Excimer lamp
By setting an outer electrode and designing conductive components in the exhaust pipe residue, the problem of short lamp life caused by concentrated linear discharge was solved, the light-emitting area was expanded and manufacturing was simplified, and the cost was reduced.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- USHIO INC
- Filing Date
- 2025-07-23
- Publication Date
- 2026-07-21
AI Technical Summary
When expanding the luminescent area, the shape-specific nature of the exhaust pipe residue in existing excimer lamps leads to concentrated linear discharge, which easily causes cracks, shortens the lamp life, and increases manufacturing complexity and cost.
An outer electrode is set in the end region of the exhaust pipe residue, and the linear discharge is released outside the exhaust pipe residue through the design of the conductive component to avoid concentration. The base of the conductive component is close to the inner electrode and the front end is close to the outer electrode to reduce strain accumulation.
The increased light-emitting area prevents cracks from forming in the exhaust pipe residue, reduces manufacturing complexity and cost, and extends lamp life.
Smart Images
Figure CN224537055U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to excimer lamps. Background Technology
[0002] Excimer lamps have long been used as light sources for emitting ultraviolet light in FPD, semiconductor process equipment, and photo-cleaning equipment.
[0003] In recent years, in the field of optical cleaning devices for FPDs, with the increasing size of display substrates, there is a demand to extend the effective light emission length. Patent Document 1 describes an excimer lamp device in which multiple excimer lamps are arranged in the tube axis direction of the excimer lamp in order to extend the effective light emission length.
[0004] Existing technical documents
[0005] Patent documents
[0006] Patent Document 1: Japanese Patent Application Publication No. 2004-192823 Utility Model Content
[0007] The problem to be solved by the utility model
[0008] The purpose of this invention is to provide an excimer lamp that expands the light-emitting area.
[0009] Technical solutions for solving the problem
[0010] In order to extend the effective light-emitting length, the inventors of this utility model studied a scheme that also uses the end region of the excimer lamp as the light-emitting region. The process is described below.
[0011] There are excimer lamps with an exhaust pipe remnant in the end region of the outer peripheral surface of the excimer lamp's light-emitting tube. The exhaust pipe remnant has irregularities relative to the surrounding outer tube, or has a different or varying thickness than the surrounding outer tube, or thus inherently exhibits strain. Therefore, conventionally, an outer electrode is not provided above the exhaust pipe remnant, and it is not utilized as a light-emitting area. However, in order to expand the light-emitting area, a scheme has been studied in which an outer electrode is also provided in the end region including the exhaust pipe remnant.
[0012] Figure 4 The image shows an enlarged cross-sectional view of the main part of an excimer lamp, in which an outer electrode is also disposed in the end region including the exhaust pipe remnant. Figure 4The excimer lamp 500 shown has a light-emitting tube 10 encapsulated with a luminescent gas. An inner tube 2 is inserted into an outer tube 1 within the light-emitting tube 1, and the ends of the outer tube 1 and the inner tube 2 are joined to form a sealed end 3. An inner electrode 6 is formed on the inner circumferential surface 2i of the inner tube 2. A mesh-like outer electrode 7 is formed on the outer circumferential surface 1s of the outer tube 1. Furthermore, a mesh-like outer electrode 7 is also formed in the end region of the outer tube 1, including the exhaust pipe residue 5. Thus, excimer light emission also occurs in the end region including the exhaust pipe residue 5.
[0013] However, the inventors of this invention, through in-depth research, have determined that if the outer electrode 7 is provided near the end of the light-emitting tube 10, which includes the exhaust pipe remnant 5, the following problems will occur. If a mesh-like outer electrode 7 exists in the exhaust pipe remnant 5, linear discharge dc tends to concentrate due to the specific shape of the exhaust pipe remnant 5. Linear discharge dc is a discharge with higher energy compared to its surroundings. If linear discharge dc occurs in the already strained exhaust pipe remnant 5, further strain will accumulate in the exhaust pipe remnant 5 due to the high discharge energy, and cracks will soon form in the exhaust pipe remnant 5, causing leakage of luminescent gas and the excimer lamp 500 to reach its lifespan. That is, the excimer lamp 500 becomes short-lived.
[0014] When the outer electrode 7 is disposed in the end region of the outer pipe 1, it is also possible to consider not disposing of the outer electrode 7 only around the periphery of the exhaust pipe residue 5. However, if the outer electrode 7 is not disposed only around the periphery of the exhaust pipe residue 5, the manufacturing method will become more complicated, the technical difficulty will increase, or the manufacturing cost will rise, regardless of how the outer electrode 7 is manufactured.
[0015] Alternatively, after placing the outer electrode 7 in the end region including the exhaust pipe residue 5, a method can be considered whereby the outer electrode 7 is removed only around the exhaust pipe residue 5. However, the manufacturing cost increases due to the additional removal step of removing the outer electrode 7 only around the exhaust pipe residue 5. Furthermore, new technical problems arise, such as the mesh being unraveled from the ends of the conductive wires remaining after the removal, since a portion of the conductive wires constituting the mesh electrode is cut off.
[0016] Therefore, the inventor of this utility model created the following excimer lamp.
[0017] The excimer lamp of this utility model has the following features:
[0018] The light-emitting tube has an outer tube with an exhaust pipe remnant near the end of its outer peripheral surface and an inner tube inserted into the outer tube, and a sealed space is formed by joining the outer tube and the inner tube.
[0019] An inner electrode is disposed inside the inner tube; and
[0020] The outer electrode is in contact with the outer peripheral surface of the outer tube.
[0021] The outer electrode is also formed in the exhaust pipe residue.
[0022] The conductive member disposed within the sealed space has a base located near the inner electrode and a front end located near the outer electrode and the exhaust pipe remnant, extending from the base to the front end.
[0023] The front end of the conductive member is located on the central side of the outer pipe along its length, which is closer to the exhaust pipe remnant.
[0024] In the excimer lamp, an outer electrode is also present in the exhaust pipe residue. However, the conductive member disposed within the sealed space has a structure and arrangement that makes it difficult for linear discharge to occur in the exhaust pipe residue. The structure and arrangement of the conductive member will be specifically described. In the excimer lamp, the conductive member has a structure having a base and a front end, and the conductive member is configured such that the base is close to the inner electrode and the front end of the conductive member is close to the outer electrode. Therefore, when a voltage for generating dielectric barrier discharge is applied between the inner and outer electrodes, a linear discharge occurs between the inner electrode and the base of the conductive member, and a linear discharge also occurs between the outer electrode and the front end of the conductive member. The front end near the exhaust pipe residue directs the linear discharge intended to be directed toward the exhaust pipe residue toward the outer electrode formed outside the exhaust pipe residue. That is, due to the presence of the front ends near both the outer electrode and the exhaust pipe residue, the conductive member can release the linear discharge directed toward the exhaust pipe residue.
[0025] The exhaust pipe remnant accumulates strain, while the outer pipe outside the exhaust pipe remnant, which serves as the destination for linear discharge, does not accumulate strain. Because the outer pipe and outer electrode have uniform shapes, linear discharge is less likely to concentrate in the outer pipe outside the exhaust pipe remnant. Therefore, even if the discharge energy of the linear discharge is applied to the outer pipe outside the exhaust pipe remnant, cracks are less likely to occur in the outer pipe.
[0026] Furthermore, as a result, the light-emitting portion is enlarged by arranging an outer electrode at the end of the outer peripheral surface where the exhaust pipe residue is located.
[0027] In the excimer lamp, the front end of the conductive member may not contact the outer tube. This prevents damage to either the conductive member or the outer tube when it is inserted into the outer tube.
[0028] In the excimer lamp, a fixing member for fixing the conductive component may also be provided within the sealed space.
[0029] In the excimer lamp, the fixing member may also be an annular shape extending radially from the inner tube and located between the exhaust pipe residue and the front end.
[0030] Alternatively, the inner tube may consist of a first part with a small thickness located at the center of the length direction and a second part with a large thickness located at the ends of the length direction.
[0031] The fixing member is located in the second part.
[0032] Utility Model Effect
[0033] Therefore, it is possible to provide an excimer lamp that expands the luminescent area. Attached Figure Description
[0034] Figure 1 This is a cross-sectional view of one embodiment of an excimer lamp.
[0035] Figure 2 yes Figure 1 Enlarged cross-sectional view of the main part of the excimer lamp.
[0036] Figure 3A This is a diagram showing the manufacturing process of an excimer lamp.
[0037] Figure 3B This is a diagram showing the manufacturing process of an excimer lamp.
[0038] Figure 3C This is a diagram showing the manufacturing process of an excimer lamp.
[0039] Figure 3D This is a diagram showing the manufacturing process of an excimer lamp.
[0040] Figure 4 This is an enlarged cross-sectional view of the main part representing the comparison method of excimer lamps. Detailed Implementation
[0041] The following description of the excimer lamps will be provided with appropriate reference to the accompanying drawings. Please note that all accompanying drawings are schematic illustrations, and the dimensions and numbers shown in the drawings may not correspond to the actual dimensions and numbers.
[0042] First, refer to Figure 1 and Figure 2 An embodiment of the excimer lamp will be described. Figure 1 This is an overall view of the excimer lamp 100. Figure 2 yes Figure 1The following is an enlarged view of the main part of the excimer lamp 100. In the following description, the direction in which the light-emitting tube 10 of the excimer lamp 100 extends (the tube axis direction) is set as the X direction. Furthermore, when representing the direction, if a positive or negative orientation is distinguished, a positive or negative sign is added to indicate it, such as "+X direction" or "-X direction". If the direction is not distinguished as positive or negative, it is simply referred to as "X direction".
[0043] The excimer lamp 100 has a light-emitting tube 10 and two electrodes (6, 7) respectively disposed on the outer and inner sides of the light-emitting tube 10. The light-emitting tube 10 has a double-layer tube shape consisting of an outer tube 1 and an inner tube 2 inserted into the outer tube 1. The tube axis of the outer tube 1 and the tube axis of the inner tube 2 are both located on line L1. The ends of the outer tube 1 and the inner tube 2 are joined together to form a sealing end 3. The light-emitting tube 10 has an outer tube 1, an inner tube 2, and a sealing end 3, and the interior of the light-emitting tube 10 is sealed. That is, the space between the outer tube 1 and the inner tube 2 is a sealed space 9 (see reference). Figure 2 ).
[0044] Reference Figure 2 Various dimensions related to the light-emitting tube 10 are shown. The radius r1 of the outer tube 1 is preferably 15 mm or more and 35 mm or less, and more preferably 15 mm or more and 30 mm or less. The radius r2 of the inner tube 2 is preferably 5 mm or more and less than 15 mm, and more preferably 7 mm or more and 13 mm or less. The distance g1 between the inner circumferential surface 1i of the outer tube 1 and the outer circumferential surface 2s of the inner tube (the outer circumferential surface at the thinnest part when there is a thickness deviation in the inner tube 2) is preferably 8 mm or more and 20 mm or less, and more preferably 10 mm or more and 15 mm or less.
[0045] The two electrodes (6, 7) are composed of an inner electrode 6 connected to the inner peripheral surface 2i of the inner tube 2 and an outer electrode 7 connected to the outer peripheral surface 1s of the outer tube 1. The outer electrode 7 is an electrode formed by connecting to the outer peripheral surface 1s. In this embodiment, the outer electrode 7 is a mesh electrode with numerous openings allowing light to pass through. The mesh electrode in this embodiment is an electrode with a mesh pattern in which multiple conductive lines connected to the outer peripheral surface 1s and extending along the X direction intersect with multiple conductive lines extending along the circumferential direction of the outer peripheral surface 1s. Figure 1 and Figure 2 In this diagram, only one cross-section of the excimer lamp 100 along the XY plane is shown; therefore, the cross-sections of the conductive lines of the mesh-like outer electrode 7 are shown separately, but in reality, the separately shown conductive lines are interconnected. Figure 2The diagram shows that the cross-section of the conductive wire constituting the outer electrode 7 is rectangular, but the cross-sectional shape of the conductive wire is not particularly limited, and the cross-sectional shape can also be approximately circular. The wire diameter is not particularly limited, but a diameter of 0.1 mm or more and 2 mm or less is preferred. The mesh size of the mesh electrode is preferably 1 mm or more and 10 mm or less, and more preferably 2 mm or more and 8 mm or less. The outer electrode 7 can also be a shape other than a mesh electrode, such as a coil electrode wound into a spiral shape on its outer peripheral surface. Both the mesh electrode and the coil electrode have light-transmitting portions in the arrangement area of the outer electrode 7, thus allowing light emitted by the light-emitting tube to pass through the arrangement area of the outer electrode 7 and be extracted. The outer electrode 7 is preferably formed to the boundary between the outer tube 1 and the sealing end 3, and, as... Figure 2 As shown, the outer electrode 7 can also be formed to extend beyond the boundary between the outer tube 1 and the sealing end 3 and cover a portion of the sealing end 3. The outer electrode 7 can also cover most of the sealing end 3, but if the outer electrode 7 is too close to the inner electrode 6, it will be difficult to generate dielectric barrier discharge. Therefore, it is preferable to configure the outer electrode 7 and the inner electrode 6 such that the distance between the outer electrode 7 and the inner electrode 6 is 25 mm or more.
[0046] The inner electrode 6 is a sheet-like electrode formed seamlessly along the inner circumferential surface 2i. The thickness of the inner electrode 6 is preferably 0.1 mm or more and 1.5 mm or less. It should be noted that the inner electrode 6 can be a mesh electrode, similar to the outer electrode 7, or it can be a coil-like electrode connected to the inner circumferential surface 2i and wound into a spiral shape. The outer electrode 7 and the inner electrode 6 are respectively connected to a power supply component (not shown). A luminescent gas is filled in the sealed space 9. By applying a voltage between the two electrodes (6, 7) via the power supply component, a dielectric barrier discharge is generated, and the luminescent gas in the light-emitting tube 10 emits excimer light. In this embodiment, xenon gas is used as the luminescent gas, emitting light with a wavelength of 172 nm through excimer light emission. Of course, other luminescent gases can also be used to emit light with wavelengths different from 172 nm.
[0047] The exhaust pipe remnant 5 is the trace left after the exhaust pipe was removed from the outer pipe 1. Details of the exhaust pipe will be described later. The exhaust pipe remnant 5 has irregularities relative to the surrounding outer pipe 1. More specifically, the outer peripheral surface of the exhaust pipe remnant 5 protrudes slightly more than the surrounding outer peripheral surface 1i, and the inner peripheral surface of the exhaust pipe remnant 5 is slightly recessed than the surrounding inner peripheral surface 1i. The thickness of the exhaust pipe remnant 5 differs from the thickness of the surrounding outer pipe 1, with localized variations in thickness. Furthermore, a mesh-like outer electrode 7 is also formed on the exhaust pipe remnant 5. Since the exhaust pipe remnant 5 is located in the end region of the light-emitting tube 10, the outer electrode 7 is also disposed in the end region of the light-emitting tube 10.
[0048] The exhaust pipe residue 5 has a shape formed by projecting the cross-sectional shape of the exhaust pipe onto the outer peripheral surface 1s of the outer pipe 1. In this embodiment, the exhaust pipe residue 5 is circular when viewed from the -Y direction. The minor diameter w1 of the exhaust pipe residue 5 is preferably 2 mm or more and 10 mm or less, and more preferably 3 mm or more and 7 mm or less. The distance d2 between the exhaust pipe residue 5 and the end of the light-emitting tube 10 is preferably 12 mm or more and 35 mm or less, and more preferably 15 mm or more and 30 mm or less.
[0049] Reference Figure 2 The conductive member 8 is described in detail below. The conductive member 8 is disposed within the sealed space 9. The conductive member 8 has a base 8b located near the inner electrode 6 and a front end 8e located near the outer electrode 7 and the exhaust pipe residue 5, extending from the base 8b to the front end 8e. Since the base 8b is near the inner electrode 6 and the front end 8e is near the outer electrode 7, and extends from the base 8b to the front end 8e, when a voltage for generating dielectric barrier discharge is applied between the inner electrode 6 and the outer electrode 7, a linear discharge is generated between the inner electrode 6 and the base 8b, and also between the outer electrode 7 and the front end 8e. The front end 8e is located on the side further along the length direction of the outer pipe 1 than the exhaust pipe residue 5, therefore the linear discharge is generated on the side further along the length direction of the exhaust pipe residue 5.
[0050] The front end portion 8e is close to the exhaust pipe remnant 5 and the outer electrode 7. Therefore, the conductive member 8 can attract linear discharges toward the exhaust pipe remnant 5. Furthermore, the attracted linear discharges can be released toward the outer electrode 7, which is closer to the exhaust pipe remnant 5. The exhaust pipe remnant 5 accumulates strain during exhaust pipe disassembly. If the linear discharge concentrates on the strain-accumulated exhaust pipe remnant 5, cracks will occur in the exhaust pipe remnant 5 due to the discharge energy of the linear discharge. However, the outer pipe 1, other than the exhaust pipe remnant 5, which is the destination for releasing the linear discharge, does not accumulate strain. Because the outer pipe 1 and the outer electrode 7 have uniform shapes, linear discharges are less likely to concentrate. Therefore, even if the discharge energy generated by the linear discharge is applied to the outer pipe 1 near the front end portion 8e, cracks are less likely to occur. The distance d3 between the front end portion 8e and the exhaust pipe remnant 5 is preferably 10 mm or more and 30 mm or less, and more preferably 15 mm or more and 25 mm or less. The front end portion 8e is preferably closer to the outer electrode 7 than to the exhaust pipe remnant 5.
[0051] In this embodiment, the front end portion 8e of the conductive member 8 does not contact the outer tube 1, but the front end portion 8e may also contact the outer tube 1. The advantages of the front end portion 8e not contacting the outer tube 1 will be described later. The distance d4 between the front end portion 8e and the outer electrode 7 closest to the front end portion 8e is preferably 10 mm or less, and more preferably 6 mm or less. The distance d4 is greater than the thickness t1 of the outer tube 1.
[0052] The base 8b of the conductive member 8 has an annular portion that winds around the inner tube 2. In this embodiment, the excimer lamp 100 has a start-up assist 12, which is mounted on the annular portion of the base 8b. In this embodiment, multiple rings of the start-up assist 12 are interconnected to form a chain, with only the ring at the front end of the chain having a protruding portion 12p. When the chain sags due to gravity, the protruding portion 12p approaches the outer tube 1 (in...). Figure 2 In the process, the protruding portion 12p contacts the outer tube 1. The start-up auxiliary part 12, like the conductive member 8, is made of a conductor. When the protruding portion 12p approaches the outer electrode 7, a linear discharge is generated between the protruding portion 12p and the outer electrode 7. When a voltage is applied between the inner electrode 6 and the outer electrode 7 to generate a dielectric barrier discharge, the linear discharge from the start-up auxiliary part 12 triggers the dielectric barrier discharge. It should be noted that the start-up auxiliary part 12 is arbitrarily present for the excimer lamp.
[0053] In this embodiment, the conductive member 8 has an anchoring end 8a. The anchoring end 8a is fixed to a fixing member 11 disposed within the sealed space 9. The conductive member 8 is fixed relative to the inner tube 2 by the fixing member 11. The fixing member 11 is an annular plate extending radially from the inner tube 2. The fixing member 11 is fused to the outer peripheral surface 2s of the inner tube 2. The fixing member 11 has a through hole extending through the plate in the thickness direction, through which the conductive member 8 passes. The anchoring end 8a is bent, thereby preventing the conductive member 8 from detaching from the through hole of the fixing member 11. The conductive member 8 has a bent portion 8c midway between its connection to the anchoring end 8a, and the bent portion 8c, together with the bent anchoring end 8a, fixes the position of the conductive member 8 relative to the fixing member 11.
[0054] The fixing member 11 is located between the exhaust pipe residue 5 and the front end portion 8e. The outer diameter of the annular fixing member 11 is smaller than the inner diameter of the outer tube 1, thus creating a gap between the fixing member 11 and the outer tube 1. The sealing space 9 extends to the end region containing the exhaust pipe residue 5, and dielectric barrier discharge is also generated between the end region of the outer electrode 7 containing the exhaust pipe residue 5 and the inner electrode 6, resulting in excimer light emission. Since the end region also emits light, the luminous area of the excimer lamp is expanded.
[0055] The above-described method for fixing the conductive component 8 is just one example; other methods can also be used to fix the conductive component 8. For example, the base 8b of the conductive component 8 can be fused and fixed to the inner tube 2.
[0056] The outer tube 1 has a uniform thickness t1. The thickness t1 is preferably 1 mm or more and 4 mm or less, and more preferably 1.5 mm or more and 3 mm or less. The inner tube 2 consists of two parts with different thicknesses. The first part 2b is a thin part located at the center of the length direction. The second part 2a is a thick part located at the end of the length direction. The fixing member 11 is welded at the thicker second part 2a. By welding the fixing member 11 to the thicker second part 2a, the fixing member 11 is stably fixed without affecting the inner tube 2 due to the welding. The thickness t2a of the first part is preferably 1 mm or more and 4 mm or less, and more preferably 1.5 mm or more and 3 mm or less. The thickness t2b of the second part is preferably 0.5 mm or more and less than 2 mm, and more preferably 0.8 mm or more and 1.5 mm or less.
[0057] Reference Figures 3A to 3D Here is an example illustrating the manufacturing process of the excimer lamp 100. First, the outer tube 1 and the inner tube 2 are prepared. Figure 3A This is a diagram showing the outer tube 1. The outer tube 1 has an exhaust pipe 15. The outer tube 1 and the exhaust pipe 15 are made of, for example, quartz. The outer electrode 7 has not yet been installed on the outer peripheral surface 1s of the outer tube 1. Figure 3B This diagram shows the inner tube 2. A conductive member 8 and an activation auxiliary part 12 are mounted on the outer peripheral surface 2s, and a fixing member 11 for fixing the conductive member 8 is fused to it. The inner tube 2 and the fixing member 11 are both made of quartz.
[0058] Figure 3C The diagram shows an inner tube 2 inserted into an outer tube 1, with the ends of the outer tube 1 and the inner tube 2 joined together to form a sealing end 3, thereby creating a sealed space 9. Since the front end 8e does not contact the outer tube 1, the inner wall of the outer tube 1 is less likely to interfere with the front end 8e when the inner tube 2 is inserted into the outer tube 1, facilitating insertion. Furthermore, the conductive member 8 having a bent portion 8d also makes it easier to insert the inner tube 2 without interference between the inner wall of the outer tube 1 and the front end 8e. The radius of curvature of the bent portion 8d is preferably 5 mm or more and 10 mm or less.
[0059] After the sealed space 9 is formed, the gas inside the sealed space 9 is replaced with luminescent gas through the exhaust pipe 15. After the gas is replaced with luminescent gas, if the exhaust pipe 15 is melted while sealing is performed, an exhaust pipe residue 5 is formed.
[0060] like Figure 3DAs shown, after the exhaust pipe residue 5 is formed, an outer electrode 7 and an inner electrode 6 are formed. Regarding the method of forming the inner electrode 6, it is formed by attaching a sheet-like inner electrode 6 to the inner circumferential surface 2i of the inner pipe 2. It should be noted that the inner electrode 6 can also be formed by forming a film on the inner circumferential surface 2i.
[0061] Regarding the method for forming the outer electrode 7, a cylindrical mesh is formed by rolling up a mesh-like conductive sheet, and the cylindrical mesh is then used to cover the outer electrode. Figure 3D The light-emitting tube 10 (outer tube 1) shown is formed by an outer electrode 7. To expand the light-emitting area, the cylindrical mesh (outer electrode 7) covers not only the central region of the outer tube 1 but also the end region of the outer tube 1, including the exhaust pipe remnant 5. The outer electrode 7 is preferably extendable to cover the light-emitting tube 10. Furthermore, the outer electrode 7 can be fixed by hooking it to the sealing end 3. This allows it to be installed on the light-emitting tube 10 while maintaining tension on the outer electrode 7, resulting in a tight fit relative to the light-emitting tube 10. Additionally, since the outer electrode 7 is positioned at the sealing end 3, a greater light-emitting length can be ensured. Thus, the process is complete. Figure 1 and Figure 2 The excimer lamp 100 shown has an outer electrode 7 up to the end region of the outer tube 1, which includes the exhaust pipe remnant 5. It should be noted that the outer electrode 7 can also be formed by pattern coating using methods such as screen printing.
[0062] This utility model is not limited to the above-described embodiments, and various improvements and modifications can be made without departing from the spirit of this utility model.
[0063] Industrial availability
[0064] The excimer lamp 100 described above is used in the manufacture of semiconductors and liquid crystal panels, but it can also be used for other purposes.
[0065] Label Explanation
[0066] 1: Outer tube;
[0067] 1i: (Inner circumferential surface of the outer tube);
[0068] 1s: (outer circumferential surface of the outer tube);
[0069] 2: Inner tube;
[0070] 2a: (The inner tube) the second part;
[0071] 2b: (of the inner tube) the first part;
[0072] 2i: (Inner circumferential surface of the inner tube);
[0073] 2s: (Outer circumferential surface of the inner tube);
[0074] 3: Sealed end;
[0075] 5: Exhaust pipe remnants;
[0076] 6: Inner electrode;
[0077] 7: Outer electrode;
[0078] 8: Conductive components;
[0079] 8a: (of a conductive component) anchoring end;
[0080] 8b: (Base of a conductive component);
[0081] 8c: (of a conductive component) the bent portion;
[0082] 8d: (of a conductive component) a bent portion;
[0083] 8e: (of a conductive component) the front end;
[0084] 9: Sealed space;
[0085] 10: Light-emitting diode (LED);
[0086] 11: Fixed components;
[0087] 12: Start the auxiliary unit;
[0088] 12p: (The protruding part of the starting auxiliary section);
[0089] 15: Exhaust pipe;
[0090] 100: Excimer lamp.
Claims
1. An excimer lamp, characterized in that, have: The light-emitting tube has an outer tube with an exhaust pipe remnant near the end of its outer peripheral surface and an inner tube inserted into the outer tube, and a sealed space is formed by joining the outer tube and the inner tube at both ends. An inner electrode is disposed inside the inner tube; and The outer electrode is in contact with the outer peripheral surface of the outer tube. The outer electrode is also formed in the exhaust pipe residue. The conductive member disposed within the sealed space has a base located near the inner electrode and a front end located near the outer electrode and the exhaust pipe remnant, extending from the base to the front end. The front end of the conductive member is located on the central side of the outer pipe along its length, which is closer to the exhaust pipe remnant.
2. The excimer lamp according to claim 1, characterized in that, The front end of the conductive component does not contact the outer tube.
3. The excimer lamp according to claim 1 or 2, characterized in that, A fixing member is provided within the sealed space to fix the conductive component.
4. The excimer lamp according to claim 3, characterized in that, The fixing member is an annular shape extending radially from the inner pipe and is located between the exhaust pipe remnant and the front end.
5. The excimer lamp according to claim 3, characterized in that, The inner tube is composed of a first part with a small thickness located at the center of the length direction and a second part with a large thickness located at the end of the length direction. The fixing member is located in the second part.