Automatic substrate cassette feeding device

Abstract

The application provides an automatic substrate cassette feeding device, and relates to the technical field of semiconductor substrate material manufacturing, and comprises a transmission assembly, a guide assembly and a baffle. The transmission assembly comprises a conveying belt, at least two rotating wheels arranged at intervals and a driving mechanism. The conveying belt is sleeved between the two rotating wheels, and the driving mechanism is used for driving the conveying belt to move. The guide assembly comprises a guide piece. The conveying belt is provided with the guide piece on both sides in the conveying direction. The two guide pieces define a placing groove. The baffle is arranged at the end of the placing groove. In the application, the conveying belt can apply a force to the substrate cassette towards the side of the baffle. The force can push the substrate cassette to move towards the side of the baffle and continuously apply the force to the substrate cassette, so that the substrate cassette is pressed on the baffle. Therefore, the substrate cassettes are closely arranged, and space is saved.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor substrate material manufacturing, and particularly to an automatic cassette feeding device for substrate cassettes. Background Art

[0002] In related technologies, indium phosphide substrates have an application market in the field of radio frequency devices such as manufacturing high-frequency and high-power devices, fiber optic communication, wireless transmission, and radio astronomy. Radio frequency devices manufactured using indium phosphide substrates have shown excellent performance in application scenarios such as satellites and radars. They have strong competitiveness in the radio frequency front-end of radar and communication systems and analog / high-speed data processing, high-precision broadband A / D conversion, etc. In addition, indium phosphide-based radio frequency device-related devices such as low-noise amplifiers, modules, and receivers are also widely used in equipment such as satellite communication, millimeter-wave radar, active and passive millimeter-wave imaging, etc. At a bandwidth level above 100 GHz, indium phosphide-based radio frequency devices have obvious advantages in wireless transmission in backhaul networks and point-to-point communication networks. In the future, in 6G communication or even 7G communication wireless transmission networks, indium phosphide substrates are expected to become the mainstream substrate materials for radio frequency devices.

[0003] During the manufacturing process of indium phosphide substrates, the substrate wafers need to be transported in substrate cassettes. In existing solutions, the substrate cassette conveying device usually transports multiple substrate cassettes simultaneously, and the substrate cassettes are placed loosely between each other, occupying a relatively large amount of space. Utility Model Content

[0004] This application aims to solve at least one of the technical problems existing in the prior art. For this reason, this application proposes an automatic cassette feeding device for substrate cassettes, which can continuously apply a force to the substrate cassette to press the substrate cassette tightly, facilitating space saving.

[0005] An embodiment of this application provides an automatic cassette feeding device for substrate cassettes, including:

[0006] A transmission component, including a conveyor belt, at least two rotating wheels arranged at intervals, and a driving mechanism. The conveyor belt is sleeved between the two rotating wheels, and the driving mechanism is used to drive the conveyor belt to move;

[0007] A guiding component, including a guiding member. The guiding members are arranged on both sides of the conveyor belt along the conveying direction, and the two guiding members define a placement groove;

[0008] A baffle, arranged at the end of the placement groove.

[0009] Further, the driving mechanism includes a linear driving structure, a connecting column, and a pressing plate. The output end of the linear driving structure is connected to the connecting column, and the connecting column cooperates with the pressing plate. The conveyor belt is clamped between the connecting column and the pressing plate.

[0010] Further, the linear driving structure includes a rodless cylinder.

[0011] Further, the conveyor belt is a synchronous belt, the rotating wheel is a synchronous pulley, and the conveyor belt matches the rotating wheel.

[0012] Further, there are two conveyor belts, and the two conveyor belts are arranged in parallel. Two conveyor belts respectively abut against the workpiece placed on the placing groove.

[0013] Further, the guiding member has a first supporting portion, and the supporting portion is inclined.

[0014] Further, the guiding member includes a second supporting portion. The second supporting portion is arranged at an angle with the first supporting portion, and the second supporting portion is located below the conveyor belt.

[0015] Further, a supporting platform is further included, and the guiding member is installed on the supporting platform.

[0016] Further, the supporting platform is provided with a clearance groove, and the connecting column passes through the clearance groove to be connected to the conveyor belt.

[0017] Further, the conveyor belt is arranged horizontally.

[0018] As can be seen from the above technical solutions, the embodiments of the present application at least have the following beneficial effects:

[0019] In the automatic box feeding device provided by the embodiments of the present application, two guiding members define a placing groove for placing a film cassette. A conveyor belt is arranged in the placing groove. After the film cassette is placed in the placing groove, the film cassette can abut against the conveyor belt. The driving mechanism drives the conveyor belt to move, and can drive the film cassette to move toward the baffle side through the conveyor belt, and apply a force toward the baffle side to the film cassette through the conveyor belt. In this way, the film cassette can be pressed against the baffle, and at the same time, a certain pressing force is maintained on the film cassette. In this way, each film cassette can be closely arranged in the placing groove, which is beneficial to saving space. Description of the Drawings

[0020] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0021] Figure 1 It is a working schematic diagram of an automatic box feeding device provided by an embodiment of the present application;

[0022] Figure 2 It is a structural schematic diagram of an automatic box feeding device provided by an embodiment of the present application;

[0023] Figure 3 It is a top view schematic diagram of an automatic box feeding device provided by an embodiment of the present application.

[0024] Reference numerals:

[0025] 1. Liner film cassette;

[0026] 110. Conveyor belt; 120. Rotating wheel; 130. Driving mechanism; 131. Linear driving structure; 132. Connecting column; 133. Pressing plate;

[0027] 210. Guide member; 211. Placing groove; 212. First supporting portion; 213. Second supporting portion;

[0028] 300. Baffle;

[0029] 400. Support table; 410. Clearance groove. Detailed implementation manners

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, rather than all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope protected by the present application.

[0031] See Figures 1 to 3 As shown, an embodiment of the present application discloses an automatic box feeding device, including a transmission component, a guiding component and a baffle 300.

[0032] Specifically, the transmission component includes a conveyor belt 110, at least two rotating wheels 120 arranged at intervals, and a driving mechanism 130. The conveyor belt 110 is sleeved between the two rotating wheels 120, and the driving mechanism 130 is used to drive the conveyor belt 110 to move; the guiding component includes a guiding member 210. Guiding members 210 are arranged on both sides of the conveyor belt 110 along the conveying direction, and the two guiding members 210 define a placement groove 211. Among them, the conveyor belt 110 is located in the placement groove 211; the baffle 300 is arranged at the end of the placement groove 211.

[0033] It should be understood that when the film cassette 1 is placed in the placement groove 211, the film cassette 1 can abut against the conveyor belt 110. Thus, when the conveyor belt 110 rotates, the conveyor belt 110 can drive the film cassette 1 to move toward the side of the baffle 300.

[0034] In the automatic cassette feeding device provided by the embodiment of the present application, the two guiding members 210 define a placement groove 211 for placing the film cassette 1. Among them, a conveyor belt 110 is arranged in the placement groove 211. After the film cassette 1 is placed in the placement groove 211, the film cassette 1 can abut against the conveyor belt 110. The driving mechanism 130 drives the conveyor belt 110 to move, and can drive the film cassette 1 to move toward the side of the baffle 300 through the conveyor belt 110, and at the same time apply a force toward the side of the baffle 300 to the film cassette 1. This force can make the film cassette 1 be pressed tightly against the baffle 300 and keep a certain pressing force on the film cassette 1. Thus, each film cassette can be closely arranged in the placement groove, which is beneficial to saving space.

[0035] In some embodiments of the present application, refer to Figures 1 to 3 , the driving mechanism 130 includes a linear driving structure 131, a connecting column 132 and a pressing plate 133. The output end of the linear driving structure 131 is connected to the connecting column 132, and the connecting column 132 cooperates with the pressing plate 133. Among them, the conveyor belt 110 is clamped between the connecting column 132 and the pressing plate 133. Among them, the output end of the linear driving structure 131 can drive the connecting column 132 to move in the positive or negative direction along the X direction. Since the conveyor belt 110 is relatively fixed with the connecting column 132 through the pressing plate 133, thus, the output end of the linear driving structure 131 can drive the conveyor belt 110 to rotate by driving the connecting column 132 to move along the X direction.

[0036] In a possible implementation manner, please continue to refer to Figures 1 to 3, the connecting column 132 and the pressing plate 133 are connected to the lower half of the annular conveyor belt 110 sleeved on the rotating wheel 120. When the output end of the linear driving structure 131 drives the connecting column 132 to move in the opposite direction of the X direction, the conveyor belt 110 can drive the cassette 1 in the placement groove 211 to move toward the baffle 300 side, so that the cassette 1s are closely arranged.

[0037] Furthermore, the linear driving structure 131 includes a rodless cylinder, and the output end of the rodless cylinder is fixedly connected to the connecting column 132. Among them, the extending direction of the output end of the rodless cylinder is parallel to the X direction.

[0038] In some embodiments of the present application, refer to Figures 1 to 3 , the conveyor belt 110 is a synchronous belt, the rotating wheel 120 is a synchronous pulley, and the conveyor belt 110 is matched with the rotating wheel 120. Among them, the rotating wheel 120 is provided with a groove matching the synchronous belt, and the synchronous belt is arranged in the groove. Thus, when the cassette 1 abuts against the conveyor belt 110, the groove in the rotating wheel 120 can limit the axial movement of the conveyor belt 110 along the rotating wheel 120, and the conveyor belt 110 can be held in a set position, which is beneficial to ensuring the stability of the acting force of the conveyor belt 110 on the cassette 1.

[0039] It should be understood that the number of conveyor belts 110 can be set correspondingly according to actual needs.

[0040] In some embodiments of the present application, refer to Figures 1 to 3 , there are two conveyor belts 110, and the two conveyor belts 110 are arranged in parallel. Among them, the two conveyor belts 110 respectively abut against the cassette 1 placed on the placement groove 211. Specifically, two grooves are arranged at intervals on the rotating wheel 120, and the two conveyor belts 110 are respectively sleeved in the two grooves.

[0041] In some other embodiments, each conveyor belt 110 is connected in cooperation with a corresponding rotating wheel 120.

[0042] In some embodiments of the present application, refer to Figure 1 and Figure 2 , the guiding member 210 has a first supporting portion 212, and the first supporting portion 212 is inclined. Specifically, the upper end of the first supporting portion 212 is inclined outward. The first supporting portion 212 can provide support for the cassette 1 placed in the placement groove 211, avoiding the entire weight of the cassette 1 pressing on the conveyor belt 110. When the conveyor belt 110 drives the cassette 1 to move in the X direction, the first supporting portion 212 can provide guidance for the movement of the cassette 1.

[0043] In some embodiments of the present application, refer to Figure 1 and Figure 2, the guiding member 210 includes a second supporting portion 213. The second supporting portion 213 is disposed at an angle with the first supporting portion 212, and the second supporting portion 213 is located below the conveyor belt 110. When the lining film cassette 1 is placed in the placement groove 211, the lining film cassette 1 abuts against the conveyor belt 110. Due to the gravitational force of the lining film cassette 1, the conveyor belt 110 is squeezed downward and abuts against the second supporting portion 213. At this time, the second supporting portion 213 provides support for the conveyor belt 110, which can avoid the situation that the conveyor belt 110 is damaged due to excessive squeezing by the lining film cassette 1.

[0044] In some embodiments of the present application, refer to Figures 1 to 3 , the automatic cassette feeding device further includes a support table 400. The guiding member 210 is installed on the support table 400, and the end of the guiding member 210 is installed on the baffle 300. In addition, the rotating wheel 120 is rotatably installed on the support table 400 through a mounting seat. There are at least two rotating wheels 120, and the two rotating wheels 120 are arranged at intervals; the conveyor belt 110 is sleeved on the two rotating wheels 120.

[0045] In this embodiment, two guiding members 210 are arranged at intervals on the support table 400, and the two guiding members 210 define the placement groove 211, wherein there is a gap between the two guiding members 210. <​​​​​​​​​​, the conveyor belt 110 is horizontally arranged. When applying an extrusion force to the lining film cassette 1, the conveyor belt 110 does not need to do work to overcome the gravity of the lining film cassette 1. Only by driving the conveyor belt 110 to rotate can the lining film cassette 1 be driven to move toward the baffle 300, thereby applying a force to the lining film cassette 1, which helps to simplify the structure of the automatic cassette feeding device.

[0049] It should be understood that in the embodiments of the present application, the automatic cassette feeding device can also be used to convey other workpieces. By applying a force to the workpiece through the conveyor belt, the workpiece is made to abut against the baffle, and a certain extrusion force is applied to the workpiece, so that the workpieces are closely arranged to achieve the purpose of saving space.

[0050] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0051] The terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, unless otherwise specified, the meaning of "plurality" is two or more.

[0052] In the description of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "mounted", "connected" and "connected" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection or an integral connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations. .

[0053] In the description of this specification, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0054] It should be understood that although the steps in the flowchart of the accompanying drawings are shown sequentially in the direction of the arrows, these steps are not necessarily executed sequentially in the order indicated by the arrows. Unless there is a clear indication in this document, there is no strict order restriction for the execution of these steps, and they can be executed in other orders. Moreover, at least a part of the steps in the flowchart of the accompanying drawings may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily executed at the same time, but can be executed at different times, and their execution order is not necessarily sequential, but can be executed alternately or in turn with at least a part of other steps or sub-steps or stages of other steps.

Claims

1. An automatic substrate cassette feeding device, characterized in that, include: The transmission assembly includes a conveyor belt, at least two rotating wheels spaced apart, and a drive mechanism. The conveyor belt is sleeved between the two rotating wheels, and the drive mechanism is used to drive the conveyor belt to move. A guiding assembly includes guide members, wherein the guide members are provided on both sides of the conveyor belt along the conveying direction, and the two guide members define a placement groove, wherein the conveyor belt is located in the placement groove; A baffle is provided at the end of the placement slot.

2. The automatic box feeding device according to claim 1, characterized in that, The driving mechanism includes a linear drive structure, a connecting column, and a pressure plate. The output end of the linear drive structure is connected to the connecting column, and the connecting column cooperates with the pressure plate. The conveyor belt is sandwiched between the connecting column and the pressure plate.

3. The automatic box feeding device according to claim 2, characterized in that, The linear drive structure includes a rodless cylinder, and the output end of the rodless cylinder is fixedly connected to the connecting column.

4. The automatic box feeding device according to any one of claims 1 to 3, characterized in that, The conveyor belt is a synchronous belt, the rotating wheel is a synchronous wheel, and the conveyor belt is matched with the rotating wheel.

5. The automatic box feeding device according to claim 4, characterized in that, The conveyor belt has two belts, which are arranged in parallel, and each belt abuts against a substrate cassette placed on the placement groove.

6. The automatic box feeding device according to claim 1, characterized in that, The guide member has a first support portion, which is inclined.

7. The automatic box feeding device according to claim 6, characterized in that, The guide includes a second support portion, which is arranged at an angle to the first support portion and is located below the upper half of the conveyor belt.

8. The automatic box feeding device according to claim 1, characterized in that, It also includes a support platform, on which the conveyor belt, the rotating wheel and the guide are mounted.

9. The automatic box feeding device according to claim 8, characterized in that, The support platform is provided with a clearance groove, the drive mechanism is installed on the side of the support platform away from the rotating wheel, and the connecting column passes through the clearance groove and is connected to the conveyor belt.

10. The automatic box feeding device according to claim 1, characterized in that, The conveyor belt is set horizontally.

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