A rack mount for precision component mounting within a semiconductor
By designing a rack mounting base with a sliding groove, locking block, and limiting structure, the problem of racks being prone to loosening under external interference was solved, achieving high-precision rack mounting and improving the transmission accuracy and stability of semiconductor equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI DEQISHUN PRECISION MASCH EQUIP CO LTD
- Filing Date
- 2025-07-31
- Publication Date
- 2026-07-31
AI Technical Summary
Existing rack and pinion mounts for mounting precision components inside semiconductors are difficult to resist external interference, which can cause the rack to easily shift or loosen, affecting transmission accuracy and equipment stability.
A rack mounting base is designed, comprising a slide, a locking block, a trapezoidal block, a push rod, and a limiting structure. By cooperating the locking block with the slide and the trapezoidal block with the locking slot, and by using a spring and a limiting rod to limit the position of the locking block, the stability and accuracy of the rack body are ensured.
This technology enables precise positioning and installation of the rack body, reduces installation errors, and improves the transmission accuracy and product quality of semiconductor equipment.
Smart Images
Figure CN224575557U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of rack and pinion mounting technology, and in particular to a rack and pinion mounting base for mounting precision components inside a semiconductor. Background Technology
[0002] In the semiconductor manufacturing industry, rapid technological advancements have led to a continuous increase in chip integration, placing stringent demands on the installation precision and stability of internal components. From chip manufacturing to packaging and testing, the accuracy of the installation of various precision components, such as optical components in lithography equipment, reaction chamber components in etching machines, and wire bonding devices during chip packaging, directly affects the performance, quality, and production efficiency of semiconductor products.
[0003] However, existing rack and pinion mounts for mounting precision components within semiconductors have the following drawbacks: Traditional mounting brackets are difficult to resist external interference, which makes the rack prone to displacement or loosening after being disturbed. This not only leads to a decrease in transmission accuracy, but may also change the relative positions between precision components, seriously affecting the normal operation of semiconductor equipment and increasing equipment maintenance costs and downtime.
[0004] Therefore, this utility model provides a rack and pinion mounting base for mounting precision components inside a semiconductor. Utility Model Content
[0005] (a) Technical problems to be solved The technical problem solved by the utility model is to provide a rack mounting base for mounting precision components in semiconductors that is highly practical, easy to operate, and has a simple structure, thus solving the problem mentioned in the background art that the rack is prone to displacement or loosening after being subjected to external interference.
[0006] (II) Technical Solution To achieve the above objectives, this utility model provides the following technical solution: a rack mounting base for mounting precision components inside a semiconductor, comprising a mounting base, a sliding groove on one side of the mounting base, a locking block slidably connected inside the sliding groove, a rack body fixedly connected to the top of the locking block, a cavity inside the mounting base, a push rod slidably connected to the inner wall of the cavity, one end of the push rod extending to the outside of the mounting base, a sliding plate fixedly connected to the other end of the push rod, a trapezoidal block fixedly connected to one side of the sliding plate, one end of the trapezoidal block extending into the sliding groove, and a spring connecting the sliding plate and the inner bottom wall of the cavity.
[0007] Optionally, a fixing block is fixedly connected to one end of the push rod. The fixing block is circular, so that the operator can push the push rod more easily and stably when it is necessary to disassemble the rack body.
[0008] Optionally, the bottom of the card block is provided with a card slot, which is adapted to the trapezoidal block. Due to the high degree of compatibility between the two, the position of the card block in the slide groove can be precisely limited, ensuring that the rack body will not move arbitrarily after installation, thus ensuring the stability and accuracy of rack installation and meeting the strict requirements for positional accuracy in the installation of semiconductor precision components.
[0009] Optionally, a limiting rod is provided through the surface of the sliding plate. One end of the limiting rod is fixedly connected to the inner bottom wall of the cavity. When the push rod is pushed to move the sliding plate, the limiting rod can effectively prevent the sliding plate from shifting, tilting, or shaking.
[0010] Optionally, limit grooves are provided on both sides of the top of the mounting base. Limiting posts are movably connected inside the limit grooves. The limiting posts are fixedly connected to the bottom of the rack body. During the operation of the equipment, even if subjected to external forces such as vibration and impact, the movement of the limiting posts in the limit grooves can limit the horizontal displacement of the rack body and prevent the rack body from shaking or twisting.
[0011] Optionally, a round rod is fixedly connected to the inner wall of the slide groove, and a round groove is opened on one side of the block. The round rod is adapted to the round groove, which makes the block slide more smoothly and stably in the slide groove, effectively avoiding jamming or displacement of the block during the sliding process.
[0012] (III) Beneficial Effects This utility model provides a rack and pinion mounting base for mounting precision components inside semiconductors, which has the following advantages: 1. This rack mounting base for mounting precision components inside a semiconductor device achieves precise positioning and installation of the rack body through the cooperation of the locking block and the sliding groove, the trapezoidal block and the locking groove, and the round rod and the round groove. This effectively reduces errors during the installation process. This high-precision installation method makes the cooperation between the rack body and other precision components more accurate, improves the transmission accuracy of semiconductor equipment, and helps to improve the manufacturing precision and quality of semiconductor products. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the overall side view structure of this utility model; Figure 3 This is a schematic diagram of the limiting column structure of this utility model; Figure 4 This is a schematic diagram of the limiting rod structure of this utility model.
[0014] In the diagram: 1. Mounting base; 2. Locking block; 3. Rack body; 4. Push rod; 5. Sliding plate; 6. Trapezoidal block; 7. Spring; 8. Fixing block; 10. Limiting rod; 11. Limiting post; 13. Round rod; 14. Round groove. Detailed Implementation
[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.
[0016] Please see Figures 1 to 4 This utility model provides a technical solution: a rack mounting base for mounting precision components in semiconductors, including a mounting base 1. A groove is formed on one side of the mounting base 1, providing a track for the movement of subsequent components. A locking block 2 is slidably connected inside the groove, and a rack body 3 is fixedly connected to the top of the locking block 2. The rack body 3 is made of 304 stainless steel with a hardness of approximately HV200-250 and a surface roughness Ra≤0.8μm. The good corrosion resistance of stainless steel prevents rusting in the semiconductor manufacturing environment, which would affect the mounting accuracy and performance of the rack body 3. The low surface roughness ensures that the locking block remains within the groove. The internal sliding is smooth, reducing frictional resistance, while ensuring good meshing between the rack body 3 and other precision components. The mounting base 1 has an internal cavity, and a push rod 4 is slidably connected to the inner wall of the cavity. One end of the push rod 4 extends to the outside of the mounting base 1, and the other end of the push rod 4 is fixedly connected to a sliding plate 5. A trapezoidal block 6 is fixedly connected to one side of the sliding plate 5, and one end of the trapezoidal block 6 extends into the interior of the slide groove. A spring 7 is connected between the sliding plate 5 and the inner bottom wall of the cavity. The spring 7 provides elastic force, which can reset the sliding plate 5 and the trapezoidal block 6 when the push rod 4 is not subjected to external force, thereby fixing the locking block 2. One end of the push rod 4 is fixedly connected to a fixing block 8, which is circular in shape. When it is necessary to disassemble the rack body 3, the operator can push the push rod 4 more easily and stably. The bottom of the card block 2 is provided with a card slot, which is compatible with the trapezoidal block 6. Due to the high compatibility between the two, the position of the card block 2 in the slide groove can be precisely limited, ensuring that the rack body 3 will not move at will after installation, thus ensuring the stability and accuracy of rack installation and meeting the strict requirements of positional accuracy for the installation of semiconductor precision components. The surface of the sliding plate 5 moves through the limiting rod 10. One end of the limiting rod 10 is fixedly connected to the inner bottom wall of the cavity. When the push rod 4 is pushed to move the sliding plate 5, the limiting rod 10 can effectively prevent the sliding plate 5 from shifting, tilting or shaking. Limiting grooves are provided on both sides of the top of the mounting base 1. Limiting post 11 is movably connected inside the limiting groove. The limiting post 11 is fixedly connected to the bottom of the rack body 3. During the operation of the equipment, even if it is subjected to external forces such as vibration and impact, the movement of the limiting post 11 in the limiting groove can limit the horizontal displacement of the rack body 3 and prevent the rack body 3 from shaking or twisting. A round rod 13 is fixedly connected to the inner wall of the slide groove, and a round groove 14 is opened on one side of the block 2. The round rod 13 is adapted to the round groove 14, which makes the sliding of the block 2 in the slide groove smoother and more stable, effectively avoiding the block 2 from getting stuck or shifting during the sliding process.
[0017] In this invention, the working steps of the device are as follows: First step: When installing the rack body 3, align the locking block 2 with the slide groove on one side of the mounting base 1 and insert it. At this time, the trapezoidal block 6 located in the cavity of the mounting base 1 extends one end into the slide groove under the elastic force of the spring 7. As the locking block 2 slides in the slide groove, the locking groove at the bottom of the locking block 2 that matches the trapezoidal block 6 will gradually approach the trapezoidal block 6. When the locking groove and the trapezoidal block 6 are completely matched, the trapezoidal block 6 will be locked into the locking groove, thereby fixing the locking block 2 in the slide groove, realizing the installation and fixation of the rack body 3. During this process, the round rod 13 fixedly connected to the inner wall of the slide groove will be inserted into the round groove 14 opened on one side of the locking block 2, which plays a guiding and auxiliary positioning role, ensuring that the locking block 2 slides smoothly in the slide groove, avoiding its displacement or shaking, and improving the installation accuracy.
[0018] It should be noted that the device structure and accompanying drawings of this utility model mainly describe the principle of this utility model. In terms of the technical aspects of this design principle, the setting of the power mechanism, power supply system and control system of the device is not fully described. However, under the premise that those skilled in the art understand the principle of the above utility model, the specific details of its power mechanism, power supply system and control system can be clearly understood. The control method in the application document is automatic control through a controller. The control circuit of the controller can be implemented by those skilled in the art through simple programming. All standard parts used can be purchased from the market, and can be customized according to the instructions and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the existing technology. The machinery, parts and equipment adopt conventional models in the existing technology, and the structure and principle of the components known to those skilled in the art can be known by those skilled in the art through technical manuals or conventional experimental methods.
[0019] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A rack and pinion mounting base for mounting precision components within a semiconductor, comprising a mounting base (1), characterized in that: A groove is provided on one side of the mounting base (1), and a locking block (2) is slidably connected inside the groove. A rack body (3) is fixedly connected to the top of the locking block (2). A cavity is provided inside the mounting base (1), and a push rod (4) is slidably connected to the inner wall of the cavity. One end of the push rod (4) extends to the outside of the mounting base (1), and the other end of the push rod (4) is fixedly connected to a sliding plate (5). A trapezoidal block (6) is fixedly connected to one side of the sliding plate (5), and one end of the trapezoidal block (6) extends into the groove. A spring (7) is connected between the sliding plate (5) and the inner bottom wall of the cavity.
2. The rack mount for mounting a precision component within a semiconductor as defined in claim 1, wherein: One end of the push rod (4) is fixedly connected to a fixing block (8), which is circular in shape.
3. The rack mount of claim 1, wherein: the first and second mounting members are each formed of a single piece of material; and the first and second mounting members are each formed of a single piece of material that is bent to form the first and second mounting members. The bottom of the card block (2) is provided with a card slot, which is adapted to the trapezoidal block (6).
4. The rack mount of claim 1, wherein: The surface of the sliding plate (5) moves through the limiting rod (10), and one end of the limiting rod (10) is fixedly connected to the inner bottom wall of the cavity.
5. The rack mount of claim 1, wherein: the first and second mounting members are each formed of a single piece of material; and the first and second mounting members each include a plurality of mounting holes formed therein. The mounting base (1) has limit grooves on both sides of its top, and a limit post (11) is movably connected inside the limit groove. The limit post (11) is fixedly connected to the bottom of the rack body (3).
6. The rack mount of claim 1, wherein: A round rod (13) is fixedly connected to the inner wall of the slide, and a round groove (14) is provided on one side of the locking block (2), and the round rod (13) is adapted to the round groove (14).