Ion source metal mounting mechanism for ion implanter

Abstract

The utility model discloses a kind of ion source metal mounting mechanisms for ion implanter, it is related to the technical field of ion implanter, including ion implanter, implanter assembly seat, outer machine assembly seat and ion source outer machine, the front end of the ion implanter is slightly above middle and is provided with outer machine installation mouth, the outer surface of outer machine installation mouth is fixedly connected with implanter assembly seat by surrounding welding, the front end of implanter assembly seat is fixedly connected with outer machine assembly seat by bolt with surrounding groove sealing ring clamping groove in middle, the front end of outer machine assembly seat is fixedly connected with ion source outer machine by surrounding clamping fixed connection in middle penetration, the outer surface of ion source outer machine rear side is fixedly connected with outer machine hoop by surrounding clamping, the inner surface between the rear end of outer machine assembly seat and the groove of assembly sealing ring clamping groove is fixedly connected with assembly sealing ring by surrounding clamping.

Description

Technical Field

[0001] This utility model relates to the field of ion implanter technology, specifically to an ion source metal mounting mechanism for an ion implanter. Background Technology

[0002] An ion implanter is a specialized piece of equipment used in semiconductor manufacturing processes. Its main function is to implant ions into semiconductor materials to alter their electrical properties. Ion implantation is widely used in the manufacture of integrated circuits and other electronic components.

[0003] Ion implanters are core equipment in semiconductor manufacturing, and their ion source components need to be subjected to high temperatures of 200-400℃ and 10... -7 -10 -9 The ion implantation machine operates in a high vacuum environment (Pa) and requires an ion beam implantation direction deviation of ≤0.1°. However, existing mounting mechanisms often use single pin positioning or magnetic positioning, resulting in radial gaps of 0.05-0.1mm, leading to ion beam direction deviations exceeding 0.2° and affecting the doping uniformity of semiconductor devices. Therefore, those skilled in the art have provided an ion source metal mounting mechanism for ion implanters to solve the problems mentioned in the background art. Utility Model Content

[0004] The purpose of this invention is to provide an ion source metal mounting mechanism for an ion implanter to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] An ion source metal mounting mechanism for an ion implanter includes an ion implanter, an implanter mounting base, an external unit mounting base, and an ion source external unit. The ion implanter has an external unit mounting port located slightly above the center of its front end. The implanter mounting base is welded and fixedly connected to the outer surface of the external unit mounting port. The front end of the implanter mounting base has a groove around its periphery for a mounting sealing ring. The external unit mounting base is bolted to the center of the front end of the implanter mounting base for a sealing fit. The external unit is locked and fixedly connected to the outer periphery of the center of the front end of the external unit mounting base. An external unit hoop is locked and fixedly connected to the rear side of the outer surface of the ion source external unit. The inner surface of the groove around the rear periphery of the external unit mounting base is locked and fixedly connected to the inner surface of the mounting sealing ring groove.

[0007] As a further embodiment of this utility model: the front end of the ion implanter is located on the upper left and right sides of the outer surface of the implanter mounting base, and two mounting positioning rods are welded and fixedly connected. The mounting positioning rods are provided with positioning screw holes at the middle of the front end of each mounting positioning rod.

[0008] As a further embodiment of this utility model: the outer surface of the outdoor unit mounting base is integrally welded and fixedly connected to the left and right sides of the mounting base, and there are two mounting positioning blocks, and a positioning screw hole is opened at the middle of the front end of each mounting positioning block.

[0009] As a further improvement of this utility model: the front middle through-hole of the assembly positioning rod is bolted to the inner surface of the front middle through-hole of the assembly positioning block, and the number of assembly positioning bolts is two.

[0010] As a further improvement of this utility model, locking blocks are integrally welded and fixedly connected to the upper and lower sides of the outer surfaces of the injection machine mounting base and the external machine mounting base, and the number of locking blocks is four.

[0011] As a further improvement of this utility model: a locking screw hole is provided at the middle of the front end of the locking block, and the number of locking screw holes is four, and the inner surface of each locking screw hole is threaded around it.

[0012] As a further embodiment of this utility model: the inner surface of the locking screw hole is threadedly connected to a locking bolt, and there are two locking bolts, while the outer surface of the locking bolts is threaded around them.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. The operator needs to install the ion source outdoor unit at the outdoor unit mounting port located slightly above the center of the front end of the ion implanter. The outer surface of the outdoor unit mounting port is welded and fixedly connected to the implanter mounting base. The front periphery of the implanter mounting base has a groove for the mounting seal ring. The front center of the implanter mounting base is bolted to the outdoor unit mounting base. The front center through-hole of the outdoor unit mounting base is clamped and fixedly connected to the ion source outdoor unit. The inner surface of the groove around the rear periphery of the outdoor unit mounting base is clamped and fixedly connected to the inner surface of the mounting seal ring groove. The operator installs the mounting seal ring, which is made of fluororubber and uses its interference fit to fill the gap between the implanter mounting base and the outdoor unit mounting base, blocking the gas leakage path. In addition, the rear side of the outer surface of the ion source outdoor unit is clamped and fixedly connected to an outdoor unit clamp ring, which is an elastic clamp. It provides circumferential constraint force, forming a three-dimensional constraint system to ensure the long-term stability of the ion source external unit under high temperature and high vacuum environments. The ion implanter's mounting base and the ion source external unit's mounting base are connected through a standardized interface to achieve millimeter-level precision positioning. The mounting seal ring slot has an annular groove structure, and its inner diameter and depth are perfectly matched with the size of the fluororubber mounting seal ring. This allows the seal ring to be precisely fixed between the mating surfaces of the two mounting bases, preventing the seal ring from shifting or twisting during assembly. Compared to traditional slotless designs, this design is less prone to local seal failure due to seal ring misalignment. The external unit's clamp ring helps to better control the operating temperature of the ion source external unit, reducing structural deformation caused by thermal expansion, thereby improving the ion source's lifespan and stability. This effectively avoids the problem mentioned in the background technology that "existing mounting mechanisms mostly use single pin positioning or magnetic positioning, with radial gaps reaching 0.05-0.1mm, resulting in ion beam direction deviations exceeding 0.2°, affecting the doping uniformity of semiconductor devices."

[0015] 2. When tightening the assembly positioning bolts, the locking blocks, which are integrally welded and fixed to the upper and lower sides of the outer surfaces of the injection machine assembly base and the outdoor unit assembly base, will be tightly connected together. The locking screw holes at the center of the front end of the locking blocks will tightly overlap, and the threads on the inner surfaces of the locking screw holes will form a threaded channel. When the locking bolts are reinserted and tightened, the threads on the outer surface of the locking bolts will engage with the threads on the inner surface of the locking screw holes, thereby locking the injection machine assembly base and the outdoor unit assembly base. Through the combined design of the assembly positioning rod and the assembly positioning blocks, the relative positions between the various components can be effectively ensured. It provides necessary fixation and support, enhances the structural stability of the entire system, ensures the positioning of the ion source, reduces errors in the assembly process, and improves the accuracy of ion implantation. By using locking blocks and locking screw holes, it is possible to achieve quick and reliable assembly and disassembly, simplifying maintenance and replacement processes, saving time and human resources. The use of locking bolts improves the firmness of the connection, prevents loosening caused by external forces such as vibration during operation, and ensures the safe operation of the equipment. The use of positioning and locking multiple fixed points can effectively disperse stress and reduce the risk of failure of various parts of the equipment during operation. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a metal mounting mechanism for an ion source used in an ion implanter.

[0017] Figure 2 This is a schematic diagram of the mounting port in a metal mounting mechanism for an ion source used in an ion implanter.

[0018] Figure 3 This is a schematic diagram of the overall structure of the ion source external unit in a metal mounting mechanism for an ion source used in an ion implanter.

[0019] Figure 4 This is a schematic diagram of the rear view of the ion source external unit in a metal mounting mechanism for an ion source in an ion implanter.

[0020] In the diagram: 1-Ion implanter, 2-Outdoor unit mounting port, 3-Ion implanter assembly base, 4-Assembly sealing ring slot, 5-Outdoor unit assembly base, 6-Ion source outdoor unit, 7-Outdoor unit clamp, 8-Assembly sealing ring, 9-Assembly positioning rod, 10-Assembly positioning block, 11-Assembly positioning bolt, 12-Locking block, 13-Locking screw hole, 14-Locking bolt. Detailed Implementation

[0021] Please see Figures 1-4In this embodiment of the present invention, an ion source metal mounting mechanism for an ion implanter includes an ion implanter 1, an external unit mounting port 2, an implanter mounting base 3, an assembly sealing ring groove 4, an external unit mounting base 5, an ion source external unit 6, an external unit clamp 7, an assembly sealing ring 8, an assembly positioning rod 9, an assembly positioning block 10, an assembly positioning bolt 11, a locking block 12, a locking screw hole 13, and a locking bolt 14. The external unit mounting port 2 is located at the upper middle of the front end of the ion implanter 1, and the implanter mounting base 3 is fixedly connected to the outer surface of the external unit mounting port 2 by welding. The front end of the injection machine mounting base 3 has a groove around the periphery for a mounting sealing ring slot 4. The front end of the injection machine mounting base 3 is bolted to the outer unit mounting base 5 at the middle sealing joint. The front end of the outer unit mounting base 5 is through the middle and is fixedly connected to the outer periphery of the ion source outer unit 6. The outer surface of the outer surface of the ion source outer unit 6 is fixedly connected to the outer unit hoop 7 around the rear side. The inner surface of the groove around the rear end of the outer unit mounting base 5 is fixedly connected to the inner surface of the mounting sealing ring slot 4 with a mounting sealing ring 8. The front end of the ion implanter 1 is located on the upper left and right sides of the injection machine mounting base. The outer surface of the unit 3 is welded and fixedly connected to the left and right sides with two assembly positioning rods 9. Each assembly positioning rod 9 has a positioning screw hole at the center of its front end. The outer surface of the unit 5 is integrally welded and fixedly connected to two assembly positioning blocks 10. Each assembly positioning block 10 has a positioning screw hole at the center of its front end. Assembly positioning bolts 11 are bolted and fixedly connected between the center penetration point of the front end of the assembly positioning rod 9 and the inner surface of the center penetration point of the front end of the assembly positioning block 10. The number of positioning bolts 11 is two. Locking blocks 12 are integrally welded and fixedly connected to the upper and lower sides of the outer surfaces of the injection machine mounting base 3 and the external machine mounting base 5. The number of locking blocks 12 is four. A locking screw hole 13 is opened at the middle of the front end of the locking block 12. The number of locking screw holes 13 is four. The inner surface of the locking screw hole 13 is threaded around. Locking bolts 14 are fixedly connected to the inner surface of the locking screw hole 13 at the threaded contact. The number of locking bolts 14 is two. The outer surface of the locking bolts 14 is threaded around.

[0022] The working principle of this utility model is as follows: When using this utility model, firstly, the operator needs to install the ion source outdoor unit 6 at the outdoor unit mounting port 2 located slightly above the center of the front end of the ion implanter 1. The outer surface of the outdoor unit mounting port 2 is welded and fixedly connected to the implanter assembly base 3. The front periphery of the implanter assembly base 3 has a groove for the mounting seal ring 4. The front center sealing joint of the implanter assembly base 3 is bolted and fixedly connected to the outdoor unit assembly base 5. The outer periphery of the front center through-hole of the outdoor unit assembly base 5 is locked and fixedly connected to the ion source outdoor unit 6. The inner surface of the groove around the rear periphery of the outdoor unit assembly base 5 is locked and fixedly connected to the inner surface of the mounting seal ring groove 4. The operator installs the mounting seal ring 8 to the outer periphery of the ion source outdoor unit 6, ensuring a tight fit with the outer surface of the implanter assembly base 3. The mounting seal ring 8 is made of fluororubber, and through its interference fit, it fills the gap between the implanter assembly base 3 and the outdoor unit assembly base 5, blocking the gas leakage path. When the components are tightly aligned, the assembly positioning block 10 of the outdoor unit mounting base 5 will engage with the outer surface of the assembly positioning rod 9 and insert the assembly positioning bolt 11, thus fixing the outdoor unit mounting base 5, which carries the ion source outdoor unit 6, onto the injector mounting base 3 of the ion implanter 1. Simultaneously, when the assembly positioning bolt 11 is tightened, the locking blocks 12, which are integrally welded and fixedly connected to the upper and lower sides of the outer surfaces of the injector mounting base 3 and the outdoor unit mounting base 5, will be tightly connected together. The locking screw hole 13 at the center of the front end of the locking block 12 will tightly overlap, and the locking screw... The threads on the inner surface of the hole 13 form a threaded channel. When the locking bolt 14 is inserted and tightened again, the threads on the outer surface of the locking bolt 14 will engage with the threads on the inner surface of the locking bolt hole 13, thereby locking the injection machine assembly 3 and the outdoor unit assembly 5. In addition, the outdoor unit hoop 7 is fixedly connected to the rear side of the outer surface of the ion source outdoor unit 6. The outdoor unit hoop 7 adopts an elastic clamp and provides circumferential constraint force to form a three-dimensional constraint system to ensure the long-term stability of the ion source outdoor unit 6 under high temperature and high vacuum environment.

[0023] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A metal mounting mechanism for an ion source in an ion implanter, comprising an ion implanter (1), an implanter mounting base (3), an external unit mounting base (5), and an ion source external unit (6), characterized in that, The ion implanter (1) has an external unit mounting port (2) at the upper middle of its front end. The external unit mounting port (2) is welded and fixedly connected to the implanter assembly base (3) around its outer surface. The front end of the implanter assembly base (3) has a groove for the assembly sealing ring (4) around its outer periphery. The front end of the implanter assembly base (3) is bolted and fixedly connected to the external unit assembly base (5) at the middle sealing fit. The front end of the external unit assembly base (5) is clamped and fixedly connected to the ion source external unit (6) around its outer rear side. The outer surface of the ion source external unit (6) is clamped and fixedly connected to the external unit hoop (7). The inner surface of the groove around the rear periphery of the external unit assembly base (5) is clamped and fixedly connected to the inner surface of the assembly sealing ring groove (4). The assembly sealing ring (8) is clamped and fixedly connected between the inner surface of the groove around the rear periphery of the external unit assembly base (5) and the inner surface of the assembly sealing ring groove (4).

2. The ion source metal mounting mechanism for an ion implanter according to claim 1, characterized in that, The front end of the ion implanter (1) is located on the upper left and right sides of the outer surface of the implanter assembly base (3), and assembly positioning rods (9) are welded and fixedly connected on both sides. There are two assembly positioning rods (9), and positioning screw holes are opened at the middle of the front end of each assembly positioning rod (9).

3. The ion source metal mounting mechanism for an ion implanter according to claim 1, characterized in that, The outer surface of the outdoor unit mounting base (5) is integrally welded and fixedly connected to the left and right sides of the mounting positioning block (10), and there are two mounting positioning blocks (10), and a positioning screw hole is opened at the middle of the front end of each mounting positioning block (10).

4. The ion source metal mounting mechanism for an ion implanter according to claim 2, characterized in that, The assembly positioning rod (9) is bolted to the inner surface of the middle through-hole at the front end of the assembly positioning block (10) by an assembly positioning bolt (11), and there are two assembly positioning bolts (11).

5. The ion source metal mounting mechanism for an ion implanter according to claim 1, characterized in that, The upper and lower sides of the outer surfaces of the injection machine mounting base (3) and the external machine mounting base (5) are integrally welded with locking blocks (12), and the number of locking blocks (12) is four.

6. The ion source metal mounting mechanism for an ion implanter according to claim 5, characterized in that, The locking block (12) has a locking screw hole (13) at the middle of its front end, and there are four locking screw holes (13). The inner surface of each locking screw hole (13) is threaded.

7. The ion source metal mounting mechanism for an ion implanter according to claim 6, characterized in that, The inner surface of the locking screw hole (13) is threadedly connected to the locking bolt (14), and there are two locking bolts (14). The outer surface of the locking bolts (14) is threaded around.

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