A coating mechanism for a gumming and developing machine

Abstract

This utility model discloses a coating mechanism for an adhesive coating and developing machine, including a protective cover. A mounting column is installed at the top center of the protective cover, and the mounting column is rotatable and slidable. A cleaning rod is fixedly installed at the bottom end of the mounting column by bolts. The end of the cleaning rod contacts the inner wall of the protective cover. During coating, adhesive splashed from the rotating chip falls onto the inner wall of the protective cover. Through negative pressure adsorption, the adhesive flows downwards, enters the material conveying channel through the connecting hole, and is discharged. The protective cover provides comprehensive protection for the adhesive spraying area. After adhesive spraying is completed, the cleaning rod on the mounting column is controlled to rotate along the inner wall of the protective cover and descend synchronously. The cleaning rod pushes the adhesive on the entire inner wall of the protective cover, causing the adhesive to fall down the inner wall of the protective cover to the connecting hole at the bottom of the protective cover under the push of the cleaning rod end, thus improving the cleaning effect on the entire inner wall of the protective cover.

Description

Technical Field

[0001] This utility model relates to the field of coating and developing machine technology, specifically to a coating mechanism for a coating and developing machine. Background Technology

[0002] Photoresist coating and developing machines play a core role in integrated circuit manufacturing. Their working principle is based on the chemical and physical processes of coating and developing. By transferring the designed photoresist pattern onto the substrate (such as a silicon wafer), a precise circuit or optical structure is formed, laying the foundation for subsequent processes such as etching and ion implantation.

[0003] In the "A Coating Mechanism for a Coating and Developing Machine" authorized by publication number "CN117066042B", when the coating mechanism descends, it can drive the protective cover to descend synchronously, and drive the connecting plate to slide into the fixed groove, pushing the movable plate down to realize the connection between the connecting plate and the material conveying channel. In this way, the glue splashed out by the chip rotation can fall on the inner wall of the protective cover, and then flow downward through the feed hole into the connecting plate. Through negative pressure adsorption, the glue can be sucked into the material conveying channel. The protective cover protects the glue spraying position and can also recycle excess glue. With the addition of gas blowing, the glue adhesion to the inner wall of the protective cover is reduced, and the cleaning is improved. However, when cleaning the glue on the inner wall of the protective cover, gas blowing alone cannot effectively clean the glue on the inner wall of the protective cover. The glue will still be adsorbed on the inner wall of the protective cover due to adhesion. After long-term use, the glue will solidify, resulting in poor cleaning effect on the glue on the inner wall of the protective cover. Utility Model Content

[0004] The purpose of this invention is to provide a coating mechanism for a coating and developing machine to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a coating mechanism for a coating and developing machine, comprising a protective cover, wherein a connecting plate is integrally arranged in a ring array around the central axis of the protective cover at the bottom end, and an inclined ring is integrally arranged in the inner ring of the bottom end of the protective cover. A connecting hole is provided inside the connecting plate, the connecting hole connecting the protective cover and the inclined ring, and one end of the connecting hole communicating with the connection between the protective cover and the inclined ring, and the other end of the connecting hole passing through the inner wall of the connecting plate. A mounting post is installed at the middle of the top end of the protective cover, the mounting post being rotatable and sliding, and a cleaning rod is fixedly installed at the bottom end of the mounting post by bolts, the end of the cleaning rod contacting the inner wall of the protective cover.

[0006] As a further preferred embodiment of this technical solution, the top center of the protective cover is integrally formed with a glue storage box, the middle of the glue storage box is provided with a glue storage trough, the top of the glue storage box is integrally provided with a feed pipe, the feed pipe is connected to the glue storage trough, the bottom of the glue storage box is fixedly installed with a glue spray nozzle by bolts, the glue spray nozzle is connected to the glue storage trough, and the mounting column is located in the inner ring of the glue storage box.

[0007] As a further preferred embodiment of this technical solution, a lifting frame is slidably mounted on the top of the protective cover, and the mounting column is rotatably mounted on the middle of the lifting frame via a bearing. An external thread is provided on the outer side of the mounting column, and a fixed cylinder is integrally formed in the middle of the top of the protective cover. An internal thread is provided in the middle of the fixed cylinder, and the external thread is threadedly connected to the internal thread.

[0008] As a further preferred embodiment of this technical solution, a motor is fixedly mounted on the upper surface of the protective cover by bolts, and a screw is fixedly mounted on the output end of the motor by a shaft connector. The screw is threadedly connected to the lifting frame. Limit rods are fixedly mounted on both ends of the lifting frame. A limit hole is opened at the top of the protective cover corresponding to the position of the limit rod, and the limit rod is slidably connected to the limit hole.

[0009] As a further preferred embodiment of this technical solution, the end of the cleaning rod that contacts the protective cover is inclined.

[0010] As a further preferred embodiment of this technical solution, a guide groove is provided on the side of the cleaning rod that contacts the protective cover and faces the direction of rotation, and the guide groove is also inclined.

[0011] As a further preferred embodiment of this technical solution, the cleaning rod is provided with an inclined surface at the end position corresponding to the guide groove.

[0012] This utility model provides a coating mechanism for a coating and developing machine, which has the following beneficial effects: (1) This utility model places the chip in a designated position, drives the protective cover to descend, and then performs the coating operation. During the coating process, the glue splashed out by the rotating chip can fall on the inner wall of the protective cover. Through the adsorption of negative pressure, the glue flows downward through the connection hole into the material conveying channel and is discharged. The protective cover provides comprehensive protection for the glue spraying position. After the glue spraying is completed, the cleaning rod on the mounting column is controlled to rotate along the inner wall of the protective cover and descend synchronously. The cleaning rod can push the glue on the entire inner wall of the protective cover. The glue will fall along the inner wall of the protective cover to the connection hole position at the bottom of the protective cover under the push of the end of the cleaning rod, which improves the cleaning effect of the entire inner wall of the protective cover.

[0013] (2) This utility model controls the operation of the motor through the controller. The output shaft of the motor will drive the screw to rotate. Through the thread between the screw and the lifting frame, the limit rods at both ends of the lifting frame will slide along the limit hole and drive the lifting frame to descend. During the descent of the lifting frame, the descent of the lifting frame will drive the mounting column and the cleaning rod installed on the mounting column to descend synchronously. Through the threaded connection between the external thread on the mounting column and the internal thread in the middle of the fixed cylinder, the mounting column will be driven to rotate. The cleaning rod on the mounting column will rotate along the inner wall of the protective cover and descend synchronously, realizing the synchronous operation of the rotation and descent of the cleaning rod. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic cross-sectional view of the overall structure of this utility model; Figure 3 This is an exploded cross-sectional view of the overall structure of this utility model; Figure 4 This is a partial structural schematic diagram of the present invention; In the diagram: 1. Protective cover; 2. Connecting plate; 3. Inclined ring; 4. Connecting hole; 5. Mounting column; 6. Cleaning rod; 7. Glue storage box; 8. Glue storage tank; 9. Feed pipe; 10. Glue spray nozzle; 11. Lifting frame; 12. External thread; 13. Fixing cylinder; 14. Internal thread; 15. Motor; 16. Screw; 17. Limiting rod; 18. Limiting hole; 19. Guide chute; 20. Inclined surface. Detailed Implementation

[0015] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0016] This utility model provides a technical solution: such as Figures 1 to 4As shown in this embodiment, a coating mechanism for a coating and developing machine includes a protective cover 1. A connecting plate 2 is integrally arranged in a ring array around the central axis of the protective cover 1 at its bottom end. An inclined ring 3 is integrally arranged within the inner ring of the bottom end of the protective cover 1. A connecting hole 4 is provided inside the connecting plate 2, connecting the protective cover 1 and the inclined ring 3. One end of the connecting hole 4 communicates with the connection point between the protective cover 1 and the inclined ring 3, and the other end of the connecting hole 4 passes through the inner wall of the connecting plate 2. A mounting post 5 is installed at the center of the top of the protective cover 1. The mounting post 5 is rotatable and slidable. A cleaning rod 6 is fixedly installed at the bottom end of the mounting post 5 by bolts. The end of the cleaning rod 6 is connected to... The inner wall of the protective cover 1 is designed to allow the chip to be placed in the designated position, which then lowers the protective cover 1 for coating. During coating, the adhesive splashed from the rotating chip falls onto the inner wall of the protective cover 1. Through negative pressure adsorption, the adhesive flows downward through the connection hole 4 into the material conveying channel and is discharged. The protective cover 1 provides comprehensive protection for the adhesive spraying area. After the adhesive spraying is completed, the cleaning rod 6 on the mounting column 5 rotates along the inner wall of the protective cover 1 and descends synchronously. The cleaning rod 6 can push the adhesive on the entire inner wall of the protective cover 1. The adhesive will fall down the inner wall of the protective cover 1 to the connection hole 4 at the bottom of the protective cover 1 under the push of the end of the cleaning rod 6, thus improving the cleaning effect of the entire inner wall of the protective cover 1.

[0017] like Figures 1 to 4 As shown, the top center of the protective cover 1 is integrally formed with a glue storage box 7, the middle of the glue storage box 7 is provided with a glue storage trough 8, the top of the glue storage box 7 is integrally provided with a feed pipe 9, the feed pipe 9 is connected to the glue storage trough 8, the bottom of the glue storage box 7 is fixedly installed with a glue spray nozzle 10 by bolts, the glue spray nozzle 10 is connected to the glue storage trough 8, and the mounting post 5 is located in the inner ring of the glue storage box 7.

[0018] By controlling the protective cover 1 to descend and move the spray nozzle 10 above the chip, the glue is transported through the feed pipe 9 and the glue storage box 7 and then sprayed onto the chip from the spray nozzle 10. The chip is rotated to perform the coating operation on the entire chip.

[0019] like Figures 1 to 4 As shown, a lifting frame 11 is slidably mounted on the top of the protective cover 1. The mounting column 5 is rotatably mounted on the middle of the lifting frame 11 via a bearing. An external thread 12 is provided on the outer side of the mounting column 5. A fixed cylinder 13 is integrally formed in the middle of the top of the protective cover 1. An internal thread 14 is provided in the middle of the fixed cylinder 13. The external thread 12 and the internal thread 14 are threadedly connected.

[0020] When the lifting frame 11 is lowered, the external thread 12 on the mounting column 5 and the internal thread 14 in the middle of the fixed cylinder 13 will drive the mounting column 5 to rotate. The cleaning rod 6 on the mounting column 5 will rotate along the inner wall of the protective cover 1 and descend synchronously.

[0021] like Figures 1 to 4 As shown, a motor 15 is fixedly installed on the upper surface of the protective cover 1 by bolts. A screw 16 is fixedly installed on the output end of the motor 15 by a shaft connector. The screw 16 is threadedly connected to the lifting frame 11. Limiting rods 17 are fixedly installed at both ends of the lifting frame 11. A limiting hole 18 is opened at the top of the protective cover 1 corresponding to the position of the limiting rod 17. The limiting rod 17 is slidably connected to the limiting hole 18.

[0022] The controller controls the operation of the motor 15, and the output shaft of the motor 15 drives the screw 16 to rotate. The screw 16 and the thread between the screw and the lifting frame 11 drive the limit rods 17 at both ends of the lifting frame 11 to slide along the limit holes 18, thereby driving the lifting frame 11 to rise and fall.

[0023] like Figures 1 to 4 As shown, the end of the cleaning rod 6 that contacts the protective cover 1 is inclined.

[0024] When the end of the cleaning rod 6 is attached to the inner wall of the protective cover 1 and rotated, the glue on the inner wall of the protective cover 1 can flow downward along the inclined surface of the cleaning rod 6 under the push of the inclined angle of the cleaning rod 6, which facilitates the discharge of the glue.

[0025] like Figures 1 to 4 As shown, the end of the cleaning rod 6 that contacts the protective cover 1 is provided with a guide groove 19 on the side facing the rotation direction, and the guide groove 19 is also inclined.

[0026] When the adhesive on the inner wall of the protective cover 1 is pushed by the end of the cleaning rod 6, the adhesive can flow back along the guide groove 19.

[0027] like Figures 1 to 4 As shown, the cleaning rod 6 has an inclined surface 20 at the end position corresponding to the guide groove 19.

[0028] When the adhesive on the inner wall of the protective cover 1 is pushed by the end of the cleaning rod 6, the design of the inclined surface 20 makes it easy for all the adhesive on the inner wall of the protective cover 1 to flow into the interior of the guide groove 19, thereby achieving effective cleaning of the adhesive.

[0029] This utility model provides a coating mechanism for a coating and developing machine, the specific working principle of which is as follows: When using the device, the chip is placed in the designated position. During coating, the protective cover 1 is lowered, which moves the glue nozzle 10 above the chip. Glue is then transported through the feed pipe 9 and the glue storage box 7 and sprayed onto the chip through the nozzle 10. The rotation of the chip ensures more even glue distribution. As the protective cover 1 lowers, the connecting plate 2 slides into the fixed groove on the processing table, connecting the connecting hole 4 to the material conveying channel on the processing table. During coating, glue splashed from the rotating chip falls onto the inner wall of the protective cover 1. Through negative pressure adsorption, the glue flows downwards through the connecting hole 4 into the material conveying channel and is discharged. The protective cover 1 provides comprehensive protection for the glue spraying area, preventing a large amount of glue from falling onto the processing table during the spraying process. After the glue spraying is complete, the controller drives the motor 15 to operate. The output shaft of the motor 15 drives the screw 16 to rotate. The screw 16 connects to the lifting frame 1. The thread of the lifting frame 11 will cause the limiting rods 17 at both ends of the lifting frame 11 to slide along the limiting holes 18, and drive the lifting frame 11 to descend. During the descent of the lifting frame 11, the lifting frame 11 will drive the mounting column 5 and the cleaning rod 6 mounted on the mounting column 5 to descend synchronously. The threaded connection between the external thread 12 on the mounting column 5 and the internal thread 14 in the middle of the fixed cylinder 13 will drive the mounting column 5 to rotate. The cleaning rod 6 on the mounting column 5 will rotate along the inner wall of the protective cover 1 and descend synchronously. The cleaning rod 6 can push the glue on the entire inner wall of the protective cover 1. The glue will fall along the inner wall of the protective cover 1 to the connection hole 4 at the bottom of the protective cover 1 under the push of the end of the cleaning rod 6, which improves the cleaning effect on the entire inner wall of the protective cover 1. Then, the motor 15 controls the protective cover 1 to rise, which will synchronously drive the mounting column 5 and the cleaning rod 6 on the mounting column 5 to rise synchronously relative to the protective cover 1. The processed chip can then be removed.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A coating mechanism for a coating and developing machine, comprising a protective cover (1), wherein a connecting plate (2) is integrally arranged in a ring array around the central axis of the protective cover (1) at the bottom end of the protective cover (1), and an inclined ring (3) is integrally arranged in the inner ring of the bottom end of the protective cover (1), wherein a connecting hole (4) is provided inside the connecting plate (2), the connecting hole (4) connects the connection position of the protective cover (1) and the inclined ring (3), and one end of the connecting hole (4) connects to the connection point of the protective cover (1) and the inclined ring (3), and the other end of the connecting hole (4) passes through the inner wall of the connecting plate (2), characterized in that: A mounting post (5) is installed at the top center of the protective cover (1). The mounting post (5) is rotatable and slidable. A cleaning rod (6) is fixedly installed at the bottom of the mounting post (5) by bolts. The end of the cleaning rod (6) is in contact with the inner wall of the protective cover (1).

2. A coating mechanism for a gumming and developing machine according to claim 1, characterized in that: The top center of the protective cover (1) is integrally formed with a glue storage box (7), and a glue storage trough (8) is opened in the middle of the glue storage box (7). The top of the glue storage box (7) is integrally provided with a feed pipe (9), which is connected to the glue storage trough (8). The bottom of the glue storage box (7) is fixedly installed with a glue spray nozzle (10) by bolts, which is connected to the glue storage trough (8). The mounting column (5) is located in the inner ring of the glue storage box (7).

3. A coating mechanism for a gumming and developing machine according to claim 2, characterized in that: The top of the protective cover (1) is slidably mounted with a lifting frame (11). The mounting column (5) is rotatably mounted in the middle of the lifting frame (11) through a bearing. The outer side of the mounting column (5) is provided with an external thread (12). The top center of the protective cover (1) is integrally formed with a fixing cylinder (13). The middle of the fixing cylinder (13) is provided with an internal thread (14). The external thread (12) and the internal thread (14) are threadedly connected.

4. A coating mechanism for a gumming and developing machine according to claim 3, wherein: A motor (15) is fixedly installed on the upper surface of the protective cover (1) by bolts. A screw (16) is fixedly installed on the output end of the motor (15) by a shaft connector. The screw (16) is threadedly connected to the lifting frame (11). Limiting rods (17) are fixedly installed at both ends of the lifting frame (11). A limiting hole (18) is opened at the top of the protective cover (1) corresponding to the position of the limiting rod (17). The limiting rod (17) is slidably connected to the limiting hole (18).

5. A coating mechanism for a gumming and developing machine according to claim 1, wherein: The cleaning rod (6) is inclined at the end that contacts the protective cover (1).

6. A coating mechanism for a gumming and developing machine according to claim 5, characterized in that: The cleaning rod (6) has a guide groove (19) on the side facing the rotation direction at the end that contacts the protective cover (1), and the guide groove (19) is also inclined.

7. A coating mechanism for a gumming and developing machine according to claim 6, characterized in that: The cleaning rod (6) has an inclined surface (20) at the end position corresponding to the guide groove (19).

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