Ventilation device for processing diffusion of silicon rectifier chip

Abstract

This utility model discloses a ventilation device for diffusion in silicon rectifier chip processing, belonging to the technical field of ventilation equipment. It includes a ventilation duct with rectangular slots on both sides; and a filter assembly comprising a U-shaped moving block that passes through two rectangular slots and is slidably connected to the inner walls of the slots. The U-shaped moving block has two rectangular positioning slots at its bottom and two rectangular slots at its top. Two filters are disposed on the inner side of the U-shaped moving block. This device addresses usability issues by incorporating a filter assembly, enabling efficient filtration of air during intake. The two limiting components facilitate convenient filter maintenance, and the switching between the two filters ensures continuous ventilation even during maintenance, demonstrating good practicality.

Description

Technical Field

[0001] This utility model relates to the field of ventilation equipment technology, and in particular to a ventilation device for diffusion in silicon rectifier chip processing. Background Technology

[0002] A silicon rectifier chip is a semiconductor device made of silicon material. During the processing of silicon rectifier chips, the diffusion process has extremely high requirements for gas cleanliness. Therefore, the filtration performance of the ventilation device directly affects the quality and yield of the chip.

[0003] Currently, existing ventilation devices use bolted connections or complex snap-fit ​​structures to fix the filters. This fixing method is cumbersome and requires a lot of time and manpower for installation and subsequent maintenance and disassembly. In addition, these ventilation devices often need to be shut down when maintaining the filters, which will undoubtedly affect the progress of the entire production process. Therefore, to solve these problems, we need to consider designing a ventilation device for diffusion in silicon rectifier chip processing. Utility Model Content

[0004] The purpose of this utility model is to address the shortcomings of existing technologies by proposing a ventilation device for diffusion in silicon rectifier chip processing. Addressing usage issues, it incorporates a filter assembly to achieve efficient filtration of the gas during intake. Furthermore, two limiting components facilitate convenient maintenance of the filter. By switching between the two filters, the continuous ventilation operation can be ensured even during maintenance, demonstrating good practicality.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A ventilation device for diffusion in silicon rectifier chip processing includes a ventilation duct with rectangular slots on both its left and right sides; a filter assembly comprising a U-shaped moving block that passes through two rectangular slots and is slidably connected to the inner walls of the two rectangular slots; two rectangular positioning slots on the inner bottom of the U-shaped moving block and two rectangular slots on the inner top of the U-shaped moving block; and two filters disposed on the inner side of the U-shaped moving block; and two limiting components located on the left and right sides of the U-shaped moving block, each limiting component comprising a fixing block fixedly connected to the side wall of the U-shaped moving block, a rectangular limiting block disposed on the rear side of the fixing block, and two connecting rods fixedly connected to the front side of the rectangular limiting block. The front ends of the two connecting rods pass through the fixing block and are jointly fixedly connected to a handle, and the fixing block and the rectangular limiting block are elastically connected by two springs.

[0006] Preferably, the lower ends of both filters are slidably connected to the inner wall of the corresponding rectangular positioning groove.

[0007] Preferably, the upper ends of both filters are slidably connected to the inner wall of the corresponding rectangular slot.

[0008] Preferably, the filter located on the right side is inside the ventilation duct, and the upper end of the filter located on the right side is attached to the inner top of the ventilation duct.

[0009] Preferably, a loop-shaped connecting block is fixedly connected to both the left and right sides of the ventilation duct, and the rectangular limiting block located on the right side penetrates the inner side of the corresponding loop-shaped connecting block.

[0010] Preferably, both rectangular limiting blocks are engaged with corresponding loop-shaped connecting blocks.

[0011] Compared with the prior art, the advantages of this utility model are as follows: A filter assembly is installed, and through multi-stage filtration, the cleanliness of the gas can be effectively ensured, thereby improving the processing quality and yield of silicon rectifier chips. At the same time, the two filters can be switched by moving the H-shaped moving block. With the help of two limiting components to limit the H-shaped moving block, ventilation can be continued while maintaining one of the filters, ensuring actual processing efficiency. The installation, removal and maintenance of the filters are also relatively convenient, reducing the workload of maintenance. Overall, it has good practicality. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of a ventilation device for diffusion in silicon rectifier chip processing proposed in this utility model; Figure 2 for Figure 1 Enlarged view of point A; Figure 3 for Figure 1 A schematic diagram of the structure after removing the filter component and the two limiting components; Figure 4 This is a structural diagram of the filter assembly and the two limiting assemblies; Figure 5 for Figure 4 A cross-sectional view of the middle section of the structure.

[0013] In the diagram: 1. Ventilation duct, 2. Rectangular channel, 3. H-shaped moving block, 4. Rectangular positioning slot, 5. Rectangular slot, 6. Filter, 7. Fixing block, 8. Rectangular limiting block, 9. Connecting rod, 10. Handle, 11. Spring, 12. U-shaped connecting block. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0015] Reference Figures 1-5 A ventilation device for diffusion in silicon rectifier chip processing includes a ventilation duct 1, with an air inlet at the front. A fan (not shown) is also installed inside the ventilation duct 1, located behind the filter assembly, to ensure stable ventilation. Rectangular slots 2 are provided on both the left and right sides of the ventilation duct 1, and sealing rings (not shown) are installed in both rectangular slots 2 to ensure the airtightness of the ventilation operation. A U-shaped connecting block 12 is fixedly connected to both the left and right sides of the ventilation duct 1. A rectangular limiting block 8 located on the right side penetrates the inner side of the corresponding U-shaped connecting block 12 to ensure the stability of the H-shaped moving block 3. The system also includes a filter assembly, which comprises a U-shaped movable block 3. The U-shaped movable block 3 passes through two rectangular channels 2 and is slidably connected to the inner walls of the two rectangular channels 2. Moving the U-shaped movable block 3 left and right moves two filters 6, allowing for switching between the two filters 6. This ensures continuous ventilation even when one filter 6 needs maintenance. The U-shaped movable block 3 has two rectangular positioning grooves 4 at its inner bottom and two rectangular slots 5 at its inner top. Two filters 6 are installed inside the U-shaped movable block 3. Each filter 6 contains multiple layers of graded filters, from front to back: a primary filter (made of non-woven fabric, capable of intercepting large amounts of pollutants). The filters 6 contain particulate matter, hair, fibers, and other contaminants. The medium-efficiency filter (made of glass fiber, capable of capturing some smaller particles such as process dust) and the high-efficiency filter (made of ultra-fine glass fiber paper, ensuring a dust-free silicon wafer processing environment and preventing particulate contamination that could lead to device failure) have their lower ends slidably connected to the inner wall of the corresponding rectangular positioning groove 4, and their upper ends slidably connected to the inner wall of the corresponding rectangular slot 5. The rectangular positioning groove 4, in conjunction with the rectangular slot 5, can initially fix the filters 6. The filter 6 on the right is located inside the ventilation duct 1, and its upper end is fitted against the inner top of the ventilation duct 1, ensuring stable fixation of the filter 6 within the ventilation duct 1. The system also includes two limiting components, which are located on the left and right sides of the H-shaped moving block 3, respectively. Each limiting component includes a fixing block 7 fixedly connected to the side wall of the H-shaped moving block 3. A rectangular limiting block 8 is provided on the rear side of the fixing block 7. Both rectangular limiting blocks 8 cooperate with the corresponding loop connecting blocks 12. Two connecting rods 9 are fixedly connected to the front side of the rectangular limiting blocks 8. The front ends of the two connecting rods 9 pass through the fixing block 7 and are jointly fixedly connected to a handle 10. The fixing block 7 and the rectangular limiting blocks 8 are elastically connected by two springs 11. The springs 11 can ensure that the rectangular limiting blocks 8 stably pass through the loop connecting blocks 12, thereby ensuring the stable fixation of the H-shaped moving block 3.

[0016] In this invention, when in use, by activating the fan inside the ventilation duct 1, air can enter from the air inlet at the front of the ventilation duct 1, and then be discharged after passing through the multi-stage filtration of the filter 6 inside the ventilation duct 1. In this way, the cleanliness of the gas is ensured through multi-stage filtration, thereby ensuring the processing quality and yield of the silicon rectifier chip. After continuous processing for a period of time, the filter 6 in the ventilation duct 1 needs to be maintained. At this time, the handle 10 on the right can be pulled forward, and the rectangular limit block 8 can be moved forward through the two connecting rods 9, so that the rectangular limit block 8 is completely disengaged from the right-side loop connecting block 12, thereby releasing the restriction on the H-shaped moving block 3. Then, the H-shaped moving block 3 is moved to the right, and the filter 6 on the right can be pulled out of the ventilation duct 1. At the same time, the filter 6 on the left gradually enters the ventilation duct 1. When it is almost fully in, the handle 10 on the left is pulled forward to move the corresponding rectangular limit block 8 forward (the two springs 11 on the left will be compressed). After it is fully in, the handle 10 on the left is released. Under the elastic force of the two springs 11 on the left, the rectangular limit block 8 on the left will pass through the corresponding loop connecting block 12, thereby fixing the H-shaped moving block 3 again. In this way, by switching between the two filters 6, the entire ventilation operation can be continued while maintaining one of the filters 6, ensuring the actual processing efficiency. After the above switching operation is completed, the filter 6 on the right side can be maintained. By pulling up the filter 6 on the right side, it can be pulled out for maintenance or replacement. After maintenance, the maintained filter 6 is aligned with the rectangular slot 5 on the right side and inserted until the lower end of the filter 6 is inserted into the rectangular positioning groove 4, thus achieving initial fixation of the filter 6. Then, the filter 6 is moved into the ventilation duct 1. The upper end of the filter 6 fits against the top of the ventilation duct 1 to ensure stable fixation of the filter 6. The entire maintenance process is relatively convenient and reduces the actual maintenance workload. When the filter 6 needs to be switched or maintained in the future, the above operation can be referred to.

[0017] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A ventilation device for diffusion processing of silicon rectifier chips, characterized in that include: Ventilation duct (1), and rectangular through grooves (2) are provided on both the left and right sides of the ventilation duct (1); The filter assembly includes a swivel block (3) that passes through two rectangular slots (2) and is slidably connected to the inner walls of the two rectangular slots (2). The bottom of the swivel block (3) has two rectangular positioning slots (4), the top of the swivel block (3) has two rectangular slots (5), and the inner side of the swivel block (3) is provided with two filters (6). Two limiting components are located on the left and right sides of the H-shaped moving block (3), respectively. Each limiting component includes a fixed block (7) fixedly connected to the side wall of the H-shaped moving block (3). A rectangular limiting block (8) is provided on the rear side of the fixed block (7). Two connecting rods (9) are fixedly connected to the front side of the rectangular limiting block (8). The front ends of the two connecting rods (9) pass through the fixed block (7) and are fixedly connected to a handle (10). The fixed block (7) and the rectangular limiting block (8) are elastically connected by two springs (11).

2. The ventilation device for diffusion in processing a silicon rectifier chip according to claim 1, wherein The lower ends of both filters (6) are slidably connected to the inner wall of the corresponding rectangular positioning groove (4).

3. The ventilation device for diffusion of a silicon rectifier chip according to claim 1, wherein The upper ends of both filters (6) are slidably connected to the inner wall of the corresponding rectangular slot (5).

4. The ventilation device for diffusion of a silicon rectifier chip according to claim 1, wherein The filter (6) located on the right side is inside the ventilation duct (1), and the upper end of the filter (6) located on the right side is attached to the inner top of the ventilation duct (1).

5. The ventilation device for diffusion of silicon rectifier chip processing according to claim 1, characterized in that, Both sides of the ventilation duct (1) are fixedly connected with a loop-shaped connecting block (12), and the rectangular limiting block (8) on the right side penetrates the inner side of the corresponding loop-shaped connecting block (12).

6. The ventilation device for diffusion of a silicon rectifier chip according to claim 5, wherein Both rectangular limiting blocks (8) are engaged with the corresponding loop connecting blocks (12).

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