A device for calibrating a measuring instrument for a vacuum gauge

Abstract

The utility model relates to vacuum metering technical field, and disclose a kind of device for vacuum meter calibration measuring instrument, including detection component and retaining component, detection component includes detection base, installation groove for installing and connecting vacuum meter is opened on this detection base, detection mechanism for calibrating measurement to vacuum meter is provided in installation groove, detection component further includes the positioning mechanism of setting in the side portion of detection base, for the vacuum meter is pressed tightly and fixed in installation groove. By control electric telescopic handle, positioning mechanism can be linked by driving mechanism, automatically complete the clamping fixation or release of vacuum meter, it is very simple and fast to operate, greatly improve the calibration efficiency, and the positioning rod of symmetrical design is accurately driven by gear and rack mechanism, can ensure that vacuum meter is stably, concentrically and evenly pressed tightly in the axial core position of installation groove, ensure the consistency of connection and sealing reliability of each installation, reduce artificial error.

Description

Technical Field

[0001] This utility model relates to the field of vacuum metrology technology, specifically to a device for calibrating measuring instruments using a vacuum gauge. Background Technology

[0002] Vacuum gauges are crucial instruments used to measure vacuum levels or low atmospheric pressures, and are widely used in semiconductor manufacturing, aerospace, scientific research, and other fields. To ensure the accuracy of vacuum gauge measurements, they need to be calibrated regularly using a calibration device.

[0003] Existing vacuum gauge calibration devices are usually complex in structure and inconvenient to operate. During the calibration process, the vacuum gauge usually needs to be manually installed and fixed to the interface of the calibration device. This process is time-consuming and laborious, and it is difficult to ensure that the concentricity and sealing are consistent each time. This may introduce human error and affect the accuracy and repeatability of the calibration results. In addition, traditional fixing methods may damage the vacuum gauge or its interface threads due to improper tightening force.

[0004] Therefore, there is an urgent need for a vacuum gauge calibration device that is easy to operate, reliable, and can improve calibration consistency. Utility Model Content

[0005] To achieve the above objectives, the present invention provides the following technical solution: a device for calibrating a vacuum gauge measuring instrument, comprising a detection component and a fixation component.

[0006] The detection assembly includes a detection base with a mounting slot for mounting and connecting a vacuum gauge. The mounting slot contains a detection mechanism for calibrating and measuring the vacuum gauge. The detection assembly also includes a positioning mechanism located on the side of the detection base for pressing and fixing the vacuum gauge in the mounting slot.

[0007] The retention assembly includes a retention ring that is movably fitted into the mounting groove, and a drive mechanism disposed on the side of the retention ring. The drive mechanism is used to drive the positioning mechanism to generate displacement movement when the retention ring moves, thereby automatically completing the clamping or releasing of the vacuum gauge.

[0008] Preferably, two connecting grooves are symmetrically opened in the mounting groove, and a sleeve rod is fixed in the connecting groove. A limit button is fixed at one end of the sleeve rod, and two connecting blocks are symmetrically arranged on the side of the retaining ring. The connecting blocks are movably sleeved on the side of the sleeve rod. When the retaining ring is pressed down, the connecting blocks can slide along the sleeve rod and fit against the bottom of the limit button when they reach a set height, so as to limit the downward stroke of the retaining ring.

[0009] Preferably, two grooves are symmetrically opened at the bottom of the mounting groove, and two support plates are symmetrically arranged at the bottom of the retaining ring. When the retaining ring is in the initial (unpressed) position, the support plates fit into the grooves, providing support for the retaining ring and keeping it horizontal.

[0010] Preferably, a tension spring is movably sleeved on the side of the sleeve rod, with the two ends of the tension spring abutting against the inner wall of the connecting groove and the corresponding surface of the connecting block, respectively. The tension spring provides an upward restoring force, so that the retaining ring can automatically reset when the external force is released.

[0011] Preferably, the testing mechanism includes a mating joint located at the mounting groove shaft core position and a connector located on the side of the testing base. The mating joint is used to mate with the measurement interface of the vacuum gauge, and the connector is used to connect to an external vacuum standard source or calibration system. The mating joint and the connector are internally connected to form the vacuum path necessary for calibration.

[0012] Preferably, the positioning mechanism includes two sleeves symmetrically arranged on the side of the detection base. The sleeves extend into the mounting groove. A positioning rod is movably sleeved in each sleeve. Positioning holes are symmetrically opened on the side of the retaining ring. When the retaining ring is pressed down, the driving mechanism drives the positioning rod to move inward, so that it is inserted into the positioning hole and tightly fits against the side or flange of the vacuum gauge interface, thereby pressing and fixing it.

[0013] Preferably, the side of the positioning rod is provided with an adjustment groove along its length, and a toothed roller is engaged in the adjustment groove. The two ends of the toothed roller penetrate the side wall of the sleeve, and an adjustment gear is fixed at its end. By rotating the toothed roller, the linear displacement of the positioning rod in the sleeve can be precisely controlled.

[0014] Preferably, the driving mechanism includes a connecting plate symmetrically arranged on the top of the retaining ring. One end of the connecting plate is provided with a driving rod in a vertical direction. A driving rack is fixed on the side of the driving rod along its length. When the retaining ring moves up and down, the driving rack moves up and down accordingly. Since the driving rack meshes with the regulating gear, its up and down movement is converted into the rotational movement of the regulating gear, which in turn drives the positioning rod to make a linear movement in the horizontal direction through the toothed roller.

[0015] Preferably, the retention assembly further includes two sets of electric telescopic rods symmetrically arranged inside the detection base. The output end of the electric telescopic rod passes through the top of the detection base and is fixed to the bottom of the linkage plate. By controlling the extension and retraction of the electric telescopic rod, the retention ring and the entire drive mechanism can be electrically driven to move, thereby realizing automated operation.

[0016] Compared with the prior art, this utility model provides a device for calibrating measuring instruments using a vacuum gauge, which has the following beneficial effects:

[0017] 1. This device for calibrating and measuring instruments using a vacuum gauge can automatically clamp and release the vacuum gauge by controlling the electric telescopic rod, which in turn drives the positioning mechanism. The operation is very simple and quick, greatly improving calibration efficiency. Furthermore, the symmetrically designed positioning rod is precisely driven by a gear and rack mechanism, ensuring that the vacuum gauge is stably, concentrically, and evenly pressed against the shaft core position of the mounting slot. This guarantees the consistency of connection and sealing reliability for each installation, reducing human error.

[0018] 2. This device for calibrating and measuring instruments using a vacuum gauge replaces the traditional threaded tightening with a mechanical clamping and fixing method, avoiding the risk of damaging the precision interface of the vacuum gauge due to improper tightening force. At the same time, by using an electric telescopic rod as a power source, it can be easily integrated with an automated calibration system to achieve a fully automatic clamping and calibration process. Furthermore, the built-in tension spring ensures that the retaining ring automatically resets without external force, facilitating the handling of the vacuum gauge. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the device of this utility model;

[0020] Figure 2 This is a schematic diagram of the overall structure of the detection component of this utility model;

[0021] Figure 3 This is a top view schematic diagram of the overall structure of the detection component of this utility model;

[0022] Figure 4 This is a top view schematic diagram of the overall structure of the retaining component of this utility model;

[0023] Figure 5 This is a schematic diagram of the overall bottom structure of the positioning component of this utility model.

[0024] The attached diagram lists the components represented by each number as follows:

[0025] 1. Detection component; 11. Detection base; 12. Mounting slot; 121. Connecting slot; 122. Sleeve rod; 123. Limit button; 124. Tension spring; 125. Groove; 13. Detection mechanism; 131. Connecting joint; 132. Connecting head; 14. Positioning mechanism; 141. Sleeve; 142. Positioning rod; 143. Positioning hole; 144. Adjustment groove; 145. Toothed roller; 146. Adjustment gear;

[0026] 2. Retention assembly; 21. Retention ring; 211. Connecting block; 212. Supporting side plate; 22. Drive mechanism; 221. Linkage plate; 222. Drive rod; 223. Drive rack; 23. Electric telescopic rod. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] Example 1

[0029] Please see Figure 1 - Figure 5 As shown, the device for calibrating and measuring instruments for vacuum gauges proposed in this embodiment includes a core basic component: a detection assembly 1, which includes a detection base 11 made of metal material to ensure the stability of the device placement.

[0030] The detection base 11 has a cylindrical mounting groove 12 machined in the center for holding the vacuum gauge to be calibrated.

[0031] The coupling 131 of the detection mechanism 13 is installed at the shaft core position inside the mounting groove 12. The coupling 131 is a precision sealing interface (such as KF, CF flange or metal sealing ring) used to achieve a vacuum sealing connection with the inlet of the vacuum gauge. The side of the detection base 11 is provided with a connector 132. The connector 132 is connected to the coupling 131 through an internal channel. During calibration, the connector 132 is connected to the standard vacuum system or calibration chamber through a pipe.

[0032] To secure the vacuum gauge, two sets of positioning mechanisms 14 are symmetrically installed on the side of the detection base 11. Each positioning mechanism 14 includes a sleeve 141 that is horizontally fixed to the side of the base. A positioning rod 142 that can slide horizontally passes through the sleeve 141. The front end of the positioning rod 142 can be processed into an arc shape or a soft material (such as polytetrafluoroethylene) to better fit the vacuum gauge housing, increase resistance, and prevent scratches.

[0033] The key component for achieving the automatic clamping function is the retaining assembly 2, which includes a retaining ring 21 placed in the mounting groove 12. The retaining ring 21 is circular and its inner diameter is larger than that of the connector 131 but smaller than that of the outer flange of the vacuum gauge interface.

[0034] Meanwhile, two connecting blocks 211 are symmetrically fixed on the side of the retaining ring 21, and two supporting side plates 212 are symmetrically arranged at the bottom.

[0035] Two connecting grooves 121 are symmetrically machined on the side wall of the mounting groove 12. A vertical sleeve rod 122 is fixed in each connecting groove 121. A limit button 123 is fixed at the upper end of the sleeve rod 122. The retaining ring 21 is sleeved on the sleeve rod 122 through its connecting block 211 and can slide up and down along the sleeve rod 122.

[0036] Meanwhile, the supporting side plate 212 is opposite to the groove 125 at the bottom of the mounting groove 12. When the vacuum gauge is inserted into the retaining ring 21, the interface of the vacuum gauge fits on the supporting side plate 212, maintaining the horizontal position of the retaining ring 21 during downward displacement. A tension spring 124 is also sleeved on the sleeve rod 122. The upper end of the spring presses against the connecting block 211, and the lower end presses against the bottom of the connecting groove 121, providing continuous upward support force for the retaining ring 21.

[0037] Two vertical connecting plates 221 are symmetrically fixed to the top of the retaining ring 21. A drive rod 222 is fixed on each connecting plate 221. A drive rack 223 is fixed on the drive rod 222. When the retaining ring 21 moves up and down, it drives the drive rod 222 to move at the same time. Under the force of the drive rack 223 meshing with the regulating gear 146, the positioning rod 142 moves horizontally. Its front end is in close contact with the side of the vacuum gauge interface to fix the vacuum gauge and prevent it from loosening during calibration testing, which would affect the test data.

[0038] The working principle of the device for calibrating and measuring instruments for vacuum gauges proposed in this embodiment is as follows: During use, when the operator controls the retaining ring 21 to move downwards against the spring force, the drive rod 222 and drive rack 223 fixed to it also move downwards. The drive rack 223 meshes with the adjusting gear 146 installed on the outside of the sleeve 141. The rotation of the gear drives the toothed roller 145, which is coaxially fixed to it, to rotate. The toothed roller 145 then meshes with the tooth profile on one side of the adjusting groove 144 machined on the positioning rod 142. Therefore, the toothed roller 145... The rotation is ultimately converted into a horizontal linear movement of the positioning rod 142 toward the center of the mounting groove. Both positioning rods 142 extend inward simultaneously, pressing against the outer wall or flange of the vacuum gauge and firmly fixing it to the connector 131. At this time, the vacuum gauge is tested. After the test is completed, the vacuum gauge needs to be removed. By releasing the retaining ring 21, under the reverse release force of the tension spring 124, the retaining ring 21 returns to its original position upward. Through the reverse movement of the drive mechanism, the positioning rod 142 is driven to retract outward, releasing the fixation of the vacuum gauge, which can then be easily removed.

[0039] Example 2

[0040] Please see Figure 1 - Figure 5As shown, the device for calibrating and measuring instruments for vacuum gauges proposed in this embodiment, based on Embodiment 1, further includes the following: the power source for the retaining ring 21 is not manual pressing, but is provided by two sets of electric telescopic rods 23 symmetrically arranged inside the detection base 11. The output end of the electric telescopic rod 23 extends upward out of the top surface of the detection base 11 and is fixedly connected to the bottom of the linkage plate 221. By controlling the synchronous extension and retraction of the electric telescopic rods 23 through an external control system, the automatic lifting and lowering of the retaining ring 21 can be realized, thereby fully automating the clamping and releasing process of the vacuum gauge, which is particularly suitable for integration into an automated calibration production line.

[0041] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A device for calibrating measuring instruments using a vacuum gauge, characterized in that, The device includes a detection component (1), which includes a detection base (11) and a mounting groove (12) on the detection base (11). A detection mechanism (13) for calibrating and measuring a vacuum gauge is provided in the mounting groove (12). The detection assembly (1) also includes a positioning mechanism (14) provided on the side of the detection base (11) for fixing the vacuum gauge in the mounting groove (12). The detection component (1) is provided with a retaining component (2), which includes a retaining ring (21) that is movably sleeved in the mounting groove (12), and a driving mechanism (22) for driving the displacement movement of the positioning mechanism (14) is provided on the side of the retaining ring (21).

2. The apparatus for calibrating a vacuum gauge measuring instrument according to claim 1, characterized in that: Two connecting slots (121) are symmetrically opened in the mounting slot (12). A sleeve rod (122) is fixed in the connecting slot (121), and a limit button (123) is fixed at one end of the sleeve rod (122). The retaining ring (21) has two symmetrical connecting blocks (211) on its side. The connecting blocks (211) are movably sleeved on the side of the sleeve rod (122), and the connecting blocks (211) are attached to the bottom of the limit button (123) at a set height.

3. The apparatus for calibrating a vacuum gauge measuring instrument according to claim 2, characterized in that: The bottom of the mounting groove (12) has two symmetrical grooves (125), and the bottom of the retaining ring (21) has two symmetrical support plates (212). The support plates (212) fit into the grooves (125) at a set height.

4. The apparatus for calibrating a vacuum gauge measuring instrument according to claim 2, characterized in that: A tension spring (124) is movably sleeved on the side of the sleeve rod (122), and the two ends of the tension spring (124) are respectively attached to the corresponding surfaces of the connecting block (211) in the connecting groove (121).

5. The apparatus for calibrating a vacuum gauge measuring instrument according to claim 1, characterized in that: The detection mechanism (13) includes a connector (131) located at the core position inside the mounting groove (12) and a connector (132) located on the side of the detection base (11). The connector (131) and the connector (132) are connected.

6. The apparatus for calibrating a vacuum gauge measuring instrument according to claim 1, characterized in that: The positioning mechanism (14) includes two sleeves (141) symmetrically arranged on the side of the detection base (11) and passing through the mounting groove (12), and a positioning rod (142) is movably sleeved in the sleeve (141). The positioning mechanism (14) also includes positioning holes (143) symmetrically opened on the side of the retaining ring (21), and the positioning rod (142) is inserted into the positioning hole (143) and fits against the interface side of the vacuum gauge.

7. The apparatus for calibrating a vacuum gauge measuring instrument according to claim 6, characterized in that: The side of the positioning rod (142) has an adjustment groove (144) along its length direction. A toothed roller (145) is engaged in the adjustment groove (144). Both ends of the toothed roller (145) penetrate the side of the sleeve (141) and are fixed with adjustment gears (146).

8. The apparatus for calibrating a vacuum gauge measuring instrument according to claim 1, characterized in that: The drive mechanism (22) includes a connecting plate (221) symmetrically arranged on the top of the retaining ring (21), a drive rod (222) is arranged vertically at one end of the connecting plate (221), and a drive rack (223) is fixed along its length on the side of the drive rod (222). The drive rack (223) meshes with the regulating gear (146).

9. The apparatus for calibrating a vacuum gauge measuring instrument according to claim 1, characterized in that: The positioning assembly (2) includes two sets of electric telescopic rods (23) stacked inside the detection base (11). The output end of the electric telescopic rod (23) passes through the top of the detection base (11) and is fixed to the bottom of the linkage plate (221).

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