Rotary table mechanism and passivation coating device

By constructing a narrow-slit airflow channel in the rotary table mechanism, the vacuum equipment forms a high-speed laminar flow field, which solves the problems of high energy consumption and poor coating uniformity in passivation coating equipment, and achieves efficient and uniform coating effect.

CN224548534UActive Publication Date: 2026-07-24DEPOSITION EQUIP & APPL SHANGHAI LTD +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
DEPOSITION EQUIP & APPL SHANGHAI LTD
Filing Date
2025-08-01
Publication Date
2026-07-24

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Abstract

The application relates to the field of passivation coating equipment, and provides a rotating disc mechanism and a passivation coating equipment, which comprises a bottom disc, mounting positions and flow guide blocks; the mounting positions and the flow guide blocks are arranged at the bottom disc in a circumferential interval; the mounting positions and the flow guide blocks are alternately arranged in sequence and form a narrow-slit type airflow channel; the two ends of the mounting positions in the circumferential direction of the bottom disc are respectively provided with first flow guide grooves; a material box is mounted on the mounting positions; the first flow guide grooves are at least partially located between the side surface of the material box and the side surface of the adjacent flow guide block; the first flow guide grooves are communicated with a vacuum device, so that the airflow channel can form a reaction airflow facing the coating surface of the material box. The material box and the adjacent flow guide block form a spacing structure; the flow guide grooves on the two sides of the mounting positions are communicated with the vacuum device; the narrow-slit type airflow channel is constructed between the coating surface and the side surface of the flow guide block; the vacuum device forms a high-speed laminar flow field in the narrow-slit type airflow channel; the high-speed laminar flow field flows through the coating surfaces on the two sides more stably, avoids turbulence and airflow dead angles, and improves the coating uniformity of the coating surface.
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Description

Technical Field

[0001] This utility model relates to the field of passivation coating equipment, and further to a turntable mechanism and passivation coating equipment. Background Technology

[0002] Currently, sidewall passivation coating is usually performed on a single side of the solar cell. In this case, the turntable mechanism only serves to install the material box, with the coating surface located on one side of the material box. The vacuum equipment is directly connected to the reaction chamber to evacuate the entire reaction chamber, which results in high energy consumption and cost. Furthermore, the gas sprayed from the spray system at the top of the reaction chamber diffuses freely within the chamber. Due to turbulence or gravity, the gas flow is uncontrollable and cannot guarantee that the gas flow will be uniformly distributed across the coating surface, leading to poor film thickness uniformity. Utility Model Content

[0003] To address the aforementioned technical problems, the purpose of this utility model is to provide a turntable mechanism and passivation coating equipment. After the material box is installed in the mounting position of the chassis, the material box and the circumferentially adjacent guide blocks form an interval structure. The guide grooves on both sides of the mounting position are connected to the vacuum equipment, and a narrow slit-type airflow channel is constructed between the coating surface and the side of the guide block. The vacuum equipment forms a high-speed laminar flow field in the narrow slit-type airflow channel. The high-speed laminar flow field flows more smoothly through the coating surfaces on both sides, avoiding turbulence and airflow dead zones, and improving the coating uniformity of the coating surface.

[0004] To achieve the above objectives, this utility model provides a turntable mechanism for placing a material box, wherein at least one side of the material box has a coated surface, and includes a base, a mounting position, and a guide block;

[0005] The chassis is provided with a plurality of mounting positions and a plurality of flow guide blocks circumferentially spaced around its central axis; the mounting positions and flow guide blocks are arranged alternately in sequence to form a narrow slit-type airflow channel, and the mounting positions are provided with a first flow guide groove at each end of the chassis circumferentially.

[0006] The mounting position is suitable for fixing the material box, and the first guide groove is at least partially located between the side of the material box and the side of the adjacent guide block. The first guide groove is suitable for connecting to a vacuum device so that the airflow channel can form a reactive airflow facing the coating surface of the material box.

[0007] In some embodiments, the side of the flow guide block is parallel to the side of the material box, and the extension direction of the first flow guide groove is parallel to the coating surfaces on both sides of the material box, so that the reaction gas flow can flow through and act on the coating surface in a direction parallel to the coating surface.

[0008] In some embodiments, the guide block has a first side and a second side, the first side being parallel to one of the coated surfaces of a hopper mounted at a preceding circumferentially adjacent mounting position; and the second side being parallel to another coated surface of a hopper mounted at a subsequent circumferentially adjacent mounting position.

[0009] In some embodiments, the material box is provided with several spaced-apart cell receiving areas, and each cell receiving area has a coated surface on both sides.

[0010] The first flow channel is located between the two outermost coated surfaces of the material box and the side of the adjacent flow guide block;

[0011] The mounting position is also provided with a second guide groove, which is located between adjacent coated surfaces of adjacent battery cell receiving areas and is parallel to the first guide groove.

[0012] In some embodiments, the material box has two spaced-apart battery cell receiving areas, and the second guide channel is located between the two battery cell receiving areas and is located at the center of the mounting position along the circumferential direction of the chassis, and the second guide channel extends along the radial direction of the chassis.

[0013] In some embodiments, the bottom of the chassis is provided with a plurality of reinforcing ribs, which extend radially along the chassis and are located directly below the center of the mounting position along the circumferential direction of the chassis.

[0014] In some embodiments, the chassis is provided with a plurality of positioning holes for fixing and connecting the material box, and the positioning holes are disposed between the first guide groove and the second guide groove.

[0015] According to another aspect of this application, a passivation coating device is further provided, including any of the turntable mechanisms, reaction chambers, and material boxes of the above preferred embodiments. The material box is provided with an air inlet groove in the middle, and the air inlet groove matches the second guide groove of the chassis.

[0016] Compared with the prior art, the turntable mechanism and passivation coating equipment provided by this utility model have at least one of the following beneficial effects:

[0017] 1. After the material box is installed in the mounting position of the chassis, the material box and the circumferentially adjacent guide blocks form an interval structure. The guide grooves on both sides of the mounting position are connected to the vacuum equipment, and a narrow slit-type airflow channel is constructed between the coating surface and the side of the guide block. The vacuum equipment forms a high-speed laminar flow field in the narrow slit-type airflow channel. The high-speed laminar flow field flows more smoothly through the coating surfaces on both sides, avoiding turbulence and airflow dead zones, and improving the coating uniformity of the coating surface.

[0018] 2. The extension direction of the first guide channel is also parallel to the coating surface on both sides of the material box, so that the reaction gas flow can flow stably and evenly through and act on the entire coating surface in a direction parallel to the coating surface, ensuring the uniform deposition of gas molecules during the coating process.

[0019] 3. The second guide channel is parallel to the first guide channel and the coating surface, which ensures the consistency of the airflow direction in each area inside the material box, avoids turbulence or airflow stagnation that may be caused by changes in airflow direction, and further optimizes the flow field distribution of air on the coating surface.

[0020] 4. The reinforcing ribs extend along the radial direction of the chassis, like the spokes of a wheel, evenly distributing and bearing stress from all directions. Attached Figure Description

[0021] The preferred embodiments will be described below in a clear and easy-to-understand manner, in conjunction with the accompanying drawings, to further explain the above-mentioned characteristics, technical features, advantages and implementation methods of this utility model.

[0022] Figure 1 This is a structural diagram of a turntable mechanism;

[0023] Figure 2 This is a top view of a turntable mechanism;

[0024] Figure 3 This is a structural diagram of the reinforcing ribs.

[0025] Explanation of icon numbers:

[0026] Chassis 1, mounting position 11, first guide channel 111, second guide channel 112, guide block 12, first side 121, second side 122, reinforcing rib 13, positioning hole 14, material box 2, battery cell receiving area 21, coating surface 211. Detailed Implementation

[0027] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the specific implementation methods of this utility model will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0028] To keep the drawings concise, each figure only schematically shows the parts relevant to the utility model, and these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some figures, only one of the components with the same structure or function is schematically depicted, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one."

[0029] It should also be further understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0030] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] Furthermore, in the description of this application, the terms "first," "second," etc., are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance. It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

[0032] refer to Figure 1 and Figure 2 This utility model provides a turntable mechanism for placing a material box 2. At least one side of the material box 2 has a coating surface 211. The turntable mechanism includes a base 1, mounting positions 11, and guide blocks 12. Multiple mounting positions 11 and multiple guide blocks 12 are circumferentially spaced around the central axis of the base 1. The mounting positions 11 and guide blocks 12 are arranged alternately to form a narrow slit-like airflow channel. The mounting positions 11 are provided with first guide grooves 111 at both ends of the base 1 in the circumferential direction. The mounting positions 11 are suitable for fixing the material box 2. The first guide grooves 111 are at least partially located between the side of the material box 2 and the side of the adjacent guide block 12. The first guide grooves 111 are suitable for connecting to a vacuum device so that a reactive airflow facing the coating surface 211 of the material box 2 can be formed in the airflow channel.

[0033] In this embodiment, after the material box 2 is installed in the mounting position 11 of the chassis 1, the material box 2 and the circumferentially adjacent guide block 12 form an interval structure. The guide grooves on both sides of the mounting position 11 are connected to the vacuum equipment, and a narrow slit-type airflow channel is constructed between the coating surface 211 and the side of the guide block 12. The vacuum equipment forms a high-speed laminar flow field in the narrow slit-type airflow channel. The high-speed laminar flow field flows more smoothly through the coating surfaces 211 on both sides, avoiding turbulence and airflow dead angles, and improving the coating uniformity of the coating surface 211.

[0034] Specifically, the battery cells have cut surfaces on opposite sides. After being stacked horizontally, the battery cells are placed in the material box 2. The cut surfaces are exposed on opposite sides of the material box 2, forming a coating surface 211. The chassis 1 is based on its central axis, and multiple mounting positions 11 and guide blocks 12 are arranged circumferentially. The mounting positions 11 and guide blocks 12 are arranged alternately to form a narrow slit-like airflow channel, which makes the space utilization efficiency of the entire turntable mechanism higher. The mounting position 11 has a first guide groove 111 at both ends of the chassis 1. When the material box 2 is fixedly installed in the mounting position 11, the first guide groove 111 is partially located in the narrow slit-like airflow channel between the side of the material box 2 and the side of the adjacent guide block 12. The vacuum equipment can draw air into the airflow channel through the first guide groove 111, so that the reaction gas forms a dedicated reaction airflow channel through the coating surface 211 of the material box 2.

[0035] In use, after the material box 2 is installed in the mounting position 11 of the chassis 1, an orderly interval structure, namely a narrow-slit airflow channel, is naturally formed between the material box 2 and the circumferentially adjacent guide blocks 12. At the same time, the first guide grooves 111 on both sides of the mounting position 11 are connected to the vacuum equipment, forming a narrow-slit airflow channel between the coating surface 211 of the material box 2 and the side of the guide block 12. With the strong suction of the vacuum equipment, a high-speed and stable laminar flow field is rapidly formed inside this narrow-slit airflow channel. Compared with the traditional airflow mode, this high-speed laminar flow field exhibits unparalleled stability. It can flow through the coating surfaces 211 on both sides of the material box 2 in a uniform and continuous manner, effectively avoiding the generation of turbulence and the occurrence of dead airflow corners, thereby bringing a uniform and dense coating effect to the coating surface 211, greatly improving the coating quality and performance of the product.

[0036] It is worth noting that after the vacuum equipment is started, the negative pressure effect it generates is transmitted to the first guide channel 111, forcing the reactant gas to form a high-speed laminar flow within the narrow slit. According to the principles of fluid mechanics, the gas molecules move in a highly consistent direction under laminar flow conditions, avoiding airflow disturbances and uneven particle deposition caused by turbulence. Moreover, by controlling and adjusting the relative position between the material box 2 and the guide block 12, precise control of the cross-sectional area of ​​the airflow channel can be achieved. Preferably, in this application, the chassis 1 is provided with six material boxes 2 and six guide blocks 12, so that the middle part of the chassis 1 forms a hexagon.

[0037] Furthermore, the side of the flow guide block 12 is parallel to the side of the material box 2, and the extension direction of the first flow guide groove 111 is parallel to the coating surface 211 on both sides of the material box 2, so that the reaction gas flow can flow through and act on the coating surface 211 in a direction parallel to the coating surface 211.

[0038] In this embodiment, the extension direction of the first guide groove 111 is also parallel to the coating surface 211 on both sides of the material box 2, so that the reaction gas flow can flow stably and uniformly through and act on the entire coating surface 211 in a direction parallel to the coating surface 211, ensuring the uniform deposition of gas molecules during the coating process.

[0039] Specifically, the extension direction of the first guide channel 111 is parallel to the coating surfaces 211 on both sides of the material box 2, so that the reaction gas flow stably, uniformly and efficiently through the entire coating surface 211 in a direction parallel to the coating surface 211, thereby ensuring that gas molecules can be uniformly deposited on the coating surface 211 to form a coating with uniform thickness and consistent performance. The guide block 12 has a first side and a second side. The first side is parallel to one of the coating surfaces 211 of the material box 2 installed on the circumferentially adjacent first mounting position 11; the second side is parallel to the other coating surface 211 of the material box 2 installed on the circumferentially adjacent second mounting position 11, so that each guide block 12 can provide precise airflow guidance for the coating surfaces 211 of the adjacent material box 2, ensuring that the airflow maintains a stable and uniform flow rate and direction when flowing through the coating surface 211, thereby effectively improving the coating quality and reducing the coating thickness difference caused by uneven airflow.

[0040] It is worth noting that the guide block 12 is preferably fan-shaped or triangular, and this application does not impose further limitations. It is sufficient that its two sides are arranged radially along the base 1 and correspond to the coating surface 211. In the actual process, when the vacuum equipment is started and generates a suction effect, the reactive gas enters the airflow channel through the first guide groove 111 and accelerates to form a high-speed laminar flow within the airflow channel. The parallel arrangement of the sides of the guide block 12 with the sides of the material box 2 ensures the stability and uniformity of the laminar flow, allowing the airflow to act precisely on the entire coating area in a direction parallel to the coating surface 211, thereby achieving efficient material deposition and uniform coating formation.

[0041] Furthermore, the material box 2 is provided with a number of spaced-apart battery cell receiving areas 21, and each battery cell receiving area 21 has a coated surface 211 on both sides; the first guide groove 111 is provided between the two outermost coated surfaces 211 of the material box 2 and the side of the adjacent guide block 12; the mounting position 11 is also provided with a second guide groove 112, which is provided between the adjacent coated surfaces 211 of the adjacent battery cell receiving areas 21 and is parallel to the first guide groove.

[0042] In this embodiment, the second guide channel 112 is parallel to the first guide channel 111 and the coating surface 211, which ensures the consistency of the airflow direction in each area inside the material box 2, avoids turbulence or airflow stagnation that may be caused by changes in the airflow direction, and further optimizes the flow field distribution of the airflow on the coating surface 211.

[0043] Specifically, the material box 2 has several spaced-apart cell receiving areas 21. These cell receiving areas 21 are spaced apart, and each cell receiving area 21 has a flat and smooth coating surface 211 on both sides, ensuring that each cell can obtain uniform airflow distribution and reactive gas coverage during the coating process. The first guide channel 111 is located between the two outermost coating surfaces 211 of the material box 2 and the sides of the adjacent guide block 12. The second guide channel 112 is located between adjacent coating surfaces 211 of adjacent cell receiving areas 21 and is parallel to the first guide channel 111. In the actual process, when the vacuum equipment is started and a suction effect is generated, the reactive gas enters the various coating areas inside the material box 2 through the first guide channel 111 and the second guide channel 112. The first guide channel 111 is mainly responsible for efficiently introducing the reactive gas into the area between the outer coating surface 211 of the material box 2 and the guide block 12, while the second guide channel 112 ensures that the airflow is evenly distributed between the coating surfaces 211 of adjacent cell receiving areas 21. The two work together to form an efficient and stable airflow network, ensuring that each coating surface 211 receives a sufficient supply of reactive gas and uniform airflow coverage.

[0044] Preferably, the material box 2 is provided with two spaced-apart battery cell receiving areas 21, and the second guide channel 112 is located between the two battery cell receiving areas and is located at the center of the mounting position 11 along the circumferential direction of the chassis 1. The second guide channel 112 extends along the radial direction of the chassis 1.

[0045] Specifically, a second flow channel 112 is provided between the two cell receiving areas 21. The second flow channel 112 extends along the radial direction of the chassis 1, and its extension direction is parallel to the radial axis of the material box 2, so that the flow channel can efficiently guide the reaction gas from the outside to the inside of the material box 2, so as to ensure that it can cover the entire area between the two cell receiving areas 21, thereby achieving a uniform distribution of airflow.

[0046] Further, refer to Figure 3 The bottom of the chassis 1 is provided with several reinforcing ribs 13. The reinforcing ribs 13 extend radially along the chassis 1 and are located directly below the center of the mounting position 11 in the circumferential direction of the chassis 1.

[0047] In this embodiment, the reinforcing rib 13 extends along the radial direction of the chassis 1, like the spokes of a wheel, evenly distributing and bearing stress from all directions.

[0048] Specifically, each reinforcing rib 13 is positioned directly below the center of the mounting position 11 along the circumferential direction of the chassis 1. This not only maximizes structural support but also effectively enhances the chassis 1's resistance to deformation in both the radial and circumferential directions, ensuring stability and precision under high-speed rotation and vacuum conditions. The chassis 1 has several positioning holes 14 for fixing the material box 2. These holes, secured by positioning pins and fastening screws, allow for quick and accurate fixing of the material box 2. The positioning holes 14 are located between the first guide channel 111 and the second guide channel 112, fully utilizing the space between them to avoid interference with the airflow channel and ensure the structural integrity of the mounting position 11.

[0049] Furthermore, this application provides a passivation coating device, including the turntable mechanism, reaction chamber and material box 2 in any of the above embodiments, the material box 2 is provided with an air inlet groove in the middle, and the air inlet groove matches the second guide groove of the chassis 1.

[0050] It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. A turntable mechanism for holding a material box, said material box having a coated surface on at least one side, characterized in that, Includes chassis, mounting position, and air guide block; The chassis is provided with a plurality of mounting positions and a plurality of flow guide blocks circumferentially spaced around its central axis; the mounting positions and flow guide blocks are arranged alternately in sequence to form a narrow slit-type airflow channel, and the mounting positions are provided with a first flow guide groove at each end of the chassis circumferentially. The mounting position is suitable for fixing the material box, and the first guide groove is at least partially located between the side of the material box and the side of the adjacent guide block. The first guide groove is suitable for connecting to a vacuum device so that the airflow channel can form a reactive airflow facing the coating surface of the material box.

2. The turntable mechanism according to claim 1, characterized in that, The side of the flow guide block is parallel to the side of the material box, and the extension direction of the first flow guide groove is parallel to the coating surface on both sides of the material box, so that the reaction gas flow can flow through and act on the coating surface in a direction parallel to the coating surface.

3. A turntable mechanism according to claim 2, characterized in that, The guide block has a first side and a second side. The first side is parallel to one of the coated surfaces of the material box installed at the preceding circumferential mounting position. The second side is parallel to the other coated surface of the material box installed at the following circumferential mounting position.

4. A turntable mechanism according to any one of claims 1-3, characterized in that, The material box contains several spaced-apart cell receiving areas, and each cell receiving area has a coated surface on both sides. The first guide channel is located between the two outermost coated surfaces of the material box and the side of the adjacent guide block; The mounting position is also provided with a second guide channel, which is located between adjacent coated surfaces of adjacent battery cell receiving areas and is parallel to the first guide channel.

5. A turntable mechanism according to claim 4, characterized in that, The material box has two spaced-apart battery cell receiving areas. The second guide channel is located between the two battery cell receiving areas and is located at the center of the mounting position along the circumferential direction of the chassis. The second guide channel extends along the radial direction of the chassis.

6. A turntable mechanism according to claim 4, characterized in that, The bottom of the chassis is provided with several reinforcing ribs, which extend radially along the chassis and are located directly below the center of the mounting position along the circumferential direction of the chassis.

7. A turntable mechanism according to claim 4, characterized in that, The chassis is provided with several positioning holes, which are used to fix and connect the material box. The positioning holes are located between the first guide groove and the second guide groove.

8. A passivation coating equipment, characterized in that, The invention includes the turntable mechanism, reaction chamber, and material box as described in any one of claims 1-7, wherein the material box is provided with an air inlet groove in the middle, and the air inlet groove matches the second guide groove of the chassis.