Silicon wafer edge guard test sample holder

Abstract

The utility model relates to the technical field of silicon wafer box, concretely to silicon wafer edge protection type test sample box, including the box body, a plurality of recessed boxes are fixedly installed in the box body interior, be provided with semicircular recess on the recessed box, a plurality of recessed boxes are in line array and are side by side arrangement, be provided with edge protection subassembly in the recessed box, edge protection subassembly includes first air bag and second air bag, first air bag fixed mounting is in the recessed box, second air bag fixed mounting is on the semicircular recess of recessed box. Through the setting of edge protection subassembly, make silicon wafer place when utilize self -weight trigger the inflation protection mechanism of first air bag and second air bag, realize the technical means of flexible wrapping support through the inflation of second air bag, reached the technical effect that the silicon wafer edge stress is even, avoids the technical effect of rigid extrusion damage, solved the technical problem that the traditional sample box is insufficient to the silicon wafer edge protection and is easy to cause damage.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer box technology, specifically a silicon wafer edge protection type test sample box. Background Technology

[0002] Silicon wafer test sample boxes are specialized devices used in semiconductor manufacturing and testing processes for the temporary storage, protection, and transfer of silicon wafers. Their structure typically includes a main box body, an openable lid, and an internal silicon wafer positioning mechanism. The main box body is often made of high-strength plastic or metal, providing a certain degree of impact resistance. The lid is connected to the box body via hinges or snap-fit ​​mechanisms, forming a relatively enclosed space when closed. The internal positioning mechanism commonly consists of arrayed slots, support pillars, or elastic pads, with spacing and shapes designed to fit the silicon wafer size, ensuring stable placement and isolation of the wafers. Its main purpose is to prevent silicon wafers from being contaminated by dust, physical collisions, scratches, or electrostatic damage during transfer from production to testing, ensuring the cleanliness and structural integrity of the wafer surface. It provides a stable sample carrier for subsequent electrical performance testing, defect detection, and other processes, while also facilitating standardized management and efficient transfer of batches of silicon wafers.

[0003] Existing silicon wafer boxes mostly use rigid slots or simple elastic components to protect the edges of silicon wafers. These structures often cannot flexibly adjust the support force according to the condition of the silicon wafer itself, and are insufficient in providing uniform force support to the edges of the silicon wafer. During the placement or transportation of silicon wafers, due to the lack of an adaptive protection mechanism driven by the weight of the silicon wafer itself, relying solely on fixed rigid structures or simple elastic supports, the edges of the silicon wafer are prone to damage and cracking due to uneven force. Therefore, a silicon wafer edge protection test sample box is proposed to solve the above-mentioned problems. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a silicon wafer edge protection test sample box, which solves the problem mentioned in the background art that traditional silicon wafer boxes using rigid slots or simple elastic components are prone to damage to the silicon wafer edges due to uneven force.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a silicon wafer edge protection test sample box, comprising a box body, wherein multiple recessed boxes are fixedly installed inside the box body, each recessed box having a semi-circular notch, the multiple recessed boxes being arranged in a linear array side by side, and an edge protection component being provided inside each recessed box, the edge protection component comprising a first airbag and a second airbag, the first airbag being fixedly installed inside the recessed box, the second airbag being fixedly installed on the semi-circular notch of the recessed box, two air tubes being fixedly connected between the first airbag and the second airbag, a sliding rod being slidably connected through the recessed box, a support block being fixedly connected to the top of the sliding rod, and a top plate being fixedly connected to the bottom of the sliding rod.

[0006] Preferably, the top plate is fixedly connected to the top of the first airbag, the support block is made of flexible material, and the support block is provided with a groove that matches the edge of the silicon wafer.

[0007] Preferably, the second airbag is provided with an arc-shaped groove that matches the edge of the silicon wafer, and the second airbag is provided with a through hole. After the support block moves down, it can be embedded into the through hole of the second airbag. After the second airbag is inflated, it can provide flexible support and protection for the edge of the silicon wafer.

[0008] Preferably, a bidirectional diaphragm is provided inside the trachea. When the gas inside the trachea is compressed by external forces, the bidirectional diaphragm deforms and opens.

[0009] Preferably, the recessed box is further provided with a pushing component, which includes a light rod, a first rack, a gear and a second rack. The light rod is slidably connected to the recessed box, the first rack is slidably connected vertically inside the recessed box, the gear is rotatably installed inside the recessed box, and the second rack is fixedly connected to the top plate.

[0010] Preferably, the gear is located between the first rack and the second rack, and both the first rack and the second rack mesh with the gear.

[0011] Preferably, a lid is hinged to the box body, and two drying strips are installed on the box body, with drying granules inside the drying strips.

[0012] As can be seen from the above technical solutions, the silicon wafer edge-protected test sample box provided in the embodiments of this specification has at least the following beneficial effects:

[0013] 1. This utility model, through the setting of edge protection components, enables the silicon wafer to utilize its own gravity to trigger the inflation protection mechanism of the first and second airbags when placed. The expansion of the second airbag achieves flexible wrapping and support, thus achieving the technical effect of uniform force on the edge of the silicon wafer and avoiding damage from hard squeezing. This solves the technical problem that traditional sample boxes do not provide sufficient protection for the edge of the silicon wafer and are prone to damage.

[0014] 2. This utility model, through the setting of the pushing component, enables mechanical linkage by pressing the optical rod when the silicon wafer is removed. Through the technical means of transmission by the first rack, the second rack and the gear, the second airbag is deflated and the support block pushes the silicon wafer out simultaneously when the wafer is removed. This achieves the technical effect of easily pushing out the silicon wafer and making it easy to pick up, and solves the technical problem of easy contact and damage to the silicon wafer in traditional wafer removal methods. Attached Figure Description

[0015] The accompanying drawings, which are included to provide a further understanding of the present invention, form part of this application:

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the box body in this utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the platform in this utility model;

[0019] Figure 4 This is a schematic diagram of the edge protection component in this utility model;

[0020] Figure 5 This is a schematic diagram of the push component in this utility model;

[0021] Figure 6 This is a schematic diagram of the bidirectional diaphragm structure in this utility model;

[0022] Figure 7 This is a schematic diagram of the structure of the second airbag in this utility model.

[0023] In the diagram: 1. Box body; 2. Box lid; 3. Notched box; 4. Edge protection assembly; 41. First airbag; 42. Top plate; 43. Sliding rod; 44. Support block; 45. Second airbag; 46. Air tube; 47. Bidirectional diaphragm; 5. Pushing assembly; 51. Light rod; 52. First rack; 53. Gear; 54. Second rack; 6. Drying strip. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example 1

[0026] Please see Figures 1-7As shown, the silicon wafer edge protection test sample box includes a box body 1. Multiple recessed boxes 3 are fixedly installed inside the box body 1. Each recessed box 3 has a semi-circular notch. The multiple recessed boxes 3 are arranged in a linear array side-by-side. An edge protection component 4 is installed inside each recessed box 3. The edge protection component 4 includes a first airbag 41 and a second airbag 45. The first airbag 41 is fixedly installed inside the recessed box 3, and the second airbag 45 is fixedly installed on the semi-circular notch of the recessed box 3. Two air tubes 46 are fixedly connected between the first airbag 41 and the second airbag 45. A sliding rod 43 is slidably connected through the recessed box 3. A support block 44 is fixedly connected to the top of the sliding rod 43, and the bottom of the sliding rod 43 is fixedly connected to... A top plate 42 is fixedly connected to the top of the first airbag 41. The support block 44 is made of flexible material and has a groove that matches the edge of the silicon wafer. The second airbag 45 has an arc-shaped groove that matches the edge of the silicon wafer and a through hole. After the support block 44 moves down, it can be inserted into the through hole of the second airbag 45. After the second airbag 45 is inflated, it can expand and provide flexible support and protection for the edge of the silicon wafer. A bidirectional diaphragm 47 is installed inside the air tube 46. When the gas in the air tube 46 is compressed by the outside, the bidirectional diaphragm 47 deforms and opens. When the gas in the air tube 46 is not subjected to external force, the bidirectional diaphragm 47 opens by its own force. The elastic restoring force remains closed, effectively preventing gas flow within the trachea 46. A return spring is installed inside the first airbag 41. The spring force of the return spring is less than the pressure of the silicon wafer, allowing the first airbag 41 to automatically return to its original position when there is no silicon wafer above the second airbag 45. This ensures that the first airbag 41 remains fully inflated while the second airbag 45 remains deflated when no silicon wafer is placed on it. When the silicon wafer is placed on the support block 44 from top to bottom, the bottom edge of the silicon wafer enters the slot of the support block 44. The weight of the silicon wafer causes the support block 44 to move downwards, and the sliding rod 43 moves downwards along with the support block 44, causing the top plate 42 at the bottom of the sliding rod 43 to press downwards against the first airbag 45. When the first airbag 41 is compressed, the internal gas is pressurized and flows through the two air tubes 46 to the second airbag 45. The second airbag 45 gradually expands. At the same time, the silicon wafer continues to move downward, and the edge of the silicon wafer gradually embeds into the arc-shaped groove of the second airbag 45. When the second airbag 45 is fully expanded and the silicon wafer is fully embedded in the arc-shaped groove, the second airbag 45 tightly wraps around the edge of the silicon wafer, achieving flexible support and protection for the edge of the silicon wafer and preventing the edge of the silicon wafer from being damaged by hard compression. At the same time, the support block 44 will embed into the through hole of the second airbag 45 during the downward movement. The flexible material support block 44 and the expanded second airbag 45 cooperate with each other to make the edge of the silicon wafer evenly stressed.

[0027] A lid 2 is hinged to the box body 1, and two drying strips 6 are installed on the box body 1. The drying strips 6 contain drying particles. The lid 2 can be opened and closed flexibly. When the silicon wafer is placed in the recessed box 3, closing the lid 2 can provide a relatively closed space for the silicon wafer, reducing the contamination of the silicon wafer by external dust, impurities, etc. The drying particles inside the two drying strips 6 can absorb moisture in the air inside the box, keeping the environment inside the box dry. Since silicon wafers are easily affected by moisture in a humid environment, they may undergo adverse phenomena such as oxidation, which will affect the performance of the silicon wafer and the test results. The presence of the drying strips 6 effectively avoids this problem and provides a dry and stable storage and testing environment for the silicon wafer.

[0028] In this embodiment, the edge protection component 4 enables the silicon wafer to be placed by its own weight, triggering the inflation protection mechanism of the first airbag 41 and the second airbag 45. The expansion of the second airbag 45 achieves flexible wrapping and support, thus achieving the technical effect of uniform force on the edge of the silicon wafer and avoiding damage from hard compression. This solves the technical problem that traditional sample boxes do not provide sufficient protection for the edge of the silicon wafer and are prone to damage.

[0029] Example 2

[0030] Please see Figures 3-5As shown, a pushing component 5 is also provided inside the recessed box 3. The pushing component 5 includes a light rod 51, a first rack 52, a gear 53, and a second rack 54. The light rod 51 is slidably connected to the recessed box 3. The first rack 52 is slidably connected vertically inside the recessed box 3. The gear 53 is rotatably installed inside the recessed box 3. The second rack 54 is fixedly connected to the top plate 42. The gear 53 is located between the first rack 52 and the second rack 54. Both the first rack 52 and the second rack 54 mesh with the gear 53. When the silicon wafer is placed on the support block 44 and the top plate 42 is driven to press the first airbag 41 downward, the second rack 54, which is fixedly connected to the top plate 42, will move downward. Since the second rack 54 meshes with the gear 53, the downward movement of the second rack 54 will drive the gear 53 to rotate. The gear 53 then meshes with the first rack 52. The rotation of the gear 53 will drive the first rack 52 to move upward, thereby driving the light rod connected to the first rack 52 to rotate. When rod 51 slides upward, it is in an upward-moving state and will not affect the placement and fixation of the silicon wafer. When the silicon wafer needs to be removed, press rod 51 downward. Rod 51 will drive the first rack 52 to move downward. The downward movement of the first rack 52 will cause gear 53 to rotate in the opposite direction. The reverse rotation of gear 53 will drive the second rack 54 to move upward, thereby causing the top plate 42 connected to the second rack 54 to move upward. The upward movement of the top plate 42 will push the first airbag 41 to reset. During the reset process of the first airbag 41, the change in internal air pressure will cause the bidirectional diaphragm 47 to open. Gas will flow from the second airbag 45 back to the first airbag 41. The second airbag 45 will contract to release the restraint on the edge of the silicon wafer. At the same time, the top plate 42 will drive the support block 44 to move upward through the slide rod 43 to push the silicon wafer out. This makes it easy for operators to pick up the silicon wafer, realizing the convenience of silicon wafer picking and placing. The operation is labor-saving and stable, and avoids unnecessary contact and damage to the silicon wafer when picking it up.

[0031] In this embodiment, by setting the push component 5, the silicon wafer can be mechanically linked by pressing the light rod 51 when it is taken out. Through the technical means of the first rack 52, the second rack 54 and the gear 53 working together, the second airbag 45 is deflated and the support block 44 pushes the silicon wafer out at the same time when the wafer is taken out. This achieves the technical effect of easily pushing out the silicon wafer and making it easy to pick up, and solves the technical problem of easy contact and damage to the silicon wafer in the traditional wafer taking method.

[0032] In this invention, a silicon wafer edge-protected test sample box is used to place silicon wafers. The wafers are placed from top to bottom on a support block 44 inside a recessed box 3. The bottom edge of the wafer is embedded in the groove of the support block 44. Gravity causes the support block 44 to move downwards, and the sliding rod 43, fixedly connected to the support block 44, moves downwards accordingly. This causes the top plate 42 at the bottom of the sliding rod 43 to press down on the first air bladder 41 inside the recessed box 3. After the first air bladder 41 is compressed, the internal gas flows through two air tubes 46 to the second air bladder 45 fixed to the semi-circular recess of the recessed box 3. The bidirectional diaphragm 47 inside the air tubes 46 deforms and opens under gas pressure, ensuring gas flow. As the second air bladder 45 expands, the edge of the silicon wafer gradually embeds into its arc-shaped groove, while the support block 44 moves downwards and embeds... The flexible support block 44, which is inserted into the through hole of the second airbag 45, cooperates with the expanded second airbag 45 to provide uniform support and protection for the edge of the silicon wafer. When removing the silicon wafer, the light rod 51, which is slidably connected through the recessed box 3, is pressed down. The light rod 51 drives the first rack 52, which is vertically slidably connected in the recessed box 3, to move down. The gear 53, which meshes with the first rack 52, drives the meshing second rack 54 to move up by rotating. The top plate 42 pushes the first airbag 41 to reset. The reset spring in the first airbag 41 assists in the reset. At this time, the bidirectional diaphragm 47 opens again, and the gas flows from the second airbag 45 back to the first airbag 41. The second airbag 45 contracts and releases the restraint. The top plate 42 drives the support block 44 to move up through the slide rod 43, pushing the silicon wafer out of the recessed box 3.

[0033] The above embodiments are only used to illustrate the present utility model, and are not intended to limit the present utility model. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present utility model. Therefore, all equivalent technical solutions also fall within the scope of the present utility model. The patent protection scope of the present utility model should be defined by the claims.

Claims

1. A silicon wafer edge-protected test sample box, comprising a box body (1), characterized in that: Multiple recessed boxes (3) are fixedly installed inside the box body (1). Each recessed box (3) has a semi-circular notch. The multiple recessed boxes (3) are arranged in a straight line array side by side. An edge protection component (4) is provided inside the recessed box (3). The edge protection component (4) includes a first airbag (41) and a second airbag (45). The first airbag (41) is fixedly installed inside the recessed box (3). The second airbag (45) is fixedly installed on the semi-circular notch of the recessed box (3). Two air tubes (46) are fixedly connected between the first airbag (41) and the second airbag (45). A sliding rod (43) is slidably connected through the recessed box (3). A support block (44) is fixedly connected to the top of the sliding rod (43). A top plate (42) is fixedly connected to the bottom of the sliding rod (43).

2. The silicon wafer edge-protected test sample box according to claim 1, characterized in that: The top plate (42) is fixedly connected to the top of the first airbag (41), the support block (44) is made of flexible material, and the support block (44) is provided with a groove that matches the edge of the silicon wafer.

3. The silicon wafer edge-protected test sample box according to claim 2, characterized in that: The second airbag (45) is provided with an arc-shaped groove that matches the edge of the silicon wafer. The second airbag (45) is provided with a through hole. After the support block (44) moves down, it can be embedded into the through hole of the second airbag (45). After the second airbag (45) is inflated, it can provide flexible support and protection for the edge of the silicon wafer.

4. The silicon wafer edge-protected test sample box according to claim 3, characterized in that: A bidirectional diaphragm (47) is provided inside the trachea (46). When the gas inside the trachea (46) is squeezed by the outside, the bidirectional diaphragm (47) deforms and opens.

5. The silicon wafer edge-protected test sample box according to claim 4, characterized in that: The recessed box (3) is also provided with a pushing component (5). The pushing component (5) includes a light rod (51), a first rack (52), a gear (53), and a second rack (54). The light rod (51) is slidably connected to the recessed box (3). The first rack (52) is slidably connected to the recessed box (3) vertically. The gear (53) is rotatably installed in the recessed box (3). The second rack (54) is fixedly connected to the top plate (42).

6. The silicon wafer edge-protected test sample box according to claim 5, characterized in that: The gear (53) is located between the first rack (52) and the second rack (54), and both the first rack (52) and the second rack (54) mesh with the gear (53).

7. The silicon wafer edge-protected test sample box according to claim 1, characterized in that: A lid (2) is hinged to the box body (1), and two drying strips (6) are installed on the box body (1), with drying particles inside the drying strips (6).

Images