A gaseous pollutant monitoring device for a semiconductor clean room

Abstract

The utility model discloses a gaseous pollutant monitoring devices of semiconductor clean room gathers sample gas through the gas collection subassembly of setting in semiconductor dustless room, and the anion and cation in sample gas are dissolved as sample solution through the impact bottle, and the standard solution of different concentration gradient is diluted through the standard solution dilution subassembly, and the ion chromatography analyzer is through the responsivity of different concentration gradient standard solution to the anion and cation in sample solution, and establishes standard curve and carries out quantitative analysis, and calculates the concentration of anion and cation, realizes the monitoring to the gaseous pollutant that possibly exists in semiconductor clean room, and the equipment short circuit risk that the sample solution in impact bottle caused is effectively prevented through setting up the anti -suck back subassembly of the application, and the anti -suck back subassembly is directly set up in impact bottle, and compared with setting up anti -suck back bottle alone, saves material piece, and the anti -suck back effect is better, and the equipment is not easily affected by short circuit, prolongs the service life of equipment.

Description

Technical Field

[0001] This utility model belongs to the field of ion chromatography analysis technology and relates to the monitoring of semiconductor cleanrooms, specifically a device for monitoring gaseous pollutants in semiconductor cleanrooms. Background Technology

[0002] With the continuous advancement of semiconductor manufacturing processes, linewidth dimensions are shrinking, process complexity is increasing, and the cleanliness requirements for the production environment are becoming increasingly stringent. Airborne molecular contaminants (AMCs) have become one of the key factors affecting wafer yield. Among them, cations and anions (such as NH4+)... + Cl - SO4 2- Anions and cations (ACs, etc.) are important components of AMC (Anion and Cation Concentration Management). If deposited on the wafer surface, they can lead to defects, corrosion, or deterioration of film performance, thereby affecting device reliability and process stability. Therefore, real-time and accurate monitoring of cation and anion concentrations in the semiconductor cleanroom environment is crucial.

[0003] Ion chromatography (IC) is one of the mainstream technologies used for AMC monitoring. Based on the principle of liquid chromatography, it can efficiently separate and detect cations and anions. In quantitative analysis, the standard curve method is the most commonly used method, which involves establishing a response curve using standard solutions of different concentration gradients, and then calculating the ion concentration based on the sample's response signal. However, before using an ion chromatograph to detect cations and anions in a sample gas, it is necessary to dissolve them in water in a shock flask. This process can easily lead to liquid backflow, causing short circuits and shortening the equipment's lifespan. Utility Model Content

[0004] To address the technical problems existing in the background art, this utility model proposes a gaseous pollutant monitoring device for semiconductor cleanrooms. By setting up an anti-backflow component, it effectively prevents the risk of short circuit caused by backflow of sample solution in the impact bottle, thereby extending the service life of the equipment.

[0005] The objective of this utility model can be achieved through the following technical solutions:

[0006] A device for monitoring gaseous contaminants in a semiconductor cleanroom, comprising:

[0007] A gas collection component is installed inside the semiconductor cleanroom to collect sample gases within the cleanroom.

[0008] The impact bottle is connected to the gas collection component to dissolve the anions and cations in the sample gas to obtain a sample solution. The impact bottle is equipped with an anti-backflow component to prevent the sample solution from being drawn back and overflowing into the impact bottle.

[0009] An ion chromatograph, connected to an impact bottle assembly, establishes a standard curve for quantitative analysis by measuring the response of standard solutions of different concentration gradients to anions and cations in the sample solution.

[0010] The standard solution dilution assembly is connected to the ion chromatograph and is used to dilute standard solutions of different concentration gradients and introduce them into the ion chromatograph.

[0011] Furthermore, one end of the impact bottle is connected to the gas collection component, and the other end is connected to the ion chromatograph. The impact bottle contains a fixed volume of ultrapure water, a second nitrogen pipeline is connected to the top of the impact bottle, and a drain port is provided at the bottom of the impact bottle.

[0012] Furthermore, the impact bottle is equipped with a liquid level sensor, and the impact bottle is connected to an ultrapure water storage bottle via a third flow pump.

[0013] Furthermore, the anti-backflow component includes: a first spiral tube and a leakage sensor. The first spiral tube is positioned above the impact bottle, with one end connected to the top of the impact bottle and the other end being a sealed structure. The leakage sensor is installed at the connection between the first spiral tube and the impact bottle.

[0014] Furthermore, the gas acquisition component includes: multiple monitoring nodes, a switching valve, and a vacuum pump. The multiple monitoring nodes are evenly distributed in the semiconductor cleanroom. Each monitoring node is connected to the switching valve through a PFA pipeline. The switching valve is connected to the vacuum pump, and the vacuum pump is connected to the impact bottle.

[0015] Furthermore, the standard solution dilution assembly includes a standard solution dilution bottle, a standard solution mother liquor bottle, and an ultrapure water storage bottle. The standard solution dilution bottle is connected to the standard solution mother liquor bottle via a first flow pump, and the standard solution dilution bottle is connected to the ultrapure water storage bottle via a second flow pump. The ion chromatograph is connected to the standard solution dilution bottle via a liquid extraction pump.

[0016] Furthermore, the top of the standard solution dilution bottle is connected to a first nitrogen gas line, and the bottom of the standard solution dilution bottle is equipped with a bubbler. The first nitrogen gas line is inserted into the bottom of the standard solution dilution bottle and connected to the bubbler.

[0017] Furthermore, a second spiral tube is provided at the top of the standard solution dilution bottle, with one end of the second spiral tube inserted into the standard solution dilution bottle and communicating with it.

[0018] Furthermore, the monitoring device also includes a detector, which is communicatively connected to an ion chromatograph and outputs the data of anions and cations in the form of a report based on the quantitative analysis results of the ion chromatograph.

[0019] The beneficial effects of this utility model are as follows: The gaseous pollutant monitoring device for semiconductor cleanrooms provided in this application collects sample gas through a gas collection component installed inside the semiconductor cleanroom. An anion and cation in the sample gas are dissolved into a sample solution using an impact bottle. Standard solutions of different concentration gradients are diluted using a standard solution dilution component. An ion chromatograph establishes a standard curve for quantitative analysis based on the response of the standard solutions of different concentration gradients to the anions and cations in the sample solution, calculating the concentrations of the anions and cations. This enables the monitoring of gaseous pollutants that may exist in the semiconductor cleanroom. Furthermore, by incorporating an anti-backflow component, this application effectively prevents the risk of short circuits caused by the backflow of sample solution from the impact bottle. The anti-backflow component is directly installed inside the impact bottle, which saves materials compared to a separate anti-backflow bottle, provides better anti-backflow performance, protects the equipment from short circuits, and extends the equipment's service life. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the present invention.

[0021] Figure 2 This is a schematic diagram of the impact bottle assembly of this utility model.

[0022] Figure 3 This is a schematic diagram of the standard dilution bottle of this utility model. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0024] like Figure 1As shown, this utility model provides a gaseous contaminant monitoring device for a semiconductor cleanroom, including: a gas collection component, an impact bottle, a standard solution dilution bottle, an ion chromatograph, and a detector. The gas collection component is installed inside the semiconductor cleanroom to collect the gas inside as a sample gas. The impact bottle is connected to the gas collection component to dissolve the anions and cations in the sample gas collected by the gas collection component in water to obtain a sample solution. The standard solution dilution component is connected to the ion chromatograph to dilute standard solutions of different concentration gradients and introduce them into the ion chromatograph. The ion chromatograph is connected to the impact bottle component and establishes a standard curve for quantitative analysis based on the response of the standard solutions of different concentration gradients to the anions and cations in the sample solution, thereby calculating the concentrations of anions and cations. The detector is communicatively connected to the ion chromatograph and outputs the anion and cation data in report form based on the quantitative analysis results of the ion chromatograph to determine whether the levels exceed limits. If the levels exceed limits, retesting and investigation of the cause are required.

[0025] The gas acquisition component includes: multiple monitoring nodes CH01, CH02, ..., a switching valve, and a vacuum pump. The multiple monitoring nodes are evenly distributed within the semiconductor cleanroom. Due to process requirements, each monitoring node is connected to a switching valve via a PFA pipeline. The switching valve is connected to the vacuum pump, and the vacuum pump is connected to the impact bottle assembly. This allows for the selective acquisition of gas near any monitoring node within the semiconductor cleanroom and its delivery to the impact bottle assembly for dissolution. Specifically, the switching valve controls the monitoring node from which sample gas is extracted, and the flow rate and time of the vacuum pump are controlled to extract a preset volume of sample gas from the vicinity of the corresponding monitoring node.

[0026] like Figure 2 As shown, the impact bottle contains a fixed volume of ultrapure water. One end of the impact bottle is connected to a gas collection assembly, which introduces the collected sample gas into the ultrapure water within the impact bottle to dissolve it, obtaining a sample solution. Bubbling of the sample gas in the water increases the contact area, improving the efficiency of dissolving anions and cations in the sample gas in water. The other end of the impact bottle is connected to an ion chromatograph. A second nitrogen line is connected to the top of the impact bottle, and a drain port is located at the bottom. Driven by N2 introduced through the second nitrogen line, a portion of the sample solution in the impact bottle is transported to the ion chromatograph for detection, while excess sample solution is discharged into the waste liquid through the drain port.

[0027] The impact bottle is equipped with a liquid level sensor. The impact bottle is connected to an ultrapure water storage bottle through a third flow pump. The liquid level sensor collects the liquid level data of the ultrapure water in the impact bottle in real time, and the third flow pump controls the flow rate and time of the ultrapure water entering the impact bottle to ensure that the volume of ultrapure water dissolving the sample gas is constant, the environmental concentration is more accurate, and inaccurate measurements are avoided due to liquid level sensor failure.

[0028] The impact flask is also equipped with an anti-backflow component, which includes a first helical tube and a leakage sensor. The first helical tube is positioned above the impact flask, with one end connected to the top of the flask and the other end being a sealed structure. The leakage sensor is installed at the connection between the first helical tube and the impact flask. When backflow occurs in the sample solution within the impact flask, the overflowing sample solution will enter the first helical tube. Because the top of the first helical tube is sealed, the sample solution will flow back into the impact flask under the influence of gravity and centrifugal force, preventing it from overflowing into the equipment and causing a short circuit. Simultaneously, the leakage sensor will detect the overflowing sample solution and issue an alarm signal, prompting the operator to stop the machine immediately.

[0029] like Figure 3 As shown, the standard solution dilution bottle is connected to the standard solution stock bottle via a first flow pump to quantitatively draw the standard solution stock solution from the stock bottle. The standard solution dilution bottle is connected to the ultrapure water storage bottle via a second flow pump to quantitatively draw ultrapure water from the ultrapure water storage bottle, ensuring thorough mixing of the standard solution stock solution and ultrapure water within the standard solution dilution bottle. Taking the analysis of ammonium ions as an example, an ammonium standard solution stock solution of 12 ppb needs to be diluted to concentration gradients of 0.1, 0.5, 1.0, 1.5, 2.0, and 2.5 ppb. Specifically, when diluting the 12 ppb ammonium standard solution stock solution to 18 ml of 2.0 ppb ammonium standard solution, the flow rate and time of the first flow pump are controlled to ensure that the volume of the 12 ppb standard solution stock solution entering the standard solution dilution bottle is 3 ml, and the flow rate and time of the second flow pump are controlled to ensure that the volume of ultrapure water entering the standard solution dilution bottle is 15 mL.

[0030] The standard solution dilution bottle has a first nitrogen line connected to its top and a bubbler at its bottom. The first nitrogen line is inserted into the bottom of the bottle and connected to the bubbler. N2 is introduced into the bottle through the first nitrogen line, and the bubbler agitates the solution by controlling the flow rate and time of the N2, ensuring uniform mixing of the standard solution stock solution and ultrapure water and guaranteeing accurate dilution concentration. Simultaneously, to prevent excessive bubbling, a second spiral tube is installed at the top of the bottle. One end of the second spiral tube is inserted into the bottle and connected to it. This allows the diluted standard solution to be subjected to centrifugal force within the second spiral tube, causing the liquid to move towards the outer wall of the tube, forming a combined axial and vertical flow. Based on fluid dynamics equilibrium, this process of repeated mixing and settling of the diluted standard solution prevents overflow from the bottle while maintaining the correct dilution concentration.

[0031] The ion chromatograph is connected to a standard solution dilution bottle via a pump to draw standard solutions of different concentration gradients from the bottle. After the sample solution in the bottle is injected into the ion chromatograph, different anions and cations will have a certain response. Based on the different response areas of the standard solutions of different concentration gradients, a standard curve is established. The sample solution is then quantified according to the standard curve to calculate the concentration of anions and cations.

[0032] The above description is merely an example and illustration of the structure of this utility model. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of this utility model.

Claims

1. A device for monitoring gaseous contaminants in a semiconductor cleanroom, characterized in that, include; A gas collection component is installed inside the semiconductor cleanroom to collect sample gases within the cleanroom. The impact bottle is connected to the gas collection component to dissolve the anions and cations in the sample gas to obtain a sample solution. The impact bottle is equipped with an anti-backflow component to prevent the sample solution from being drawn back and overflowing into the impact bottle. An ion chromatograph, connected to an impact bottle assembly, establishes a standard curve for quantitative analysis by measuring the response of standard solutions of different concentration gradients to anions and cations in the sample solution. The standard solution dilution assembly is connected to the ion chromatograph and is used to dilute standard solutions of different concentration gradients and introduce them into the ion chromatograph.

2. The monitoring device according to claim 1, characterized in that, One end of the impact bottle is connected to the gas collection component, and the other end is connected to the ion chromatograph. The impact bottle contains a fixed volume of ultrapure water. A second nitrogen line is connected to the top of the impact bottle, and a drain port is provided at the bottom of the impact bottle.

3. The monitoring device according to claim 2, characterized in that, The impact bottle is equipped with a liquid level sensor and is connected to an ultrapure water storage bottle via a third flow pump.

4. The monitoring device according to claim 1, characterized in that, The anti-backflow assembly includes: a first spiral tube and a leakage sensor. The first spiral tube is positioned above the impact bottle, with one end connected to the top of the impact bottle and the other end being a sealed structure. The leakage sensor is installed at the connection between the first spiral tube and the impact bottle.

5. The monitoring device according to claim 1, characterized in that, The gas acquisition component includes: multiple monitoring nodes, switching valves, and a vacuum pump. The multiple monitoring nodes are evenly distributed in the semiconductor cleanroom. Each monitoring node is connected to a switching valve through a PFA pipeline. The switching valve is connected to the vacuum pump, and the vacuum pump is connected to an impact bottle.

6. The monitoring device according to claim 1, characterized in that, The standard solution dilution assembly includes a standard solution dilution bottle, a standard solution stock solution bottle, and an ultrapure water storage bottle. The standard solution dilution bottle is connected to the standard solution stock solution bottle via a first flow pump, and the standard solution dilution bottle is connected to the ultrapure water storage bottle via a second flow pump. The ion chromatograph is connected to the standard solution dilution bottle via a liquid extraction pump.

7. The monitoring device according to claim 6, characterized in that, The standard solution dilution bottle is connected to a first nitrogen line at the top and a bubbler at the bottom. The first nitrogen line is inserted into the bottom of the standard solution dilution bottle and connected to the bubbler.

8. The monitoring device according to claim 7, characterized in that, The standard solution dilution bottle is equipped with a second spiral tube at the top, one end of which is inserted into the standard solution dilution bottle and connected to it.

9. The monitoring device according to claim 1, characterized in that, It also includes a detector, which is connected to the ion chromatograph and outputs the anion and cation data in report form based on the quantitative analysis results of the ion chromatograph.

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