Tubular target outer circle punching tool
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- TARFILM HI-TECH CO LTD
- Filing Date
- 2025-08-01
- Publication Date
- 2026-07-24
Smart Images
Figure CN224543841U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of machining tooling, and in particular to a tooling for drilling holes in the outer circle of a tubular target. Background Technology
[0002] Rotating tubular targets are core consumable components in modern physical vapor deposition (PVD) processes, widely used in various high-tech industries such as semiconductors, flat panel displays, solar cells, and decorative coatings. During target manufacturing, a series of holes with highly precise positions, angles, and depths are typically machined on the outer circumference of the target. These holes are primarily used for mounting, fixing, or electrically connecting the target within the sputtering equipment.
[0003] Because tubular targets are cylindrical and lack planar positioning references, drilling accuracy is difficult to control. Therefore, to achieve the required precision tolerances when drilling holes in the outer diameter of tubular targets, high-end multi-axis CNC machining centers are needed. These machines, through their integrated precision rotary table and CNC system, can accurately rotate and index the target material, ensuring hole position accuracy. However, such equipment requires a huge investment and has high processing costs. Utility Model Content
[0004] The purpose of this application is to overcome the above-mentioned technical problems and provide a tooling for drilling holes in the outer circle of a tubular target.
[0005] A tooling for drilling holes in the outer circle of a tubular target material, comprising:
[0006] A limiting mechanism includes a clamping ring sleeved on both ends of a tubular target. The outer circumferential surface of the clamping ring is composed of multiple clamping surfaces connected sequentially. The cross-section of the outer circumferential surface of the clamping ring is a regular polygon with an even number of sides. Multiple drill bit limiting holes and threaded holes are arranged in a circular array on the outer circumferential surface of the clamping ring. The drill bit limiting holes and threaded holes are arranged alternately, and each drill bit limiting hole and threaded hole is located on a different clamping surface. A reinforcing set screw is provided in the threaded hole.
[0007] The clamping mechanism includes a substrate, a movable clamping block, and a fixed clamping block. The fixed clamping block is fixed to one side of the substrate. The movable clamping block can be positioned at different locations along the length of the substrate. The clamping ring is clamped between the movable clamping block and the fixed clamping block. The movable clamping block and the fixed clamping block are respectively in contact with two clamping surfaces that are parallel to each other.
[0008] By adopting the above scheme, the cross-section of the outer circumference of the clamping ring is a polygon with an even number of sides, which can ensure that there are two parallel clamping surfaces on the outer circumference of the clamping ring, thereby facilitating stable clamping by the clamping mechanism. A reinforcing set screw is provided in the threaded hole for fixing the clamping ring and the tubular target material. The drill bit limiting hole is used to limit the drill bit, so that the drill bit can accurately process the preset position.
[0009] In one embodiment, the substrate has an "L" shaped cross section, the substrate is provided with a sliding groove that cooperates with the movable clamping block, and a lead screw is provided on one side of the substrate to pass through the substrate and connect with the clamping block.
[0010] By adopting the above scheme, the lead screw rotates and the moving clamping block slides along the sliding groove, thereby fixing the moving clamping block at different positions in the length direction of the substrate. When the drill bit finishes processing at the preset position, the moving clamping block is adjusted so that the clamping mechanism no longer clamps the clamping ring, and the tubular target is flipped so that the other drill bit limiting holes are aligned with the drill bit, and the drill bit processes other parts of the tubular target.
[0011] In one embodiment, the limiting mechanism further includes two symmetrically arranged bearing blocks, each bearing block having a bearing inclined surface that abuts against the inclined clamping surface at the bottom of the clamping ring, one of the bearing blocks abutting against the movable clamping block, and the other bearing block abutting against the fixed clamping block.
[0012] By adopting the above scheme, during the processing of tubular target material, the clamping ring is limited by static friction, but there is no support at the bottom, so the clamping ring tends to slide downward. When the fixed clamping block and the moving clamping block clamp the clamping ring, they will push the two bearing blocks. The bearing surface of the bearing block abuts against the inclined clamping surface at the bottom of the clamping ring, and the two bearing blocks together play a bearing role for the clamping ring.
[0013] In one embodiment, the limiting mechanism further includes a plurality of target carriers located directly below the tubular target and with their tops abutting against the sidewall of the tubular target.
[0014] By adopting the above scheme, when the two ends of the target are fixed, the middle of the target is affected by gravity, which causes the fixed parts at both ends of the target to deform. The target support is used to support the weight of the tubular target, avoiding the deformation of the fixed parts of the target due to the weight of the tubular target itself.
[0015] In one embodiment, the target support includes two parallel support plates, and two parallel rollers are arranged between the two support plates. Both rollers abut against the outer peripheral surface of the tubular target.
[0016] By adopting the above scheme, after the tubular target material is processed at the preset position, the clamping mechanism no longer clamps the clamping ring. Instead, the tubular target material is directly moved, causing it to rotate under the action of the roller. This allows the target material carrier to support the tubular target material while also allowing it to rotate freely, without the need to move the tubular target material to flip it.
[0017] In one embodiment, a roller is provided inside the support plate, and the clamping ring has a plurality of slots arranged in a circular array on the side facing the target support member, which cooperate with the rollers. Each slot corresponds to the angular position of a drill bit limiting hole.
[0018] By adopting the above solution, each time the clamping ring is rotated to the required processing angle, the roller will engage with the slot, so that the user knows that the tubular target is at the working angle, and there is no longer a need to manually adjust the rotation angle of the tubular target.
[0019] In one embodiment, a sliding housing is provided inside the bearing plate, and the inner wall surface of the sliding housing is respectively embedded at both ends of the roller shaft. An elastic element is connected to the side of the sliding housing opposite to the roller.
[0020] By adopting the above solution, when the pressure on the roller is too great, the elastic element is compressed and the roller is retracted into the bearing plate, preventing the excessive contact force of the roller from affecting the normal rotation of the clamping ring.
[0021] In one embodiment, each of the target carriers has multiple layers of pads at its bottom.
[0022] By adopting the above scheme, the height of the target support can be adjusted by setting shims of different thicknesses at the bottom of the target support, thereby ensuring that the target support can abut against the outer circumferential surface of the tubular target.
[0023] In one embodiment, a chip-receiving ring is embedded in the inner wall of the clamping ring, and a chip-receiving groove is provided on the inner wall of the chip-receiving ring. The drill bit limiting hole passes through the chip-receiving ring.
[0024] By adopting the above solution, the drill bit will generate chips during the drilling process. These chips will accumulate in the drill bit's limiting hole, increasing the friction force experienced by the drill bit's rotation. This not only shortens the lifespan of the drill bit but also affects its cutting accuracy. By setting up a chip ring, the chips cut by the drill bit can be collected in the chip ring. After the machining is completed, the chip ring can be removed for cleaning.
[0025] In one embodiment, a bearing is embedded in the drill bit limiting hole.
[0026] By adopting the above solution, friction will occur between the drill bit and the inner wall of the drill bit limiting hole during the rotation process. This will not only damage the inner wall of the drill bit limiting hole, but also shorten the service life of the drill bit. By setting the bearing, if the drill bit touches the bearing during the rotation process, the bearing will rotate, thereby playing a buffering role and reducing the friction between the drill bit and the inner wall of the drill bit limiting hole.
[0027] In summary, this application includes at least one of the following beneficial technical effects:
[0028] 1. The cross-section of the outer circumference of the clamping ring is a polygon with an even number of sides, which ensures that there are two parallel clamping surfaces on the outer circumference of the clamping ring, thus facilitating stable clamping by the clamping mechanism. A reinforcing set screw is provided in the threaded hole for fixing the clamping ring and the tubular target. The drill bit limiting hole is used to limit the drill bit, so that the drill bit can accurately process the preset position.
[0029] 2. By setting up the target carrier, after the tubular target is processed at the preset position, the clamping mechanism no longer clamps the clamping ring. The tubular target is then directly moved, causing it to rotate under the action of the rollers. This allows the target carrier to support the tubular target while also allowing it to rotate freely, without needing to flip the target by moving it. At the same time, rollers are set inside the carrier plate, and a slot is set on one side of the clamping ring. Each time the clamping ring is rotated to the required processing angle, the rollers will engage with the slot, letting the user know that the tubular target is at the working angle, eliminating the need to manually adjust the rotation angle of the tubular target.
[0030] 3. During the drilling process, the drill bit will generate chips, which will accumulate in the drill bit's limiting hole, increasing the friction force on the drill bit's rotation. This will shorten the drill bit's service life and affect its cutting accuracy. By setting up a chip ring, the chips cut by the drill bit can be collected in the chip ring. After the machining is completed, the chip ring can be removed for cleaning. Attached Figure Description
[0031] Figure 1 This is a schematic diagram showing the relationship between a tubular target outer circle drilling tool and a tubular target provided in the first embodiment of this application.
[0032] Figure 2 This is a schematic diagram of the structure of a tubular target outer circle drilling tool provided in the first embodiment of this application.
[0033] Figure 3 This is a schematic diagram of the limit mechanism.
[0034] Figure 4 This is a partial cross-sectional view of the limiting mechanism.
[0035] Figure 5 yes Figure 4 Enlarged view of region A.
[0036] Explanation of reference numerals in the attached drawings: 1. Limiting mechanism; 11. Clamping ring; 111. Clamping surface; 112. Drill bit limiting hole; 1121. Bearing; 113. Threaded hole; 114. Reinforcing set screw; 115. Slot; 116. Chip-collecting ring; 1161. Chip-collecting groove; 12. Bearing block; 121. Bearing inclined surface; 13. Target material carrier; 131. Bearing plate; 1311. Roller; 1312. Sliding housing; 1313. Elastic element; 132. Idler roller; 133. Shim; 2. Clamping mechanism; 21. Base plate; 211. Sliding groove; 22. Moving clamping block; 23. Fixed clamping block; 24. Lead screw; 3. Tubular target material. Detailed Implementation
[0037] Therefore, it is necessary to provide a low-cost tooling for drilling the outer circle of a tubular target that improves the drilling accuracy of the outer circle of the tubular target.
[0038] Please see Figure 1 , Figure 1 This is a schematic diagram illustrating the relationship between a tubular target outer diameter drilling fixture and a tubular target, as provided in the first embodiment of this application. The tubular target outer diameter drilling fixture provided in this application includes a limiting mechanism 1 and a clamping mechanism 2. The limiting mechanism 1 is sleeved on both ends of the tubular target 3 to limit its movement, and the clamping mechanism 2 stably clamps the limiting mechanism 1. The cooperation between the two ensures the accuracy and stability of the drilling.
[0039] Please refer to the following: Figure 2 , Figure 2 This is a schematic diagram of the structure of a tubular target outer diameter drilling fixture provided in the first embodiment of this application. The limiting mechanism 1 includes a clamping ring 11, which is made of a metal material, such as stainless steel or aluminum alloy, and has good strength and wear resistance. The clamping ring 11 is sleeved on both ends of the tubular target 3. Its outer circumferential surface is composed of multiple clamping surfaces 111 connected sequentially. The cross-section of the outer circumferential surface is a regular polygon with an even number of sides, such as a regular quadrilateral or a regular octagon, thereby ensuring that there are two mutually parallel clamping surfaces 111 on the outer circumferential surface of the clamping ring 11, which facilitates stable clamping by the subsequent clamping mechanism 2. Multiple drill bit limiting holes 112 and threaded holes 113 are arranged in a circular array on the outer circumferential surface of the clamping ring 11. The drill bit limiting holes 112 and threaded holes 113 are arranged alternately, and each drill bit limiting hole 112 and threaded hole 113 is located on a different clamping surface 111.
[0040] The drill bit limiting hole 112 is a central through hole used to limit the drill bit, enabling it to precisely machine the preset position. A reinforcing set screw 114 is installed inside the threaded hole 113. The reinforcing set screw 114 can be a common bolt, used to fix the clamping ring 11 to the tubular target 3, ensuring that the tubular target 3 does not wobble during drilling. The reinforcing set screw 114 is made of copper internal hexagonal headstock.
[0041] Please refer to the following: Figure 3 , Figure 3 This is a schematic diagram of the limiting mechanism. A chip-collecting ring 116 is embedded in the inner wall of the clamping ring 11. The chip-collecting ring 116 is made of the same material as the clamping ring 11, and its inner wall has a chip-collecting groove 1161. The chip-collecting ring 116 passes through the drill bit limiting hole 112. During drilling, the generated chips accumulate in the drill bit limiting hole 112, increasing the friction of the drill bit rotation and affecting the drill bit's service life and cutting accuracy. The chip-collecting ring 116 allows the chips from the drill bit to be collected within it. After machining, the chip-collecting ring 116 can be removed for cleaning. A bearing 1121 is embedded in the drill bit limiting hole 112. The bearing 1121 can be a deep groove ball bearing 1121. During drill bit rotation, if the bearing 1121 is touched, it will rotate, acting as a buffer and reducing friction between the drill bit and the inner wall of the drill bit limiting hole 112. Oil-impregnated bearing 1121 can also be used, which has self-lubricating properties.
[0042] The limiting mechanism 1 also includes two symmetrically arranged support blocks 12, which are made of materials with certain weight and strength, such as cast iron. Each support block 12 includes a support inclined surface 121 that abuts against the inclined clamping surface 111 at the bottom of the clamping ring 11. One support block 12 abuts against the movable clamping block 22, and the other support block 12 abuts against the fixed clamping block 23. When the fixed clamping block 23 and the movable clamping block 22 clamp the clamping ring 11, they push the two support blocks 12, causing the support surfaces of the support blocks 12 to abut against the inclined clamping surface 111 at the bottom of the clamping ring 11, thus jointly supporting the clamping ring 11.
[0043] The limiting mechanism 1 also includes multiple target carriers 13, which are located directly below the tubular target 3 and whose tops abut against the sidewall of the tubular target 3. The bottom of the target carrier 13 can be adjusted in height by using shims 133 of different thicknesses to ensure that it abuts against the outer circumferential surface of the tubular target 3. The shims 133 can be rubber shims 133 or metal shims 133. The target carrier 13 includes two parallel support plates 131, which are made of steel plates. Two parallel rollers 132 are arranged between the two support plates 131. The rollers 132 are typically made of stainless steel shafts, and both rollers 132 abut against the outer circumferential surface of the tubular target 3. Once the tubular target 3 has been processed to its preset position and the clamping mechanism 2 no longer clamps the clamping ring 11, the tubular target 3 can be directly moved. It will then rotate under the action of the roller 132, allowing the target carrier 13 to support the tubular target 3 while also allowing it to rotate freely, without needing to flip the tubular target 3 by moving it.
[0044] Please refer to the following: Figure 4-5 , Figure 4This is a partial cross-sectional view of the limiting mechanism. In this application, a roller 1311 is provided inside the support plate 131. The roller 1311 is made of materials such as nylon or polyurethane. On the side of the clamping ring 11 facing the target support member 13, multiple slots 115 are arranged in a circumferential array to mate with the roller 1311. Each slot 115 corresponds to the angular position of a drill bit limiting hole 112. Each time the clamping ring 11 is rotated to the required machining angle, the roller 1311 will engage with the slot 115, so that the user knows that the tubular target 3 is at the working angle, and there is no longer a need to manually adjust the rotation angle of the tubular target 3. A sliding housing 1312 is also provided inside the support plate 131. The inner wall surface of the sliding housing 1312 is embedded at both ends of the roller 1311's rotating shaft. The side of the sliding housing 1312 opposite to the roller 1311 is connected to an elastic element 1313, which can be a spring. When the pressure on the roller 1311 is too great, the elastic element 1313 is compressed, and the roller 1311 is retracted into the bearing plate 131 to prevent the roller 1311 from having too great abutting force and affecting the normal rotation of the clamping ring 11.
[0045] The clamping mechanism 2 includes a base plate 21, a movable clamping block 22, and a fixed clamping block 23. The base plate 21 is made of high-strength steel and has an "L"-shaped cross-section. The base plate 21 has a sliding groove 211 that mates with the movable clamping block 22. The sliding groove 211 can be a dovetail groove or a T-groove. A lead screw 24, typically trapezoidal, passes through the base plate 21 and connects to the movable clamping block 22. The fixed clamping block 23 is fixed to one side of the base plate 21, and the movable clamping block 22 can be fixed at different positions along the length of the base plate 21. When the lead screw 24 rotates, the movable clamping block 22 slides along the sliding groove 211, thereby achieving this function. A clamping ring 11 is clamped between the movable clamping block 22 and the fixed clamping block 23, and the movable clamping block 22 and the fixed clamping block 23 are respectively in contact with two parallel clamping surfaces 111. The lead screw 24 here can also be replaced by an electric push rod to move the moving clamping block 22. The moving clamping block 22 and the fixed clamping block 23 can be made of cast iron or carbon steel, and the surface is hardened to improve hardness and wear resistance.
[0046] The implementation principle of this embodiment is as follows: the clamping ring 11 of the limiting mechanism 1 covers both ends of the tubular target material 3 and is fixed with the reinforcing set screw 114. At the same time, the bearing block 12 supports the clamping ring 11, and the target material bearing member 13 bears the weight of the tubular target material 3 to prevent it from deforming due to its own weight. The clamping mechanism 2 drives the clamping block 22 to move along the sliding groove 211 through the lead screw 24 to stably clamp the clamping ring 11. The drill bit accurately drills the tubular target material 3 through the drill bit limiting hole 112 and the embedded bearing 1121, and the chip ring 116 can collect the chips generated during drilling. The entire processing cost is low, the operation is convenient, and it can improve the accuracy and efficiency of drilling the outer circle of the tubular target material 3.
[0047] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.
Claims
1. A tooling for drilling holes in the outer circle of a tubular target, characterized in that, include: The limiting mechanism (1) includes a clamping ring (11), which is sleeved on both ends of the tubular target (3). The outer circumferential surface of the clamping ring (11) is composed of multiple clamping surfaces (111) connected sequentially. The cross-section of the outer circumferential surface of the clamping ring (11) is a regular polygon with an even number of sides. The outer circumferential surface of the clamping ring (11) is arranged in a circular array with multiple drill bit limiting holes (112) and threaded holes (113). The drill bit limiting holes (112) and threaded holes (113) are arranged alternately, and each drill bit limiting hole (112) and threaded hole (113) is located on a different clamping surface (111). A reinforcing set screw (114) is provided in the threaded hole (113). The clamping mechanism (2) includes a substrate (21), a movable clamping block (22) and a fixed clamping block (23). The fixed clamping block (23) is fixed on one side of the substrate (21). The movable clamping block (22) can be fixed at different positions along the length of the substrate (21). The clamping ring (11) is clamped between the movable clamping block (22) and the fixed clamping block (23). The movable clamping block (22) and the fixed clamping block (23) are respectively attached to two parallel clamping surfaces (111).
2. The tooling for drilling holes in the outer circle of a tubular target according to claim 1, characterized in that: The substrate (21) has an "L" shaped cross section. The substrate (21) is provided with a sliding groove (211) that cooperates with the movable clamping block (22). A lead screw (24) is provided on one side of the substrate (21) to pass through the substrate (21) and connect with the clamping block.
3. The tooling for drilling holes in the outer circle of a tubular target according to claim 2, characterized in that: The limiting mechanism (1) further includes two symmetrically arranged bearing blocks (12). Each bearing block (12) includes a bearing inclined surface (121) that abuts against the inclined clamping surface (111) at the bottom of the clamping ring (11). One of the bearing blocks (12) abuts against the movable clamping block (22), and the other bearing block (12) abuts against the fixed clamping block (23).
4. The tooling for drilling holes in the outer circle of a tubular target according to claim 3, characterized in that: The limiting mechanism (1) also includes a plurality of target material carriers (13), which are located directly below the tubular target (3) and whose tops abut against the sidewall of the tubular target (3).
5. The tooling for drilling holes in the outer circle of a tubular target according to claim 4, characterized in that: The target material carrier (13) includes two parallel carrier plates (131), and two parallel rollers (132) are arranged between the two carrier plates (131). Both rollers (132) abut against the outer peripheral surface of the tubular target material (3).
6. The tooling for drilling holes in the outer circle of a tubular target according to claim 5, characterized in that: The bearing plate (131) is provided with rollers (1311), and the clamping ring (11) has multiple slots (115) arranged in a circular array on the side facing the target material bearing (13) to cooperate with the rollers (1311). Each slot (115) corresponds to the angular position of a drill bit limiting hole (112).
7. The tooling for drilling holes in the outer circle of a tubular target according to claim 6, characterized in that: The bearing plate (131) is provided with a sliding housing (1312), and the two ends of the rotating shaft of the roller (1311) are respectively embedded in the inner wall surface of the sliding housing (1312). The side of the sliding housing (1312) away from the roller (1311) is connected to an elastic element (1313).
8. The tooling for drilling holes in the outer circle of a tubular target according to claim 4, characterized in that: Each of the target carriers (13) has multiple layers of gaskets (133) at its bottom.
9. The tooling for drilling holes in the outer circle of a tubular target according to claim 1, characterized in that: The inner wall of the clamping ring (11) is fitted with a chip-collecting ring (116), and the inner wall of the chip-collecting ring (116) is provided with a chip-collecting groove (1161). The drill bit limiting hole (112) passes through the chip-collecting ring (116).
10. The tooling for drilling holes in the outer circle of a tubular target according to claim 1, characterized in that: The drill bit limiting hole (112) is fitted with a bearing (1121).