Vacuum suction device and its moving air seal mechanism

Abstract

This application discloses a vacuum adsorption device and its movable gas sealing mechanism, relating to the field of vacuum adsorption devices. The movable gas sealing mechanism includes: a cylinder body with a first through hole extending axially, and a second through hole communicating with the first through hole at one end of the cylinder body near the axial direction; a plurality of third through holes spaced apart axially and communicating with the first through hole at the top of the cylinder body; an adjusting screw passing through the first through hole; the adjusting screw having two ends axially as a first end and a second end; a servo motor connected to the first end via a coupling for driving the adjusting screw to rotate; a piston sleeved on the adjusting screw, with a first sealing ring between the piston and the first through hole; the piston having an axial dimension greater than or equal to the axial dimension of the third through hole; and two limiting steel wires parallel to both sides of the adjusting screw, passing through the piston and extending axially. This mechanism can reliably move and effectively seal each air passage.

Description

Technical Field

[0001] This specification relates to the field of vacuum adsorption device technology, and in particular to a vacuum adsorption device and its movable gas seal mechanism. Background Technology

[0002] In fields such as automated machining, electronic assembly, and precision manufacturing, it is often necessary to fix thin or plate-shaped workpieces (such as circuit boards, flexible films, metal sheets, coil frames, etc.) on a worktable for cutting, mounting, coding, and inspection. Vacuum adsorption fixing is widely used in various processing equipment due to its advantages such as fast fixing speed, no damage to the workpiece surface, and ease of automation.

[0003] Existing vacuum adsorption fixing devices typically employ multiple adsorption holes on a support plate, with an integral vacuum chamber located below the support plate. By evacuating the vacuum chamber, negative pressure is simultaneously generated in all the adsorption holes, thereby adsorbing and fixing the workpiece. This structure has the following problems: First, when the workpiece is small, only a few adsorption holes in the middle area of ​​the support plate are needed for fixation. However, in existing devices, all adsorption holes are connected to the vacuum chamber. Adsorption holes not covered by the workpiece are directly exposed to the atmosphere, causing serious vacuum leakage, resulting in a drop in negative pressure and insufficient adsorption force. To ensure the adsorption effect, more powerful vacuum pumping equipment is often required, which not only increases energy consumption and cost but also generates unnecessary noise.

[0004] Secondly, when producing workpieces of different sizes, unused areas need to be covered by sheet metal by the machine operator. Especially for large equipment, the operator needs to enter the equipment, which is not easy to operate and will seriously affect efficiency and reduce production capacity.

[0005] Third, even with zoned vacuum adsorption devices, existing zoning methods often use independent valves or solenoid valves to control the on / off state of each zone. While this approach can reduce leakage to some extent, each zone can only be opened or closed as a whole, making continuous adjustment based on workpiece size impossible. When the workpiece size does not match the zone size, some adsorption pores will still be exposed to the atmosphere, hindering precise control of the adsorption zone. Furthermore, the design of multiple valves increases the structural complexity and manufacturing cost of the equipment. Utility Model Content

[0006] In view of the shortcomings of the prior art, one object of this specification is to provide a vacuum adsorption device and its movable gas sealing mechanism, which can reliably move and effectively seal each air passage.

[0007] To achieve the above objectives, this specification provides a movable gas seal mechanism for a vacuum adsorption device, comprising: The cylinder body has a first through hole extending along the axial direction, and a second through hole communicating with the first through hole at one end near the axial direction; the top end of the cylinder body has a plurality of third through holes spaced apart along the axial direction, and the third through holes are connected to the first through holes. An adjusting screw is disposed through the first through hole; the two ends of the adjusting screw in the axial direction are referred to as the first end and the second end. A servo motor connected to the first end via a coupling is used to drive the adjusting screw to rotate; A piston is sleeved outside the adjusting screw, and a first sealing ring is provided between the piston and the first through hole; the axial dimension of the piston is greater than or equal to the axial dimension of the third through hole. Two limiting steel wires are arranged parallel to each other on both sides of the adjusting screw, and the limiting steel wires pass through the piston; the limiting steel wires extend axially.

[0008] In a preferred embodiment, the piston is a hollow cylinder, and the outer diameter of the piston matches the diameter of the first through hole.

[0009] In a preferred embodiment, the plurality of third through holes are evenly distributed at intervals along the axial direction; the axial dimension of the piston is less than or equal to the sum of the axial radius of the third through hole and the distance between two adjacent third through holes.

[0010] In a preferred embodiment, a second sealing ring is provided on the outer side of the upper surface of the third through hole to seal the third through hole with the working surface.

[0011] In a preferred embodiment, the cylinder body has two fourth through holes at the bottom of both ends in the axial direction, and the fourth through holes are connected to the first through hole; sensors are connected to the two fourth through holes.

[0012] In a preferred embodiment, the cylinder body is fixedly connected to a first bearing seat and a second bearing seat at its two ends in the axial direction, respectively; the first bearing seat and the first end are connected by a first bearing; the second bearing seat and the second end are connected by a second bearing; one end of the limiting steel wire is fixedly connected to the first bearing seat, and the other end is fixedly connected to the second bearing seat.

[0013] In a preferred embodiment, a connecting seat is fixedly connected to the side of the second bearing housing away from the cylinder body; the ends of the two limiting steel wires near the second end are connected by a connecting steel wire; the second end is located inside the second bearing housing, one end of the limiting steel wire extends beyond the connecting seat, and the connecting steel wire is located outside the connecting seat.

[0014] The second through hole is connected to the first connector for connection to a vacuum pump.

[0015] In a preferred embodiment, the servo motor is connected to a mounting base for fixing the servo motor to the working surface.

[0016] This application also provides a vacuum adsorption device, comprising: A suction cup includes a base area, a first adjustment area, and a second adjustment area; both the first and second adjustment areas are adjacent to the base area; the base area is provided with a fixed vent hole; the first adjustment area includes multiple first air passages spaced apart in a first direction and extending along a second direction; each first air passage is provided with a first vent hole penetrating the suction cup, and the multiple first vent holes are spaced apart in the first direction; the second adjustment area includes multiple second air passages spaced apart in a second direction and extending along the first direction; each second air passage is provided with a second vent hole penetrating the suction cup, and the multiple second vent holes are spaced apart in the second direction; the first direction is perpendicular to the second direction; Two movable air-sealing mechanisms are fixedly installed at the bottom of the suction cup. The movable air-sealing mechanisms are as described in any of the above embodiments. The axial directions of the two movable air-sealing mechanisms are respectively the first direction and the second direction. The third through holes of the two movable air-sealing mechanisms are respectively located below the first vent hole and the second vent hole.

[0017] Beneficial effects

[0018] The movable air-sealing mechanism of the vacuum adsorption device provided in this embodiment includes a cylinder, an adjusting screw, a servo motor, a piston, and two limiting steel wires. The servo motor drives the adjusting screw to rotate, causing the piston to move precisely along the axial direction, achieving higher position control accuracy compared to existing technologies. The two limiting steel wires, parallel to each other on both sides of the adjusting screw and passing through the piston, effectively prevent the piston from rotating with the screw, ensuring that the piston moves only along the axial direction and avoiding sealing failure or jamming caused by piston deflection. The axial dimension of the piston is greater than or equal to the axial dimension of the third through hole, allowing the piston to completely cover and seal the corresponding third through hole when it moves to a certain position, achieving continuous adjustment of the ventilation area. A first sealing ring is provided between the piston and the first through hole to ensure that the vacuum level in the closed area does not leak. This movable air-sealing mechanism has a compact overall structure, integrating driving, transmission, sealing, and guiding functions inside the cylinder, occupying little space and facilitating rapid installation of multiple units. Its piston can move reliably and effectively seal each ventilation channel.

[0019] Specific embodiments of the present invention are disclosed in detail with reference to the following description and accompanying drawings, indicating how the principles of the present invention can be adopted. It should be understood that the scope of the embodiments of the present invention is not limited thereto.

[0020] Features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0021] It should be emphasized that the term "including / comprises" as used herein refers to the presence of a feature, whole, step, or component, but does not exclude the presence or addition of one or more other features, wholes, steps, or components. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a three-dimensional structural diagram of a movable air-sealing mechanism provided in this embodiment; Figure 2 for Figure 1 Top view; Figure 3 for Figure 2 A schematic diagram of the cross-sectional structure of the AA surface in the middle; Figure 4 for Figure 2 A schematic diagram of the structure after removing the cylinder block; Figure 5 This is a three-dimensional structural diagram of a cylinder block provided in this embodiment; Figure 6 for Figure 5 A structural diagram from another perspective; Figure 7 This is a three-dimensional structural diagram of a vacuum adsorption device provided in this embodiment; Figure 8 for Figure 7 A schematic diagram of the three-dimensional structure after the cover plate has been removed; Figure 9 for Figure 8 A structural diagram from another perspective.

[0024] Explanation of reference numerals in the attached figures: 100. Vacuum adsorption device; 10. Mobile air-sealing mechanism; 1. Cylinder body; 11. First through hole; 12. Second through hole; 13. Third through hole; 14. Fourth through hole; 15. Second sealing ring; 16. Sensor; 17. First connector; 18. First mounting hole; 2. Adjusting screw; 201. First end; 202. Second end; 3. Coupling; 4. Servo motor; 41. Fixed seat; 5. Piston; 6. First sealing ring; 7. Limiting wire; 71. Connecting wire; 8. First bearing seat; 81. First bearing; 9. Second bearing seat; 91. Second bearing; 92. Connecting seat; 20. Suction cup; 21. Base area; 211. Fixed vent hole; 212. Second connector; 22. First adjustment area; 221. First air passage; 222. First vent hole; 23. Second adjustment area; 231. Second air passage; 232. Second vent hole; 24. Second mounting hole; 30. Cover plate; 31. Adsorption hole; F, Axial direction; X, First direction; Y, Second direction. Detailed Implementation

[0025] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0026] It should be noted that when an element is referred to as being "set on" another element, it can be directly on the other element or may be interposed with another element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or may be interposed with another element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementations.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0028] Please see Figures 1 to 6This application provides a movable air seal mechanism 10 for a vacuum adsorption device 100, comprising: a cylinder 1, an adjusting screw 2, a servo motor 4, a piston 5, and two limiting steel wires 7.

[0029] The cylinder body 1 has a first through hole 11 extending along the axial direction F. At one end of the cylinder body 1 near the axial direction F, there is a second through hole 12 communicating with the first through hole 11. At the top of the cylinder body 1, there are multiple third through holes 13 spaced apart along the axial direction F. The third through holes 13 communicate with the first through holes 11. An adjusting screw 2 passes through the first through hole 11. The two ends of the adjusting screw 2 along the axial direction F are designated as the first end 201 and the second end 202. A servo motor 4 is connected to the first end 201 via a coupling 3 to drive the adjusting screw 2 to rotate. A piston 5 is sleeved on the adjusting screw 2. A first sealing ring 6 is provided between the piston 5 and the first through hole 11. Multiple first sealing rings 6 can be provided to optimize the sealing effect. The dimension of the piston 5 along the axial direction F is greater than or equal to the dimension of the third through hole 13 along the axial direction F. Two limiting steel wires 7 are arranged parallel to each other on both sides of the adjusting screw 2. The limiting steel wires 7 pass through the piston 5 and extend along the axial direction F.

[0030] The movable air-sealing mechanism 10 of the vacuum adsorption device 100 provided in this embodiment includes a cylinder 1, an adjusting screw 2, a servo motor 4, a piston 5, and two limiting steel wires 7. The servo motor 4 drives the adjusting screw 2 to rotate, causing the piston 5 to move precisely along the axial direction F, achieving higher position control accuracy compared to the prior art. The two limiting steel wires 7, which are parallel to each other on both sides of the adjusting screw 2 and pass through the piston 5, effectively prevent the piston 5 from rotating along with the screw, ensuring that the piston 5 only moves along the axial direction F, avoiding sealing failure or jamming caused by piston 5 deflection. The dimension of the piston 5 in the axial direction F is greater than or equal to the axial dimension F of the third through hole 13, so that when the piston 5 moves to a certain position, it can completely cover and seal the corresponding position of the third through hole 13, realizing continuous adjustment of the ventilation area. A first sealing ring 6 is provided between the piston 5 and the first through hole 11 to ensure that the vacuum degree of the closed area does not leak. The mobile air seal mechanism 10 has a compact overall structure, integrating the driving, transmission, sealing and guiding functions inside the cylinder 1. It occupies little space and is easy to install multiple sets quickly. Its piston 5 can move reliably and effectively seal each air passage.

[0031] In this embodiment, the piston 5 is a hollow cylinder, and its outer diameter matches the diameter of the first through hole 11. The hollow structure not only connects the piston 5 to the adjusting screw 2 but also reduces the mass of the piston 5, decreasing the load on the servo motor 4 and improving the response speed. The cylindrical outer wall facilitates the creation of sealing ring grooves, ensuring a smooth sliding seal between the piston 5 and the inner wall of the cylinder 1. The hollow cylindrical structure is easy to machine, significantly reducing manufacturing costs compared to an irregularly shaped piston 5.

[0032] like Figure 1 , Figure 2 and Figure 5 As shown, multiple third through holes 13 are evenly distributed along the axial direction F. The dimension of the piston 5 along the axial direction F is less than or equal to the sum of the radius of the third through hole 13 along the axial direction F and the distance between two adjacent third through holes 13. This dimensional relationship ensures that the piston 5 will cover at most one third through hole 13 at any stop position, and will not block two third through holes 13 at the same time. With the precise control of the servo motor 4, the piston 5 can stop at any third through hole 13, and the boundary of the effective ventilation area can vary between two adjacent third through holes 13, achieving continuous adjustment and adapting to workpieces of various sizes.

[0033] Specifically, such as Figure 3 As shown, a second sealing ring 15 is provided on the outer side of the upper surface of the third through hole 13 to seal between the third through hole 13 and the working surface (in this application, the working surface refers to the bottom surface of the suction cup 20). When the movable air seal mechanism 10 is installed below the suction cup 20, the second sealing ring 15 fills the tiny gap between the upper surface of the cylinder 1 and the bottom surface of the suction cup 20, preventing gas leakage from the junction of the third through hole 13 and the vent of the suction cup 20. The second sealing ring 15 compensates for the flatness error of the mounting surface, reducing the precision grinding requirements of the contact surface. As a vulnerable part, the external design of the second sealing ring 15 facilitates quick replacement in case of aging or damage.

[0034] In this embodiment, such as Figure 6 As shown, the cylinder body 1 has two fourth through holes 14 at its bottom ends along the axial direction F, which are connected to the first through hole 11. Sensors 16 are connected to the two fourth through holes 14, which can sense the starting and ending positions of the piston 5 respectively, ultimately indicating the size of the open vacuum suction area. The cylinder body 1 also has multiple first mounting holes 18 for fasteners to pass through and fix the cylinder body 1 to a predetermined position on the suction cup 20.

[0035] like Figure 3 As shown, the cylinder body 1 has a first bearing seat 8 and a second bearing seat 9 fixedly connected to its two ends along the axial direction F. The first bearing seat 8 and the first end 201 are connected by a first bearing 81, and the second bearing seat 9 and the second end 202 are connected by a second bearing 91. That is, the two ends of the adjusting screw 2 are connected to the first bearing seat 8 and the second bearing seat 9 through the first bearing 81 and the second bearing 91, respectively, providing stable radial and axial support for the adjusting screw 2, ensuring the concentricity of the screw rotation and reducing screw deflection. One end of the limiting steel wire 7 is fixedly connected to the first bearing seat 8, and the other end is fixedly connected to the second bearing seat 9, making full use of the structural rigidity of the bearing seat, eliminating the need for an additional steel wire fixing bracket, and simplifying assembly. The stable screw support ensures that the axial movement F of the screw is minimal during rotation, guaranteeing the repeatability of the piston 5 displacement.

[0036] like Figure 5 As shown, a connecting seat 92 is fixedly connected to the side of the second bearing housing 9 opposite to the cylinder body 1. The ends of two limiting steel wires 7 near the second end 202 are connected by a connecting steel wire 71. The second end 202 is located inside the second bearing housing 9, one end of the limiting steel wire 7 extends beyond the connecting seat 92, and the connecting steel wire 71 is located outside the connecting seat 92. The connecting seat 92 can be used to tighten the limiting steel wires 7. The connecting steel wire 71 connects the two parallel limiting steel wires 7 into one unit. A preload can be applied to keep the steel wires taut, preventing them from loosening or bending during use. The connecting steel wire 71 is located outside the connecting seat 92, effectively preventing the two steel wires from being pulled out or experiencing relative displacement even if the piston 5 exerts a lateral force on the limiting steel wires 7 during piston 5 sliding. This structure eliminates the need for separate clamping or locking structures at the ends of each steel wire, reducing the number of parts and assembly complexity.

[0037] Specifically, the second through hole 12 is connected to the first connector 17 for connection to a vacuum pump. The use of a standard connector for the vacuum pipeline ensures airtightness and reliability. The connector design allows the movable gas sealing mechanism 10 to be disassembled independently without the need for complete removal of the vacuum pipeline, facilitating equipment maintenance and replacement. The use of universal connector specifications ensures compatibility with commonly available vacuum pumps and vacuum pipeline accessories, resulting in a high degree of standardization. The first connector 17 can be a pagoda elbow.

[0038] In this embodiment, the servo motor 4 is connected to a mounting base 41 for fixing the servo motor 4 to the working surface. The mounting base 41 rigidly connects the motor housing to the bottom of the suction cup 20, preventing the motor from shifting due to vibration or counter-torque during operation. The precise positioning of the mounting base 41 ensures the coaxiality between the motor output shaft, the coupling 3, and the adjusting screw 2, reducing the wear and vibration of the coupling 3. The motor and the movable air seal mechanism 10 can be integrated into a module through the mounting base 41, facilitating quick installation and removal on the bottom surface of the suction cup 20.

[0039] Based on the same concept, this utility model also provides a vacuum adsorption device 100, as described in the following embodiments. Since the principle of solving the problem and the technical effects that the vacuum adsorption device 100 can achieve are similar to those of the above-described movable air seal mechanism 10, the implementation of the vacuum adsorption device 100 can refer to the implementation of the above-described movable air seal mechanism 10, and the repeated parts will not be described again.

[0040] like Figure 7 , Figure 8 and Figure 9As shown, one embodiment of this utility model also provides a vacuum adsorption device 100, including: a suction cup 20, and two movable air-sealing mechanisms 10 fixedly installed at the bottom of the suction cup 20. The movable air-sealing mechanism 10 adopts the movable air-sealing mechanism 10 described in any of the above embodiments.

[0041] The suction cup 20 includes a base area 21, a first adjustment area 22, and a second adjustment area 23. Both the first and second adjustment areas 22 and 23 are adjacent to the base area 21. The base area 21 has a fixed vent hole 211. The first adjustment area 22 includes multiple first air passages 221 extending along the second direction Y and spaced apart in the first direction X. Each first air passage 221 has a first vent hole 222 penetrating the suction cup 20, and the multiple first vent holes 222 are spaced apart in the first direction X. The second adjustment area 23 includes multiple second air passages 231 extending along the first direction X and spaced apart in the second direction Y. Each second air passage 231 has a second vent hole 232 penetrating the suction cup 20, and the multiple second vent holes 232 are spaced apart in the second direction Y. The first direction X is perpendicular to the second direction Y. The axial directions F of the two movable air-sealing mechanisms 10 are the first direction X and the second direction Y, respectively. The third through holes 13 of the two movable air-sealing mechanisms 10 are located below the first vent hole 222 and the second vent hole 232, respectively.

[0042] This vacuum adsorption device 100 includes a suction cup 20 with a base area 21, a first adjustment area 22, and a second adjustment area 23, and two movable air-sealing mechanisms 10 with axes F in the first direction X and the second direction Y, respectively. The size of the vacuum adsorption area is changed by adjusting the position of the piston 5. The two movable air-sealing mechanisms 10 control the opening and closing of the vents in the first direction X and the second direction Y, respectively, realizing independent adjustment of the adsorption area in the X and Y dimensions, which can adapt to workpieces of different length and width. The two movable air-sealing mechanisms 10 are directly installed on the bottom of the suction cup 20, and the third through hole 13 corresponds one-to-one with each vent of the suction cup 20, eliminating the need for complex external valves and pipelines, resulting in a high degree of integration and compact structure. Both movable air-sealing mechanisms 10 are driven by servo motors 4 and can be coordinated and controlled by the same controller, facilitating automated adjustment. This device can be applied to various scenarios requiring vacuum adsorption and fixation, such as screen printing, electronic assembly, and thin film cutting, and is particularly suitable for the need for rapid switching of workpieces of different sizes in multi-variety, small-batch production. When the workpiece size is input, the vacuum adsorption device 100 automatically adjusts the zone by moving the piston 5 to achieve the equipment function and meet customer needs.

[0043] Specifically, a cover plate 30 can be provided above the suction cup 20. The upper surface of the cover plate 30 is used to place the workpiece. The cover plate 30 has multiple adsorption holes 31. The cover plate 30 and the suction cup 20 have the same area, and the multiple adsorption holes 31 are distributed across the entire surface of the cover plate 30, so that the entire area of ​​the cover plate 30 has adsorption capacity, covering all ventilation areas corresponding to the base area 21, the first adjustment area 22, and the second adjustment area 23. This full-area coverage design ensures that effective vacuum adsorption can be obtained no matter where the workpiece is placed on the cover plate 30, avoiding fixation blind spots caused by the absence of adsorption holes 31 in some areas of the cover plate 30, and improving the adaptability of the device to workpieces in different placement positions.

[0044] like Figure 8 As shown, the two ends of the adjacent sides of the first adjustment area 22 and the second adjustment area 23 are the vertices of the base area 21 and the suction cup 20, respectively, and the adjacent sides intersect with both the first direction X and the second direction Y (i.e., they are arranged diagonally), so that the first adjustment area 22 and the second adjustment area 23 form a smooth boundary at the adjacent corners of the base area 21. This diagonal boundary design avoids right-angle transitions or overlapping areas between the two adjustable areas, so that the adjustment of the two pistons 5 in their respective directions does not interfere with each other, which is conducive to achieving independent and continuous adjustment of the adsorption areas in the two directions, and also optimizes the flow channel layout inside the suction cup 20.

[0045] Specifically, the lengths of the multiple first air passages 221 gradually increase in the first direction X. This gradual flow channel design allows the first air passages 221, which are farther from the base region 21, to have a longer extension distance, thereby covering a wider area. When a piston 5 moves along the first direction X, the flow channels of different lengths can be blocked sequentially, realizing the stepwise and continuous closure of the adsorption area from the side closer to the base region 21 to the side farther away. This makes the boundary of the effective adsorption area more precise and avoids the adjustment step problem that may occur due to the uniform length of the flow channels.

[0046] Correspondingly, the lengths of the multiple second air passages 231 gradually increase in the second direction Y. Correspondingly, this gradual flow channel design allows the second air passages 231, located away from the base region 21, to have a longer extension distance. When a piston 5 moves along the second direction Y, flow channels of different lengths can be blocked sequentially, achieving a step-by-step, continuous closure of the adsorption region from the side closer to the base region 21 to the side farther away. Combined with the gradual flow channel of the first adjustment region 22, this achieves refined adjustment of the adsorption region in both directions.

[0047] Preferably, the vacuuming component is connected to the fixed vent 211 via a second connector 212, and the vacuuming component is connected to the two cylinders 1 via two first connectors 17 respectively. By setting the first connectors 17 and the second connectors 212, the vacuuming component is independently connected to the fixed vent 211 and the two first through holes 11, making the air paths of the three ventilation zones independent of each other. This independent air path design facilitates individual monitoring and adjustment of the negative pressure in each zone. When a leak or malfunction occurs in one zone, it does not affect the normal operation of other zones. At the same time, the independent connectors also facilitate the installation, maintenance, and replacement of pipelines, improving the assemblability and maintainability of the device.

[0048] The embodiments of this application do not limit the number of vacuum pumping components. There can be one, meaning both first connectors 17 and one second connector 212 are connected to the same vacuum pumping component; or there can be two or three, meaning the two first connectors 17 and one second connector 212 are connected to different vacuum pumping components. The vacuum pumping component can be a blower or a vacuum pump, etc.

[0049] like Figure 8 and Figure 9 As shown, the suction cup 20 has multiple second mounting holes 24 for fasteners to pass through to secure the vacuum adsorption device 100 in a predetermined position, such as the workbench or frame of the equipment. This standardized installation structure allows the device to be easily integrated into various automated equipment, ensuring secure installation and accurate positioning, while also facilitating disassembly and maintenance, thus improving the device's versatility and applicability.

[0050] Specifically, the vacuum adsorption device 100 is particularly suitable for the automatic partitioning structure of the suction cup 20 on the workpiece platform of exposure equipment, and can also be used in other industries that require a vacuum adsorption platform. Through its ingenious structural design and servo motor 4 drive, combined with the vacuum suction characteristics of a blower, the vacuum adsorption device 100 achieves automatic adjustment of the adsorption area according to the size of the customer's workpiece. It can be customized to meet customer needs, covering all working conditions, thereby improving production capacity and efficiency, increasing profits, and saving costs.

[0051] In a specific application scenario, the first sealing ring 6, piston 5, adjusting screw 2, first bearing 81, second bearing 91, second bearing seat 9, connecting seat 92, and limiting wire 7 can be assembled first and then installed into cylinder 1. The second bearing seat 9 is locked and fixed to cylinder 1 with screws. Then, the first bearing seat 8, washer, nut (the washer and nut are placed between the first bearing seat 8 and adjusting screw 2), wire drawing plate (the wire drawing plate is used to fix the limiting wire 7 together with the first bearing seat 8 at the first end 201), coupling 3, fixed seat 41, and servo motor 4 are installed in sequence. Then, the assembled movable air sealing mechanism 10 and suction cup 20 are assembled. The second sealing ring 15 is placed into the sealing groove of cylinder 1, and cylinder 1 and suction cup 20 are locked and fixed with screws. The installation sequence of the movable air sealing mechanism 10 in the other direction is the same. Finally, the cover plate 30 is installed to complete the assembly.

[0052] In this embodiment, the base area 21 is typically specified according to customer requirements and is for commonly used workpiece sizes. The position of the air-sealing piston 5 is controlled by a motor and screw to achieve automatic adjustment of the vacuum suction area. When changing to different sized plates, after inputting the workpiece dimensions into the system, the servo motor 4 operates, moving the piston 5 to the corresponding position, opening the corresponding air holes, and forming the corresponding vacuum suction area. To prevent the piston 5 from rotating with the adjusting screw 2, and due to space constraints, limiting steel wires 7 are added to both sides of the piston 5. One end of the limiting steel wire 7 is pressed by the first bearing seat 8 and the wire drawing plate, and the other end is adjusted for tension via the connecting seat 92. This allows the piston 5 to move smoothly in the channel to achieve the adjustment purpose.

[0053] It should be noted that in the description of this specification, the terms "first," "second," etc., are used only for descriptive purposes and to distinguish similar objects; there is no order between them, nor should they be construed as indicating or implying relative importance. Furthermore, in the description of this specification, unless otherwise stated, "a plurality of" means two or more.

[0054] Any numerical values ​​cited herein include all values ​​ranging from a lower limit to an upper limit, increasing by one unit, with at least two units between any lower and any higher value. For example, if the quantity of a component or the value of a process variable (e.g., temperature, pressure, time, etc.) is described as being from 1 to 90, preferably from 20 to 80, more preferably from 30 to 70, the purpose is to illustrate that values ​​such as 15 to 85, 22 to 68, 43 to 51, 30 to 32 are also explicitly listed in this specification. For values ​​less than 1, a unit is appropriately considered to be 0.0001, 0.001, 0.01, 0.1, etc. These are merely examples intended for explicit expression, and it can be assumed that all possible combinations of values ​​listed between the minimum and maximum values ​​are explicitly described in this specification in a similar manner.

[0055] Unless otherwise stated, all ranges include the endpoints and all numbers between them. The terms "approximately" or "about" used with ranges apply to both endpoints of the range. Thus, "approximately 20 to 30" is intended to cover "approximately 20 to approximately 30," including at least the specified endpoints.

[0056] All articles and references disclosed herein, including patent applications and publications, are incorporated herein by reference for various purposes. The term “substantially constitutes…” used to describe a combination should include the identified elements, components, parts, or steps, as well as other elements, components, parts, or steps that do not substantially affect the essential novelty of the combination. The use of the terms “comprising” or “including” to describe combinations of elements, components, parts, or steps herein also contemplates embodiments substantially constituted by such elements, components, parts, or steps. The use of the term “may” herein is intended to indicate that any described attribute included by “may” is optional.

[0057] Multiple elements, components, parts, or steps can be provided by a single integrated element, component, part, or step. Alternatively, a single integrated element, component, part, or step can be divided into multiple separate elements, components, parts, or steps. The use of "a" or "an" to describe an element, component, part, or step does not imply the exclusion of other elements, components, parts, or steps.

[0058] It should be understood that the above description is for illustrative purposes and not for limitation. Many embodiments and applications beyond the provided examples will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of this teaching should not be determined by reference to the above description, but rather by reference to the appended claims and the full scope of their equivalents. For purposes of completeness, all articles and references, including patent applications and publications, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein in the preceding claims is not intended as a waiver of that subject matter, nor should it be construed as an indication that the inventors have not considered that subject matter as part of the disclosed utility model subject matter.

Claims

1. A moving air seal mechanism for a vacuum suction device, characterized by, include: The cylinder body has a first through hole extending along the axial direction, and a second through hole communicating with the first through hole at one end near the axial direction; the top end of the cylinder body has a plurality of third through holes spaced apart along the axial direction, and the third through holes are connected to the first through holes. An adjusting screw is disposed through the first through hole; the two ends of the adjusting screw in the axial direction are referred to as the first end and the second end. A servo motor connected to the first end via a coupling is used to drive the adjusting screw to rotate; A piston is sleeved outside the adjusting screw, and a first sealing ring is provided between the piston and the first through hole; the axial dimension of the piston is greater than or equal to the axial dimension of the third through hole. Two limiting steel wires are arranged parallel to each other on both sides of the adjusting screw, and the limiting steel wires pass through the piston; the limiting steel wires extend axially.

2. The mobile gas seal mechanism of claim 1, wherein, The piston is a hollow cylinder, and its outer diameter matches the diameter of the first through hole.

3. The mobile gas seal mechanism of claim 1, wherein, The plurality of the third through holes are evenly distributed at intervals along the axial direction; the axial dimension of the piston is less than or equal to the sum of the axial radius of the third through hole and the distance between two adjacent third through holes.

4. The mobile gas seal mechanism of claim 1, wherein, A second sealing ring is provided on the outer side of the upper surface of the third through hole to seal the third through hole with the working surface.

5. The mobile gas seal mechanism of claim 1, wherein, The cylinder body has two fourth through holes at the bottom of both ends in the axial direction, and the fourth through holes are connected to the first through hole; sensors are connected to the two fourth through holes.

6. The mobile gas seal mechanism of claim 1, wherein, The cylinder body has a first bearing seat and a second bearing seat fixedly connected to its two ends in the axial direction, respectively; the first bearing seat and the first end are connected by a first bearing; the second bearing seat and the second end are connected by a second bearing; one end of the limiting steel wire is fixedly connected to the first bearing seat, and the other end is fixedly connected to the second bearing seat.

7. The mobile gas seal mechanism of claim 6, wherein, A connecting seat is fixedly connected to the side of the second bearing housing away from the cylinder body; the ends of the two limiting steel wires near the second end are connected by a connecting steel wire; the second end is located inside the second bearing housing, one end of the limiting steel wire extends beyond the connecting seat, and the connecting steel wire is located outside the connecting seat.

8. The mobile gas seal mechanism of claim 1, wherein, The second through hole is connected to the first connector for connection to a vacuum pump.

9. The mobile gas seal mechanism of claim 1, wherein, The servo motor is connected to a mounting base for fixing the servo motor to the working surface.

10. A vacuum suction device, characterized by include: The suction cup includes a base area, a first adjustment area, and a second adjustment area; both the first and second adjustment areas are adjacent to the base area. The base area is provided with fixed ventilation holes; the first adjustment area includes multiple first ventilation channels that are spaced apart in a first direction and extend along a second direction; each first ventilation channel is provided with a first ventilation hole that penetrates the suction cup, and the multiple first ventilation holes are spaced apart in the first direction; the second adjustment area includes multiple second ventilation channels that are spaced apart in the second direction and extend along the first direction; each second ventilation channel is provided with a second ventilation hole that penetrates the suction cup, and the multiple second ventilation holes are spaced apart in the second direction; the first direction is perpendicular to the second direction; Two movable air-sealing mechanisms are fixedly installed at the bottom of the suction cup. The movable air-sealing mechanisms are the movable air-sealing mechanisms as described in any one of claims 1 to 9. The axial directions of the two movable air-sealing mechanisms are respectively the first direction and the second direction. The third through holes of the two movable air-sealing mechanisms are respectively located below the first vent hole and the second vent hole.

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