Spray cleaning device for polishing equipment and polishing equipment

Abstract

This utility model discloses a liquid spraying cleaning device for polishing equipment and a polishing device. The liquid spraying cleaning device for polishing equipment includes: a spraying plate, with an inlet connected to the inlet of a flow channel within the spraying plate; nozzles connected to the outlet of the flow channel, and multiple nozzles spaced apart on the spraying plate and corresponding to at least a portion of the flow channel; wherein the flow channel includes at least two annular flow channels and a connecting flow channel. Therefore, by arranging at least two annular flow channels radially spaced and concentrically on the spraying plate, and connecting the connecting flow channel extending radially and connecting the at least two annular flow channels, liquid can flow between annular flow channels of different radii. This not only ensures the effective spraying range of the liquid spraying cleaning device and prevents problems such as missed spraying due to limited spraying range, but also helps to balance the pressure and flow distribution within each annular flow channel, improving the uniformity of the spray coverage of the liquid spraying cleaning device. Moreover, the structure is simple and easy to process and maintain.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a liquid spray cleaning device and a polishing device for polishing equipment. Background Technology

[0002] In the chemical mechanical polishing (CMP) process for semiconductors, thorough cleaning of residual polishing slurry is a crucial step. If cleaning is insufficient, the residual polishing slurry will crystallize, thereby affecting the quality of the CMP process.

[0003] In related technologies, most of the liquid spraying cleaning devices for polishing equipment have problems such as complex structure, uneven distribution of sprayed liquid, blind spots in cleaning, or unnecessary repeated spraying areas. Utility Model Content

[0004] The present invention aims to at least solve one of the technical problems existing in the prior art. Therefore, one objective of the present invention is to provide a spray cleaning device for polishing equipment, which has a simpler structure and can improve the uniformity of spray coverage while ensuring its effective spray range.

[0005] This utility model further proposes a polishing device.

[0006] The polishing equipment according to this utility model has a spray cleaning device, comprising: a spray plate having a flow channel and an inlet connected to the inlet of the flow channel; and a nozzle disposed on the spray plate and connected to the outlet of the flow channel, wherein there are multiple nozzles, which are spaced apart on the spray plate and correspond to at least a portion of the flow channel; wherein the flow channel includes at least two annular flow channels and a connecting flow channel, the at least two annular flow channels being spaced apart and concentrically arranged in the radial direction of the spray plate, and the connecting flow channel extending radially and connecting the at least two annular flow channels.

[0007] Therefore, by arranging at least two annular channels radially spaced and concentrically on the spray plate, and connecting channels extending radially to connect the at least two annular channels, liquid can flow between annular channels of different radii. This not only ensures the effective spray range of the spray cleaning device and prevents problems such as missed sprays due to limited spray range, but also helps to balance the pressure and flow distribution in each annular channel, improving the uniformity of spray coverage of the spray cleaning device. Moreover, the structure is simple and easy to process and maintain.

[0008] In some examples of this utility model, the connecting flow channel includes a first connecting flow channel and a second connecting flow channel. The first connecting flow channel extends along a first direction and connects two adjacent annular flow channels. The second connecting flow channel extends along a second direction and connects two adjacent annular flow channels. The radial direction of the spray plate includes the first direction and the second direction, which are perpendicular to each other.

[0009] In some examples of this utility model, there are two annular flow channels, namely an inner annular flow channel and an outer annular flow channel; there are two first connecting flow channels, which are respectively disposed on both sides outside the inner annular flow channel along the first direction and connect the inner annular flow channel and the outer annular flow channel; and / or there are two second connecting flow channels, which are respectively disposed on both sides outside the inner annular flow channel along the second direction and connect the inner annular flow channel and the outer annular flow channel.

[0010] In some examples of this utility model, the connecting channel further includes a third connecting channel, which is located inside the inner annular channel. The third connecting channel extends along the first direction and its two ends are respectively connected to the inner annular channel; or the third connecting channel extends along the second direction and its two ends are respectively connected to the inner annular channel.

[0011] In some examples of this utility model, the liquid inlet is located on one axial side of the spray plate, and the nozzle is located on the other axial side of the spray plate.

[0012] In some examples of this utility model, the plurality of nozzle elements include at least two annular nozzle groups and a central nozzle. The at least two annular nozzle groups correspond one-to-one with at least two annular flow channels. The annular nozzle group includes a plurality of nozzle elements arranged circumferentially at intervals. The central nozzle corresponds to the center of the innermost annular flow channel.

[0013] In some examples of this utility model, the spray plate includes a main body and a cover plate. A liquid guiding groove is provided inside the main body. The liquid guiding groove is open on one side of the main body corresponding to the axial direction. The cover plate covers the axial side of the main body and seals the open side of the liquid guiding groove to form a closed flow channel. The nozzle is located on the side of the main body away from the cover plate in the axial direction. The liquid inlet is located on the side of the cover plate away from the main body in the axial direction.

[0014] In some examples of this utility model, the spray plate is provided with a clearance groove, which is spaced apart from the flow channel and is adapted to avoid the support block on the carrier plate.

[0015] In some examples of this utility model, there are multiple avoidance grooves, including a first avoidance groove and a second avoidance groove. The first avoidance groove is fan-shaped and located outside the inner annular flow channel. The first avoidance groove is spaced apart between adjacent first connecting flow channels and second connecting flow channels. The second avoidance groove is rectangular and located inside the inner annular flow channel. The third connecting flow channel extends in the first direction, and the second avoidance groove is spaced apart on both sides of the third connecting flow channel along the second direction. Alternatively, the third connecting flow channel extends in the second direction, and the second avoidance groove is spaced apart on both sides of the third connecting flow channel along the first direction.

[0016] The polishing equipment according to an embodiment of the present invention includes: the liquid spraying cleaning device of the polishing equipment described above.

[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of a liquid spraying cleaning device according to an embodiment of the present utility model; Figure 2 This is a schematic diagram of a liquid spraying cleaning device according to an embodiment of the present utility model; Figure 3 This is an exploded view of the liquid spraying cleaning device according to an embodiment of the present utility model; Figure 4 This is a schematic diagram of a liquid spraying cleaning device according to an embodiment of the present utility model; Figure 5 This is a partial cross-sectional view of the spray cleaning device according to an embodiment of the present invention along the BB direction.

[0019] Figure label: 100. Spray cleaning device; 10. Spray plate; 101. Liquid inlet; 102. Main body; 1021. Liquid guide groove; 1022. Open side; 103. Cover plate; 20. Flow channel; 201. Annular flow channel; 2011. Inner annular flow channel; 2012. Outer annular flow channel; 202. Connecting flow channel; 2021. First connecting flow channel; 2022. Second connecting flow channel; 2023. Third connecting flow channel; 30. Nozzle assembly; 301. Annular nozzle assembly; 302. Center nozzle; 40. Avoidance groove; 401. First avoidance groove; 402. Second avoidance groove. Detailed Implementation

[0020] The embodiments of the present invention are described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. The embodiments of the present invention are described in detail below.

[0021] The following is for reference. Figures 1-5 The present invention describes a liquid spraying cleaning device 100 for a polishing equipment according to an embodiment of the present invention. The liquid spraying cleaning device 100 for a polishing equipment can be applied to a polishing equipment.

[0022] Combination Figures 1-5 As shown, the spray cleaning device 100 of the polishing equipment according to this utility model mainly includes: a spray plate 10 and nozzles 30. The spray plate 10 has a flow channel 20 and an inlet 101 connected to the inlet of the flow channel 20. Multiple nozzles 30 are disposed on the spray plate 10 and connected to the outlet of the flow channel 20. The flow channel 20 includes at least two annular flow channels 201 and a connecting flow channel 202. The at least two annular flow channels 201 are radially spaced and concentrically arranged on the spray plate 10, and the connecting flow channel 202 extends radially and connects the at least two annular flow channels 201.

[0023] Specifically, the spray plate 10 is provided with a flow channel 20 and a liquid inlet 101. The liquid inlet 101 is connected to the inlet of the flow channel 20, so that external liquid can enter the flow channel 20 in the spray plate 10 in sequence through the liquid inlet 101 and the inlet of the flow channel 20.

[0024] Furthermore, the nozzle 30 is disposed on the spray plate 10 and connected to the outlet of the flow channel 20, so that the liquid entering the flow channel 20 can be sprayed out through the nozzle 30, thereby realizing the functions of cleaning, cooling or wetting of the target area by the spray cleaning device 100.

[0025] Furthermore, there are multiple nozzle components 30, which are spaced apart on the spray plate 10 and correspond to at least a portion of the flow channel 20. This allows the spray coverage of the spray cleaning device 100 to be increased through the coordinated work of multiple nozzle components 30, while ensuring that the nozzle components 30 are connected to the flow channel 20. This prevents problems such as missed spraying due to limited spray range. At the same time, it can also process a larger target area in the same amount of time, thereby improving the working efficiency of the spray cleaning device 100.

[0026] Furthermore, the flow channel 20 includes at least two annular flow channels 201 and a connecting flow channel 202. The at least two annular flow channels 201 are radially spaced and concentrically arranged, and the connecting flow channel 202 extends radially and connects the at least two annular flow channels 201. Specifically, the two or more annular flow channels 201 are radially spaced and concentrically arranged, which can form multiple liquid supply loops at different radii of the liquid supply disk 10; the connecting flow channel 202 extends radially and connects the at least two annular flow channels 201, which can realize the flow of liquid between different annular flow channels 201, so that the liquid can flow from the inner annular flow channel 201 to the outer annular flow channel 201 through the connecting flow channel 202, or flow in the opposite direction, thereby helping to balance the pressure and flow distribution in each annular flow channel 201, so that the nozzles 30 corresponding to different annular flow channels 201 can obtain relatively stable and uniform liquid supply.

[0027] This configuration not only improves the uniformity of the spray coverage of the liquid cleaning device 100, effectively preventing damage to the surface being cleaned or liquid splashing due to excessive local liquid supply, or preventing inadequate cleaning due to insufficient local liquid supply, but also further increases the spray coverage of the liquid cleaning device 100 through the annular flow channels 201 of different radii, effectively preventing problems such as missed spraying due to limited spray range.

[0028] Therefore, by arranging at least two annular channels 201 radially spaced and concentrically arranged in the spray plate 10, and connecting channel 202 extending radially and connecting at least two annular channels 201, liquid can flow between annular channels 201 of different radii. This not only ensures the effective spray range of the spray cleaning device 100 and prevents problems such as missed spray due to limited spray range, but also helps to balance the pressure and flow distribution in each annular channel 201, improves the uniformity of spray coverage of the spray cleaning device 100, and the structure of the spray cleaning device 100 is relatively simple, making it easy to manufacture and maintain.

[0029] Combination Figure 1 , Figure 3 and Figure 4 As shown, the connecting channel 202 includes a first connecting channel 2021 and a second connecting channel 2022. The first connecting channel 2021 extends along a first direction and connects two adjacent annular channels 201. The second connecting channel 2022 extends along a second direction and connects two adjacent annular channels 201. The radial direction of the spray plate 10 includes a first direction and a second direction, which are perpendicular to each other.

[0030] Specifically, by setting the first connecting channel 2021 and the second connecting channel 2022 in two orthogonal radial directions respectively, the liquid can be more evenly distributed in the circumferential direction within the annular channel 201, effectively preventing the problem of uneven liquid supply caused by the liquid flowing only along a single radial channel, and improving the overall spray consistency and uniformity of the spray cleaning device 100.

[0031] Combination Figure 1 , Figure 3 and Figure 4 As shown, there are two annular flow channels 201, namely an inner annular flow channel 2011 and an outer annular flow channel 2012. There are two first connecting flow channels 2021, which are respectively disposed on both sides of the inner annular flow channel 2011 along the first direction and connect the inner annular flow channel 2011 and the outer annular flow channel 2012; and / or there are two second connecting flow channels 2022, which are respectively disposed on both sides of the inner annular flow channel 2011 along the second direction and connect the inner annular flow channel 2011 and the outer annular flow channel 2012.

[0032] Specifically, when the first connecting channel 2021 and the second connecting channel 2022 are simultaneously provided, the four connecting channels 202 are evenly distributed circumferentially around the outer periphery of the inner annular channel 2011, forming four symmetrically arranged liquid flow channels. When only the first connecting channel 2021 or only the second connecting channel 2022 is provided, two liquid flow channels symmetrically arranged along a single radial axis are formed. This arrangement optimizes the connection structure between the inner annular channel 2011 and the outer annular channel 2012, improves the uniformity of pressure and flow distribution within the inner annular channel 2011 and the outer annular channel 2012, thereby ensuring symmetrical and uniform pressure distribution across the entire spray plate 10. This avoids problems such as flow dead zones, pressure gradients, or spray asymmetry caused by single-sided or single-point connections, thus improving the uniformity and symmetry of the spray from the spray cleaning device 100.

[0033] Combination Figure 1 , Figure 3 and Figure 4 As shown, the connecting channel 202 also includes a third connecting channel 2023, which is located inside the inner annular channel 2011. The third connecting channel 2023 extends along a first direction and its two ends are respectively connected to the inner annular channel 2011; or the third connecting channel 2023 extends along a second direction and its two ends are respectively connected to the inner annular channel 2011.

[0034] Specifically, both ends of the third connecting channel 2023 are connected to the inner annular channel 2011, forming a bridge-like channel that spans the internal region of the inner annular channel 2011. This allows the liquid to flow directly in the inner annular channel 2011 along the first or second direction, shortening the flow path of the liquid in the inner annular channel 2011, reducing flow resistance, and improving the liquid exchange capacity between different regions of the inner annular channel 2011, thereby improving the circumferential uniformity of pressure and flow rate in the inner annular channel 2011.

[0035] In some embodiments of this utility model, the third connecting channel 2023 is arranged in a diametrical shape along the first or second direction, passing through the center of the inner annular channel 2011. This can increase the settable area of ​​the nozzle component 30 and further improve the symmetry and uniformity of the spraying of the liquid cleaning device 100.

[0036] In some embodiments of this utility model, the first connecting channel 2021, the second connecting channel 2022, and the third connecting channel 2023 have the same width in the cross section perpendicular to their respective extension direction, and also have the same depth in the axial direction. This not only ensures that the liquid flow cross-sectional area of ​​all connecting channels 202 remains consistent, avoiding problems such as changes in flow resistance, pressure loss, or uneven flow distribution caused by abrupt changes in local cross-sections, but also simplifies the processing technology, making it easier to complete the processing and forming of each connecting channel 202 using uniform processing parameters or tools.

[0037] In some embodiments of this utility model, the spray plate 10 is one of a circle, a square or other polygon, and the shape of each annular flow channel 201 is basically consistent with the outer contour of the spray plate 10.

[0038] Combination Figure 1 , Figure 3 and Figure 4 As shown, the liquid inlet 101 is located on one axial side of the spray plate 10, and the nozzle 30 is located on the other axial side of the spray plate 10.

[0039] Specifically, the liquid inlet 101 and the nozzle 30 are connected through the flow channel 20 in the spray plate 10. The liquid inlet 101 and the nozzle 30 are respectively set on both sides of the axial direction of the spray plate 10. This not only allows the liquid to pass through the spray plate 10 axially and be stably sprayed out through the nozzle 30, but also prevents the liquid inlet pipe at the liquid inlet 101 from interfering with the nozzle 30. This avoids the liquid inlet pipe blocking part of the nozzle 30, which would cause local leakage in the target area. In this way, it can help to achieve a uniform distribution of the nozzle 30 and improve the overall spray uniformity of the spray cleaning device 100.

[0040] Combination Figure 2 , Figure 3 and Figure 4As shown, the plurality of nozzle elements 30 include at least two annular nozzle groups 301 and a central nozzle 302. The at least two annular nozzle groups 301 correspond one-to-one with at least two annular flow channels 201. The annular nozzle group 301 includes a plurality of nozzle elements 30 arranged circumferentially. The central nozzle 302 corresponds to the center of the innermost annular flow channel 201.

[0041] Specifically, each annular flow channel 201 is distributed at equal intervals along the radial direction, and each annular flow channel 201 is provided with an annular nozzle group 301. Multiple nozzle elements 30 in the annular nozzle group 301 are distributed at equal intervals along the circumference. Liquid enters each annular flow channel 201 in the spray plate 10 through the liquid inlet 101 and is sprayed outward through their respective annular nozzle groups 301. At the same time, the innermost annular flow channel 201 supplies liquid to the central nozzle 302 through the third connecting channel. This allows the nozzle elements 30 to form a uniform spray array in the entire radial and circumferential directions of the spray plate 10, and the central nozzle 302 fills the gap at the center of the annular nozzle group 301. This ensures that the spray cleaning device 100 achieves continuous spray coverage of the target area from the center to the edge, effectively improving the coverage integrity and spray uniformity of the target area by the spray cleaning device 100.

[0042] In some embodiments of this utility model, the central nozzle 302 is located at the center of the spray plate 10, and each annular nozzle group 301 is distributed at equal intervals along the radial direction. The distance from the innermost annular nozzle group 301 to the center of the spray plate 10 is equal to the distance between adjacent annular nozzle groups 301.

[0043] Combination Figure 1 , Figure 3 , Figure 4 and Figure 5 As shown, the spray plate 10 includes a main body 102 and a cover plate 103. A liquid guide groove 1021 is provided inside the main body 102. The liquid guide groove 1021 is open on one side of the main body 102 corresponding to the axial direction. The cover plate 103 covers one side of the main body 102 and seals the open side 1022 of the liquid guide groove 1021 to form a closed flow channel 20. The nozzle 30 is located on the side of the main body 102 away from the cover plate 103 in the axial direction. The liquid inlet 101 is opened on the side of the cover plate 103 away from the main body 102 in the axial direction.

[0044] Specifically, the cover plate 103 is disposed on one axial side of the main body 102 and maintains a predetermined axial distance from the bottom wall of the liquid guiding groove 1021; the cover plate 103 covers the opening of the liquid guiding groove 1021 in the radial and circumferential directions, thereby forming a closed flow channel 20 together with the side wall and bottom wall of the liquid guiding groove 1021 to prevent liquid leakage.

[0045] Furthermore, the nozzle 30 is disposed on the side of the main body 102 axially away from the cover plate 103, and the liquid inlet 101 is opened on the side of the cover plate 103 axially away from the main body 102. This allows liquid to enter the flow channel 20 from the liquid inlet 101 on the cover plate 103 and then be sprayed out from the nozzle 30 on the main body 102, thereby forming a complete liquid passage that runs through the spray plate 10 axially.

[0046] In this way, integrating the flow channel 20 between the main body 102 and the cover plate 103 can not only effectively ensure the sealing of the flow channel 20 and prevent liquid leakage, but also facilitate the formation of the flow channel 20 and the overall processing and assembly of the spray plate 10. In addition, the inside of the flow channel 20 can be cleaned or maintained by disassembling the cover plate 103.

[0047] The outer contour of the cover plate 103 is greater than or equal to the opening contour of the open side 1022 of the liquid guide groove, so that the covering area of ​​the cover plate 103 completely covers the opening of the open side 1022 of the liquid guide groove, and the edge of the cover plate 103 extends outward to the boundary of the liquid guide groove 1021 or beyond the boundary, so as to effectively seal the flow channel 20 formed by the liquid guide groove 1021 through the cover plate 103.

[0048] In some embodiments of this utility model, the liquid guiding groove 1021 is provided with a stepped portion in the axial direction, and the cover plate 103 abuts against the stepped portion. This not only improves the ease and accuracy of assembly of the cover plate 103, but also ensures that there is an axial gap between the main body 102 and the bottom wall of the liquid guiding groove 1021 while sealing the liquid guiding groove 1021 with the cover plate 103, so that the cover plate 103 and the liquid guiding groove 1021 together form a closed flow channel 20.

[0049] In some embodiments of this utility model, the main body 102 and the cover plate 103 are connected by welding.

[0050] Combination Figure 1 , Figure 3 and Figure 4 As shown, the spray plate 10 is provided with a clearance groove 40, which is spaced apart from the flow channel 20 and is suitable for clearance of the support block on the bearing plate.

[0051] Specifically, the spray plate 10 is located axially below the carrier plate. The part to be cleaned is placed on the carrier plate. During operation, the spray plate 10 sprays liquid axially upward. The support block axially below the carrier plate is located in the clearance groove 40 of the spray plate 10. This allows the support block used to support the carrier plate to be avoided by the clearance groove 40 when the spray plate 10 is assembled with the carrier plate, preventing interference between the spray plate 10 and the carrier plate, thus facilitating the installation of the carrier plate.

[0052] In some embodiments of this utility model, the support block of the carrier plate can pass through the avoidance groove 40 to connect with other components.

[0053] Combination Figure 1 , Figure 3 and Figure 4 As shown, there are multiple clearance grooves 40, including a first clearance groove 401 and a second clearance groove 402. The first clearance groove 401 is fan-shaped and located outside the inner annular flow channel 2011. The first clearance groove is spaced between adjacent first connecting flow channels 2021 and second connecting flow channels 2022. The second clearance groove 402 is rectangular and located inside the inner annular flow channel 2011. The third connecting flow channel 2023 extends in a first direction, and the second clearance grooves 402 are spaced on both sides of the third connecting flow channel 2023 along the second direction; or the third connecting flow channel 2023 extends in the second direction, and the second clearance grooves 402 are spaced on both sides of the third connecting flow channel 2023 along the first direction.

[0054] Specifically, the first clearance groove 401 is fan-shaped and located on the outside of the inner annular flow channel 2011, and is spaced apart between adjacent first connecting flow channels 2021 and second connecting flow channels 2022. The fan-shaped structure of the first clearance groove 401 is adapted to the fan-shaped area between the connecting flow channels 202. The second clearance groove 402 is rectangular and located on the inside of the inner annular flow channel 2011. According to the extension direction of the third connecting flow channel 2023, the second clearance groove 402 is spaced apart on both sides. In this way, without interfering with the normal function of each connecting flow channel 202, the idle space on the spray plate 10 can be fully utilized to arrange the clearance grooves 40 to accommodate the support blocks at different positions on the carrier plate, thereby realizing the normal assembly of the spray plate 10 and the carrier plate, while avoiding damage to the integrity of the flow channel 20 structure due to the opening of the clearance grooves 40.

[0055] Furthermore, when the third connecting channel 2023 extends along the first direction, the second clearance groove 402 is symmetrically arranged on both sides of it along the second direction; when the third connecting channel 2023 extends along the second direction, the second clearance groove 402 is symmetrically arranged on both sides of it along the first direction. This allows for flexible adjustment of the layout of the second clearance groove 402 according to the actual extension direction of the third connecting channel 2023, maintaining the spacing between the clearance groove 402 and the connecting channel 202 to avoid mutual interference. Simultaneously, ensuring the symmetrical distribution of the clearance grooves 400 helps to achieve a more balanced force distribution on the spray plate 10 and the support plate.

[0056] The polishing equipment according to this utility model may mainly include: the liquid spraying cleaning device 100 of the above-mentioned polishing equipment.

[0057] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0058] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0059] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A liquid jet cleaning device for a polishing apparatus, characterized by, include: The spray plate (10) is provided with a flow channel (20) and an inlet (101) is provided in the spray plate (10). The inlet (101) is connected to the inlet of the flow channel (20). Nozzle component (30), the nozzle component (30) is disposed on the spray plate (10) and connected to the outlet of the flow channel (20), there are multiple nozzle components (30), the multiple nozzle components (30) are spaced apart on the spray plate (10) and correspond to at least a portion of the flow channel (20); The flow channel (20) includes at least two annular flow channels (201) and a connecting flow channel (202). The at least two annular flow channels (201) are radially spaced and concentrically arranged on the spray plate (10), and the connecting flow channel (202) extends radially and connects the at least two annular flow channels (201).

2. The liquid cleaning device for polishing apparatus according to claim 1, wherein The connecting channel (202) includes a first connecting channel (2021) and a second connecting channel (2022). The first connecting channel (2021) extends along a first direction and connects two adjacent annular channels (201). The second connecting channel (2022) extends along a second direction and connects two adjacent annular channels (201). The radial direction of the spray plate (10) includes the first direction and the second direction, which are perpendicular to each other.

3. The liquid cleaning device for polishing apparatus according to claim 2, wherein The annular flow channel (201) comprises two channels, namely an inner annular flow channel (2011) and an outer annular flow channel (2012). The first connecting flow channel (2021) comprises two channels, each located on the outer side of the inner annular flow channel (2011) along the first direction, connecting the inner annular flow channel (2011) and the outer annular flow channel (2012); and / or, There are two second connecting channels (2022), which are respectively disposed on both sides outside the inner annular channel (2011) along the second direction and connect the inner annular channel (2011) and the outer annular channel (2012).

4. The liquid cleaning device for polishing apparatus according to claim 3, wherein The connecting channel (202) further includes a third connecting channel (2023), which is located inside the inner annular channel (2011). The third connecting channel (2023) extends along the first direction and its two ends are respectively connected to the inner annular channel (2011); or, The third connecting channel (2023) extends along the second direction and its two ends are respectively connected to the inner annular channel (2011).

5. The liquid cleaning device for polishing apparatus according to claim 1, wherein The liquid inlet (101) is located on one axial side of the spray plate (10), and the nozzle (30) is located on the other axial side of the spray plate (10).

6. The liquid cleaning device for polishing apparatus according to claim 1, wherein The plurality of nozzle elements (30) include at least two annular nozzle groups (301) and a central nozzle (302). The at least two annular nozzle groups (301) correspond one-to-one with at least two annular flow channels (201). The annular nozzle group (301) includes a plurality of nozzle elements (30) arranged circumferentially. The central nozzle (302) corresponds to the center of the innermost annular flow channel (201).

7. The liquid cleaning device for polishing apparatus according to claim 1, wherein The spray plate (10) includes a main body (102) and a cover plate (103). The main body (102) is provided with a liquid guide groove (1021). The liquid guide groove (1021) is open on one side of the main body (102) corresponding to the axial direction. The cover plate (103) covers one side of the main body (102) and seals the open side (1022) of the liquid guide groove (1021) to form a closed flow channel (20). The nozzle (30) is located on the side of the main body (102) away from the cover plate (103) in the axial direction. The liquid inlet (101) is opened on the side of the cover plate (103) away from the main body (102) in the axial direction.

8. The liquid cleaning device for polishing apparatus according to claim 4, wherein The spray plate (10) is provided with a clearance groove (40), which is spaced apart from the flow channel (20) and is suitable for clearance of the support block on the bearing plate.

9. The liquid cleaning device for polishing apparatus according to claim 8, wherein There are multiple clearance grooves (40), and the multiple clearance grooves (40) include a first clearance groove (401) and a second clearance groove (402). The first clearance groove (401) is fan-shaped and located on the outside of the inner annular flow channel (2011). The first clearance groove (401) is spaced apart between adjacent first connecting flow channels (2021) and second connecting flow channels (2022). The second clearance groove (402) is rectangular and located inside the inner annular flow channel (2011). The third connecting flow channel (2023) extends in the first direction. The second clearance groove (402) is spaced apart on both sides of the third connecting flow channel (2023) along the second direction; or, The third connecting channel (2023) extends in the second direction, and the second clearance groove (402) is spaced apart on both sides of the third connecting channel (2023) along the first direction.

10. A polishing apparatus characterized by comprising: The spray cleaning device includes any one of the polishing equipment according to claims 1-9.

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