A liquid supply assembly and system

Abstract

The utility model discloses a liquid supply assembly and system, including supply pump and liquid accumulator, and the liquid accumulator has the liquid storage cavity and the exhaust cavity of separate setting with the liquid storage cavity in, and the liquid storage cavity includes the first liquid inlet of being located on the wall of liquid storage cavity, first liquid outlet, first communicating port and first exhaust port, and first liquid outlet is open and close with the pump liquid inlet channel intercommunication, first communicating port is open and close with the pump exhaust passage intercommunication, and the exhaust cavity includes the second exhaust port of being located on the wall of exhaust cavity, and second exhaust port is open and close with first exhaust port intercommunication, to make the fluid in the liquid storage cavity enter the exhaust cavity, and discharge to outside. The utility model discloses liquid supply assembly can realize the centralized exhaust, and the centralized pressure is given to the reduction exhaust joint and pipeline, make liquid supply assembly whole volume reduce, simultaneously take the liquid storage cavity as the liquid inlet buffer structure and exhaust liquid structure, receive the liquid of flowing out from the pump chamber when exhaust, avoid liquid waste.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a liquid supply component and system. Background Technology

[0002] In the chemical solution application process of semiconductor manufacturing equipment, in order to coat a predetermined amount of photoresist solution onto a semiconductor wafer each time, a chemical solution supply system as described in patent number JP4265820B2 has been proposed. This system includes a chemical solution supply pump that draws the chemical solution contained in a chemical solution tank and coats the drawn-in solution onto the semiconductor wafer in a predetermined amount each time. Specifically, the chemical solution supply pump has a diaphragm separating a pump chamber for filling the chemical solution from a working chamber for the flow of working gas. Air is supplied to the working chamber via a regulator, causing the diaphragm to deform towards the pump chamber side, thereby discharging the chemical solution. The chemical solution supply pump is connected to a vacuum source, and negative pressure is applied to the pump by the vacuum source to increase the volume of the pump chamber, thereby drawing in the chemical solution.

[0003] However, the aforementioned patent has the following problems: On the one hand, the inlet of the existing supply pump extends directly into the front pool through pipes and valves. Due to the height of the pipe, when relying on the diaphragm to draw photoresist, it is necessary to climb the pipe, and the suction force of the diaphragm may not be sufficient to fill the pump chamber or draw the predetermined amount, thus affecting the coating of the predetermined amount during the dispensing process. On the other hand, with the miniaturization of semiconductor wafers, the micro-bubbles in the photoresist have a more significant impact on the coating effect. Bubbles can cause uneven photoresist layer thickness, affecting the quality of exposure and development, and in severe cases, may lead to pattern transfer failure or device failure. Therefore, before using the above-mentioned chemical supply system to coat the wafer with photoresist and before reuse after use, it is necessary to purge the gas in the pipes, supply pump, and filter of the system, especially the gas in the pump chamber of the supply pump. The specific venting operation is that before using the diaphragm pump, the gas in the chamber is squeezed out by liquid filling the receiving chamber until no bubbles are observed in the discharged liquid. The supply pump in the above-mentioned chemical supply system vents the gas by setting a separate venting channel in the pump chamber and fully draining the liquid, which will cause a large amount of expensive photoresist to be wasted.

[0004] Therefore, further improvements to the liquid supply system are still needed to optimize the venting structure and reduce liquid waste while ensuring that the residual air bubbles in the supply system are reduced. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a liquid supply component and system that solves the problem of liquid waste during the exhaust process of existing liquid supply components and systems.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A liquid supply assembly includes a supply pump and a reservoir.

[0008] The supply pump includes a pump chamber with variable volume, a pump inlet channel, a pump outlet channel, and a pump exhaust channel, all of which are connected to the pump chamber.

[0009] The liquid reservoir has a liquid storage chamber, which includes a first liquid inlet, a first liquid outlet, a first connecting port, and a first vent located on the wall of the liquid storage chamber. The first liquid outlet is openable and closable and communicates with the pump inlet channel, and the first connecting port is openable and closable and communicates with the pump vent channel, so that fluid can enter the pump chamber from the liquid storage chamber or flow out of the pump chamber and into the liquid storage chamber through the pump vent channel.

[0010] The supply component includes an exhaust chamber separated from the liquid storage chamber. The exhaust chamber includes a second exhaust port located on the wall of the exhaust chamber. The second exhaust port is openable and closable and communicates with the first exhaust port so that the fluid in the liquid storage chamber can enter the exhaust chamber and be discharged to the outside.

[0011] The liquid supply assembly of this utility model is provided with a liquid reservoir, and the pump chamber of the supply pump is connected to the liquid reservoir's storage chamber. The liquid reservoir serves as an inlet buffer structure and an exhaust and liquid retention structure. Specifically, the pump chamber is connected to the first outlet of the liquid reservoir through a pump inlet channel, and is connected to the first connection port of the liquid reservoir through a pump exhaust channel.

[0012] When the supply pump is in use and the pump chamber is drawing liquid, it can directly draw liquid from the storage chamber. The liquid in the storage chamber enters the pump chamber through the pump inlet channel, instead of being drawn directly from the liquid pool at the far end. This reduces the requirements for the supply pump's suction strength. Furthermore, by using the storage chamber as a buffer, the influence of the front-end liquid pool and the inlet module on the supply pump's suction and discharge can be isolated, thereby improving the stability of the supply pump's suction and discharge. This allows the supply pump to provide the predetermined coating amount to meet the coating requirements.

[0013] Before the supply pump is put into operation, the pump chamber needs to be vented. Through the coordinated operation of the storage chamber and the pump venting channel, the supply pump has two venting directions: one is venting liquid and air externally through the pump outlet channel, and the other is venting through a combination of the pump venting channel and the storage chamber. These different venting directions result in different liquid flow directions, causing multiple changes in the liquid within the supply pump chamber. This helps to agitate air bubbles adhering to the inner wall of the pump chamber, thus promoting their expulsion. When the pump chamber vents liquid and air externally through the pump outlet channel, pressure is applied to the supply pump using a front-end liquid pool. Liquid in the storage chamber enters the pump chamber through the pump venting channel from top to bottom, allowing the gas in the pump chamber to contact and dissolve in the liquid. The liquid is then pushed out through the pump outlet channel until the discharged liquid is free of air bubbles. When the pump chamber vents through both the pump venting channel and the storage chamber, the liquid in the pump chamber pushes the gas through the pump venting channel into the storage chamber first. The gas and liquid in the storage chamber... Part of the liquid can automatically separate, with the liquid sinking and the gas rising. This allows the gas to accumulate at the top and be easily squeezed out by the liquid. Then, the liquid in the storage chamber pushes the gas through the first and second exhaust ports into the exhaust chamber, where it is discharged. When no bubbles are observed in the liquid exiting the exhaust chamber, it proves that all the gas in the storage chamber and pump chamber has been discharged. Compared to the existing technology that directly sets a separate exhaust connector for the pump chamber, the technical solution of this utility model utilizes the storage chamber to receive the liquid flowing out of the pump chamber during exhaust, reducing liquid waste. At the same time, the storage chamber also exhausts gas through the exhaust chamber. Based on this, the liquid supply component of this utility model can achieve centralized exhaust, which facilitates centralized pressurization, reduces exhaust connectors and pipelines, and reduces the overall volume of the liquid supply component. The exhaust path is also shorter, eliminating the need for complex pipe fittings, connectors, and other structures, greatly reducing the difficulty and complexity of exhausting the storage chamber and improving exhaust efficiency.

[0014] Preferably, the exhaust chamber includes a third exhaust port located on the wall of the exhaust chamber, the third exhaust port being openable and closable and communicating with the exhaust end of the filter module.

[0015] In some cases, the liquid supply system to which the liquid supply component belongs includes a filtration module. The filtration module is located upstream of the storage chamber, and its outlet is connected to the first inlet. Liquid enters the storage chamber after being filtered by the filtration module. The filtration module also needs to be vented before the liquid supply system operates. Therefore, the venting end of the filtration module is connected to the venting chamber through a third vent. On the one hand, the venting chamber allows for venting of the storage chamber, pump chamber, and filtration module. The highly integrated venting structure helps reduce venting pipelines, shrink the overall size of the liquid supply component, and lower the failure rate. On the other hand, the pump chamber vents the storage chamber after being connected to it, while the venting end of the filtration module is directly connected to the venting chamber. This separation prevents the pump chamber from pressurizing the venting end of the filtration module when venting through the storage chamber, thus avoiding a small amount of gas entering the filtration module.

[0016] Preferably, the first vent is located at the top of the liquid storage chamber, and the height of the first vent is higher than the height of the first connecting port and the third vent.

[0017] This configuration ensures that all gas in the storage chamber can enter the exhaust chamber through the first exhaust port. The height of the first connecting port is lower than the first exhaust port to minimize the risk of air from the storage chamber entering the pump chamber through the pump exhaust channel. The higher height of the first exhaust port compared to the third exhaust port is designed so that, based on the exhaust sequence of the supply system, the filter module exhausts before the storage chamber. Therefore, before the filter module exhausts, there is virtually no liquid in the exhaust chamber, and the liquid pressure and obstruction at the exhaust end of the filter module are negligible, which is beneficial for the filter module to exhaust. After the filter module begins to exhaust, the third exhaust port connects the exhaust end of the filter module and the exhaust chamber, allowing liquid to enter the exhaust chamber. After the filter module has finished exhausting, when the first exhaust port exhausts, there may be residual liquid in the exhaust chamber, but because the height of the first exhaust port is relatively high and it is close to the outlet end of the exhaust chamber, the liquid pressure is low or negligible and will not obstruct the exhaust of the storage chamber. This ensures the exhaust effect of all components integrated into the exhaust chamber for exhaust.

[0018] Preferably, the pump exhaust channel is arranged obliquely upward from the top of the pump chamber, the height of the first connecting port is higher than the height of the first liquid inlet, the first liquid outlet is located at the bottom of the liquid storage chamber, and the height of the first liquid inlet is higher than the height of the first liquid outlet.

[0019] With this configuration, the pump exhaust channel is angled upwards, with its bottom located at the top of the pump chamber. This ensures that the gas in the pump chamber rises and enters the exhaust channel before the liquid, and that the gas always precedes the liquid or the bubbles concentrate in the first half of the liquid as it flows towards the storage chamber. This facilitates pushing the gas from the pump chamber into the storage chamber. The first connecting port is higher than the first inlet port, allowing the exhaust gas to quickly converge at the top of the storage chamber and exit rapidly through the first exhaust port. Simultaneously, it reduces the amount of gas entering the filter module through the first inlet port. The first inlet port is higher than the first outlet port, and the first outlet port is relatively close to the bottom of the storage chamber. Combined with gravity, this increases the liquid output speed, facilitating liquid intake into the pump chamber. This not only prevents gas from entering the pump chamber through the first outlet port, but the high position of the first inlet port also reduces turbulence and bubble generation during liquid inflow, allowing the liquid to fill the storage chamber more smoothly and maintaining liquid stability.

[0020] Preferably, a first valve for switching on and off is provided between the end of the pump exhaust passage and the first communication port; and / or

[0021] A second valve for switching on and off the first and second exhaust ports is provided between them; and / or

[0022] The reservoir further includes an exhaust connector for communication with the exhaust end of the filter module, and a third valve for switching the two on and off is provided between the exhaust connector and the third exhaust port; and / or

[0023] A fourth valve for switching the pump inlet channel on and off is provided between the end of the pump inlet channel and the first outlet.

[0024] This setup, using valves to control the flow between channels, provides good sealing capabilities and enables precise flow control and rapid on / off switching, thus improving operational efficiency.

[0025] Preferably, the first valve includes a first outer ring, a first inner ring located inside the first outer ring, and a first actuator. The first outer ring and the first inner ring are radially spaced to form a first communicating cavity. The pump exhaust passage communicates with the first communicating cavity. The first communicating port communicates with the inside of the first inner ring. The first actuator is sealed to the first outer ring and can be opened and closed to seal the first inner ring to switch the first communicating port and the pump exhaust passage open and closed; and / or,

[0026] The second valve includes a second outer ring, a second inner ring located inside the second outer ring, and a second actuator. The second outer ring and the second inner ring are radially spaced to form a second communicating cavity. The exhaust cavity communicates with the second communicating cavity through a second exhaust port. The first exhaust port communicates with the inner ring. The second actuator is sealed to the second outer ring and can be opened and closed to seal the second inner ring to switch the first exhaust port and the second exhaust port on or off; and / or,

[0027] The third valve includes a third outer ring, a third inner ring located inside the third outer ring, and a third actuator. The third outer ring and the third inner ring are radially spaced to form a third communicating cavity. The third exhaust port is located at the bottom of the exhaust cavity and connects the exhaust cavity and the third communicating cavity. The exhaust connector communicates with the inner ring. The third actuator is sealed to the third outer ring and can be opened and closed to seal the third inner ring to switch the exhaust connector and the third exhaust port on and off; and / or

[0028] The fourth valve includes a fourth outer ring, a fourth inner ring located inside the fourth outer ring, and a fourth actuator. The fourth outer ring and the fourth inner ring are radially spaced to form a fourth communicating cavity. The pump inlet channel communicates with the fourth communicating cavity. The first outlet communicates with the inside of the fourth inner ring. The fourth actuator is sealed to the fourth outer ring and can be opened and closed to seal the fourth inner ring to switch the first outlet and the pump inlet channel on and off.

[0029] With this configuration, the actuators of each valve can directly control the opening and closing of the inner ring. The diaphragm in the actuator presses the inner ring valve seat to achieve active sealing and cut off the flow of liquid. Moreover, the actuator has a short control stroke, low inertia, and timely response to the inner ring. The radially spaced connecting cavity between the outer and inner rings allows the liquid to form a uniform flow field in the valve, reducing turbulence and pressure drop, and thus optimizing the flow channel.

[0030] Preferably, the liquid reservoir includes a first body, a second body, and a connecting portion. The first body and the second body are partially spaced apart and connected as a whole by the connecting portion. The liquid storage chamber is vertically located inside the first body, and the venting chamber is located inside the second body.

[0031] The first valve, the second valve, the third valve, and the fourth valve are all fixedly connected to the second body. The second body includes a first base plate and an exhaust portion protruding from the first base plate. The exhaust chamber is vertically located within the exhaust portion. The second exhaust port penetrates the side wall of the exhaust portion and communicates with the second valve. The third exhaust port penetrates the side wall of the exhaust portion and communicates with the third valve.

[0032] The first substrate has a plurality of mounting holes for mounting the second valve, the first valve, the third valve and the fourth valve. The gap between the first body and the second body is a first operating space, which provides operating space for fasteners that connect the second valve, the first valve, the third valve, the fourth valve and the first substrate.

[0033] With this configuration, the volume of the liquid storage chamber is relatively large. It is placed separately in the first body to ensure the structural strength of the first body and the stability of the liquid storage chamber. The liquid storage chamber and the exhaust chamber need to be separated. The exhaust chamber is placed in the exhaust section of the second body, closer to each valve body. This helps to shorten the length of the communication channel between the exhaust chamber and each valve body. In order to fix each valve on the second base plate, the first body and the second body are spaced apart to form a first operating space. This allows the operator to insert tools for operation and provides space to accommodate the ends of bolts used as fasteners and to cooperate with locking components so that each valve body is firmly installed on the second body, ensuring a sealed connection between the valve body and each channel.

[0034] Preferably, the second valve, the first valve, the third valve, and the fourth valve are located on the same side of the first substrate and arranged from top to bottom;

[0035] The first outer ring and the first inner ring protrude from the sidewall of the first substrate and are integrally formed with the first substrate, and / or

[0036] The second outer ring and the second inner ring protrude from the sidewall of the first substrate, forming an integral structure with the first substrate, and / or

[0037] The third outer ring and the third inner ring protrude from the sidewall of the first substrate and are integrally formed with the first substrate, and / or

[0038] The fourth outer ring and the fourth inner ring protrude from the surface of the first substrate and are integral with the first substrate.

[0039] With this configuration, the second valve controls the connection between the reservoir and the exhaust chamber, and is therefore located at the highest point. The first valve controls the connection between the pump exhaust channel and the reservoir, and is subject to pressure from the reservoir on the valve diaphragm. Setting the first valve higher reduces the hydraulic pressure on the valve diaphragm. The third valve controls the connection between the exhaust end of the filter module and the exhaust chamber. Before the filter module is vented, there is no liquid in the exhaust chamber, so setting the third valve lower will not affect the opening and closing of the valve diaphragm. After the filter module is vented, even if there is liquid in the exhaust chamber, the third valve remains closed when not in use, and will not interfere with its opening and closing. The fourth valve controls the connection between the pump inlet channel and the reservoir, corresponding to the first outlet at the bottom of the reservoir, and is located at the lowest point.

[0040] Four valves are positioned on the same side of the first base plate, with the outer and inner rings of each valve integrated into the first base plate. This allows the four valves to be fixed to the first base plate simply by connecting the actuators of each valve to the corresponding components with bolts. Under the pressure of the bolts, the diaphragm on the actuator aligns with and seals the inner ring, keeping the valve in a normally closed state, thus isolating the corresponding channel. Then, under set conditions, the actuator moves the diaphragm, connecting the inner and outer rings, opening the valve and isolating the corresponding channel. This achieves openable and closable communication between the various channels. Since each valve is connected to its corresponding channel via its outer and inner rings, and the outer and inner rings are integrated into the first base plate, all interfaces are located within the solid structure, eliminating the need for additional wiring and piping. This improves component integration, reduces the number of parts and assembly processes, enhances the sealing between the valve and each channel, and prevents leakage at the connection points.

[0041] Preferably, the bottoms of the first body and the second body are connected, and the connecting part is higher than the bottom connection of the first body and the second body, including a first connecting part and a second connecting part that are vertically spaced apart, the first connecting part corresponding to the second valve, and the second connecting part corresponding to the first valve;

[0042] The end of the first inner ring used for sealing has a second communication port, and a first connecting channel is connected between the first communication port and the second communication port. The first connecting channel extends horizontally through the interior of the second connecting part and is offset and separated from the exhaust chamber.

[0043] The second inner ring has a second connecting channel between its sealing end and the first exhaust port. The second connecting channel extends horizontally through the inside of the first connecting portion and is offset from the exhaust chamber.

[0044] The exhaust chamber of this invention is vertically arranged, which can automatically achieve gas-liquid separation by gravity, so that the gas automatically rises to the top of the exhaust chamber and is discharged. The horizontally arranged first and second connecting channels make full use of the space within the first and second connecting parts, ensuring the connection strength between the first and second bodies while also being staggered with the exhaust chamber. On the other hand, when the fluid passing through the first and second connecting channels to the next space, it will inevitably change its flow direction, which is conducive to the bursting of bubbles in the liquid and the gas overflowing from the liquid, thereby achieving full exhaust.

[0045] Preferably, the second body includes a second substrate disposed perpendicular to the first substrate and a first extension extending from the second substrate into the interior of the third valve. The second substrate is located on the side of the first substrate away from the supply pump. The exhaust connector is protruding on the second substrate. The position of the exhaust connector corresponds to the position of the first extension. The first extension has a third connecting channel communicating with the interior of the third inner ring.

[0046] With this configuration, the second substrate is perpendicular to the first substrate, forming a space to accommodate the inner and outer rings of each valve. The actuators of each valve can be positioned by the second substrate to control the distance from the inner and outer rings. The first extension protrudes separately from the first and second substrates to avoid occupying the space between the inner and outer rings. The third connecting channel is horizontally positioned and communicates with the exhaust chamber. This forces the fluid to change its flow direction when entering the exhaust chamber, forming a vortex or deceleration zone, which further promotes the gas to escape from the liquid and accumulate at the top of the exhaust chamber.

[0047] Preferably, the second body further includes a third substrate and a fourth substrate protruding from the side of the first substrate facing the supply pump, a second extension extending from the third substrate into the interior of the first valve, and a third extension extending from the fourth substrate into the interior of the fourth valve; the third substrate and the fourth substrate are used for fixed connection with the supply pump, the second extension has a first flow channel communicating with the first valve and the pump exhaust channel, the first flow channel being sealed and communicating with the pump exhaust channel, and the third extension has a second flow channel communicating with the fourth valve and the pump inlet channel, the second flow channel being sealed and communicating with the pump inlet channel.

[0048] With this configuration, the third and fourth substrates are located on opposite sides of the first substrate, ensuring that the exhaust connector and the supply pump do not interfere with each other. Simultaneously, the third and fourth substrates enable a stable connection between the reservoir and the supply pump. The first, second, third, and fourth substrates together form the inner and outer rings accommodating each valve. The first and fourth valves correspond to these spaces and need to connect the pump chamber and the reservoir. Specifically, the first valve needs a connection to the pump exhaust channel, and the fourth valve needs a connection to the pump inlet channel. By placing the first and second flow channels within the third and fourth substrates respectively, the internal space of the third and fourth substrates is fully utilized, eliminating the need for additional wiring and piping, and further improving the integration of the components.

[0049] Preferably, the third substrate and the fourth substrate are fixedly connected to the supply pump by fasteners, and the second body is further provided with a second operating space corresponding to the position of the fasteners.

[0050] With this configuration, the third and fourth base plates fix the upper and lower parts of the supply pump, respectively, to prevent relative deflection between the supply pump and the reservoir. This ensures a reliable seal between the first flow channel and the pump exhaust flow channel, as well as between the second flow channel and the pump inlet flow channel. At the same time, bolts, which act as fasteners, are used to lock the supply pump and the reservoir, thereby compressing the sealing ring and enhancing the sealing performance. The second operating space facilitates the operator to insert tools and provides space to accommodate the ends of the bolts, so as to cooperate with the locking components to achieve stable installation of the supply pump.

[0051] To achieve the above objectives, the present invention also adopts the following technical solution:

[0052] A liquid supply system further includes a liquid inlet assembly, a filtration module, and a liquid outlet assembly. The liquid inlet assembly is connected to the filtration module, and the filtration module is connected to the liquid reservoir. This allows the liquid inlet assembly to supply liquid to the liquid reservoir's storage chamber, and the venting end of the filtration module to vent air into the liquid reservoir's venting chamber. The liquid outlet assembly is connected to the pump outlet channel of the supply pump for external liquid discharge.

[0053] This invention relates to a liquid supply system in which the inlet assembly delivers liquid to the filtration module, and a reservoir with a storage chamber is installed between the filtration module and the supply pump. The pump chamber of the supply pump can directly draw liquid from the reservoir, which in turn receives liquid from the filtration module. Thus, the filtration module acts as a primary buffer, and the reservoir acts as a secondary buffer. Compared to existing technologies that directly draw liquid from a distant liquid pool, this invention's liquid supply system has lower requirements for the supply pump's suction strength. By using the reservoir and filtration module as buffers, the influence of the liquid pool and inlet module on the supply pump's suction and discharge can be isolated, thereby improving the stability of the supply pump's suction and discharge and enabling the supply pump to provide a predetermined coating amount to meet coating requirements. In addition, this invention's liquid supply system concentrates the exhaust paths of the filtration module, reservoir, and supply pump chamber into the reservoir's exhaust chamber, achieving separate exhaust through a common flow channel. This facilitates pressurization, reduces liquid waste, and minimizes exhaust joints, resulting in a smaller overall size of the liquid supply system.

[0054] Preferably, the liquid inlet assembly includes a second liquid inlet for receiving liquid from the front end, a second liquid outlet for communicating with the filter module, a liquid inlet control valve disposed between the second liquid inlet and the second liquid outlet, and a first liquid inlet pipeline connecting the second liquid outlet and the liquid inlet end of the filter module.

[0055] With this configuration, the inlet control valve acts as a "switch" and "flow regulator" to control the inflow of liquid into the entire system, controlling the liquid to flow forward to the inlet end of the filter module. This modular design of the inlet assembly simplifies the replacement and maintenance process of vulnerable parts such as valves. For the entire liquid supply system, it ensures the stability, repeatability, and safety of the liquid supply process and reduces operating and maintenance costs.

[0056] Preferably, the filtration module includes a filter, a second inlet pipe for connecting the outlet end of the filter and the first inlet, and an exhaust pipe for connecting the exhaust end of the filter and the exhaust chamber.

[0057] This configuration enables the filter to achieve efficient filtration and purification of liquids, ensuring that the liquid supplied by the supply pump to the drainage component has extremely high purity. This is a key prerequisite for obtaining a defect-free, highly uniform coated membrane. The filter module is highly integrated, with functions such as liquid inlet, filtration, liquid outlet, and venting. Different filter modules can be replaced to meet different application scenarios, improving the applicability and flexibility of the liquid supply system. It also simplifies the maintenance process. When maintaining or repairing the filter, it can be operated relatively independently with minimal impact on other parts of the system.

[0058] Preferably, the drainage assembly includes a drainage channel and a drainage control valve located between the drainage channel and the pump outlet channel.

[0059] With this setup, the main function of the drain control valve is to connect the drain channel and the pump outlet channel. The supply pump then controls the flow rate of the drain channel. The drain control valve itself can also quickly and reliably open or close the liquid flow to the coating head (such as a nozzle or spin coater), precisely controlling the start and end times of the coating process and avoiding defects such as dripping and tailing.

[0060] In summary, compared with the prior art, the present invention has at least the following beneficial effects:

[0061] This invention relates to a liquid supply component and system. By incorporating a liquid reservoir and connecting the pump chamber of the supply pump to the reservoir's storage chamber, the reservoir serves as both an inlet buffer and an outlet / liquid retention structure. When the pump chamber draws liquid, it can directly draw liquid from the storage chamber, reducing the suction strength requirement of the supply pump. Furthermore, the storage chamber acts as a buffer, isolating the liquid pool and inlet module from the supply pump's suction and discharge, thus improving the stability of the pump's suction and discharge. This allows the supply pump to deliver a predetermined coating amount, meeting coating requirements. When the pump chamber needs to be vented, the storage chamber receives the liquid flowing out during venting, preventing liquid waste. Simultaneously, this invention's liquid supply system concentrates the venting paths of the filter module, storage chamber, and supply pump chamber into the reservoir's venting chamber, achieving separate venting through a shared flow channel. This facilitates pressurization, reduces liquid waste, and minimizes the number of venting joints, resulting in a smaller overall size of the liquid supply system. Attached Figure Description

[0062] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0063] Figure 1 This is a schematic diagram of the structure of the liquid supply assembly according to an embodiment of the present invention;

[0064] Figure 2 This is a cross-sectional structural diagram of the liquid supply assembly according to an embodiment of the present utility model;

[0065] Figure 3 This is a schematic diagram of the liquid reservoir and valve according to an embodiment of the present invention;

[0066] Figure 4 This is a top view of the liquid reservoir and valve according to an embodiment of the present utility model;

[0067] Figure 5 for Figure 4A cross-sectional view of point AA in the diagram;

[0068] Figure 6 for Figure 4 A cross-sectional view of section BB in the diagram;

[0069] Figure 7 This is a schematic diagram of the liquid reservoir according to an embodiment of the present utility model, which does not have an inner and outer ring of a valve.

[0070] Figure 8 This is a schematic diagram of the inner and outer rings of the liquid reservoir and valve according to an embodiment of the present utility model;

[0071] Figure 9 for Figure 8 A top view of the inner and outer rings of the reservoir and valve;

[0072] Figure 10 for Figure 9 A cross-sectional view of the CC section in the diagram;

[0073] Figure 11 for Figure 9 A cross-sectional view of the DD section in the diagram;

[0074] Figure 12 for Figure 9 A cross-sectional view of the EE section;

[0075] Figure 13 This is a schematic diagram of the liquid supply system according to an embodiment of the present invention;

[0076] Figure 14 This is a cross-sectional schematic diagram of the liquid inlet assembly and the filtration module according to an embodiment of the present utility model;

[0077] Figure 15 This is a cross-sectional schematic diagram of the supply pump and drainage assembly according to an embodiment of the present invention.

[0078] Explanation of reference numerals in the attached figures

[0079] 10. Supply pump; 11. Pump chamber; 12. Pump inlet channel; 13. Pump outlet channel; 14. Pump exhaust channel;

[0080] 20. Liquid reservoir; 21. Liquid reservoir chamber; 211. First liquid inlet; 212. First liquid outlet; 213. First connecting port; 214. First vent; 22. Venting chamber; 221. Second vent; 222. Third vent; 23. Venting connector; 24. First body; 25. Second body; 251. First substrate; 252. Venting part; 253. Mounting hole; 254. Second substrate; 255. First extension; 256. Third connecting channel; 257. Third substrate; 2571. Second extension; 2572. First flow channel; 258. Fourth substrate; 2581. Third extension; 2582. Second flow channel; 26. Connecting part; 261. First connecting part; 262. First connecting channel; 263. Second connecting part; 264. Second connecting channel; 27. First operating space; 28. Second operating space;

[0081] 30. First valve; 301. First outer ring; 302. First inner ring; 303. First actuator; 304. First connecting cavity; 305. Second connecting port;

[0082] 40. Second valve; 401. Second outer ring; 402. Second inner ring; 403. Second actuator; 404. Second connecting cavity;

[0083] 50. Third valve; 501. Third outer ring; 502. Third inner ring; 503. Third actuator; 504. Third connecting cavity;

[0084] 60. Fourth valve; 601. Fourth outer ring; 602. Fourth inner ring; 603. Fourth actuator; 604. Fourth connecting cavity; 605. Fourth connecting channel;

[0085] 70. Liquid inlet assembly; 701. Second liquid inlet; 702. Second liquid outlet; 703. Liquid inlet control valve; 704. First liquid inlet pipeline;

[0086] 80. Filter module; 801. Filter; 802. Second liquid inlet pipe; 803. Exhaust pipe; 804. Liquid inlet end; 805. Liquid outlet end; 806. Exhaust end;

[0087] 90. Drainage assembly; 901. Drainage channel; 902. Drainage control valve. Detailed Implementation

[0088] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0089] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0090] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0091] like Figure 1 and Figure 2 The liquid supply assembly shown includes a supply pump 10 and a reservoir 20. The supply pump 10 includes a pump chamber 11 with variable volume, and a pump inlet channel 12, a pump outlet channel 13, and a pump exhaust channel 14 that are respectively connected to the pump chamber 11. The supply pump 10 has a deformable diaphragm made of deformable PTFE material. The deformable diaphragm divides the inner cavity of the supply pump 10 into the pump chamber 11, which serves as a liquid chamber, and a working chamber, which serves as a gas chamber. By introducing or extracting gas into the working chamber, the deformable diaphragm can be deformed, thereby changing the volume of the pump chamber 11 to expand or shrink, so that the pump chamber 11 can draw in or discharge liquid. The supply pump 10 can be an existing diaphragm pump, and its working principle and specific structure will not be described in detail here. The reservoir 20 and the pump inlet channel 12 are in a closable connection. This closable connection means that the two can be opened to allow liquid to pass through or closed to block liquid. This can be achieved by using the specific valve structure described below, or by combining existing mechanical structures with control, thus having a switching function to selectively allow liquid to pass through or not pass through. When the pump chamber 11 changes its volume and expands, the liquid in the reservoir 20 is drawn into the pump chamber 11 through the pump inlet channel 12. Then, when the pump chamber 11 changes its volume and shrinks again, the liquid is discharged from the pump outlet channel 13.

[0092] like Figures 3 to 12As shown, the liquid reservoir 20 of this embodiment of the present invention has a liquid storage chamber 21 and an exhaust chamber 22 separated from the liquid storage chamber 21. Both the liquid storage chamber 21 and the exhaust chamber 22 are chamber structures. The liquid storage chamber 21 and the exhaust chamber 22 can be opened in the liquid reservoir 20 as a whole. Of course, in other embodiments, they can also be composed of two separate parts that can be detached, specifically, the two chambers are located in the two separate parts respectively. The liquid storage chamber 21 includes a first inlet 211, a first outlet 212, a first connecting port 213, and a first vent 214 located on the wall of the liquid storage chamber. The first outlet 212 is openable and closable and communicates with the pump inlet channel 12. The first inlet 211 is used for liquid inlet, and the first outlet 212 is used for supplying liquid to the supply pump 10. The first connecting port 213 is openable and closable and communicates with the pump vent channel 14, so that fluid can enter the pump chamber 11 from the liquid storage chamber 21 or flow out of the pump chamber 11 and enter the liquid storage chamber 21 through the pump vent channel 14. The vent chamber 22 communicates with the outside and includes... The system includes a second exhaust port 221 located on the wall of the exhaust chamber 22. The second exhaust port 221 is openable and closable, communicating with the first exhaust port 214, to allow fluid from the liquid storage chamber 21 to enter the exhaust chamber 22 and be discharged to the outside. It should be noted that the fluid can be liquid, gas, or a gas-liquid mixture. Gas enters the exhaust chamber 22 by being propelled by the liquid; the liquid fills the chamber, squeezing out the gas, or bubbles are entrained in the liquid and flow with it into the exhaust chamber 22 to be discharged. Therefore, the liquid pushes the gas into the exhaust chamber 22, at which point the exhaust chamber 22 is filled with liquid. It should also be noted that "outside" here refers to the area outside the exhaust chamber 22, not necessarily the atmospheric environment. The discharge and venting can be observed visually from outside the exhaust chamber 22, or the liquid can be collected using other devices.

[0093] like Figures 5 to 7 As shown, the first liquid inlet 211, the first liquid outlet 212, the first connecting port 213, and the first vent 214 are all opening structures provided on the inner wall of the liquid storage chamber 21, and are circular in shape. Of course, they can also be other shapes, depending on the shape of the corresponding channel end. The second vent 221 is an opening structure provided on the inner wall of the venting chamber 22, such as... Figure 7 The design shown is cashew nut shaped. The second vent 221 can also be other shapes, such as circular or elliptical. In this embodiment, the first connecting port 213 and the first vent 214 are spaced apart on the same side wall (first side wall) of the liquid storage chamber. The first inlet 211 is located on the second side wall adjacent to the first side wall. The first outlet 212 can be located on the first side wall or on other side walls.

[0094] In this embodiment of the invention, the liquid reservoir 20 serves as both a liquid inlet buffer structure and a liquid venting and retention structure. Specifically, the pump chamber 11 is connected to the first outlet 212 of the liquid reservoir 21 via the pump inlet channel 12, and is connected to the first connecting port 213 of the liquid reservoir 21 via the pump venting channel 14. When the pump chamber 11 is normally absorbing liquid, it can directly draw the liquid from the liquid reservoir 21. The liquid in the liquid reservoir 21 is drawn into the pump chamber 11 through the pump inlet channel 12, instead of the supply pump 10 directly drawing from the distant liquid pool. This reduces the requirements for the suction strength of the supply pump 10. Furthermore, by using the liquid reservoir 21 as a buffer, the influence of the liquid pool / tank and the liquid inlet module on the suction and discharge of the supply pump 10 can be isolated, thereby improving the stability of the suction and discharge of the supply pump 10. This allows the supply pump 10 to provide a predetermined coating amount to meet the coating requirements.

[0095] Before the supply pump 10 is put into use, it is necessary to vent the pump chamber. The supply pump 10 has two venting directions: one is to vent the liquid and air through the pump outlet channel 13, and the other is to vent the liquid and air through the pump venting channel 14 and the liquid storage chamber 21. The different venting directions cause the liquid in the pump chamber 11 of the supply pump 10 to change multiple times, which is beneficial to agitate the air bubbles attached to the inner wall of the pump chamber 11, thereby promoting the air bubbles to be discharged.

[0096] Specifically, when pump chamber 11 discharges liquid and air through pump outlet channel 13, pressure is applied to supply pump 10 using a front-end liquid pool. Liquid enters pump chamber 11 through pump exhaust channel 14 from top to bottom, allowing gas in pump chamber 11 to contact and dissolve in the liquid. The liquid is then pushed out through pump outlet channel 13 until the discharged liquid is free of air bubbles. When pump chamber 11 exhausts air through pump exhaust channel 14 and storage chamber 21, the liquid in pump chamber 11 pushes the gas into storage chamber 21 first. The liquid in the rear storage chamber 21 pushes the gas into the exhaust chamber 22 and is discharged through the exhaust chamber 22. When the liquid that comes out of the outlet of the exhaust chamber 22 does not contain air bubbles, it can be proven that all the gas in the storage chamber 21 and the pump chamber 11 has been discharged. Compared with the existing technology that directly sets an exhaust connector on the pump chamber 11, the technical solution of this utility model uses the storage chamber 21 to receive the liquid flowing out of the pump chamber 11 during exhaust. Part of the gas-liquid separation can be carried out in the storage chamber 21, with the liquid sinking and the liquid floating, thus avoiding liquid waste.

[0097] On the other hand, before the above-mentioned venting operation of the supply pump 10 is performed, the liquid storage chamber 21 also needs to be vented. In this embodiment, the liquid storage chamber 21 and the venting chamber 22 are arranged side by side. The liquid storage chamber 21 is also vented through the venting chamber 22. Specifically, the front liquid pool is used to apply pressure to the liquid storage chamber 21. The liquid enters the liquid storage chamber 21 through the first liquid inlet 211, pushing the gas in the liquid storage chamber 21 to move upward and enter the venting chamber through the first venting port 214 to achieve venting. Thus, the liquid storage chamber 21 and the supply pump 10 are both vented through the venting chamber 22. The entire liquid supply assembly only needs to be provided with two pressure sources, one is the pressure source of the front liquid pool, and the other is the pressure source of the supply pump 10 itself, which can achieve venting. This reduces the number of pressure sources and the venting structure, making the overall volume of the liquid supply assembly smaller and the venting path shorter. The liquid storage chamber 21 and the venting chamber 22 are both located inside the liquid reservoir 20. There is no need for complex pipe fittings, joints and other connection structures, which greatly reduces the difficulty and complexity of venting the liquid storage chamber 21 and improves the venting efficiency.

[0098] like Figure 5 As shown, the exhaust chamber 22 includes a third exhaust port 222 located on the wall of the exhaust chamber. The third exhaust port 222 is openable and closable and communicates with the exhaust end 806 of the filter module 80. In some embodiments of the liquid supply system, a filter module 80 is also included. The filter module 80 is located upstream of the liquid storage chamber 21. The liquid outlet 805 of the filter module 80 is connected to the first liquid inlet 211. The liquid enters the liquid storage chamber 21 after being filtered by the filter module 80. The filter module 80 also needs to be vented before the liquid supply system operates. Therefore, the exhaust end 806 of the filter module 80 is connected to the exhaust chamber 22 through the third exhaust port 222. On the one hand, the exhaust chamber 22 is used to exhaust the liquid storage chamber 21, pump chamber 11 and filter module 80. The exhaust structure is highly integrated, which helps to reduce the number of exhaust joints, reduce the overall volume of the liquid supply components and reduce the failure rate. On the other hand, the pump chamber 11 is directly connected to the liquid storage chamber 21 and then exhausts through the exhaust chamber 22, while the exhaust end 806 of the filter module 80 is directly connected to the exhaust chamber 22. The two are separate. Compared with the pump chamber 11 being directly connected to the exhaust chamber 22 for exhaust, the pump chamber 11 avoids putting pressure on the exhaust end 806 of the filter module 80 when venting through the liquid storage chamber 21, thus preventing a small amount of gas from entering the filter module 80.

[0099] like Figure 5 and Figure 6As shown, the first vent 214 is located at the top of the liquid storage chamber 21, and the height of the first vent 214 is higher than the height of the first connecting port 213 and the third vent 222. Specifically, the orientation of each opening structure on the inner wall of the liquid storage chamber 21 is different to meet different communication requirements. From top to bottom, they are: first vent 214, first connecting port 213, first liquid inlet 211, and first liquid outlet 212. The third vent 222 is located on the inner wall of the vent chamber 22, specifically at the bottom of the inner wall of the vent chamber 22. In terms of height, the height of the third vent 222 is lower than the first liquid inlet 211, and therefore must be lower than the first vent 214 and the first connecting port 213.

[0100] This configuration ensures that all gas in the storage chamber 21 can enter the exhaust chamber 22 through the first exhaust port 214. The height of the first connecting port 213 is lower than the first exhaust port 214, minimizing the risk of air in the storage chamber 21 entering the pump chamber 11 through the pump exhaust channel 14. The comparison between the heights of the first exhaust port 214 and the third exhaust port 222 is important because neither the first connecting port 213 nor the first inlet port 211 is directly connected to the exhaust chamber 22. When the storage chamber 21 does not require venting, the connection between the first exhaust port 214 and the second exhaust port 221 can be closed. Therefore, the first connecting port 213 and the first inlet port 211 will not affect the third exhaust port 222, and vice versa. The first exhaust port 214 is higher than the third exhaust port 222. The height of 22 serves the following purpose: based on the venting sequence, the venting of the filter module 80 precedes the venting of the liquid storage chamber 21. Therefore, before the venting of the filter module 80, there is essentially no liquid in the venting chamber 22, and the liquid pressure and obstruction to the venting end 806 of the filter module 80 are negligible, which is beneficial for the venting of the filter module 80. After the filter module 80 begins to vent, liquid will enter the venting chamber only after the third vent 222 connects the venting end 806 of the filter module 80 and the venting chamber 22. After the venting of the filter module 80 is completed, when the first vent 214 vents the liquid storage chamber 21, there may be residual liquid in the venting chamber 22. However, the height of the first vent 214 is relatively high, and it is close to the outlet end of the venting chamber 22. The liquid pressure is small or negligible and will not obstruct the venting of the liquid storage chamber 21. This ensures the venting effect of the various components integrated on the venting chamber 22 for venting.

[0101] In addition, the height of the first connecting port 213 is higher than the height of the first liquid inlet 211, so that the height of the first connecting port 213 is as high as possible, the discharged gas can quickly flow into the top of the liquid storage chamber 21 and be quickly discharged through the first exhaust port 214. At the same time, it can reduce the amount of gas that enters the filter module 80 in reverse through the first liquid inlet 211.

[0102] likeFigure 2 As shown, the pump exhaust channel 14 is obliquely upward from the top of the pump chamber 11, and the bottom of the pump exhaust channel 14 is located at the top of the pump chamber 11. The top of the pump exhaust channel 14 corresponds to the height of the first connecting port 213. Thus, the gas in the pump chamber 11 will rise and enter the pump exhaust channel 14 before the liquid. In the process of passing through the liquid storage chamber 21, the gas is always ahead of the liquid or the bubbles are concentrated in the first half of the liquid, which is conducive to pushing the gas in the pump chamber 11 into the liquid storage chamber 21.

[0103] Preferably, the first inlet 211 is higher than the first outlet 212, and the first outlet 212 is relatively close to the bottom of the storage chamber 21. With the help of gravity, the liquid output speed is increased, which is conducive to the liquid being drawn into the pump chamber 11. This not only ensures that only liquid enters the first outlet 212, but also prevents the gas released in the storage chamber 21 from entering the pump inlet channel 12. The first inlet 211, which is located at a high position, can also reduce turbulence and bubble generation when the liquid flows in, and the liquid fills the storage chamber 21 more smoothly, which is conducive to maintaining a stable liquid level.

[0104] Based on the aforementioned openings and channels, it is also necessary to achieve openable and closable connectivity between the corresponding two entities. Specifically, for example... Figures 3 to 5As shown, a first valve 30 for connecting and disconnecting the pump exhaust channel 14 and the first connecting port 213 is provided at the end of the pump exhaust channel 14. The first valve 30 has two states: open and closed. When the first valve 30 is in the closed state, the pump exhaust channel 14 and the first connecting port 213 are not connected. When the first valve 30 is in the open state, the pump exhaust channel 14 and the first connecting port 213 are connected. A second valve 40 for connecting and disconnecting the first exhaust port 214 and the second exhaust port 221 is provided between the first exhaust port 214 and the second exhaust port 221. The second valve 40 has two states: open and closed. When the second valve 40 is in the closed state, the first exhaust port 214 and the second exhaust port 221 are not connected, that is, the liquid storage chamber 21 and the exhaust chamber 22 are not connected. When the second valve 40 is in the open state, the first exhaust port 214 and the second exhaust port 221 are connected, that is, the liquid storage chamber 21 and the exhaust chamber 22 are connected. The reservoir 20 also includes an exhaust connector 23 for communicating with the exhaust end 806 of the filter module 80. A third valve 50 is provided between the exhaust connector 23 and the third exhaust port 222 to switch them on and off. The third valve 50 has two states: open and closed. When the third valve 50 is closed, the exhaust connector 23 and the third exhaust port 222 are not connected, that is, the filter module 80 is not connected to the exhaust chamber 22. When the third valve 50 is open, the exhaust connector 23 and the third exhaust port 222 are connected, that is, the filter module 80 is connected to the exhaust chamber 22. A fourth valve 60 is provided between the end of the pump inlet channel 12 and the first outlet 212 to switch them on and off. The fourth valve 60 has two states: open and closed. When the fourth valve 60 is closed, the pump inlet channel 12 and the first outlet 212 are not connected. When the fourth valve 60 is open, the pump inlet channel 12 and the first outlet 212 are connected.

[0105] Preferably, the first valve 30, the second valve 40, the third valve 50 and the fourth valve 60 can all be diaphragm valves. Diaphragm valves have excellent bidirectional sealing capabilities, no internal packing to prevent impurities from entering the liquid, and can ensure smooth communication between each channel, with no dead zones in the liquid flow. They also have advantages such as low maintenance, long service life and precise flow control.

[0106] Based on the above structure, the liquid storage chamber 21 also serves as a pressure buffer structure between the supply pump 10 and the exhaust chamber 22. Specifically, when the supply pump 10 discharges liquid and exhausts air into the liquid storage chamber 21 under positive pressure, the first valve 30 is in the open state. The pressure of the supply pump 10 will act on the liquid in the liquid storage chamber 21 and will not directly act on the second valve 40 and the third valve 50. If the pump exhaust channel 14 of the supply pump 10 is directly connected to the exhaust chamber 22, the pressure of the supply pump 10 will directly act on the diaphragm valve core of the third valve 50. Over time, this will cause the diaphragm valve core of the third valve 50 to deform, thereby affecting the sealing performance between the exhaust end 806 of the filter module 80 and the exhaust chamber 22 in the isolated state.

[0107] like Figure 5As shown, in this embodiment, the first valve 30 includes a first outer ring 301, a first inner ring 302 located inside the first outer ring 301, and a first actuator 303. The first outer ring 301 and the first inner ring 302 are radially spaced to form a first communicating cavity 304. The pump exhaust passage 14 communicates with the first communicating cavity 304, and the first communicating port 213 communicates with the inner part of the first inner ring 302. The first actuator 303 is sealed to the first outer ring 301 and can be opened and closed to seal the first inner ring 302 to switch the first communicating port 213 and the pump exhaust passage 14. The second valve 40 includes a second outer ring 401, a second inner ring 402 located inside the second outer ring 401, and a second actuator 403. The second outer ring 401 and the second inner ring 402 are radially spaced to form a second communicating cavity 404. The exhaust cavity 22 communicates with the pump exhaust passage 14 through the second exhaust port 221. The second connecting cavity 404 is connected, the first exhaust port 214 is connected to the inner ring 402, the second actuator 403 is sealed to the outer ring 401 and can be opened and closed to seal the inner ring 402 to switch the first exhaust port 214 and the second exhaust port 221; the third valve 50 includes a third outer ring 501, a third inner ring 502 located inside the outer ring 501, and a third actuator 503. The outer ring 501 and the inner ring 502 are radially spaced to form the third connecting cavity 504. The third exhaust port 222 is located at the bottom of the exhaust cavity 22 and connects the exhaust cavity 22 and the third connecting cavity 504. The exhaust connector 23 is connected to the inner ring 502. The third actuator 503 is sealed to the outer ring 501 and can be opened and closed to seal the inner ring 502 to switch the exhaust connector 23 and the third exhaust port 222. The fourth valve 60 includes a fourth outer ring 601, a fourth inner ring 602 located inside the fourth outer ring 601, and a fourth actuator 603. The fourth outer ring 601 and the fourth inner ring 602 are radially spaced to form a fourth connecting cavity 604. The pump exhaust channel 14 communicates with the fourth connecting cavity 604. The fourth first connecting port 213 communicates with the inner fourth inner ring 602. The fourth actuator 603 is sealed to the fourth outer ring 601 and can be opened and closed to seal the fourth inner ring 602 to switch the first liquid inlet 211 and the pump liquid inlet channel 12. In this embodiment, the second exhaust port 221 communicates the exhaust cavity 22 with the second connecting cavity 404 of the first valve 30. The second connecting cavity 404 is annular, and other connecting cavities can also be annular. The sidewall of the exhaust cavity 22 is cylindrical.

[0108] The actuators of all four valves can directly control the opening and closing of the inner ring. Existing diaphragm actuators can be selected. The outer edge of the diaphragm is fixed and pressed to seal the valve body. The diaphragm presses against or moves away from the inner ring, which serves as the valve seat, to achieve active sealing or opening, cutting off or connecting the liquid flow. Moreover, the actuator has a short control stroke, low inertia, and timely response to the inner ring. The radially spaced connecting cavity between the outer and inner rings allows the liquid to form a uniform flow field in the valve, reducing turbulence and pressure drop, and optimizing the flow channel.

[0109] like Figure 5 As shown, the liquid reservoir of this embodiment includes a first body 24, a second body 25, and a connecting part 26. The first body 24 and the second body 25 are partially spaced apart and connected as one unit through the connecting part 26. Specifically, the lower parts of the first body 24 and the second body 25 are directly connected as one unit, and the middle and upper parts are connected as one unit through the connecting part 26. The liquid storage chamber is located inside the first body 24, and the venting chamber is located inside the second body 25. Based on the liquid storage function of the liquid storage chamber, the volume of the liquid storage chamber is relatively large. The first body 24 is generally a columnar structure. The liquid storage chamber 21 is separately set in the first body 24 to ensure the structural strength of the first body 24 and the stability of the liquid storage chamber 21.

[0110] like Figure 7 As shown, the second body 25 includes a first substrate 251 and an exhaust portion 252 protruding from the first substrate 251. The exhaust chamber is located inside the exhaust portion 252. The second exhaust port 221 penetrates the side wall of the exhaust portion 252, and the third exhaust port 222 penetrates the bottom wall of the exhaust portion 252. The side wall of the exhaust portion 252 has a certain thickness to ensure the structural strength of the exhaust chamber.

[0111] In some embodiments, the first valve 30, the second valve 40, and the third valve 50 are completely independent of the second body 25 and are then fixedly connected to the second body 25 by bolts, such that the second exhaust port 221 passes through the side wall of the exhaust section 252 and is sealed and connected to the second valve 40, and the third exhaust port 222 passes through the side wall of the exhaust section 252 and is sealed and connected to the third valve 50, for example, by sealing with a sealing ring; at the same time, the first base plate 251 is provided with a plurality of mounting holes 253 for mounting the second valve, the first valve, the third valve, and the fourth valve, and the gap between the first body 24 and the second body 25 is the first operating space 27, which provides operating space for bolts and nuts or other fasteners and locking components connecting the second valve 40, the first valve 30, the third valve 50, and the first base plate 251; the liquid storage chamber 21 and the exhaust chamber 22 themselves need to be set separately, and the exhaust chamber 22 and each valve are set on the second body 25, but in such an embodiment, it is not conducive to the setting of valves and exhaust chambers and channels, and the installation is also relatively troublesome.

[0112] like Figure 5 and Figure 12As shown, in this embodiment, the first outer ring 301 and the first inner ring 302 protrude from the sidewall of the first substrate 251, forming an integral structure with the first substrate 251 of the reservoir. The second outer ring 401 and the second inner ring 402 protrude from the sidewall of the first substrate 251, forming an integral structure with the first substrate 251 of the reservoir. The third outer ring 501 and the third inner ring 502 protrude from the sidewall of the first substrate 251, forming an integral structure with the first substrate 251 of the reservoir. The fourth outer ring 601 and the fourth inner ring 602 protrude from the sidewall of the first substrate 251, forming an integral structure with the first substrate 251 of the reservoir. That is, the outer ring and inner ring of each valve are integrally formed with the second body 25. Therefore, by simply connecting the actuators of each valve to the first substrate 251 with bolts, the four valves can be fixed on the first substrate 251. The bolts are passed through the mounting holes 2. 53, so that the locking components such as the bolt and nut are placed in the first operating space 27 and locked. Under the pressure of the bolt, the outer edge of the diaphragm on the actuator is pressed and sealed with the outer ring, and the middle area of ​​the diaphragm is aligned with the inner ring and abutted and sealed, so that the valve is in the normally closed state, and the corresponding channel is isolated. Then, the actuator moves the diaphragm under the set conditions (such as pneumatic drive), conducts the inner ring and the outer ring, so that the valve is in the open state, and the corresponding channel is connected, thereby realizing the openable and closable connection between each channel. Since each valve and the corresponding channel are connected through the outer ring and the inner ring respectively, the outer ring and the inner ring are set as an integral structure with the first base plate 251. All the interfaces are set in the solid structure, and no additional wiring pipes are required. This can improve the integration of components, reduce the number of parts and assembly process, improve the sealing between the valve and each channel, and avoid leakage at the docking point.

[0113] like Figure 3 As shown, the second valve 40, the first valve 30, the third valve 50, and the fourth valve 60 are located on the same side of the reservoir 20 and arranged from top to bottom. The second valve 40 is used to control the connection between the reservoir 21 and the exhaust chamber 22, and therefore is located at the highest point. The first valve 30 is used to control the connection between the pump exhaust channel 14 and the reservoir 21, and will be subject to the pressure of the reservoir 21 on the valve diaphragm. Setting the first valve 30 higher can reduce the hydraulic pressure on the valve diaphragm. The third valve 50 is used to control the exhaust end 8 of the filter module 80. The connection between valve 06 and exhaust chamber 22 is such that, before the filter module 80 is vented, there is no liquid in exhaust chamber 22, so setting the third valve 50 low will not affect the opening and closing of the valve diaphragm. After the filter module 80 is vented, even if there is liquid in exhaust chamber 22, the third valve 50 remains closed and will not interfere with its opening and closing. The fourth valve 60 is used to control the connection between the pump inlet channel 12 and the reservoir 20, corresponding to the first outlet 212 located at the bottom of the reservoir 20. Placing the four valves on the same side of the reservoir 20 facilitates valve processing and assembly.

[0114] It should be noted that the four valves arranged vertically do not mean that the three valves are arranged in a perfectly aligned row in the vertical direction. Rather, it refers to the different heights of the four valves. The four valves can be staggered in the horizontal direction. Preferably, the first valve 30 and the second valve 40 are aligned in the vertical direction, the third valve 50 is slightly staggered from the first valve 30 and the second valve 40, and the fourth valve 60 is aligned with the third valve 50 in the vertical direction.

[0115] like Figure 12 As shown, the bottoms of the first body 24 and the second body 25 are connected. The connecting part 26 is higher than the bottoms of the first body 24 and the second body 25. It includes a first connecting part 261 and a second connecting part 263 that are vertically spaced apart. The first connecting part 261 corresponds to the second valve, and the second connecting part 263 corresponds to the first valve 30. The end of the first inner ring 302 used for sealing has a second connecting port 305. A first connecting channel 262 is connected between the first connecting port 213 and the second connecting port 305. The first connecting channel 262 is basically perpendicular to the side wall of the liquid storage chamber 21. The first connecting channel 262 horizontally penetrates the interior of the second connecting part 263 and is offset from the exhaust chamber 22. The end of the second inner ring 402 used for sealing has a second connecting channel 264 between it and the first exhaust port 214. The second connecting channel 264 horizontally penetrates the interior of the first connecting part 261 and is offset from the exhaust chamber 22.

[0116] The vertically arranged exhaust chamber 22 can automatically achieve gas-liquid separation by gravity, so that the gas automatically rises to the top of the exhaust chamber 22 and is discharged. The horizontally arranged first connecting channel 262 and second connecting channel 264 make full use of the internal space of the first connecting part 261 and the second connecting part 263. On the other hand, when the fluids pass through the first connecting channel 262 and the second connecting channel 264 to the next space, they will inevitably change the flow direction, which is conducive to the bursting of bubbles in the liquid and the gas overflowing the liquid, thereby achieving full exhaust.

[0117] like Figure 7 , Figure 8 and Figure 10As shown, the second body 25 includes a second base plate 254 perpendicularly disposed to the first base plate 251 and a first extension portion 255 extending from the side of the second base plate 254 into the interior of the third valve. An exhaust connector 23 protrudes from the second base plate 254, the position of which corresponds to the position of the first extension portion 255. The first extension portion 255 has a third connecting channel 256 communicating with the interior of the third inner ring. The second base plate 254 is perpendicularly disposed to the first base plate 251, forming a space to accommodate the inner and outer rings of each valve. The actuators of each valve can be positioned via the second base plate 254, controlling their distance from the inner and outer rings. The first extension portion 255 protrudes separately from the first base plate 251 and the second base plate 254, avoiding occupying the space between the inner and outer rings. The third connecting channel 256 is horizontally disposed and communicates with the exhaust chamber through the third valve 50. This forces the fluid to change its flow direction upon entering the exhaust chamber, forming a vortex or deceleration zone, further promoting the escape of gas from the liquid and its accumulation at the top of the exhaust chamber.

[0118] like Figure 5 , Figure 10 and Figure 12 As shown, the reservoir 20 has a fourth connecting channel 605 that communicates with the pump inlet channel 12, and the fourth connecting channel 605 is also horizontally arranged. The extension direction of the first connecting channel 262 is perpendicular to that of the third connecting channel 256, and the extension direction of the first connecting channel 262 is parallel to that of the second connecting channel 264. The extension direction of the fourth connecting channel 605 is perpendicular to that of the third connecting channel 256, and the extension direction of the fourth connecting channel 605 is parallel to that of the first connecting channel 262. This arrangement ensures that the connecting channels within the reservoir 20 do not interfere with each other, and the connectors and valves on the outer surface of the reservoir 20 also do not interfere with each other, resulting in high space utilization. Based on the positions of the first connecting channel 262, the second connecting channel 264, and the third connecting channel 256, as follows... Figure 3 As shown, the third valve 50 and the fourth valve 60 are slightly offset from the first valve 30 and the second valve 40 in the vertical direction.

[0119] like Figure 8 As shown, the second body 25 also includes a third substrate 257 and a fourth substrate 258 protruding from the side of the first substrate 251 facing the supply pump 10, a second extension 2571 extending from the third substrate 257 into the interior of the first valve, and a third extension 2581 extending from the fourth substrate 258 into the interior of the fourth valve. The third substrate 257 and the fourth substrate 258 are located on the same side of the first substrate 251, specifically on the side perpendicular to the valve mounting side. The second substrate 254 is located on the opposite side of the first substrate 251, so that the exhaust connector and the supply pump 10 do not interfere with each other. The first substrate 251, the second substrate 254, the third substrate 257, and the fourth substrate 258 together form a space for accommodating the inner and outer rings of each valve.

[0120] The second valve 40 and the fourth valve 60 need to connect the pump chamber 11 and the liquid storage chamber 21, that is, the second valve 40 needs to be connected to the pump exhaust passage 14. Figure 11 As shown, the second extension 2571 has a first flow channel 2572 connecting the first valve 30 and the pump exhaust channel 14, and the first flow channel 2572 is in sealed communication with the pump exhaust channel 14. The third extension 2581 has a second flow channel 2582 connecting the fourth valve 60 and the pump inlet channel 12, and the second flow channel 2582 is in sealed communication with the pump inlet channel 12. This fully utilizes the internal space of the third substrate 257 and the fourth substrate 258, eliminating the need for additional wiring and piping, and further improving the integration of the components. Figure 2 As shown, a sealing ring can be used to seal the first flow channel 2572 and the pump exhaust flow channel 14, and a sealing ring can be used to seal the second flow channel 2582 and the pump inlet flow channel 12, with a stable sealing effect.

[0121] like Figure 2 As shown, the third substrate 257 and the fourth substrate 258 are fixedly connected to the supply pump 10, specifically by bolts. The second body 25 is also provided with a second operating space 28 corresponding to the bolt position. The third substrate 257 and the fourth substrate 258 fix the upper and lower parts of the supply pump 10 respectively to avoid relative deflection between the supply pump 10 and the reservoir, so as to ensure reliable sealing between the first flow channel 2572 and the pump exhaust flow channel, and between the second flow channel 2582 and the pump inlet flow channel. At the same time, the supply pump 10 and the reservoir are locked with bolts to compress the sealing ring and enhance the sealing performance. The second operating space 28 facilitates the operator to insert tools for operation and provides space to accommodate the end of the bolt.

[0122] like Figure 13 As shown, this embodiment of the present invention also provides a liquid supply system, which further includes a liquid inlet assembly 70, a filter module 80, and a liquid outlet assembly 90. The liquid inlet assembly 70 is connected to the filter module 80, and the filter module 80 is connected to the liquid reservoir 20, so that the liquid inlet assembly 70 can supply liquid to the liquid reservoir 20's storage chamber 21, and the vent end 806 of the filter module 80 can vent air to the vent chamber 22 of the liquid reservoir 20. The liquid outlet assembly 90 can communicate with the pump outlet channel 13 of the supply pump 10 for external liquid discharge.

[0123] In this liquid supply system, the inlet assembly 70 delivers liquid to the filter module 80, and a reservoir 20 with a storage chamber 21 is provided between the filter module 80 and the supply pump 10. The pump chamber 11 of the supply pump 10 can directly draw liquid from the storage chamber 21, which in turn receives liquid from the filter module 80. Thus, the filter module 80 acts as a primary buffer, and the storage chamber 21 acts as a secondary buffer. Compared to existing technologies that directly draw liquid from a distant liquid pool, this liquid supply system places lower requirements on the suction strength of the supply pump 10, utilizing the storage chamber 20... The reservoir 20 and filter module 80 act as buffers to isolate the liquid pool and inlet module from the liquid supply pump 10's suction and discharge, thereby improving the stability of the liquid supply pump 10's suction and discharge and enabling the supply pump 10 to provide a predetermined coating amount to meet coating requirements. In addition, the liquid supply system of this utility model concentrates the exhaust paths of the filter module 80, the liquid storage chamber 21, and the pump chamber 11 of the supply pump 10 into the exhaust chamber 22 of the reservoir 20, realizing separate exhaust through a common flow channel, which facilitates pressurization, reduces liquid waste, reduces exhaust joints, and reduces the overall volume of the liquid supply system.

[0124] like Figure 14 As shown, the liquid inlet assembly 70 includes a second liquid inlet 701 for receiving liquid from the front end, a second liquid outlet 702 for communicating with the filter module 80, an inlet control valve 703 disposed between the second liquid inlet 701 and the second liquid outlet 702, and a first liquid inlet pipeline 704 connecting the second liquid outlet 702 and the liquid inlet end 804 of the filter module 80. The liquid inlet control valve 703 is a "switch" and "flow regulator" for controlling the flow of liquid into the entire system, controlling the liquid to flow forward to the liquid inlet end 804 of the filter module 80. This modular design of the liquid inlet assembly 70 simplifies the replacement and maintenance process of vulnerable parts such as valves, ensures the stability, repeatability, and safety of the liquid supply process for the entire liquid supply system, and reduces operating and maintenance costs.

[0125] The filter module 80 includes a filter 801, a second inlet pipe 802 connecting the outlet end 805 of the filter 801 and the first inlet port 211, and an exhaust pipe 803 connecting the exhaust end of the filter 801 and the exhaust chamber 22. The filter 801 can efficiently filter and purify the liquid, ensuring that the liquid supplied to the drainage assembly 90 has extremely high purity, which is a key prerequisite for obtaining a defect-free, highly uniform coated membrane. Integrating the filter 801 and its inlet / outlet / exhaust interfaces into a single module frame makes it a functionally clear and well-defined independent unit. This allows for the replacement of different filter modules 80 to meet different application scenarios, improving the applicability and flexibility of the liquid supply system. It also simplifies the maintenance process, allowing for relatively independent operation when maintaining or repairing the filter 801 with minimal impact on other parts of the system.

[0126] like Figure 15 As shown, the drain assembly 90 includes a drain channel 901 and a drain control valve 902 located between the drain channel 901 and the pump outlet channel 13. The main function of the drain control valve 902 is to connect the drain channel 901 and the pump outlet channel 13, and then the supply pump 10 precisely controls the flow rate of the drain channel 901. In actual use, the joint of the drain channel 901 can also be used to seal the connection to the pipeline. A coating head is set at the end of the pipeline, and the coating head is used to coat the liquid (photoresist) onto the wafer. The drain control valve 902 itself can also quickly and reliably open or close the liquid flow to the coating head (such as a nozzle or spin coater), precisely control the start and end times of the coating process, and avoid defects such as dripping and tailing.

[0127] The inlet control valve 703 and the outlet control valve 902 can be diaphragm valves, with a specific structure similar to the first valve 30, including an inner ring, an outer ring, and an actuator, which will not be described in detail here.

[0128] The liquid supply system of the above embodiment includes the following steps in its venting method before applying adhesive to semiconductor wafers:

[0129] Step 1: Exhaust air from the upstream and downstream sides of the supply pump 10;

[0130] Normal venting between the inlet assembly 70 and the outlet assembly 90 inevitably passes through the pump chamber 11, which may leave gas inside the pump chamber 11. Therefore, before venting the pump chamber 11, it is necessary to vent the upstream and downstream of the supply pump 10 to reduce or avoid the re-entry of gas-containing liquid into the pump chamber 11 during venting. Based on the liquid supply system of this utility model, the upstream of the supply pump 10 has an inlet assembly 70, a filter module 80, and a liquid storage chamber 21, and the downstream of the supply pump 10 has an outlet assembly 90. Venting the upstream and downstream of the supply pump 10 means venting the inlet assembly 70, the filter module 80, the liquid storage chamber 21, and the outlet assembly 90 respectively.

[0131] In other embodiments, the upstream of the supply pump 10 consists only of the inlet assembly 70 and the storage chamber 21, and the downstream of the supply pump 10 consists of the drain assembly 90. Therefore, venting the upstream and downstream of the supply pump 10 is equivalent to venting the inlet assembly 70, the storage chamber 21, and the drain assembly 90 respectively.

[0132] It is important to note that in practical applications, the liquid supply system has two tanks at the front end: a larger first liquid tank and a smaller second liquid tank, which together form the front-end liquid pool. The inlet assembly 70 is sealed to the second liquid tank via a pipe fitting. Nitrogen gas is introduced into the first liquid tank to pressurize it, allowing the liquid to enter the second liquid tank. The second liquid tank contains a level gauge. When the liquid level in the second liquid tank falls below a certain height, the valve between the first and second liquid tanks opens, allowing the liquid from the first liquid tank to replenish the second liquid tank. This ensures that the liquid in the second liquid tank always wets the pipe fitting connected to the inlet assembly 70, preventing the pipe fitting from being exposed and forcing air into the system. Similarly, before the entire liquid supply system can operate normally, it is necessary to vent the first liquid tank and the second liquid container. This step is before step one. Specifically, nitrogen gas is introduced into the liquid in the first liquid tank to pressurize it, so that the liquid enters the second liquid container. It is best to fill the second liquid container completely. The second liquid container is connected to a venting structure, and the liquid entering the second liquid container will expel the gas through the venting structure.

[0133] Based on the liquid supply system of this embodiment, step one specifically includes the following steps:

[0134] Step 1.1 Air venting step of filter module 80: By connecting the air vent end 806 of filter module 80 with the air vent chamber 22, liquid flows from the liquid inlet component 70 to the filter module 80 and then to the air vent chamber 22 until there are no air bubbles in the liquid discharged from the air vent chamber 22.

[0135] Specifically, the venting structure on the second liquid tank is closed, and the inlet control valve 703 and the third valve 50 are opened, connecting the flow path between the first liquid tank and the inlet assembly 70. Nitrogen gas is then introduced into the liquid in the first liquid tank to pressurize it. The liquid flows from the second liquid tank to the inlet assembly 70, passing through the second inlet 701 and the inlet control valve 703 of the inlet assembly 70, entering the first inlet pipe 704, and then into the filter module 80. The venting end 806 of the filter module 80 communicates with the upstream space of the filter membrane. As the liquid fills the filter module 80, gas and excess liquid are separated. The liquid flows through the exhaust end 806 of the filter module 80 to the exhaust chamber 22 and finally flows out from the outlet of the exhaust chamber 22 until there are no air bubbles in the liquid discharged from the exhaust chamber 22. At this time, the second valve 40 between the liquid storage chamber 21 and the exhaust chamber 22 is closed, and the liquid storage chamber 21 and the exhaust chamber 22 are isolated. Excess gas will not enter the liquid storage chamber 21 from the exhaust chamber 22. This ensures that the liquid and gas have a single flow direction (i.e. from upstream of the filter membrane through the exhaust end to the exhaust chamber) when the liquid inlet assembly 70 and the filter module 80 are vented, so as to ensure complete venting of the liquid inlet assembly 70 and the filter module 80.

[0136] Step 1.2 Exhaust procedure for drain assembly 90: Disconnect the connection between the exhaust end 806 of filter module 80 and exhaust chamber 22, disconnect the connection between pump exhaust channel 14 and storage chamber 21, connect the connection between storage chamber 21 and pump inlet channel 12, and connect the connection between pump outlet channel 13 and drain assembly 90, so that the liquid flows from inlet assembly 70 to filter module 80 to storage chamber 21 to pump chamber 11, and then flows through pump outlet channel 13 to drain assembly 90 until there are no air bubbles in the liquid discharged by drain assembly 90.

[0137] Specifically, the venting structure on the second liquid tank is closed, the first valve 30, the second valve 40, and the third valve 50 are closed, the fourth valve 60 is opened, the liquid storage chamber 21 is connected to the pump inlet channel 12, the inlet control valve 703 and the outlet control valve 902 are opened, nitrogen gas is introduced to pressurize the liquid in the first liquid tank, and the liquid flows from the second liquid tank to the inlet assembly 70. Through the second inlet 701 and the inlet control valve 703 of the inlet assembly 70, it enters the first inlet pipeline 704, and then enters the filter module 80. After being filtered by the filter module 80, the liquid exits from the outlet of the filter module 80. 805 flows to the first inlet 211 of the storage chamber 21, and then enters the storage chamber 21. Under positive pressure, the liquid in the storage chamber 21 enters the pump inlet channel 12 through the first outlet 212, and then enters the pump chamber 11. It pushes the gas in the pump outlet channel 13 and the drainage assembly 90 to the outlet of the drainage assembly 90 until there are no air bubbles in the liquid discharged by the drainage assembly 90. During this process, the supply pump 10 itself does not work and relies entirely on the positive pressure at the front end to drive the liquid flow, so that the liquid is smoothly propelled and the gas in the pump outlet channel 13 and the drainage assembly 90 is completely discharged.

[0138] Step 1.3 Exhaust procedure for liquid storage chamber 21: Disconnect the connection between liquid storage chamber 21 and pump exhaust channel 14 and pump inlet channel 12, disconnect the connection between exhaust end 806 of filter module 80 and exhaust chamber 22, connect liquid storage chamber 21 and exhaust chamber 22, and connect liquid storage chamber 21 to the outside through exhaust chamber 22, so that liquid flows from inlet component 70 to liquid storage chamber 21 until there are no air bubbles in the liquid discharged from exhaust chamber 22.

[0139] Specifically, the venting structure on the second liquid tank is closed, the first valve 30, the third valve 50, and the fourth valve 60 are closed, the connection between the liquid storage chamber 21 and the pump venting channel 14 and the pump inlet channel 12 is disconnected, the connection between the liquid storage chamber 21 and the pump chamber 11 is disconnected, and the connection between the liquid storage chamber 21 and the venting end 806 of the filter module 80 is disconnected. The second valve 40 is opened to connect the liquid storage chamber 21 and the venting chamber 22, and nitrogen gas is introduced into the liquid in the first liquid tank to pressurize it. The liquid flows from the second liquid tank to the inlet assembly 70, passing through... The liquid enters the first liquid inlet pipe 704 through the second liquid inlet 701 and the liquid inlet control valve 703 of the liquid inlet assembly 70, and then enters the filter module 80. After being filtered by the filter module 80, the liquid flows from the liquid outlet 805 of the filter module 80 to the first liquid inlet 211 of the liquid storage chamber 21, and then enters the liquid storage chamber 21. The increased liquid pushes the gas in the liquid storage chamber 21 to move upward, and enters the exhaust chamber 22 through the first exhaust port 214 and the second exhaust port 221 until there are no more air bubbles in the liquid discharged from the exhaust chamber 22.

[0140] This completes the venting of the upstream and downstream sides of the supply pump 10.

[0141] Step 2, the venting step of the supply pump 10: disconnect the connection between the pump inlet channel 12 and the storage chamber 21, disconnect the connection between the storage chamber 21 and the venting chamber 22, so that the liquid enters the pump chamber 11 of the supply pump 10 through the inlet assembly 70, the storage chamber 21 and the pump venting channel 14, and enters the pump outlet channel 13 from the bottom of the pump chamber 11, and is then discharged by the drainage assembly 90 until there are no air bubbles in the liquid discharged from the drainage assembly 90; disconnect the connection between the pump inlet channel 12 and the storage chamber 21, disconnect the connection between the pump outlet channel 13 and the drainage assembly 90, connect the storage chamber 21 and the venting chamber 22, and through the deformation of the diaphragm of the supply pump 10, so that the liquid in the pump chamber 11 enters the pump venting channel 14 from the top of the pump chamber 11 and returns to the storage chamber 21, until there are no air bubbles in the liquid discharged from the venting chamber 22.

[0142] When the supply pump 10 starts venting, both the liquid storage chamber 21 and the drainage assembly 90 are filled with liquid. Step two includes two steps. Specifically, step 2.1 involves closing the venting structure on the second liquid tank, closing the fourth valve 60 to disconnect the connection between the pump inlet channel 12 and the liquid storage chamber 21, closing the second valve 40 to disconnect the connection between the liquid storage chamber 21 and the venting chamber 22, closing the third valve 50 to disconnect the connection between the venting chamber 22 and the filter module 80, and opening the inlet control valve 703, the first valve 30, and the drainage control valve 902 to pressurize the liquid in the first liquid tank with nitrogen gas. The liquid then flows from the second liquid tank to the inlet assembly 70. The liquid enters the first inlet pipe 704 through the second inlet port 701 and the inlet control valve 703 of the inlet assembly 70, and then enters the filter module 80. After being filtered by the filter module 80, the liquid flows from the drain end of the filter module 80 to the first inlet port 211 of the storage chamber 21, and then enters the storage chamber 21. The full storage chamber 21 sends the liquid through the first connecting port 213 into the pump exhaust channel 14, and then into the pump chamber 11. The newly entered liquid flows from top to bottom, pushing the original liquid and gas in the pump chamber 11 toward the pump outlet channel 13, and then flows out from the drain module until there are no air bubbles in the liquid discharged from the drain assembly 90.

[0143] Step 2.2 Close the venting structure on the second liquid tank, close the fourth valve 60, disconnect the connection between the pump inlet channel 12 and the storage chamber 21, close the third valve 50, disconnect the connection between the venting chamber 22 and the filter module 80, close the inlet control valve 703 and the outlet control valve 902, open the first valve 30, connect the first connecting port 213 and the pump venting channel 14, open the second valve 40, connect the first venting port 214 and the venting chamber 22, and then reduce the volume of the pump chamber 11 by supplying the diaphragm of the pump 10. The liquid in the pump chamber 11 moves from bottom to top to the pump venting channel 14, pushing the residual gas in the pump chamber 11 to concentrate to the top of the pump chamber 11, and then enters the pump venting channel 14 and moves to the storage chamber 21, and is finally discharged by the venting chamber 22. When liquid comes out of the outlet of the venting chamber 22 and there are no bubbles in the liquid, it can be proved that all the gas in the storage chamber 21 and the pump chamber 11 has been discharged.

[0144] During the two venting processes, the liquid flow direction in the pump chamber 11 is different, which causes the air bubbles in the liquid to be released. In addition, the liquid in the pump chamber 11 supplied by the pump 10 changes multiple times, which helps to stir the air bubbles attached to the inner wall of the pump chamber 11, and finally causes the air bubbles to be discharged. Compared with the existing technology that directly sets the venting connector on the pump chamber 11, the technical solution of this utility model uses the liquid storage chamber 21 to receive the liquid flowing out of the pump chamber 11 during venting, thus avoiding liquid waste.

[0145] Step 3: Disconnect the connection between the liquid storage chamber 21 and the exhaust chamber 22, disconnect the connection between the pump exhaust channel 14 and the liquid storage chamber 21, disconnect the connection between the pump inlet channel 12 and the liquid storage chamber 21, and guide the connection between the exhaust end 806 of the filter module 80 and the exhaust chamber 22, so that the liquid flows from the filter module 80 to the exhaust chamber 22 until there are no air bubbles in the liquid discharged from the exhaust chamber 22, so as to complete the exhaust verification of the filter module 80.

[0146] Since there is no valve between the liquid storage chamber 21 and the inlet end 804 of the filter module 80, when the pump chamber 11 of the supply pump 10 is vented, some gas or air bubbles may flow back to the filter module 80 through the first inlet 211 when the liquid and gas in the pump chamber 11 of the supply pump 10 enter the liquid storage chamber 21. Therefore, in order to ensure the final venting effect of the filter module 80, after the venting of the pump chamber 11 of the supply pump 10 is completed, the venting of the filter module 80 needs to be checked. The venting check refers to checking whether air bubbles have entered the filter module by venting the filter module again. The operation of step three is similar to step 1.1. The first valve 30, the second valve 40, and the fourth valve 60 need to be closed, and the venting chamber 22 is vented at the venting end 806 of the filter module 80. Since the liquid storage chamber 21 and the venting chamber 22 are isolated, and the pump chamber 11 and the liquid storage chamber 21 are also isolated, even if there are a small number of air bubbles in the filter module 80, they can only enter the venting chamber 22 and be discharged, and will not flow back to the liquid storage chamber 21 and the pump chamber 11.

[0147] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A liquid supply assembly, comprising a supply pump (10), characterized in that, It also includes a reservoir (20), The supply pump (10) includes a pump chamber (11) with variable volume, a pump inlet channel (12) connected to the pump chamber (11), a pump outlet channel (13) and a pump exhaust channel (14); The reservoir (20) has a reservoir chamber (21) inside. The reservoir chamber (21) includes a first inlet (211), a first outlet (212), a first connecting port (213), and a first vent (214) located on the wall of the reservoir chamber. The first outlet (212) is openable and closable and communicates with the pump inlet channel (12). The first connecting port (213) is openable and closable and communicates with the pump vent channel (14), so that fluid can enter the pump chamber (11) from the reservoir chamber (21) or flow out of the pump chamber (11) and enter the reservoir chamber (21) through the pump vent channel (14). The supply assembly includes an exhaust chamber (22) separated from the liquid storage chamber (21). The exhaust chamber (22) includes a second exhaust port (221) located on the wall of the exhaust chamber. The second exhaust port (221) is openable and closable and communicates with the first exhaust port (214) so ​​that the fluid in the liquid storage chamber (21) can enter the exhaust chamber (22) and be discharged to the outside.

2. The liquid supply assembly as claimed in claim 1, characterized in that, The exhaust chamber (22) includes a third exhaust port (222) located on the wall of the exhaust chamber, the third exhaust port (222) being openable and closable and communicating with the exhaust end (806) of the filter module (80).

3. The liquid supply assembly as described in claim 2, characterized in that, The first vent (214) is located at the top of the liquid storage chamber (21), and the height of the first vent (214) is higher than the height of the first connecting port (213) and the third vent (222).

4. The liquid supply assembly as claimed in claim 3, characterized in that, The pump exhaust channel (14) is obliquely upward from the top of the pump chamber (11). The height of the first connecting port (213) is higher than the height of the first liquid inlet (211). The first liquid outlet (212) is located at the bottom of the liquid storage chamber (21). The height of the first liquid inlet (211) is higher than the height of the first liquid outlet (212).

5. The liquid supply assembly as claimed in any one of claims 1 to 4, characterized in that, A first valve (30) for switching the pump exhaust passage (14) on and off is provided between the end of the pump exhaust passage (14) and the first communication port (213); and / or A second valve (40) for switching on and off is provided between the first exhaust port (214) and the second exhaust port (221); and / or The reservoir (20) further includes an exhaust connector (23) for communicating with the exhaust end (806) of the filter module (80), and a third valve (50) for switching the two on and off is provided between the exhaust connector (23) and the third exhaust port (222); and / or A fourth valve (60) for switching the pump inlet channel (12) on and off is provided between the end of the pump inlet channel (12) and the first outlet (212).

6. The liquid supply assembly as claimed in claim 5, characterized in that, The first valve (30) includes a first outer ring (301), a first inner ring (302) located inside the first outer ring (301), and a first actuator (303). The first outer ring (301) and the first inner ring (302) are radially spaced to form a first communicating cavity (304). The pump exhaust passage (14) communicates with the first communicating cavity (304). The first communicating port (213) communicates with the inside of the first inner ring (302). The first actuator (303) is sealed to the first outer ring (301) and can openably and closeably seal the first inner ring (302) to switch the first communicating port (213) and the pump exhaust passage (14) on or off; and / or The second valve (40) includes a second outer ring (401), a second inner ring (402) located inside the second outer ring (401), and a second actuator (403). The second outer ring (401) and the second inner ring (402) are radially spaced to form a second communicating cavity (404). The exhaust cavity (22) communicates with the second communicating cavity (404) through the second exhaust port (221). The first exhaust port (214) communicates with the inner part of the second inner ring (402). The second actuator (403) is sealed to the second outer ring (401) and can openably and closeably seal the second inner ring (402) to switch the first exhaust port (214) and the second exhaust port (221) on and off; and / or The third valve (50) includes a third outer ring (501), a third inner ring (502) located inside the third outer ring (501), and a third actuator (503). The third outer ring (501) and the third inner ring (502) are radially spaced to form a third connecting cavity (504). The third exhaust port (222) is located at the bottom of the exhaust cavity (22) and connects the exhaust cavity (22) and the third connecting cavity (504). The exhaust connector (23) is connected to the inner third inner ring (502). The third actuator (503) is sealed to the third outer ring (501) and can be opened and closed to seal the third inner ring (502) to switch the exhaust connector (23) and the third exhaust port (222) on and off; and / or The fourth valve (60) includes a fourth outer ring (601), a fourth inner ring (602) located inside the fourth outer ring (601), and a fourth actuator (603). The fourth outer ring (601) and the fourth inner ring (602) are radially spaced to form a fourth communicating cavity (604). The pump inlet channel (12) communicates with the fourth communicating cavity (604). The first outlet (212) communicates with the inside of the fourth inner ring (602). The fourth actuator (603) is sealed to the fourth outer ring (601) and can open and close the fourth inner ring (602) to switch the first outlet (212) and the pump inlet channel (12) on and off.

7. The liquid supply assembly as claimed in claim 6, characterized in that, The liquid reservoir (20) includes a first body (24), a second body (25) and a connecting part (26). The first body (24) and the second body (25) are partially spaced apart and connected to each other by the connecting part (26). The liquid storage cavity (21) is vertically located inside the first body (24). The first valve (30), the second valve (40), the third valve (50) and the fourth valve (60) are all fixedly connected to the second body (25). The second body (25) includes a first base plate (251) and an exhaust part (252) protruding from the first base plate (251). The exhaust chamber (22) is vertically located in the exhaust part (252). The second exhaust port (221) penetrates the side wall of the exhaust part (252) and communicates with the second valve (40). The third exhaust port (222) penetrates the bottom wall of the exhaust part (252) and communicates with the third valve (50). The first substrate (251) is provided with a plurality of mounting holes (253) for mounting the second valve (40), the first valve (30), the third valve (50) and the fourth valve (60). The gap between the first body (24) and the second body (25) is a first operating space (27), which provides operating space for fasteners connecting the second valve (40), the first valve (30), the third valve (50), the fourth valve (60) and the first substrate (251).

8. The liquid supply assembly as claimed in claim 7, characterized in that, The second valve (40), the first valve (30), the third valve (50) and the fourth valve (60) are located on the same side of the first substrate (251) and are arranged from top to bottom; The first outer ring (301) and the first inner ring (302) protrude from the surface of the first substrate (251) and are integrally formed with the first substrate (251), and / or The second outer ring (401) and the second inner ring (402) protrude from the surface of the first substrate (251) and are integrally formed with the first substrate (251), and / or The third outer ring (501) and the third inner ring (502) protrude from the surface of the first substrate (251) and are integrally formed with the first substrate (251); and / or The fourth outer ring (601) and the fourth inner ring (602) protrude from the surface of the first substrate (251) and are integral with the first substrate (251).

9. The liquid supply assembly as claimed in claim 8, characterized in that, The bottom of the first body (24) and the second body (25) are connected. The connecting part (26) is higher than the bottom connection of the first body (24) and the second body (25), and includes a first connecting part (261) and a second connecting part (263) arranged vertically at intervals. The first connecting part (261) corresponds to the second valve (40), and the second connecting part (263) corresponds to the first valve (30). The first inner ring (302) has a second connecting port (305) at the end for sealing. A first connecting channel (262) is connected between the first connecting port (213) and the second connecting port (305). The first connecting channel (262) horizontally penetrates the second connecting part (263) and is offset from the exhaust chamber (22). The second inner ring (402) has a second connecting channel (264) between the sealing end and the first exhaust port (214). The second connecting channel (264) horizontally penetrates the first connecting part (261) and is offset from the exhaust chamber (22).

10. The liquid supply assembly as claimed in claim 8, characterized in that, The second body (25) includes a second substrate (254) disposed perpendicular to the first substrate (251) and a first extension (255) extending from the second substrate (254) into the third valve (50). The second substrate (254) is located on the side of the first substrate (251) away from the supply pump (10). An exhaust connector (23) is provided on the second substrate (254). The position of the exhaust connector (23) corresponds to the position of the first extension (255). The first extension (255) is provided with a third connecting channel (256) communicating with the interior of the third inner ring (502).

11. The liquid supply assembly as claimed in claim 8, characterized in that, The second body (25) further includes a third substrate (257) and a fourth substrate (258) protruding from the first substrate (251) toward the supply pump (10), and a second extension (2571) extending from the third substrate (257) toward the interior of the first valve (30), and a third extension (2581) extending from the fourth substrate (258) toward the interior of the fourth valve (60); the third substrate (257) and the fourth substrate (258) are used to interact with the supply pump (10). The supply pump (10) is fixedly connected. The second extension (2571) is provided with a first flow channel (2572) that connects the first valve (30) and the pump exhaust channel (14). The first flow channel (2572) is sealed and connected to the pump exhaust channel (14). The third extension (2581) is provided with a second flow channel (2582) that connects the fourth valve (60) and the pump inlet channel (12). The second flow channel (2582) is sealed and connected to the pump inlet channel (12).

12. The liquid supply assembly as claimed in claim 11, characterized in that, The third substrate (257) and the fourth substrate (258) are fixedly connected to the supply pump (10) by fasteners, and the second body (25) is also provided with a second operating space (28) corresponding to the position of the fasteners.

13. A liquid supply system, further comprising a liquid inlet assembly (70), a filter module (80), and a liquid outlet assembly (90), characterized in that, It also includes a liquid supply assembly as described in any one of claims 1 to 12, wherein the liquid inlet assembly (70) is connected to the filter module (80), the filter module (80) is connected to the reservoir (20), such that the liquid inlet assembly (70) can supply liquid to the reservoir chamber (21) of the reservoir (20), and the vent end (806) of the filter module (80) vents to the vent chamber (22) of the reservoir (20), and the liquid discharge assembly (90) can communicate with the pump outlet channel (13) of the supply pump (10) for external liquid discharge.

14. The liquid supply system as claimed in claim 13, characterized in that, The liquid inlet assembly (70) includes a second liquid inlet (701) for receiving liquid from the front end, a second liquid outlet (702) for communicating with the filter module (80), a liquid inlet control valve (703) disposed between the second liquid inlet (701) and the second liquid outlet (702), and a first liquid inlet pipe (704) communicating with the second liquid outlet (702) and the liquid inlet end (804) of the filter module (80).

15. The liquid supply system as claimed in claim 13, characterized in that, The filtration module (80) includes a filter (801), a second inlet pipe (802) for connecting the outlet end (805) of the filter (801) and the first inlet port (211), and an exhaust pipe (803) for connecting the exhaust end (806) of the filter (801) and the exhaust chamber (22).

16. The liquid supply system as claimed in claim 13, characterized in that, The drainage assembly (90) includes a drainage channel (901) and a drainage control valve (902) located between the drainage channel (901) and the pump outlet channel (13).

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