A visual inspection anti-glare film developer for semiconductor industry

Abstract

The utility model discloses a visual inspection anti -dazzle film developing device for semiconductor industry, it includes frame and fixedly connected on the industrial camera of frame, the support seat for placing piece basket, the camera is located the support seat top, still includes the light supplementing lamp of being connected to the frame and being located between industrial camera and support seat, the light shield, the light control part, the light shield is connected to the frame and covers light supplementing lamp in, be equipped with the irradiation port on the light shield, the light control part is connected with the frame, the light shield cooperation and connection, can be used for adjusting the angle of irradiation port and adjusting the distance between light shield and light supplementing lamp. Such setting can adjust the angle, range and brightness of light supplementing lamp light source, thereby guaranteeing that industrial camera can take clear bar code picture, and then guaranteeing visual inspection result, namely guaranteeing piece basket identification result.

Description

Technical Field

[0001] This utility model relates to the field of wafer flipper technology, and in particular to a visual inspection anti-glare wafer flipper for the semiconductor industry. Background Technology

[0002] In the silicon wafer production process, some steps require the use of PFA wafer baskets, but the wafer baskets for regular turnover products are PP wafer baskets. Due to the material properties of the two types of wafer baskets, they are not interchangeable. In this case, wafer baskets need to be exchanged. When exchanging wafer baskets, a vision inspection system is needed to scan the barcode on the wafer basket to identify it.

[0003] To prevent barcodes from being damaged, a transparent protective shell is typically placed over them. This shell is usually made of high-gloss plastic, which, due to its high smoothness, causes significant specular reflection. When a light source shines on this smooth surface at a specific angle, the light is concentrated and reflected according to the law that the angle of incidence equals the angle of reflection. If the lens of the industrial camera in the vision inspection system happens to be in the path of the reflected light, it will receive high-intensity reflected light. This can cause localized overexposure or the formation of light spots in the image. Strong reflections reduce the contrast of the barcode module, or even completely obscure it in white light spots. Furthermore, ordinary industrial cameras have limited dynamic range, making it difficult to simultaneously capture details in both bright reflective areas and shadow areas. Therefore, they cannot capture clear barcode images, resulting in the vision inspection system's inability to accurately identify each barcode. Utility Model Content

[0004] The purpose of this invention is to address the problems existing in the background technology by proposing a visual inspection anti-glare wafer rewinder for the semiconductor industry. It can adjust the angle, range, and brightness of the light source to ensure that the industrial camera can capture clear images of the barcodes on the wafer basket, thereby ensuring the accuracy of the wafer basket recognition results.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] A vision inspection anti-glare wafer rewinder for the semiconductor industry includes a vision inspection system, a frame, and a support for placing wafer baskets connected to the lower side of the frame. The vision inspection system includes an industrial camera connected to the upper side of the frame. The vision inspection anti-glare wafer rewinder for the semiconductor industry further includes:

[0007] Fill light, connected to the rack;

[0008] A light shield is attached to the frame and covers the supplementary light inside, and the light shield is provided with an illumination port;

[0009] A light control component is connected in conjunction with the frame and the light shield, and the light control component is configured to adjust the angle of the illumination port and the distance between the light shield and the supplementary light.

[0010] The supplementary light, light shield, and light control components are located between the industrial camera and the support.

[0011] Optionally, the light control component includes a connecting plate fixedly connected to the light shield, a gear connected to the connecting plate, and a rack movably connected to the frame, wherein the gear and the rack mesh with each other.

[0012] Optionally, the light control component further includes a guide plate fixedly connected to the frame, a slider movably connected to the guide plate, and a first driving device connected to the slider. The first driving device is fixedly connected to the gear and can drive the gear to rotate.

[0013] Optionally, damping is provided between the slider and the guide plate.

[0014] Optionally, a support frame is fixedly connected to the frame, and a second drive device is connected to the support frame. The second drive device is fixedly connected to the rack and can drive the rack to move.

[0015] Optionally, the frame is fixedly connected with a plurality of connectors for supporting the light shield. Each connector includes a slide cylinder fixedly connected to the frame, a slide rod movably connected inside the slide cylinder, a support plate fixedly connected to the slide rod, a slide groove provided on the support plate, and a connecting strip fixedly connected to the light shield, the connecting strip being movably connected to the slide groove.

[0016] Optionally, a support rod is fixedly connected to the frame, and the supplementary light is fixedly connected to the support rod via a support shaft.

[0017] Optionally, one end of the light shield is rotatably connected to a sealing plate, the sealing plate is provided with a slot, both ends of the slot are fixedly connected to retractable baffles, and the other end of the baffles is fixedly connected to the support shaft.

[0018] Because this utility model adopts the above-mentioned technical solution, it has the following beneficial technical effects:

[0019] 1. The angle, range, and brightness of the fill light are adjusted by the light control component to ensure that the industrial camera can capture clear images of the barcodes on the film basket, thereby ensuring the accuracy of the film basket recognition results;

[0020] 2. Because of the coordinated design of the light control component and the light shield, the angle, range and brightness of the light source can be adjusted simultaneously, thereby increasing the adjustment efficiency and improving the shooting efficiency of the industrial camera, that is, improving the recognition efficiency of the film basket. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of the anti-glare film rewinder of this utility model;

[0022] Figure 2 This is a schematic diagram of the structure of the light control component of this utility model. Figure 1 ;

[0023] Figure 3 This is a schematic diagram of the structure of the light control component of this utility model. Figure 2 ;

[0024] Figure 4 This is a schematic diagram of the structure of the sealing plate and baffle of this utility model;

[0025] Figure 5 This is a schematic diagram illustrating the effect of the position of the sunshade on the illumination range.

[0026] Reference numerals: 1. Frame; 2. Support; 3. Industrial camera; 4. Fill light; 5. All-in-one machine; 6. Light control component; 601. Light shield; 602. Connecting plate; 603. Gear; 604. Rack; 605. Support frame; 606. Guide plate; 607. Slider; 608. First drive device; 609. Second drive device; 610. Slide cylinder; 611. Slide rod; 612. Support plate; 613. Slide groove; 614. Connecting strip; 615. Support rod; 616. Support shaft; 617. Sealing plate; 618. Baffle. Detailed Implementation

[0027] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this utility model, but not all embodiments.

[0028] The components of the present invention embodiments described and shown in the accompanying drawings can typically be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention.

[0029] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0030] In the description of this utility model, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0031] It should be noted that the term "comprising" or any other variation thereof is intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0034] like Figure 1 As shown, this utility model proposes a visual inspection anti-glare wafer reversing device for the semiconductor industry, comprising a visual inspection system, a frame 1, and a support 2 for placing wafer baskets connected to the lower side of the frame 1. The visual inspection system includes an industrial camera 3 connected to the upper side of the frame, and a barcode is set on the wafer basket. The frame 1 is also connected to an integrated machine 5. The visual inspection system also includes a processor. After the industrial camera 3 takes a picture of the barcode on the wafer basket, it is uploaded to the processor. The processor recognizes the image and compares it with the information of different wafer baskets stored therein to identify the wafer basket. It determines whether it is a PFA wafer basket or a PP wafer basket and sends the recognition result to the integrated machine 5. After seeing the information, the operator can accurately complete the wafer basket exchange operation according to the information on the integrated machine 5. The information interaction between the processor, industrial camera, and integrated machine is a conventional technical solution, and the working principle of the processor is also a conventional technical solution, and is not the innovation of this utility model, so it will not be described in detail here.

[0035] Combination Figures 2 to 4 As shown, the semiconductor industry vision inspection anti-glare flipper also includes:

[0036] Fill light 4 is connected to rack 1;

[0037] A light shield 601 is connected to the frame 1 and covers the supplementary light 4 inside, and the light shield 601 is provided with an illumination port;

[0038] The light control component 6 is connected to the frame and the light shield, and the light control component 6 is configured to adjust the angle of the irradiation port and the distance between the light shield and the supplementary light 4.

[0039] The supplementary light 4, the light shield 601, and the light control component 6 are located between the industrial camera 3 and the support 2.

[0040] By adjusting the position of the light source to deviate the direction of the reflected light from that of the industrial camera 3, reflection interference can be reduced. A specific angle can be selected to reduce local highlight areas and improve the uniformity of surface illumination. By reasonably adjusting the angle of the light source, the reflection phenomenon caused by specular reflection can be significantly reduced.

[0041] It is worth noting that the luminous intensity of the light source remains essentially unchanged after reflection, and its brightness is inversely proportional to its area; that is, the brightness of the reflected light is inversely proportional to the illuminated area. Specifically:

[0042] Large reflection range: light energy is dispersed over a larger area, reducing brightness per unit area.

[0043] Small reflection range: Light energy is concentrated in a small area, increasing the brightness per unit area.

[0044] refer to Figure 5 By adjusting the distance between the illumination port of the light shield 601 and the supplementary light 4, the illumination range and brightness distribution of the light can be flexibly controlled. Its core principle is based on the divergence angle formula in geometric optics. Therefore, by controlling the movement of the light shield 601, the light intensity can be adjusted without changing the output power of the supplementary light 4.

[0045] Furthermore, the light control component 6 includes a connecting plate 602 fixedly connected to the light shield 601, a gear 603 connected to the connecting plate 602, and a rack 604 movably connected to the frame 1. The gear 603 and the rack 604 mesh with each other. When the gear 603 rotates, it drives the light shield 601 to rotate, causing the illumination angle of the supplementary light 4 to change. At the same time, the gear 603 moves along the rack 604, thereby adjusting the illumination port of the light shield 601 and the distance between the light shield and the supplementary light 4. This allows for synchronous adjustment of the angle, range, and brightness of the light source, enabling rapid adjustment of the light source parameters. This allows the industrial camera 3 to capture clear images of the barcodes, ensuring the accuracy of the image recognition results.

[0046] Furthermore, the light control component 6 also includes a guide plate 606 fixedly connected to the frame 1, a slider 607 movably connected within the guide plate 606, and a first driving device 608 connected to the slider 607. The first driving device 608 is fixedly connected to the gear 603 and can drive the gear to rotate. In this embodiment, the first driving device 608 is configured as a motor, and the output shaft of the motor is fixedly connected to the gear 603.

[0047] When the motor 608 is working, it can drive the gear 603 to rotate. At the same time, the motor 608 needs to be adjusted according to the position change of the sunshade 601. At this time, the first drive device 608 will drive the slider 607 to move along the guide plate 606.

[0048] In this embodiment, a support frame 605 is fixedly connected to the frame 1, and a second drive device 609 is fixedly connected to the support frame 605. The second drive device 609 is fixedly connected to the rack 604 and can drive the rack to move. By driving the rack 604 to move via the second drive device 609, the moving rack 604 can separate from the gear 603. At this time, the angle of the light shield 601 can be adjusted independently without affecting the illumination port of the light shield 601 and the spacing between the supplementary light 4 and the light shield 4. In this embodiment, the second drive device 609 is configured as a push rod motor, and the output shaft of the push rod motor is fixedly connected to the rack 604.

[0049] Preferably, a damping mechanism is provided between the slider 607 and the guide plate 606. Through damping, the slider 607 will not fall after losing the limiting position of the rack 604, and the position of the slider 607 can be kept stable.

[0050] In this embodiment, a plurality of connectors supporting the light shield 601 are fixedly connected to the frame 1. The connectors include a slide cylinder 610 fixedly connected to the frame 1, a slide rod 611 movably connected inside the slide cylinder 610, a support plate 612 fixedly connected to the slide rod 611, a slide groove 613 provided on the support plate 612, and a connecting strip 614 fixedly connected to the light shield 601. The connecting strip 614 is movably connected to the slide groove 613. When the light shield rotates and moves, it will drive the connecting strip 614 to rotate inside the slide groove 613, and will cause the slide rod 611 to move along the slide cylinder 610, which can guide and support the light shield 601.

[0051] The frame 1 is fixedly connected to a support rod 615. The supplementary light 4 is fixedly connected to the support rod 615 via a support shaft 616. One end of the light shield 601 is rotatably connected to a sealing plate 617. The sealing plate 617 will block the side of the light shield 601 to prevent light from shining out from the side of the light shield. When the light shield 601 rotates, the sealing plate 617 will rotate relative to the light shield 601. The sealing plate 617 is provided with a slot. Both ends of the slot are fixedly connected to retractable baffles 618. The other end of the baffles 618 is fixedly connected to the support shaft 616. When the light shield 601 moves, the baffles 618 on both sides can be stretched or contracted, and the sealing plate 617 can be moved through the slot, which can ensure the stability of the side sealing of the light shield 601.

[0052] The first driving device 608 can drive the gear 603 to rotate. At the same time, the first driving device 608 needs to be adjusted as the position of the light shield 601 changes. At this time, the first driving device 608 will drive the slider 607 to move along the guide plate 606, so that the angle, range and brightness of the light source can be adjusted synchronously, thereby improving the adjustment efficiency and improving the shooting efficiency of the industrial camera, that is, improving the recognition efficiency of the image basket.

[0053] The sealing plate 617 will block the side of the light shield 601 to prevent light from escaping from the side of the light shield. When the light shield 601 is rotated, the sealing plate 617 will rotate relative to the light shield 601. When the light shield 601 moves, the baffles 618 on both sides can be stretched or contracted, and the sealing plate 617 can move through the slot, which can ensure the stability of the side seal of the light shield 601.

[0054] The above specific embodiments are merely several optional embodiments of this utility model. Based on the technical solution of this utility model and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A vision inspection anti-glare wafer rewinder for the semiconductor industry, comprising a vision inspection system, a frame, and a support for placing wafer baskets connected to the lower side of the frame, wherein the vision inspection system includes an industrial camera connected to the upper side of the frame, characterized in that, The semiconductor industry vision inspection anti-glare flipper also includes: Fill light, connected to the rack; A light shield is attached to the frame and covers the supplementary light inside, and the light shield is provided with an illumination port; A light control component is connected in conjunction with the frame and the light shield, and the light control component is configured to adjust the angle of the illumination port and the distance between the light shield and the supplementary light. The supplementary light, light shield, and light control components are located between the industrial camera and the support.

2. The anti-glare wafer flipper for visual inspection in the semiconductor industry according to claim 1, characterized in that, The light control component includes a connecting plate fixedly connected to the light shield, a gear connected to the connecting plate, and a rack movably connected to the frame, wherein the gear and the rack mesh with each other.

3. A visual inspection anti-glare flipper for the semiconductor industry according to claim 2, characterized in that, The light control component also includes a guide plate fixedly connected to the frame, a slider movably connected to the guide plate, and a first driving device connected to the slider. The first driving device is fixedly connected to the gear and can drive the gear to rotate.

4. A visual inspection anti-glare wafer flipper for the semiconductor industry according to claim 3, characterized in that, Damping is provided between the slider and the guide plate.

5. A visual inspection anti-glare wafer flipper for the semiconductor industry according to claim 2, 3, or 4, characterized in that, A support frame is fixedly connected to the frame, and a second drive device is connected to the support frame. The second drive device is fixedly connected to the rack and can drive the rack to move.

6. A visual inspection anti-glare flipper for the semiconductor industry according to claim 5, characterized in that, The frame is fixedly connected to a plurality of connectors that support the light shield. Each connector includes a slide cylinder fixedly connected to the frame, a slide rod movably connected inside the slide cylinder, a support plate fixedly connected to the slide rod, a slide groove provided on the support plate, and a connecting strip fixedly connected to the light shield, the connecting strip being movably connected to the slide groove.

7. A visual inspection anti-glare flipper for the semiconductor industry according to any one of claims 2 to 4 and 6, characterized in that, A support rod is fixedly connected to the frame, and the fill light is fixedly connected to the support rod via a support shaft.

8. A visual inspection anti-glare flipper for the semiconductor industry according to claim 7, characterized in that, One end of the light shield is rotatably connected to a sealing plate, the sealing plate has a slot, both ends of the slot are fixedly connected to retractable baffles, and the other end of the baffles is fixedly connected to the support shaft.

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