A high-purity phosphine production finished product collecting tank

Abstract

This utility model relates to the technical field of phosphine production collection devices, specifically a finished product collection tank for high-purity phosphine production. It includes an inner tank, a first jacket fixedly installed outside the inner tank, and a second jacket fixedly installed outside the first jacket. The gap between the inner tank and the first jacket forms an intermediate layer, and the gap between the first jacket and the second jacket forms a vacuum layer. This utility model, by setting up a collection tank and utilizing liquid nitrogen and high-temperature nitrogen gas to fill and extract the intermediate layer between the inner tank and the first jacket, can achieve cryogenic freezing and high-temperature heating processes without moving or disassembling the tank body. This improves operational safety, reduces labor costs, and the inner tank has a large volume, allowing for the collection of a larger amount of phosphine at a time, thus increasing production efficiency. Furthermore, the collection tank does not require repeated hoisting, reducing operational risks. The elimination of manual disassembly and installation of the collection tank connectors effectively reduces the introduction of impurities and lowers the risk of contamination.

Description

Technical Field

[0001] This utility model relates to the technical field of phosphine production collection devices, specifically a finished product collection tank for high-purity phosphine production. Background Technology

[0002] PH3 is commonly used in the semiconductor and chemical industries, but its highly toxic, flammable and explosive properties place extremely high safety requirements on the production process. Phosphine needs to be collected under low-temperature freezing conditions during production. Currently, most manufacturers use steel cylinders as collection devices, which is risky and inefficient.

[0003] When using steel cylinders for collection, the small volume of the cylinders results in a small weight being collected each time, affecting production efficiency. In addition, the cylinder joints need to be frequently disassembled and reassembled during collection, posing a risk of phosphine leakage and contamination by impurities. The cylinders also need to be repeatedly hoisted in and out of the cold trap during collection and thawing. Frozen cylinders become hard and brittle, and tipping or dropping them may cause damage to the cylinders and phosphine leakage.

[0004] In view of this, we propose a finished product collection tank for the production of high-purity phosphine. Utility Model Content

[0005] The purpose of this utility model is to provide a finished product collection tank for high-purity phosphine production, which solves the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: A finished product collection tank for high-purity phosphine production includes an inner tank, a first jacket fixedly installed outside the inner tank, and a second jacket fixedly installed outside the first jacket. The gap between the inner tank and the first jacket is an intermediate layer, and the gap between the first jacket and the second jacket is a vacuum layer.

[0007] Preferably, a liquid nitrogen inlet is fixedly installed at the top of the jacket, the bottom end of the liquid nitrogen inlet is close to the bottom end of the inner wall of the jacket, and a liquid nitrogen outlet is fixedly installed at the bottom end of the jacket.

[0008] Preferably, two nitrogen circulation ports are also fixedly installed near the top of the jacket, and the two nitrogen circulation ports are symmetrically arranged between each other.

[0009] Preferably, a limit stop is fixedly installed between the inner tank and the jacket at the bottom end.

[0010] Preferably, a positioning block is fixedly installed between the first and second jackets near the bottom.

[0011] Preferably, an air extraction port is fixedly installed on the second surface of the jacket near the top.

[0012] Preferably, a feed inlet is fixedly installed at the top of the inner tank, and a discharge port is also fixedly installed at the top of the inner tank, with the bottom of the discharge port located inside the inner tank near the bottom.

[0013] By employing the above technical solution, this utility model provides a finished product collection tank for high-purity phosphine production, which has at least the following beneficial effects: (1) By setting up a collection tank, this utility model uses liquid nitrogen and high-temperature compressed air to fill the intermediate layer between the inner tank and the jacket, which can realize the deep cryogenic freezing and high-temperature heating processes without moving or disassembling the tank, thus improving operational safety, reducing labor costs, and the inner tank has a large volume, which can collect more phosphine in one go, thereby improving production efficiency.

[0014] Furthermore, the collection tank does not require repeated hoisting, reducing operational risks. It also eliminates the need for manual disassembly and installation of the collection tank connectors, effectively reducing the introduction of impurities and lowering the risk of pollution. Attached Figure Description

[0015] The accompanying drawings, which are included to provide a further understanding of the present invention, form part of this application: Figure 1 This is a schematic diagram of the structure of this utility model.

[0016] In the diagram: 1. Inner tank; 2. Jacket 1; 3. Jacket 2; 4. Inlet; 5. Outlet; 6. Liquid nitrogen inlet; 7. Liquid nitrogen outlet; 8. Nitrogen circulation port; 9. Exhaust port; 10. Limiting block; 11. Positioning support block. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Please see Figure 1 A finished product collection tank for high-purity phosphine production includes an inner tank 1, which is fixedly installed on a frame or the ground. The inner tank 1 is used to collect the finished phosphine. An inlet 4 is fixedly installed at the top of the inner tank 1 for conveying the finished phosphine. The inlet 4 is equipped with flow monitoring and leak prevention monitoring to monitor the input rate of phosphine and whether leakage occurs in real time. An extraction port 5 is also fixedly installed at the top of the inner tank 1, with its bottom end close to the bottom of the inner tank 1, for discharging the collected finished phosphine from the inner tank 1, allowing the phosphine to proceed to further purification or filling operations.

[0019] In this embodiment, an inner tank 1 is fitted with a jacket 2, forming an intermediate layer between the inner tank 1 and the jacket 2. This intermediate layer is used to introduce liquid nitrogen or high-temperature compressed air to complete the two processes of cryogenic freezing and high-temperature heating of the phosphine inside the inner tank 1. A liquid nitrogen inlet 6 is fixedly installed at the top of the jacket 2, and the bottom end of the liquid nitrogen inlet 6 rests against the bottom of the inner wall of the jacket 2. Liquid nitrogen can be added through the liquid nitrogen inlet 6, and its position close to the bottom avoids splashing during the addition of liquid nitrogen. A liquid nitrogen outlet 7 is fixedly installed at the bottom of the jacket 2, allowing the liquid nitrogen to be quickly discharged by gravity, facilitating the secondary use of the liquid nitrogen.

[0020] In addition, two nitrogen circulation ports 8 are fixedly installed at the top of the jacket 2, and the two nitrogen circulation ports 8 are symmetrically arranged. The nitrogen circulation ports 8 are used to release the pressure of liquid nitrogen evaporation during freezing, so that the jacket 2 does not exceed the pressure. During thawing, they are used for the circulation and pressure release of high-temperature compressed air, so that the inner tank 1 is raised to room temperature and the phosphine is thawed from a solid state to a gas-liquid mixture state.

[0021] Meanwhile, the inner tank 1 and the jacket 2 are fixedly connected by a limiting block 10, which is used to enhance the connection stability between the inner tank 1 and the jacket 2, and to make the overall center of gravity of the collection tank lower, thereby enhancing the working stability of the tank.

[0022] In this embodiment, the gap between jacket 2 and jacket 3 is a vacuum layer used for heat insulation, enhancing the tank's heat preservation effect and reducing liquid nitrogen evaporation and heat loss. A vacuum port 9 is fixedly installed at the top of jacket 3, allowing for negative pressure evaporation of the vacuum layer to below -14 psig for heat insulation. A sensor is also installed at the vacuum port 9 to monitor the vacuum level in real time. Furthermore, a positioning block 11 is fixedly installed between jacket 2 and jacket 3 to strengthen the connection stability between them. The positioning block 11 is located near the bottom of jacket 2, lowering the overall center of gravity of the collection tank and enhancing stability.

[0023] A finished product collection tank for high-purity phosphine production, the working principle of which is as follows: During product collection, the vacuum layer is first evacuated to below -14 psig through the evacuation port 9 to achieve heat insulation. Then, liquid nitrogen is injected into the intermediate layer through the liquid nitrogen inlet 6, with a typical injection volume of 50-80 kg. This cools the interior of the inner tank 1 to approximately -180°C. The high-purity finished phosphine produced is then transported into the inner tank 1 through the feed inlet 4. Phosphine has a melting point of approximately -133°C and is frozen into a solid in the inner layer, creating a pressure differential that allows the phosphine to be continuously collected into the inner layer.

[0024] During phosphine thawing, once the designated weight has been collected, the phosphine gas intake stops, and the remaining liquid nitrogen in the intermediate layer is discharged from the liquid nitrogen outlet 7 at the bottom, leaving the intermediate layer empty. By introducing hot compressed air into the nitrogen circulation port 8, the intermediate layer is switched to continuous heating and purging with hot compressed air, raising the temperature inside the inner tank 1 to room temperature. At this point, the phosphine has thawed from a solid state to a gas-liquid mixture, and the pressure has increased from negative pressure to approximately 400-600 Psi.

[0025] After the product is discharged through the extraction port 5, the phosphine at room temperature can be directly used for the next step of purification or filling.

[0026] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0027] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high purity phosphine production product collection tank characterized by: It includes an inner tank (1), a first jacket (2) fixedly installed on the outside of the inner tank (1), and a second jacket (3) fixedly installed on the outside of the first jacket (2). The gap between the inner tank (1) and the first jacket (2) is an intermediate layer, and the gap between the first jacket (2) and the second jacket (3) is a vacuum layer.

2. The product collection tank for producing high-purity phosphine according to claim 1, characterized in that: The jacket (2) is fixedly installed with a liquid nitrogen inlet (6) at its top end. The bottom end of the liquid nitrogen inlet (6) is close to the bottom end of the inner wall of the jacket (2). The bottom end of the jacket (2) is fixedly installed with a liquid nitrogen outlet (7).

3. The product collection tank for producing high-purity phosphine according to claim 1, characterized in that: Two nitrogen circulation ports (8) are also fixedly installed near the top of the jacket (2), and the two nitrogen circulation ports (8) are symmetrically arranged between each other.

4. The product collection tank for producing high-purity phosphine according to claim 1, characterized in that: A limit stop (10) is fixedly installed at the bottom of the inner tank (1) and the jacket (2).

5. The product collection tank for producing high-purity phosphine according to claim 1, characterized in that: A positioning block (11) is fixedly installed between the first (2) and the second (3) at the bottom end.

6. The product collection tank for producing high-purity phosphine according to claim 1, characterized in that: An air extraction port (9) is fixedly installed on the surface of the jacket two (3) near the top.

7. The product collection tank for producing high-purity phosphine according to claim 1, characterized in that: The top of the inner tank (1) is fixedly equipped with a feed inlet (4), and the top of the inner tank (1) is also fixedly equipped with a suction port (5). The bottom of the suction port (5) is located inside the inner tank (1) near the bottom.

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