of the support frame 300 is also fixedly connected to the host 150, and the host 150 is electrically connected to the laser emitter 120 and the laser receiver 130.

[0022] The PID controller 210 is fixed to the surface of the support frame 300. The output terminal of the temperature sensor 240 is electrically connected to the input terminal of the PID controller 210. The output terminal of the PID controller 210 is electrically connected to the input terminals of the electric heater 220 and the heat tracing cable 230, respectively.

[0023] Two sets of temperature sensors 240 are provided, both of which are fixed to the top of the outer shell 111. The detection ends of the two sets of temperature sensors 240 extend into the inner liner 112 and the inner cavity of the interlayer 113, respectively.

[0024] like Figure 1-5 As shown, the end cap 114 seals both ends of the inner liner 112 and is fixed with bolts to ensure airtightness. The laser emitter 120 and the laser receiver 130 are fixed on the front and back sides of the outer shell 111 of the optical gas chamber 110. The laser penetrates the cavity of the inner liner 112 to detect the concentration of hydrogen fluoride gas. The gas absorbs the laser energy of a specific wavelength, and the gas concentration is inferred from the absorption intensity. The one-way solenoid valve 140 is installed on the surface of the end cap 114 to control the gas inlet and outlet, realizing automatic sample injection and exhaust. Two sets of one-way solenoid valves 140 are provided, one for gas inlet and one for gas exhaust. The main unit 150 is electrically connected to the laser emitter 120 and the laser receiver 130 and is responsible for laser driving and signal processing.

[0025] In use, the one-way solenoid valve 140 is connected to the external gas pipe to control the entry of hydrogen fluoride gas into the inner liner 112. The main unit 150 first activates the laser emitter 120 to emit a laser beam of a specific wavelength. The laser beam penetrates the hydrogen fluoride gas in the inner liner 112. The gas absorbs the laser, causing the laser intensity to attenuate. The laser receiver 130 is responsible for capturing the attenuated laser signal after penetrating the gas and converting it into an electrical signal for transmission to the main unit 150. The digital lock-in amplifier built into the main unit 150 processes the electrical signal and extracts information related to the concentration of hydrogen fluoride gas. Meanwhile, the temperature sensor 240 monitors the temperature of the inner liner 112 and the interlayer 113 in real time and feeds the data back to the PID controller 210. The PID controller 210 dynamically adjusts the output power of the electric heater 220 and the heating tape 230 according to the preset temperature range and real-time temperature data to ensure that the inner liner 112 and the interlayer 113 maintain a constant temperature. When the gas flow fluctuates, the PID controller 210 can respond quickly and maintain the uniformity of the internal temperature of the gas chamber by adjusting the working state of the electric heater 220 and the heating tape 230, thereby ensuring the accuracy and reliability of the gas concentration detection results and ensuring the stability of the detection environment.

[0026] All standard parts used in this application can be purchased from the market, and can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art. The control method is automatic control through a controller. The control circuit of the controller can be implemented by simple programming by those skilled in the art and is common knowledge in the field. Since this application is mainly used to protect mechanical devices, the control method and circuit connection will not be explained in detail in this application.

[0027] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Those skilled in the art to which this invention pertains can make various modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this invention shall be determined by the claims.

Claims

1. A laser-controlled hydrogen fluoride thermostat, characterized in that: include, The detection assembly (100) includes an optical gas chamber (110) for providing a gas detection space. The optical air chamber (110) includes an outer shell (111), an inner liner (112) located inside the outer shell (111), a sandwich (113) located between the outer shell (111) and the inner liner (112), and end caps (114) located on both sides of the outer shell (111), and the inner liner (112) and the end caps (114) are fixedly connected. The temperature control assembly (200) includes a PID controller (210) for temperature regulation, an electric heater (220) for heating the inner cavity of the inner liner (112), a heating cable (230) for heating the inner cavity of the interlayer (113), and a temperature sensor (240) for temperature detection.

2. The laser hydrogen fluoride constant temperature device as described in claim 1, characterized in that: The detection component (100) also includes a laser emitter (120) and a laser receiver (130) located on the front and back of the outer shell (111), the laser emitter (120) and the laser receiver (130) being fixedly connected to the outer shell (111), and one end of the laser emitter (120) and the laser receiver (130) penetrating into the inner cavity of the inner liner (112).

3. The laser hydrogen fluoride constant temperature device as described in claim 1, characterized in that: Both end caps (114) are equipped with one-way solenoid valves (140), and the one-way solenoid valves (140) are connected to the inner cavity of the inner liner (112). The end caps (114) are fixedly connected to the outer shell (111) by bolts.

4. The laser hydrogen fluoride constant temperature device as described in claim 1, characterized in that: The electric heater (220) is fixed to one end of the inner cavity of the inner liner (112), and the heat tracing cable (230) is wrapped around the surface of the inner liner (112).

5. The laser hydrogen fluoride constant temperature device as described in claim 1, characterized in that: It also includes a support frame (300) for supporting the detection component (100), the detection component (100) being fixed to the top of the support frame (300), the inner cavity of the support frame (300) being fixedly connected to a host (150), and the host (150) being electrically connected to a laser emitter (120) and a laser receiver (130).

6. The laser hydrogen fluoride constant temperature device as described in claim 1, characterized in that: The PID controller (210) is fixed to the surface of the support frame (300), the output end of the temperature sensor (240) is electrically connected to the input end of the PID controller (210), and the output end of the PID controller (210) is electrically connected to the input ends of the electric heater (220) and the heat tracing cable (230).

7. The laser hydrogen fluoride constant temperature device as described in claim 1, characterized in that: Two sets of temperature sensors (240) are provided, both of which are fixed to the top of the outer shell (111). The detection ends of the two sets of temperature sensors (240) penetrate into the inner liner (112) and the inner cavity of the interlayer (113), respectively.

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