Wafer transfer cassette unlocking mechanism for wafer loader

Abstract

The utility model relates to wafer loader technical field especially for a kind of wafer transfer box unlocking mechanism for wafer loader, including equipment mounting bracket, transfer box fixed mechanism, unlocking subassembly drive mechanism, unlocking subassembly limiting mechanism, transfer box unlocking subassembly and wafer transfer box, in the utility model, through the first rotary connecting seat, hydraulic rod, second rotary connecting seat, transmission plate, transmission shaft and rotary connecting block being set, the device can be moved by the telescopic rod of hydraulic rod and drive second rotary connecting seat, and then make transmission plate and transmission shaft displace in vertical direction, that is, T-shaped key can be rotated by rotary connecting block, to unlock wafer transfer box, the device is replaced by hydraulic rod and its cooperation component the rotation angle of T-shaped key is controlled by light code disc and photoelectric sensor, more common component is used to unlock wafer transfer box, reduce the production cost and maintenance cost of unlocking mechanism.

Description

Technical Field

[0001] This utility model relates to the field of wafer loader technology, specifically a wafer transfer box unlocking mechanism for a wafer loader. Background Technology

[0002] The wafer transfer box of a wafer loader is a container used in semiconductor manufacturing to protect, transport, and store wafers. It can typically hold a certain number of wafers. The wafer transfer box mainly consists of a receiving box and a sealed door. The sealed door can only be removed from the receiving box by using the wafer transfer box unlocking mechanism.

[0003] Existing wafer transfer box unlocking mechanisms used in wafer loaders employ a rotary cylinder to rotate a T-shaped key, and a photoelectric sensor in conjunction with an optical encoder to control the rotation angle of the T-shaped key, thereby unlocking the wafer transfer box. This method requires the use of a relatively precise optical encoder and photoelectric sensor, which results in high production and maintenance costs for the unlocking mechanism. Therefore, to address the above issues, a wafer transfer box unlocking mechanism for wafer loaders is proposed. Utility Model Content

[0004] The purpose of this invention is to provide a wafer transfer box unlocking mechanism for wafer loaders, in order to solve the problem that some existing wafer transfer box unlocking mechanisms for wafer loaders require the use of relatively precise optical encoders and photoelectric sensors, which results in high production and maintenance costs for the unlocking mechanism.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A wafer transfer box unlocking mechanism for a wafer loader includes an equipment mounting frame, a transfer box fixing mechanism, an unlocking component driving mechanism, an unlocking component limiting mechanism, a transfer box unlocking component, and a wafer transfer box. The transfer box unlocking component includes a junction plate fixedly connected to the unlocking component limiting mechanism. Vacuum suction cups are fixedly connected to two mounting slots of the junction plate. A first rotating connecting seat is rotatably connected to the rear side of the junction plate. A hydraulic rod is fixedly connected to the right side of the first rotating connecting seat. A second rotating connecting seat is fixedly connected to the right end of the hydraulic rod. A transmission plate is rotatably connected to the right side of the second rotating connecting seat. A transmission shaft is fixedly connected to the lower side of the transmission plate. Rotating connecting blocks are rotatably connected to both sides of the transmission shaft. A T-shaped key rotatably connected to the junction plate is fixedly connected to the lower end of each rotating connecting block. A detection plate fixedly connected to the unlocking component limiting mechanism is provided on the rear side of the junction plate.

[0007] Preferably, the upper half of the equipment mounting frame is fixedly connected to a transfer box fixing mechanism, the lower half of the equipment mounting frame is fixedly connected to an unlocking component driving mechanism, an unlocking component limiting mechanism is installed on the upper side of the unlocking component driving mechanism, a transfer box unlocking component is installed on the upper side of the unlocking component limiting mechanism, and a wafer transfer box is provided on the upper side of the transfer box fixing mechanism.

[0008] Preferably, the shape of the junction plate is consistent with the opening of the upper part of the equipment mounting frame, and the vacuum suction cup is connected to the air negative pressure device through an air supply pipe.

[0009] Preferably, the detection plate is a rectangular frame with an infrared detection probe installed at the top front end, and the wafer transfer box has a keyhole matching a T-shaped key on the rear side of the sealed door.

[0010] Preferably, the hydraulic rod is located above the drive shaft, the drive plates are vertically distributed, the drive shaft is horizontally distributed, the two rotating connecting blocks have the same tilt angle, and the two T-shaped keys are at the same height.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] In this invention, by configuring a first rotating connecting seat, a hydraulic rod, a second rotating connecting seat, a transmission plate, a transmission shaft, and a rotating connecting block, the device can move the second rotating connecting seat via the telescopic rod of the hydraulic rod, which can rotate along the first rotating connecting seat. This causes the transmission plate and transmission shaft to shift in the vertical direction, thereby driving the T-shaped key to rotate via the rotating connecting block, thus unlocking the wafer transfer box. This device uses a hydraulic rod and its cooperating components to replace the optical code disk and photoelectric sensor to control the rotation angle of the T-shaped key, using more common components to unlock the wafer transfer box, thus reducing the production and maintenance costs of the unlocking mechanism. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of the present invention in its first state;

[0014] Figure 2 This is a rear view of the overall structure of the present invention in its first state;

[0015] Figure 3 This is a schematic diagram of the installation structure of the first state transmission box unlocking component of this utility model;

[0016] Figure 4 This is a rear view of the installation structure of the first state transmission box unlocking component of this utility model;

[0017] Figure 5 This is a schematic diagram of the overall structure of the present invention in its second state;

[0018] Figure 6 This is a rear view of the overall structure of the present invention in its second state;

[0019] Figure 7 This is a schematic diagram of the installation structure of the second-state transmission box unlocking component of this utility model;

[0020] Figure 8 This is a rear view of the installation structure of the second-state transmission box unlocking component of this utility model.

[0021] In the diagram: 1. Equipment mounting frame; 2. Transfer box fixing mechanism; 3. Unlocking component driving mechanism; 4. Unlocking component limiting mechanism; 5. Transfer box unlocking component; 501. Transfer plate; 502. Vacuum suction cup; 503. First rotating connecting seat; 504. Hydraulic rod; 505. Second rotating connecting seat; 506. Transmission plate; 507. Transmission shaft; 508. Rotating connecting block; 509. T-shaped key; 510. Detection plate; 6. Wafer transfer box. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0024] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this utility model.

[0025] Please see Figure 1-8 This utility model provides a technical solution:

[0026] A wafer transfer box unlocking mechanism for a wafer loader includes an equipment mounting frame 1, a transfer box fixing mechanism 2, an unlocking component driving mechanism 3, an unlocking component limiting mechanism 4, a transfer box unlocking component 5, and a wafer transfer box 6. The transfer box unlocking component 5 includes a transfer plate 501 fixedly connected to the unlocking component limiting mechanism 4. Vacuum suction cups 502 are fixedly connected to two mounting slots of the transfer plate 501. A first rotating connecting seat 503 is rotatably connected to the rear side of the transfer plate 501. The right side of the first rotating connecting seat 503 is fixedly connected to... There is a hydraulic rod 504, and a second rotating connecting seat 505 is fixedly connected to the right end of the hydraulic rod 504. A transmission plate 506 is rotatably connected to the right side of the second rotating connecting seat 505. A transmission shaft 507 is fixedly connected to the lower side of the transmission plate 506. Rotating connecting blocks 508 are rotatably connected to both sides of the transmission shaft 507. A T-shaped key 509 that is rotatably connected to the lower end of the rotating connecting block 508 is fixedly connected to the lower end of the connecting block 508. A detection plate 510 that is fixedly connected to the unlocking component limit mechanism 4 is provided on the rear side of the connecting plate 501.

[0027] The upper half of the equipment mounting frame 1 is fixedly connected to a transfer box fixing mechanism 2, and the lower half of the equipment mounting frame 1 is fixedly connected to an unlocking component driving mechanism 3. An unlocking component limiting mechanism 4 is installed on the upper side of the unlocking component driving mechanism 3, and a transfer box unlocking component 5 is installed on the upper side of the unlocking component limiting mechanism 4. A wafer transfer box 6 is provided on the upper side of the transfer box fixing mechanism 2. By driving the unlocking component limiting mechanism 4 downward through the unlocking component driving mechanism 3, the sealing door of the wafer transfer box 6 can be moved away from the receiving box of the wafer transfer box 6. The shape of the interface plate 501 is consistent with the opening of the upper half of the equipment mounting frame 1. The vacuum suction cup 502 is connected to the air negative pressure device through the air supply pipe. The vacuum suction cup 502 seals the interface plate 501 and the wafer transfer box 6. The sealing door will be stably attached together to prevent relative movement between the transfer plate 501 and the wafer transfer box 6. The detection plate 510 is a rectangular frame with an infrared detection probe installed at the top front end. The rear side of the sealed door of the wafer transfer box 6 has a keyhole that matches the T-shaped key 509. During the unlocking process, the controller can also detect the wafers in the wafer transfer box 6 through the detection plate 510. The hydraulic rod 504 is located above the drive shaft 507. The drive plate 506 is vertically distributed, the drive shaft 507 is horizontally distributed, the two rotating connecting blocks 508 have the same tilt angle, and the two T-shaped keys 509 are at the same height. The drive shaft 507 can drive the rotating connecting blocks 508 to rotate, thereby causing the T-shaped key 509 to rotate, which can unlock the wafer transfer box 6.

[0028] Workflow: Before use, install the equipment mounting bracket 1 in the appropriate position on the wafer loader and connect the power supply. The device is adjusted by a controller installed on the wafer loader. The controller is electrically connected to the transfer box fixing mechanism 2, the unlocking component driving mechanism 3, the unlocking component limiting mechanism 4, and the transfer box unlocking component 5. The controller can automatically adjust the operating status of the transfer box fixing mechanism 2, the unlocking component driving mechanism 3, the unlocking component limiting mechanism 4, and the transfer box unlocking component 5. All of the above are existing technologies. When using the device, the wafer loader places the wafer transfer box 6 on the transfer box fixing mechanism 2 through the transfer mechanism, with the sealing door of the wafer transfer box 6 facing the rear. The controller can adjust the operating status of the transfer box fixing mechanism 2, the unlocking component driving mechanism 3, the unlocking component limiting mechanism 4, and the transfer box unlocking component 5 through the equipment mounting bracket 1. The mounting bracket 1 and the fixed transfer box fixing mechanism 2 fix the receiving box of the wafer transfer box 6. Then, the hydraulic cylinder of the unlocking component limiting mechanism 4 drives the vacuum suction cup 502 to move forward, so that the T-shaped key 509 is inserted into the key hole on the back side of the sealing door of the wafer transfer box 6. Then, the controller opens the vacuum suction cup 502, and the vacuum suction cup 502 stably attracts the transfer plate 501 and the sealing door of the wafer transfer box 6 together, preventing relative movement between the transfer plate 501 and the wafer transfer box 6. Subsequently, the controller causes the hydraulic rod 504 to extend, which can drive the second rotating connecting seat 505 to move to the right, thereby causing the transmission plate 506 and the transmission shaft 507 to move to the right. Since the transmission shaft 507 is horizontally distributed and subjected to two rotations, Due to the restriction of the moving connecting block 508, the transmission plate 506 and the transmission shaft 507 move upwards while moving to the right, and the transmission shaft 507 always remains horizontal. This causes the hydraulic rod 504 to rotate at a certain angle along the first rotating connecting seat 503. The transmission shaft 507 can drive the rotating connecting block 508 to rotate, thereby causing the T-shaped key 509 to rotate, which can unlock the wafer transfer box 6. During the unlocking process, the controller can also detect the wafers in the wafer transfer box 6 through the detection plate 510. After unlocking, the vacuum suction cup 502 adsorbs the sealed door of the wafer transfer box 6, and the hydraulic cylinder of the unlocking component limit mechanism 4 drives the transfer plate 501 to move backward. The unlocking component drive mechanism 3 drives the transfer plate 501 to move backward. The downward movement of the limiting mechanism 4 of the unlocking component allows the sealed door of the wafer transfer box 6 to move away from the receiving box of the wafer transfer box 6. This device can drive the second rotating connecting seat 505 to move via the telescopic rod of the hydraulic rod 504, which can rotate along the first rotating connecting seat 503. This causes the transmission plate 506 and the transmission shaft 507 to be displaced in the vertical direction, which in turn drives the T-shaped key 509 to rotate via the rotating connecting block 508, thereby unlocking the wafer transfer box 6. This device uses the hydraulic rod 504 and its cooperating components to replace the optical code disk and photoelectric sensor to control the rotation angle of the T-shaped key 509. It uses more common components to unlock the wafer transfer box 6, reducing the production and maintenance costs of the unlocking mechanism.

[0029] Contents not described in detail in this specification are existing technologies known to those skilled in the art. Standard parts used in this invention can all be purchased commercially, and irregularly shaped parts can be custom-made according to the description and drawings. The specific connection methods for each part all employ conventional methods such as bolts, rivets, and welding, which are already mature technologies. The machinery, parts, and equipment all use conventional models from the prior art, and the circuit connections also employ conventional connection methods from the prior art, which will not be detailed here.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wafer transfer box unlocking mechanism for a wafer loader, comprising an equipment mounting frame (1), a transfer box fixing mechanism (2), an unlocking component driving mechanism (3), an unlocking component limiting mechanism (4), a transfer box unlocking component (5), and a wafer transfer box (6), characterized in that: The transfer box unlocking assembly (5) includes a junction plate (501) fixedly connected to the unlocking assembly limiting mechanism (4). Vacuum suction cups (502) are fixedly connected to both mounting slots of the junction plate (501). A first rotating connecting seat (503) is rotatably connected to the rear side of the junction plate (501). A hydraulic rod (504) is fixedly connected to the right side of the first rotating connecting seat (503). A second rotating connecting seat (505) is fixedly connected to the right end of the hydraulic rod (504). A transmission plate (506) is rotatably connected to the right side of the moving connecting seat (505). A transmission shaft (507) is fixedly connected to the lower side of the transmission plate (506). Rotating connecting blocks (508) are rotatably connected to both the left and right sides of the transmission shaft (507). A T-shaped key (509) that is rotatably connected to the junction plate (501) is fixedly connected to the lower end of each rotating connecting block (508). A detection plate (510) that is fixedly connected to the unlocking component limiting mechanism (4) is provided on the rear side of the junction plate (501).

2. The wafer transfer box unlocking mechanism for a wafer loader according to claim 1, characterized in that: The upper half of the equipment mounting frame (1) is fixedly connected to a transfer box fixing mechanism (2), the lower half of the equipment mounting frame (1) is fixedly connected to an unlocking component driving mechanism (3), an unlocking component limiting mechanism (4) is installed on the upper side of the unlocking component driving mechanism (3), a transfer box unlocking component (5) is installed on the upper side of the unlocking component limiting mechanism (4), and a wafer transfer box (6) is provided on the upper side of the transfer box fixing mechanism (2).

3. The wafer transfer box unlocking mechanism for a wafer loader according to claim 1, characterized in that: The shape of the junction plate (501) is consistent with the opening of the upper part of the equipment mounting frame (1), and the vacuum suction cup (502) is connected to the air negative pressure device through the air supply pipe.

4. A wafer transfer box unlocking mechanism for a wafer loader according to claim 1, characterized in that: The detection plate (510) is a rectangular frame with an infrared detection probe installed at the top front end, and the wafer transfer box (6) has a keyhole matching the T-shaped key (509) on the back side of the sealed door.

5. A wafer transfer box unlocking mechanism for a wafer loader according to claim 1, characterized in that: The hydraulic rod (504) is located above the drive shaft (507), the drive plate (506) is vertically distributed, the drive shaft (507) is horizontally distributed, the two rotating connecting blocks (508) have the same tilt angle, and the two T-shaped keys (509) are at the same height.

Images