A gallium arsenide wire saw cutting apparatus
By introducing a protective cover and a recycling mechanism into the gallium arsenide wire saw cutting device, the problems of coolant splashing and resource waste during gallium arsenide cutting are solved, achieving both safety protection and resource recycling.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- XINZHOU ZHONGKE JINGDIAN INFORMATION MATERIALS CO LTD
- Filing Date
- 2025-07-17
- Publication Date
- 2026-07-31
AI Technical Summary
In existing technologies, gallium arsenide wire saw cutting devices generate a large amount of heat during the cutting process. The coolant carries gallium arsenide debris and splashes everywhere, endangering the health of operators. Furthermore, the coolant is discharged directly without treatment, resulting in resource waste and environmental pollution.
A gallium arsenide wire saw cutting device was designed, which includes a protective cover and a recycling mechanism. The protective cover seals the coolant and debris, and the recycling mechanism collects and separates the coolant and debris through a guide channel and a collection channel, so as to achieve sealing and recycling.
It effectively prevents coolant and debris from splashing, ensures operator safety, reduces resource waste and environmental pollution, and enables the recycling of coolant.
Smart Images
Figure CN224575927U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of gallium arsenide processing technology, specifically to a gallium arsenide wire saw cutting device. Background Technology
[0002] Gallium arsenide (GaAs) is an important semiconductor material composed of gallium and arsenic. It has a zincblende crystal structure and is a dark gray solid with a metallic luster when pure. It is chemically stable at room temperature, but arsenic is toxic. As an important compound semiconductor material, GaAs has wide applications in optoelectronic devices, microwave radio frequency devices and other fields. In the processing of GaAs materials, wire sawing is a commonly used process to cut GaAs ingots into wafers of the required thickness.
[0003] In the prior art, Chinese Patent No. CN219855384U discloses a wire saw cutting device with a high wafer yield, including a support frame. A processing table body is located in the middle of the support frame, and a limiting bracket is located at the top of the processing table body. A workpiece body is located between a set of limiting brackets. A combined square frame is slidably connected to one end of the limiting bracket, and transmission sleeves are slidably connected to both sides of the combined square frame. Through the setting of limiting brackets, extrusion blocks, double-ended lead screws, transmission sleeves, support rods, and clamps, when the two sets of transmission sleeves carry the two sets of extrusion blocks to achieve unidirectional stretching, the two sets of extrusion blocks respectively achieve extrusion pre-limitation of the silicon wafer workpiece from the four corner positions. While preventing the silicon wafer workpiece from slipping and causing inconvenience when limited on the support frame, the pre-limited silicon wafer workpiece will accelerate the progress of the downward pressure limiting operation.
[0004] Based on the above information, existing wire saw cutting devices generate a large amount of heat during the gallium arsenide cutting process due to intense friction between the wire saw and the gallium arsenide material, requiring coolant for cooling. During cutting, the coolant, carrying toxic gallium arsenide fragments, splashes everywhere. If operators inhale or come into contact with these fragments, it poses a significant threat to their health. Furthermore, the used coolant and fragments are usually discharged directly without treatment, wasting coolant resources and polluting the environment. Therefore, we propose a gallium arsenide wire saw cutting device. Utility Model Content
[0005] The purpose of the present utility model is to provide a wire saw cutting device for producing gallium arsenide, so as to solve the problems presented in the above background technology. In the process of cutting gallium arsenide by the existing wire saw cutting device, a large amount of heat will be generated due to the intense friction between the wire saw and the gallium arsenide material. Cooling liquid is required for cooling. During cutting, the cooling liquid will carry toxic gallium arsenide chips and splash everywhere. If the operator inhales or comes into contact with them, it will pose a great threat to physical health. Moreover, the used cooling liquid and chips are usually directly discharged without treatment, which not only causes waste of cooling liquid resources but also pollutes the environment.
[0006] To achieve the above purpose, the present utility model provides the following technical solution: A wire saw cutting device for producing gallium arsenide, including a device main body. A cutting platform is provided at the bottom of the device main body. A protection mechanism for preventing the splashing of cooling liquid and waste chips is provided on the outer wall of the cutting platform. The protection mechanism includes an installation groove opened on the outer surface of the cutting platform. A protective cover is slidably installed on the inner wall of the installation groove. A protective top plate is detachably installed on the top of the protective cover. A moving door is slidably installed on the outer wall of the protective cover. An observation window and a handle are provided on the outer wall of the moving door. A recovery mechanism for collecting cooling liquid and waste chips is provided at the bottom of the cutting platform.
[0007] Further, the cross-section of the protective cover is designed in a "hui" shape. The protective cover and the protective top plate form a closed space. The protective cover and the protective top plate cover the top of the cutting platform. The observation window is made of transparent material.
[0008] Further, the cross-section of the installation groove is designed in a "hui" shape. The depth of the installation groove is less than the thickness of the cutting platform. The protective cover is fixedly connected to the cutting platform by bolts.
[0009] Further, the recovery mechanism includes a first diversion groove, a second diversion groove and a collection groove opened on the outer surface of the cutting platform. A collection box is fixedly installed at the bottom of the cutting platform. A placement groove and a liquid storage groove are opened inside the collection box. A collection box is slidably installed on the inner wall of the placement groove. A filter plate is provided inside the collection box. A recovery pipe is provided at the bottom of the collection box. [[ID=第十四条]]
[0010] Further, the end of the first diversion groove is communicated with the second diversion groove. The bottom of the first diversion groove is designed to be inclined. The horizontal plane at the end where the first diversion groove is communicated with the second diversion groove is higher than the horizontal plane at the other end. The first diversion grooves are arranged at equal intervals on the outer surface of the cutting platform.
[0011] Further, two groups of the second diversion grooves are symmetrically arranged on the outer surface of the cutting platform. The second diversion grooves are perpendicular to the first diversion grooves. The end of the second diversion groove is communicated with the collection groove. The bottom of the second diversion groove is designed to be inclined. The horizontal plane at the end where the second diversion groove is communicated with the collection groove is lower than the horizontal plane at the other end.
[0012] Furthermore, the collection trough has a Y-shaped cross-section and is perpendicular to the second guide trough. The collection trough is located on the side of the cutting platform near the observation window. The top of the collection box has a feed inlet, which is connected to the collection trough.
[0013] Furthermore, a sealing cover is fixedly installed at the end of the collection box, and a sealing ring is provided on the outer wall of the sealing cover. A handle is fixedly installed at the end of the sealing cover. A magnetic block is fixedly installed on the inner wall of the sealing cover, and the magnetic block is attracted to the inner wall of the placement groove. The filter plate is located on the bottom inner wall of the collection box, and the top of the collection box is connected to the feed inlet. The bottom of the collection box is connected to the liquid storage tank. A symmetrically arranged limiting block is fixedly installed on the side wall of the collection box.
[0014] Furthermore, the bottom of the storage tank is designed to be inclined, and the horizontal plane on the side of the bottom of the storage tank that is connected to the recovery pipe is lower than the horizontal plane on the other side, which is used to recycle the filtered coolant.
[0015] Compared with the prior art, the beneficial effects of this utility model are: 1. This gallium arsenide wire saw cutting device, through the setting of a protective mechanism, the protective cover and the protective top plate are combined to form a closed space, which can effectively prevent coolant and toxic gallium arsenide debris from splashing around during the cutting process, avoid operators from inhaling or coming into contact with these harmful substances, and greatly protect the health and safety of operators.
[0016] 2. By utilizing the inclined design and interconnected structure of the first guide channel, second guide channel, and collection channel in the recycling mechanism, coolant and waste debris can be smoothly guided into the collection box, achieving effective collection of coolant and waste debris and preventing them from being spilled and polluting the working environment. Furthermore, the design of the placement tank and storage tank inside the collection box, together with the filter plate inside the collection box, can separate coolant from waste debris, realizing the recycling of coolant, reducing the waste of coolant resources, and reducing environmental pollution.
[0017] 3. The sliding door installed on the outer wall of the protective cover has an observation window and a handle, which makes it easy for operators to observe the cutting process and to open and close easily without affecting the normal operation of the equipment. The collection box is attached to the placement slot by magnetic blocks, and the end is equipped with a handle and a sealing cover for easy disassembly and cleaning of waste. The operation is simple and convenient, which improves the efficiency of equipment maintenance.
[0018] 4. The collection tank has a Y-shaped cross-section and is set perpendicular to the second guide channel. The inlet at the top of the collection box is connected to the collection tank, which allows the coolant and waste to flow into the collection box more smoothly, ensuring the efficient operation of the recycling mechanism. The inclined design at the bottom of the storage tank and the connection structure with the recycling pipe facilitate the smooth flow of the filtered coolant for recycling, further improving the coolant recycling effect. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic cross-sectional view of the protective cover and cutting platform of this utility model; Figure 3 This is a schematic diagram of the protective cover, protective top plate, sliding door, observation window, and handle of this utility model. Figure 4 This is a schematic diagram of the cross-sectional structure of the first guide channel and the collection channel of this utility model; Figure 5 This is a schematic diagram of the cross-sectional structure of the collection box of this utility model; Figure 6 This is a schematic diagram of the collection box structure of this utility model; Figure 7 This is a schematic diagram of the collection box structure of this utility model.
[0020] In the diagram: 1. Main body of the device; 2. Cutting platform; 201. Mounting groove; 3. Protective cover; 301. Protective top plate; 4. Sliding door; 401. Observation window; 402. Handle; 5. First guide channel; 501. Second guide channel; 502. Collection channel; 6. Collection box; 601. Feed inlet; 602. Placement groove; 603. Liquid storage tank; 604. Recovery pipe; 7. Collection box; 701. Filter plate; 702. Sealing cover; 703. Limiting block; 704. Magnetic block; 705. Handle; 8. Sealing ring. Detailed Implementation
[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0022] Example 1: Please refer to Figures 1-3, the present utility model provides the following technical solution: A wire saw cutting device for producing gallium arsenide, including a device main body 1. A cutting platform 2 is provided at the bottom of the device main body 1. A protection mechanism for preventing the splashing of coolant and waste chips is provided on the outer wall of the cutting platform 2. The protection mechanism includes a mounting groove 201 opened on the outer surface of the cutting platform 2. A protective cover 3 is slidably mounted on the inner wall of the mounting groove 201. A protective top plate 301 is detachably mounted on the top of the protective cover 3. A moving door 4 is slidably mounted on the outer wall of the protective cover 3. An observation window 401 and a handle 402 are provided on the outer wall of the moving door 4. The cross-section of the protective cover 3 is designed in a "hui" shape. The protective cover 3 and the protective top plate 301 form a closed space. The protective cover 3 and the protective top plate 301 cover the top of the cutting platform 2. The observation window 401 is made of transparent material. The cross-section of the mounting groove 201 is designed in a "hui" shape. The depth of the mounting groove 201 is less than the thickness of the cutting platform 2. The protective cover 3 is fixedly connected to the cutting platform 2 by bolts.
[0023] When wire saw cutting gallium arsenide, the operator first slidably mounts the protective cover 3 on the outer surface of the cutting platform 2 through the mounting groove 201 and fixes it to the cutting platform 2 with bolts. Then, the protective top plate 301 is detachably mounted on the top of the protective cover 3, so that the protective cover 3 and the protective top plate 301 form a closed space, completely covering the top of the cutting platform 2. During the cutting operation, the coolant and toxic debris generated by the friction between the wire saw and the gallium arsenide material are enclosed in this space and cannot splash everywhere. When the operator needs to observe the cutting process or operate the equipment, the operator can pull the handle 402 on the outer wall of the moving door 4 to slide the moving door 4 to open or close on the outer wall of the protective cover 3. The transparent observation window 401 facilitates the operator to observe the situation on the cutting platform 2 at any time, and the whole process does not affect the normal operation of the equipment, effectively ensuring the safety of the operator.
[0024] Embodiment 2: Please refer to Figures 1-7 , on the basis of Embodiment 1, a recycling mechanism is further disclosed. The specific structure is as follows: A recycling mechanism for collecting coolant and waste chips is provided at the bottom of the cutting platform 2. The recycling mechanism includes a first diversion groove 5, a second diversion groove 501 and a collection groove 502 opened on the outer surface of the cutting platform 2. A collection box 6 is fixedly mounted at the bottom of the cutting platform 2. A placement groove 602 and a liquid storage groove 603 are opened inside the collection box 6. A collection box 7 is slidably mounted on the inner wall of the placement groove 602. A filter plate 701 is provided inside the collection box 7. A recycling pipe 604 is provided at the bottom of the collection box 6.
[0025] As Figure 2 and Figure 4As shown, the first guide channel 5 is connected to the second guide channel 501 at its end, and the bottom of the first guide channel 5 is designed to be inclined. The horizontal plane at one end of the first guide channel 5 and the bottom of the second guide channel 501 is higher than the horizontal plane at the other end. The first guide channels 5 are evenly spaced on the outer surface of the cutting platform 2. Two sets of second guide channels 501 are symmetrically arranged on the outer surface of the cutting platform 2, and the second guide channels 501 are perpendicular to the first guide channels 5. The end of the second guide channel 501 is connected to the receiving end. The collecting trough 502 is connected to the second guide trough 501, which has an inclined bottom design. The bottom of the second guide trough 501 is connected to the collecting trough 502, and the horizontal plane of one end of the second guide trough 501 is lower than the horizontal plane of the other end. The collecting trough 502 has a Y-shaped cross-section and is vertically arranged with the second guide trough 501. The collecting trough 502 is located on the side of the cutting platform 2 near the observation window 401. The top of the collecting box 6 has a feed inlet 601, which is connected to the collecting trough 502.
[0026] like Figures 1-7 As shown, a sealing cover plate 702 is fixedly installed at the end of the collection box 7, and a sealing ring 8 is provided on the outer wall of the sealing cover plate 702. A handle 705 is fixedly installed at the end of the sealing cover plate 702. A magnetic block 704 is fixedly installed on the inner wall of the sealing cover plate 702, and the magnetic block 704 is attracted to the inner wall of the placement groove 602. The filter plate 701 is located on the bottom inner wall of the collection box 7, and the top of the collection box 7 is connected to the feed inlet 601. The bottom of the collection box 7 is connected to the liquid storage tank 603. A symmetrically arranged limiting block 703 is fixedly installed on the side wall of the collection box 7. The bottom of the liquid storage tank 603 is inclined, and the horizontal plane of one side of the bottom of the liquid storage tank 603 connected to the recovery pipe 604 is lower than the horizontal plane of the other side, which is used to recycle the filtered coolant.
[0027] During the cutting process, the generated coolant and waste chips, flushed by the coolant, first fall onto the cutting platform 2. Because the bottom of the first guide channel 5 is inclined and connected to the second guide channel 501, the horizontal plane of one end of the first guide channel 5 is higher than the horizontal plane of the other end. The evenly spaced first guide channels 5 guide the coolant and waste chips to the second guide channel 501. The symmetrically arranged second guide channels 501, perpendicular to the first guide channels 5, also have an inclined bottom and are connected to the collection tank 502. The horizontal plane of one end of the second guide channel 501 is lower than the horizontal plane of the other end, further guiding the coolant and waste chips to the collection tank 502. The collection tank 502 has a Y-shaped cross-section and is perpendicular to the second guide channel 501, located on the side of the cutting platform 2 near the observation window 401. It connects to the top of the collection box 6. The inlet 601 is connected to the collection box 6, which can efficiently introduce coolant and waste into the collection box 6. After entering the collection box 6, the coolant and waste fall into the collection box 7 in the placement tank 602. The filter plate 701 in the collection box 7 intercepts and filters the waste, while the coolant flows into the storage tank 603 through the filter plate 701. The bottom of the storage tank 603 is designed with an inclination, and the horizontal plane on one side connected to the recovery pipe 604 is lower than the horizontal plane on the other side. The filtered coolant flows out smoothly through the recovery pipe 604 under the action of gravity, realizing recycling. The collection box 7 is attracted to the inner wall of the placement tank 602 by the magnetic block 704. The operator can easily pull it out of the placement tank 602 to clean up the waste through the handle 705. After cleaning, it is reinstalled and put back in place to continue the collection of coolant and waste.
[0028] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0029] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A gallium arsenide wire saw cutting device, comprising a device body (1), wherein a cutting platform (2) is provided at the bottom of the device body (1), characterized in that: The outer wall of the cutting platform (2) is provided with a protective mechanism to prevent coolant and waste from splashing. The protective mechanism includes an installation groove (201) opened on the outer surface of the cutting platform (2), and a protective cover (3) is slidably installed on the inner wall of the installation groove (201). A protective top plate (301) is detachably installed on the top of the protective cover (3). A movable door (4) is slidably installed on the outer wall of the protective cover (3), and an observation window (401) and a handle (402) are provided on the outer wall of the movable door (4). A recycling mechanism for collecting coolant and waste is provided at the bottom of the cutting platform (2). The recycling mechanism includes a first guide channel (5), a second guide channel (501) and a collection channel (502) on the outer surface of the cutting platform (2). A collection box (6) is fixedly installed at the bottom of the cutting platform (2), and a placement slot (602) and a liquid storage slot (603) are provided inside the collection box (6). A collection box (7) is slidably installed on the inner wall of the placement slot (602), and a filter plate (701) is provided inside the collection box (7). A recycling pipe (604) is provided at the bottom of the collection box (6). The first guide channel (5) is connected to the second guide channel (501) at its end, and the bottom of the first guide channel (5) is designed to be inclined. The horizontal plane at one end of the first guide channel (5) and the second guide channel (501) is higher than the horizontal plane at the other end. The first guide channel (5) is set at equal intervals on the outer surface of the cutting platform (2). Two sets of the second guide channel (501) are symmetrically arranged on the outer surface of the cutting platform (2), and the second guide channel (501) is perpendicular to the first guide channel (5). The end of the second guide channel (501) is connected to the collection channel (502), and the bottom of the second guide channel (501) is designed to be inclined. The horizontal plane at the bottom of the second guide channel (501) and the collection channel (502) is lower than the horizontal plane at the other end. The collection trough (502) has a Y-shaped cross-section and is perpendicular to the second guide trough (501). The collection trough (502) is located on the side of the cutting platform (2) near the observation window (401). The top of the collection box (6) has a feed inlet (601) and is connected to the collection trough (502). The collection box (7) is fixedly installed with a sealing cover plate (702) at its end, and a sealing ring (8) is provided on the outer wall of the sealing cover plate (702). A handle (705) is fixedly installed at the end of the sealing cover plate (702). A magnetic block (704) is fixedly installed on the inner wall of the sealing cover plate (702), and the magnetic block (704) is attracted to the inner wall of the placement groove (602). The filter plate (701) is located on the bottom inner wall of the collection box (7), and the top of the collection box (7) is connected to the feed inlet (601). The bottom of the collection box (7) is connected to the liquid storage tank (603). A symmetrically arranged limiting block (703) is fixedly installed on the side wall of the collection box (7). The bottom of the liquid storage tank (603) is designed to be inclined, and the horizontal plane on the side where the bottom of the liquid storage tank (603) communicates with the recovery pipe (604) is lower than the horizontal plane on the other side, which is used for recycling the filtered coolant.
2. A device for cutting a GaAs wire saw according to claim 1, characterized in that: The cross-section of the protective cover (3) is designed in a "hui" character shape, and the protective cover (3) and the protective top plate (301) are combined to form a closed space, and the protective cover (3) and the protective top plate (301) cover the top of the cutting platform (2), and the observation window (401) is made of transparent material.
3. The gallium arsenide wire saw cutting device according to claim 1, characterized in that: The cross-section of the installation groove (201) is designed in a "hui" character shape, and the depth of the installation groove (201) is less than the thickness of the cutting platform (2), and the protective cover (3) is fixedly connected to the cutting platform (2) by bolts.