Excimer lamp
By setting an exhaust pipe on the outer wall of the outer tube and a through hole in the base, the problems of glass particle fouling and poor workability in the manufacturing of excimer lamps are solved, achieving efficient fouling suppression and convenient installation.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- USHIO INC
- Filing Date
- 2025-07-25
- Publication Date
- 2026-07-21
AI Technical Summary
Existing excimer lamps have problems with glass particle dirt that is difficult to remove during the manufacturing process and poor workability. In particular, the remaining part of the exhaust pipe protrudes from the outer wall of the outer pipe, which makes installation difficult and weakens the strength.
An exhaust pipe is installed on the outer wall of the outer tube. The remaining part of the exhaust pipe is located in the recessed area of the base and the top end is located on the side of the light-emitting tube. Glass particles are removed by the flow of high-temperature inert gas, and a through hole is provided in the base to avoid interference.
It effectively removes glass particle dirt from the manufacturing process, improves the workability and ease of installation of excimer lamps, and reduces the complexity of the cleaning process.
Smart Images
Figure CN224537056U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to excimer lamps. Background Technology
[0002] Previously, excimer lamps that produce ultraviolet light through excimer luminescence were known. In these excimer lamps, a luminescent gas that forms excimers through discharge is sealed within a light-emitting tube made of a dielectric. Furthermore, for example, a high-frequency voltage is applied to a pair of electrodes disposed on the wall of the light-emitting tube, generating a discharge within the tube, thereby exciting the atoms of the luminescent gas into an excimer state. Ultraviolet light is obtained when these atoms transition to their ground state. The applicant has proposed, for example, an excimer lamp as shown in Patent Document 1 below.
[0003] Existing technical documents
[0004] Patent documents
[0005] Patent Document 1: Japanese Patent Application Publication No. 2018-10795 Utility Model Content
[0006] The problem to be solved by the utility model
[0007] Figure 13 This is a schematic cross-sectional view illustrating the structure of the excimer lamp in Patent Document 1. For example... Figure 13 As shown, the excimer lamp 100 includes a light-emitting tube 90, a base 94 mounted on both ends of the light-emitting tube 90 in the axial direction, an inner electrode 95, an outer electrode 97, and a buffer member 99. Figure 13 The document also describes the XYZ coordinate system, which sets the tube axis of the light-emitting tube 90 as the X direction and the plane orthogonal to the X direction as the YZ plane.
[0008] like Figure 13 As shown, the light-emitting tube 90 includes an outer tube 91 and an inner tube 92, forming a double-layer tube structure. Furthermore, the light-emitting tube 90 is made of a dielectric such as quartz glass and has a sealing portion 93 formed to seal the ends of the outer tube 91 and the inner tube 92 in the X direction. A luminescent gas, such as one containing rare gases like Kr or Xe, is sealed inside the light-emitting tube 90.
[0009] like Figure 13 As shown, the inner electrode 95 is disposed on the inner wall surface of the inner tube 92. Additionally, the outer electrode 97 is disposed on the outer wall surface of the outer tube 91 in a mesh-like pattern. The inner electrode 95 and the outer electrode 97 are positioned opposite each other across the light-emitting tube 90.
[0010] like Figure 13 As shown, the buffer component 99 is positioned between the base 94 and the light-emitting tube 90 from the viewpoint of suppressing collisions between them.
[0011] In addition, such as Figure 13 As shown, the light-emitting tube 90 has an exhaust pipe remainder 105 formed in the sealing portion 93. During the manufacture of the excimer lamp 100, an exhaust pipe (not shown) for venting gas from the light-emitting tube 90 is connected to a portion of the sealing portion 93. Furthermore, this exhaust pipe is also used to seal the light-emitting tube 90 with luminescent gas. The exhaust pipe remainder 105 is a mark left after sealing by heating and melting the exhaust pipe, and it protrudes from the sealing portion 93 in the X direction.
[0012] In the manufacturing process of the excimer lamp 100, firstly, the ends of the outer tube 91 and the inner tube 92 are heated and sealed. Then, after forming a sealing part 93 that seals the outer tube 91 and the inner tube 92, an exhaust pipe is connected relative to the sealing part 93.
[0013] Furthermore, during the manufacturing process of the excimer lamp 100, fine glass particles generated during the sealing of the outer tube 91 and the inner tube 92 adhere to the surface of the light-emitting tube 90, resulting in dirt accumulation. Therefore, a cleaning process is performed during the manufacturing process of the excimer lamp 100 to remove these glass particles from the light-emitting tube 90. More specifically, the following steps are performed: the light-emitting tube 90 is immersed in a prescribed cleaning solution, which flows into the light-emitting tube 90 from an exhaust pipe (not shown), and then the cleaning solution is rinsed off the light-emitting tube 90. This cleaning process requires removing dirt from the inner surface of the light-emitting tube 90 and removing the cleaning solution from the light-emitting tube 90, making it a complex and multi-step process.
[0014] The inventors have noticed that since the light-emitting tube 90 is cooled after the outer tube 91 and inner tube 92 are sealed, the glass particles adhering to the light-emitting tube 90 are firmly fixed to it. Furthermore, through further research, the inventors discovered that by pre-installing an exhaust pipe on the outer wall surface of the outer tube before forming the sealing portion, the glass particles adhering to the light-emitting tube during the formation of the sealing portion can be easily removed. Therefore, even without a cleaning process, it is easy to manufacture an excimer lamp that suppresses contamination of the light-emitting tube caused by these glass particles.
[0015] However, when the exhaust pipe is located on the outer wall of the outer tube, the remaining portion of the exhaust pipe in the completed excimer lamp protrudes from the outer wall of the outer tube. If the remaining portion of the exhaust pipe protrudes from the outer wall of the outer tube, the operator is more likely to accidentally cause the remaining portion of the exhaust pipe to collide with other components when mounting the excimer lamp on a device that performs photo-cleaning of an object using ultraviolet light, thus reducing the operability of the excimer lamp.
[0016] The remaining portion of the exhaust pipe, sealed by heating and melting, is thicker and has a more complex surface compared to the light-emitting tube, making it a weaker part. If this remaining portion of the exhaust pipe breaks, the luminescent gas sealed inside the light-emitting tube will leak out, making it difficult to illuminate the excimer lamp. In other words, placing the remaining portion of the exhaust pipe only on the outer wall of the outer tube reduces workability when mounting the excimer lamp in exposure equipment, etc.
[0017] In view of the above, the purpose of this utility model is to provide an excimer lamp that can easily suppress dirt in the manufacturing process and has high workability.
[0018] Technical solutions for solving the problem
[0019] The excimer lamp of this utility model is characterized by having:
[0020] The outer tube extends along the tube axis;
[0021] An inner tube is arranged inside the outer tube along the tube axis direction;
[0022] A light-emitting tube, wherein the ends of the outer tube and the inner tube are sealed in the axial direction;
[0023] The luminescent gas is sealed into the luminescent space sandwiched between the outer tube and the inner tube;
[0024] The outer electrode is disposed on the outer wall surface of the outer tube;
[0025] The inner electrode is disposed on the inner wall surface of the inner tube;
[0026] The base is recessed along the tube axis and has a recessed region for inserting the end of the light-emitting tube along the tube axis; and
[0027] The remaining portion of the exhaust pipe has a base on the outer wall surface of the outer pipe located within the recessed area, protruding in a direction different from the pipe axis direction.
[0028] The top end of the remaining part of the exhaust pipe is located closer to the light-emitting tube than the outer wall surface of the base.
[0029] According to the above structure, in the manufacturing process, an exhaust pipe used for venting gas inside the light-emitting tube is provided on the outer wall surface of the outer tube. By providing this exhaust pipe on the outer wall surface of the outer tube, an inert gas such as nitrogen can be introduced through the exhaust pipe when sealing the ends of the outer and inner tubes. This removes glass particles that adhere to the inside of the light-emitting tube during the sealing process of the ends of the outer and inner tubes.
[0030] As described above, the fine glass particles generated during the sealing of the outer and inner tubes become firmly attached to the light-emitting tube after the sealing process is completed, due to the cooling of the tube. In other words, at high temperatures, the light-emitting tube and glass particles can easily detach from each other. Therefore, by introducing gas from the exhaust pipe relative to the light-emitting tube, which is at a high temperature during the sealing process of the outer and inner tubes, the glass particles can be removed before they adhere to the tube. That is, according to the above structure, the exhaust pipe is located on the outer wall of the outer tube, which easily suppresses contamination of the light-emitting tube during the manufacturing process.
[0031] Furthermore, according to the above structure, the base of the remaining exhaust pipe is located within the recessed area of the base, and the top end of the remaining exhaust pipe is located closer to the light-emitting tube than the outer wall surface of the base. Therefore, the remaining exhaust pipe does not protrude from the base, making installation easy when mounting the excimer lamp to, for example, an exposure apparatus. In other words, according to the above structure, even without a cleaning process such as immersing the light-emitting tube in a cleaning solution, it is easy to suppress contamination during the manufacturing process and improve the workability of the excimer lamp.
[0032] Among the excimer lamps mentioned above, it is also possible to have:
[0033] The base has a through hole that connects the inner wall surface of the recessed region with the outer wall surface of the base.
[0034] The remaining portion of the exhaust pipe is exposed through the through hole.
[0035] As described above, the remaining portion of the exhaust pipe is thicker and has a more complex surface compared to the light-emitting tube, making it a weaker part. Therefore, according to the above structure, the remaining portion of the exhaust pipe is exposed without protruding from the base, thus suppressing interference between the remaining portion and other components such as the base. This helps to suppress defects in the light-emitting tube originating from the remaining portion of the exhaust pipe.
[0036] Among the excimer lamps mentioned above, it is also possible to have:
[0037] The through hole is connected to the outer edge of the base located on the central side of the light-emitting tube in the tube axis direction, forming a cut-shaped opening.
[0038] According to the above structure, when the light-emitting tube is inserted into the base, the remaining part of the exhaust pipe can be easily aligned with the through hole, which is preferable.
[0039] In addition, the above-mentioned excimer lamps may also have:
[0040] A circular plate component, located between the outer tube and the inner tube, is joined to the inner tube in the axial direction between the inner electrode and the remainder of the exhaust pipe, and is made of glass material.
[0041] It is known that the Si-O bonds in glass materials such as quartz glass are broken by ultraviolet light irradiation. Therefore, the reaction of breaking Si-O bonds occurs when ultraviolet light emitted during the illumination of an excimer lamp, resulting in strain in the light-emitting tube. In particular, this reaction occurs significantly with ultraviolet light with wavelengths below 200 nm.
[0042] It is known that the Si-O bonds broken by ultraviolet light irradiation are re-bonded through a repair mechanism based on the OH groups contained in the glass material. Furthermore, this repair mechanism becomes more pronounced at higher temperatures in the glass material. This is because the internal atoms are activated at higher temperatures.
[0043] As mentioned earlier, the remaining part of the exhaust pipe is thicker and has a more complex surface compared to the light-emitting tube, making it susceptible to strain caused by the shearing of Si and O. Details will be discussed later, but based on the above structure, the aforementioned OH-based repair mechanism can be easily performed near the remaining part of the exhaust pipe, thus suppressing the effects of strain on the remaining part.
[0044] The excimer lamp mentioned above can also be,
[0045] The end opposite to the exhaust pipe remainder in the axial direction of the pipe also has a second exhaust pipe remainder that is different from the exhaust pipe remainder and is formed in the sealing portion that seals the outer pipe and the inner pipe.
[0046] Utility Model Effect
[0047] According to this utility model, an excimer lamp that can easily suppress dirt in the manufacturing process and has high workability is provided. Attached Figure Description
[0048] Figure 1A This is a cross-sectional view showing an example of the structure of the excimer lamp of this utility model.
[0049] Figure 1B yes Figure 1A BB cross-sectional view.
[0050] Figure 2 It is a detailed representation Figure 1A Enlarged view of the structure near the base.
[0051] Figure 3 This is a diagram showing the state after the LED and base are disassembled.
[0052] Figure 4 Is Figure 2 The image shows the excimer lamp being observed from the +Y direction under the specified conditions.
[0053] Figure 5 This is a diagram illustrating one aspect of the manufacturing process of an excimer lamp.
[0054] Figure 6 This is a diagram showing the state of the sealing portion formed on the -X side.
[0055] Figure 7 This is a diagram showing the state of a sealing portion formed on the +X side.
[0056] Figure 8A It is an imitation Figure 2 A cross-sectional view showing another embodiment of the excimer lamp.
[0057] Figure 8B yes Figure 8A YZ cross-sectional view of the excimer lamp.
[0058] Figure 9A This is a cross-sectional view showing another embodiment of the excimer lamp.
[0059] Figure 9B Observed from the Y direction Figure 9A The image shows the excimer lamp.
[0060] Figure 10A It is an imitation Figure 1A A cross-sectional view showing another embodiment of the excimer lamp.
[0061] Figure 10B Observing from the +X direction Figure 10A The image shows the excimer lamp.
[0062] Figure 11 This is a diagram showing other structural examples of the inner tube.
[0063] Figure 12 This is a diagram showing other structural examples of the remaining part of the exhaust pipe.
[0064] Figure 13 This is a cross-sectional view schematically showing the structure of the excimer lamp in Patent Document 1. Detailed Implementation
[0065] The embodiments of the excimer lamp of this utility model will now be described with reference to the accompanying drawings. Furthermore, all the following drawings are schematic illustrations, and the dimensions and numbers shown in the drawings may not necessarily match the actual dimensions and numbers.
[0066] [First Implementation Method]
[0067] Figure 1A This is a cross-sectional view showing an example of the structure of the excimer lamp of this invention. Additionally, Figure 1B yes Figure 1A BB sectional view. For example... Figure 1A and Figure 1B As shown, the excimer lamp 1 includes a light-emitting tube 3, an inner electrode 5, an outer electrode 7, and bases (9a, 9b) located at both ends of the light-emitting tube 3 in the tube axis direction.
[0068] In the following description, the XYZ coordinate system is used, where the axis of the LED 3 is defined as the X-direction, and the plane orthogonal to the X-direction is defined as the YZ plane. When using this definition for explanation, Figure 1A Corresponding to the cross-sectional view of excimer lamp 1 cut by the XY plane. Figure 1B Corresponds to the cross-sectional view of excimer lamp 1 cut by the YZ plane.
[0069] In the following description, for example, when distinguishing between positive and negative directions, directions will be indicated by positive and negative symbols such as "+X direction" and "-X direction". Alternatively, when not distinguishing between positive and negative directions, directions will simply be indicated as "X direction". That is, in this specification, the use of "X direction" includes both "+X direction" and "-X direction". This also applies to the Y and Z directions.
[0070] like Figure 1A and Figure 1B As shown, the light-emitting tube 3 has an outer tube 11, an inner tube 12, a sealing part (13, 14), and the remaining part of the exhaust tube (15, 16). Figure 1B As shown, the light-emitting tube 3 has a double-layer tube structure.
[0071] like Figure 1B As shown, the outer tube 11 and the inner tube 12 are cylindrical. The inner tube 12 has an outer diameter smaller than the inner diameter of the outer tube 11 and is disposed inside the outer tube 11. The outer tube 11 surrounds the inner tube 12. Typically, the outer tube 11 and the inner tube 12 are arranged coaxially.
[0072] As an example, the outer diameter of the outer tube 11 is 15mm to 45mm, and the outer diameter of the inner tube 12 is 3mm to 30mm. Furthermore, their lengths in the X direction are 70mm to 3200mm. As an example, the outer diameter of the outer tube 11 is 40mm, the outer diameter of the inner tube 12 is 16mm, and their lengths in the X direction are 1200mm. Furthermore, as an example, the thickness of the outer tube 11 is 2mm, and the thickness of the inner tube 12 is 1mm. In this case, the radial width of the annular light-emitting space S1, when viewed along the X direction, is 11mm.
[0073] The sealing portions (13, 14) are formed by sealing the outer tube 11 and the inner tube 12 at the end positions on the +X and -X sides. A specified luminescent gas is sealed in the space between the outer tube 11 and the inner tube 12 (hereinafter referred to as the "luminescent space S1") at a pressure of, for example, 10 kPa to 100 kPa.
[0074] For details, please refer to Figures 5-7 As will be described later, during the manufacture of the excimer lamp 1, an exhaust pipe is used to vent the gas inside the light-emitting tube 3 and to seal the light-emitting gas into the light-emitting tube 3, and is connected to a portion of the light-emitting tube 3. The remaining parts of the exhaust pipe (15, 16) are traces left after sealing by heating the exhaust pipe to melt it. The structure of the remaining parts of the exhaust pipe (15, 16) will be described later.
[0075] Figure 2 It is a detailed representation Figure 1A An enlarged view of the structure near base 9a. Figure 3 This diagram shows the state after disassembling the LED 3 and the base 9a. Additionally, Figure 4 Is Figure 2 The image shows the excimer lamp 1 viewed from the +Y direction under the condition of [condition].
[0076] like Figure 2 as well as Figure 3 As shown, the base 9a includes an inner wall surface 31, an outer wall surface 32, an inner bottom surface 33, and an outer bottom surface 34, and has a bottomed cylindrical shape with an opening on one side opposite to the bottom surfaces (33, 34). That is, the base 9a has a recessed region 20 formed by the inner wall surface 31 and the inner bottom surface 33, which is recessed in the X direction. For example, the base 9a is made of a conductive material such as aluminum, stainless steel, or aluminum alloy.
[0077] like Figure 2 and Figure 3 As shown, the +X side end of the light-emitting tube 3 is inserted into the base 9a. From the viewpoint of suppressing the collision between the sealing part 13 and the inner wall surface 31 of the base 9a, a buffer member (not shown) capable of elastic deformation in the X direction can also be arranged between the sealing part 13 and the base 9a in the X direction. As such a buffer member, a coil spring or a leaf spring can be used, for example.
[0078] In addition, such as Figure 1B as well as Figure 4 As shown, the base 9a has a through hole 21 in the Y direction that connects the inner wall surface 31 and the outer wall surface 32. The remaining portion 15 of the exhaust pipe can be visually inspected through the through hole 21 (see reference). Figure 4 That is, the remaining portion 15 of the exhaust pipe is exposed through the through hole 21. In this embodiment, as... Figure 4 As shown, the through hole 21 is connected to the outer edge E1 of the base 9a, forming a cut shape.
[0079] like Figure 2 As shown, the remaining portion 15 of the exhaust pipe has a base 15a and a top portion 15b. (As indicated...) Figure 2As shown, the base 15a is located on the outer wall surface of the outer pipe 11 and within the recessed region 20 of the base 9a. The remaining portion 15 of the exhaust pipe protrudes from the base 15a in a direction different from the X direction. In this embodiment, the remaining portion 15 of the exhaust pipe protrudes in the Y direction.
[0080] like Figure 2 As shown, the top end 15b of the exhaust pipe remainder 15 is located on the side of the outer wall surface 32 of the base 9a closer to the light-emitting tube 3. As described above, the exhaust pipe remainder 15 is sealed by heating and melting the exhaust pipe, thus it has a thicker material and a more complex surface compared to the light-emitting tube 3, resulting in weaker strength. Therefore, it is preferable that the top end 15b of the exhaust pipe remainder 15 is located on the side of the outer wall surface 32 of the base 9a closer to the light-emitting tube 3, and does not protrude from the outer wall surface 32. As a result, for example, when the excimer lamp 1 is mounted in an exposure apparatus, the exhaust pipe remainder 15 is less likely to collide with other components, improving the workability of the excimer lamp 1.
[0081] like Figure 1A and Figure 2 As shown, an elastic member 25, which can elastically deform in the radial direction of the light-emitting tube 3, is disposed on the inner wall surface 31 of the base 9a. The light-emitting tube 3 inserted into the base 9a can be clamped by this elastic member. For example, a coil spring or a leaf spring can be used as the elastic member 25. Furthermore, in Figure 1B and Figure 3 The illustration of the elastic component 25 is omitted in the text.
[0082] The remaining portion 15 of the exhaust pipe is weaker than the light-emitting tube 3, therefore it is preferable to clamp the light-emitting tube 3 in a state where the elastic member 25 is in contact with a portion different from the remaining portion 15 of the exhaust pipe. Here, as Figure 4 As shown, the remaining portion 15 of the exhaust pipe is exposed through the through hole 21. Therefore, it is preferable that the elastic member 25 can easily contact a portion different from the remaining portion 15 of the exhaust pipe simply by placing the remaining portion 15 of the exhaust pipe within the through hole 21.
[0083] In addition, such as Figure 4 As shown, by forming the through hole 21 into a slit shape, the alignment of the exhaust pipe remainder 15 with the through hole 21 can be easily achieved when the light-emitting tube 3 is inserted into the base 9a. In this embodiment, the top end 15b of the exhaust pipe remainder 15 is located radially outward from the inner wall surface 31 of the base 9a, but this is arbitrary.
[0084] Regarding the fact that base 9b has a recessed region along the X direction, the same discussion can be made as with base 9a. That is, as... Figure 1A As shown, the base 9b has a recessed area in the -X direction for the -X side end of the light-emitting tube 3 to be inserted.
[0085] like Figure 1A As shown, the exhaust pipe remainder 16 is formed on the sealing portion 14 located on the -X side. That is, the base of the exhaust pipe remainder 16 is located on the sealing portion 14, and the exhaust pipe remainder 16 protrudes in the -X direction. Figure 1A As shown, the exhaust pipe remainder 16 is located within the recessed area of the base 9b. In this embodiment, the exhaust pipe remainder 16 corresponds to the "second exhaust pipe remainder".
[0086] Similar to the case described with reference to base 9a, base 9b may also have an elastic member 25 on its inner wall surface (see reference). Figure 1A Alternatively, from the viewpoint of suppressing the collision between the remaining part 16 of the exhaust pipe and the inner bottom surface of the base 9b, a buffer member (not shown) may be provided between the sealing part 14 and the base 9b.
[0087] like Figure 1A As shown, the inner electrode 5 is disposed on the inner wall surface of the inner tube 12, and as an example, it is in the shape of a film. The inner electrode 5 is made of conductive materials such as aluminum, titanium, or stainless steel. The inner electrode 5 can also be made of a plate-shaped component made of conductive material.
[0088] like Figure 1A and Figure 1B As shown, the outer electrode 7 is disposed on the outer wall surface of the outer tube 11. The outer electrode 7 is made of a conductive material such as stainless steel, nickel, or copper. In this embodiment, the outer electrode 7 is mesh-like, but in this invention, the shape of the outer electrode 7 is not limited. For example, the outer electrode 7 may also be striped.
[0089] As an example, the outer electrode 7 is cylindrical when viewed along the X direction and is disposed on the outer wall of the outer tube 11 by inserting the light-emitting tube 3 along the X direction. In addition, as a method for forming the outer electrode 7, methods such as installing an electrode made of metal wire braided into a mesh, attaching a conductive strip to the outer wall, or applying conductive paste to the outer wall by screen printing and then firing it are possible.
[0090] The inner electrode 5 and the outer electrode 7 face each other across the light-emitting space S1.
[0091] A power supply (not shown) is connected to the inner electrode 5 and the outer electrode 7, respectively. When a high-frequency AC voltage of approximately 10 kHz to 100 kHz is applied from this power supply between the inner electrode 5 and the outer electrode 7, ultraviolet light is generated in the light-emitting space S1. This ultraviolet light is extracted from the excimer lamp 1 through the gaps in the mesh-like outer electrode 7. As an example, the input power is set to 20 W to 2000 W, and the input voltage is set to approximately 5 kV to 15 kV.
[0092] Next, the manufacturing process of the desmolecular lamp 1 will be explained. Figure 5 This is a diagram illustrating one aspect of the manufacturing process of the excimer lamp 1. (See diagram for example.) Figure 5 As shown, an outer tube 11 and an inner tube 12 are prepared, with the inner tube 12 disposed inside the outer tube 11. An exhaust pipe 40 is connected to the outer wall surface 11a of the outer tube 11. The outer tube 11, the inner tube 12, and the exhaust pipe 40 are, for example, made of quartz glass.
[0093] As an example, firstly, the -X side ends of the outer tube 11 and the inner tube 12 are heated and melted, thereby sealing them. That is, a sealing part 14 is formed at the -X side end of the light-emitting tube 3. Figure 6 This diagram shows the state in which the sealing portion 14 on the -X side is formed. Here, when forming the sealing portion 14, an inert gas G1, such as nitrogen, is introduced from the opening A1 on the +X side into the space sandwiched between the outer tube 11 and the inner tube 12. Figure 6 The diagram schematically illustrates inert gas G1. (Example) Figure 6 As shown, inert gas G1 is introduced into the light-emitting tube 3 through opening A1 and discharged through exhaust pipe 40.
[0094] When viewed along the X direction, opening A1 appears annular (see also...). Figure 1B When introducing inert gas G1 through opening A1, for example, a fitting (not shown) with a gas inlet can also be fitted to opening A1.
[0095] When the outer tube 11 and the inner tube 12 are sealed, fine glass particles adhere to the inner wall of the light-emitting tube 3. It is assumed that after sealing the outer tube 11 and the inner tube 12, their temperatures decrease, causing the glass particles to adhere more firmly to the inner wall of the light-emitting tube 3. Therefore, by circulating an inert gas G1 within the light-emitting tube 3 while the outer tube 11 and the inner tube 12 are heated to a high temperature for sealing, the amount of glass particles adhering to the light-emitting tube 3 can be reduced. For example, the high temperature of the outer tube 11 and the inner tube 12 can be maintained using any heater.
[0096] Then, after the exhaust pipe 41 is connected to the sealing part 14 (see below) Figure 7 The ends of the outer tube 11 and the inner tube 12 in the +X direction are heated and melted, thereby sealing them (sealing part 13). Figure 7 This diagram shows the state in which the sealing portion 13 on the +X side is formed. When forming the sealing portion 13, an inert gas G1, such as nitrogen, is introduced from the exhaust pipe 41 into the space sandwiched between the outer pipe 11 and the inner pipe 12. Figure 7 Zhongyu Figure 6 Similarly, the inert gas G1 is schematically illustrated. (e.g.) Figure 7 As shown, inert gas G1 is introduced into the light tube 3 from the exhaust pipe 41 and discharged from the exhaust pipe 40.
[0097] Fine glass particles also adhere to the inner wall of the light-emitting tube 3 during the formation of the sealing part 13. However, when the outer tube 11 and the inner tube 12 are heated to a high temperature for sealing, inert gas G1 flows inside the light-emitting tube 3 (see reference). Figure 7 This reduces the amount of glass particles adhering to the light-emitting tube 3.
[0098] Furthermore, after exhausting the gas inside the light-emitting tube 3 via exhaust pipes 40 and 41, a predetermined luminescent gas is sealed inside the light-emitting tube 3. The wavelength of the ultraviolet light emitted by the excimer lamp 1 is determined by the type of luminescent gas. As an example, when a luminescent gas containing Xe is sealed in the luminescent space S1, ultraviolet light with a peak wavelength around 172 nm is obtained. However, this invention does not limit the type of luminescent gas sealed in the luminescent space S1. For example, the excimer lamp 1 may also be configured to contain Kr and Cl2 as luminescent gases and have a peak wavelength around 222 nm.
[0099] After the luminescent gas is sealed, the exhaust pipes 40 and 41 are sealed by heating to form the exhaust pipe remnant 15 and exhaust pipe remnant 16. Then, after the inner electrode 5 and the outer electrode 7 are configured, bases (9a, 9b) are installed at both ends of the luminescent tube 3 in the X direction.
[0100] Assuming that no exhaust pipe 40 is provided on the outer wall surface 11a of the outer tube 11, in the above example, it becomes difficult to allow the inert gas G1 to flow within the light-emitting tube 3 while at least the sealing portion 13 is formed. Specifically, when forming the sealing portion 14, if an accessory (not shown) having a gas inlet and a gas outlet is fitted to the opening A1, it is assumed that the inert gas G1 can flow within the light-emitting tube 3 during the formation of the sealing portion 14. However, during the stage of forming the sealing portion 13, only the exhaust pipe 41 provided in the sealing portion 14 communicates with the light-emitting tube 3, and the inert gas G1 cannot flow within the light-emitting tube 3. Furthermore, it is impractical to form multiple exhaust pipes 41 in the sealing portion 14 for this purpose.
[0101] That is, by providing an exhaust pipe 40 on the outer wall surface 11a of the outer tube 11, dirt from the light-emitting tube 3 during the manufacturing process can be easily removed. More specifically, when the sealing part 13 and the sealing part 14 are formed, inert gas G1 can be allowed to circulate inside the light-emitting tube 3, thereby reducing glass particles adhering to the light-emitting tube 3. Therefore, even without performing a cleaning process such as immersing the entire light-emitting tube 3 in a cleaning solution, it is possible to obtain an excimer lamp 1 that suppresses dirt from the light-emitting tube 3 during the manufacturing process.
[0102] As a result of the above manufacturing process, in the excimer lamp 1, the remaining part 15 of the exhaust pipe is located on the outer wall surface of the outer pipe 11 (refer to...). Figure 1A (etc.). Furthermore, as described above, the remaining portion 15 of the exhaust pipe is located within the recessed region 20 of the base 9a and does not protrude from the outer wall surface 32 of the base 9a. As a result, the excimer lamp 1 is easy to handle when installed in exposure equipment, etc., and has high workability.
[0103] [Other Implementation Methods]
[0104] Hereinafter, other embodiments of the collimator lamp 1 will be described, focusing on the parts that differ from the first embodiment.
[0105] <1> Figure 8A and Figure 8B It is an imitation Figure 2 and Figure 1B A cross-sectional view showing another embodiment of the excimer lamp 1. (e.g.) Figure 8A and Figure 8B As shown, the base 9a may also have a groove 22 extending from the end on the -X side in the +X direction on the inner wall surface 31, and the remaining part 15 of the exhaust pipe is disposed in the groove 22. That is, the present invention is not limited to the configuration in which the base 9a has a through hole 21 and the remaining part 15 of the exhaust pipe is exposed through the through hole 21.
[0106] in addition, Figure 9A This is a cross-sectional view showing another embodiment of the excimer lamp 1. Figure 9B Observed from the Y direction Figure 9A The image shows the excimer lamp at step 1. (See image below.) Figure 9A As shown, in Figure 8A In the example, the base 9a may also have a through hole 23 that connects the groove 22 and the outer wall surface 32 in the Y direction. In this case, as... Figure 9B As shown, the through hole 23 is, for example, circular. Alternatively, the through hole 23 may also be rectangular. That is, in this invention, the shape of the through holes (21, 23) in the base 9a is not limited to a cut-out shape.
[0107] <2> Figure 10A It is an imitation Figure 1A This is a cross-sectional view showing another embodiment of the excimer lamp 1. Additionally, Figure 10B Observing from the +X direction Figure 10A The image shows the excimer lamp at time 1. Figure 10B The illustration of base 9a is omitted in the text.
[0108] like Figure 10A As shown, the excimer lamp 1 may also have a circular plate component 45 located in the X direction between the inner electrode 5 and the remaining part 15 of the exhaust pipe.
[0109] like Figure 10BAs shown, the circular plate component 45 is an annular shape extending radially from the inner tube 12. The circular plate component 45 is formed of the same type of material as the inner tube 12 and is fused and joined to the outer wall surface of the inner tube 12. More specifically, the circular plate component 45 is made of a glass material such as quartz glass. Furthermore, the outer diameter of the circular plate component 45 is smaller than the inner diameter of the outer tube 11, such as... Figure 10A and Figure 10B As shown, there is a gap between the circular plate component 45 and the outer tube 11.
[0110] It is known that the Si-O bonds in glass materials such as quartz glass are broken by ultraviolet light irradiation. Therefore, when the excimer lamp 1 is lit, the reaction of breaking the Si-O bonds occurs through ultraviolet light emitted from the light-emitting space S1, and strain is generated in the light-emitting tube 3. In particular, this reaction occurs significantly with ultraviolet light with wavelengths below 200 nm.
[0111] It is known that the Si-O bonds broken by ultraviolet light irradiation are recombined through a repair effect based on the OH groups contained in the glass material. Furthermore, this repair effect becomes more significant at higher temperatures in the glass material. This is because, at higher temperatures, the internal atoms are activated. That is, the higher the temperature of the light-emitting diode 3, the more significant the OH-based repair effect becomes, and the strain caused by the breaking of Si and O bonds is mitigated.
[0112] Here, as mentioned earlier, the remaining portion 15 of the exhaust pipe is thicker and has a more complex surface compared to the light-emitting tube 3, making it susceptible to strain caused by the shearing of Si and O. Therefore, it is more preferable to perform the aforementioned OH-based repair process near the remaining portion 15 of the exhaust pipe.
[0113] When the excimer lamp 1 is lit, similarly to the light-emitting tube 3, the circular plate component 45 becomes high-temperature. Therefore, as... Figure 10A As shown, by distributing the circular plate member 45 between the inner electrode 5 and the remaining portion 15 of the exhaust pipe, the high-temperature state of the region where the circular plate member 45 is disposed can be prolonged after the excimer lamp 1 is extinguished. That is, by providing the circular plate member 45 on the -X side of the remaining portion 15 of the exhaust pipe, the high-temperature state of the remaining portion 15 of the exhaust pipe after the excimer lamp 1 is extinguished is more easily sustained compared to the case where the circular plate member 45 is not disposed. Therefore, the influence of strain on the remaining portion 15 of the exhaust pipe can be suppressed.
[0114] From the viewpoint of maintaining a high-temperature state in the exhaust pipe remainder 15, it is preferable that the distance d1 between the exhaust pipe remainder 15 and the circular plate member 45 is small. As an example, the distance d1 is preferably 30 mm or less, and particularly preferably 10 mm or less. Furthermore, the distance d1 can be set as the distance in the X direction between the outermost radially located portion of the exhaust pipe remainder 15 and the circular plate member 45 (see [reference]). Figure 10A).
[0115] Although the illustration is omitted, during the manufacturing process of the excimer lamp 1, when the inner tube 12 is arranged inside the outer tube 11 (refer to...), Figure 5 By joining the circular plate component 45 to the outer wall surface of the inner tube 12, it is possible to achieve Figure 10A 1. Excimer lamp.
[0116] in addition, Figure 11 This diagram illustrates other structural examples of the inner tube 12. Regions with thicker tube walls are more likely to maintain a high-temperature state after the excimer lamp 1 is extinguished. Therefore, as... Figure 11 As shown, the inner tube 12 may also have a region 12a with a thicker wall and a region 12b with a thinner wall than region 12a, and a circular plate component 45 is formed in region 12a. Furthermore, this structure is preferred in that it facilitates the joining of the circular plate component 45 to the inner tube 12. As an example, the thickness of region 12a is 1 mm to 4 mm, preferably 1.5 mm to 3 mm. The thickness of region 12b is 0.5 mm to 2 mm, preferably 0.8 mm to 1.5 mm.
[0117] <3> The shape of the remaining parts of the exhaust pipe (15, 16) is not limited to the shapes described above. Figure 12 This is another example of a diagram showing the remaining parts of the exhaust pipe (15, 16). For example... Figure 12 As shown, for example, the remaining portion 15 of the exhaust pipe can also be sealed at a position closer to the light-emitting tube 3 than the top portion 15b. Additionally, as... Figure 12 As shown, the outer electrode 7 can also be configured on the remaining part 15 of the exhaust pipe.
[0118] <4> Both exhaust pipe remnants 15 and 16 can be provided on the outer wall surface of the outer tube 11. In this case, during the manufacturing process of the excimer lamp 1, two exhaust pipes are connected relative to the outer wall surface of the outer tube 11. Therefore, regarding the fact that inert gas G1 can flow relative to the light-emitting tube 3 when forming the sealing portion 13 and sealing portion 14, the same discussion as described in the first embodiment can be made.
[0119] <5> In the above description, the outer electrode 7 was described as having a mesh-like structure, but the present invention is not limited thereto. For example, the outer electrode 7 may also be composed of a wire member wound into a spiral shape on the outer wall surface of the outer tube 11, and may be striped.
[0120] <6> The structure of the excimer lamp 1 of this utility model is not limited to the structure shown in the figure.
[0121] Explanation of icon numbers
[0122] 1: Excimer lamp;
[0123] 3: LED;
[0124] 5: Inner electrode;
[0125] 7: Outer electrode;
[0126] 9a, 9b: Base;
[0127] 11: Outer tube;
[0128] 12: Inner tube;
[0129] 13, 14: Sealing parts;
[0130] 15, 16: Remaining parts of the exhaust pipe;
[0131] 20: concave area;
[0132] 21, 23: Through holes;
[0133] 22: slot;
[0134] 25: Elastic components;
[0135] 31: Inner wall surface;
[0136] 32: Outer wall surface;
[0137] 33: Inner bottom surface;
[0138] 34: Outer bottom surface;
[0139] 40, 41: Exhaust pipes;
[0140] 45: Circular plate component;
[0141] 90: Light-emitting diode;
[0142] 91: Outer tube;
[0143] 92: Inner tube;
[0144] 93: Sealing part;
[0145] 94: Base;
[0146] 95: Inner electrode;
[0147] 97: Outer electrode;
[0148] 99: Buffer components;
[0149] 100: Excimer lamp;
[0150] 105: Remaining part of the exhaust pipe.
Claims
1. An excimer lamp, characterized in that, have: The outer tube extends along the tube axis; An inner tube is arranged extending along the tube axis direction inside the outer tube; A light-emitting tube, wherein the ends of the outer tube and the inner tube are sealed in the axial direction; The luminescent gas is sealed into the luminescent space sandwiched between the outer tube and the inner tube; The outer electrode is disposed on the outer wall surface of the outer tube; The inner electrode is disposed on the inner wall surface of the inner tube; The base is recessed along the tube axis and has a recessed area for inserting the end of the light-emitting tube in the tube axis direction; as well as The remaining portion of the exhaust pipe has a base on the outer wall surface of the outer pipe located within the recessed area, protruding in a direction different from the pipe axis direction. The top end of the remaining part of the exhaust pipe is located closer to the light-emitting tube than the outer wall surface of the base.
2. The excimer lamp according to claim 1, characterized in that, The base has a through hole that connects the inner wall surface of the recessed region with the outer wall surface of the base. The remaining portion of the exhaust pipe is exposed through the through hole.
3. The excimer lamp according to claim 2, characterized in that, The through hole is connected to the outer edge of the base located on the central side of the light-emitting tube in the tube axis direction, forming a cut-shaped opening.
4. The excimer lamp according to any one of claims 1 to 3, characterized in that, The excimer lamp has a circular plate component located between the outer tube and the inner tube, which is engaged with the inner tube in the axial direction between the inner electrode and the remainder of the exhaust pipe, and is made of glass material.
5. The excimer lamp according to any one of claims 1 to 3, characterized in that, The end opposite to the exhaust pipe remainder in the axial direction of the pipe also has a second exhaust pipe remainder that is different from the exhaust pipe remainder and is formed in the sealing portion that seals the outer pipe and the inner pipe.