Point contact based support structure and mechanical hand end effector

Abstract

This invention provides a point-contact-based support structure and a robotic end effector, comprising: multiple support members forming a support space; at least one support member located at the tip of a finger, and at least one support member located near the base of the finger; each support member is configured to form point-contact contact with the edge of the workpiece; each support member has a support ridge extending obliquely along its height, and multiple support points distributed on the support ridge, each support point belonging to a different height level and arranged continuously, with their virtual connection line sloping upwards from the end closest to the center of the support space to the end furthest from the center of the support space. This invention significantly reduces the physical contact area between the end effector and the wafer by using the point-contact contact between the support ridge of the support member and the wafer edge, avoiding friction, scratching, or impurity shedding caused by surface or line contact, controlling the generation of particulate contaminants at the source, and meeting the stringent requirements of semiconductor processes for an ultra-clean environment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to a point contact-based support structure and a robotic end effector. Background Technology

[0002] In the semiconductor chip manufacturing process, the wafer (usually a silicon wafer) serves as the core carrier, and its surface cleanliness directly affects the chip yield and performance.

[0003] Wafer transfer robots are key components in semiconductor manufacturing equipment (such as lithography machines, etching machines, and thin film deposition equipment), responsible for achieving high-precision, damage-free wafer transfer in an ultra-clean environment. As the component that directly contacts the wafer, the end effector's structural design is crucial for controlling particle contamination on the wafer surface.

[0004] In existing technologies, end effectors typically employ surface-contact or line-contact support structures, meaning they achieve support by contacting the back of the wafer with a planar or curved support plate. For example, common "suction cup" end effectors use vacuum to adhere to the back of the wafer, or "claw-type" actuators use multiple planar claws to contact the wafer edge. While these designs ensure stability during wafer transport, the large contact area can lead to friction or pressure between the actuator surface and the wafer back. This is especially problematic when the actuator surface contains minute impurities, processing defects, or adsorbed dust, which can easily scratch the wafer back or cause impurities to detach and form particulate contaminants.

[0005] In view of this, it is necessary to propose a point contact-based support structure and a robotic end effector to solve the above problems. Utility Model Content

[0006] The purpose of this invention is to provide a point-contact-based support structure and a robotic end effector to solve the technical problems of high risk of particulate contamination and difficulty in controlling cleanliness caused by surface-contact or line-contact support structures.

[0007] This utility model provides a point-contact-based support structure disposed on a robotic end effector. The robotic end effector includes a finger, which includes a finger base and a finger tip. The support structure includes: Multiple support members are arranged to form a support space for supporting the workpiece. At least one of the support members is located at the end of the fingertip, and at least one of the support members is located on the side of the fingertip near the root of the finger. Each of the support members is configured to form a point contact abutment with the edge of the workpiece. The support member is provided with a support ridge, which extends obliquely along the height direction and has multiple support points distributed on it. Each support point belongs to a different height level and is arranged continuously. The virtual connection line of the support points is inclined upward from the end closest to the center of the support space to the end furthest from the center of the support space.

[0008] In one possible embodiment, the support points at the same height level are located on the same circle; and / or, the support points at different height levels together constitute the support space, which gradually expands from bottom to top along the height direction.

[0009] In one possible embodiment, the support member includes an integrally formed fixing part and a supporting part, the supporting ridge is formed in the supporting part, the supporting part is located on the side of the fixing part near the center of the supporting space, and the side of the fixing part near the center of the supporting space is higher than the top of the supporting part and forms a stop surface.

[0010] In one possible embodiment, the support includes a support body with a top surface that is an inclined surface having two opposite sides, one side being located at or near the middle of the support and the other side being located at or near the side of the support, the inclined surface sloping downward from one side to the other side so that one side forms the support ridge.

[0011] In one possible embodiment, the support portion further includes a plate integrally formed with the support body and the fixing portion, wherein the top surface of the plate is lower than the height of the inclined surface, and the support body, the fixing portion and the plate form a groove.

[0012] In one possible embodiment, the connection between the side of the support body near the groove and the side of the fixing part near the groove is a rounded corner structure.

[0013] In one possible embodiment, the inclination angle of the ramp ranges from 5° to 6°.

[0014] In one possible embodiment, the height of the support at the end of the fingertip is greater than the height of the support on the side of the fingertip closer to the base of the finger.

[0015] In one possible embodiment, there are four supports, two of which are located at the ends of the fingertips and are symmetrically arranged along the length of the fingertips, and the other two are located on the side of the fingertips near the base of the fingers and are symmetrically arranged along the length of the fingertips.

[0016] This utility model also provides a robotic end effector, comprising: a body, fingers, and a point-contact-based support structure as described in any of the above embodiments.

[0017] The advantages of the point-contact-based support structure provided by this utility model are as follows: 1. By using the point contact between the support edge of the support component and the edge of the wafer, the physical contact area between the end effector and the wafer is greatly reduced. This structurally avoids friction, scratching, or impurity shedding caused by surface or line contact, controlling the generation of particulate contaminants from the source and meeting the stringent requirements of semiconductor processes for an ultra-clean environment.

[0018] 2. At least one of the multiple supports is located at the end of the fingertip and at least one fingertip is close to the base of the finger. Ensure that the supports on both sides of the wafer are set to make point contact with the edge of the wafer to reduce the contact area and avoid particle contamination.

[0019] 3. By combining the multi-point limiting effect of support points at different height levels on the wafer edge, and the design of the baffle, the risk of tilting and slipping of the wafer during high-speed movement or attitude adjustment is effectively suppressed. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the end effector of the robotic arm according to this utility model.

[0021] Figure 2 This is a schematic diagram of the support structure and fingers in the end effector of the robotic arm of this utility model.

[0022] Figure 3 This is a schematic diagram of a support member located at the end of the fingertip in the point contact-based support structure of this utility model, in one embodiment.

[0023] Figure 4 This is a schematic diagram of another embodiment of the support member located at the end of the fingertip in the point contact-based support structure of this utility model.

[0024] Figure 5 This is a schematic diagram of the support member located at the fingertip near the root of the finger in the point contact-based support structure of this utility model.

[0025] Explanation of reference numerals in the attached drawings: 100, supporting structure; 110, support member; 1101, support ridge; 1102, support space; 111, fixing part; 1111, stop surface; 1112, second elevation; 1113, mounting hole; 112, support part; 1121, support body; 11211, inclined surface; 11212, first elevation; 1122, plate; 113, groove; 114, rounded corner structure; 200, main body; 300, finger; 310, finger base; 320, finger tip. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0027] To address the problems existing in the prior art, embodiments of this utility model provide a support structure based on point contact, see [link to relevant documentation]. Figure 1 and Figure 2 The support structure 100 is disposed on the end effector of a robotic arm, which includes a finger 300. The finger 300 includes a finger root 310 and a finger tip 320. The support structure 100 includes a plurality of support members 110, which surround and form a support space 1102 for supporting a workpiece (such as a wafer). At least one support member 110 is disposed at the end of the finger tip 320 and at least one support member 110 is disposed on the side of the finger tip 320 near the finger root 310. Each support member 110 is configured to form a point contact with the edge of the workpiece. The support member 110 has a support ridge 1101, which extends obliquely along the height direction and has a plurality of support points distributed on it. Each support point belongs to a different height level and is arranged continuously. The virtual connection line of the support points slopes upward from the end near the center of the support space 1102 to the end away from the center of the support space 1102.

[0028] Existing end effectors employ surface or line contact support structures 100, resulting in large-area contact with the back of the wafer. This can easily scratch the wafer back or cause impurities to detach, forming particulate contaminants. The solution of this invention, however, uses the support ridge 1101 of the support member 110 to form point contact with the wafer edge, significantly reducing the contact area and solving the technical problems of high risk of particulate contamination and difficulty in controlling cleanliness caused by surface or line contact support structures 100.

[0029] During wafer clamping, a pusher pushes the wafer along the base of the finger 310 towards the tip of the finger 320. Simultaneously, the wafer edge moves along the support ridge 1101 of the support member 110, causing the wafer edge to abut against the support member 110 located at the tip of the finger 320. The wafer is clamped by the blocking action of the support member 110 at the tip of the finger 320 and the pushing action of the pusher. By providing support members 110 at both the tip of the finger 320 and on the side of the finger 320 near the base of the finger 310, the wafer edge is supported on both sides of the wafer movement direction, and both are configured for point contact abutment. This effectively avoids particle contamination caused by friction or compression during wafer movement, improving cleanliness.

[0030] The specific design of the support points will be explained in detail below.

[0031] In one specific embodiment, support points at the same height level are located on the same circle, and the support points at the same height level are distributed around the edge of the wafer to form effective support and point contact abutment.

[0032] In another specific embodiment, support points at different height levels collectively constitute a support space 1102, which gradually expands from bottom to top along the height direction. This gradually expanding design can accommodate wafers of different sizes and thicknesses.

[0033] The specific design of the support component 110 will be explained in detail below.

[0034] In one embodiment, see Figures 3 to 5 The support member 110 includes an integrally formed fixing part 111 and a support part 112. A support ridge 1101 is formed on the support part 112. The support part 112 is located on the side of the fixing part 111 near the center of the support space 1102. The side of the fixing part 111 near the center of the support space 1102 is higher than the top of the support part 112 and has a stop surface 1111.

[0035] During the wafer clamping process, the push rod pushes the wafer to move along the base of the finger 310 toward the end of the finger tip 320. At the same time, the edge of the wafer moves along the support ridge 1101 of the support member 110, so that the edge of the wafer abuts against the stop surface 1111 of the support member 110 located at the end of the finger tip 320. Through the blocking action of the stop surface 1111 of the support member 110 located at the end of the finger tip 320 and the pushing action of the push rod, the wafer is clamped.

[0036] In one embodiment, see Figures 3 to 5The support portion 112 includes a support body 1121. The top surface of the support body 1121 is a slope 11211. The slope 11211 has two opposite sides, one side of which is located at or near the middle of the support portion 112, and the other side of which is located at or near the side of the support portion 112. The slope 11211 slopes downward from one side to the other side, so that one side of the slope forms a support ridge 1101. Through the slope design of the slope 11211, one side of the slope 11211 becomes the side of the highest position of the support portion 112, that is, the support ridge 1101. This makes the support point of any height level on the support ridge 1101 the highest point of the current height level. The wafer edge only contacts the support ridge 1101 of the support portion 112 and forms a point contact abutment.

[0037] Further, see Figures 3 to 5 The support part 112 also includes a plate 1122 integrally formed with the support body 1121 and the fixing part 111. The top surface of the plate 1122 is lower than the height of the inclined surface 11211. The support body 1121, the fixing part 111 and the plate 1122 enclose and form a groove 113.

[0038] In one specific embodiment, see Figure 4 and Figure 5 The connection between the side of the support body 1121 near the groove 113 and the side of the fixing part 111 near the groove 113 is a rounded corner structure 114, which reduces cleaning dead corners and facilitates the quick removal of residual impurities.

[0039] Further, see Figures 3 to 5 The side of the supporting body 1121 near the groove 113 is the first elevation 11212, the side of the fixing part 111 near the groove 113 is the second elevation 1112, and the top surface of the plate 1122 is a horizontal plane.

[0040] In a preferred embodiment, see Figures 3 to 5 The tilt angle of the inclined plane 11211 ranges from 5° to 6°. By setting the tilt angle appropriately, the smoothness of the wafer's movement along the support edge 1101 is ensured.

[0041] In the first specific embodiment, see Figures 3 to 5 ,in, Figure 3 and Figure 4 The image shows the support 110 located at the end of the fingertip 320. Figure 5The diagram shows a support member 110 located on the side of the fingertip 320 near the base of the finger 310. The height of the abutment 1111 of the support member 110 at the end of the fingertip 320 is greater than the height of the abutment 1111 of the support member 110 on the side of the fingertip 320 near the base of the finger 310. During wafer clamping, the wafer edge will eventually abut against the abutment 1111 of the support member 110 at the end of the fingertip 320. Setting the height of the abutment 1111 of the support member 110 at the end of the fingertip 320 slightly higher ensures effective abutment of the wafer edge and prevents it from dislodging from the abutment 1111.

[0042] In the second specific embodiment, see Figures 3 to 5 ,in, Figure 3 and Figure 4 The image shows the support 110 located at the end of the fingertip 320. Figure 5 The image shows a support 110 located on the side of the fingertip 320 near the finger root 310. The length of the inclined surface 11211 of the support 110 located on the side of the fingertip 320 near the finger root 310 along its inclined direction is greater than or equal to the length of the inclined surface 11211 of the support 110 located at the end of the fingertip 320 along its inclined direction. This provides a sufficient sliding path during the movement of the wafer along the finger root 310 toward the fingertip 320.

[0043] In the third specific embodiment, see Figures 3 to 5 ,in, Figure 3 and Figure 4 The image shows the support 110 located at the end of the fingertip 320. Figure 5 The image shows a support member 110 located on the side of the fingertip 320 near the base of the finger 310. The shape of the fixing part 111 of the support member 110 located at the end of the fingertip 320 is the same as or different from the shape of the fixing part 111 of the support member 110 located on the side of the fingertip 320 near the base of the finger 310.

[0044] In one embodiment, see Figure 1 and Figure 2 There are four support members 110. Two of them are located at the ends of the finger tips 320 and are symmetrically arranged along the length of the finger tips 320. The other two are located on the side of the finger tips 320 near the base of the finger 310 and are symmetrically arranged along the length of the finger tips 320. The symmetrical distribution of the support members 110 ensures that the wafer is subjected to uniform force during support and clamping, effectively reducing the wobbling and slippage of the wafer during transport and improving the stability of the wafer.

[0045] In one embodiment, the support member 110 is locked and fixed to the end effector of the robot arm by fasteners. This detachable mounting and fixing provides ease of installation and removal, facilitating subsequent maintenance and replacement.

[0046] Further, see Figures 3 to 5 The fixing part 111 of the support member 110 is provided with at least one mounting hole 1113, and the support member 110 is locked and fixed to the end effector of the robot by fasteners passing through the mounting hole 1113.

[0047] This utility model also provides a robotic arm end effector, see [link]. Figure 1 and Figure 2 The robotic end effector includes: a body 200, fingers 300, and a point-contact-based support structure 100 as described in any of the above embodiments.

[0048] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0049] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0050] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0051] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as set forth in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. A point-contact-based support structure disposed on a robotic end effector, the robotic end effector including a finger (300), the finger (300) including a finger root (310) and a finger tip (320), characterized in that, The supporting structure (100) includes: Multiple support members (110) are arranged to form a support space (1102) for supporting the workpiece. At least one of the support members (110) is located at the end of the finger tip (320), and at least one of the support members (110) is located on the side of the finger tip (320) near the root of the finger (310). Each of the support members (110) is configured to form a point contact abutment with the edge of the workpiece. The support member (110) is provided with a support ridge (1101), which extends obliquely along the height direction and has multiple support points distributed on it. Each support point belongs to a different height level and is arranged continuously. The virtual connection line of the support point is inclined upward from the end near the center of the support space (1102) to the end away from the center of the support space (1102).

2. The point-contact-based support structure according to claim 1, characterized in that, The support points at the same height level are located on the same circle; and / or, the support points at different height levels together constitute the support space (1102), which gradually expands from bottom to top along the height direction.

3. The point-contact-based support structure according to claim 1, characterized in that, The support member (110) includes an integrally formed fixing part (111) and a supporting part (112). The supporting ridge (1101) is formed on the supporting part (112). The supporting part (112) is located on the side of the fixing part (111) near the center of the supporting space (1102). The side of the fixing part (111) near the center of the supporting space (1102) is higher than the top of the supporting part (112) and has a stop surface (1111).

4. The point-contact-based support structure according to claim 3, characterized in that, The support (112) includes a support body (1121), the top surface of which is an inclined surface (11211). The inclined surface (11211) has two opposite sides, one side of which is located at or near the middle of the support (112), and the other side of which is located at or near the side of the support (112). The inclined surface (11211) slopes downward from one side to the other side so that one side forms the support ridge (1101).

5. The point-contact-based support structure according to claim 4, characterized in that, The support part (112) also includes a plate (1122) integrally formed with the support body (1121) and the fixing part (111). The top surface of the plate (1122) is lower than the height of the inclined surface (11211). The support body (1121), the fixing part (111) and the plate (1122) enclose and form a groove (113).

6. The point-contact-based support structure according to claim 5, characterized in that, The connection between the side of the support body (1121) near the groove (113) and the side of the fixing part (111) near the groove (113) is a rounded corner structure (114).

7. The point-contact-based support structure according to claim 4, characterized in that, The inclination angle of the inclined plane (11211) ranges from 5° to 6°.

8. The point-contact-based support structure according to claim 3, characterized in that, The height of the stop (1111) of the support member (110) located at the end of the finger tip (320) is greater than the height of the stop (1111) of the support member (110) located on the side of the finger tip (320) near the root of the finger (310).

9. The point-contact-based support structure according to any one of claims 1-8, characterized in that, The support member (110) consists of four parts, two of which are located at the end of the finger tip (320) and are symmetrically arranged along the length direction of the finger tip (320), and the other two are located on the side of the finger tip (320) near the root of the finger (310) and are symmetrically arranged along the length direction of the finger tip (320).

10. A robotic end effector, characterized in that, include: The main body (200), the finger (300), and the point contact-based support structure (100) as described in any one of claims 1-9.

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