Maintenance fixtures for etching machines

Abstract

This application provides a maintenance fixture for an etching machine, including a lifting part, a main body, a first rotating connecting part, and a second rotating connecting part. The lifting part is vertically connected to the support column of the etching machine. The main body includes a carrier and a support. The maintenance fixture has a folded state and an unfolded state. The carrier is rotatably connected to the lifting part via the first rotating connecting part, and the support is rotatably connected to the carrier via the second rotating connecting part. The carrier can rotate around the first rotating connecting part, and the support can rotate around the second rotating connecting part to switch between the folded and unfolded states. In the folded state, the carrier and support are parallel to the support column. In the unfolded state, the carrier is horizontal, and the support is supported below the carrier at a preset angle. This maintenance fixture facilitates maintenance personnel in performing maintenance operations on the etching machine and improves the safety of maintenance operations.

Description

Technical Field

[0001] This application relates to the field of etching machine maintenance technology, and in particular to a maintenance fixture for etching machines. Background Technology

[0002] The etching equipment includes a vacuum chamber, a transfer platform, a support, and auxiliary etching modules (such as a gas cabinet, process gas pipelines, process gas flow verification module, process gas flow distribution module, etc.). The vacuum chamber is connected to the transfer platform through a valve, the support is mounted on the transfer platform, and the auxiliary etching modules are mounted on the support.

[0003] Etching machines require maintenance after a certain period of use. For auxiliary etching modules installed high on the support frame, maintenance personnel need to stand on a ladder to perform maintenance. However, due to the unevenness of the transport platform (with steps), the ladder is difficult to place stably. Furthermore, the space above the transport platform is limited, and placing the ladder occupies this limited space. Additionally, there are no suitable anchor points on the transport platform to secure the ladder, resulting in significant safety hazards when performing maintenance work while standing on the ladder.

[0004] Therefore, how to facilitate maintenance personnel in performing maintenance operations on etching machines and improve the safety of maintenance operations is a technical problem that needs to be solved by those skilled in the art. Utility Model Content

[0005] This application provides a maintenance fixture for an etching machine, the maintenance fixture including a lifting part, a main body, a first rotating connection part, and a second rotating connection part, the lifting part being vertically and vertically connected to the support column of the etching machine, and the main body including a carrier and a support body;

[0006] The maintenance fixture has a folded state and an unfolded state. The carrier is rotatably connected to the lifting part through the first rotating connection part, and the support is rotatably connected to the carrier through the second rotating connection part. The carrier can rotate around the first rotating connection part, and the support can rotate around the second rotating connection part to realize the switching between the folded state and the unfolded state.

[0007] In the folded state, the carrier and the support are parallel to the support column. In the unfolded state, the carrier is horizontal and the support is supported below the carrier and forms a preset angle with the carrier.

[0008] In one optional embodiment of the maintenance fixture for an etching machine, in the unfolded state, the end of the support body away from the carrier body abuts against the support column, and the lifting part, the support body, and the carrier body form a triangular structure; or...

[0009] In the unfolded state, the end of the support body away from the carrier body abuts against the transmission platform of the etching machine, and the support body is a telescopic structure.

[0010] An optional embodiment of the maintenance fixture for an etching machine includes an unfolding locking part. In the unfolded state, the end of the support body away from the carrier body is locked to the lifting part or the transmission platform by the unfolding locking part.

[0011] An optional embodiment of the maintenance fixture for an etching machine includes a third rotating connection part, which is connected between the second rotating connection part and the support column or between the second rotating connection part and the carrier. In the unfolded state, the carrier can swing around the third rotating connection part in a horizontal plane.

[0012] In one optional embodiment of the maintenance fixture for the etching machine, the first rotary connecting part, the second rotary connecting part, and the third rotary connecting part are electric rotary tables or hinges.

[0013] In one optional embodiment of the maintenance fixture for an etching machine, a buffer component is provided on the side of the support body facing the carrier body and / or on the side of the carrier body facing the support body.

[0014] An optional embodiment of the maintenance fixture for an etching machine is provided, wherein the carrier is a telescopic structure, and in the unfolded state, the carrier can extend and retract horizontally.

[0015] An optional embodiment of the maintenance fixture for an etching machine includes a lifting drive unit, which is connected to the lifting unit to drive the lifting unit to automatically lift and lower.

[0016] An optional embodiment of the maintenance fixture for an etching machine includes an upper limit component and a lower limit component, which are connected to the support column and are used to limit the lifting limits of the lifting part.

[0017] An optional embodiment of the maintenance fixture for an etching machine includes a lifting locking part for locking the lifting part to the current height position, the lifting locking part being capable of self-locking when power is off.

[0018] An optional embodiment of the maintenance fixture for an etching machine includes a gravity sensor for detecting the weight of the maintenance fixture and its load. The gravity sensor is communicatively connected to the control unit of the lifting and locking part and is configured such that when the weight detected by the gravity sensor exceeds a preset value, the lifting and locking part locks the lifting part at the current height position.

[0019] An alternative embodiment of the maintenance fixture for an etching machine includes a folding locking part for locking the maintenance fixture in the folded state.

[0020] In one optional embodiment of the maintenance fixture for an etching machine, a limiting part is connected between the carrier and the support, and the limiting part is rotatably connected to the carrier and the support to limit the maximum rotation angle of the support relative to the carrier.

[0021] In one optional embodiment of the maintenance fixture for an etching machine, a booster spring is connected between the carrier and the lifting part. In the unfolded state, the booster spring is in a stretched state, and in the folded state, the booster spring is in a compressed state and self-locking.

[0022] The maintenance fixture provided in this application has a support body that can be raised and lowered as needed. When the fixture is unfolded, maintenance personnel can stand on the support body to maintain auxiliary etching modules mounted at different heights on the etching platform, facilitating maintenance work. The fixture is secured by the support columns of the etching machine, ensuring stability and reliability and improving the safety of maintenance operations. After maintenance, the fixture can be folded up to avoid encroaching on the limited overhead space of the transmission platform. Attached Figure Description

[0023] Figure 1 A perspective view of the first embodiment of the maintenance fixture for the etching machine provided in this application, installed on the support column of the etching machine;

[0024] Figure 2 for Figure 1 A plan view of a single maintenance tool in its unfolded state, which also shows a support column of the etching platform;

[0025] Figure 3 for Figure 1 A plan view of a single maintenance tool in its folded state, which also shows a support column of the etching platform;

[0026] Figure 4 The second embodiment of the maintenance fixture for the etching machine provided in this application is shown in a plan view in its unfolded state. The figure also shows a support column of the etching platform.

[0027] Figure 5 The second embodiment of the maintenance fixture for the etching machine provided in this application is shown in a folded state as a plan view. The figure also shows a support column of the etching platform.

[0028] Figure 6 for Figure 4The top view shows the maintenance fixture in folded, unfolded, extended, and swung states. The figure also shows the transmission platform and vacuum chamber of the etching platform.

[0029] The annotations in the attached figures are explained as follows:

[0030] 10 Maintenance fixture, 101 Lifting part, 1021 Carrier, 1022 Support, 103 First rotating connection, 104 Second rotating connection, 105 Limiting part, 106 First handle, 107 Second handle, 108 Buffer component, 109 Lifting drive part, 110 Folding locking part, 111 Unfolding locking part, 112 Assist spring, 113 Third rotating connection;

[0031] 20 Etching machine, 201 Vacuum chamber, 202 Transfer platform, 203 Column, 204 Auxiliary etching module. Detailed Implementation

[0032] This application provides a maintenance fixture for an etching machine. To enable those skilled in the art to better understand the technical solution of this application, the technical solution of this application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0033] like Figure 1 As shown, the etching stage 20 includes a vacuum chamber 201 ( Figure 1 (Not shown in the image), transfer platform 202, support, and auxiliary etching module 204. Vacuum chamber 201 is connected to transfer platform 202 via a valve (in conjunction with...). Figure 6 (Understanding). The support is mounted on the transmission platform 202. The auxiliary etching module 204 is mounted at different height positions on the support. The auxiliary etching module 204 includes, but is not limited to, a gas holder, process gas pipelines, a process gas flow verification module, and a process gas flow distribution module.

[0034] The support frame includes multiple uprights 203. Maintenance fixtures 10 are connected to the uprights 203. One maintenance fixture 10 can be connected to only one upright 203, or one maintenance fixture 10 can be connected to each of two or more uprights 203. In the figure, eight uprights 203 are arranged sequentially along the circumference, with a maintenance fixture 10 connected to every other upright 203, for a total of four maintenance fixtures 10. These four maintenance fixtures 10 are located inside the circumference of the eight uprights 203.

[0035] like Figures 2-5 As shown, the maintenance fixture 10 includes at least a lifting part 101, a main body, a first rotating connecting part 103, and a second rotating connecting part 104.

[0036] The lifting unit 101 is vertically connected to the support column 203 of the etching machine 20. For example, the base part of the slide can be fixedly installed on the support column 203, and the movable part of the slide can be used as the lifting unit 101.

[0037] The main body includes a carrier 1021 and a support 1022. For example, the carrier 1021 and the support 1022 can be made of lightweight and high-strength materials such as aluminum alloy and magnesium alloy.

[0038] The maintenance fixture 10 has a folded state and an unfolded state. The carrier 1021 is rotatably connected to the lifting unit 101 via a first rotating connection 103, and the support 1022 is rotatably connected to the carrier 1021 via a second rotating connection 104. The carrier 1021 can rotate around the first rotating connection 103, and the support 1022 can rotate around the second rotating connection 104 to switch between the folded and unfolded states.

[0039] like Figure 2 or Figure 4 As shown, in the unfolded state, the support body 1021 is horizontal, and the support body 1022 forms a preset angle with the support body 1021 and is supported below the support body 1021. The preset angle is greater than 0°. It should be noted that the horizontality of the support body 1021 means that the angle between the support body 1021 and the direction perpendicular to the direction of gravity is within 5°.

[0040] like Figure 3 or Figure 5 As shown, in the folded state, the carrier 1021 and the support 1022 are parallel to the support column 203. It should be noted that the carrier 1021 and the support 1022 being parallel to the support column 203 means that the angle between the carrier 1021 and the support 1022 and the support column 203 is within 5°.

[0041] After a certain period of use, the etching machine 20 requires maintenance. During maintenance, the support 1021 is adjusted to a suitable height, and the maintenance fixture is switched to the unfolded state. Maintenance personnel stand on the support 1021 to maintain the auxiliary etching modules 204 installed at different heights on the support of the etching platform, facilitating maintenance work. The maintenance fixture 10 is fixed by the support column 203 of the etching machine 20, ensuring stability and reliability and improving the safety of maintenance operations. After maintenance, the maintenance fixture is switched to the folded state to avoid encroaching on the limited overhead space of the transmission platform 202.

[0042] Specifically, the first rotary connection 103 and the second rotary connection 104 can be hinges or electric rotary tables. An electric rotary table includes a motor providing power, a transmission assembly, a support shaft, and a rotary table body. The motor drives the rotary table body to rotate around the support shaft via the transmission assembly. The support shaft is fixedly connected to the lifting part 101, and the rotary table body is fixedly connected to the carrier 1021, thus achieving a rotatable connection between the carrier 1021 and the lifting part 101. Alternatively, the support shaft is fixedly connected to the carrier 1021, and the rotary table body is fixedly connected to the support 1022, thus achieving a rotatable connection between the carrier 1021 and the support 1022. When using hinges, the maintenance tooling needs to be manually unfolded or folded. A damping hinge is preferred, as it allows the carrier 1021 to remain stationary without external human force, preventing it from rotating or swaying under its own weight. When using an electric rotary table, the maintenance tooling can be automatically unfolded or folded, making it more convenient and labor-saving to use.

[0043] Specifically, the maintenance fixture 10 can be equipped with an upper limit component and a lower limit component, which are connected to the support column 203. The upper limit component and the lower limit component are used to limit the lifting limit of the lifting part 101. That is, when the lifting part 101 rises to the highest position, it abuts against the upper limit component to achieve the limit, and when the lifting part 101 falls to the lowest position, it abuts against the lower limit component to achieve the limit.

[0044] Specifically, the maintenance fixture 10 may be equipped with a lifting locking part, which is used to lock the lifting part 101. In the locked state, the lifting part 101 is stable at the current height position and cannot be raised or lowered. The lifting locking part can self-lock when power is off, thus preventing the lifting part 101 from accidentally falling and causing a safety accident when power is off. Locking structures capable of self-locking when power is off are well known to those skilled in the art, and their structure will not be described in detail here.

[0045] Specifically, the maintenance fixture 10 can be equipped with a gravity sensor to detect the weight of the maintenance fixture 10 and its load. The gravity sensor is communicatively connected to the control unit of the lifting locking part and is configured such that when the weight detected by the gravity sensor exceeds a preset value, the lifting locking part locks the lifting part 101. This can prevent safety accidents caused by the lifting part 101 rising and falling when the actual load of the maintenance fixture 10 exceeds the design load.

[0046] Specifically, such as Figures 2-5 As shown, the maintenance fixture 10 may be equipped with a lifting drive unit 109, which is connected to the lifting unit 101 and can drive the lifting unit 101 to automatically lift and lower. For example, the lifting drive unit 109 may be a linear motor, a pneumatic cylinder, or a hydraulic cylinder.

[0047] Specifically, such as Figures 2-5As shown, the maintenance fixture 10 may be equipped with a folding locking part 110. The folding locking part 110 is used to lock the maintenance fixture in a folded state, thus preventing the maintenance fixture from accidentally unfolding due to its own weight or external force when folded. Exemplarily, the folding locking part 110 includes a latching protrusion on the support column 203 and a latching slot on the carrier 1021. After folding, the latching protrusion engages with the latching slot, locking the carrier 1021 in a position parallel to the support column 203. Of course, the structure of the folding locking part 110 is not limited to this; any structure that can lock the maintenance fixture in a folded state and unlock it is acceptable.

[0048] Specifically, such as Figure 2 or Figure 3 As shown, a booster spring 112 can be connected between the support body 1021 and the lifting part 101. In the unfolded state, the booster spring 112 is in a stretched state; in the folded state, the booster spring 112 is in a compressed state, and the booster spring 112 is self-locking. After self-locking, the booster spring 112 will not spring open under its own elastic force. For example, the booster spring 112 can be a commercially available gas spring with a self-locking function. The booster spring 112 makes manual folding easier. If the folding and unfolding of the maintenance fixture is automatically performed by an electric rotary table, the booster spring 112 may not be necessary.

[0049] Specifically, such as Figure 2 or Figure 3 As shown, a buffer component 108 may be provided on the side of the support 1022 facing the carrier 1021 and / or the side of the carrier 1021 facing the support 1022 to avoid rigid impact between the support 1022 and the carrier 1021 during folding, and also to prevent injury to personnel's fingers or other parts from being pinched by the carrier 1021 and the support 1022 during operation. The buffer component 108 may be made of a soft material with a low coefficient of friction, such as Teflon.

[0050] Specifically, such as Figure 2 or Figure 3 As shown, a first handle 106 and a second handle 107 can be respectively provided on the carrier 1021 and the support 1022 to facilitate unfolding and folding operations.

[0051] Specifically, such as Figure 2 or Figure 3 As shown, in the unfolded state, the end of the support body 1022 away from the carrier body 1021 abuts against the support column 203, and the lifting part 101, the support body 1022 and the carrier body 1021 form a stable triangular structure.

[0052] Or, such as Figure 4 or Figure 5As shown, the support 1022 is a telescopic structure. In its extended state, the end of the support 1022 away from the carrier 1021 abuts against the transmission platform 202 of the etching machine 20. The support 1022 adapts to the lifting and lowering of the carrier 1021 by telescoping, ensuring that it can reliably support the carrier 1021 throughout its lifting stroke, and also overcoming the influence of uneven surface of the transmission platform 202.

[0053] Specifically, such as Figures 2-5 As shown, the maintenance fixture 10 can be equipped with an unfolding locking part 111. In the unfolded state, the end of the support body 1022 away from the carrier body 1021 is locked to the lifting part 101 or the transmission platform 202 by the unfolding locking part 111. The locking function of the unfolding locking part 111 prevents the end of the support body 1022 away from the carrier body 1021 from separating from the lifting part 101 or the transmission platform 202 during use, which would result in the carrier body 1021 not receiving reliable support from the support body 1022 and causing maintenance personnel to fall.

[0054] Specifically, such as Figure 4 or Figure 5 As shown, the support body 1021 can adopt a telescopic structure, and in the unfolded state, the support body 1021 can extend and retract horizontally. In this way, the bearing area of ​​the support body 1021 can be expanded according to actual needs.

[0055] Specifically, such as Figure 4 or Figure 5 As shown, the maintenance fixture 10 can be equipped with a third rotating connection 113. The third rotating connection 113 connects between the second rotating connection 104 and the support column 203, or between the second rotating connection 104 and the carrier 1021. In the unfolded state, the carrier 1021 can rotate horizontally around the third rotating connection 113. This allows the working range of maintenance personnel to be expanded by rotating the carrier 1021. The third rotating connection 113 can be a hinge or an electric rotary table. When an electric rotary table is used, the carrier 1021 can be automatically rotated, making it more convenient and labor-saving to use.

[0056] Figure 2 and Figure 3 In the illustrated embodiment, a limiting portion 105 connects the carrier 1021 and the support 1022 to limit the maximum rotation angle of the support 1022 relative to the carrier 1021, preventing the included angle between the support 1022 and the carrier 1021 from being too large and affecting the support of the support 1022 on the carrier 1021. The limiting portion 105 can be flexible, such as a steel wire rope, or it can be rigid. If rigid, the limiting portion 105 needs to be rotatably connected to the carrier 1021 and the support 1022 to avoid affecting the rotation of the support 1022 relative to the carrier 1021.

[0057] Figure 2 and Figure 3 In the illustrated embodiment, the unfolding locking part 111 includes a first engaging part disposed at the end of the support body 1022 away from the carrier body 1021 and a second engaging part disposed at the lifting part 101. The first engaging part and the second engaging part engage to lock the support body 1022 and the lifting part 101. The portion of the unfolding locking part 111 that contacts the lifting part 101 can use a high-strength, wear-resistant resin material to cushion the impact during locking. For example, the high-strength, wear-resistant resin material can be polyoxymethylene (POM).

[0058] Figure 4 and Figure 5 In the illustrated embodiment, the support body 1021 is a two-segment telescopic structure, including a first segment 1021a and a second segment 1021b, wherein the second segment 1021b can extend or shorten relative to the first segment 1021a. At least one support body 1022 is rotatably connected to each of the first and second segments 1021a. In the figure, one support body 1022 is connected to the first segment 1021a, and two support bodies 1022 are connected to the second segment 1021b. The support body 1021 can also be a three-segment or more telescopic structure.

[0059] Figure 4 and Figure 5 In the illustrated embodiment, the unfolding locking part is a suction cup located at the end of the support 1022 away from the carrier 1021. In the unfolded state, the end of the support 1022 away from the carrier 1021 is attracted to the transmission platform 202 via the suction cup, making the position of the support 1022 more stable. The suction cup can be a magnetic suction cup or a vacuum suction cup.

[0060] Figure 4 and Figure 5 In the illustrated embodiment, the third rotating connecting part 113 is connected between the second rotating connecting part 104 and the lifting part 101. In the unfolded state, the carrier 1021 and the second rotating connecting part 104 rotate horizontally together around the third rotating connecting part 113. Figure 6 As shown, Figure 6 Figures a, b, c, and d respectively show the maintenance fixture 10 in its folded, unfolded, extended, and swaying states. Extending the support body 1021 increases its bearing area, while swaying it expands the working range for maintenance personnel.

[0061] The above examples illustrate the principles and implementation methods of this application. The descriptions of these embodiments are merely for the purpose of helping to understand the method and core ideas of this application. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this application.

Claims

1. A maintenance tool for an etching machine, characterized in that, The maintenance fixture (10) includes a lifting part (101), a main body, a first rotating connection part (103), and a second rotating connection part (104). The lifting part (101) is vertically connected to the support column (203) of the etching machine (20). The main body includes a carrier (1021) and a support (1022). The maintenance fixture (10) has a folded state and an unfolded state. The carrier (1021) is rotatably connected to the lifting part (101) through the first rotating connection part (103). The support (1022) is rotatably connected to the carrier (1021) through the second rotating connection part (104). The carrier (1021) can rotate around the first rotating connection part (103), and the support (1022) can rotate around the second rotating connection part (104) to realize the switching between the folded state and the unfolded state. In the folded state, the carrier (1021) and the support (1022) are parallel to the support column (203). In the unfolded state, the carrier (1021) is horizontal and the support (1022) is supported below the carrier (1021) and forms a preset angle with the carrier (1021).

2. The maintenance tooling for an etch tool according to claim 1, wherein, In the unfolded state, the end of the support (1022) away from the carrier (1021) abuts against the support column (203), and the lifting part (101), the support (1022), and the carrier (1021) form a triangular structure; or, In the unfolded state, the end of the support (1022) away from the carrier (1021) abuts against the transmission platform (202) of the etching machine (20), and the support (1022) is a telescopic structure.

3. The maintenance tooling for an etch tool according to claim 2, wherein, The maintenance fixture (10) includes an unfolding locking part (111). In the unfolded state, the end of the support body (1022) away from the carrier body (1021) is locked to the lifting part (101) or the transmission platform (202) by the unfolding locking part (111).

4. The maintenance tooling for an etch tool according to claim 2, wherein, The maintenance fixture (10) includes a third rotating connection (113), which is connected between the second rotating connection (104) and the support column (203) or between the second rotating connection (104) and the carrier (1021). In the unfolded state, the carrier (1021) can swing around the third rotating connection (113) in the horizontal plane.

5. The maintenance tooling for an etch tool according to claim 4, wherein, The first rotary connecting part (103), the second rotary connecting part (104), and the third rotary connecting part (113) are electric rotary tables or hinges.

6. The maintenance tooling for an etching chamber as recited in any of claims 1-5, wherein, The support (1022) is provided with a buffer member (108) on the side facing the carrier (1021) and / or the carrier (1021) is provided with a buffer member (108) on the side facing the support (1022).

7. The maintenance tooling for an etching chamber as recited in any of claims 1-5, wherein, The carrier (1021) is a telescopic structure, and in the unfolded state, the carrier (1021) can extend and retract horizontally.

8. The maintenance tooling for an etching chamber as recited in any of claims 1-5, wherein, The maintenance fixture (10) includes a lifting drive unit (109), which is connected to the lifting unit (101) to drive the lifting unit (101) to automatically lift.

9. The maintenance tooling for an etching chamber as recited in any of claims 1-5, wherein, The maintenance fixture (10) includes an upper limit component and a lower limit component, which are connected to the support column (203). The upper limit component and the lower limit component are used to limit the lifting limit of the lifting part (101).

10. The maintenance tooling for an etching chamber as recited in any of claims 1-5, wherein, The maintenance fixture (10) includes a lifting locking part for locking the lifting part (101) to the current height position, the lifting locking part being capable of self-locking when power is off.

11. The maintenance tooling for an etch tool according to claim 10, wherein, The maintenance fixture (10) includes a gravity sensor, which is used to detect the weight of the maintenance fixture (10) and its load. The gravity sensor is communicatively connected to the control unit of the lifting locking part and is configured such that when the weight detected by the gravity sensor exceeds a preset value, the lifting locking part locks the lifting part (101) at the current height position.

12. The maintenance tooling for an etching chamber as recited in any of claims 1-5, wherein, The maintenance fixture (10) includes a folding locking part (110) for locking the maintenance fixture (10) in the folded state.

13. The maintenance tooling for an etching chamber as recited in any of claims 1-5, wherein, A limiting portion (105) is connected between the carrier (1021) and the support (1022) to limit the maximum rotation angle of the support (1022) relative to the carrier (1021).

14. The maintenance tooling for an etching chamber as recited in any of claims 1-5, wherein, A booster spring (112) is connected between the carrier (1021) and the lifting part (101). In the unfolded state, the booster spring (112) is in a stretched state, and in the folded state, the booster spring (112) is in a compressed state and self-locking.

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