A clamping mechanism for measuring the thickness of a grinding sheet

Abstract

This utility model provides a clamping mechanism for measuring the thickness of grinding discs, relating to the technical field of clamping mechanisms. The utility model includes a support plate with several mounting holes circumferentially distributed on its outer surface. A positioning device is provided on the outer surface of the support plate, comprising three sliders. Three sliding grooves are formed on the outer surface of the support plate, and the three sliders slide along the inner walls of the three grooves. By using the positioning device, this utility model allows for the simultaneous movement of the sliders by moving a sliding rod to fix the position of the grinding disc on the support plate. A spring pushes the sliders back to contact the surface of the grinding disc, enabling the sliders to adapt to different diameters of the grinding disc within a certain range. This allows for the rapid clamping and fixing of grinding discs of multiple diameters within a certain range on the support plate, improving the efficiency of fixing grinding discs when using a thickness gauge to measure their thickness.

Description

Technical Field

[0001] This utility model relates to the field of clamping mechanism technology, and in particular to a clamping mechanism for measuring the thickness of a grinding disc. Background Technology

[0002] Semiconductor grinding discs are key tools used in semiconductor manufacturing processes, primarily for wafer back-side thinning. Made of hard materials such as diamond and silicon carbide, these precision machining tools offer advantages such as high efficiency and low cost. Wafer back-side thinning is a critical process in semiconductor manufacturing. Its main purpose is to grind the back side of the wafer to reduce its thickness.

[0003] The semiconductor wafer thickness measuring instrument is a semi-automatic measuring instrument. The operator places the wafer to be measured on the measuring platform, and the measuring instrument automatically completes the measurement operation. The main body of the measuring instrument consists of several parts, including the main unit, display screen, and computer for data storage. The main unit includes a loading tray, rotary motion mechanism, linear motion mechanism, measuring mechanism, and electrical control unit. During measurement, the wafer needs to be placed on the loading tray of the measuring instrument and fixed in position by positioning blocks.

[0004] In practical use, when measuring grinding discs of various diameters using a measuring instrument, the position of the positioning slider on the tray needs to be precisely adjusted when changing the grinding disc so that the grinding disc is aligned with the center of the tray. However, since the positioning slider is connected to the tray by fasteners, it is not possible to quickly adapt to the width of the grinding disc when adjusting its position. Tools are needed to first align the center of the grinding disc with the center of the tray before moving the positioning slider to adjust its position. This results in low efficiency and inconvenience when using the measuring instrument to quickly fix the grinding disc with the positioning clip. Utility Model Content

[0005] The purpose of this utility model is to solve the problem that, since the positioning slider is connected to the carrier plate separately by fasteners, it is impossible to quickly adapt to the width of the grinding disc when adjusting its position. Furthermore, it is necessary to use tools to first align the center of the grinding disc with the center of the carrier plate before moving the positioning slider to adjust the position, which results in low efficiency and inconvenience when using a measuring instrument to quickly fix the grinding disc with a positioning card. Therefore, a clamping mechanism for measuring the thickness of grinding disc is proposed.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a clamping mechanism for measuring the thickness of a grinding disc, comprising a bearing plate, wherein a plurality of mounting holes are provided on the outer surface of the bearing plate, the mounting holes being distributed circumferentially on the outer surface of the bearing plate, and fasteners passing through the mounting holes can be used to connect the bearing plate to the grinding disc measuring instrument; the outer surface of the bearing plate is provided with a positioning device for fixing the position of multiple sets of grinding discs of different sizes on the bearing plate.

[0007] Furthermore, the positioning device includes three sliders, and the outer surface of the support plate has three grooves. The three sliders slide on the inner walls of the three grooves respectively. A spring is provided on one side of each slider. Three rectangular blocks are fixedly connected to the top of the support plate. The rectangular blocks are located at one end of the grooves. The two ends of the springs are fixedly connected to one side of the rectangular blocks and one side of the sliders respectively. A grooved rod is fixedly connected to the center of the bottom of the support plate. A sliding rod is slidably connected to the inner wall of the grooved rod. A screw is fixedly connected to one side of the sliding rod. The screw slides on one side of the inner wall of the grooved rod. A threaded ring is threadedly connected to the outer surface of the screw. A connecting rod is rotatably connected to the bottom of the sliding rod. The two ends of the connecting rod are rotatably connected to the bottom of the sliding rod and the bottom of the slider respectively.

[0008] Furthermore, a round rod is fixedly connected to one side of the slider, and the end of the round rod away from the slider slides on the inner wall of the rectangular block, with a spring sleeved on the outer side of the round rod.

[0009] Furthermore, a positioning piece is fixedly connected to the outer surface of the slider, and the top end of the positioning piece slides on the bottom surface of the bearing plate.

[0010] Furthermore, an auxiliary piece, made of rubber, is fixedly connected to one side of the threaded ring.

[0011] Furthermore, two protrusions are fixedly connected to the outer surface of the threaded ring, and the protrusions are located on opposite sides of the outer surface of the threaded ring.

[0012] Furthermore, an auxiliary device is provided on one side of the slider. The auxiliary device includes a rotating shaft and a limiting block. The rotating shaft rotates on the inner wall of the slider. A coil spring is provided at one end of the rotating shaft. The two ends of the coil spring are fixedly connected to one side of the rotating shaft and one side of the slider, respectively. The two ends of the rotating shaft are fixedly connected to the two ends of the limiting block.

[0013] Furthermore, the upper and lower ends of the limiting block are respectively fixedly connected with protrusions, which are made of rubber.

[0014] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0015] In this invention, by setting a positioning device, when fixing the position of the grinding disc on the support plate, the sliding rod is moved to adjust the synchronous movement position of each slider, and the spring pushes the slider to reset and contact the surface of the grinding disc, so that the slider can adapt to the diameter of the grinding disc within a certain range. This allows for the quick clamping and fixing of grinding discs of multiple diameter specifications on the support plate within a certain range, improving the efficiency of fixing the grinding disc when using a thickness gauge to measure the thickness of the grinding disc. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0017] Figure 2 This is a three-dimensional structural diagram of the bearing plate of this utility model;

[0018] Figure 3 This is a three-dimensional structural diagram of the grooved rod of this utility model;

[0019] Figure 4 This is a three-dimensional structural diagram of the slider of this utility model;

[0020] Figure 5 This utility model Figure 4 A magnified three-dimensional structural diagram of point A.

[0021] Legend: 1. Bearing plate; 2. Positioning device; 3. Auxiliary device; 4. Mounting hole; 21. Slide groove; 22. Slider; 23. Rectangular block; 24. Spring; 25. Connecting rod; 26. Grooved rod; 27. Slide rod; 28. Screw; 29. ​​Threaded ring; 210. Positioning piece; 211. Auxiliary piece; 212. Protrusion; 213. Round rod; 31. Rotating shaft; 32. Coil spring; 33. Limiting block; 34. Protrusion. Detailed Implementation

[0022] Example 1, as Figure 1-2 As shown, a clamping mechanism for measuring the thickness of a grinding disc includes a carrier plate 1. The outer surface of the carrier plate 1 is provided with a plurality of mounting holes 4, which are distributed circumferentially on the outer surface of the carrier plate 1. Fasteners can be used to pass through the mounting holes 4 to connect the carrier plate 1 to the grinding disc measuring instrument. The outer surface of the carrier plate 1 is provided with a positioning device 2, which can fix the position of multiple sets of grinding discs of different sizes on the carrier plate 1.

[0023] Reference Figure 1-4As shown in this embodiment: the positioning device 2 includes three sliders 22, and three grooves 21 are formed on the outer surface of the bearing plate 1. The three sliders 22 slide on the inner walls of the three grooves 21 respectively. A spring 24 is provided on one side of each slider 22. Three rectangular blocks 23 are fixedly connected to the top of the bearing plate 1. The rectangular blocks 23 are located at one end of the grooves 21. The two ends of the springs 24 are fixedly connected to one side of the rectangular blocks 23 and one side of the sliders 22 respectively. A groove rod 26 is fixedly connected to the center of the bottom of the bearing plate 1. A slide rod 27 is slidably connected to the inner wall of the groove rod 26. A screw 28 is fixedly connected to one side of the slide rod 27. The slide bar 26 slides on one side of its inner wall. A threaded ring 29 is threaded onto the outer surface of the screw 28. A connecting rod 25 is rotatably connected to the bottom end of the slide bar 27. The two ends of the connecting rod 25 are rotatably connected to the bottom end of the slide bar 27 and the bottom end of the slider 22, respectively. When using a grinding disc thickness gauge, the bearing plate 1 is placed on the thickness gauge equipment. Fasteners (such as bolts) are passed through the mounting holes 4 on the outer surface of the bearing plate 1 to fix the bearing plate 1 to the thickness gauge equipment. Then, the bottom end of the bearing plate 1 pushes the slide bar 27 to control it to slide upwards on the inner wall of the slide bar 26. During the upward movement of the slide bar 27, the connecting rod 25 will be connected to the bottom end of the slide bar 27. The bottom end of the slider 22 rotates, pushing the slider 22 towards the rectangular block 23 inside the groove 21 via the slide rod 27 and compressing the spring 24. Then, the grinding disc is placed on the outer surface of the support plate 1 between the three sliders 22. Releasing the slide rod 27 restores the compressed spring 24 on one side of the slider 22, pushing the slider 22 towards the grinding disc and pressing it against the outer surface of the grinding disc. Then, the threaded ring 29 is rotated at the screw 28 on one side of the slide rod 27, causing the threaded ring 29 to move towards the groove rod 26, pressing one side of the threaded ring 29 against the outer surface of the groove rod 26. This compresses the slide rod 27 inside the groove rod 26. The position of the slider 22 and the position of the slide block 22 on the support plate 1 are fixed, thereby fixing the position of the grinding disc on the support plate 1. By setting the positioning device 2, when fixing the position of the grinding disc on the support plate 1, the sliding rod 27 is moved to adjust the synchronous movement position of each slider 22, and the spring 24 pushes the slider 22 to reset and contact the surface of the grinding disc, so that the slider 22 can adapt to the diameter of the grinding disc within a certain range, and quickly clamp and fix the position of multiple diameter grinding discs on the support plate 1 within a certain range, thereby improving the efficiency of fixing the grinding disc when using a thickness gauge to measure the thickness of the grinding disc.

[0024] Reference Figure 2-4As shown in this embodiment: a round rod 213 is fixedly connected to one side of the slider 22. The end of the round rod 213 away from the slider 22 slides on the inner wall of the rectangular block 23. The spring 24 is sleeved on the outer side of the round rod 213. When the slider 22 moves, the round rod 213 will slide on the inner wall of the rectangular block 23. The round rod 213 can reinforce the internal shape of the spring 24, prevent the spring 24 from twisting laterally when compressed, and improve the service life of the spring 24. A positioning piece 210 is fixedly connected to the outer surface of the slider 22. The top end of the positioning piece 210 slides on the bottom surface of the bearing plate 1. When the slider 22 moves, the positioning piece 210 will slide on the bottom surface of the bearing plate 1. The positioning piece 210 can further limit the angle between the slider 22 and the bearing plate 1, and prevent the angle of the slider 22 from deflecting.

[0025] Reference Figure 2-4 As shown in this embodiment: an auxiliary piece 211 is fixedly connected to one side of the threaded ring 29. The auxiliary piece 211 is made of rubber. Rotating the threaded ring 29 and pressing the side of the threaded ring 29 with the rubber auxiliary piece 211 against the outer surface of the grooved rod 26 makes the position of the slide rod 27 and the grooved rod 26 more stable. The slide rod 27 is less likely to slide accidentally inside the grooved rod 26. Two protrusions 212 are fixedly connected to the outer surface of the threaded ring 29. The protrusions 212 are located on opposite sides of the outer surface of the threaded ring 29. Pinching the two protrusions 212 on the outer surface of the threaded ring 29 makes it easier to control the rotation of the threaded ring 29.

[0026] Reference Figure 1 , Figure 3 , Figure 4 and Figure 5 As shown in this embodiment: an auxiliary device 3 is provided on one side of the slider 22. The auxiliary device 3 includes a rotating shaft 31 and a limiting block 33. The rotating shaft 31 rotates on the inner wall of the slider 22. A coil spring 32 is provided at one end of the rotating shaft 31. The two ends of the coil spring 32 are fixedly connected to one side of the rotating shaft 31 and one side of the slider 22, respectively. The two ends of the rotating shaft 31 are fixedly connected to the two ends of the limiting block 33. When clamping the grinding disc, when the slider 22 of the positioning device 2 moves towards the grinding disc, one side of the limiting block 33 will contact the outer side of the grinding disc. The surface contact, the arc or bevel at the edge of the grinding disc will cause the limiting block 33 to rotate through the rotating shaft 31 and deform the coil spring 32, so that the side of the limiting block 33 away from the slider 22 can better fit the outer surface of the grinding disc, and improve the position restriction effect of the slider 22 on the grinding disc on the carrier plate 1. The upper and lower ends of the limiting block 33 are respectively fixedly connected with the protrusions 34, which are made of rubber. By setting the protrusions 34 made of rubber, the limiting block 33 fits more tightly on the outer surface of the grinding disc.

[0027] Working principle: When using the grinding disc thickness gauge, place the support plate 1 on the thickness gauge equipment and use fasteners to fix the support plate 1 to the thickness gauge equipment through the mounting holes 4 on the outer surface of the support plate 1. Then, push the slide rod 27 at the bottom of the support plate 1 to control the slide rod 27 to slide upward on the inner wall of the groove rod 26. During the upward movement of the slide rod 27, the connecting rod 25 will rotate at the bottom of the slide rod 27 and the bottom of the slider 22. The slide rod 27 pushes the slider 22 to slide in the groove 21 towards the rectangular block 23 and compress the spring 24. Then, place the grinding disc on the outer surface of the support plate 1 between the three sliders 22. Release the slide rod 27 and the compressed spring 24 on one side of the slider 22 will return to its original state. The slider 22 will be pushed to move towards the grinding disc, so that one side of the limiting block 33 will contact the outer surface of the grinding disc. The arc or bevel at the edge of the grinding disc will cause the limiting block 33 to rotate through the rotating shaft 31 and deform the coil spring 32, so that the side of the limiting block 33 away from the slider 22 can better fit the outer surface of the grinding disc. Then, the threaded ring 29 is rotated at the screw 28 on one side of the slide rod 27, so that the threaded ring 29 moves towards the groove rod 26, pressing one side of the threaded ring 29 against the outer surface of the groove rod 26, fixing the position of the slide rod 27 inside the groove rod 26 and the position of the slider 22 on the support plate 1, thereby clamping and fixing the position of the grinding disc on the support plate 1.

[0028] It should be noted that the springs 24 with different elastic forces can be replaced according to different clamping needs in this application.

[0029] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model in any other way. Any person skilled in the art may use the disclosed technical content to make changes or modifications to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of this utility model, without departing from the scope of the utility model's technical solution, still fall within the protection scope of this utility model's technical solution. In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood through specific circumstances.

Claims

1. A clamping mechanism for measuring the thickness of an abrasive disc, comprising a support plate (1), characterized in that: The outer surface of the carrier plate (1) is provided with a number of mounting holes (4). The mounting holes (4) are distributed in a circle on the outer surface of the carrier plate (1). The carrier plate (1) can be connected to the grinding disc measuring instrument by using fasteners through the mounting holes (4). The outer surface of the carrier plate (1) is provided with a positioning device (2) that can fix the position of multiple sets of grinding discs of different sizes on the carrier plate (1).

2. The clamping mechanism for measuring the thickness of an abrasive disc according to claim 1, characterized in that: The positioning device (2) includes three sliders (22). Three grooves (21) are provided on the outer surface of the bearing plate (1). The three sliders (22) slide on the inner walls of the three grooves (21). A spring (24) is provided on one side of each slider (22). Three rectangular blocks (23) are fixedly connected to the top of the bearing plate (1). The rectangular blocks (23) are located at one end of the grooves (21). The two ends of the springs (24) are fixedly connected to one side of the rectangular blocks (23) and one side of the sliders (22), respectively. A grooved rod (26) is fixedly connected to the center of the bottom end of the carrier plate (1). A sliding rod (27) is slidably connected to the inner wall of the grooved rod (26). A screw (28) is fixedly connected to one side of the sliding rod (27). The screw (28) slides on one side of the inner wall of the grooved rod (26). A threaded ring (29) is threadedly connected to the outer surface of the screw (28). A connecting rod (25) is rotatably connected to the bottom end of the sliding rod (27). The two ends of the connecting rod (25) are rotatably connected to the bottom end of the sliding rod (27) and the bottom end of the slider (22), respectively.

3. The clamping mechanism for measuring the thickness of an abrasive disc according to claim 2, characterized in that: A round rod (213) is fixedly connected to one side of the slider (22). The end of the round rod (213) away from the slider (22) slides on the inner wall of the rectangular block (23). A spring (24) is sleeved on the outside of the round rod (213).

4. The clamping mechanism for measuring the thickness of an abrasive disc according to claim 3, characterized in that: The outer surface of the slider (22) is fixedly connected to a positioning piece (210), and the top of the positioning piece (210) slides on the bottom surface of the bearing plate (1).

5. The clamping mechanism for measuring the thickness of an abrasive disc according to claim 4, characterized in that: An auxiliary piece (211) is fixedly connected to one side of the threaded ring (29), and the auxiliary piece (211) is made of rubber.

6. The clamping mechanism for measuring the thickness of an abrasive disc according to claim 5, characterized in that: Two protrusions (212) are fixedly connected to the outer surface of the threaded ring (29), and the protrusions (212) are located on opposite sides of the outer surface of the threaded ring (29).

7. The clamping mechanism for measuring the thickness of an abrasive disc according to claim 2, characterized in that: An auxiliary device (3) is provided on one side of the slider (22). The auxiliary device (3) includes a rotating shaft (31) and a limiting block (33). The rotating shaft (31) rotates on the inner wall of the slider (22). A coil spring (32) is provided at one end of the rotating shaft (31). The two ends of the coil spring (32) are fixedly connected to one side of the rotating shaft (31) and one side of the slider (22), respectively. The two ends of the rotating shaft (31) are fixedly connected to the two ends of the limiting block (33).

8. The clamping mechanism for measuring the thickness of an abrasive disc according to claim 7, characterized in that: The upper and lower ends of the limiting block (33) are respectively fixedly connected with protrusions (34), which are made of rubber.

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