An etching line uniform etching device

By combining the lower fixture with the upper cover plate and using a spring-driven movable plate clamping mechanism, the problems of uneven etching and cumbersome operation during substrate transfer are solved, achieving uniform spraying of etching solution and improving production efficiency.

CN224538427UActive Publication Date: 2026-07-21KUNSHAN EXMOS MASCH TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
KUNSHAN EXMOS MASCH TECH CO LTD
Filing Date
2025-09-01
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

In the existing technology, the substrate transport method leads to uneven etching and low production efficiency. Roller transport has a shading effect, while the fixture solution is cumbersome to operate and affects the equipment capacity.

Method used

The system employs a combination structure of a lower fixture and an upper cover plate. Through a spring-driven movable plate and clamping post mechanism, it only needs to hold the edge of the substrate to ensure uniform spraying of the etching solution and achieve rapid clamping and release.

Benefits of technology

It eliminates the shading effect, ensures uniform spraying of the etching solution, improves the uniformity of the etching line and production efficiency, and is convenient and efficient to operate.

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Abstract

The utility model relates to etching device field especially relates to a kind of etching line uniform etching device, substrate is conveyed on etching machine body by conveying assembly, the substrate is positioned by being wrapped by lower fixture and upper cover plate;The two sides of lower fixture are provided with multiple movable plates by spring, and the movable plate is fixedly provided with clamping column, and the upper cover plate is adapted to be provided with clamping cavity corresponding to clamping column.The utility model in the middle, only need to clamp the edge of substrate by the combination structure between lower fixture and upper cover plate, eliminate the shielding defect generated by traditional roller transmission, ensure the uniform spraying of etching liquid on the double sides of substrate, to guarantee the uniformity of etching line, the movable plate and clamping column mechanism driven by spring can realize the quick clamping and release of substrate, convenient and efficient operation, improve production efficiency.
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Description

Technical Field

[0001] This utility model relates to the field of etching equipment technology, and in particular to a uniform etching device for etching lines. Background Technology

[0002] In the wet etching process for printed circuit boards (and other electronic components), the substrate transport method is the core issue affecting etching uniformity and production efficiency.

[0003] Currently, the mainstream approach uses roller conveying, where the substrate is directly supported and transported by rotating rollers. While this method is efficient, it has inherent drawbacks. The contact between the rollers and the back of the substrate can cause obstruction, hindering the spraying and renewal of the etching solution. This results in periodic strip-shaped etching residues, severely impacting product yield.

[0004] To improve uniformity, high-end manufacturing employs a fixture solution, fixing the substrate to a specialized jig that only clamps the edges, fully exposing the board surface. Chinese Patent Publication No. CN220503205U discloses an "Etching Fixture" solution. While this effectively eliminates the shading effect, each substrate requires individual clamping, alignment, and locking, making the operation cumbersome and significantly reducing equipment capacity utilization and production efficiency. Therefore, there is an urgent need for a more user-friendly substrate etching fixture. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a uniform etching device for etching lines.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A uniform etching device for an etching line includes an etching machine body. A substrate is conveyed on the etching machine body via a conveying component. The substrate is positioned by being wrapped by a lower fixture and an upper cover plate. Multiple movable plates are provided on both sides of the lower fixture via springs. Each movable plate is fixedly provided with a locking post, and the upper cover plate is provided with a locking cavity corresponding to each locking post.

[0007] In addition, a preferred structure is that both the lower fixture and the upper cover plate have spray chambers in the middle, and the upper cover plate is adapted to be pressed and fitted onto the lower fixture.

[0008] In addition, a preferred structure is that the lower fixture has a lower positioning groove and the upper cover plate has an upper positioning groove, and both the lower positioning groove and the upper positioning groove are adapted to press-fit positioning substrates.

[0009] Furthermore, in a preferred configuration, multiple spring cavities are provided on both sides of the lower fixture, each containing an outwardly mounted spring, and the other end of each spring is connected to a movable plate.

[0010] In addition, a preferred structure is that each of the movable plates is provided with an anti-drop cavity, and each of the movable plates is provided with an anti-drop post corresponding to the anti-drop cavity, and the length of the anti-drop post is greater than the maximum tensile length of the spring.

[0011] Furthermore, in a preferred configuration, two movable plates are provided on each side of the lower fixture, and the two movable plates on each side are fixedly connected by a connecting plate.

[0012] The beneficial effects of this utility model are as follows: through the combined structure between the lower fixture and the upper cover plate, only the edge of the substrate needs to be clamped, eliminating the occlusion defects caused by traditional roller conveying, ensuring uniform spraying of etching solution on both sides of the substrate, so as to ensure uniform etching lines. Through the spring-driven movable plate and clamping post mechanism, the substrate can be quickly clamped and released, making the operation convenient and efficient, and improving production efficiency. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of a uniform etching device for etching lines proposed in this utility model; Figure 2 This is a schematic diagram of the structure of the lower fixture, upper cover plate, movable plate and base plate proposed in this utility model; Figure 3 for Figure 2 A schematic diagram of the exploded structure in the image; Figure 4 This is a schematic diagram of the structure of the lower fixture proposed in this utility model; Figure 5 This is a bottom view of the top cover plate proposed in this utility model. Figure 6 This is a schematic diagram of the movable plate proposed in this utility model.

[0014] In the figure: 1 Etching machine body, 11 Substrate, 2 Lower fixture, 20 Lower positioning groove, 21 Spring cavity, 211 Spring, 22 Anti-drop cavity, 3 Upper cover plate, 30 Upper positioning groove, 31 Clamping cavity, 4 Movable plate, 41 Clamping post, 42 Anti-drop post, 43 Connecting plate. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0016] Reference Figure 1-6A uniform etching device for etching lines includes an etching machine body 1. A substrate 11 is conveyed on the etching machine body 1 via a conveying assembly. The substrate 11 is wrapped and positioned by a lower fixture 2 and an upper cover plate 3. Multiple movable plates 4 are provided on both sides of the lower fixture 2 via springs 211. Each movable plate 4 is fixedly provided with a locking post 41, and the upper cover plate 3 is provided with a locking cavity 31 corresponding to the locking post 41.

[0017] Both the lower fixture 2 and the upper cover plate 3 have spray chambers in their middle sections, and the upper cover plate 3 is fitted and pressed onto the lower fixture 2. The spray liquid inside the etching machine body 1 can be sprayed onto the substrate 11 through the spray chambers to etch the substrate 11.

[0018] The lower fixture 2 has a lower positioning groove 20, and the upper cover plate 3 has an upper positioning groove 30. Both the lower positioning groove 20 and the upper positioning groove 30 are adapted to press and position the substrate 11. The lower positioning groove 20 and the upper positioning groove 30 press the substrate 11 only at the edge of the substrate 11, so as not to affect or block the etched area of ​​the substrate 11.

[0019] The lower fixture 2 has multiple spring cavities 21 on both sides, each containing an outwardly extending spring 211, the other end of which is connected to the movable plate 4. The elastic preload of the springs 211 allows the movable plate 4 to be pulled, ensuring that the locking pins 41 on the movable plate 4 are stably engaged within the locking cavities 31. It is worth noting that the springs 211 are existing high-strength anti-vibration springs to ensure sufficient preload even in extreme conditions. Since the springs 211 are existing technology, further details will not be provided.

[0020] Each movable plate 4 has an anti-detachment cavity 22, and an anti-detachment post 42 is fitted to each anti-detachment cavity 22 on the movable plate 4. The length of the anti-detachment post 42 is greater than the maximum tensile length of the spring 211. This prevents the anti-detachment post 42 from falling out of the anti-detachment cavity 22, thereby preventing the movable plate 4 from falling off.

[0021] The lower fixture 2 has two movable plates 4 on each side, and the two movable plates 4 on each side are fixedly connected by a connecting plate 43. The connecting plate 43 allows the user to pull multiple movable plates 4 simultaneously.

[0022] In this embodiment, a conveyor belt is provided on the etching machine body 1. When the substrate 11 passes through the etching machine body 1, etching liquid can be sprayed onto the substrate 11 through multiple spray nozzles inside the etching machine body 1 to achieve etching of the substrate 11. This is prior art, so it will not be described in detail.

[0023] Furthermore, when the user needs to position the substrate 11, simply place the substrate 11 in the lower positioning groove 20 on the lower fixture 2, and then cover the lower fixture 2 with the upper cover plate 3, so that the upper positioning groove 30 on the upper cover plate 3 contacts the substrate 11, thereby positioning the substrate 11 through the lower positioning groove 20 and the upper positioning groove 30.

[0024] During the process of the upper cover plate 3 covering the lower fixture 2, simply pull the connecting plates 43 on both sides outward to drive the locking pin 41 to move outward synchronously, and at this time the spring 211 is stretched. When the cover plate 3 is completely covering the lower fixture 2, the locking pin 41 and the locking cavity 31 are properly aligned. At this time, simply release the connecting plates 43 on both sides, and the movable plate 4 can automatically reset by the elastic force of the spring 211, so that the locking pin 41 can automatically lock into the locking cavity 31. At this time, the upper cover plate 3 can be fixed to achieve the positioning of the base plate 11.

[0025] It is worth noting that the assembly and transfer method of the lower fixture 2 on the etching machine body 1 is existing technology, so it will not be elaborated further.

[0026] Furthermore, when the user needs to remove the substrate 11, they only need to pull the movable plates 4 on both sides outward to release the locking post 41 from the locking cavity 31. At this time, the upper cover plate 3 can be removed directly, and the substrate 11 can be taken out.

[0027] In this invention, the combination structure between the lower fixture 2 and the upper cover plate 3 only requires clamping the edge of the substrate 11, eliminating the occlusion defects caused by traditional roller conveying, ensuring uniform spraying of etching solution on both sides of the substrate 11, so as to ensure uniform etching lines. Through the movable plate 4 driven by the spring 211 and the clamping post 41 mechanism, the substrate 11 can be quickly clamped and released, making the operation convenient and efficient, and improving production efficiency.

[0028] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A uniform etching apparatus for etching lines, comprising an etching machine body (1), wherein a substrate (11) is conveyed on the etching machine body (1) via a conveying assembly, characterized in that, The substrate (11) is positioned by being wrapped by the lower fixture (2) and the upper cover plate (3); Both sides of the lower fixture (2) are provided with multiple movable plates (4) by springs (211). Each movable plate (4) is fixedly provided with a locking post (41), and the upper cover plate (3) is provided with a locking cavity (31) corresponding to the locking post (41).

2. The uniform etching apparatus for etching lines according to claim 1, characterized in that, The lower fixture (2) and the upper cover plate (3) are both provided with spray chambers in the middle, and the upper cover plate (3) is adapted to be pressed and fitted onto the lower fixture (2).

3. The uniform etching apparatus for etching lines according to claim 2, characterized in that, The lower fixture (2) has a lower positioning groove (20) and the upper cover plate (3) has an upper positioning groove (30). Both the lower positioning groove (20) and the upper positioning groove (30) are adapted to press-fit positioning substrate (11).

4. The uniform etching apparatus for etching lines according to claim 1, characterized in that, The lower fixture (2) has multiple spring cavities (21) on both sides, and springs (211) are installed outward in each spring cavity (21), and the other end of each spring (211) is connected to the movable plate (4).

5. The uniform etching apparatus for etching lines according to claim 4, characterized in that, Each of the movable plates (4) is provided with an anti-drop cavity (22), and each of the movable plates (4) is provided with an anti-drop column (42) corresponding to the anti-drop cavity (22), and the length of the anti-drop column (42) is greater than the maximum tensile length of the spring (211).

6. The uniform etching apparatus for etching lines according to claim 5, characterized in that, The lower fixture (2) has two movable plates (4) on both sides, and the two movable plates (4) on each side are fixedly connected by a connecting plate (43).