A frame magazine transfer device
By designing a frame-based material box transport device, automated material box transportation was achieved, solving the problem of low efficiency in manual transportation in semiconductor production, improving production efficiency and reducing costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- MATFRON (SHANGHAI) SEMICON TECH CO LTD
- Filing Date
- 2025-08-07
- Publication Date
- 2026-07-31
AI Technical Summary
In existing technologies, the transportation of material boxes during semiconductor manufacturing relies on manual methods, which cannot meet the requirements of high-efficiency automation and leads to increased production costs.
A frame-type material box conveying device was designed, including an empty material box assembly, a full material box assembly, and a positioning assembly. The device utilizes a conveying mechanism, a friction slide rail, and the positioning assembly to achieve automated material box transportation. With the assistance of a robotic arm, the device enables automatic gripping and movement of the material boxes.
It improved the transportation efficiency of material boxes, reduced labor costs, met the automation requirements of semiconductor production, and improved production efficiency.
Smart Images

Figure CN224577593U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of conveying equipment technology, and in particular to a frame material box conveying device. Background Technology
[0002] With the rapid pace of technological iteration in the semiconductor industry, domestic chip manufacturers are experiencing increasing production volumes, higher demands for product yield, rising labor costs, and a growing need for increased production efficiency and automation. After semiconductor products are manufactured, they require collection using cassettes. Current technology typically involves workers transporting these cassettes, but this method is becoming increasingly inadequate to meet production demands. Adding personnel for transport would only increase production costs. Therefore, providing an automated cassette transport frame system is crucial. Summary of the Invention
[0003] According to an embodiment of the present utility model, a frame material box conveying device is provided for conveying material boxes to a robotic arm device, including a frame, on which are provided: an empty material box assembly, a full material box assembly and a positioning assembly;
[0004] The empty container assembly includes: an empty container base plate and a conveying mechanism;
[0005] The empty box base plate is set on the frame, and the conveying mechanism is used to drive the empty box to move on the empty box base plate to the gripping position of the robot arm.
[0006] The full material box assembly includes: a full material base plate and a friction slide rail;
[0007] The full material base plate is set on the frame, and the friction slide rail is set on the full material base plate. The friction slide rail provides a track for the full material box to slide, so that when the robot arm equipment places material at the beginning end of the friction slide rail, it pushes the material on the friction slide rail to the end of the friction slide rail.
[0008] Both the empty box base plate and the full material base plate are equipped with positioning components. The positioning component on the empty box base plate is located at the end of the conveying mechanism and is used to detect that the empty box is in the gripping position of the robot arm. The positioning component on the full material base plate is located at the end of the friction slide rail and is used to detect that the full box on the full material base plate has been loaded.
[0009] Furthermore, the positioning component includes: a positioning frame, a sensing block, a reset spring, and a sensor;
[0010] The positioning frame is connected to the empty box base plate or the full box base plate. The sensing block is rotatably connected to the positioning frame. The sensor is located on the positioning frame. When the sensing block is pushed by the box and rotates, it can trigger the sensor. One end of the reset spring is connected to the positioning frame and the other end is connected to the sensing block to reset the sensing block.
[0011] Furthermore, the sensing block includes: a sensing part and a triggering part;
[0012] The sensing part and the triggering part are arranged vertically. The sensing part is located above the empty box bottom plate or the full box bottom plate and is facing the material box on the empty box bottom plate or the full box bottom plate. The triggering part is used to trigger the sensor when the material box pushes the sensing part.
[0013] Furthermore, the conveying mechanism includes: a drive motor, a belt, a drive pulley, and two driven pulleys;
[0014] The drive motor is located below the bottom plate of the empty box. The drive wheel is connected to the output end of the drive motor. The two driven wheels are located at both ends of the bottom plate of the empty box. The belt is located on the drive wheel and the two driven wheels, and the belt passes over the top of the bottom plate of the empty box.
[0015] Furthermore, the conveying mechanism also includes: a synchronous shaft, two synchronous pulleys, and a synchronous belt;
[0016] The synchronous shaft is connected to the driven wheel at the beginning of the empty box bottom plate. The two synchronous wheels are located at the two ends of the empty box bottom plate. The synchronous wheel at the beginning of the empty box bottom plate is connected to the synchronous shaft, and the synchronous belt is located on the two synchronous wheels.
[0017] Furthermore, it also includes: an adjustment component, both the empty material box assembly and the full material box assembly are equipped with an adjustment component, the adjustment component is adapted to adjust the space width on the empty material box assembly and the full material box assembly for placing the material box according to the width of the material box.
[0018] Furthermore, the adjustment assembly includes: an adjustment slide rail, an adjustment slider, a material box baffle, and a locking component;
[0019] The adjusting slide rail is located on the empty box bottom plate or the full material bottom plate. The adjusting slider is slidably set on the adjusting slide rail. The material box baffle is set on the adjusting slider. The material box baffle is located on the moving path of the material box. The adjusting slider is used to adjust the distance between the material box baffle and the frame. The locking part is used to lock the adjusting slider.
[0020] Furthermore, the frame is equipped with side slides, which are set to correspond to the movement direction of the material boxes on the empty box bottom plate and the full material bottom plate.
[0021] Furthermore, a first baffle is provided on the empty box bottom plate, which is located at the beginning of the empty box bottom plate, and a second baffle is provided on the full box bottom plate, which is located at the end of the full box bottom plate.
[0022] A frame material box conveying device according to an embodiment of the present invention. The conveying mechanism of the present invention drives an empty material box to move on an empty box base plate, moving the empty material box to a position where a robotic arm can grasp it. The empty material box triggers a positioning component, causing the robotic arm to grasp the empty material box and place the processed material into it. After the material box is full of material, the robotic arm places the full material box on a full material base plate. During the process of placing the full material box on the full material base plate, the full material box on the robotic arm pushes the full material box on the full material base plate to slide on a friction slide rail, pushing the full material box on the full material base plate towards the end of the friction slide rail. When the full material base plate is full of full material boxes, the full material box at the end of the friction slide rail triggers the positioning component, realizing automatic transport of the material boxes and improving the transport efficiency of the material boxes.
[0023] It should be understood that both the foregoing general description and the following detailed description are exemplary and intended to provide further illustration of the claimed technology. Attached Figure Description
[0024] Figure 1 This is a structural diagram of a frame material box conveying device according to an embodiment of the present utility model;
[0025] Figure 2 This is a front view of a frame material box conveying device according to an embodiment of the present utility model;
[0026] Figure 3 This is a structural diagram of an empty material box assembly of a frame material box conveying device according to an embodiment of the present utility model;
[0027] Figure 4 This is a front view of an empty material box assembly of a frame material box conveying device according to an embodiment of the present utility model;
[0028] Figure 5 This is a cross-sectional view of an empty material box assembly of a frame material box conveying device according to an embodiment of the present utility model;
[0029] Figure 6 This is a structural diagram of a full-load box assembly of a frame-type material box conveying device according to an embodiment of the present utility model;
[0030] Figure 7 This is a top view of a full-load assembly of a frame material box conveying device according to an embodiment of the present utility model;
[0031] Figure 8 This is a structural diagram of the positioning component of a frame material box conveying device according to an embodiment of the present utility model.
[0032] In the attached diagram, the following labels are used: 1 is the frame, 11 is the side slide plate, 12 is the first baffle, 13 is the second baffle, 2 is the empty material box assembly, 21 is the empty box bottom plate, 22 is the drive motor, 23 is the belt, 24 is the driving wheel, 25 is the driven wheel, 26 is the synchronous shaft, 27 is the synchronous pulley, 28 is the synchronous belt, 3 is the full material box assembly, 31 is the full material bottom plate, 32 is the friction slide rail, 4 is the positioning assembly, 41 is the positioning frame, 42 is the sensing block, 43 is the reset spring, 44 is the sensor, 5 is the adjustment assembly, 51 is the adjustment slide rail, 52 is the adjustment slider, 53 is the material box baffle, and 54 is the locking component. Detailed Implementation
[0033] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, further illustrating the present invention.
[0034] First, combine Figures 1-8 This invention describes a frame-type material box conveying device according to an embodiment of the present invention, used for conveying empty material boxes and conveying material boxes filled with materials.
[0035] like Figures 1-6 As shown, a frame material box conveying device according to an embodiment of the present utility model is used to convey material boxes to a robotic arm device, including a frame 1, on which are provided: an empty material box assembly 2, a full material box assembly 3 and a positioning assembly 4;
[0036] The empty container assembly 2 includes: an empty container base plate 21 and a conveying mechanism;
[0037] The empty box base plate 21 is mounted on the frame 1, and the conveying mechanism is used to drive the empty box to move on the empty box base plate 21 to the gripping position of the robot arm.
[0038] The full material box assembly 3 includes: a full material base plate 31 and a friction slide rail 32;
[0039] A full material base plate 31 is mounted on the frame 1, and a friction slide rail 32 is mounted on the full material base plate 31. The friction slide rail 32 provides a track for the full material box to slide, so that when the robot arm device places material at the beginning end of the friction slide rail 32, it pushes the material on the friction slide rail 32 to the end of the friction slide rail 32.
[0040] Both the empty box base plate 21 and the full material base plate 31 are equipped with positioning components 4. The positioning component 4 on the empty box base plate 21 is located at the end of the conveying mechanism and is used to detect that the empty box is in the gripping position of the robot arm. The positioning component 4 on the full material base plate 31 is located at the end of the friction slide rail 32 and is used to detect that the full box on the full material base plate 31 has been loaded.
[0041] In this embodiment, the empty material box is placed on the empty box base plate 21. The conveying mechanism drives the empty material box to move on the empty box base plate 21, moving the empty material box to a position where the robot can grasp it. The empty material box will trigger the positioning component 4, so that the robot can grasp the empty material box and place the processed material into the empty material box. After the material box is full of material, the robot will place the full material box on the full material base plate 31. During the process of placing the full material box on the full material base plate 31, the full material box on the robot will push the full material box on the full material base plate 31 to slide on the friction slide rail 32, pushing the full material box on the full material base plate 31 towards the end of the friction slide rail 32. When the full material base plate 31 is full of full material boxes, the full material box located at the end of the friction slide rail 32 will trigger the positioning component 4.
[0042] like Figures 3-8 As shown, the positioning component 4 includes: positioning frame 41, sensing block 42, reset spring 43 and sensor 44.
[0043] The positioning frame 41 is connected to the empty box bottom plate 21 or the full material bottom plate 31. The sensing block 42 is rotatably connected to the positioning frame 41. The sensor 44 is located on the positioning frame 41. When the sensing block 42 is pushed by the material box and rotates, it can trigger the sensor 44. One end of the reset spring 43 is connected to the positioning frame 41 and the other end is connected to the sensing block 42, which is used to reset the sensing block 42.
[0044] The sensing block 42 includes a sensing part and a triggering part.
[0045] The sensing part and the triggering part are arranged vertically. The sensing part is located above the empty box bottom plate 21 or the full box bottom plate 31 and is arranged towards the material box on the empty box bottom plate 21 or the full box bottom plate 31. The triggering part is used to trigger the sensor 44 when the material box pushes the sensing part.
[0046] As the material box slides on the friction slide rail 32 or is driven to move by the conveying mechanism, the material box will push the sensing part of the sensing block 42, causing the sensing block 42 to rotate and the trigger part of the sensing block 42 to be in the detection position of the sensor 44. When the sensor 44 detects the trigger part, it will send a signal to the control system, causing the robot to grab an empty material box or stop placing a full material box into the full material box assembly 3.
[0047] In this embodiment, sensor 44 is a common device in the prior art, model Omron EE-SX954-R, and the control system used in conjunction with sensor 44 is a device in the prior art.
[0048] like Figures 3-5 As shown, the conveying mechanism includes: a drive motor 22, a belt 23, a drive pulley 24, two driven pulleys 25, a synchronous shaft 26, two synchronous pulleys 27, and a synchronous belt 28.
[0049] The drive motor 22 is located below the empty box bottom plate 21. The drive wheel 24 is connected to the output end of the drive motor 22. The two driven wheels 25 are located at both ends of the empty box bottom plate 21 respectively. The belt 23 is located on the drive wheel 24 and the two driven wheels 25. The belt 23 passes over the empty box bottom plate 21.
[0050] Synchronous shaft 26 is connected to driven wheel 25 located at the starting end of empty box bottom plate 21. Two synchronous wheels 27 are located at the two ends of empty box bottom plate 21 respectively. The synchronous wheel 27 located at the starting end of empty box bottom plate 21 is connected to synchronous shaft 26. Synchronous belt 28 is located on the two synchronous wheels 27.
[0051] The empty material box is placed on belt 23 and synchronous belt 28. The drive motor 22 drives the drive wheel 24 to rotate, the belt 23 causes the driven wheel 25 to rotate synchronously, and the synchronous shaft 26 causes the synchronous wheel 27 to rotate synchronously with the driven wheel 25, so that the belt 23 and synchronous belt 28 move synchronously to transport the empty material box.
[0052] like Figures 3-7 As shown, the frame material box conveying device also includes: adjustment component 5. Both the empty material box component 2 and the full material box component 3 are provided with adjustment component 5. The adjustment component 5 is adapted to adjust the space width on the empty material box component 2 and the full material box component 3 for placing the material box according to the width of the material box.
[0053] The adjustment assembly 5 includes: an adjustment slide rail 51, an adjustment slider 52, a material box baffle 53, and a locking element 54.
[0054] The adjusting slide rail 51 is set on the empty box bottom plate 21 or the full material bottom plate 31. The adjusting slider 52 is slidably set on the adjusting slide rail 51. The material box baffle 53 is set on the adjusting slider 52. The material box baffle 53 is located on the moving path of the material box. The adjusting slider 52 is used to adjust the distance between the material box baffle 53 and the frame 1. The locking member 54 is used to lock the adjusting slider 52.
[0055] Loosen the locking piece 54 and push the adjusting slider 52 to slide on the adjusting slide rail 51 to adjust the distance between the material box baffle 53 and the frame 1. Adjust the distance between the material box baffle 53 and the frame 1 according to the size of the material box being transported to prevent the material box from deviating during movement and causing the material box to detach, so that the frame material box conveying device can transport material boxes of different sizes.
[0056] like Figures 1-2 As shown, the frame 1 is provided with a side slide plate 11, which is set to correspond to the moving direction of the material box on the empty box bottom plate 21 and the full material bottom plate 31.
[0057] The side slide plate 11 can prevent the material box from contacting the frame 1. The contact between the side slide plate 11 and the material box can reduce friction and prevent damage to the material box.
[0058] like Figures 1-2 As shown, the empty box bottom plate 21 is provided with a first baffle 12, which is located at the beginning end of the empty box bottom plate 21, and the full box bottom plate 31 is provided with a second baffle 13, which is located at the end of the full box bottom plate 31.
[0059] The first baffle 12 can prevent the material box on the empty box base plate 21 from detaching, and the second baffle 13 can prevent the material box on the full material base plate 31 from sliding out from the end of the friction slide rail 32.
[0060] Above, refer to Figures 1-8 This invention describes a frame material box conveying device according to an embodiment of the present invention. In this embodiment, the conveying mechanism drives an empty material box to move on an empty box base plate 21, moving the empty material box to a position where a robotic arm can grasp it. The empty material box triggers the positioning component 4, causing the robotic arm to grasp the empty material box and place the processed material into it. After the material box is filled with material, the robotic arm places the full material box on a full material base plate 31. During the process of placing the full material box on the full material base plate 31, the full material box on the robotic arm pushes the full material box on the full material base plate 31 to slide on a friction slide rail 32, pushing the full material box on the full material base plate 31 toward the end of the friction slide rail 32. When the full material base plate 31 is full of full material boxes, the full material box located at the end of the friction slide rail 32 will trigger the positioning component 4, realizing automatic transportation of the material box and improving the transportation efficiency of the material box.
[0061] It should be noted that, in this specification, the terms "comprising," "including," or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes said element.
[0062] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.
Claims
1. A frame magazine transfer device for transferring a magazine to a robot device, comprising a frame body, characterized in that, The frame is equipped with: an empty material box assembly, a full material box assembly, and a positioning assembly; The empty material box assembly includes: an empty box base plate and a conveying mechanism; The empty box base plate is mounted on the frame, and the conveying mechanism is used to drive the empty box to move on the empty box base plate to the gripping position of the robotic arm. The full material box assembly includes: a full material base plate and a friction slide rail; The full material base plate is mounted on the frame, and the friction slide rail is mounted on the full material base plate. The friction slide rail provides a track for the full material box to slide, so that when the robot arm device places material at the beginning end of the friction slide rail, it pushes the material on the friction slide rail to the end of the friction slide rail. Both the empty box base plate and the full material base plate are equipped with positioning components. The positioning component on the empty box base plate is located at the end of the conveying mechanism and is used to detect that the empty box is in the gripping position of the robot arm. The positioning component on the full material base plate is located at the end of the friction slide rail and is used to detect that the full box on the full material base plate has been loaded.
2. The frame magazine transport apparatus of claim 1, wherein, The positioning component includes: a positioning frame, a sensing block, a reset spring, and a sensor; The positioning frame is connected to the empty box bottom plate or the full box bottom plate. The sensing block is rotatably connected to the positioning frame. The sensor is located on the positioning frame. When the sensing block is pushed by the box and rotates, it can trigger the sensor. One end of the reset spring is connected to the positioning frame and the other end is connected to the sensing block, which is used to reset the sensing block.
3. The frame magazine transport apparatus of claim 2, wherein, The sensing block includes: a sensing part and a triggering part; The sensing part and the triggering part are arranged perpendicularly. The sensing part is located above the empty box bottom plate or the full box bottom plate and is arranged towards the material box on the empty box bottom plate or the full box bottom plate. The triggering part is used to trigger the sensor when the material box pushes the sensing part.
4. The frame magazine transport apparatus of claim 1, wherein, The conveying mechanism includes: a drive motor, a belt, a drive pulley, and two driven pulleys; The drive motor is located below the bottom plate of the empty box. The drive wheel is connected to the output end of the drive motor. The two driven wheels are located at both ends of the bottom plate of the empty box. The belt is located on the drive wheel and the two driven wheels and passes over the bottom plate of the empty box.
5. The frame magazine transport apparatus of claim 1, wherein, The conveying mechanism also includes: a synchronous shaft, two synchronous pulleys, and a synchronous belt; The synchronous shaft is connected to the driven wheel located at the starting end of the empty box bottom plate. The two synchronous wheels are located at the two ends of the empty box bottom plate, respectively. The synchronous wheel located at the starting end of the empty box bottom plate is connected to the synchronous shaft, and the synchronous belt is located on the two synchronous wheels.
6. The frame magazine transport apparatus of claim 1, wherein, Also includes: An adjustment component is provided in both the empty material box assembly and the full material box assembly. The adjustment component is adapted to adjust the space width on the empty material box assembly and the full material box assembly for placing the material box according to the width of the material box.
7. The frame magazine transport apparatus of claim 6, wherein, The adjustment assembly includes: an adjustment slide rail, an adjustment slider, a material box baffle, and a locking component; The adjusting slide rail is mounted on the empty box bottom plate or the full box bottom plate. The adjusting slider is slidably mounted on the adjusting slide rail. The material box baffle is mounted on the adjusting slider. The material box baffle is located on the moving path of the material box. The adjusting slider is used to adjust the distance between the material box baffle and the frame. The locking component is used to lock the adjusting slider.
8. The frame magazine transport apparatus of claim 1, wherein, The frame is equipped with a side slide plate, which is set to correspond to the movement direction of the material box on the empty box bottom plate and the full material bottom plate.
9. The frame magazine transport apparatus of claim 1, wherein, The empty box bottom plate is provided with a first baffle, the first baffle is located at the starting end of the empty box bottom plate, the full material bottom plate is provided with a second baffle, and the second baffle is located at the end of the full material bottom plate.