Inverted air floating motion platform

Abstract

This utility model relates to an inverted air-floating motion platform, including a base. A first moving mechanism providing forward and backward movement is movably connected to the base, and a second moving mechanism providing left and right movement is movably connected to the first moving mechanism. This utility model enables the inverted hanging of products through the forward and backward movement of the first moving mechanism and the left and right movement of the second moving mechanism, thereby improving the accuracy of movement. Achieving accurate movement significantly improves work efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to an inverted air-floating motion platform. Background Technology

[0002] An air flotation platform is a suspension system that uses gas as a medium. Its core working principle is based on the dynamic and static pressure effect of gas. By injecting compressed air into a planar interface, buoyancy is generated through gas flow and bubble formation, thereby supporting the suspended object and forming a gas suspension layer. This technical feature gives air flotation platforms significant advantages such as high precision, high stability, frictionless operation, and vibration-free operation.

[0003] Air-floating platform technology has a wide range of applications, including but not limited to semiconductor manufacturing, optical processing, robotics research and development, flight simulation, and liquid suspension. As these fields continue to develop, the demand for air-floating platforms is also increasing. Particularly in semiconductor manufacturing, air-floating platforms have become an indispensable part of chip production lines, ensuring that wafer surfaces maintain extremely high flatness and precision during micron- and nanometer-level processing.

[0004] In the field of MicroLED displays, mass transfer equipment requires the use of lasers to transfer chips from an upper platform to a lower platform substrate. This necessitates an inverted upper platform. However, existing inverted platforms are mechanical guide rail platforms, whose accuracy is lower than that of the lower air-bearing motion platform. This leads to problems with the precise transfer of chips from the upper platform to the lower motion platform substrate. Furthermore, there are currently no inverted air-bearing platforms available on the market.

[0005] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a new type of inverted air-floating motion platform with greater industrial application value. Utility Model Content

[0006] To solve the above-mentioned technical problems, the purpose of this utility model is to provide an inverted air-floating motion platform.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] An inverted air-floating motion platform includes a base, on which a first moving mechanism for providing forward and backward movement is movably connected, and on which a second moving mechanism for providing left and right movement is movably connected;

[0009] The first moving mechanism includes a first guide block and a second guide block connected to the left and right sides of the base, respectively. The first guide block and the second guide block are respectively provided with a first groove and a second groove. A first drive motor and a second drive motor are respectively connected to the first groove and the second groove. A first air-bearing support assembly and a second air-bearing support assembly with the same structure are slidably connected to the first guide block and the second guide block. The first air-bearing support assembly and the second air-bearing support assembly are respectively connected to the first drive motor and the second drive motor. A moving crossbeam that moves synchronously with the first air-bearing support assembly and the second air-bearing support assembly is connected between them. The second moving mechanism is movably connected to the moving crossbeam.

[0010] The second moving mechanism includes a third air-bearing support assembly and a fourth air-bearing support assembly with the same structure. The front end and rear end of the moving crossbeam are respectively provided with a third groove and a fourth groove. A third drive motor and a fourth drive motor are respectively connected in the third groove and the fourth groove. The third drive motor and the fourth drive motor are respectively connected to the third air-bearing support assembly and the fourth air-bearing support assembly. At the same time, the third air-bearing support assembly and the fourth air-bearing support assembly slide at the front end and the rear end of the moving crossbeam, respectively. A load connecting plate is connected between the third air-bearing support assembly and the fourth air-bearing support assembly.

[0011] Preferably, in the inverted air-bearing motion platform, the first air-bearing support component includes a first air-bearing slider, a second air-bearing slider, and a first air-bearing support block. The first air-bearing slider and the second air-bearing slider are connected through the first air-bearing support block, and the three of them form a concave structure. The first air-bearing slider and the second air-bearing slider are symmetrically arranged on the left and right sides of the first guide block, and the first air-bearing support block is connected to the mover of the first drive motor.

[0012] Preferably, in the inverted air-float motion platform, the motion beam is connected to the first air-float bearing block via a platform connecting block.

[0013] Preferably, in the inverted air-float motion platform, the first air-float slider and the second air-float slider are positive pressure air-float sliders.

[0014] Preferably, in the inverted air-floating motion platform, the first air-floating support block is a vacuum pre-compression type air-floating support slider.

[0015] Preferably, in the inverted air-float motion platform, both the first guide block and the second guide block are connected to a first grating ruler for cooperating with their respective air-float support components.

[0016] Preferably, in the inverted air-bearing motion platform, the third air-bearing support component includes a third air-bearing slider, a fourth air-bearing slider, and a second air-bearing support block. The third and fourth air-bearing sliders are connected through the second air-bearing support block, and the three of them form a concave structure. The third and fourth air-bearing sliders are symmetrically arranged on the left and right sides of the front guide block of the motion beam, and the third air-bearing slider is connected to the mover of the second drive motor.

[0017] Preferably, in the inverted air-floating motion platform, the third and fourth air-floating sliders are positive pressure air-floating sliders, and the second air-floating support block is a vacuum pre-compression type air-floating support block.

[0018] Preferably, in the inverted air-float motion platform, a second grating ruler is connected to the motion beam for cooperating with the air-float support assembly.

[0019] Preferably, in the inverted air-floating motion platform, the motion beam has a hollow structure.

[0020] By means of the above solution, this utility model has at least the following advantages:

[0021] This invention enables the product to be hung upside down via a first moving mechanism that moves forward and backward and a second moving mechanism that moves left and right, thereby improving the accuracy of movement. This precise movement significantly improves work efficiency.

[0022] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of this utility model;

[0025] Figure 2 yes Figure 1 A schematic diagram of the structure from the other side of the view. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0028] like Figure 1 and Figure 2 As shown, an inverted air-floating motion platform includes a base 10, on which a first moving mechanism 20 for providing forward and backward movement is movably connected, and on the first moving mechanism 20 a second moving mechanism 30 for providing left and right movement is movably connected.

[0029] The first moving mechanism 20 includes a first guide block 201 and a second guide block 202 respectively connected to the left and right sides of the base 10. The first guide block 201 and the second guide block 202 are respectively provided with a first groove and a second groove. The first drive motor 203 and the second drive motor 204 are respectively connected to the first groove and the second groove. The first air-bearing support assembly and the second air-bearing support assembly with the same structure are slidably connected to the first guide block 201 and the second guide block 202. The first air-bearing support assembly and the second air-bearing support assembly are respectively connected to the first drive motor 203 and the second drive motor 204. A moving crossbeam 205 that moves synchronously with them is connected between the first air-bearing support assembly and the second air-bearing support assembly. The second moving mechanism 30 is movably connected to the moving crossbeam 205.

[0030] In this utility model, the first air-bearing support assembly includes a first air-bearing slider 206, a second air-bearing slider 207, and a first air-bearing support block 208. The first air-bearing slider 206 and the second air-bearing slider 207 are connected through the first air-bearing support block 208, and the three of them form a concave structure. The first air-bearing slider 206 and the second air-bearing slider 207 are symmetrically arranged on the left and right sides of the first guide block 201, and the first air-bearing support block 208 is connected to the mover of the first drive motor.

[0031] The first air-float slider 206 and the second air-float slider 207 are both positive pressure air-float sliders. The principle is that positive pressure compressed air is connected and supplied through the throttling orifice, and the air-float block generates static pressure air-float effect and floats up.

[0032] The first air-bearing block 208 is a vacuum pre-compressed air-bearing block. Its principle is that it is simultaneously supplied with positive and negative pressure. The positive pressure gas is supplied through a throttling orifice, while the negative pressure generates a negative pressure preload force through the vacuum chamber. This causes the air-bearing block to float due to the static pressure air-bearing effect. The negative pressure preload force is opposite to the positive pressure air-bearing force, generating an air film with a thickness of h (a few micrometers to tens of micrometers) that floats the block.

[0033] The first and second guide blocks are arranged at the left and right ends of the base and installed parallel to each other at the same height. The stator of the first drive motor is embedded in the first groove of the first guide block. The mover of the first drive motor is connected to the first air-bearing support block, which is placed on the upper surface of the first guide block and can slide on its surface. The first and second air-bearing sliders are connected through the first air-bearing support block. The first and second air-bearing sliders are symmetrically arranged on the left and right sides of the first guide block. Due to the positive pressure air film being arranged top to top, a high-rigidity static pressure air film can be formed. Similarly, the second drive motor and the second air-bearing support assembly are installed in the same way as described above, and will not be repeated here.

[0034] The moving crossbeam 205 is connected to the first air-bearing support block 208 via a platform connecting block 209. The moving crossbeam is positioned on the upper part of the platform connecting block. The first grating ruler 210 is installed on the side of the first guide block, flush with the direction of movement. The moving crossbeam is arranged horizontally and orthogonally to the first and second guide blocks. The orthogonality between the first and second moving mechanisms can be adjusted by adjusting the moving crossbeam.

[0035] The second moving mechanism 30 includes a third air-bearing support assembly and a fourth air-bearing support assembly with the same structure. The front end and rear end of the moving beam 205 are respectively provided with a third groove and a fourth groove. The third groove and the fourth groove are respectively connected to a third drive motor 301 and a fourth drive motor 302. The third drive motor 301 and the fourth drive motor 302 are respectively connected to the third air-bearing support assembly and the fourth air-bearing support assembly. At the same time, the third air-bearing support assembly and the fourth air-bearing support assembly slide on the front end and the rear end of the moving beam 205, respectively. A load connecting plate 303 is connected between the third air-bearing support assembly and the fourth air-bearing support assembly.

[0036] The third air-bearing support assembly includes a third air-bearing slider 304, a fourth air-bearing slider 305, and a second air-bearing support block 306. The third air-bearing slider 304 and the fourth air-bearing slider 305 are connected through the second air-bearing support block 306, and the three of them form a concave structure. The third air-bearing slider 304 and the fourth air-bearing slider 305 are symmetrically arranged on the left and right sides of the front guide block of the moving crossbeam. The third air-bearing slider 304 is connected to the mover of the second drive motor.

[0037] The third air-float slider 304 and the fourth air-float slider 305 are both positive pressure air-float sliders. The principle is that positive pressure air is introduced and supplied through the throttling orifice, and the air-float block generates static pressure air-float effect and floats up.

[0038] The second air-bearing block 306 is a vacuum pre-compression type air-bearing block. Its principle is that it is simultaneously supplied with positive and negative pressure. The positive pressure gas is supplied through a throttling orifice, while the negative pressure generates a negative pressure preload force through the vacuum chamber. This causes the air-bearing block to float due to a static pressure air-bearing effect. The negative pressure preload force is opposite to the positive pressure air-bearing force, generating an air film of thickness h that lifts the block.

[0039] The moving crossbeam has a hollow structure. The stator of the third drive motor is embedded in the third groove of the front guide block of the moving crossbeam. The mover of the third drive motor is connected to the third air-bearing slider 304. The second air-bearing support block is placed on the upper surface of the rear guide block of the moving crossbeam and can slide on its surface. The third and fourth air-bearing sliders are connected through the second air-bearing support block. The third and fourth air-bearing sliders are symmetrically arranged on both sides of the front guide block of the moving crossbeam. Due to the positive pressure air film being arranged top to top, a high-rigidity static pressure air film can be formed. Similarly, the connection structure of the rear guide block of the moving crossbeam, the fourth drive motor, and the fourth air-bearing support assembly is the same as that of the third drive motor and the third air-bearing support assembly described above, and will not be repeated here.

[0040] The second grating ruler is installed below the guide block at the rear end of the moving crossbeam, flush with the direction of movement. The fourth grating ruler is installed below the guide block at the front end of the moving crossbeam, flush with the direction of movement.

[0041] The load connecting plate 303 is placed below the moving crossbeam, with a gap between it and the guide block of the moving crossbeam. The load is fixed upside down to the load connecting plate 303.

[0042] The drive motor used in this invention is a motor known in the art, model number Parker: 410-4M-LC-WD3S-8.

[0043] The working principle of this utility model is as follows:

[0044] In actual operation, the load is inverted on the load connection plate, and the load is moved by the first moving mechanism and the second moving mechanism. The first moving mechanism and the second moving mechanism are controlled by the control device (PLC) to control the drive motor, so as to achieve accurate movement.

[0045] This invention enables the product to be hung upside down via a first moving mechanism that moves forward and backward and a second moving mechanism that moves left and right, thereby improving the accuracy of movement. This precise movement significantly improves work efficiency.

[0046] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0047] In the description of this application, it should be noted that the terms "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0048] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or vertical, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0049] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0050] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. An upside-down air floating motion platform, characterized in that: Includes a base (10), on which a first moving mechanism (20) for providing forward and backward movement is movably connected, and on which a second moving mechanism (30) for providing left and right movement is movably connected; The first moving mechanism (20) includes a first guide block (201) and a second guide block (202) respectively connected to the left and right sides of the base (10). The first guide block (201) and the second guide block (202) are respectively provided with a first groove and a second groove. The first drive motor (203) and the second drive motor (204) are respectively connected in the first groove and the second groove. The first air-bearing support assembly and the second air-bearing support assembly with the same structure are slidably connected to the first guide block (201) and the second guide block (202). The first air-bearing support assembly and the second air-bearing support assembly are respectively connected to the first drive motor (203) and the second drive motor (204). A moving crossbeam (205) that moves synchronously with them is connected between the first air-bearing support assembly and the second air-bearing support assembly. The second moving mechanism (30) is movably connected to the moving crossbeam (205). The second moving mechanism (30) includes a third air-bearing support assembly and a fourth air-bearing support assembly with the same structure. The front end and rear end of the moving beam (205) are respectively provided with a third groove and a fourth groove. The third groove and the fourth groove are respectively connected to a third drive motor (301) and a fourth drive motor (302). The third drive motor (301) and the fourth drive motor (302) are respectively connected to the third air-bearing support assembly and the fourth air-bearing support assembly. At the same time, the third air-bearing support assembly and the fourth air-bearing support assembly slide on the front end and the rear end of the moving beam (205). A load connecting plate (303) is connected between the third air-bearing support assembly and the fourth air-bearing support assembly.

2. The inverted air flotation motion platform of claim 1, wherein: The first air-bearing support assembly includes a first air-bearing slider (206), a second air-bearing slider (207), and a first air-bearing support block (208). The first air-bearing slider (206) and the second air-bearing slider (207) are connected through the first air-bearing support block (208). The three of them form a concave structure. The first air-bearing slider (206) and the second air-bearing slider (207) are symmetrically arranged on the left and right sides of the first guide block (201). The first air-bearing support block (208) is connected to the mover of the first drive motor.

3. The inverted air flotation motion platform of claim 1, wherein: The moving crossbeam (205) is connected to the first air-bearing support block (208) via the platform connecting block (209).

4. The inverted air flotation motion platform of claim 2, wherein: The first air-bearing slider (206) and the second air-bearing slider (207) are positive pressure air-bearing sliders.

5. The inverted air flotation motion platform of claim 2, wherein: The first air-bearing support block (208) is a vacuum pre-compression type air-bearing support block.

6. The inverted air flotation motion platform of claim 1, wherein: The first guide block (201) and the second guide block (202) are each connected to a first grating ruler (210) for cooperating with their respective air flotation support components.

7. The inverted air flotation motion platform of claim 1, wherein: The third air-bearing support assembly includes a third air-bearing slider (304), a fourth air-bearing slider (305), and a second air-bearing support block (306). The third air-bearing slider (304) and the fourth air-bearing slider (305) are connected through the second air-bearing support block (306), and the three of them form a concave structure. The third air-bearing slider (304) and the fourth air-bearing slider (305) are symmetrically arranged on the left and right sides of the front guide block of the moving crossbeam. The third air-bearing slider (304) is connected to the mover of the second drive motor.

8. The inverted air flotation motion platform of claim 7, wherein: The third air-bearing slider (304) and the fourth air-bearing slider (305) are positive pressure air-bearing sliders, and the second air-bearing support block (306) is a vacuum pre-compression type air-bearing support slider.

9. The inverted air flotation motion platform of claim 1, wherein: The motion beam (205) is connected to a second grating ruler (307) for use with the air flotation support assembly.

10. The inverted air flotation motion platform of claim 1, wherein: The moving crossbeam has a hollow structure.

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