Silicon wafer carrying basket and hydrophobic device

By setting a slope on the outer wall of the pressure bar to form a hydrophobic angle, the problem of droplet retention when the silicon wafer carrying basket leaves the cleaning tank is solved, and a faster drying effect is achieved.

CN224538683UActive Publication Date: 2026-07-21CHANGZHOU S C EXACT EQUIP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
CHANGZHOU S C EXACT EQUIP
Filing Date
2025-04-25
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

In existing cleaning equipment, when the silicon wafer support basket is removed from the cleaning tank, the small water droplets collected at the bottom of the pressure rod are not easy to drip off, which increases the difficulty of drying and prolongs the drying time.

Method used

At least two bevels are provided on the outer wall of the pressure bar to form a hydrophobic angle, and the angle is made vertically downward so that the droplets drip from the hydrophobic angle when they leave the cleaning tank.

Benefits of technology

The design of the hydrophobic angle reduces residual liquid, improves drying efficiency, and shortens drying time.

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Abstract

The utility model belongs to the technical field of solar cell production cleaning equipment, specifically relates to a silicon wafer bearing flower basket and hydrophobic device, and the device includes: a plurality of pressure bars, the lower part of each pressure bar is provided with at least two inclined planes, and the intersection of two adjacent inclined planes forms a downwardly arranged hydrophobic angle, by setting at least two inclined planes on the outer wall of the pressure bar, and the hydrophobic angle is formed to the side of the line of two adjacent inclined planes and the hydrophobic angle is vertically downward, and then when the pressure bar follows the flower basket to separate from the cleaning tank, the liquid drop drops from the hydrophobic angle.
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Description

Technical Field

[0001] This utility model belongs to the technical field of solar cell production cleaning equipment, specifically relating to silicon wafer support baskets and hydrophobic devices. Background Technology

[0002] In the process of manufacturing solar cells, silicon wafers need to undergo processes such as cleaning, diffusion, annealing, coating, and screen printing.

[0003] Currently, the most common cleaning equipment is the tank-type equipment and the chain-type equipment. The tank-type equipment uses baskets to carry silicon wafers, and the baskets are equipped with hooks. A robotic arm can immerse the baskets in various cleaning tanks for cleaning. After cleaning, the baskets enter the drying tank for drying. When the robotic arm lifts the baskets from the cleaning tanks, small water droplets tend to collect at the bottom of the basket's pressure bar, making it difficult for them to drip off. This results in water entering the drying stage with liquid on them, increasing the drying difficulty and lengthening the drying time.

[0004] Therefore, a silicon wafer-supported flower basket and a hydrophobic device are designed to solve the technical problem in the prior art where small water droplets collect at the bottom of the pressure rod and do not easily drip off when the flower basket is removed from the cleaning tank.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0006] This disclosure provides at least one embodiment of a silicon wafer-supported flower basket and a hydrophobic device.

[0007] In a first aspect, embodiments of this disclosure provide a silicon wafer-supported flower basket, comprising: Several compression bars; Each pressure bar has at least two inclined surfaces at its lower part, and the intersection of two adjacent inclined surfaces forms a downward-facing hydrophobic angle.

[0008] In one optional embodiment, each of the pressure bars is provided with a plurality of fixing teeth; wherein Each fixed tooth on the upper and lower pressure rods corresponds to a fixed tooth, and the tips of the fixed teeth on the upper and lower pressure rods are opposite each other. A silicon wafer placement position is provided between each pair of adjacent fixing teeth; wherein The silicon wafer placement positions on each of the upper and lower pressure rods are adapted to engage with the upper and lower ends of the silicon wafer.

[0009] In one optional embodiment, at least one side pressure rod is provided between the upper and lower pressure rods; wherein The plane containing the fixed teeth on the side pressure rod is perpendicular to the plane containing the fixed teeth on the upper and lower pressure rods.

[0010] In one optional embodiment, end plates are provided on both sides of each of the pressure bar assemblies; wherein The two ends of each upper and lower pressure rod and the side pressure rod are connected to the corresponding end plate.

[0011] Secondly, embodiments of this disclosure also provide a hydrophobic device, comprising: Several compression bars; Each pressure bar has at least two inclined surfaces at its lower part, and the intersection of two adjacent inclined surfaces forms a downward-facing hydrophobic angle.

[0012] In one optional embodiment, each of the pressure bars is provided with a plurality of fixing teeth; wherein Each fixed tooth on the upper and lower pressure rods corresponds to a fixed tooth, and the tips of the fixed teeth on the upper and lower pressure rods are opposite each other. A silicon wafer placement position is provided between each pair of adjacent fixing teeth; wherein The silicon wafer placement positions on each of the upper and lower pressure rods are adapted to engage with the upper and lower ends of the silicon wafer.

[0013] In one optional embodiment, at least one side pressure rod is provided between the upper and lower pressure rods; wherein The plane containing the fixed teeth on the side pressure rod is perpendicular to the plane containing the fixed teeth on the upper and lower pressure rods.

[0014] The beneficial effect of this utility model is that the device sets at least two inclined surfaces on the outer wall of the pressure rod, and forms a hydrophobic angle on one side of the two adjacent inclined surfaces that are collinear and makes the hydrophobic angle vertically downward, so that when the pressure rod follows the flower basket out of the cleaning tank, the liquid droplets drip from the hydrophobic angle.

[0015] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0016] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0017] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1A front view of a flower basket provided in an embodiment of this disclosure; Figure 2 A side view of a flower basket provided in an embodiment of this disclosure.

[0019] In the picture: 1. End plate; 2. Pressure bar; 21. Fixing tooth; 22. Hydrophobic angle; 23. Inclined surface; 24. Side pressure bar; 25. Silicon wafer placement position; 3. Silicon wafers; 4. Flower basket. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0021] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0022] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.

[0023] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0024] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0025] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0026] Research has found that the most common cleaning equipment currently available is mainly tank-type and chain-type equipment. Tank-type equipment uses baskets to hold silicon wafers, with hooks on the baskets. A robotic arm can immerse the baskets in various cleaning tanks for cleaning, and then the wafers enter the drying stage. When the robotic arm lifts the baskets from the cleaning tanks, small water droplets tend to collect at the bottom of the basket's pressure bar, making it difficult for water to drip off. This results in water entering the drying stage with liquid on the wafers, increasing the drying difficulty and extending the drying time.

[0027] Based on the above research, this disclosure provides a silicon wafer carrying basket and a hydrophobic device. By setting at least two inclined surfaces on the outer wall of the pressure rod, and forming a hydrophobic angle with one side of the two adjacent inclined surfaces being collinear and the hydrophobic angle facing vertically downward, the liquid droplets drip from the hydrophobic angle when the pressure rod follows the basket out of the cleaning tank.

[0028] The shortcomings of the above solutions are the result of the inventor's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventor's contribution to this disclosure.

[0029] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0030] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0031] In some embodiments, such as Figure 1 and Figure 2 As shown, the upper and lower pressure rods 2 in each pressure rod assembly 2 are fixed between the two end plates 1, so that the fixing teeth 21 on the upper and lower pressure rods 2 correspond one-to-one. Simultaneously, each side pressure rod 24 is fixed between the two end plates 1, and the fixing teeth 24 on each side pressure rod 24 face the position between the upper and lower pressure rods 2. At this time, the operator inserts several silicon wafers 3 into the silicon wafer placement positions 25 between the fixing teeth 21 on the upper and lower pressure rods 2. The upper and lower silicon wafer placement positions 25 are used to engage the upper and lower ends of the silicon wafers 3. As the silicon wafers 3 are inserted, their side ends engage with the silicon wafer placement positions 25 between the fixing teeth 21 on the side pressure rods 24 to fix the side of the silicon wafers 3. Then, the robot arm holds the end plate 1 and sinks each silicon wafer 3 into the cleaning tank. When the cleaning is completed, when the end plate 1 is lifted out of the cleaning tank, the residual water droplets on each pressure rod 2 flow along the inclined outer wall of the pressure rod 2 and collect on the hydrophobic angle 22, as shown in the figure. Figure 2 As shown, from the perspective of the end plate, each pressure rod 2 has at least one hydrophobic angle 22 pointing vertically downward in its projected view. In the prior art, the robot arm mostly relies on hooks to pick up the flower basket 4 and then lift it out of the cleaning tank. Since the structure of the flower basket 4 is different, the connection position between each flower basket 4 and the hook will change. Therefore, the flower basket 4 does not move completely vertically and may tilt. By setting multiple hydrophobic angles 22 on the pressure rod 2, when the robot arm lifts different types of flower baskets 4, at least one hydrophobic angle 22 on the pressure rod 2 will always be pointing vertically downward. Because the radius of curvature of the cylindrical surface is small, according to the Laplace formula (ΔP = γ(1 / r1 + 1 / r2)), (where ΔP is the pressure difference, γ is the surface tension coefficient of the liquid, and r1 and r2 are the radii of curvature), the smaller the radius of curvature, the greater the pressure difference between the inside and outside of the liquid surface. Since the pressure difference on the cylindrical surface is greater than that on the inclined surface, the residual liquid on the inclined surface is more likely to flow away due to gravity. Therefore, the basket pressure bar with hydrophobic angle has less residual liquid, and it is easier to dry after entering the drying tank after the cleaning process. At the same time, it also reduces the drying time and improves the drying effect.

[0032] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.

[0034] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0035] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.

[0036] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A silicon wafer-supported flower basket, characterized in that, include: Several compression bars (2); Each pressure bar (2) has at least two inclined surfaces (23) at its lower part, and the intersection of two adjacent inclined surfaces (23) forms a downward-facing hydrophobic angle (22). Each of the pressure rods (2) is provided with a number of fixed teeth (21); wherein Each fixed tooth (21) on each upper and lower pressure rod (2) corresponds to one another, and the sharp corners of each fixed tooth (21) on each upper and lower pressure rod (2) are opposite each other; A silicon wafer placement position (25) is provided between each pair of adjacent fixing teeth (21); wherein The silicon wafer placement positions (25) on each of the upper and lower pressure rods (2) are adapted to engage with the upper and lower ends of the silicon wafer (3).

2. The silicon wafer-supported flower basket as described in claim 1, characterized in that, At least one side pressure rod (24) is provided between the upper and lower pressure rods (2); wherein The plane where the fixed tooth (21) on the side pressure rod (24) is located is perpendicular to the plane where the fixed tooth (21) on the upper and lower pressure rods (2) is located.

3. The silicon wafer-supported flower basket as described in claim 2, characterized in that, Each of the pressure rods (2) has an end plate (1) corresponding to both sides; wherein The two ends of each upper and lower pressure rod (2) and side pressure rod (24) are connected to the corresponding end plate (1).

4. A hydrophobic device, characterized in that, include: Several compression bars (2); Each pressure bar (2) has at least two inclined surfaces (23) at its lower part, and the intersection of two adjacent inclined surfaces (23) forms a downward-facing hydrophobic angle (22). Each of the pressure rods (2) is provided with a number of fixed teeth (21); wherein Each fixed tooth (21) on each upper and lower pressure rod (2) corresponds to one another, and the sharp corners of each fixed tooth (21) on each upper and lower pressure rod (2) are opposite each other; A silicon wafer placement position (25) is provided between each pair of adjacent fixing teeth (21); wherein The silicon wafer placement positions (25) on each of the upper and lower pressure rods (2) are adapted to engage with the upper and lower ends of the silicon wafer (3).

5. The hydrophobic device as described in claim 4, characterized in that, At least one side pressure rod (24) is provided between the upper and lower pressure rods (2); wherein The plane where the fixed tooth (21) on the side pressure rod (24) is located is perpendicular to the plane where the fixed tooth (21) on the upper and lower pressure rods (2) is located.