A high-speed air-electric slip ring applied to a semiconductor device

Abstract

The utility model belongs to high -speed gas electricity slip ring technical field especially a high -speed gas electricity slip ring for semiconductor equipment, in view of the existing high -speed gas electricity slip ring in long time high -speed operation process, it is difficult to heat quickly and effectively, and further lead to equipment overheating, reduced equipment life and reliability problem, present and propose the following scheme, it includes casing and sealing cover, casing and sealing cover fixed connection, main shaft, main shaft rotation installs on the casing, has the copper ring on the main shaft, the one side fixed mounting of sealing cover has the bearing, the inner ring of bearing and the outside fixed connection of main shaft, the one end of main shaft is provided with air inlet, sealing ring, the one side of sealing cover is equipped with the installation slot, sealing ring fixed mounting is in the installation slot, the utility model discloses can in the use process, it is convenient to the high -speed gas electricity slip ring inside carries out the quick effective heat dissipation, and further effectively avoids equipment overheating, improves equipment life and reliability, simple structure, convenient to use.

Description

Technical Field

[0001] This application relates to the field of high-speed gas-electric slip ring technology, and in particular to a high-speed gas-electric slip ring for use in semiconductor equipment. Background Technology

[0002] A high-speed slip ring is a device for transmitting power, signals, and data. It maintains a continuous electrical connection during rotational motion, enabling smooth operation of rotating components while transmitting various signals and data. High-speed slip rings provide an effective solution for precision equipment operating at high speeds that requires the transmission of low current or signals between a rotating and stationary platform. High-speed slip rings are also called high-speed rotation slip rings, ultra-high-speed slip rings, high-speed rotary slip rings, high-speed collector rings, and high-speed conductive slip rings.

[0003] In existing technologies, high-speed gas-electric slip rings are difficult to dissipate heat quickly and effectively during long-term high-speed operation, which leads to overheating of the equipment and reduces its lifespan and reliability. To address this issue, we propose a high-speed gas-electric slip ring for semiconductor equipment. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing high-speed gas-electric slip rings, which are difficult to dissipate heat quickly and effectively during long-term high-speed operation, leading to overheating of the equipment and reducing its lifespan and reliability. This invention proposes a high-speed gas-electric slip ring for use in semiconductor equipment.

[0005] This application provides a high-speed gas-electric slip ring for semiconductor equipment, which adopts the following technical solution:

[0006] A high-speed gas-electric slip ring for use in semiconductor equipment, comprising:

[0007] The housing and the sealing cover are fixedly connected;

[0008] The spindle is rotatably mounted on the housing. A copper ring is connected to the spindle. A bearing is fixedly mounted on one side of the sealing cover. The inner ring of the bearing is fixedly connected to the outer side of the spindle. An air inlet is provided at one end of the spindle.

[0009] The sealing ring has an installation groove on one side of the sealing cover, and the sealing ring is fixedly installed in the installation groove. The sealing cover has an air intake channel and two interfaces connected to it.

[0010] There are two brush holders, both of which are fixedly installed on one side of the sealing cover. The same sealing plate is fixedly connected to both brush holders, and multiple brush bristles are connected to both brush holders.

[0011] The oil tank and the air box are both fixedly installed on the outside of the shell, and the oil tank is equipped with a lubrication mechanism.

[0012] Furthermore, the top and bottom of the air box are provided with air inlets, a dustproof net is fixedly installed inside the air inlet, a fixing plate is fixedly installed inside the air box, and a micro motor is fixedly installed on the top of the fixing plate.

[0013] Furthermore, both the oil tank and the air box have through holes on one side, and the same drive shaft is rotatably installed in the two through holes. One end of the drive shaft is fixedly connected to a worm gear. When the worm gear rotates, it drives the drive shaft to rotate.

[0014] Furthermore, an eccentric wheel is fixedly installed at the other end of the drive shaft. The eccentric wheel contacts the outer side of the slide plate. When the drive shaft rotates, the eccentric wheel drives the slide plate to move vertically.

[0015] Furthermore, a vertical rod is slidably mounted on the slide plate, one end of which is fixedly connected to the bottom of the oil tank, and a spring is sleeved on the outside of the vertical rod, with both ends of the spring fixedly connected to the top of the vertical rod and the slide plate, respectively.

[0016] Furthermore, the lubrication mechanism includes a slide plate, which is slidably mounted on one side of the oil tank. The oil tank and the housing are fixedly mounted with the same oil outlet pipe. A plug is slidably mounted inside the oil outlet pipe, and the plug cooperates with the oil outlet pipe.

[0017] Furthermore, a worm gear is rotatably mounted on the fixed plate, one end of which is fixedly connected to the output shaft of the micro motor. A fan blade is fixedly mounted on the outside of the micro motor, and a worm wheel meshes on the worm gear. When the micro motor is turned on, the worm gear drives the worm wheel to rotate.

[0018] Furthermore, the inner wall of the housing is provided with an annular cavity, the inner wall of the annular cavity is provided with a through groove, an annular heat sink is fixedly installed in the through groove, and the inner wall of the annular cavity is provided with multiple vent holes.

[0019] In summary, this application includes at least one of the following beneficial technical effects:

[0020] 1. This solution uses a micro motor to drive a worm gear, which in turn drives the fan blades. The air pressure generated by the fan blades is expelled through the air inlet and vent, thus achieving rapid and effective heat dissipation from the inside of the casing.

[0021] 2. In this design, the worm gear drives the worm wheel to rotate, which in turn drives the transmission shaft to rotate. The transmission shaft then drives the eccentric wheel to rotate, which in turn drives the slide plate to move vertically downwards. The slide plate stretches the spring, and when the eccentric wheel rotates to a certain position, the spring, through deformation force, drives the slide plate to return to its original position. This causes the slide plate to drive the blocking column to move vertically back and forth, thus allowing for intermittent opening and closing of the oil outlet pipe. The lubricating oil in the oil tank is discharged to the bearings and main shaft through the oil outlet pipe, thereby achieving the purpose of lubricating and cooling the bearings and main shaft, effectively improving the service life of the equipment.

[0022] This invention enables rapid and effective heat dissipation inside the high-speed pneumatic-electric slip ring during use, thereby effectively preventing equipment overheating, improving equipment lifespan and reliability, and featuring a simple structure and convenient use. Attached Figure Description

[0023] Figure 1 This is a front view structural schematic diagram of a high-speed gas-electric slip ring for semiconductor equipment proposed in this utility model;

[0024] Figure 2 This is a schematic diagram of the structure of a sealing cover for a high-speed pneumatic-electric slip ring applied to semiconductor equipment, as proposed in this utility model.

[0025] Figure 3 This is a schematic diagram of the internal structure of a high-speed pneumatic-electric slip ring for use in semiconductor equipment, as proposed in this utility model.

[0026] Figure 4 This is a schematic diagram of the internal structure of the oil tank and air box of a high-speed pneumatic-electric slip ring for semiconductor equipment proposed in this utility model;

[0027] Figure 5 This invention proposes a high-speed pneumatic-electric slip ring for use in semiconductor equipment. Figure 4 An enlarged structural diagram of part A in the middle.

[0028] Reference numerals: 1. Housing; 2. Sealing cover; 3. Main shaft; 4. Oil tank; 5. Air box; 6. Dustproof net; 7. Air intake channel; 8. Sealing ring; 9. Brush holder plate; 10. Sealing plate; 11. Brush bristles; 12. Copper ring; 13. Bearing; 14. Annular cavity; 15. Annular heat sink; 16. Fixing plate; 17. Micro motor; 18. Worm gear; 19. Fan blade; 20. Worm wheel; 21. Drive shaft; 22. Eccentric wheel; 23. Slide plate; 24. Oil outlet pipe; 25. Plug; 26. Vertical rod; 27. Spring. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0030] Example 1

[0031] Reference Figures 1-5 A high-speed pneumatic-electric slip ring for use in semiconductor equipment includes: a housing 1 and a sealing cover 2, wherein the housing 1 and the sealing cover 2 are fixedly connected;

[0032] The main spindle 3 is rotatably mounted on the housing 1. A copper ring 12 is connected to the main spindle 3. A bearing 13 is fixedly mounted on one side of the sealing cover 2. The inner ring of the bearing 13 is fixedly connected to the outer side of the main spindle 3. An air inlet is provided at one end of the main spindle 3.

[0033] The sealing ring 8 and the sealing cover 2 have an installation groove on one side. The sealing ring 8 is fixedly installed in the installation groove. The sealing cover 2 has an air intake channel 7 and two interfaces are connected to it.

[0034] There are two brush holder plates 9. Both brush holder plates 9 are fixedly installed on one side of the sealing cover 2. The same sealing plate 10 is fixedly connected to both brush holder plates 9. Multiple brush bristles 11 are connected to both brush holder plates 9.

[0035] Oil tank 4 and air box 5 are both fixedly installed on the outside of housing 1. A lubrication mechanism is provided inside oil tank 4.

[0036] In this embodiment, air inlets are provided at the top and bottom of the air box 5, and a dustproof net 6 is fixedly installed inside the air inlet. A fixing plate 16 is fixedly installed inside the air box 5, and a micro motor 17 is fixedly installed on the top of the fixing plate 16. A through hole is provided on one side of the oil tank 4 and one side of the air box 5. The same drive shaft 21 is rotatably installed in the two through holes. One end of the drive shaft 21 is fixedly connected to the worm gear 20. When the worm gear 20 rotates, the worm gear 20 drives the drive shaft 21 to rotate. An eccentric wheel 22 is fixedly installed at the other end of the drive shaft 21. The eccentric wheel 22 contacts the outer side of the slide plate 23. When the drive shaft 21 rotates, the eccentric wheel 22 drives the slide plate 23 to move vertically.

[0037] In this embodiment, a vertical rod 26 is slidably mounted on the slide plate 23. One end of the vertical rod 26 is fixedly connected to the bottom of the oil tank 4. A spring 27 is sleeved on the outside of the vertical rod 26. The two ends of the spring 27 are fixedly connected to the top of the vertical rod 26 and the slide plate 23, respectively. The lubrication mechanism includes the slide plate 23, which is slidably mounted on one side of the oil tank 4. The oil tank 4 and the housing 1 are fixedly mounted on the same oil outlet pipe 24. A plug 25 is slidably mounted inside the oil outlet pipe 24, and the plug 25 cooperates with the oil outlet pipe 24. A worm gear 18 is rotatably mounted on the fixed plate 16. One end of the worm gear 18 is fixedly connected to the output shaft of the micro motor 17. A fan blade 19 is fixedly mounted on the outside of the micro motor 17. A worm wheel 20 is meshed on the worm gear 18. When the micro motor 17 is turned on, the worm gear 18 drives the worm wheel 20 to rotate. An annular cavity 14 is opened on the inner wall of the housing 1. A through groove is opened on the inner wall of the annular cavity 14. An annular heat sink 15 is fixedly installed in the through groove. Multiple ventilation holes are opened on the inner wall of the annular cavity 14.

[0038] The implementation principle of a high-speed pneumatic-electric slip ring applied to semiconductor equipment according to an embodiment of this application is as follows: During use, air or electricity is supplied through two interfaces. When powered, multiple brush filaments 11 on the two brush holder plates 9 contact and cooperate with the copper ring 12, enabling stable transmission of current and data signals during high-speed rotation of the main shaft 3. When supplied with air, the air is delivered to the rotating end of the main shaft 3 through the air intake channel 7, completing the gas delivery. During the high-speed operation of the main shaft 3, the annular heat sink 15 absorbs heat from inside the housing 1. By activating the micro motor 17, the micro motor 17 drives the worm gear 18 to rotate, which in turn drives the fan blades 19 to rotate. The air pressure generated by the rotation of the fan blades 19, through the air inlet and vent, can dissipate heat from the annular heat sink 15. The absorbed heat is discharged, thus achieving rapid and effective heat dissipation inside the housing 1. At the same time, the worm gear 18 drives the worm wheel 20 to rotate, the worm wheel 20 drives the transmission shaft 21 to rotate, the transmission shaft 21 drives the eccentric wheel 22 to rotate, and the eccentric wheel 22 drives the slide plate 23 to move vertically downward. The slide plate 23 stretches the spring 27. When the eccentric wheel 22 rotates to a certain position, the spring 27 drives the slide plate 23 to return to its original position through deformation force. Then, the slide plate 23 drives the plug 25 to move vertically back and forth, which can intermittently open and close the oil outlet pipe 24. The lubricating oil in the oil tank 4 is discharged to the bearing 13 and the main shaft 3 through the oil outlet pipe 24, thus achieving the purpose of lubrication and heat dissipation of the bearing 13 and the main shaft 3, effectively improving the service life of the equipment.

[0039] Example 2

[0040] The difference between this embodiment and embodiment one is that: a collection box is fixedly installed at the bottom of the housing 1 by bolts, and a drain port is opened on the inner wall of the housing 1, through which waste oil can be discharged into the collection box for collection.

[0041] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A high-speed gas-electric slip ring for use in semiconductor equipment, characterized in that: include: The housing (1) and the sealing cover (2) are fixedly connected; The main shaft (3) is rotatably mounted on the housing (1). A copper ring (12) is connected to the main shaft (3). A bearing (13) is fixedly mounted on one side of the sealing cover (2). The inner ring of the bearing (13) is fixedly connected to the outer side of the main shaft (3). An air inlet is provided at one end of the main shaft (3). A sealing ring (8) and a sealing cover (2) are provided with an installation groove on one side. The sealing ring (8) is fixedly installed in the installation groove. An air inlet channel (7) is provided inside the sealing cover (2). Two interfaces are connected to the sealing cover (2). Brush holder plate (9), there are two brush holder plates (9), both brush holder plates (9) are fixedly installed on one side of the sealing cover (2), the same sealing plate (10) is fixedly connected to the two brush holder plates (9), and multiple brush bristles (11) are connected to the two brush holder plates (9). The oil tank (4) and the air box (5) are both fixedly installed on the outside of the shell (1), and a lubrication mechanism is provided inside the oil tank (4).

2. The high-speed gas-electric slip ring for semiconductor equipment according to claim 1, characterized in that: The inner wall of the housing (1) has an annular cavity (14), the inner wall of the annular cavity (14) has a through groove, an annular heat sink (15) is fixedly installed in the through groove, and the inner wall of the annular cavity (14) has multiple vent holes.

3. A high-speed gas-electric slip ring for semiconductor equipment according to claim 2, characterized in that: The top and bottom of the air box (5) are provided with air inlets, and a dustproof net (6) is fixedly installed inside the air inlet. A fixing plate (16) is fixedly installed inside the air box (5), and a micro motor (17) is fixedly installed on the top of the fixing plate (16).

4. A high-speed gas-electric slip ring for semiconductor equipment according to claim 3, characterized in that: A worm gear (18) is rotatably mounted on the fixed plate (16). One end of the worm gear (18) is fixedly connected to the output shaft of the micro motor (17). A fan blade (19) is fixedly mounted on the outside of the micro motor (17). A worm wheel (20) meshes on the worm gear (18).

5. A high-speed gas-electric slip ring for semiconductor equipment according to claim 4, characterized in that: One side of the oil tank (4) and one side of the air box (5) are provided with through holes, and the same drive shaft (21) is rotatably installed in the two through holes. One end of the drive shaft (21) is fixedly connected to the worm gear (20).

6. A high-speed gas-electric slip ring for semiconductor equipment according to claim 5, characterized in that: The lubrication mechanism includes a slide plate (23), which is slidably installed on one side of the oil tank (4). The oil tank (4) and the housing (1) are fixedly installed with the same oil outlet pipe (24). A plug (25) is slidably installed inside the oil outlet pipe (24), and the plug (25) cooperates with the oil outlet pipe (24).

7. A high-speed gas-electric slip ring for semiconductor equipment according to claim 6, characterized in that: An eccentric wheel (22) is fixedly installed at the other end of the drive shaft (21), and the eccentric wheel (22) contacts the outer side of the slide plate (23).

8. A high-speed gas-electric slip ring for semiconductor equipment according to claim 7, characterized in that: A vertical rod (26) is slidably mounted on the slide plate (23). One end of the vertical rod (26) is fixedly connected to the bottom of the oil tank (4). A spring (27) is sleeved on the outside of the vertical rod (26). The two ends of the spring (27) are fixedly connected to the top of the vertical rod (26) and the slide plate (23), respectively.

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