Carrier device for wafer boxes

Abstract

The utility model discloses a carrier device of wafer box, including the substrate of being located below and the lining cover of being located above, and the substrate and the lining cover are all plastic material, and the upper end of substrate is equipped with at least one lower limit slot, and the lower end of lining cover is correspondingly equipped with at least one upper limit slot, wherein the opposite two sides inner wall of lower limit slot is protruded and is equipped with a plurality of first limit protrusions, and the remaining two sides inner wall of lower limit slot is protruded and is equipped with a plurality of second limit protrusions, and the upper end of second limit protrusion is downward and has the inclined surface setting of inside direction inclination, wherein the opposite two sides inner wall on the upper limit slot is protruded and is equipped with a plurality of third limit protrusions.

Description

Technical Field

[0001] This utility model relates to the field of wafer cassette carrier technology, and specifically to a wafer cassette carrier device. Background Technology

[0002] When wafers are transported in wafer cassettes, the cassettes need to be stacked inside a cargo box. However, ordinary stacking methods can easily cause adjacent wafer cassettes to collide, resulting in wafer breakage. Therefore, a wafer cassette carrier is needed to be placed inside the cargo box to separate adjacent wafer cassettes. Utility Model Content

[0003] In order to overcome the shortcomings of the prior art, this utility model proposes a wafer cassette carrier device.

[0004] To achieve the above-mentioned technical effects, the present invention adopts the following solution:

[0005] A wafer cassette carrier device includes a substrate located below and a cover located above, both of which are made of plastic. The upper end of the substrate is provided with at least one lower limiting groove, and the lower end of the cover is provided with at least one upper limiting groove.

[0006] The lower limiting groove has multiple first limiting protrusions protruding on the inner walls of its opposite sides, and multiple second limiting protrusions protruding on the inner walls of the other two sides. The upper ends of the second limiting protrusions are inclined downwards and inwards.

[0007] Multiple third limiting protrusions are provided on the inner walls of the opposite two sides of the upper limit groove.

[0008] In a preferred embodiment, the lower limiting groove has a first through hole penetrating the substrate at its center, and the upper limiting groove has a second through hole penetrating the liner at its center.

[0009] In a preferred embodiment, the upper end of the substrate is provided with a plurality of insertion holes located on the outer periphery of the lower limiting groove, and the lower end of the substrate is provided with insertion posts corresponding to the insertion holes.

[0010] In a preferred embodiment, the first limiting protrusion, the second limiting protrusion, and the third limiting protrusion are hollow inside to form an air cavity.

[0011] In a preferred embodiment, the substrate and the cover are made of plastic.

[0012] Compared with existing technologies, the beneficial effects are:

[0013] This utility model has a simple structure and is easy to use. A wafer box is placed in each lower limit groove on the substrate, and a cover is placed on the upper end of the wafer box to separate the wafer boxes and prevent them from being connected. Furthermore, due to the limiting effect of the upper and lower limit grooves, the wafer boxes will not slide in the cargo box, so that there will be no collision between two adjacent wafer boxes during transportation. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model.

[0015] Figure 2 This is a schematic diagram of the substrate structure in this utility model.

[0016] Figure 3 yes Figure 2 Another perspective structural diagram.

[0017] Figure 4 This is a schematic diagram of the liner structure in this utility model.

[0018] Figure 5 yes Figure 4 Another perspective structural diagram

[0019] Reference numerals in the attached figures: 1. Substrate; 2. Cover; 3. Upper limit groove; 4. Lower limit groove; 5. First limiting protrusion; 6. Second limiting protrusion; 7. Third limiting protrusion; 8. First through hole; 9. Second through hole; 10. Insertion hole; 11. Insertion post. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0021] A wafer cassette carrier device includes a substrate 1 located below and a cover 2 located above. Both the substrate 1 and the cover 2 are made of plastic. The upper end of the substrate 1 is provided with at least one lower limiting groove 4, and the lower end of the cover 2 is provided with at least one upper limiting groove 3.

[0022] The lower limiting groove 4 has multiple first limiting protrusions 5 protruding on the inner walls of its opposite sides, and multiple second limiting protrusions 6 protruding on the inner walls of the other two sides. The upper end of the second limiting protrusion 6 is downward and inclined inward.

[0023] Multiple third limiting protrusions 7 are provided on the inner walls of the opposite two sides of the upper limit groove 3.

[0024] A wafer cassette is placed in each lower limit groove 4 on the substrate 1, and a cover 2 is placed on the top of the wafer cassette to separate the wafer cassettes so that they are not connected. Furthermore, the wafer cassettes will not slide in the cargo box due to the limiting effect of the upper limit groove 3 and the lower limit groove 4, so that no collision will occur between two adjacent wafer cassettes during transportation.

[0025] In a preferred embodiment, the lower limiting groove 4 has a first through hole 8 penetrating the substrate 1 at its center, and the upper limiting groove 3 has a second through hole 9 penetrating the cover 2 at its center.

[0026] In a preferred embodiment, the upper end of the substrate 1 is provided with a plurality of insertion holes 10 located on the outer periphery of the lower limiting groove 4, and the lower end of the substrate 1 is provided with insertion posts 11 corresponding to the insertion holes 10.

[0027] In a preferred embodiment, the first limiting protrusion 5, the second limiting protrusion 6, and the third limiting protrusion 7 are hollow inside to form an air cavity.

[0028] In a preferred embodiment, the substrate 1 and the cover 2 are made of plastic.

[0029] In the description of this utility model, it should be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0031] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

Claims

1. A wafer cassette carrier device, characterized in that, It includes a substrate (1) located below and a cover (2) located above. Both the substrate (1) and the cover (2) are made of plastic. The upper end of the substrate (1) is provided with at least one lower limiting groove (4), and the lower end of the cover (2) is provided with at least one upper limiting groove (3). The lower limiting groove (4) has multiple first limiting protrusions (5) protruding on the inner walls of its opposite sides, and multiple second limiting protrusions (6) protruding on the inner walls of the other two sides. The upper end of the second limiting protrusion (6) is inclined downward and inward. Multiple third limiting protrusions (7) are provided on the inner walls of the opposite two sides of the upper limit groove (3).

2. The wafer cassette carrier device as described in claim 1, characterized in that, The lower limiting groove (4) has a first through hole (8) penetrating the substrate (1) at its center, and the upper limiting groove (3) has a second through hole (9) penetrating the cover (2) at its center.

3. The wafer cassette carrier device as described in claim 1, characterized in that, The upper end of the substrate (1) is provided with a plurality of insertion holes (10) located on the outer periphery of the lower limiting groove (4), and the lower end of the substrate (1) is provided with insertion posts (11) corresponding to the insertion holes (10).

4. The wafer cassette carrier device as claimed in claim 1, characterized in that, The first limiting protrusion (5), the second limiting protrusion (6) and the third limiting protrusion (7) are hollow inside to form an air cavity.

5. The wafer cassette carrier device as claimed in claim 1, characterized in that, The substrate (1) and the cover (2) are made of plastic.

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