An apparatus for filling molybdenum target powder

Abstract

This utility model relates to the field of filling equipment, and more particularly to a device for filling molybdenum target powder, comprising a feed hopper, a dust suction pipe, a dust cover, and a connecting pipe; the feed hopper is externally connected to a dust suction pipe for collecting dust and conveying it to a dust removal system for processing; a dust cover is fitted over the feed hopper to prevent dust leakage upwards; a connecting pipe is connected to the bottom of the feed hopper for uniform airflow within the feed hopper; two sets of lifting lugs are symmetrically installed on both sides of the feed hopper; a uniform air distribution plate is embedded in the lower part of the feed hopper and welded to the feed hopper; two sets of dust removal flange holes are symmetrically opened on both sides of the feed hopper; the device is quickly positioned to the working position by hoisting; and combined with an automatic feeding device and a dust removal system, it achieves uniform filling of molybdenum powder and effective dust removal, improving filling efficiency, reducing labor intensity, ensuring filling uniformity, reducing operational difficulty, and reducing pollution.

Description

Technical Field

[0001] This utility model relates to the field of filling equipment, and in particular to a device for filling molybdenum target powder. Background Technology

[0002] As a key material, molybdenum sputtering targets play a crucial role in industries such as semiconductor manufacturing. In the production process of molybdenum sputtering targets, the filling of molybdenum powder is a critical step to ensure product quality. For large-size molybdenum sputtering targets, before cold isostatic pressing, molybdenum powder must be filled into the sleeve to form molybdenum powder with a certain density and uniformity. Therefore, a device for filling molybdenum sputtering target powder is needed.

[0003] The existing molybdenum target powder filling process mainly relies on manual operation, which has many significant shortcomings. In terms of labor intensity, operators need to manually measure and add material to the rubber sleeve placed vertically in the steel mold, which is extremely physically demanding. In terms of efficiency, the filling process is extremely time-consuming due to the small amount of material added each time and the fact that it is all done manually, which seriously affects production efficiency. In terms of uniformity, manual feeding cannot ensure that the molybdenum powder is evenly distributed in the rubber sleeve, resulting in large fluctuations in the size and quality of the formed molybdenum plate and poor stability. After filling, a second manual leveling is required, which not only increases the technical difficulty of the operation but also increases the risk of producing unqualified products. Moreover, due to the high degree of manual involvement, even with protective measures, impurities can easily fall into the rubber sleeve during production, causing secondary pollution, which in turn reduces the quality of the finished target material and affects the product's performance and market competitiveness.

[0004] Therefore, addressing the issues of existing molybdenum target powder filling methods that rely on manual labor, resulting in high labor intensity, low efficiency, poor uniformity, the need for secondary leveling, and easy secondary contamination, and the need for operators to manually measure and add material using a rubber sleeve, which is time-consuming and physically demanding, and the uneven distribution of molybdenum powder caused by manual feeding, reducing the quality and performance of the finished product, this invention proposes a device for molybdenum target powder filling. This device can be quickly positioned at the working location by hoisting and combined with an automatic material distribution device and a dust removal system to achieve uniform filling of molybdenum powder and effective dust removal. This invention improves filling efficiency, reduces labor intensity, ensures filling uniformity, reduces operational difficulty, and reduces pollution. Utility Model Content

[0005] In order to overcome the problems of existing molybdenum target powder filling relying on manual labor, which has problems such as high labor intensity, low efficiency, poor uniformity, need for secondary leveling and easy secondary pollution, operators manually measure and add material using a rubber sleeve. Each time, the amount is small, which takes a long time and consumes a lot of physical strength. Manual material addition also leads to uneven distribution of molybdenum powder, which reduces the quality and performance of the finished product.

[0006] The technical solution of this utility model is as follows: a device for filling molybdenum target powder, comprising a guide hopper, a dust suction pipe, a dust cover, and a connecting pipe; the guide hopper is externally connected to a dust suction pipe for collecting dust and conveying it to a dust removal system for processing; a dust cover is fitted on the outside of the guide hopper to prevent dust from leaking upwards; a connecting pipe is installed at the bottom of the guide hopper for uniform airflow within the guide hopper; two sets of lifting lugs are symmetrically installed on both sides of the outside of the guide hopper; a uniform air distribution plate is embedded in the lower part of the inside of the guide hopper and welded to the guide hopper; two sets of dust removal port flanges are symmetrically opened on both sides of the outside of the guide hopper.

[0007] Preferably, during the molybdenum target powder filling process, the guide hopper is first hoisted to the working position using lifting lugs, and the dust suction pipe is connected to the external dust removal system. Simultaneously, the dust cover is ensured to be in the appropriate position. When the automatic feeding device delivers molybdenum powder into the guide hopper, dust may be generated. At this time, because the dust removal flanges on both sides of the guide hopper are connected to the dust suction pipe, the dust suction pipe will generate suction under the action of the dust removal system, sucking away the dust in the guide hopper and transporting it to the dust removal system for processing. The connecting pipe at the bottom of the guide hopper allows external airflow to enter the guide hopper. Under the action of the air distribution plate, the airflow flows evenly within the guide hopper, further assisting the dust suction pipe in collecting dust and ensuring that dust does not accumulate in the guide hopper, thereby maintaining a clean environment inside the guide hopper and ensuring the smooth progress of the molybdenum powder filling process. At the same time, the dust cover prevents dust in the guide hopper from leaking upwards into the surrounding environment.

[0008] Preferably, a pressure strip is fitted on the top of the feed hopper, and a sealing cover located on the dust removal port flange is installed at the end of the feed hopper away from the dust suction pipe.

[0009] Preferably, a sealing ring is fitted around the outside of the feed hopper, and an upper sealing strip and a lower sealing strip are fitted around the lower part of the outside of the feed hopper.

[0010] Preferably, two sets of locking handles are symmetrically installed on the outside of the upper sealing strip, and two sets of suspension plates are symmetrically installed on the outside of the guide hopper above the upper sealing strip.

[0011] As a preferred embodiment, both sets of suspension plates are equipped with support plates at their top ends, and a triangular connecting hole is provided through the center of the outer side of the support plate.

[0012] Preferably, a connecting ring is fitted at one end of the suction pipe, and the inner wall of the suction pipe is coated with polytetrafluoroethylene.

[0013] As a preferred option, a dustproof rubber plate is installed at the upper part of the inside of the guide hopper, and an air inlet is opened at the bottom of the connecting pipe. The dustproof cover and the guide hopper can slide up and down relative to each other.

[0014] The beneficial effects of this utility model are as follows: The guide hopper assembly for molybdenum target powder filling described in this utility model plays a connecting role between the automatic feeding device and the molybdenum powder filling sleeve. It is quickly positioned to the working position by hoisting and, combined with the automatic feeding device and dust removal system, achieves uniform filling of molybdenum powder and effective dust removal. This utility model has significant technical effects in improving filling efficiency, reducing labor intensity, ensuring filling uniformity, reducing operation difficulty, and reducing pollution. Attached Figure Description

[0015] Figure 1 The diagram shown is a schematic representation of the overall structure of a device for filling molybdenum target powder according to this utility model. Figure 2 The diagram shown is a schematic of the dust cover structure of a device for filling molybdenum target powder according to this utility model. Figure 3 The diagram shown is a schematic diagram of the feed hopper structure of a device for filling molybdenum target powder according to this utility model. Figure 4 The diagram shown is a schematic diagram of the support plate structure of a device for filling molybdenum target powder according to this utility model.

[0016] Explanation of reference numerals in the attached drawings: 1. Feed hopper; 2. Dust suction pipe; 3. Sealing cover; 4. Pressure strip; 5. Dustproof rubber sheet; 6. Dustproof cover; 7. Upper sealing strip; 8. Lower sealing strip; 9. Locking handle; 10. Support plate; 11. Hanging plate; 12. Sealing ring; 13. Connecting pipe; 101. Dust removal hole flange; 102. Lifting lug; 103. Air distribution plate; 201. Connecting ring. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0018] Please see Figures 1-4In this embodiment, a device for filling molybdenum target powder includes a guide hopper 1, a dust suction pipe 2, a dust cover 6, and a connecting pipe 13. The guide hopper 1 is externally connected to a dust suction pipe 2 for collecting dust and conveying it to a dust removal system for processing. A dust cover 6 is fitted over the guide hopper 1 to prevent dust leakage upwards. A connecting pipe 13 is installed at the bottom of the guide hopper 1 for uniform airflow within the guide hopper 1. Two sets of lifting lugs 102 are symmetrically installed on both sides of the guide hopper 1. A uniform air distribution plate 103 is embedded in the lower part of the guide hopper 1 and welded to it. Two sets of dust removal flanges 101 are symmetrically opened on both sides of the guide hopper 1. During the molybdenum target powder filling process, the guide hopper 1 is first lifted to the working position using the lifting lugs 102, allowing the dust suction pipe 2 and connecting pipe 13 to... With the external dust removal system connected and the dust cover 6 in the correct position, dust may be generated when the automatic feeding device delivers molybdenum powder into the hopper 1. At this time, since the dust removal port flanges 101 on both sides of the hopper 1 are connected to the suction pipe 2, the suction pipe 2 will generate suction under the action of the dust removal system, sucking away the dust in the hopper 1 and transporting it to the dust removal system for processing. The connecting pipe 13 at the bottom of the hopper 1 allows external airflow to enter the hopper 1. Under the action of the air distribution plate 103, the airflow flows evenly in the hopper 1, further assisting the suction pipe 2 in collecting dust and ensuring that dust does not accumulate in the hopper 1, thereby maintaining a clean environment in the hopper 1 and ensuring the smooth progress of the molybdenum powder filling process. At the same time, the dust cover 6 prevents the dust in the hopper 1 from leaking upwards into the surrounding environment.

[0019] Please see Figures 1-4 In this embodiment, a pressure strip 4 is fitted around the top of the guide hopper 1. A sealing cap 3 located on the dust removal port flange 101 is installed at the end of the guide hopper 1 furthest from the dust suction pipe 2. During the molybdenum powder filling process, dust will be generated. The dustproof rubber plate 5 can effectively prevent dust from overflowing from the opening at the top of the guide hopper 1. The pressure strip 4 ensures the stable installation of the dustproof rubber plate 5, maintains the sealed state of the top of the guide hopper 1, prevents dust from leaking into the surrounding environment, protects the air quality of the workplace, reduces the potential health hazards of dust to operators, and avoids dust contamination of surrounding equipment and materials, ensuring the cleanliness of the entire work area. To ensure the purity of the material, a sealing ring 12 is fitted around the outside of the feed hopper 1. An upper sealing strip 7 and a lower sealing strip 8 are fitted around the lower part of the outside of the feed hopper 1. The sealing ring 12, fitted around the outside of the feed hopper 1, can effectively fill any tiny gaps that may exist between the feed hopper 1 and other connected components, preventing dust from leaking from these parts. During the molybdenum powder filling process, dust can easily escape from the gaps in the equipment. The presence of the sealing ring 12 forms a reliable sealing barrier, ensuring a clean working environment, avoiding dust pollution of the surrounding area, protecting operators from dust, and maintaining the purity of the material to prevent dust from mixing into the molybdenum powder and affecting product quality.

[0020] Please see Figures 2-4 In this embodiment, two sets of locking handles 9 are symmetrically installed on the outside of the upper sealing strip 7, and two sets of suspension plates 11 are symmetrically installed on the outside of the guide hopper 1 above the upper sealing strip 7. The two sets of suspension plates 11 are symmetrically installed on the outside of the guide hopper 1 and above the upper sealing strip 7, which facilitates the installation and positioning of the guide hopper 1. During the assembly and debugging of the equipment, the suspension plates 11 can be used to connect external hoisting equipment or fixing devices, so as to accurately hoist the guide hopper 1 to the working position and ensure its stability during operation. Supports are installed at the top of both sets of suspension plates 11. The support plate 10 has a triangular connecting hole through its outer center. The support plate 10 provides an additional support structure for the guide hopper 1. When the guide hopper 1 is connected to the external hoisting equipment through the suspension plate 11, the force during the hoisting process may cause the suspension plate 11 to be subjected to excessive local stress. The support plate 10 can effectively disperse these forces, enhance the load-bearing capacity of the suspension plate 11, prevent it from deforming or being damaged, ensure the stability and safety of the guide hopper 1 during hoisting and installation, and reduce the risk of installation errors and safety accidents caused by equipment shaking or component damage.

[0021] Please see Figures 1-4 In this embodiment, a connecting ring 201 is fitted at one end of the suction pipe 2. The inner wall of the suction pipe 2 is coated with polytetrafluoroethylene. The connecting ring 201 is fitted at one end of the suction pipe 2. Its main function is to facilitate the connection of the suction pipe 2 with other equipment components. A dustproof rubber plate 5 is installed at the upper part of the inside of the guide hopper 1. An air inlet is opened at the bottom of the connecting pipe 13. The dustproof cover 6 can slide up and down relative to the guide hopper 1. The dustproof rubber plate 5 installed at the upper part of the inside of the guide hopper 1 can effectively block the dust generated during the filling of molybdenum powder from rising. When the material enters the guide hopper 1, dust is easily generated due to the flow and drop of the material. The dustproof rubber plate 5 can prevent this dust from overflowing from the top of the guide hopper 1, avoid dust pollution of the working environment, protect the health of operators, reduce the erosion and damage of dust to surrounding equipment, maintain the normal operation and service life of the equipment, and ensure the cleanliness and safety of the working area.

[0022] During the molybdenum target powder filling operation, the hoisting equipment is first hoisted to a suitable position using the lifting lugs 102 or suspension plates 11 on both sides of the outer side of the guide hopper 1, connected to the hoisting equipment through the support plate 10 and triangular connecting holes at the top. This ensures the guide hopper 1 is positioned above the rubber sleeve to be filled and all components are in their initial working state. Next, the suction pipe 2 is tightly connected to the dust removal system via the connecting ring 201, ensuring a good seal. If the sealing cover 3 was previously closed, it must be opened to connect the dust removal port flange 101 of the guide hopper 1 to the suction pipe 2. The dust cover 6 is adjusted according to the height of the rubber sleeve, ensuring the lower sealing strip 8 fits tightly against the opening of the rubber sleeve. Finally, the dust cover 6 is secured using the locking handle 9 on the outside of the upper sealing strip 7 to prevent dust leakage. In case of leakage, after the automatic feeding device is started, molybdenum powder enters from the feed inlet at the top of the feed hopper 1. During the feeding process, the dustproof rubber plate 5 at the upper part of the feed hopper 1 prevents dust from rising. At the same time, since the bottom of the connecting pipe 13 connected to the bottom of the feed hopper 1 has an air inlet, external air enters. Under the action of the air distribution plate 103 embedded at the lower part of the feed hopper 1 and welded to the feed hopper 1, the airflow flows evenly in the feed hopper 1. The generated dust is transported to the dust removal system for treatment through the dust removal port flange 101 and the dust removal pipe 2 under the suction of the dust suction pipe 2. During the entire filling process, the sealing components such as the sealing ring 12, the upper sealing strip 7 and the lower sealing strip 8 on the outside of the feed hopper 1 continue to play a role in preventing dust leakage and ensuring a clean working environment and pure materials.

[0023] Through the above steps, during the molybdenum target powder filling process, the guide hopper 1 is first hoisted to the working position by the lifting lug 102, so that the dust suction pipe 2 is connected to the external dust removal system. At the same time, the dust cover 6 is ensured to be in the appropriate position. When the automatic feeding device conveys molybdenum powder into the guide hopper 1, dust may be generated. At this time, since the dust removal port flanges 101 on both sides of the guide hopper 1 are connected to the dust suction pipe 2, the dust suction pipe 2 will generate suction under the action of the dust removal system, sucking away the dust in the guide hopper 1 and conveying it to the dust removal system for processing. The connecting pipe 13 at the bottom of the guide hopper 1 allows external airflow to enter the interior of the guide hopper 1. Under the action of the uniform air plate 103, the airflow flows evenly in the guide hopper 1, further assisting the dust suction pipe 2 in collecting dust, ensuring that dust does not accumulate in the guide hopper 1, thereby maintaining a clean environment in the guide hopper 1 and ensuring the smooth progress of the molybdenum powder filling process. At the same time, the dust cover 6 prevents the dust in the guide hopper 1 from leaking upwards into the surrounding environment.

Claims

1. A device for filling molybdenum target material powder, comprising a material guide hopper (1); characterized in that: It also includes a suction pipe (2), a dust cover (6) and a connecting pipe (13); the external of the guide hopper (1) is connected to a suction pipe (2) for collecting dust and transporting it to the dust removal system for processing; the external of the guide hopper (1) is covered with a dust cover (6) to prevent dust in the guide hopper (1) from leaking upward; the bottom of the guide hopper (1) is connected to a connecting pipe (13) for the airflow to flow evenly in the guide hopper (1); two sets of lifting lugs (102) are symmetrically installed on both sides of the external of the guide hopper (1); a uniform air plate (103) is embedded in the lower part of the guide hopper (1); the uniform air plate (103) is welded to the guide hopper (1); and two sets of dust removal hole flanges (101) are symmetrically opened on both sides of the external of the guide hopper (1).

2. The apparatus for filling of molybdenum target material powder according to claim 1, characterized in that: The top of the feed hopper (1) is fitted with a pressure strip (4), and the end of the feed hopper (1) away from the dust suction pipe (2) is fitted with a sealing cover (3) located on the dust removal port flange (101).

3. The apparatus for filling molybdenum target material powder according to claim 1, wherein: The guide hopper (1) is fitted with a sealing ring (12) on the outside, and an upper sealing strip (7) and a lower sealing strip (8) are fitted on the lower part of the outside of the guide hopper (1).

4. The apparatus for filling molybdenum target material powder according to claim 1, wherein: Two sets of locking handles (9) are symmetrically installed on the outside of the upper sealing strip (7), and two sets of hanging plates (11) are symmetrically installed on the outside of the guide hopper (1) above the upper sealing strip (7).

5. The apparatus for filling of molybdenum target material powder according to claim 4, characterized in that: Both sets of suspension plates (11) have a support plate (10) installed at the top. A triangular hole is opened through the center of the outer side of the support plate (10).

6. The apparatus for filling of molybdenum target material powder according to claim 5, characterized in that: A connecting ring (201) is fitted at one end of the suction pipe (2), and the inner wall of the suction pipe (2) is coated with polytetrafluoroethylene.

7. The apparatus for filling of molybdenum target material powder according to claim 1, wherein: The upper part of the guide hopper (1) is equipped with a dustproof rubber plate (5), and the bottom of the connecting pipe (13) is provided with an air inlet. The dust cover (6) and the guide hopper (1) can slide up and down relative to each other.

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