Magnetic coupling rotary mechanism for vacuum equipment

Abstract

The utility model relates to a kind of magnetic coupling rotating mechanism for vacuum equipment, including, transmission shaft, bearing seat, sealing flange, magnetic core and stainless steel isolation shell, steel bearing is provided on the transmission shaft, the bearing seat is embedded in the middle of sealing flange, sealing flange side is provided with side groove, one end of stainless steel isolation shell is embedded in side groove, embedding groove is set in the inboard of bearing seat, the steel bearing is embedded in the side groove;The magnetic core is set in stainless steel isolation shell, the magnetic core is connected with transmission shaft;Sealing structure of welding in the utility model in sealing flange and stainless steel isolation shell, combined with each component accurate assembly, effectively maintain vacuum environment, avoid the vacuum leakage problem caused by rotary seal, guarantee vacuum equipment stable operation.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum equipment technology, specifically a magnetic coupling rotation mechanism for vacuum equipment. Background Technology

[0002] In industrial production and scientific research, the transmission of rotary motion in a vacuum environment is a core component in achieving many precision processes. Vacuum rotating components, as key devices connecting the internal and external power and motion of a vacuum chamber, directly affect the stability and reliability of the entire vacuum system. These components are widely used in semiconductor wafer etching, vacuum coating, aerospace material vacuum testing, and nuclear industry vacuum reactors, requiring the maintenance of a high vacuum state within the chamber (typically requiring a vacuum level of 10⁻⁵). -3 Pa to 10 -8 While achieving Pa level, it precisely transmits the rotational motion of the external drive device to the core components such as the target material, sample stage, and stirring paddle inside the cavity to meet the process requirements of uniform coating, precise etching, and material mixing.

[0003] Traditional rotary transmission methods mostly use contact-type mechanical seal structures, which achieve sealing through the tight fit between the rotating ring and the stationary ring. However, under long-term high-speed rotation, the sealing surface is prone to wear due to friction, leading to vacuum leakage. It may also generate tiny particles that contaminate the vacuum chamber, which not only reduces the reliability of equipment operation but also requires frequent maintenance and replacement of seals, increasing production costs and downtime. Utility Model Content

[0004] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the present invention.

[0005] Given the following technical problems in the existing technology: under long-term high-speed rotation, the sealing surface of the existing transmission method is prone to wear due to friction, which leads to vacuum leakage and may also generate microparticles that contaminate the vacuum cavity.

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a magnetically coupled rotating mechanism for vacuum equipment, comprising,

[0007] The system comprises a transmission shaft, a bearing housing, a sealing flange, a magnetic core, and a stainless steel isolation shell. A steel bearing is mounted on the transmission shaft. The bearing housing is embedded in the middle of the sealing flange. A side groove is provided on one side of the sealing flange. One end of the stainless steel isolation shell is embedded in the side groove. An insert groove is provided on the inner side of the bearing housing, and the steel bearing is embedded in the side groove. The magnetic core is disposed in the stainless steel isolation shell and is connected to the transmission shaft.

[0008] As a preferred technical solution for a magnetically coupled rotating mechanism for vacuum equipment, the magnetic core is provided with a first pin hole on its side, and the transmission shaft is provided with a second pin hole, the first pin hole and the second pin hole being connected by a pin.

[0009] As a preferred technical solution for a magnetically coupled rotating mechanism for vacuum equipment, the end of the magnetic core is provided with a side ring, which is in contact with a steel bearing.

[0010] As a preferred technical solution for a magnetically coupled rotary mechanism for vacuum equipment, the transmission shaft is provided with an annular groove, and a small retaining ring is provided in the annular groove, the small retaining ring being located on one side of a steel bearing.

[0011] As a preferred technical solution for a magnetically coupled rotary mechanism for vacuum equipment, the sealing flange has a countersunk hole in the middle, the bearing housing is embedded in the countersunk hole, the countersunk hole also has an inner ring groove, the inner ring groove has a large retaining ring, and the large retaining ring is located on one side of the bearing housing.

[0012] As a preferred technical solution for a magnetically coupled rotating mechanism for vacuum equipment, two side grooves are provided, respectively located on both sides of the inner hole of the bearing seat, and two steel bearings are provided, embedded in the two side grooves.

[0013] As a preferred technical solution for a magnetic coupling rotary mechanism for vacuum equipment, a magnetic handle is sleeved on the outer side of the stainless steel isolation shell. The magnetic handle includes an annular shell and a side plate disposed at the end of the annular shell. A central hole is provided on the side plate. A through shaft is provided on one side of the stainless steel isolation shell, and the through shaft passes through the central hole.

[0014] As a preferred technical solution for a magnetic coupling rotary mechanism for vacuum equipment, a magnetic handle is sleeved on the outer side of the stainless steel isolation shell. The magnetic handle includes an annular shell and a side plate disposed at the end of the annular shell. A central hole is provided on the side plate. A through shaft is provided on one side of the stainless steel isolation shell, and the through shaft passes through the central hole.

[0015] The beneficial effects of this utility model are as follows: The welded sealing structure of the sealing flange and the stainless steel isolation shell in this utility model, combined with the precise assembly of each component, effectively maintains the vacuum environment, avoids vacuum leakage caused by rotary sealing, and ensures the stable operation of the vacuum equipment; the axial limiting of the large and small retaining rings, as well as the reasonable assembly of each component, ensure the structural stability of the mechanism in the long-term operation in the vacuum environment, reduce the probability of failure caused by factors such as vibration and displacement, and extend the service life of the equipment. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the overall cross-sectional structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the overall exploded structure of this utility model.

[0020] Reference numerals: 51, groove; 71, first pin hole; 11, second pin hole; 7, magnetic core; 72, side ring; 1, transmission shaft; 12, annular groove; 3, small retaining ring; 6, sealing flange; 62, inner annular groove; 2, large retaining ring; 61, side groove; 5, bearing housing; 4, steel bearing; 9, magnetic handle; 91, ring shell; 92, side plate; 8, stainless steel isolation shell; 81, through shaft; 93, intermediate hole. Detailed Implementation

[0021] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0022] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0023] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0024] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0025] Example 1

[0026] Reference Figures 1-3 This embodiment provides a magnetic coupling rotary mechanism for vacuum equipment, including a sealing flange 6, a large retaining ring 2, a small retaining ring 3, a bearing housing 5, a steel bearing 4, a transmission shaft 1, a magnetic core 7, a stainless steel isolation shell 8, and a magnetic handle 9. All components work together; the sealing flange 6 and the stainless steel isolation shell 8 ensure vacuum sealing; the bearing housing 5 and the steel bearing 4 provide rotational support for the transmission shaft 1; the magnetic core 7 and the magnetic handle achieve power coupling transmission via a magnetic field; and the large retaining ring 2 and the small retaining ring 3 provide axial limiting.

[0027] Specifically, a magnetic coupling rotary mechanism for a vacuum device includes a transmission shaft 1, a bearing housing 5, a sealing flange 6, a magnetic core 7, and a stainless steel isolation shell 8. A steel bearing 4 is mounted on the transmission shaft 1. The bearing housing 5 is embedded in the middle of the sealing flange 6. A side groove 61 is provided on one side of the sealing flange 6. One end of the stainless steel isolation shell 8 is embedded in the side groove 61. An insert groove 51 is provided on the inner side of the bearing housing 5, and the steel bearing 4 is embedded in the side groove 61. The magnetic core 7 is disposed in the stainless steel isolation shell 8 and is connected to the transmission shaft 1.

[0028] It should be noted that the stainless steel isolation shell 8 is fixed in the side groove 61 by welding.

[0029] The magnetic core 7 is fixed on the transmission shaft 1, and the magnetic core 7 does not contact the stainless steel isolation shell 8.

[0030] The magnetic core 7 has a first pin hole 71 on its side, and the transmission shaft 1 has a second pin hole 11. The first pin hole 71 and the second pin hole 11 are connected by a pin.

[0031] It should be noted that the pin serves as a key connection and fixation, securing the magnetic core 7 and the transmission shaft 1 together to transmit power.

[0032] The magnetic core 7 has a side ring 72 at its end, which is in contact with the steel bearing 4.

[0033] The side ring 72 is connected to the inner ring of the steel bearing 4.

[0034] The transmission shaft 1 is provided with an annular groove 12, and a small retaining ring 3 is provided in the annular groove 12. The small retaining ring 3 is located on one side of the steel bearing 4.

[0035] The sealing flange 6 has a countersunk hole in the middle, the bearing housing 5 is embedded in the countersunk hole, the countersunk hole also has an inner ring groove 62, the inner ring groove 62 has a large retaining ring 2, and the large retaining ring 2 is located on one side of the bearing housing 5.

[0036] There are two side grooves 61, which are respectively located on both sides of the inner hole of the bearing seat 5. There are two steel bearings 4, which are embedded in the two side grooves 61.

[0037] A magnetic handle 9 is fitted on the outside of the stainless steel isolation shell 8. The magnetic handle 9 includes an annular shell 91 and a side plate 92 located at the end of the annular shell 91. A central hole 93 is provided on the side plate 92. A through shaft 81 is provided on one side of the stainless steel isolation shell 8, and the through shaft 81 passes through the central hole 93.

[0038] The assembly method of this application is as follows: Welding of the sealing structure: The sealing flange 6 and the stainless steel isolation shell 8 are connected by welding. During welding, the welding parameters are strictly controlled, and a high-precision argon arc welding method is adopted to ensure that the two form a continuous and dense sealing structure, preventing external gas from entering the vacuum area and laying the foundation for subsequent assembly and vacuum environment maintenance.

[0039] Connection of transmission shaft 1 to magnetic core 7: The input end of transmission shaft 1 is adapted and connected to magnetic core 7. During the connection process, high-precision tooling fixtures are used to ensure that the coaxiality error between the two is controlled within 0.01mm. Through key connection and interference fit, the accuracy and stability of power transmission are ensured, so that transmission shaft 1 can rotate synchronously with magnetic core 7.

[0040] Assembly of steel bearing 4 with bearing housing 5 and transmission shaft 1: Install steel bearing 4 into the bearing positions on both sides of bearing housing 5. Before assembly, clean the surfaces of bearing and bearing housing 5 to remove oil and impurities. During assembly, use professional bearing assembly tools to smoothly press steel bearing 4 into bearing housing 5, ensuring the correct installation direction and installation accuracy of steel bearing 4. Then, fit the bearing housing 5 with steel bearing 4 installed into transmission shaft 1. For steel bearing 4 near the outer side, use small retaining ring 3 for axial limiting. Small retaining ring 3 must be precisely engaged in the corresponding grooves of transmission shaft 1 and bearing housing 5, controlling the gap between small retaining ring 3 and bearing end face within 0.05mm to limit axial movement of the bearing and ensure that steel bearing 4 provides stable support during the rotation of transmission shaft 1.

[0041] Overall Mechanism Installation and Positioning: The mechanism, having completed the aforementioned partial assembly, is slowly and precisely installed into the pre-welded sealing flange 6 – stainless steel isolation shell 8 sealing structure. The mechanism is adjusted to the correct installation position. Then, the large retaining ring 2 is used to axially tighten the entire mechanism. The large retaining ring 2 engages with the groove that fits the sealing structure and the mechanism, fixing the mechanism's axial position within the sealing structure and preventing axial displacement during operation, thus ensuring the positional accuracy of each component working in tandem.

[0042] The working principle of this application is as follows:

[0043] In the vacuum environment of the vacuum equipment, the magnetic handle on the external operating end forms a magnetic coupling relationship with the internal magnetic core 7. When the magnetic handle rotates around a set axis, the magnetic force generated by the magnetic handle, based on the interaction of magnetic fields, drives the magnetic core 7 to rotate synchronously. The magnetic core 7 is fixedly connected to the transmission shaft 1, thereby driving the transmission shaft 1 to rotate, realizing the non-contact transmission of power from the outside to the inside of the vacuum environment.

[0044] The steel bearing 4 provides radial support and rotational guidance for the transmission shaft 1, ensuring smooth rotation and reducing rotational friction and energy loss. The sealing structure, consisting of the sealing flange 6 and the stainless steel isolation shell 8, effectively isolates the vacuum environment from the external atmosphere, maintaining the required vacuum level for the vacuum equipment. The large retaining ring 2 and the small retaining ring 3, through axial limiting, ensure the stable position of components such as the bearing housing 5, bearing, and transmission shaft 1, preventing component displacement from affecting the magnetic coupling effect and rotational accuracy. This allows the magnetic coupling rotation mechanism to reliably complete power transmission and rotation functions under vacuum conditions, meeting the dual requirements of vacuum equipment for motion transmission and vacuum pressure maintenance.

[0045] This application has the following beneficial effects: 1. Sealing reliability: The welded sealing structure of the sealing flange and the stainless steel isolation shell, combined with the precise assembly of each component, effectively maintains the vacuum environment, avoids vacuum leakage problems caused by rotary sealing, and ensures stable operation of vacuum equipment.

[0046] 2. Precision of power transmission: By controlling the connection precision between the transmission shaft and the magnetic core, the bearing assembly precision, and the limit of each component, precise power transmission is achieved, reducing errors and energy loss during rotation and improving the operating accuracy of vacuum equipment.

[0047] 3. Structural stability: The axial limiting of the large and small retaining rings, as well as the reasonable assembly of each component, ensure the structural stability of the mechanism during long-term operation in a vacuum environment, reduce the probability of failure caused by factors such as vibration and displacement, and extend the service life of the equipment.

[0048] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0049] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A magnetically coupled rotating mechanism for a vacuum device, characterized in that: include, The transmission shaft (1), bearing housing (5), sealing flange (6), magnetic core (7), and stainless steel isolation shell (8) are provided. A steel bearing (4) is provided on the transmission shaft (1). The bearing housing (5) is embedded in the middle of the sealing flange (6). A side groove (61) is provided on one side of the sealing flange (6). One end of the stainless steel isolation shell (8) is embedded in the side groove (61). A groove (51) is provided on the inner side of the bearing housing (5). The steel bearing (4) is embedded in the side groove (61). The magnetic core (7) is provided in the stainless steel isolation shell (8) and is connected to the transmission shaft (1).

2. The magnetically coupled rotating mechanism for vacuum equipment according to claim 1, characterized in that: The magnetic core (7) has a first pin hole (71) on its side, and the transmission shaft (1) has a second pin hole (11). The first pin hole (71) and the second pin hole (11) are connected by a pin.

3. The magnetically coupled rotating mechanism for vacuum equipment according to claim 1 or 2, characterized in that: The magnetic core (7) is provided with a side ring (72) at its end, and the side ring (72) is in contact with the steel bearing (4).

4. The magnetically coupled rotating mechanism for vacuum equipment according to claim 3, characterized in that: The transmission shaft (1) is provided with an annular groove (12), and a small retaining ring (3) is provided in the annular groove (12). The small retaining ring (3) is located on one side of the steel bearing (4).

5. The magnetically coupled rotating mechanism for vacuum equipment according to claim 4, characterized in that: The sealing flange (6) has a countersunk hole in the middle, the bearing seat (5) is embedded in the countersunk hole, and an inner ring groove (62) is also provided in the countersunk hole. A large retaining ring (2) is provided in the inner ring groove (62) and the large retaining ring (2) is located on one side of the bearing seat (5).

6. The magnetically coupled rotating mechanism for vacuum equipment according to claim 5, characterized in that: Two side grooves (61) are provided, respectively located on both sides of the inner hole of the bearing seat (5), and two steel bearings (4) are provided, embedded in the two side grooves (61).

7. The magnetically coupled rotating mechanism for vacuum equipment according to claim 6, characterized in that: A magnetic handle (9) is fitted on the outside of the stainless steel isolation shell (8). The magnetic handle (9) includes an annular shell (91) and a side plate (92) disposed at the end of the annular shell (91). A central hole (93) is provided on the side plate (92). A through shaft (81) is provided on one side of the stainless steel isolation shell (8), and the through shaft (81) passes through the central hole (93).

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