A top cover flipping device for a vacuum sputtering machine

Abstract

This invention proposes a top cover flipping device for a vacuum sputtering machine. By employing a three-section rigidly connected lifting arm structure—a fixed inclined arm, a connecting arm, and an adjusting rotating arm—a staged force transmission path and flipping lever arm are formed. This effectively overcomes the shortcomings of existing technologies, such as a single transmission arm structure and unstable flipping. Simultaneously, the obtuse-angled fixed inclined arm and connecting arm bear the large displacement during the initial lifting process, while the acute-angled adjusting rotating arm precisely controls the final flipping posture, realizing a multi-segment lever arm coordination mechanism and significantly optimizing the force state of each node during the flipping process. This structure results in smaller output torque variations throughout the flipping path, smoother overall operation, and less effort required for operation. Furthermore, this structure increases the freedom of drive device arrangement, allowing drive components such as nitrogen springs to be positioned at the optimal lever arm location, further reducing drive power consumption and structural vibration, thereby improving the overall operational safety, durability, and maintenance efficiency of the equipment.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and more specifically, to a top cover flipping device for a vacuum sputtering machine. Background Technology

[0002] Vacuum sputtering machines, as high-precision thin-film deposition equipment, are widely used in high-end manufacturing fields such as semiconductors and optoelectronic devices. Because key components within their vacuum chambers require frequent maintenance or replacement, a maintenance cover is typically installed at the top of the equipment for internal inspection. In existing technologies, the maintenance cover is mostly connected to the machine body via a single-segment linkage mechanism or a traditional hinge. The flip-opening structure is relatively simple, mainly relying on a fixed-length lifting arm or linkage to lift the cover. This type of structure has significant shortcomings: due to the simple lever arm structure, short force transmission path, and unreasonable angle changes during the flipping process, uneven force distribution and unstable flipping often occur during opening. Furthermore, in high-frequency opening and closing or large-size cover applications, problems such as motion jamming, large structural swaying, and component fatigue damage are highly likely to occur.

[0003] Meanwhile, because the entire lever arm path cannot be effectively segmented or its force adjusted, the drive unit often has to withstand a large initial starting torque, resulting in high energy consumption, concentrated load, and easy wear in both design and use. These defects not only affect the operator's user experience but also restrict the overall reliability and service life of the equipment.

[0004] Therefore, there is an urgent need for a top cover flipping device for a vacuum sputtering machine with a reasonable structure that can adapt to stable flipping at multiple angles, in order to solve the technical problems of unstable flipping and uneven force transmission in the existing technology. Utility Model Content

[0005] In view of this, in order to solve the above problems, this utility model proposes a top cover flipping device for a vacuum sputtering machine that has a reasonable structure and can adapt to multiple angles and maintain stability.

[0006] A top cover flipping device for a vacuum sputtering machine is characterized by comprising a vacuum sputtering machine body 1, an inspection cover 2 disposed above it, and a flipping push rod assembly 3 for driving the inspection cover 2 to flip and lift; the flipping push rod assembly 3 includes a mounting base 33, a lifting connection assembly 32, and a driving device 31; the mounting base 33 is fixed above the vacuum sputtering machine body 1 and is provided with a rotating shaft mounting part 331, and at least two adjusting and fixing holes 332 are spaced apart below the rotating shaft mounting part 331; the lifting connection assembly 32 includes a fixed inclined arm 3... 51. A lifting arm 35 is rigidly connected to a connecting arm 352 and an adjusting rotating arm 353. The fixed inclined arm 351 is hinged to the inspection cover 2. The adjusting rotating arm 353 is provided with a rotating part 321 and a fixed part 322. The rotating part 321 is rotatably connected to the rotating shaft mounting part 331. One end of the driving device 31 is connected to the mounting base 33, and the other end is hinged to the adjusting rotating arm 353. The driving device 31 drives the lifting connecting assembly 32 to flip and lift, and the fixed part 322 is positioned and connected to the corresponding adjusting fixing hole 332 by a fixing pin 34.

[0007] Furthermore, the lifting connection assembly 32 includes two parallel lifting arms 35, and at least two reinforcing ribs 36 are provided between the two lifting arms 35. The reinforcing ribs 36 are disposed between the connecting arms 352.

[0008] In some embodiments, the drive device 31 is a nitrogen spring, with one end of the nitrogen spring hinged to the bottom or near the bottom of the mounting base 33, and the other end hinged to a position one-third lower than the midpoint of the length of the adjusting rotating arm 353, forming an optimal lever arm structure to reduce the output torque requirement of the drive device 31 and improve the force stability and balance during the flipping process.

[0009] In some embodiments, the drive device 31 is a nitrogen spring, one end of which is hinged to the bottom or near the bottom of the mounting base 33, and the other end is hinged to the middle or lower part of the adjusting rotating arm 353 of the lifting connection assembly 32.

[0010] In some embodiments, the angle between the fixed inclined arm 351 and the connecting arm 352 is an obtuse angle of 110° to 130°, so as to reduce the local stress concentration of the structure and improve the overall load-bearing stability of the lifting arm 35 during the lifting and opening process of the inspection cover 2.

[0011] In some embodiments, the connecting arm 352 and the adjusting rotating arm 353 form an acute angle of 60° to 80°, and the connecting arm 352 and the adjusting rotating arm 353 form a Z-shaped force transmission path in the form of a broken line, so that the external force acting on the adjusting rotating arm 353 is evenly and effectively transmitted to the fixed inclined arm 351, thereby improving the bending stiffness of the structure and reducing the overall stress deformation.

[0012] In some embodiments, the fixing pin 34 is an elastic self-locking fixing pin 34, which is provided with a backstop slot and a release button, enabling quick locking and unlocking with one hand.

[0013] In some embodiments, the rotating part 321 of the lifting connection assembly 32 is provided with a bearing structure 37, which is disposed between the rotating part 321 and the rotating shaft mounting part 331, so as to reduce the motion resistance when the lifting connection assembly 32 is flipped and improve the stability of the flipping action.

[0014] In some embodiments, the inner side of the adjustment and fixing hole 332 of the mounting base 33 is provided with a wear-resistant bushing to reduce the wear of the fixing pin 34 during frequent insertion and removal, thereby improving the structural durability.

[0015] The beneficial effects of this utility model are as follows: This utility model proposes a top cover flipping device for a vacuum sputtering machine. By employing a three-section rigidly connected lifting arm structure consisting of a fixed inclined arm, a connecting arm, and an adjusting rotating arm, a staged force transmission path and flipping lever arm are formed. This effectively overcomes the shortcomings of existing technologies, such as a single transmission arm structure and unstable flipping. Simultaneously, the obtuse-angled fixed inclined arm and connecting arm bear the large displacement during the initial lifting process, while the acute-angled adjusting rotating arm precisely controls the final flipping posture, realizing a multi-segment lever arm coordination mechanism and significantly optimizing the force state of each node during the flipping process. Compared to traditional structures, this structure has smaller output torque variations throughout the flipping path, resulting in smoother overall operation and less effort required for operation. Furthermore, this structure increases the freedom of arrangement of the drive device, allowing drive components such as nitrogen springs to be placed at the optimal lever arm position, further reducing drive power consumption and structural vibration, thereby improving the overall operational safety, durability, and maintenance efficiency of the equipment. Attached Figure Description

[0016] Figure 1 This is an overall structural diagram of the top cover flipping device of the vacuum sputtering machine of this utility model.

[0017] Figure 2 This is an overall structural diagram of the top cover flipping device of the vacuum sputtering machine of this utility model.

[0018] Figure 3 This is a partially enlarged structural diagram of the top cover flipping device of the vacuum sputtering machine of this utility model.

[0019] Explanation of main component symbols

[0020] Vacuum sputtering machine base 1, inspection cover 2, tilting push rod assembly 3, drive device 31, lifting connection assembly 32, rotating part 321, fixing part 322, mounting base 33, rotating shaft mounting part 331, adjusting fixing hole 332, fixing pin 34, lifting arm 35, fixing inclined arm 351, connecting arm 352, adjusting rotating arm 353, reinforcing rib 36, bearing structure 37.

[0021] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation Example 1:

[0022] like Figure 1 The diagram shown is an overall structural diagram of the top cover flipping device of the vacuum sputtering machine of this utility model; as shown... Figure 2 The diagram shown is an overall structural diagram of the top cover flipping device of the vacuum sputtering machine of this utility model; as shown... Figure 3 The diagram shown is a partially enlarged structural view of the top cover flipping device of the vacuum sputtering machine of this utility model. The top cover flipping device of a vacuum sputtering machine is characterized by comprising a vacuum sputtering machine body 1, a maintenance cover 2 disposed above it, and a flipping push rod assembly 3 for driving the maintenance cover 2 to flip and lift. The flipping push rod assembly 3 includes a mounting base 33, a lifting connection assembly 32, and a driving device 31. The mounting base 33 is fixed above the vacuum sputtering machine body 1 and has a rotating shaft mounting part 331. At least two adjusting and fixing holes 332 are spaced apart below the rotating shaft mounting part 331. The lifting connection assembly 32 includes a fixed inclined arm 3... 51. A lifting arm 35 is rigidly connected to a connecting arm 352 and an adjusting rotating arm 353. The fixed inclined arm 351 is hinged to the inspection cover 2. The adjusting rotating arm 353 is provided with a rotating part 321 and a fixed part 322. The rotating part 321 is rotatably connected to the rotating shaft mounting part 331. One end of the driving device 31 is connected to the mounting base 33, and the other end is hinged to the adjusting rotating arm 353. The driving device 31 drives the lifting connecting assembly 32 to flip and lift, and the fixed part 322 is positioned and connected to the corresponding adjusting fixing hole 332 by a fixing pin 34.

[0023] The lifting connection assembly 32 includes two parallel lifting arms 35, and at least two reinforcing ribs 36 are provided between the two lifting arms 35. The reinforcing ribs 36 are provided between the connecting arms 352.

[0024] The driving device 31 is a nitrogen spring. One end of the nitrogen spring is hinged to the bottom or near the bottom of the mounting base 33, and the other end is hinged to the lower third of the length of the adjusting rotating arm 353, forming an optimal lever arm structure to reduce the output torque requirement of the driving device 31 and improve the force stability and balance during the flipping process.

[0025] The drive device 31 is a nitrogen spring. One end of the nitrogen spring is hinged to the bottom or near the bottom of the mounting base 33, and the other end is hinged to the middle or lower part of the adjusting rotating arm 353 of the lifting connection assembly 32.

[0026] The angle between the fixed inclined arm 351 and the connecting arm 352 is an obtuse angle of 110° to 130°, so as to reduce the local stress concentration of the structure and improve the overall load-bearing stability of the lifting arm 35 during the process of lifting and opening the inspection cover 2.

[0027] The connecting arm 352 and the adjusting rotating arm 353 form an acute angle of 60° to 80°, and the connecting arm 352 and the adjusting rotating arm 353 form a Z-shaped force transmission path in the form of a broken line, so that the external force acting on the adjusting rotating arm 353 is evenly and effectively transmitted to the fixed inclined arm 351, thereby improving the bending stiffness of the structure and reducing the overall stress deformation.

[0028] The fixing pin 34 is an elastic self-locking fixing pin 34, which is equipped with a backstop slot and a release button, and can be quickly locked and unlocked with one hand.

[0029] The rotating part 321 of the lifting connection assembly 32 is provided with a bearing structure 37. The bearing structure 37 is disposed between the rotating part 321 and the rotating shaft mounting part 331 to reduce the motion resistance when the lifting connection assembly 32 is flipped and improve the stability of the flipping action.

[0030] The mounting base 33 has a wear-resistant bushing inside the adjustment and fixing hole 332 to reduce the wear of the fixing pin 34 during frequent insertion and removal, and improve the structural durability.

[0031] The beneficial effects of this utility model are as follows: This utility model proposes a top cover flipping device for a vacuum sputtering machine. By employing a three-section rigidly connected lifting arm structure consisting of a fixed inclined arm, a connecting arm, and an adjusting rotating arm, a staged force transmission path and flipping lever arm are formed. This effectively overcomes the shortcomings of existing technologies, such as a single transmission arm structure and unstable flipping. Simultaneously, the obtuse-angled fixed inclined arm and connecting arm bear the large displacement during the initial lifting process, while the acute-angled adjusting rotating arm precisely controls the final flipping posture, realizing a multi-segment lever arm coordination mechanism and significantly optimizing the force state of each node during the flipping process. Compared to traditional structures, this structure has smaller output torque variations throughout the flipping path, resulting in smoother overall operation and less effort required for operation. Furthermore, this structure increases the freedom of arrangement of the drive device, allowing drive components such as nitrogen springs to be placed at the optimal lever arm position, further reducing drive power consumption and structural vibration, thereby improving the overall operational safety, durability, and maintenance efficiency of the equipment.

[0032] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A top cover flipping device of a vacuum sputtering machine, characterized in that: The system includes a vacuum sputtering machine body (1), an inspection cover (2) disposed above it, and a flip push rod assembly (3) for driving the inspection cover (2) to flip and lift. The flip push rod assembly (3) includes a mounting base (33), a lifting connection assembly (32), and a driving device (31). The mounting base (33) is fixed above the vacuum sputtering machine body (1) and is provided with a rotating shaft mounting part (331). At least two adjusting and fixing holes (332) are provided at intervals below the rotating shaft mounting part (331). The lifting connection assembly (32) includes a fixed inclined arm (351), a connecting arm (352), and an adjusting arm. The lifting arm (35) is rigidly connected to the rotating arm (353), wherein the fixed inclined arm (351) is hinged to the inspection cover (2), and the adjusting rotating arm (353) is provided with a rotating part (321) and a fixed part (322). The rotating part (321) is rotatably connected to the rotating shaft mounting part (331). One end of the driving device (31) is connected to the mounting base (33), and the other end is hinged to the adjusting rotating arm (353). The driving device drives the lifting connecting assembly (32) to flip and lift, and the fixed part (322) is positioned and connected to the corresponding adjusting fixing hole (332) by the fixing pin (34).

2. The top cover flipping device of a vacuum sputtering machine according to claim 1, wherein: The lifting connection assembly (32) includes two parallel lifting arms (35), and at least two reinforcing ribs (36) are provided between the two lifting arms (35). The reinforcing ribs (36) are provided between the connecting arms (352).

3. The top cover flipping device of a vacuum sputtering machine according to claim 1, wherein: The driving device (31) is a nitrogen spring. One end of the nitrogen spring is hinged to the bottom or near the bottom of the mounting base (33), and the other end is hinged to the lower third of the length of the adjusting rotating arm (353), forming an optimal lever arm structure to reduce the output torque requirement of the driving device (31) and improve the force stability and balance during the flipping process.

4. The top cover flipping device of a vacuum sputtering machine according to claim 1, wherein: The drive device (31) is a nitrogen spring. One end of the nitrogen spring is hinged to the bottom or near the bottom of the mounting base (33), and the other end is hinged to the middle or lower part of the adjusting rotating arm (353) of the lifting connection assembly (32).

5. The top cover flipping device of a vacuum sputtering machine according to claim 1, wherein: The angle between the fixed inclined arm (351) and the connecting arm (352) is an obtuse angle of 110° to 130°, so as to reduce the local stress concentration of the structure and improve the overall load-bearing stability of the lifting arm (35) during the lifting and opening of the inspection cover (2).

6. The top cover flipping device of a vacuum sputtering machine according to claim 1, wherein: The connecting arm (352) and the adjusting rotating arm (353) form an acute angle of 60° to 80°, and the connecting arm (352) and the adjusting rotating arm (353) form a Z-shaped force transmission path in the form of a broken line, so that the external force acting on the adjusting rotating arm (353) is evenly and effectively transmitted to the fixed inclined arm (351), thereby improving the bending stiffness of the structure and reducing the overall stress deformation.

7. The top cover flipping device of a vacuum sputtering machine according to claim 1, wherein: The fixing pin (34) is an elastic self-locking fixing pin (34) with a backstop slot and a release button, which can realize quick locking and unlocking with one hand.

8. The top cover flipping device of a vacuum sputtering machine according to claim 1, wherein: The rotating part (321) of the lifting connection assembly (32) is provided with a bearing structure (37). The bearing structure (37) is located between the rotating part (321) and the rotating shaft mounting part (331) to reduce the motion resistance when the lifting connection assembly (32) is flipped and improve the stability of the flipping action.

9. The top cover flipping device of the vacuum sputtering machine as described in claim 1, characterized in that: The mounting base (33) has a wear-resistant bushing inside the adjustment and fixing hole (332) to reduce the wear of the fixing pin (34) during frequent insertion and removal, and improve the structural durability.

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