A super silicon core pitch reduction furnace with distributed temperature sensing system

Abstract

This application discloses an ultra-large silicon core spacing reduction furnace with a distributed temperature sensing system, belonging to the field of reduction furnaces for polycrystalline silicon production. It includes a furnace body, a nozzle, polycrystalline silicon rods, a feed pipe, a discharge pipe, a rotation adjustment mechanism, a mounting plate, a displacement adjustment mechanism, and thermocouple sensors. The mounting plate is fixedly connected to the inner wall of the furnace body. The rotation adjustment mechanism includes a driven cylinder and a drive shaft, both rotatably connected to the mounting plate. A driven bevel gear is fixedly connected to the outer wall of the driven cylinder, and a drive bevel gear is fixedly connected to the outer wall of the drive shaft. The drive bevel gear and the driven bevel gear mesh. This invention, by setting the rotation adjustment mechanism and the displacement adjustment mechanism to cooperate, can achieve position adjustment of the thermocouple sensors, enabling measurement in multiple areas within the ultra-large reduction furnace without increasing the number of sensors.

Description

Technical Field

[0001] This application relates to the field of reduction furnaces for polysilicon production, and more particularly to a reduction furnace with an ultra-large silicon core spacing and a distributed temperature sensing system. Background Technology

[0002] Currently, the polysilicon reduction furnace is the core equipment in polysilicon production that produces the final product, and it is also a key link that determines the system's capacity and energy consumption. Therefore, the design and manufacture of the polysilicon reduction furnace directly affect the product's quality, yield, and production cost.

[0003] Existing patent CN101993080B discloses a polycrystalline silicon reduction furnace, including a furnace hood, a chassis, polycrystalline silicon rods, a feed pipe, and nozzles. The furnace hood is mounted on the chassis, and at least one set of polycrystalline silicon rods is mounted on the chassis. The chassis also has three or more nozzles connected to the feed pipe at the bottom of the chassis. This invention solves the problem of uneven and incomplete silicon rod deposition, resulting in low yield, in existing polycrystalline silicon reduction furnaces that use a single-pipe spraying method. Its structure is simple, and it significantly improves both the reduction speed and absorption rate.

[0004] While existing polycrystalline silicon reduction furnaces have the advantage of improving reduction speed and absorption rate, the applicant has found that existing temperature sensors are generally fixed. In ultra-large reduction furnaces, unless multiple sets of sensors are set up for measurement, measurement blind spots are likely to exist, making it difficult to perceive the temperature distribution under multi-physical field coupling in real time. Setting up multiple sets of sensors will lead to a significant increase in cost. Based on this, we propose an improvement to the ultra-large silicon core spacing reduction furnace with a distributed temperature sensing system. Summary of the Invention

[0005] The purpose of this application is to provide an ultra-large silicon core spacing reduction furnace with a distributed temperature sensing system that can sense the temperature distribution under multi-physics coupling in real time.

[0006] To achieve the above objectives, the technical solution adopted in this application is as follows: including a furnace body, a nozzle, a polycrystalline silicon rod, a feed pipe, a discharge pipe, a rotation adjustment mechanism, a mounting plate, a displacement adjustment mechanism, and a thermocouple sensor. The mounting plate is fixedly connected to the inner wall of the furnace body. The rotation adjustment mechanism includes a driven cylinder and a drive shaft. Both the driven cylinder and the drive shaft are rotatably connected to the mounting plate. A driven bevel gear is fixedly connected to the outer wall of the driven cylinder. A drive bevel gear is fixedly connected to the outer wall of the drive shaft. The drive bevel gear and the driven bevel gear mesh. The lower end of the driven cylinder penetrates the body of the mounting plate and a mounting plate is fixedly connected to its outer wall. A mounting arm is fixedly connected to the outer wall of the mounting plate.

[0007] The displacement adjustment mechanism includes a guide frame and an adjustment motor. The guide frame is fixedly connected to the lower end of the mounting arm. A lead screw is rotatably connected inside the guide frame. A slider is threaded onto the outer wall of the lead screw. A thermocouple sensor is fixedly connected to the lower end face of the slider. An adjustment shaft is fixedly connected to the output end of the adjustment motor. The lower end of the adjustment shaft passes through the driven cylinder and is fixedly connected to a second bevel gear. One end of the lead screw passes through the guide frame and is fixedly connected to a first bevel gear. The first bevel gear and the second bevel gear are meshed.

[0008] As a preferred embodiment, both the nozzle and the polycrystalline silicon rod are fixedly mounted on the bottom plate of the furnace body, the feed pipe is fixedly connected to the feed inlet of the nozzle, and the discharge pipe is fixedly connected to the discharge outlet of the nozzle.

[0009] As a preferred embodiment, a drive motor is fixedly connected to one side of the outer wall of the furnace body, and the output end of the drive motor is fixedly connected to one end of the drive shaft.

[0010] As a preferred embodiment, a mounting bracket is fixedly connected to the outer wall of the regulating motor, and the mounting bracket is fixedly connected to the outer wall of the driven cylinder.

[0011] As a preferred embodiment, there are multiple mounting arms, and the number of guide frames is the same as the number of mounting arms. The multiple guide frames are arranged in a circular array.

[0012] As a preferred embodiment, the lower end face of the guide frame is provided with a sliding groove, and the outer wall of the slider is slidably fitted against the inner wall of the sliding groove.

[0013] As a preferred embodiment, both the drive motor and the regulating motor are located outside the furnace body, and the upper end of the driven cylinder penetrates through the top cover of the furnace body.

[0014] As a preferred embodiment, the driven cylinder is rotatably connected to the top cover of the furnace body, and the adjusting shaft is rotatably connected inside the driven cylinder.

[0015] Compared with the prior art, the beneficial effects of this application are as follows:

[0016] (1) By setting up a rotation adjustment mechanism, the drive motor drives the drive shaft to rotate, and then the driven bevel gear and the driven bevel gear mesh with each other to drive the driven cylinder to rotate, and then the mounting plate drives the mounting arm to rotate, thereby driving the guide to rotate, and finally driving the thermocouple sensor to rotate, realizing the rotation position adjustment of the thermocouple sensor. Compared with the fixed sensor, it can realize the temperature measurement of multiple different areas in the furnace without adding multiple sets of sensors, reducing the measurement blind zone;

[0017] (2) The displacement adjustment mechanism, which is set in conjunction with the rotation adjustment mechanism, can drive the adjustment shaft to rotate by the adjustment motor after the thermocouple sensor rotates to a specified angle, thereby driving the second bevel gear to rotate, which in turn drives the first bevel gear to rotate, and then drives the lead screw to rotate, thereby controlling the slider fixedly connected to the thermocouple sensor to move horizontally, thereby further improving the measurement range of the thermocouple sensor, further reducing the measurement blind zone, and improving the practicality of the equipment. Attached Figure Description

[0018] Figure 1 This is an internal structural diagram of a reduction furnace with an ultra-large silicon core spacing and a distributed temperature sensing system.

[0019] Figure 2 This is a diagram of the rotary adjustment mechanism of a reduction furnace with an ultra-large silicon core spacing and a distributed temperature sensing system.

[0020] Figure 3 This is a diagram of the displacement adjustment mechanism of a reduction furnace with an ultra-large silicon core spacing and a distributed temperature sensing system.

[0021] Figure 4 This is a structural diagram of one side of the mounting plate of a reduction furnace with an ultra-large silicon core spacing and a distributed temperature sensing system.

[0022] In the diagram: 1. Furnace body; 2. Nozzle; 3. Polycrystalline silicon rod; 4. Feed pipe; 5. Discharge pipe; 6. Rotation adjustment mechanism; 61. Driven cylinder; 62. Drive shaft; 63. Drive bevel gear; 64. Driven bevel gear; 65. Mounting plate; 66. Mounting arm; 67. Drive motor; 7. Mounting plate; 8. Displacement adjustment mechanism; 81. Guide frame; 82. Lead screw; 83. Slider; 84. Bevel gear one; 85. Adjustment shaft; 86. Mounting frame; 87. Adjustment motor; 88. Bevel gear two; 9. Thermocouple sensor. Detailed Implementation

[0023] The present application will be further described below with reference to specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0024] In the description of this application, it should be noted that the directional terms such as "center", "lateral", "longitudinal", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation and positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. They should not be construed as limiting the specific protection scope of this application.

[0025] It should be noted that the terms "first," "second," etc., in the specification and claims of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence.

[0026] The terms “comprising” and “having”, and any variations thereof, in the specification and claims of this application are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0027] like Figure 1-4 The diagram illustrates an ultra-large silicon core spacing reduction furnace with a distributed temperature sensing system. It includes a furnace body 1, a nozzle 2, polycrystalline silicon rods 3, a feed pipe 4, a discharge pipe 5, a rotation adjustment mechanism 6, a mounting plate 7, a displacement adjustment mechanism 8, and thermocouple sensors 9. The mounting plate 7 is fixedly connected to the inner wall of the furnace body 1. The rotation adjustment mechanism 6 includes a driven cylinder 61 and a drive shaft 62. The driven cylinder 61 is rotatably connected to the top cover of the furnace body 1. Both the driven cylinder 61 and the drive shaft 62 are rotatably connected to the mounting plate 7. A driven bevel gear 64 is fixedly connected to the outer wall of the moving cylinder 61, and a driving bevel gear 63 is fixedly connected to the outer wall of the drive shaft 62. The driving bevel gear 63 and the driven bevel gear 64 mesh. Using this meshing relationship, the drive shaft 62 can drive the driven cylinder 61 to rotate. The lower end of the driven cylinder 61 passes through the body of the mounting plate 7 and a mounting disc 65 is fixedly connected to its outer wall. A mounting arm 66 is fixedly connected to the outer wall of the mounting disc 65. The mounting arm 66 is fixedly connected to the outer wall of the guide frame 81 by high-strength bolts.

[0028] The displacement adjustment mechanism 8 includes a guide frame 81 and an adjustment motor 87. The guide frame 81 is fixedly connected to the lower end of the mounting arm 66. Multiple mounting arms 66 are provided, and the number of guide frames 81 is the same as the number of mounting arms 66, arranged in a circular array. A lead screw 82 is rotatably connected inside the guide frame 81, and a slider 83 is threaded onto the outer wall of the lead screw 82. A thermocouple sensor 9 is fixedly connected to the lower end face of the slider 83. A groove is formed on the lower end face of the guide frame 81, and the outer wall of the slider 83 slides against the inner wall of the groove, so that... When the lead screw 82 rotates to control the movement of the slider 83, the slider 83 can move smoothly in the groove. The output end of the adjusting motor 87 is fixedly connected to the adjusting shaft 85. The lower end of the adjusting shaft 85 passes through the driven cylinder 61 and is fixedly connected to the second bevel gear 88. One end of the lead screw 82 passes through the guide frame 81 and is fixedly connected to the first bevel gear 84. The first bevel gear 84 and the second bevel gear 88 are meshed. Using this meshing relationship, when the adjusting motor 87 drives the adjusting shaft 85 to rotate, it can drive the lead screw 82 to rotate, thereby controlling the movement of the slider 83.

[0029] Both the nozzle 2 and the polycrystalline silicon rod 3 are fixedly installed on the bottom plate of the furnace body 1. The feed pipe 4 is fixedly connected to the feed port of the nozzle 2, and the discharge pipe 5 is fixedly connected to the discharge port of the nozzle 2. A drive motor 67 is fixedly connected to one side of the outer wall of the furnace body 1. The output end of the drive motor 67 is fixedly connected to one end of the drive shaft 62. The drive motor 67 drives the drive shaft 62 to rotate, which in turn drives the drive bevel gear 63 to rotate, which in turn drives the driven bevel gear 64 to rotate, which in turn drives the driven cylinder 61 to rotate. The rotation adjustment angle range of the driven cylinder 61 is -180° to 180°.

[0030] A mounting bracket 86 is fixedly connected to the outer wall of the adjusting motor 87. The mounting bracket 86 is fixedly connected to the outer wall of the driven cylinder 61. The adjusting shaft 85 is rotatably connected inside the driven cylinder 61. The adjusting motor 87 drives the adjusting shaft 85 to rotate, which in turn drives the second bevel gear 88 to rotate, which in turn drives the first bevel gear 84 to rotate, which in turn drives the lead screw 82 to rotate and control the slider 83 to move, thereby controlling the movement of the thermocouple sensor 9.

[0031] Both the drive motor 67 and the regulating motor 87 are located outside the furnace body 1. The upper end of the driven cylinder 61 passes through the top cover of the furnace body 1. By placing the drive motor 67 and the regulating motor 87 outside the furnace body 1, the high temperature environment can be avoided from affecting the operation of the motors.

[0032] Working principle: The drive motor 67 drives the drive shaft 62 to rotate, which in turn drives the drive bevel gear 63 to rotate, which in turn drives the driven bevel gear 64 to rotate. This drives the mounting plate 65 to rotate via the driven cylinder 61, which in turn drives the guide bracket 81 to rotate under the mounting arm 66. This, in turn, drives the thermocouple sensor 9 to rotate to a specified angle for measurement. It can also work in conjunction with the adjustment motor 87 to drive the adjustment shaft 85 to rotate, which drives the second bevel gear 88 to rotate, which in turn drives the first bevel gear 84 to rotate, which in turn drives the lead screw 82 to rotate to control the movement of the slider 83. This, in turn, drives the thermocouple sensor 9 to move horizontally to measure the temperature in different areas, further reducing the blind zone.

[0033] The basic principles, main features, and advantages of this application have been described above. Those skilled in the art should understand that this application is not limited to the above embodiments. The embodiments and descriptions in the specification are merely the principles of this application. Various changes and modifications can be made to this application without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection claimed by this application is defined by the appended claims and their equivalents.

Claims

1. A large silicon core spacing reduction furnace with a distributed temperature sensing system, comprising a furnace body (1), a nozzle (2), a polycrystalline silicon rod (3), a feed pipe (4), a discharge pipe (5), a rotation adjustment mechanism (6), a mounting plate (7), a displacement adjustment mechanism (8), and a thermocouple sensor (9), characterized in that: An installation plate (7) is fixedly connected to the inner wall of the furnace body (1). The rotary adjustment mechanism (6) includes a driven cylinder (61) and a drive shaft (62). The driven cylinder (61) and the drive shaft (62) are rotatably connected to the installation plate (7). A driven bevel gear (64) is fixedly connected to the outer wall of the driven cylinder (61). A drive bevel gear (63) is fixedly connected to the outer wall of the drive shaft (62). The drive bevel gear (63) and the driven bevel gear (64) mesh. The lower end of the driven cylinder (61) penetrates the plate body of the installation plate (7) and an installation disc (65) is fixedly connected to its outer wall. An installation arm (66) is fixedly connected to the outer wall of the installation disc (65). The displacement adjustment mechanism (8) includes a guide frame (81) and an adjustment motor (87). The guide frame (81) is fixedly connected to the lower end of the mounting arm (66). A lead screw (82) is rotatably connected inside the guide frame (81). A slider (83) is threadedly connected to the outer wall of the lead screw (82). The thermocouple sensor (9) is fixedly connected to the lower end face of the slider (83). An adjustment shaft (85) is fixedly connected to the output end of the adjustment motor (87). The lower end of the adjustment shaft (85) passes through the driven cylinder (61) and is fixedly connected to a bevel gear (88). One end of the lead screw (82) passes through the guide frame (81) and is fixedly connected to a bevel gear (84). The bevel gear (84) meshes with the bevel gear (88).

2. A super silicon chip pitch reduction furnace with distributed temperature sensing system as claimed in claim 1, wherein: The nozzle (2) and the polycrystalline silicon rod (3) are both fixedly installed on the bottom plate of the furnace body (1). The feed pipe (4) is fixedly connected to the feed port of the nozzle (2), and the discharge pipe (5) is fixedly connected to the discharge port of the nozzle (2).

3. A super silicon chip pitch reduction furnace with distributed temperature sensing system as claimed in claim 1, wherein: A drive motor (67) is fixedly connected to one side of the outer wall of the furnace body (1), and the output end of the drive motor (67) is fixedly connected to one end of the drive shaft (62).

4. A super silicon chip pitch reduction furnace with distributed temperature sensing system as claimed in claim 1, wherein: A mounting bracket (86) is fixedly connected to the outer wall of the regulating motor (87), and the mounting bracket (86) is fixedly connected to the outer wall of the driven cylinder (61).

5. A super silicon chip pitch reduction furnace with distributed temperature sensing system as claimed in claim 1, wherein: Multiple mounting arms (66) are provided, and the number of guide frames (81) is the same as that of mounting arms (66), and the multiple guide frames (81) are arranged in a circular array.

6. A super silicon chip pitch reduction furnace with distributed temperature sensing system as claimed in claim 1, wherein: The lower end face of the guide (81) is provided with a sliding groove, and the outer wall of the slider (83) is slidably attached to the inner wall of the sliding groove.

7. A super silicon chip pitch reduction furnace with distributed temperature sensing system as claimed in claim 3, wherein: Both the drive motor (67) and the regulating motor (87) are located outside the furnace body (1), and the upper end of the driven cylinder (61) is installed through the top cover of the furnace body (1).

8. A super silicon chip pitch reduction furnace with distributed temperature sensing system as claimed in claim 1, wherein: The driven cylinder (61) is rotatably connected to the top cover of the furnace body (1), and the adjusting shaft (85) is rotatably connected inside the driven cylinder (61).

Images