Vacuum fixture for ball mounting

Abstract

The application discloses a vacuum jig for ball mounting maintenance, which comprises a carrier, a vacuum area with a plurality of vacuum holes arranged on the carrier, and an upper cover arranged on the carrier and connected with a support, wherein the upper cover is lifted and closed by the support, and in the closed state, the upper cover shields a part of the plurality of vacuum holes to change the area of the vacuum area exposed to the upper cover. The purpose of the application is to provide a vacuum jig for ball mounting maintenance, which at least reduces the problem of collision with the workpiece when taking and placing the upper cover, and improves the yield.

Description

Technical Field

[0001] This application relates to a vacuum fixture for ball-planting maintenance. Background Technology

[0002] Generally, existing ball mount processes typically include: first, printing flux on the substrate or wafer surface, then performing ball mount operations, and finally, ball mount inspection. Figure 1 A top view of panel 200 is shown. See also Figure 1 In the final inspection stage of ball placement, negative pressure is generally used to help check for missing or multiple balls. Currently, the ball placement inspection machine for 95mm*240mm substrates (i.e., 240mm long and 95mm wide) is shared with the stage 200 for 300mm diameter wafers. The stage 200 is equipped with a vacuum area 210 with multiple vacuum holes 211. Figure 1 (Seen in dashed lines), the stage 200 can also be provided with multiple lift pin holes 212 to accommodate lift pins for lifting wafers or substrates. Since the vacuum area 210 is suitable for processing wafers with a diameter of 300mm, there is currently no suitable fixture available for use with a substrate size of 95mm*240mm. Currently, a simple soft pad 90 is used (see...). Figure 2 , Figure 2 (A top view schematic diagram of the prior art showing a pad 90 covering a stage 200) serves as the working platform for a ball transfer and ball replenisher on a 95mm*240mm substrate. It can be seen that by covering the upper surface of the stage 200 with a pad 90 having openings 80, with each side of the pad 90 corresponding to each side of the upper surface of the stage 200, the openings 80 of the pad 90 expose a portion of the vacuum holes 211 on the stage 200 below it, and cover the excess vacuum holes 211, thereby reducing the area of ​​the vacuum region 210 exposed to the pad 90. Figure 1 The vacuum region 210 is the area indicated by the circular dashed line. Within this region, the vacuum holes 211 are all exposed compared to when the pad 90 is closed, to provide negative pressure. Figure 2 In this configuration, part of the vacuum hole 211 is covered by the pad 90 (shown as the darker area), thus altering the area of ​​the vacuum region 210 that is exposed. For example... Figure 2 The area of ​​the vacuum region 210 not covered by the padding 90 (shown as the darker part) and Figure 1The exposed vacuum areas 210, indicated by the dashed circular lines, vary in size. While the aforementioned pad 90 allows a 95mm*240mm substrate to be used with a stage 200 compatible with a 300mm diameter wafer, manual removal of the pad 90 is required before and after ball-mounting repair. However, this manual removal is difficult and prone to contact with the workpiece (e.g., the 95mm*240mm substrate) or the stage 200, leading to interruptions in the ball-mounting repair process and potential vacuum failures causing shutdowns. This disrupts subsequent workpiece operations and results in high abnormal values ​​for ball-mounting and de-balling at the repair station. Utility Model Content

[0003] To address the above issues, this application proposes a vacuum fixture for ball-mounting maintenance, which at least reduces the problem of workpiece collisions when picking up and placing the top cover, thereby improving the yield rate.

[0004] The technical solution of this application is implemented as follows:

[0005] According to one aspect of this application, a vacuum fixture for ball implantation repair is provided. The vacuum fixture for ball implantation repair includes: a platform with a vacuum area having multiple vacuum holes; and an upper cover disposed on the platform, with a support member connected to the upper cover. The upper cover is lifted and closed relative to the platform by means of the support member. In the closed state, the upper cover blocks a portion of the multiple vacuum holes to change the area of ​​the vacuum area exposed to the upper cover.

[0006] In some embodiments, the support member is a support rod.

[0007] In some embodiments, a support rod is connected to the upper cover, and the upper cover is lifted and closed relative to the platform by raising and lowering the support rod.

[0008] In some embodiments, the top cover includes a top cover portion disposed on the upper surface of the stage and a side cover portion disposed on the side of the stage.

[0009] In some embodiments, the support rod includes a first rod and a second rod arranged on opposite sides of the upper cover, one end of the first rod and the second rod being connected to the upper cover portion, and the other end of the first rod and the second rod being connected to the side cover portion.

[0010] In some embodiments, the top cover and the side cover are integral parts.

[0011] In some embodiments, the top cover is an acrylic sheet.

[0012] In some embodiments, the angle between the top cover and the side cover is 90 degrees.

[0013] In some embodiments, the top cover has a hollow portion, and the workpiece is placed on the vacuum area exposed by the hollow portion.

[0014] In some embodiments, the hollow portion forms a rectangular opening on the bottom surface of the top cover.

[0015] In some embodiments, the rectangular opening formed by the hollow portion on the bottom surface of the top cover has a length of 240.5 mm and a width of 95 mm.

[0016] In some embodiments, the vacuum region is a circle with a diameter of 300 mm.

[0017] In some embodiments, lifting is the rotation of the top cover relative to the platform around the side of the top cover that is away from the side cover portion.

[0018] In some embodiments, the vacuum area is suitable for inspecting wafers with a diameter of 300 mm.

[0019] In some embodiments, the support rod is driven by changes in air pressure.

[0020] In some embodiments, the support rod is a multi-segment support rod.

[0021] In some embodiments, the bottom surface of the workpiece has a length of 240.5 mm and a width of 95 mm.

[0022] In some embodiments, the top cover is provided with a slot to accommodate the hollow portion.

[0023] In some embodiments, the slot is a milled slot.

[0024] According to another aspect of this application, a vacuum fixture for ball implantation repair is provided. The vacuum fixture for ball implantation repair includes: a platform with a vacuum area having multiple vacuum holes; an upper cover disposed on the platform; the upper cover and a support rod supporting the upper cover; wherein the upper cover is lifted and closed relative to the platform by moving the support rod, and in the closed state, the upper cover blocks a portion of the multiple vacuum holes to expose a portion of the vacuum area.

[0025] The beneficial effects of the above technical solution include at least: reducing the problem of collisions with workpieces when picking up and placing the top cover, and improving yield. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 A top view of the stage is shown.

[0028] Figure 2A top view schematic diagram of prior art is shown, illustrating the covering of a platform with a soft pad.

[0029] Figure 3 A three-dimensional schematic diagram of a stage according to some embodiments of this application is shown.

[0030] Figure 4 A three-dimensional schematic diagram of a vacuum fixture for ball-planting maintenance according to some embodiments of this application is shown with the top cover closed compared to the platform cover state.

[0031] Figure 5 A three-dimensional schematic diagram of a vacuum fixture for ball-planting maintenance according to some embodiments of this application is shown with the top cover open compared to the stage.

[0032] Figure 6 A three-dimensional schematic diagram of a vacuum fixture for ball-planting maintenance according to some embodiments of this application is shown with the top cover closed compared to the platform cover state.

[0033] Figure 7 A three-dimensional schematic diagram of a cover according to some embodiments of this application is shown.

[0034] Figure 8 A three-dimensional schematic diagram of a cover according to some embodiments of this application is shown.

[0035] Figure 9 A three-dimensional schematic diagram of a vacuum fixture for ball-planting maintenance according to some embodiments of this application is shown with the top cover in a state relative to the platform being lifted.

[0036] Figure 10 A top view schematic diagram of a workpiece and a top cover according to some embodiments of this application is shown.

[0037] Figure 11 A top view schematic diagram of a vacuum fixture for ball-planting maintenance according to some embodiments of this application is shown with the top cover closed compared to the platform cover state.

[0038] Figure 12 A schematic diagram of a stage and workpiece according to some embodiments of this application is shown.

[0039] Figure 13 A three-dimensional schematic diagram of a work surface for ball-planting maintenance is shown. Detailed Implementation

[0040] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application are within the scope of protection of this application.

[0041] The following disclosure provides numerous different embodiments or instances for implementing various features of the provided subject matter. Specific examples of elements and arrangements will be described below to simplify the present invention. These are merely examples and are not intended to limit the present invention. For example, in the following description, forming a first component above or on a second component may include embodiments where the first and second components are in direct contact, or embodiments where an additional component is formed between the first and second components such that the first and second components are not in direct contact. Furthermore, reference numerals and / or letters may be repeated in various instances of the present invention. Such repetition is merely for brevity and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations discussed.

[0042] Furthermore, where there is no conflict, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0043] Figure 3 A three-dimensional schematic diagram of a stage 200 according to some embodiments of this application is shown. Figure 4 A three-dimensional schematic diagram is shown of a vacuum fixture 1000 for ball-planting maintenance according to some embodiments of this application with the top cover 220 closed relative to the stage 200. Figure 5 A three-dimensional schematic diagram is shown of a vacuum fixture 1000 for ball-planting maintenance according to some embodiments of this application with its top cover 220 open relative to the platform 200. See also Figure 3 , Figure 4 and Figure 5 The vacuum fixture 1000 for ball-planting repair includes: a platform 200, on which a vacuum region 210 with multiple vacuum holes 211 is provided; and an upper cover 220 disposed on the platform 200, on which a support member is connected (in some embodiments, the support member may be as follows). Figure 4 and Figure 5 The support rod 230 shown herein (hereinafter referred to as support rod 230; the support member can also be configured as, for example, a spring, spring assembly, or other reasonable embodiments) allows the upper cover 220 to be raised and lowered relative to the platform 200. In the lowered state, the upper cover 220 blocks a portion of the plurality of vacuum holes 211 to change the area of ​​the vacuum region 210 exposed to the upper cover 220. The raising and lowering of the upper cover 220 relative to the platform 200 is controlled by the support member of this application (e.g., ...). Figure 4 and Figure 5 As shown), this can at least effectively prevent workers from picking up and placing items such as... Figure 2 The cushion 90, as illustrated, accidentally comes into contact with the stage 200 or the workpiece 250 on the stage 200 (not shown, see example). Figure 10 This addresses the issue of [missing information], thereby improving yield. In [missing information] Figure 4 In the middle, the upper cover 220 is closed onto the stage 200, and the upper cover 220 blocks a portion of the vacuum holes 211 in the vacuum region 210. Correspondingly, the area of ​​the vacuum region 210 exposed to the upper cover 220 is relatively smaller than that of the stage 200. Figure 3 The area of ​​the vacuum region 210 shown has changed. Therefore, additionally, the vacuum fixture 1000 for ball-mounting repair can be adapted to repair workpieces 250 (not shown, see example) of different sizes. Figure 10 Since no additional fixtures matching other sizes are required, costs are correspondingly reduced. In some embodiments, the stage 200 may have a similar design to... Figure 1 The shape, size, and arrangement of the vacuum holes 211 can also be reasonably adjusted according to specific ball planting and maintenance needs.

[0044] See you again Figure 4 and Figure 5 According to some embodiments of this application, the support rod 230 is connected to the upper cover 220, and the upper cover 220 is lifted and closed relative to the platform 200 by raising and lowering the support rod 230. Specifically, in some embodiments, the upper cover 220 is lifted and closed relative to the platform 200 by raising and lowering the support rod 230 via the shaft 240. Further, the upper cover 220 may include an upper cover portion 221 disposed on the upper surface of the platform 200, and a side cover portion 222 disposed on the side of the platform 200. It is understood that... Figure 4 and Figure 5The side cover 222, away from the top cover 221, is connected to the platform 200 via a shaft 240. In this case, the top cover 220 is lifted in a direction relative to the platform 200, rotating about the side of the side cover 222 connected to the shaft 240. The top cover 221 and the side cover 222 can be a single piece. In some embodiments, the top cover 220 is an acrylic sheet; however, other suitable materials are also feasible. Preferably, the angle between the top cover 221 and the side cover 222 is 90 degrees to achieve a better fit with the shape of the platform 200. In some embodiments, the upper cover 221 has the same shape and area as the upper surface of the platform 200, and the side cover 222 has the same shape and area as the side surface of the platform 200 on which the side cover 222 is provided. In this case, in order not to interfere with the lifting and closing of the upper cover 220 and the platform 200, the support rod 230 can be connected to the side surfaces of the upper cover 221 and the side cover 222 respectively. That is to say, the platform 200 is located inside the support rod 230. In some embodiments, the area of ​​the upper cover 221 is larger than the upper surface of the platform 200, and the area of ​​the side cover 222 is larger than the side surface of the platform 200 on which the side cover 222 is provided. Specifically, the upper cover 221 and the side cover 222 extend beyond the upper surface of the platform 200 and the side surface of the platform 200 on which the side cover 222 is provided in the extension direction perpendicular to the distance between the upper cover 221 and the side cover 222, thereby providing a certain amount of room for movement for the support rod 230. In some embodiments, the support rod 230 can be manually driven by an operator. The support rod 230 can also be driven by pneumatic changes, hydraulically, or by an electric motor to achieve unmanned operation, and subsequently, the workpiece 250 (not shown, see example) can be moved by a lifting pin and a robotic arm. Figure 10 This effectively avoids collisions with the workpiece 250 (not shown, see example) when manually handling the top cover 220. Figure 10 This addresses the issue of improving overall yield.

[0045] This application also provides a vacuum fixture 1000 for ball-planting maintenance, which can be seen together. Figure 3 , Figure 4 as well as Figure 5 To understand this, the vacuum fixture 1000 for ball implantation repair includes: a platform 200, on which a vacuum area 210 with multiple vacuum holes 211 is provided; an upper cover 220 provided on the platform 200, and a support rod 230 supporting the upper cover. The upper cover 220 is lifted and closed relative to the platform 200 by moving the support rod 230. In the closed state, the upper cover 220 blocks a portion of the multiple vacuum holes 211 to expose part of the vacuum area 210.

[0046] In some embodiments, the support rod 230 includes a first rod and a second rod arranged on opposite sides of the upper cover 220, one end of the first rod and the second rod being connected to the upper cover portion, and the other end of the first rod and the second rod being connected to the side cover portion. Figure 5 The image shows support rods 230 located on opposite sides of the upper cover 220. In some embodiments, the upper cover 220 is provided with a hollow portion 225, and a workpiece 250 (not shown, see example) Figure 10 The upper cover 220 is disposed on the vacuum area 210 exposed by the hollow portion 225. The hollow portion 225 may form a rectangular opening on the bottom surface of the contact platform 200. In some embodiments, the rectangular opening has a length of 240.5 mm and a width of 95 mm to accommodate a workpiece 250 (not shown, see example) with a bottom length of 240.5 mm and a bottom width of 95 mm. Figure 10 Vacuum region 210 can be a circular region with a diameter of 300 mm, and the vacuum region can be used to process wafers with a diameter of 300 mm. Therefore, a stage 200 can be shared on the same vacuum fixture 1000 for ball-mounting processing to process wafers with a diameter of 300 mm and workpieces 250 (not shown, see example) with a length of 240.5 mm and a width of 95 mm. Figure 10 In some embodiments, the hollow portion 225 may also form a rectangular opening on the top surface of the upper cover 220. This rectangular opening may also have a length of 240.5 mm and a width of 95 mm. However, the opening formed by the hollow portion 225 on the top surface of the upper cover 220 may be larger than the opening formed by the hollow portion 225 on the bottom surface of the upper cover 220, as will be described later. In some embodiments, the rectangular opening formed by the hollow portion 225 on the bottom surface of the upper cover 220 contacting the stage 200 may be larger than the workpiece 250 (not shown, see example). Figure 10 The dimensions of the bottom surface, that is, the length of the rectangular opening formed on the bottom surface of the platform 200, can be greater than 240.5mm and the width can be greater than 95mm, so as to facilitate the lifting of the top cover 220.

[0047] Figure 6 A three-dimensional schematic diagram is shown of a vacuum fixture 1000 for ball-planting maintenance according to some embodiments of this application, with the top cover 220 closed relative to the stage 200. Figure 4 The difference is that the shaft 240 can be configured to be connected to the side of the upper cover 221 away from the side cover 222. In this case, if the upper cover 220 is lifted relative to the platform 200, the lifting is the upper cover 220 rotating relative to the platform 200 around the side of the upper cover 221 away from the side cover 222, that is, rotating around the shaft 240.

[0048] Figure 7 A three-dimensional schematic diagram of a cover 220 according to some embodiments of this application is shown. Figure 8A three-dimensional schematic diagram of a top cover 220 according to some embodiments of this application is shown. See also Figure 7 The diagram shows support rods 230 located on both sides of the top cover 220 (one of the support rods 230 obscured by the top cover is shown in dashed lines). In some embodiments, the support rod 230 is a single segment, which can be understood as the support rod 230 serving to fix the top cover portion 221 and the side cover portion 222 of the top cover 220. However, the support rod 230 can also be designed as a multi-segment, such as... Figure 8 As shown, the support rod 230 may include a first sub-support rod 231 and a second sub-support rod 232 (the second sub-support rod 232 is shown in dark). The first sub-support rod 231 and the second sub-support rod 232 can be configured to be slidably connected. Specifically, a groove is provided on the second sub-support rod 232, and a portion of the first sub-support rod 231 is fitted into the groove to achieve a slidable connection between the first sub-support rod 231 and the second sub-support rod 232. The first sub-support rod 231 can slide relative to the second sub-support rod 232 through the groove. Of course, it is also optional for the groove to be provided in the first sub-support rod 231. See also the foregoing... Figures 4 to 6 The description of the upper cover 220 being lifted relative to the platform 200 is that the sliding connection between the first sub-support rod 231 and the second sub-support rod 232 allows the support rod 230 to drive the upper cover 220 to be lifted and closed relative to the platform 200.

[0049] Figure 9 A three-dimensional schematic diagram is shown of a vacuum fixture 1000 for ball-planting maintenance according to some embodiments of this application with its top cover 220 tilted relative to the platform 200. See also Figure 9 In some embodiments, the upper cover 220 only covers the upper surface of the stage 200 and is not configured as shown in the example. Figure 7 The upper cover 220 includes an upper cover portion 221 and a side cover portion 222. Figure 9 The middle support rod 230 is designed as a two-section rod, including a first sub-support rod 231 and a second sub-support rod 232 (the second sub-support rod 232 is shown in dark). Figure 8 Unlike the sliding connection of the two-section support rod 230, the first sub-support rod 231 and the second sub-support rod 232 are connected in a folding manner. Specifically, Figure 9The first sub-support rod 231 and the second sub-support rod 232 are rotatable relative to each other, and are slidably connected. The arrangement of the first sub-support rod 231 and the second sub-support rod 232 can resemble a swing guide rod mechanism or a sliding guide rod mechanism. The first sub-support rod 231 can rotate relative to the upper cover 220, and when the upper cover 220 is closed on the upper surface of the platform 200, the first sub-support rod 231 and the second sub-support rod 232 form a straight line. One end of the second sub-support rod 232 is connected to the shaft 240, and the other end is connected to the first sub-support rod 231. When the upper cover 220 is lifted, the second sub-support rod 232 connected to the shaft 240 drives the first sub-support rod 231 to lift the upper cover 220 relative to the platform 200. Furthermore, Figure 9 The diagram also shows a support piece 310 disposed on the bottom surface of the upper cover 220 facing the stage 200, for supporting the upper cover 220 when it is lifted relative to the stage 200. The support piece 310 may be configured to rotate relative to the lower surface of the upper cover 220 to act as a thin sheet sandwiched between the upper cover 220 and the upper surface of the stage 200 when the upper cover 220 is closed on the stage 200. The support piece 310 is preferably configured to be thin enough to avoid affecting the seal between the upper cover 220 and the vacuum hole 211, which is blocked when the upper cover 220 is closed on the stage 200. Furthermore, a groove can be provided on the bottom surface of the upper cover 220. Preferably, the shape and size of the groove are the same as those of the support piece 310, so as to accommodate the support piece 310 when the upper cover 220 is closed on the platform 200, and allow the support piece 310 to rotate relative to the upper cover 220 and disengage from the groove after the upper cover 220 is lifted, so as to support the lifted upper cover 220. Figure 9 The image also shows a handle 320, which in some embodiments may be provided on the top surface of the cover 220 for manually lifting and closing the cover 220.

[0050] Figure 10 A top view schematic diagram of the workpiece 250 and the top cover 220 according to some embodiments of this application is shown. See also Figure 10 And see also Figure 4 In some embodiments, the workpiece 250 is disposed on a vacuum region 210 exposed by the hollow portion 225. The vacuum region 210 provides negative pressure to the workpiece 250 relative to the vacuum holes 211 on the area exposed by the top cover 220 for inspection of the workpiece 250 after ball mounting. In some embodiments, the workpiece 250 is a substrate of 95mm*240mm.

[0051] Figure 11 A top view schematic diagram of a vacuum fixture 1000 for ball-planting maintenance according to some embodiments of this application is shown with the top cover 220 closed relative to the platform 200. See also Figure 11In some embodiments, a slot 260 is provided on the upper cover 220 to accommodate the hollow portion 225. This can also be understood as the slot 260 defining the shape of the hollow portion 225, exposing a vacuum hole 211 in the vacuum region 210 located below it. The vacuum hole 211 can... Figure 11 As shown, a rectangular opening is formed on the upper surface of the platform 200. In some embodiments, the slot 260 is a milled groove, but of course, other reasonable methods can be used to form the slot 260. As mentioned above, the rectangular opening formed by the hollow portion 225 on the bottom surface of the upper cover 220 in contact with the platform 200 has a length of 240.5 mm and a width of 95 mm, and a rectangular opening can also be formed on the top surface of the upper cover 220, with a length of 241 mm and a width of 95.5 mm, so that the slot 260 defining the shape of the hollow portion 225 is constructed as a slot whose width gradually decreases from the top surface of the upper cover 220 to the bottom surface of the upper cover 220. Preferably, in top view, the geometric centers of the rectangular opening formed by the hollow portion 225 on the bottom surface of the upper cover 220 and the rectangular opening formed by the hollow portion 225 on the top surface of the upper cover 220 coincide. The sidewalls of the slot 260 can all be at a 45-degree angle to the bottom surface of the top cover 220, and the widths of the corresponding sidewalls gradually decrease.

[0052] Figure 12 A schematic diagram of a stage 200 and a workpiece 250 according to some embodiments of this application is shown. In some embodiments, during ball-mounting maintenance, a vacuum hole 211 (not shown, see example...) Figure 4 The suction nozzle 270 (nozzle) in the ( ) provides negative pressure to hold the workpiece 250 in place. After ball-loading maintenance is completed, the suction nozzle 270 is raised and, for example... Figure 1 The rising ejector pin in the center ejector pin hole 212 and the suction nozzle 270 disengage from the vacuum to stop the suction force on the workpiece 250 so as to remove the workpiece 250 from the stage 200.

[0053] Figure 13 A three-dimensional schematic diagram of a worktable 500 for ball-planting maintenance is shown. The worktable 500 includes a platform portion 510 and an outer edge portion 520 surrounding the platform portion 510, the outer edge portion 520 being configured as a groove surrounding the platform portion 510. A plurality of vacuum holes 211 may similarly be provided on the platform portion 510 (see...). Figure 3 However, the area formed by vacuum hole 211 is from Figure 3 The circular area in the middle becomes a rectangular area of ​​the planar portion 510. When viewed from above, the outer contours of both the platform portion 510 and the outer contours of the outer support portion 520 can be rectangular. Furthermore, the outer contour of the platform portion 510 can be a rectangle with a length of 240.5 mm and a width of 95 mm to accommodate, for example, a workpiece 250 with a bottom surface length of 240.5 mm and a width of 95 mm (see...). Figure 10When the 500-degree table is used for ball-planting maintenance, the maintenance steps can be similar to those described above. Figure 12 Description of the process and after the ball-planting maintenance.

[0054] The technical solution provided in this application enables wafers and substrates of different sizes to share the same stage, thus reducing costs. Simultaneously, it reduces the problem of workpiece collisions during top cover placement and removal, thereby improving yield.

[0055] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A vacuum fixture for ball-planting maintenance, characterized in that, include: A stage, wherein a vacuum area with multiple vacuum holes is provided on the stage; A top cover is mounted on the platform, and a support member is connected to the top cover. The support member is used to lift and close the upper cover relative to the platform. In the closed state, the upper cover blocks a portion of the plurality of vacuum holes to change the area of ​​the vacuum region exposed to the upper cover.

2. The vacuum fixture for ball-planting maintenance according to claim 1, characterized in that, The support member is a support rod.

3. The vacuum fixture for ball-planting maintenance according to claim 2, characterized in that, The support rod is connected to the upper cover, and the upper cover is lifted and closed relative to the platform by raising and lowering the support rod.

4. The vacuum fixture for ball-planting maintenance according to claim 2, characterized in that, The upper cover includes an upper cover portion disposed on the upper surface of the platform and a side cover portion disposed on the side of the platform.

5. The vacuum fixture for ball-planting maintenance according to claim 4, characterized in that, The upper cover and the side cover are an integral part.

6. The vacuum fixture for ball-planting maintenance according to claim 1, characterized in that, The upper cover has a hollow portion, and the workpiece is placed on the vacuum area exposed by the hollow portion.

7. The vacuum fixture for ball-planting maintenance according to claim 6, characterized in that, The hollow portion forms a rectangular opening on the bottom surface of the upper cover.

8. The vacuum fixture for ball-planting maintenance according to claim 4, characterized in that, The lifting refers to the rotation of the upper cover relative to the platform around the side of the upper cover that is away from the side cover.

9. The vacuum fixture for ball-planting maintenance according to claim 2, characterized in that, The support rod is driven by changes in air pressure.

10. The vacuum fixture for ball-planting maintenance according to claim 2, characterized in that, The support rod is a multi-segment support rod.

Images