Mask assembly
By designing a combined structure of support frame and rods, and combining welding and reverse correction techniques, the problem of mask component deformation was solved, achieving accurate pattern positioning and uniform deposition, thus improving the manufacturing precision and quality of the display device.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SAMSUNG DISPLAY CO LTD
- Filing Date
- 2025-06-24
- Publication Date
- 2026-07-31
AI Technical Summary
Existing mask components are prone to deformation during manufacturing, resulting in uneven pattern deposition and affecting the manufacturing accuracy and margin of the display device.
A mask assembly was designed, comprising a combination structure of a support frame, vertical rods, and horizontal auxiliary rods. Through welding and reverse correction techniques, deformation of the rods is prevented, ensuring accurate positioning and deposition precision of the pattern.
It effectively reduces the deformation of the mask assembly, increases manufacturing margin, ensures the accuracy of the deposition process and the uniformity of the pattern, and improves the quality of the display device.
Smart Images

Figure CN224578321U_ABST
Abstract
Description
Technical Field
[0001] The embodiments relate to mask assemblies, and more specifically, to mask assemblies used in the manufacture of display devices. Background Technology
[0002] Various types of electronic devices are manufactured and sold, and various types of portable electronic devices, such as telephones, tablet computers, and laptop computers, are being developed. Electronic devices include light-emitting display panels that display images.
[0003] Masks can be used for deposition in the manufacture of display devices. For example, in a deposition process, a mask can be used to form a light-emitting layer on a substrate. A light-emitting layer can be formed by aligning a substrate on which the light-emitting layer is to be formed with a mask on which a predetermined pattern is formed, providing the substrate with a deposition object such as the light-emitting layer, and depositing a pattern of the desired shape on the substrate. Recently, masks containing multiple patterns have been used to deposit patterns of the desired shape using a single mask. Utility Model Content
[0004] The embodiments provide a mask assembly capable of reducing or minimizing deformation in a mask pattern arrangement structure. The embodiments also provide a mask assembly capable of improving manufacturing margins.
[0005] However, the embodiments are not limited to those set forth herein. The above and other embodiments will become more apparent to those skilled in the art to which this disclosure pertains from the detailed description of the present disclosure given below.
[0006] A mask assembly according to one embodiment includes: a support frame; at least two vertical rods located on the support frame and extending in a first direction; at least two first horizontal auxiliary rods located on the support frame and contacting at least one side of the support frame, extending in a second direction perpendicular to the first direction, and intersecting the at least two vertical rods in a plan view; and at least two second horizontal auxiliary rods located on the support frame and contacting at least one side of the support frame, extending in the second direction, and intersecting the at least two vertical rods in a plan view, wherein the at least two first horizontal auxiliary rods and the at least two second horizontal auxiliary rods contact different sides of the support frame.
[0007] The support frame may include a first zone and a second zone spaced apart from each other along a boundary extending in a first direction, wherein at least two first horizontal auxiliary rods may extend in the first zone in a second direction, and at least two second horizontal auxiliary rods may be positioned in the second zone displaced from the at least two horizontal auxiliary rods along the first direction.
[0008] The first region may include at least one first mask pattern defined by at least two vertical rods and at least two first horizontal auxiliary rods, and the second region may include at least one second mask pattern defined by at least two vertical rods and at least two second horizontal auxiliary rods.
[0009] At least two first horizontal auxiliary rods and at least two second horizontal auxiliary rods may intersect with different vertical rods in the plan view.
[0010] At least two first-level auxiliary rods and at least two second-level auxiliary rods can be separated from each other.
[0011] The end portions of at least two first horizontal auxiliary rods and the end portions of at least two second horizontal auxiliary rods can be welded to different vertical rods.
[0012] The end portions of at least two first horizontal auxiliary rods and the end portions of at least two second horizontal auxiliary rods may be welded to the same vertical rod.
[0013] At least one of the two vertical bars may include an inwardly recessed portion.
[0014] The mask assembly may further include at least one horizontal bar that extends in a second direction and connects two opposite sides of the support frame.
[0015] The mask assembly may include a first region comprising a first mask pattern defined by at least two vertical rods and at least two first horizontal auxiliary rods adjacent to each other and at least one horizontal rod.
[0016] The mask assembly may include a second region comprising a second mask pattern defined by at least two vertical rods and at least two second horizontal auxiliary rods adjacent to each other, and at least one of at least one horizontal rod.
[0017] According to embodiments, deformation in the unit arrangement structure of a mask assembly can be reduced. For example, deformation of the mask assembly in a pattern arrangement structure can be prevented to improve the margin of the mask assembly. For example, in a mask assembly including different mask patterns, deformation of the inner side of the mask assembly can be prevented according to the arrangement of different mask patterns.
[0018] Accordingly, in the case where the mask frame intrudes into the active area forming the display area, accurate patterns can be formed by preventing uneven deposition that occurs during the deposition process. Attached Figure Description
[0019] Figure 1 A schematic exploded perspective view of the display device.
[0020] Figure 2 and Figure 3 These are schematic perspective views and exploded perspective views of a mask assembly according to one embodiment.
[0021] Figure 4 and Figure 5 These are schematic plan views illustrating mask assemblies according to other embodiments.
[0022] Figure 6 A schematic plan view for explaining the reverse correction in a mask assembly according to one embodiment.
[0023] Figures 7 to 11 These are schematic plan views illustrating mask assemblies according to other embodiments.
[0024] Figure 12 The diagram illustrates a deposition apparatus with a mask assembly according to one embodiment.
[0025] Figure 13 A schematic cross-sectional view illustrating the stacked structure of the display panels is shown.
[0026] Figure 14 This is a block diagram of an electronic device.
[0027] Figure 15 Here is a schematic perspective view illustrating an application example of an electronic device. Detailed Implementation
[0028] In the following description, numerous specific details are set forth for purposes of explanation in order to provide a thorough understanding of various embodiments or implementations of the present invention. As used herein, “embodiment” and “implementation” are interchangeable terms and are non-limiting examples of the apparatus or methods disclosed herein. However, it will be apparent that various embodiments may be practiced without these specific details or with one or more equivalent arrangements. Herein, the various embodiments are not necessarily exclusive nor do they limit the disclosure. For example, a particular shape, configuration, and feature of one embodiment may be used or implemented in another embodiment.
[0029] Unless otherwise indicated, the illustrated embodiments should be understood as providing features of the present invention. Therefore, unless otherwise indicated, features, components, modules, layers, films, panels, areas and / or aspects of the various embodiments (hereinafter individually or collectively referred to as “elements”) may be combined, separated, interchanged and / or rearranged in other ways without departing from the scope of the present invention.
[0030] The use of crosshairs and / or shading in the accompanying drawings is generally provided to clarify the boundaries between adjacent elements. Therefore, unless otherwise specified, the presence or absence of crosshairs or shading does not convey or indicate any preference or requirement for particular materials, material properties, dimensions, proportions, commonalities between illustrative elements, and / or any other characteristics, properties, or properties of the elements. Furthermore, in the accompanying drawings, the dimensions and relative dimensions of elements may be enlarged for clarity and / or descriptive purposes. When embodiments can be implemented differently, a particular sequence of processes may be performed differently than the sequence described. For example, two consecutively described processes may be performed substantially simultaneously, or may be performed in the reverse order of description. Moreover, the same reference numerals denote the same elements.
[0031] When an element or layer is referred to as being "on" another element or layer, "connected to," or "attached to" another element or layer, it may be directly on, connected to, or attached to the other element or layer, or an intermediary element or layer may be present. However, when an element or layer is referred to as being "directly on" another element or layer, "directly connected to," or "directly attached to" another element or layer, no intermediary element or layer is present. For this purpose, the term "connection" may refer to a physical, electrical, and / or fluid connection, regardless of the presence or absence of an intermediary element. Furthermore, the axis of the first direction DR1, the axis of the second direction DR2, and the axis of the third direction DR3 are not limited to the three axes of a Cartesian coordinate system, such as the X-axis, Y-axis, and Z-axis, and may be interpreted in a broader sense. For example, the axis of the first direction DR1, the axis of the second direction DR2, and the axis of the third direction DR3 may be perpendicular to each other, or may represent different directions that are not perpendicular to each other. For the purposes of this disclosure, "at least one of A and B" may be understood to mean only A, only B, or any combination of A and B. Furthermore, “at least one of X, Y and Z” and “at least one of the groups consisting of X, Y and Z” can be interpreted as only X, only Y, only Z, or any combination of two or more of X, Y or Z. As used herein, the term “and / or” includes any and all combinations of one or more of the associated enumerated items.
[0032] Although the terms “first,” “second,” etc., may be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another. Therefore, the first element discussed below may be referred to as the second element without departing from the teachings of this disclosure.
[0033] Spatial relative terms, such as “below,” “under,” “below,” “down,” “above,” “above,” “higher,” and “side” (e.g., as in “sidewall”), are used herein for descriptive purposes and thereby to describe the relationship between one element and another, as illustrated in the accompanying drawings. In addition to the orientations depicted in the drawings, spatial relative terms are intended to cover different orientations of the device in use, operation, and / or manufacture. For example, if the device in the drawings were flipped, an element described as “below” or “below” other elements or features would be oriented “above” other elements or features. Thus, the term “below” can encompass both above and below orientations. Furthermore, the device may be oriented in other ways (e.g., rotated 90 degrees or otherwise), and for this reason, the spatial relative descriptors used herein should be interpreted accordingly.
[0034] The terminology used herein is for the purpose of describing particular embodiments and is not intended to be limiting. As used herein, the singular forms “a / an” and “described” are intended to include the plural forms as well, unless the context clearly indicates otherwise. Furthermore, the term “comprises / comprising / includes / including,” when used in this specification, indicates the presence of described features, integers, steps, operations, elements, components, and / or groups thereof, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. It should also be noted that, as used herein, the terms “substantially,” “about,” and other similar terms are used as approximate terms rather than terms of degree, precisely to account for inherent biases in the measurement, calculation, and / or provided values that will be recognized by those skilled in the art.
[0035] Various embodiments are described herein with reference to illustrative cross-sectional and / or exploded views as examples and / or intermediate structures. Therefore, variations in the illustrated shapes are expected due to manufacturing techniques and / or tolerances. Consequently, the embodiments disclosed herein should not be construed as limited to the illustrated shapes of specific areas, but rather include shape deviations due to factors such as manufacturing processes. In this way, the areas illustrated in the figures may be schematic in nature, and the shapes of these areas may not reflect the actual shapes of the areas of the device; therefore, they are not intended to be limiting.
[0036] Figure 1 A schematic exploded perspective view of the display device.
[0037] refer to Figure 1The display device 1 can display an image toward a third direction DR3 that intersects the plane defined by the first direction DR1 and the second direction DR2. The front (or upper) and rear (or lower) surfaces of each component can be separated by the third direction DR3. The directions indicated by the first direction DR1, the second direction DR2 and the third direction DR3 are relative concepts and can be converted to other directions.
[0038] Display device 1 can display moving or still images. Display device 1 can be used as a display screen for various products such as mobile phones, smartphones, tablet PCs, mobile communication terminals, electronic notebooks, e-books, portable multimedia players (PMPs), navigation systems, ultra-mobile personal computers (UMPCs), and other portable electronic devices such as televisions, laptops, monitors, billboards, and Internet of Things (IoT) devices. For example, display device 1 according to one embodiment can be used in wearable devices such as smartwatches, watch phones, glasses-type displays, and head-mounted displays (HMDs). For example, display device 1 according to one embodiment can be used as a car dashboard, a central information display (CID) located in the car's center console or dashboard, an interior rearview mirror display replacing the car's side mirrors, and a display located behind the front seats for rear-seat passenger entertainment. For ease of explanation, Figure 1 A display device 1 is shown, which is used as a smartphone.
[0039] The display device 1 may include a cover window WU, a display panel DP, a component 70, and a housing component HM.
[0040] A cover window (WU) can be installed on the display panel (DP) to protect it from external impacts, etc. The cover window (WU) may include a transmissive area (TA) and a blocking area (BA). The transmissive area (TA) may be optically transparent and may transmit incident light. The blocking area (BA) may have relatively low light transmittance compared to the transmissive area (TA). The blocking area (BA) may define the shape of the transmissive area (TA). The blocking area (BA) may surround the transmissive area (TA). The blocking area (BA) may overlap with the peripheral area (PA) of the display panel (DP) to prevent the peripheral area (PA) from being seen from the outside.
[0041] The cover window WU may include an aperture region HA. The aperture region HA may overlap with component 70, which will be described later. Component 70 can be operated by receiving an external signal provided through the aperture region HA. The aperture region HA may be located in the transmission region TA. The aperture region HA may have a circular shape in a plane, and its size or shape may be modified in various ways. The position and number of aperture regions HA may be changed in various ways.
[0042] The display panel DP can be a flat, rigid display panel or a flexible display panel. The display panel DP can be an emissive display panel. For example, the display panel DP can be an organic light-emitting display panel or a quantum dot light-emitting display panel. The light-emitting layer of an organic light-emitting display panel may include organic light-emitting materials. The emissive layer of a quantum dot light-emitting display panel may include quantum dots, quantum rods, etc. Hereinafter, the display panel DP will be described as an organic light-emitting display panel.
[0043] The display panel DP may include a display area DA and a peripheral area PA. The display area DA may be the area in which an image is displayed and may correspond to a screen. The peripheral area PA may be the area in which no image is displayed and may surround at least a portion of the display area DA. The display area DA may have an approximately rectangular shape in a plane. The display area DA may have various shapes, such as triangular, pentagonal or hexagonal, circular, elliptical, or irregular shapes. The corners of the edge portions of the display area DA may have an arc shape.
[0044] The display area DA may include arranged pixels PX, and an image can be displayed by combining the pixels PX. The pixels PX may be arranged along a first direction DR1 and a second direction DR2 in a manner such as stripes. Various arrangements, such as mosaic arrangements, can be used to display images. The display panel DP may include pixel circuitry and signal lines for driving pixels PX. The display panel DP may be a light-emitting display panel including light-emitting devices, and each light-emitting device may constitute a pixel PX. The display panel DP may be a touch panel including a touch sensor layer capable of detecting touch.
[0045] The display panel DP may include an opening area OA that penetrates the display panel DP. The opening area OA may overlap with the hole area HA of the cover window WU. The opening area OA may be located within the display area DA. The opening area OA may be located at the upper center of the display area DA. The opening area OA can be located in various ways within the display area DA, such as in the upper left or upper right of the display area DA. The opening area OA may have a circular shape on a plane, and its size or shape may be modified in various ways. The position and number of opening areas OA can be changed in various ways.
[0046] Some pixels PX in the display area DA can be arranged to surround the opening area OA. Accordingly, the image can also be displayed in the area adjacent to the opening area OA.
[0047] The peripheral area PA may extend from the display area DA and includes signal lines and pad portions. A data driver 50 may be located within the peripheral area PA. According to one embodiment, the pad portions of the peripheral area PA may be electrically connected to a printed circuit board (PCB) including a driver chip 80.
[0048] Corresponding to the opening area OA, a component 70 for adding various functions to the display device 1 can be positioned. The component 70 can be electrically connected to the display panel DP via a connector or the like. The component 70 can be at least one of a light-emitting module, a light-sensing module, and an imaging module. For example, the component 70 may include at least one of a light-emitting module that outputs infrared light, a CMOS sensor for detecting infrared light, and a camera module for capturing images of external objects. Objects received through the aperture area HA and the opening area OA can be captured.
[0049] Component 70 may consist of a single module, may include modules, or may be arranged in various sizes and positional relationships.
[0050] The housing component HM may be disposed below the display panel DP. The housing component HM may be combined with the cover window WU to form the exterior of the display device 1. The housing component HM may include a material with relatively high rigidity. For example, the housing component HM may include at least one of a frame and a plate made of glass, plastic, and metal. The display panel DP and component 70 may be located within the interior space of the display device 1 defined by the cover window WU and the housing component HM. The display panel DP may be accommodated within the interior space and protected from external impacts.
[0051] Figure 2 and Figure 3 These are schematic perspective views and exploded schematic perspective views of a mask assembly according to one embodiment.
[0052] exist Figure 2 and Figure 3 In the process, the mask assembly 10 may include a support frame 100, a vertical rod 200, a first horizontal auxiliary rod 250, and a second horizontal auxiliary rod 260.
[0053] The support frame 100 may be a generally rectangular shape with an opening. The support frame 100 may be defined by four sides 110, 120, 130 and 140. The first side 110 may face the second side 120 and the third side 130 may face the fourth side 140.
[0054] A first groove G1 may be formed in a first side 110, and a second groove G2 may be formed in a second side 120. A third groove G3 may be formed in a third side 130, and a fourth groove G4 may be formed in a fourth side 140. The first groove G1 and the second groove G2 may be paired, while the third groove G3 and the fourth groove G4 may not be paired. According to one embodiment, the first groove G1 and the second groove G2 may be paired, and the third groove G3 and the fourth groove G4 may be paired.
[0055] The support frame 100 may be formed of a material with high rigidity and low deformation in order to secure (or attach) the vertical bar 200 and the horizontal auxiliary bars 250, 260. For example, the support frame 100 may be formed of an alloy such as Invar alloy or stainless steel.
[0056] A vertical rod 200 may be positioned in a first direction DR1 as an opening across the support frame 100 and may be fixed (or attached) to the support frame 100. The longitudinal direction (or extension direction) of the vertical rod 200 may be parallel to the first direction DR1. An end portion (e.g., an opposite end portion) of the vertical rod 200 may be inserted into a first groove G1 of the first side 110 and a second groove G2 of the second side 120. The end portions (e.g., opposite end portions) of the vertical rod 200 may be inserted into the first groove G1 and the second groove G2 and welded to the first side 110 and the second side 120. The depths of the first groove G1 and the second groove G2 may be substantially the same as the thickness of the vertical rod 200. Accordingly, the vertical rod 200 may be accommodated in the first groove G1 and the second groove G2 such that the upper surface of the vertical rod 200 and the upper surface of the support frame 100 may be substantially flat.
[0057] The first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 are positioned in the second direction DR2 as openings across the support frame 100 and are fixed (or attached) to the support frame 100 and the vertical rod 200. The first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 may have a longitudinal direction parallel to the second direction DR2. At least one end portion of the first horizontal auxiliary rod 250 can be inserted into a third groove G3 on the third side 130 of the support frame 100. At least one end portion of the second horizontal auxiliary rod 260 can be inserted into a fourth groove G4 on the fourth side 140 of the support frame 100. The depths of the third groove G3 and the fourth groove G4 may be substantially the same as the thicknesses of the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260, respectively. Accordingly, the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 may be received in the third groove G3 and the fourth groove G4, respectively, such that the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 are substantially flat with the upper surface of the support frame 100.
[0058] The vertical rod 200 can be fixed (or attached) below the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260. For example, the vertical rod 200 can be located between the support frame 100 and the horizontal auxiliary rods 250 and 260. To make the upper surfaces of the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 substantially flush with the upper surface of the support frame 100, the depths of the third groove G3 and the fourth groove G4 can be substantially equal to the sum of the thickness of the vertical rod 200 and the thicknesses of the horizontal auxiliary rods 250 and 260. The thicknesses of the vertical rod 200, the first horizontal auxiliary rod 250, and the second horizontal auxiliary rod 260 can be the same or different.
[0059] Figure 4 and Figure 5 These are schematic plan views of mask assemblies according to various embodiments. For example, Figure 4 and Figure 5These are plan views of the mask assembly 10 according to various embodiments, as viewed from a third party to DR3. Figure 4 and Figure 5 For ease of explanation, the configuration of the mask rods is omitted.
[0060] refer to Figure 4 At least two vertical rods 200 may be located on the support frame 100 and extend in the first direction DR1. For example, at least two vertical rods 200 may extend parallel to the first direction DR1 and be fixed (or attached) to a first side 110 and a second side 120 of the support frame 100.
[0061] At least two first horizontal auxiliary rods 250 may be located on the support frame 100, contacting at least one side of the support frame 100, and may extend in the second direction DR2. In the plan view, at least two first horizontal auxiliary rods 250 may intersect with the vertical rod 200. For example, at least two first horizontal auxiliary rods 250 may extend parallel to the second direction DR2 and may be fixed (or attached) to the third side 130 of the support frame 100 and the vertical rod 200.
[0062] At least two second horizontal auxiliary rods 260 may be located on the support frame 100, contacting at least one side of the support frame 100, and may extend in the second direction DR2. In the plan view, at least two second horizontal auxiliary rods 260 may intersect with the vertical rod 200. For example, at least two second horizontal auxiliary rods 260 may extend parallel to the second direction DR2 and may be fastened to the fourth side 140 of the support frame 100 and the vertical rod 200.
[0063] The first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 can contact different sides of the support frame 100. For example, the first horizontal auxiliary rod 250 can contact the third side 130 of the support frame 100, and the second horizontal auxiliary rod 260 can contact the fourth side 140 of the support frame 100.
[0064] At least one end portion of the first horizontal auxiliary rod 250 may be welded to a first welded portion 205 of the third side 130 of the support frame 100. At least one end portion of the first horizontal auxiliary rod 250 may be welded to a second welded portion 255 of the vertical rod 200. The first horizontal auxiliary rod 250 may be fixed (or attached) by welding the end portions (e.g., opposite end portions) of the first horizontal auxiliary rod 250 to the third side 130 of the support frame 100 and the vertical rod 200, respectively.
[0065] At least one end portion of the second horizontal auxiliary rod 260 may be welded to a first welded portion 205 of the fourth side 140 of the support frame 100. At least one end portion of the second horizontal auxiliary rod 260 may be welded to a third welded portion 265 of the vertical rod 200. The second horizontal auxiliary rod 260 can be fixed (or attached) by welding the end portions (e.g., opposite end portions) of the second horizontal auxiliary rod 260 to the fourth side 140 of the support frame 100 and the vertical rod 200, respectively.
[0066] The first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 can be separated from each other. The first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 can be separated from each other (e.g., physically separated). For example, the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 can be separated by welding to different vertical rods 200 (e.g., physically separated). For example, a second welded portion 255 and a third welded portion 265 can be formed at different locations on a vertical rod (or a single vertical rod) 200. Accordingly, the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 can be separated (e.g., physically separated). Accordingly, during the formation of the mask assembly 10, the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 can expand and interfere with each other, thereby preventing deformation of the rods 200, 250, and 260.
[0067] In one embodiment, the support frame 100 may include a first zone I and a second zone II that are divided from each other along a boundary extending in a first direction DR1.
[0068] In one embodiment, in a plan view, the vertical rod 200 and the first horizontal auxiliary rod 250 may intersect each other. For example, in a plan view, the vertical rod 200 and the first horizontal auxiliary rod 250 may intersect while in contact with each other. The vertical rod 200 and the first horizontal auxiliary rod 250 may be disposed on the support frame 100 and intersect each other to form a first region I including a first mask pattern 300. For example, the first mask pattern 300 may be defined by dividing an opening in the support frame 100 with the intersecting vertical rods 200 and the first horizontal auxiliary rod 250. The first region I may be defined as the region forming at least one first mask pattern 300. Figure 4 Three first mask patterns 300 are shown arranged in a vertical direction (e.g., first direction DR1).
[0069] In one embodiment, in a plan view, the vertical rod 200 and the second horizontal auxiliary rod 260 may intersect each other. The vertical rod 200 and the second horizontal auxiliary rod 260 may be disposed on the support frame 100, while intersecting each other to form a second region II including the second mask pattern 400. For example, the second mask pattern 400 may be defined by dividing an opening in the support frame 100 with the intersecting vertical rod 200 and the second horizontal auxiliary rod 260. The second region II may be defined as the region forming at least one second mask pattern 400. Figure 4 Four second mask patterns 400 are shown arranged in a 2×2 matrix.
[0070] In one embodiment, the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 may be positioned offset (or displaced) from each other along a first direction DR1. For example, the first horizontal auxiliary rod 250 may be positioned offset (or displaced) from the second horizontal auxiliary rod 260 along the first direction DR1 in a first region I. For example, the second horizontal auxiliary rod 260 may be positioned offset (or displaced) from the first horizontal auxiliary rod 250 along the first direction DR1 in a second region II.
[0071] In one embodiment, in a plan view, the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 may intersect with different vertical rods 200. For example, in a plan view, the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 may each contact and intersect with vertical rods 200 disposed in different areas of the support frame 100. Accordingly, the first area I and the second area II may be defined in different areas of the support frame 100, and the areas forming the first mask pattern 300 and the second mask pattern 400 may be distinguished (different).
[0072] The first mask pattern 300 and the second mask pattern 400 may each correspond to a display panel (or a single display panel). The first mask pattern 300 may be formed to correspond to the shape of the display panel by means of a vertical rod 200 and a first horizontal auxiliary rod 250. For example, the first mask pattern 300 and the second mask pattern 400 may have a rectangular shape.
[0073] The first mask pattern 300 and the second mask pattern 400 may have different shapes. For example, the first mask pattern 300 and the second mask pattern 400 may have rectangular shapes and different areas. Accordingly, mask patterns of various shapes can be formed in a mask assembly 10.
[0074] The arrangement direction of the first mask pattern 300 may differ from that of the second mask pattern 400. The direction parallel to the long side of the first mask pattern 300 may differ from the direction parallel to the long side of the second mask pattern 400. The long side of the first mask pattern 300 may be parallel to the second direction DR2. The long side of the second mask pattern 400 may be parallel to the first direction DR1. For example, the long sides of the first mask pattern 300 and the second mask pattern 400 may be arranged in directions perpendicular to each other.
[0075] The arrangement shape of the first mask pattern 300 in the first region I and the arrangement shape of the second mask pattern 400 in the second region II may differ from each other. For example, in the first region I, the first mask pattern 300 may be arranged so that they do not overlap in the vertical direction (e.g., the first direction DR1). Two to five, two to four, or three first mask patterns 300 may be arranged in the first region I without overlapping in the vertical direction (e.g., the first direction DR1). For example, in the second region II, the second mask pattern 400 may be arranged so that they do not overlap in both the vertical direction (e.g., the first direction DR1) and the horizontal direction (e.g., the second direction DR2). One to four, one to three, or two second mask patterns 400 may be arranged in the second region II without overlapping in the vertical direction (e.g., the first direction DR1). For example, one to four, one to three, or two second mask patterns 400 may be arranged in the second region II without overlapping in the horizontal direction (e.g., the second direction DR2).
[0076] In one embodiment, at least one end portion of the first horizontal auxiliary rod 250 and at least one end portion of the second horizontal auxiliary rod 260 may be welded to different vertical rods 200. For example, the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 may be welded to vertical rods 200 that are separate from each other (e.g., physically separate). Accordingly, during the formation of the mask assembly 10, deformation of the mask patterns 300, 400 due to the different arrangement of the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 can be prevented.
[0077] refer to Figure 5 One end portion of the first horizontal auxiliary rod 250 and one end portion of the second horizontal auxiliary rod 260 may be welded to a vertical rod (or a single vertical rod) 200. For example, a second welded portion 255 and a third welded portion 265 may be formed on a vertical rod (or a single vertical rod) 200.
[0078] One end portion of the first horizontal auxiliary rod 250 and one end portion of the second horizontal auxiliary rod 260 may be welded to different areas of the vertical rod 200. For example, a second welded portion 255 and a third welded portion 265 may be formed in different areas of a vertical rod (or a single vertical rod) 200. Accordingly, the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 may be separated (e.g., physically separated). Therefore, in the manufacture of the mask assembly 10, it is possible to prevent the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 from interacting with each other and deforming.
[0079] The end portions of the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 welded to the vertical rod 200 can be in a straight shape. For example, when the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 are welded to different vertical rods 200, each vertical rod 200 to which the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 are welded can be in a straight shape. For example, when the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 are welded to one vertical rod (or a single vertical rod) 200, the vertical rod 200 having the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 welded together can have a straight shape.
[0080] Figure 6 This is a schematic plan view used to explain reverse correction.
[0081] refer to Figure 6 It can perform reverse correction, allowing the welded vertical rod 200 to have a straight shape. Figure 5 In the diagram, the welded portions 255 and 265 of the vertical rod 200 are shown to be recessed inwards. However, for vertical rods 200 that are not recessed inwards, the positions of the welded portions 255 and 265 can be reversed.
[0082] When the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 are welded to the vertical rod 200, the welded portions 255 and 265 of the vertical rod 200 may expand due to the heat generated during welding. Accordingly, the vertical rod 200 with the welded first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260 may deform. For example, the welded portions 255 and 265 of the vertical rod 200 may bend in a direction opposite to the longitudinal direction of the horizontal auxiliary rods 250 and 260.
[0083] To prevent deformation, the vertical rod 200, on which at least one welded portion 255 or 265 is formed, can be reversed for correction. Reverse correction can mean bending the vertical rod 200, on which the welded portions 255 and 265 are formed, in the longitudinal direction of the horizontal auxiliary rods 250 and 260. For example... Figure 6As indicated by the arrows, when the horizontal auxiliary rods 250 and 260 are welded to the vertical rod 200, the vertical rod 200 and the horizontal auxiliary rods 250 and 260 can bend in opposite directions due to expansion. Through reverse correction, the vertical rod 200 of the mask assembly 10, to which the horizontal auxiliary rods 250 and 260 are welded, can maintain its straight shape. Accordingly, deformation of the mask patterns 300 and 400 of the mask assembly 10 can be prevented.
[0084] Figures 7 to 11 These are schematic plan views of mask assemblies according to various embodiments. For example, Figures 7 to 11 These are schematic plan views of the mask assembly 10 according to various embodiments when viewed from a third party to DR3. Figures 7 to 11 For ease of explanation, the configuration of the mask rods is omitted here. This will be described later. Figures 7 to 11 The shape, orientation, and arrangement of the first mask pattern 300 and the second mask pattern 400 can be compared with those of the reference. Figure 4 The shapes, orientations, and arrangements described are basically the same.
[0085] refer to Figure 7 At least one of the vertical rods 200 may include an inwardly recessed portion 210. At least one of the vertical rods 200 may be inwardly recessed to form the recess 210. For example, a vertical rod 200 wherein a first horizontal auxiliary rod 250 and a second horizontal auxiliary rod 260 are welded together may include an inwardly recessed portion 210.
[0086] Thermal expansion occurring during the welding of horizontal auxiliary rods 250, 260 to vertical rod 200 can be offset (or displaced) by recess 210. Accordingly, deformation due to thermal expansion during welding can be prevented. For example, deformation of vertical rod 200 due to welding can be further prevented by reverse alignment of vertical rod 200 together with recess 210. Reverse alignment can be used as a reference. Figure 6 The description of the reverse correction.
[0087] To prevent deformation of the vertical rod 200 and the horizontal auxiliary rods 250 and 260, the recess 210 can be formed not only on the vertical rod 200 to which the horizontal auxiliary rods 250 and 260 are welded, but also on other vertical rods 200 and horizontal auxiliary rods 250 and 260. For example, the recess 210 can be formed in at least one of the vertical rod 200, the first horizontal auxiliary rod 250, and the second horizontal auxiliary rod 260.
[0088] In one embodiment, the mask assembly 10 may further include an additional horizontal auxiliary rod. The additional horizontal auxiliary rod may be positioned in the second direction DR2 as an opening across the support frame 100, and at least one end portion of the additional horizontal auxiliary rod may be secured (or attached) to the support frame 100. At least one end portion of the additional horizontal auxiliary rod may be secured (or attached) to a vertical rod 200. The additional horizontal auxiliary rod may have a longitudinal direction parallel to the second direction DR2. At least one end portion of the additional horizontal auxiliary rod may be inserted into at least one of a third slot G3 on the third side 130 and a fourth slot G4 on the fourth side 140 of the support frame 100.
[0089] The depth of at least one of the third groove G3 and the fourth groove G4 may be substantially the same as the thickness of the additional horizontal auxiliary rod. Accordingly, at least one end portion of the additional horizontal auxiliary rod may be accommodated in at least one of the third groove G3 and the fourth groove G4, such that the upper surface of the additional horizontal auxiliary rod and the upper surface of the support frame 100 may become substantially flat.
[0090] In one embodiment, in a plan view, the vertical rod 200 and the additional horizontal auxiliary rod may intersect each other. The vertical rod 200 and the additional horizontal auxiliary rod may be disposed on the support frame 100, while intersecting each other to form an additional area including an additional mask pattern. For example, an additional mask pattern can be defined by dividing an opening in the support frame 100 with the vertical rod 200 and the additional horizontal auxiliary rod arranged to intersect each other. The additional area can be defined as an area forming at least one additional mask pattern.
[0091] For example, additional regions may be formed in a portion of the first region I or a portion of the second region II. For example, some of the first mask patterns 300 in the first region I may be provided as additional mask patterns with different shapes or arrangement orientations. For example, regions of some first mask patterns 300 with different shapes or arrangement orientations may be defined as additional regions. For example, some of the second mask patterns 400 in the second region II may be provided as additional mask patterns with different shapes or arrangement orientations. For example, regions of some second mask patterns 400 with different shapes or arrangement orientations may be defined as additional regions.
[0092] refer to Figure 8 The mask assembly 10 may further include at least one horizontal bar 270 connecting two opposite sides of the support frame 100.
[0093] The horizontal bar 270 can be positioned in the second direction DR2 as an opening across the support frame 100, and the horizontal bar 270 can be fixed (or attached) to the support frame 100. The longitudinal direction of the horizontal bar 270 can be parallel to the second direction DR2. The horizontal bar 270 can be inserted into the third groove G3 of the third side 130 and the fourth groove G4 of the fourth side 140 of the support frame 100. The depth of the third groove G3 and the fourth groove G4 can be substantially the same as the thickness of the horizontal bar 270. Accordingly, the horizontal bar 270 can be accommodated in the third groove G3 and the fourth groove G4 such that the upper surface of the horizontal bar 270 and the upper surface of the support frame 100 can be substantially flat.
[0094] In the plan view, the vertical rod 200 and the horizontal rod 270 may intersect each other. The vertical rod 200 and the horizontal rod 270 may be positioned on the support frame 100 together with the first horizontal auxiliary rod 250 and the second horizontal auxiliary rod 260, while intersecting each other.
[0095] The first region I, including the first mask pattern 300, may be defined by a vertical rod 200 and at least one of adjacent first horizontal auxiliary rods 250 and horizontal rods 270. For example, the first mask pattern 300 may be formed by a vertical rod 200 and two adjacent first horizontal auxiliary rods 250. For example, the first mask pattern 300 may be formed by a vertical rod 200 and one adjacent first horizontal auxiliary rod 250 and horizontal rod 270. For example, the first mask pattern 300 may be formed by a vertical rod 200 and two adjacent horizontal rods 270.
[0096] The second region II, including the second mask pattern 400, may be defined by a vertical rod 200 and at least one of adjacent second horizontal auxiliary rods 260 and horizontal rods 270. For example, the second mask pattern 400 may be formed by a vertical rod 200 and two adjacent second horizontal auxiliary rods 260. For example, the second mask pattern 400 may be formed by a vertical rod 200 and one adjacent second horizontal auxiliary rod 260 and horizontal rod 270. For example, the second mask pattern 400 may be formed by a vertical rod 200 and two adjacent horizontal rods 270.
[0097] When the horizontal bar 270 is formed, the positional relationship between the first horizontal auxiliary bar 250 and the second horizontal auxiliary bar 260 is the same as described above. When the horizontal bar 270 is formed, the first horizontal auxiliary bar 250 and the second horizontal auxiliary bar 260 may intersect with different vertical bars 200.
[0098] When forming the horizontal bar 270, at least one recess 210 may be formed on at least one of the vertical bar 200, the first horizontal auxiliary bar 250, the second horizontal auxiliary bar 260, and the horizontal bar 270. Accordingly, deformation due to welding during the manufacture of the mask assembly 10 can be prevented.
[0099] The vertical rod 200, the first horizontal auxiliary rod 250, the second horizontal auxiliary rod 260, and the horizontal rod 270 may be formed of metal (such as an alloy such as Invar alloy or stainless steel).
[0100] The vertical rod 200, the first horizontal auxiliary rod 250, the second horizontal auxiliary rod 260, and the horizontal rod 270 can support the mask rod. For example, the mask rod can be positioned on the vertical rod 200, the first horizontal auxiliary rod 250, the second horizontal auxiliary rod 260, and the horizontal rod 270. The lower surface of the mask rod can contact the upper surfaces of the vertical rod 200, the first horizontal auxiliary rod 250, the second horizontal auxiliary rod 260, and the horizontal rod 270. By being supported by the vertical rod 200, the first horizontal auxiliary rod 250, the second horizontal auxiliary rod 260, and the horizontal rod 270, sagging or deformation of the mask rod can be prevented.
[0101] The mask rod can be divided into a first mask pattern 300 in a first region I and a second mask pattern 400 in a second region II by a vertical rod 200, a first horizontal auxiliary rod 250, a second horizontal auxiliary rod 260, and a horizontal rod 270. The mask rod can be positioned in a first direction DR1 as an opening across the support frame 100 and can be fixed (or attached) to the support frame 100. The mask rod can be fixed (or attached) to a first side 110 and a second side 120 of the support frame 100 by welding, while being stretched in the longitudinal direction. A stretch welding machine can be used to stretch and weld the mask rod, and the end portions of the mask rod (e.g., opposite end portions) can have structures suitable for clamping for stretching.
[0102] Mask rods can be combined to form a mask corresponding to a mother substrate (or a single mother substrate). Accordingly, mask rods may be referred to as discrete masks. Each mask rod may include mask patterns 300, 400 corresponding to a cell.
[0103] For example, each mask pattern 300, 400 may include a via corresponding to a pattern of a specific color emitting layer (e.g., a red emitting layer, a green emitting layer, or a blue emitting layer) to be formed in each cell of the mother substrate. The deposition material forming the emitting layer may pass through the vias of the mask rods and may be deposited on each cell of the substrate.
[0104] Mask rods can be formed of metal (such as alloys like Invar or stainless steel). Mask rods can be fine metal masks (FMMs).
[0105] refer to Figure 9 The mask assembly 10 may include a first frame 500, which includes a first region I. The first region I may include at least one first mask pattern 300. For example, the mask assembly 10 may include a second frame 550, which includes a second region II. The second region II may include at least one second mask pattern 400.
[0106] An opening defining the first mask pattern 300 may be formed in the first frame 500, and an opening defining the second mask pattern 400 may be formed in the second frame 550. A first region I may be defined by the first frame 500, and a second region II may be defined by the second frame 550.
[0107] The first frame 500 and the second frame 550 may each be disposed on the support frame 100. The end portions of the first frame 500 (e.g., opposite end portions) may be inserted into the first groove G1 of the first side 110 and the second groove G2 of the second side 120 of the support frame 100, respectively. The end portions of the second frame 550 (e.g., opposite end portions) may be inserted into the first groove G1 of the first side 110 and the second groove G2 of the second side 120 of the support frame 100, respectively.
[0108] The depths of the first groove G1 and the second groove G2 can be substantially the same as the thicknesses of the first frame 500 and the second frame 550, respectively. Accordingly, the first frame 500 and the second frame 550 can be accommodated in the first groove G1 and the second groove G2, respectively, so that the upper surfaces of the first frame 500, the second frame 550 and the upper surface of the support frame 100 can be substantially flat.
[0109] The end portions of the first frame 500 (e.g., opposite end portions) may be welded to the fourth weld portion 505 on the first side 110 and the fifth weld portion 555 on the second side 120 of the support frame 100, respectively. The end portions of the first frame 500 and the second frame 550 (e.g., opposite end portions) may be welded and fixed (or attached) to the first side 110 and the second side 120 of the support frame 100, respectively.
[0110] The first frame 500 and the second frame 550 may be separate (e.g., physically separate). For example, the first frame 500 and the second frame 550 may be located in different areas of the support frame 100. Accordingly, during the formation of the mask assembly 10, as the first frame 500 and the second frame 550 expand, they may interfere with each other, thereby preventing shape deformation of the first mask pattern 300 and the second mask pattern 400.
[0111] The arrangement of the first mask pattern 300 disposed in the first region I defined by the first frame 500 and the second mask pattern 400 disposed in the second region II defined by the second frame 550 may differ from each other. For example, the first mask pattern 300 disposed (or included) in the first region I and the second mask pattern 400 disposed (or included) in the second region II may have different arrangement forms. Accordingly, the mask patterns 300, 400 with various arrangement structures can be provided using a mask assembly (or a single mask assembly) 10.
[0112] refer to Figure 10 The mask assembly 10 may include a third frame 600, which includes a first region I and a second region II. The first region I includes at least one first mask pattern 300, and the second region II includes at least one second mask pattern 400.
[0113] The holes defining the first mask pattern 300 and the holes defining the second mask pattern 400 can be formed together in the third frame 600. The first region I can be defined by the third frame 600, and the second region II can be defined by the third frame 600.
[0114] A third frame 600 may be positioned on a support frame 100. The end portions of the third frame 600 (e.g., opposite end portions) may be inserted into a first groove G1 on a first side 110 and a second groove G2 on a second side 120 of the support frame 100, respectively. The depths of the first groove G1 and the second groove G2 may each be substantially equal to the thickness of the third frame 600. Accordingly, the end portions of the third frame 600 (e.g., opposite end portions) may be inserted into the first groove G1 and the second groove G2 such that the upper surface of the third frame 600 and the upper surface of the support frame 100 are substantially flat.
[0115] The end portion of the third frame 600 (e.g., the opposite end portion) may be welded to the sixth weld portion 605 of the first side 110 and the second side 120 of the support frame 100. The end portion of the third frame 600 (e.g., the opposite end portion) may be welded and secured (or attached) to the first side 110 and the second side 120 of the support frame 100.
[0116] The arrangement of the first mask pattern 300 in the first region I and the second mask pattern 400 in the second region II of the third frame 600 can be different from each other. For example, the first mask pattern 300 in the first region I and the second mask pattern 400 in the second region II can have different arrangements. Accordingly, the mask patterns 300 and 400 with various arrangements can be provided using a single mask assembly 10.
[0117] refer to Figure 11 At least one of the inner sides of the third frame 600 may include an inwardly recessed recess 610. For example, the inner edge portion formed between the first region I and the second region II may include an inwardly recessed recess 610. For example, at least one of the inner edge portions between the first mask patterns 300 and the inner edge portions between the second mask patterns 400 may include an inwardly recessed recess 610. The recess 610 can prevent deformation due to thermal expansion that occurs during welding the third frame 600 to the support frame 100.
[0118] Figure 12 This is a schematic diagram illustrating deposition using a mask assembly according to one embodiment.
[0119] Deposition can be performed using a deposition apparatus including a chamber 700, a deposition source 710, and a mask assembly 10. The chamber 700 forms an internal space for performing the deposition process. A holder 720 may be located in the chamber 700, and a support frame 100 of the mask assembly 10 is detachably fixed (or attached) to the holder 720. A mother substrate 800 may be located on the mask assembly 10 for alignment with the mask assembly 10. The deposition source 710 may store and spray deposition material to be deposited on the mother substrate 800.
[0120] When the light-emitting layer forming material evaporates from the deposition source 710 located below the chamber 700, the light-emitting layer forming material can be deposited onto the mother substrate 800 through the through-holes of the mask rods 150, allowing the light-emitting layer to be formed at the desired location. The vertical rods 200, the first horizontal auxiliary rods 250, and the second horizontal auxiliary rods 260 of the mask assembly 10 prevent the light-emitting layer forming material from passing through and delineate the first mask pattern and the second mask pattern. The vertical rods 200 of the mask assembly 10 prevent the light-emitting layer forming material from passing through the gaps between the mask rods 150 and being deposited onto the mother substrate 800.
[0121] Figure 13 A schematic cross-sectional view is shown to illustrate a stacked structure of a display panel according to one embodiment. The display panel may be formed using a mask assembly 10 according to one embodiment.
[0122] pass Figure 12 The deposition process shown in the figure forms cells on the mother substrate 800 that can be divided and used as display panels for display devices. Figure 13 The cross section shown in the figure may correspond to approximately one pixel area (or a single pixel area).
[0123] The display panel may include functional layers such as a substrate SB, transistors TR formed on the substrate SB, and light-emitting diodes (LEDs) connected to the transistors TR. The LEDs may correspond to pixels.
[0124] The substrate SB can be made of a material such as glass. The substrate SB can be a flexible substrate including a polymer resin (such as polyimide, polyamide or polyethylene terephthalate).
[0125] A buffer layer BFL may be located on the substrate SB. The buffer layer BFL can improve the characteristics of the semiconductor layer by blocking impurities from the substrate SB during the formation of the semiconductor layer, and can alleviate stress on the semiconductor layer by planarizing the surface of the substrate SB. The buffer layer BFL may comprise an inorganic insulating material, such as silicon nitride (SiN). x ), silicon dioxide (SiO) x ) or silicon oxynitride (SiO) x N yIt can be a single layer or multiple layers. The buffer layer BFL may include amorphous silicon.
[0126] The semiconductor layer AL of the transistor TR may be located on the buffer layer BFL. The semiconductor layer AL may include a first semiconductor region, a second semiconductor region, and a channel region between the first semiconductor region and the second semiconductor region. The semiconductor layer AL may include any one of amorphous silicon, polycrystalline silicon, and oxide semiconductors. For example, the semiconductor layer AL may include indium gallium zinc oxide (IGZO).
[0127] The first gate insulating layer GI1 may be located on the semiconductor layer AL. The first gate insulating layer GI1 may include an inorganic insulating material, such as silicon nitride, silicon oxide, or silicon oxynitride, and may be a single layer or multiple layers.
[0128] The first gate conductive layer, including the gate electrode GE of the transistor TR, the gate line GL, and the first electrode C1 of the capacitor CS, may be located on the first gate insulating layer GI1. The first gate conductive layer may include molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and may be a single layer or multiple layers.
[0129] The second gate insulating layer GI2 may be located on the first gate conductive layer. The second gate insulating layer GI2 may include an inorganic insulating material, such as silicon nitride, silicon oxide, or silicon oxynitride, and may be a single layer or multiple layers.
[0130] The second gate conductive layer, including the second electrode C2 of the capacitor CS, may be located on the second gate insulating layer GI2. The second gate conductive layer may include molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and may be a single layer or multiple layers.
[0131] The interlayer insulating layer (ILD) may be located on the second gate insulating layer (GI2) and the second gate conductive layer. The interlayer insulating layer (ILD) may include inorganic insulating materials, such as silicon nitride, silicon oxide, or silicon oxynitride, and may be a single layer or multiple layers.
[0132] A first data conductive layer, including the first electrode SE and second electrode DE of transistor TR, data line DL, etc., may be located on the interlayer insulating layer ILD. The first electrode SE and second electrode DE can be connected to the first semiconductor region and the second semiconductor region of semiconductor layer AL through contact holes in insulating layers GI1, GI2 and ILD, respectively. One of the first electrode SE and the second electrode DE may be the source electrode and the other may be the drain electrode. The first data conductive layer may include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), copper (Cu), etc., and may be a single layer or multiple layers.
[0133] The first planarization layer VIA1 may be located on the first data conductive layer. The first planarization layer VIA1 may be an organic insulating layer. For example, the first planarization layer VIA1 may include organic insulating materials, such as general polymers like polymethyl methacrylate or polystyrene, polymer derivatives containing phenolic groups, acrylic polymers, imide polymers such as polyimides, and siloxane polymers.
[0134] A second data conductive layer, including voltage lines VL and connection electrodes CE, may be located on the first planarization layer VIA1. The second data conductive layer, including voltage lines VL and connection electrodes CE, may be positioned. The voltage lines VL may transmit voltages such as drive voltage, common voltage, initialization voltage, and reference voltage. The connection electrodes CE may be connected to the second electrode DE of the transistor TR through contact holes in the first planarization layer VIA1. The second data conductive layer may include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), copper (Cu), etc., and may be a single layer or multiple layers.
[0135] The second planarization layer VIA2 may be located on the second data conductive layer. The second planarization layer VIA2 may be an organic insulating layer. For example, the second planarization layer VIA2 may include organic insulating materials such as general polymers such as polymethyl methacrylate or polystyrene, polymer derivatives containing phenolic groups, acrylic polymers, imide polymers such as polyimides, and siloxane polymers.
[0136] The first electrode E1 of the light-emitting diode (LED) may be located on the second planarization layer VIA2. The first electrode E1 may be a pixel electrode. The first electrode E1 may be connected to the connection electrode CE through a contact hole in the second planarization layer VIA2. Accordingly, the first electrode E1 may be electrically connected to the second electrode DE of the transistor TR and may receive data signals controlling the brightness of the LED. The transistor TR connected to the first electrode E1 may be a driving transistor or a transistor electrically connected to a driving transistor. The first electrode E1 may be formed of a reflective conductive material or a semi-transparent conductive material, or it may be formed of a transparent conductive material. The first electrode E1 may include a transparent conductive material, such as indium tin oxide (IZO). The first electrode E1 may include a metal or metal alloy such as lithium (Li), calcium (Ca), aluminum (Al), silver (Ag), magnesium (Mg), or gold (Au).
[0137] The pixel defining layer (PDL), which serves as an organic insulating layer, can be located on the second planarization layer (VIA2). The PDL can be a separator and can have an opening that overlaps with the first electrode (E1).
[0138] The light-emitting layer EL of a light-emitting diode (LED) may be located on the first electrode E1. In addition to the light-emitting layer EL, at least one of a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer may be located on the first electrode E1. The mask assembly 10 described above can be used to deposit the light-emitting layer EL.
[0139] The second electrode E2 of a light-emitting diode (LED) may be located on the light-emitting layer EL. The second electrode E2 may be a common electrode. The second electrode E2 provides light transmittance by forming a thin layer of a metal or metal alloy with low work function, such as calcium (Ca), barium (Ba), magnesium (Mg), aluminum (Al), and silver (Ag). The second electrode E2 may include a transparent conductive oxide, such as indium tin oxide (ITO) or indium zinc oxide (IZO).
[0140] The first electrode E1, the light-emitting layer EL, and the second electrode E2 of each pixel form a light-emitting diode (LED), such as an organic light-emitting diode (OLED). The first electrode E1 can be the anode of the LED, and the second electrode E2 can be the cathode of the LED.
[0141] The capping layer CPL may be located on the second electrode E2. The capping layer CPL can improve optical efficiency by adjusting the refractive index. The capping layer CPL may be positioned to cover (e.g., completely cover) the second electrode E2. The capping layer CPL may comprise an organic insulating material or an inorganic insulating material.
[0142] The encapsulation layer EN may be located on the capping layer CPL. The encapsulation layer EN seals the light-emitting diode (LED) and prevents moisture or oxygen from penetrating from the outside. The encapsulation layer EN may be a thin-film encapsulation layer comprising one or more inorganic layers EIL1, EIL2 and one or more organic layers EOL.
[0143] The touch sensor layer (TSL), including touch electrodes, may be located on the encapsulation layer (EN). The touch electrodes may have a grid shape with openings overlapping with the light-emitting diodes (LEDs). An anti-reflective layer (AR) may be located on the touch sensor layer (TSL) to reduce external light reflection.
[0144] The cover window (WU) can be placed on the anti-reflective layer (AR) to protect the entire front of the display panel.
[0145] A protective film for protecting the display panel may be located below the substrate SB. A functional sheet including at least one of a pad, heat sink, light shield, waterproof strip, and electromagnetic shielding layer may be located below the protective film.
[0146] Figure 14 This is a block diagram of an electronic device according to an embodiment. (Refer to...) Figure 14 An electronic device according to one embodiment may include a display module 11, a processor 12, a memory 13, and a power module 14.
[0147] The processor 12 may include at least one of a central processing unit (CPU), an application processor (AP), a graphics processing unit (GPU), a communication processor (CP), an image signal processor (ISP), and a controller.
[0148] The memory 13 can store data information required for the operation of the processor 12 or the display module 11. When the processor 12 executes the application program stored in the memory 13, video data signals and / or input control signals are transmitted to the display module 11, and the display module 11 can process the received signals to output video information through the display screen.
[0149] The power module 14 may include a power module such as a power adapter or battery device, and a power conversion module that converts the power supplied by the power module to generate the power required for the operation of the electronic device.
[0150] At least one component of the electronic device may be included within the display device according to the above embodiments. Additionally, some individual modules functionally included within a single module may be integrated into the display device, while other modules may be provided separately from the display device. For example, the display device may include a display module 11, while the processor 12, memory 13, and power module 14 may be provided as other devices within the electronic device that are not part of the display device.
[0151] Figure 15 Schematic diagrams of electronic devices according to various embodiments are shown.
[0152] refer to Figure 15 Various electronic devices having a display device according to the embodiments may include not only image display electronic devices such as smartphones 1_1a, tablet computers 1_1b, laptop computers 1_1c, televisions 1_1d, and desktop monitors 1_1e, but also wearable electronic devices such as smart glasses 1_2a, head-mounted displays 1_2b, and smartwatches 1_2c having display modules, and automotive electronic devices having display modules 1_3 such as those placed on a car dashboard, center console, central information display (CID), or rearview mirror display.
[0153] In summarizing the detailed description, those skilled in the art will recognize that many variations and modifications can be made to the embodiments without substantially departing from the principles, spirit, and scope of this disclosure. Therefore, the disclosed embodiments are used in a general and descriptive sense only and not for limiting purposes.
Claims
1. A mask assembly, characterized by include: Supporting framework; At least two vertical rods are located on the support frame and extend in the first direction; At least two first horizontal auxiliary rods, located on the support frame and in contact with at least one side of the support frame, extend in a second direction perpendicular to the first direction and intersect with the at least two vertical rods in the plan view, and At least two second horizontal auxiliary rods are located on the support frame and contact at least one side of the support frame, extend in the second direction, and intersect with the at least two vertical rods in the plan view. The at least two first horizontal auxiliary rods and the at least two second horizontal auxiliary rods contact different sides of the support frame.
2. The mask assembly according to claim 1, characterized in that, The support frame includes a first zone and a second zone that are divided from each other along a boundary extending in the first direction. The at least two first horizontal auxiliary rods extend in the first region in the second direction, and The at least two second horizontal auxiliary rods are positioned to be displaced from the at least two first horizontal auxiliary rods along the first direction in the second zone.
3. The mask assembly according to claim 2, characterized in that, The first region includes at least one first mask pattern defined by the at least two vertical rods and the at least two first horizontal auxiliary rods, and The second region includes at least one second mask pattern defined by the at least two vertical rods and the at least two second horizontal auxiliary rods.
4. The mask assembly according to claim 1, characterized in that, The at least two first horizontal auxiliary rods and the at least two second horizontal auxiliary rods intersect with different vertical rods in the plan view.
5. The mask assembly according to claim 1, characterized in that, The at least two first horizontal auxiliary rods and the at least two second horizontal auxiliary rods are separated from each other.
6. The mask assembly according to claim 1, characterized in that, The end portions of the at least two first horizontal auxiliary rods and the end portions of the at least two second horizontal auxiliary rods are welded to different vertical rods.
7. The mask assembly according to claim 1, characterized in that, The end portions of the at least two first horizontal auxiliary rods and the end portions of the at least two second horizontal auxiliary rods are welded to the same vertical rod.
8. The mask assembly according to claim 1, characterized in that, At least one of the at least two vertical bars includes an inwardly recessed portion.
9. The mask assembly according to claim 1, characterized in that, The mask assembly further includes at least one horizontal bar that extends in the second direction and connects two opposite sides of the support frame.
10. The mask assembly according to claim 9, characterized in that, The mask assembly includes: The first region includes a first mask pattern defined by at least two vertical bars and at least one of the at least two first horizontal auxiliary bars and at least one horizontal bar adjacent to each other. The second region includes a second mask pattern defined by at least two vertical rods and at least one of the at least two adjacent second horizontal auxiliary rods and at least one horizontal rod.