A substrate holder for vacuum coating

Abstract

The utility model relates to the technical field of vacuum coating equipment, especially a substrate holder for vacuum coating, which comprises a frame assembly, a substrate fixing position arranged in the frame assembly, a driving assembly connected with the frame assembly and arranged on one side of the substrate fixing position, and the substrate holder is drivingly connected with a conveying device through the driving assembly to drive the substrate holder to move in the conveying device.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum coating equipment, and in particular to a substrate holder for vacuum coating. Background Technology

[0002] In the production process of vacuum coating equipment, the substrate holder, as the core component carrying the substrate, directly affects the continuity and production efficiency of the overall coating process. Currently, the substrate holder in vacuum coating equipment is generally conveyed using a roller conveyor. This device supports the substrate holder through multiple sets of rotating rollers arranged along the conveying path, and uses the sliding friction between the rotating rollers and the bottom of the substrate holder to drive the substrate holder to move along a preset trajectory, thereby completing the transfer of the substrate holder between the loading / unloading station, the coating station, and other functional stations.

[0003] Due to insufficient initial friction between the substrate holder and the rotating roller, or the large static friction resistance caused by the substrate holder's own weight, the rotation of the rotating roller cannot directly drive the substrate holder to move. It is necessary to rely on manual pushing or additional mechanical equipment such as robotic arms to apply initial power to the substrate holder. The rotating roller is only used to assist the movement of the substrate holder. During the loading, unloading and transfer of the substrate holder, the transfer cycle of the substrate holder is prolonged, which affects the conveying efficiency of the substrate holder.

[0004] This utility model was proposed in response to the shortcomings of the existing technology. Utility Model Content

[0005] This invention addresses the problem that existing roller conveying devices cannot directly drive the substrate holder to move, requiring manual pushing or additional mechanical equipment to apply initial power to the substrate holder. The rotating rollers are only used to assist the movement of the substrate holder, which prolongs the transfer cycle of the substrate holder during loading, unloading, and transfer, thus affecting the conveying efficiency of the substrate holder. This invention proposes a substrate holder for vacuum coating.

[0006] The technical solution adopted by this utility model to solve its technical problem is: A substrate holder for vacuum coating includes a frame assembly, a substrate fixing position disposed in the frame assembly, and a drive assembly connected to the frame assembly and disposed on one side of the substrate fixing position. The substrate holder is driven to a conveying device via the drive assembly to drive the substrate holder to move in the conveying device.

[0007] As described above, a substrate holder for vacuum coating includes a drive assembly comprising an assembly disposed at the bottom of the frame assembly and a drive member connected to the assembly assembly, wherein the drive member extends at least partially to the underside of the assembly assembly and is drively connected to a conveying device.

[0008] As described above, a substrate holder for vacuum coating has an engagement portion at the bottom of the driving member. The engagement portion extends along the length of the driving member and can extend to the underside of the assembly. The engagement portion is connected to the conveying device via a transmission connection. The meshing part is provided with a first guide part at at least one end, and the first guide part and the meshing part have a first preset angle. The meshing part is guided to be connected to the conveying device through the first guide part.

[0009] As described above, a substrate holder for vacuum coating includes an assembly comprising a connecting plate disposed between the drive component and the frame assembly, and a mounting assembly disposed between the connecting plate and the drive component. The bottom of the connecting plate is provided with a mounting groove for mounting the drive component. The drive component is fixedly mounted in the mounting groove by the mounting assembly, and the drive component extends at least partially to the underside of the mounting groove.

[0010] As described above, the substrate holder for vacuum coating further includes a positioning component disposed between the connecting plate and the driving component. The positioning component includes a first mounting hole disposed in the connecting plate and communicating with the mounting groove, and a positioning rod that is connected to the first mounting hole. The positioning rod extends at least partially into the mounting groove.

[0011] As described above, a substrate holder for vacuum coating includes a mounting assembly comprising a connecting rod passing through the connecting plate and the driving member, and a stop connector connected to the connecting rod. The connecting plate also has second mounting holes located on both sides of the mounting groove, and the driving member has third mounting holes corresponding to the second mounting holes. The two second mounting holes and the third mounting holes are used for the connecting rod to pass through. One end of the connecting rod has a limiting part, and the stop connector is located at the end of the connecting rod away from the limiting part. The connecting rod is fixed by the limiting part and the stop connector.

[0012] As described above, in a substrate holder for vacuum coating, the bottom of the connecting plate is further provided with a first auxiliary sliding surface located on at least one side of the mounting groove, and at least one end of the first auxiliary sliding surface is provided with a second guide portion, and the second guide portion has a second preset angle with the bottom of the connecting plate.

[0013] As described above, a substrate holder for vacuum coating is provided on both sides of the connecting plate, and a second auxiliary sliding surface is provided at least one end of the second auxiliary sliding surface, and the third guide portion and the second auxiliary sliding surface have a third preset angle.

[0014] As described above, a substrate holder for vacuum coating includes a main frame, a first clamping assembly and a second clamping assembly respectively disposed inside the main frame, a substrate fixing position disposed in the main frame, the first clamping assembly and the second clamping assembly respectively disposed on opposite sides of the substrate fixing position, the main frame also having a third auxiliary sliding surface located above the substrate fixing position, and the third auxiliary sliding surface being provided on both sides of the main frame.

[0015] As described above, a substrate holder for vacuum coating further includes a baffle strip detachably disposed in the substrate fixing position, which divides the substrate fixing position into a first fixing position and a second fixing position.

[0016] Compared with the prior art, the beneficial effects of this utility model are: This invention provides a substrate holder for vacuum coating. The substrate holder is movably disposed in a conveying device. By setting a driving component in the substrate holder, the driving component can be connected to the conveying device for transmission, thereby directly providing initial moving power to the substrate holder. The driving component can form the main power source for the movement of the substrate holder, reducing the dependence of the substrate holder on manual pushing and additional mechanical equipment such as robotic arms. This helps to reduce the time for loading and unloading the substrate holder and transferring it between different workstations, thereby improving the conveying efficiency of the substrate holder.

[0017] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0018] Figure 1 A three-dimensional embodiment of the substrate holder of this utility model Figure 1 ; Figure 2 for Figure 1 Enlarged view of part A in the image; Figure 3 A three-dimensional embodiment of the substrate holder of this utility model Figure 2 ; Figure 4 for Figure 3 Enlarged view of section C in the image; Figure 5 This is a partially enlarged view of the drive component of this novel invention; Figure 6 This is a bottom view of the drive component and connecting plate of this novel invention; Figure 7 for Figure 3 The B-B section view in the diagram; Figure 8 The conveying state of the substrate holder in one embodiment of this utility model. Figure 1 ; Figure 9 for Figure 8 Enlarged view of part D in the image; Figure 10 The conveying state of the substrate holder in one embodiment of this utility model. Figure 2 ; Figure 11 for Figure 10 E-E section in Figure 1 ; Figure 12 for Figure 10 E-E section in Figure 2 ; Figure 13 This is a perspective view of another embodiment of the substrate holder of this utility model. Detailed Implementation

[0019] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings. The described embodiments are merely some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0020] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0021] Furthermore, the use of terms such as "first" and "second" in this utility model is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0022] Example 1: like Figure 1As shown in Figure 12, the dashed lines represent the substrate products that the substrate holder 100 can load. This utility model provides a substrate holder for vacuum coating. The substrate holder 100 is movably disposed in a conveying device 200. The conveying device 200 can be an independently operating transfer device or a conveying device 200 installed in a vacuum coating production line. This utility model does not make specific limitations. Specifically, the substrate holder 100 includes a frame assembly 110, a substrate fixing position 120 disposed in the frame assembly 110, and a drive assembly 130 connected to the frame assembly 110 and disposed on one side of the substrate fixing position 120. The substrate fixing position 120 is used to support the substrate. The substrate holder 100 is connected to the conveying device 200 through the drive assembly 130 to drive the substrate holder 100 to move in the conveying device 200. In practical applications, the conveying device 200 has a substrate holder receiving cavity 210 located below and connected to the drive assembly 130. The driving component 130 is connected to the power device 220. When the substrate holder 100 is transported to the conveying device 200, the power device 220 drives the driving component 130, and the driving component 130 drives the substrate holder 100 to move along a preset path to the corresponding substrate holder receiving cavity 210 in the conveying device 200. In this utility model, by setting the driving component 130 in the substrate holder 100, the driving component 130 can be connected to the conveying device 200, thereby directly providing initial moving power for the substrate holder 100. The driving component 130 can form the main power source for the movement of the substrate holder 100, reducing the dependence of the substrate holder 100 on manual pushing and additional mechanical equipment such as robotic arms, which helps to reduce the loading and unloading time of the substrate holder 100 and the transfer time between different workstations, thereby improving the conveying efficiency of the substrate holder 100.

[0023] Specifically, such as Figure 1 and Figure 2 As shown, the drive assembly 130 includes an assembly assembly 131 disposed at the bottom of the frame assembly 110 and a drive member 133 connected to the assembly assembly 131. The drive member 133 is mounted on the bottom of the frame assembly 110 through the assembly assembly 131. The drive member 133 extends at least partially to the underside of the assembly assembly 131 and is connected to the conveying device 200 in a transmission manner. Mounting the drive member 133 on the bottom of the frame assembly 110 through the assembly assembly 131 facilitates the disassembly, assembly, maintenance, and replacement of the drive member 133.

[0024] As an optional embodiment of the drive element 133, such as Figure 2 , 4As shown in Figures 7 and 9, the driving member 133 has a meshing portion 1331 at its bottom. The meshing portion 1331 extends along the length direction of the driving member 133 and can extend to the lower side of the assembly assembly 131. It is connected to the conveying device 200 through the meshing portion 1331. In this embodiment, the driving member 133 extends along the length direction of the substrate holder 100. The bottom of the driving member 133 is set as the meshing portion 1331. When the driving member 133 is installed at the bottom of the assembly assembly 131, at least the meshing portion 1331 extends to the lower side of the assembly assembly 131 to be connected to the power device 220 in the conveying device 200. Correspondingly, the power device 220 in the conveying device 200 includes a motor module 221 and a drive gear 222 connected to the motor module 221. The drive gear 222 is connected to the meshing portion 1331. The meshing part 1331 is correspondingly engaged. In practical applications, the motor module 221 can drive the drive gear 222 to rotate, and through the meshing transmission between the drive gear 222 and the meshing part 1331, the substrate holder 100 can be driven to move along a preset path in the conveying device 200, thereby providing initial moving power for the substrate holder 100, improving the loading and unloading efficiency and transfer efficiency of the substrate holder 100, and thus improving the conveying efficiency of the substrate holder 100. In addition, in this embodiment, the drive component 133 is set as a drive component 133 with a rack and pinion, which has high transmission efficiency of meshing transmission, which is conducive to improving the moving speed of the substrate holder 100. Moreover, the rack and pinion structure is relatively simple and small in size, and will not affect the overall volume of the substrate holder 100, which is convenient for the modification and application of existing substrate holders 100, and greatly reduces the modification cost of the substrate holder 100 and the corresponding conveying device 200.

[0025] In practical applications, when the meshing part 1331 meshes with the drive gear 222, the forward or reverse rotation of the drive gear 222 changes the direction of movement of the substrate holder 100 in the conveying device 200, thereby allowing the substrate holder 100 to enter and exit the conveying device 200, thus realizing the loading and unloading of the substrate holder 100 in the conveying device 200. For example, when the drive gear 222 rotates forward, it can drive the substrate holder 100 into the conveying device 200; when the drive gear 222 rotates in reverse, it can drive the substrate holder 100 out of the conveying device 200. The correspondence between the rotation direction of the drive gear 222 and the movement direction of the substrate holder 100 can be adjusted and set according to the actual situation, and this utility model does not impose specific limitations.

[0026] Furthermore, such as Figure 5As shown, at least one end of the meshing portion 1331 is provided with a first guide portion 1332. A first preset angle S1 is formed between the first guide portion 1332 and the meshing portion 1331. The first guide portion 1332 guides the meshing portion 1331 to be connected to the conveying device 200 via a transmission connection. In this embodiment, the first guide portion 1332 is inclined around the first preset angle S1 at the end of the meshing portion 1331. The meshing portion 1331 extends to the first guide portion 1332, and the tooth profile bottom surface of the first guide portion 1332 is arranged corresponding to its inclined direction. In practical applications, when the substrate holder 100 is connected to the power device 220 in the conveying device 200, the substrate holder 100 can first pass through the first guide portion 1332. The drive component 133 engages with the drive gear 222, and then transitions to the engagement part 1331 through the first guide part 1332, which in turn engages with the drive gear 222. This reduces the initial impact when the drive component 133 engages with the drive gear 222, ensuring a smooth introduction of the engagement part 1331. This allows for smooth docking between the substrate holder 100 and the power device 220, further improving the transport efficiency of the substrate holder 100. Furthermore, the substrate holder 100 can be guided by the first guide part 1332 to engage with the drive gear 222, achieving automatic alignment of the engagement positions between the drive component 133 and the drive gear 222 without the need for high-precision pre-alignment, thus reducing the precision requirements of the control system of the conveying device 200.

[0027] As another optional embodiment of the drive element 133, such as Figure 2 and Figure 4 As shown, the first guide portion 1332 is provided at both ends of the meshing portion 1331. In practical applications, the operator does not need to distinguish between the front and back of the substrate holder 100, which further improves the docking efficiency between the substrate holder 100 and the conveying device 200.

[0028] As an optional embodiment of the assembly component 131, such as Figure 2As shown, the assembly assembly 131 includes a connecting plate 1311 disposed between the drive member 133 and the frame assembly 110, and a first mounting assembly 1312 disposed between the connecting plate 1311 and the drive member 133. The bottom of the connecting plate 1311 is provided with a mounting groove 13111 for mounting the drive member 133. The drive member 133 is fixedly mounted in the mounting groove 13111 by the first mounting assembly 1312, and the drive member 133 extends at least partially to the lower side of the mounting groove 13111 and is connected to the conveying device 200 for transmission. In this embodiment, due to the length of the substrate holder 100... The length is relatively long. The driving member 133 extends along the length direction of the substrate holder 100 to form a plate-shaped driving member 133 with a toothed bottom. The mounting groove 13111 can be set as a U-shaped long groove that opens downwards, which is conducive to the driving member 133 being installed in the mounting groove 13111. Furthermore, the first mounting assembly 1312 is provided in several parts and is spaced apart along the length direction of the substrate holder 100 to improve the installation stability of the driving member 133, thereby improving the stability of the meshing transmission between the driving member 133 and the power device 220 in the conveying device 200, so as to further improve the conveying efficiency of the substrate holder 100.

[0029] Further optional, such as Figure 7As shown, the first mounting assembly 1312 includes a connecting rod 13121 passing through the connecting plate 1311 and the driving member 133, and a stop connecting member 13122 connected to the connecting rod 13121. The connecting plate 1311 also has second mounting holes 13112 located on both sides of the mounting groove 13111. The driving member 133 has a third mounting hole 1333 corresponding to the second mounting holes 13112. The third mounting hole 1333 is located on the upper side of the meshing part 1331. The two second mounting holes 13112 and the third mounting hole 1333 are connected together. Mounting hole 1333 is used for the connecting rod 13121 to pass through. One end of the connecting rod 13121 is provided with a limiting part 131211. A stop connector 13122 is provided at the end of the connecting rod 13121 away from the limiting part 131211. The connecting rod 13121 is fixed by the limiting part 131211 and the stop connector 13122. In this embodiment, the connecting rod 13121 is arranged along the thickness direction of the connecting plate 1311 and the driving member 133, wherein one end of the connecting rod 13121 is provided with a limiting part 131211. 211. During assembly, the driving component 133 is fitted into the mounting groove 13111, aligning the third mounting hole 1333 with the second mounting holes 13112 on both sides, and passing through the mounting channel formed by the two second mounting holes 13112 and the third mounting hole 1333 via a connecting rod 13121. One end of the connecting rod 13121 abuts against the outer wall of the connecting plate 1311 via the limiting part 131211, and the other end of the connecting rod 13121 is connected to the stop connecting member 13122, and the stop connecting member 13122... 2. It abuts against the outer wall of the other side of the connecting plate 1311, thereby fixing the connecting rod 13121 through the limiting part 131211 and the stop connecting member 13122, effectively preventing the connecting rod 13121 from disengaging from the driving member 133 and the connecting plate 1311 along the thickness direction, so that the driving member 133 is fixedly connected to the connecting plate 1311. The structure is simple, easy to assemble, and can improve the installation stability of the driving member 133. Optionally, the stop connecting member 13122 can be set as a retaining ring, a pin, etc., and this utility model does not make specific limitations.

[0030] In another optional embodiment of the first mounting assembly 1312, to further improve the assembly stability of the connecting rod 13121, such as... Figure 7 As shown, the connecting rod 13121 passes through the bushing 13123 into the third mounting hole 1333. The maximum inner diameter of the third mounting hole 1333 is larger than the inner diameter of the second mounting hole 13112, which helps to reduce the difficulty of aligning the third mounting hole 1333 with the second mounting hole 13112, thereby reducing the assembly difficulty of the drive component 133 and the connecting plate 1311.

[0031] As another alternative embodiment of the assembly component 131, such as Figure 7 As shown, the assembly assembly 131 further includes a positioning assembly 132 disposed between the connecting plate 1311 and the driving member 133. The positioning assembly 132 includes a first mounting hole 1321 disposed in the connecting plate 1311 and communicating with the mounting groove 13111, and a positioning rod 1322 cooperating with the first mounting hole 1321. The positioning rod 1322 extends at least partially into the mounting groove 13111 to position the driving member 133, so that the driving member 133 extends at least partially to the lower side of the mounting groove 13111. In this embodiment, the first mounting hole 1321 is disposed in the upper part of the mounting groove 13111. The first mounting hole 1321 extends upward from the mounting groove 13111 in the connecting plate 1311 along the height direction of the connecting plate 1311. During assembly, the positioning rod 1322 can be inserted first. Within the first mounting hole 1321, a portion of the positioning rod 1322 extends into the mounting groove 13111 and abuts against the top of the driving member 133. By providing the positioning rod 1322 on the upper part of the driving member 133, the installation position of the driving member 133 within the mounting groove 13111 can be quickly positioned, thereby enabling the third mounting hole 1333 to quickly align with the second mounting holes 13112 on both sides. This reduces the assembly difficulty of the driving member 133 and improves the assembly efficiency of the substrate holder 100. Furthermore, when the driving member 133 is fixedly connected to the connecting plate 1311 via the first mounting assembly 1312, the positioning rod 1322 and the connecting rod 13121 can clamp the driving member 133 in the height direction of the connecting plate 1311, further enhancing the installation stability of the driving member 133.

[0032] Optionally, there are multiple first mounting components 1312, and each first mounting component 1312 is provided with a corresponding positioning component 132.

[0033] As another optional embodiment of the assembly component 131, in order to further improve the conveying efficiency of the substrate holder 100, such as... Figure 7 and Figure 12As shown, the bottom of the connecting plate 1311 is also provided with a first auxiliary sliding surface 13113 located on at least one side of the mounting groove 13111, that is, the first auxiliary sliding surface 13113 is provided on at least one side of the driving member 133. In this embodiment, the first auxiliary sliding surface 13113 is formed through the bottom of the connecting plate 1311, and the engaging part 1331 is lower than the first auxiliary sliding surface 13113, so that the engaging part 1331 and the first auxiliary sliding surface 13113 are misaligned, which helps to ensure the engagement part 13111. The transmission connection between 31 and the power unit 220 in the conveying device 200 is as follows: Correspondingly, the conveying device 200 also includes a support wheel assembly 230 located at the lower part of the substrate holder receiving cavity 210. Several support wheel assemblies 230 are provided and spaced apart along the moving path of the substrate holder 100. The power unit 220 is located between two adjacent support wheel assemblies 230. Each support wheel assembly 230 includes a support wheel 231 rotatably disposed in the conveying device 200, and each support wheel 231 has an outer peripheral wall... The device is provided with a relief groove 2311 corresponding to the meshing part 1331 and a sliding surface 2312 corresponding to the first auxiliary sliding surface 13113. The first auxiliary sliding surface 13113 contacts the sliding surface 2312. In practical applications, the rotation of the drive gear 222 causes meshing transmission between the drive gear 222 and the meshing part 1331, thereby driving the substrate holder 100 to move along a preset path in the conveying device 200. At the same time, the first auxiliary sliding surface 13113 and the sliding surface 2312 can interact. Sliding friction is generated between the substrate holder 100 to further drive the substrate holder 100 to move, which further improves the smoothness of movement and conveying efficiency of the substrate holder 100 in the conveying device 200. In addition, each of the support wheel assemblies 230 can also support the substrate holder 100, so as to reduce the load on the drive gear 222 and extend the service life of the drive gear 222. Further optionally, the first auxiliary sliding surface 13113 is provided on both sides of the mounting groove 13111, and the sliding surface 2312 is provided on both sides of the clearance groove 2311 of the support wheel 231.

[0034] Furthermore, such as Figure 5As shown, at least one end of the first auxiliary sliding surface 13113 is provided with a second guide portion 13114, and the second guide portion 13114 and the bottom of the connecting plate 1311 have a second preset included angle S2. In this embodiment, the second guide portion 13114 is inclinedly disposed at the end of the first auxiliary sliding surface 13113. Optionally, the second guide portion 13114 can be configured as a straight surface or an arc surface, which is not specifically limited in this utility model. In practical applications, when the substrate holder 100 is connected to the conveying device 200, the second guide portion 13114 guides the first auxiliary sliding surface 13113 to connect with the sliding surface 2312, so as to facilitate the smooth connection between the connecting plate 1311 and the support wheel 231, thereby further improving the conveying efficiency of the substrate holder 100. Further optionally, the second guide portion 13114 is provided at both ends of the first auxiliary sliding surface 13113.

[0035] As another alternative embodiment of the assembly component 131, such as Figure 2 and Figure 12 As shown, the connecting plate 1311 is also provided with second auxiliary sliding surfaces 13115 on both sides. The two opposite outer walls of the connecting plate 1311 form the second auxiliary sliding surfaces 13115. The two second auxiliary sliding surfaces 13115 are located at the upper part of the bottom of the connecting plate 1311. Correspondingly, the conveying device also includes a baffle wheel assembly 250 provided on one side of the support wheel assembly. The baffle wheel assembly 250 includes a rotatable baffle wheel. The two baffle wheel assemblies 250 further position the substrate frame 100 on both sides, thereby improving the movement stability of the substrate frame 100. At the same time, the outer wall surface of the baffle wheel can contact the second auxiliary sliding surface 13115 in the substrate frame 100. When the substrate frame 100 moves in the conveying device 200, the substrate frame 100 generates sliding friction between the second auxiliary sliding surface 13115 and the baffle wheel to further drive the substrate frame 100 to move, further improving the movement smoothness and conveying efficiency of the substrate frame 100 in the conveying device 200.

[0036] Furthermore, such as Figure 6As shown, at least one end of the second auxiliary sliding surface 13115 is provided with a third guide portion 13116, and the third guide portion 13116 and the second auxiliary sliding surface 13115 have a third preset included angle S3; in this embodiment, the third guide portion 13116 is located above the second guide portion 13114, and the third guide portion 13116 is inclined from the second auxiliary sliding surface 13115 toward the substrate holder 100. Optionally, the third guide portion 13116 can be set as a straight surface or an arc surface. The novel design is not specifically limited; in practical applications, when the substrate holder 100 is connected to the conveying device 200, the second auxiliary sliding surface 13115 is guided by the third guide part 13116 to connect with the baffle wheel, so as to facilitate the smooth entry and exit of the connecting plate 1311 into and out of the conveying device 200, further improving the smoothness of the movement of the substrate holder 100, thereby further improving the conveying efficiency of the substrate holder 100; further optionally, the third guide part 13116 is provided at both ends of the second auxiliary sliding surface 13115.

[0037] On the other hand, in another alternative embodiment of the substrate holder 100, such as Figure 3 As shown, the frame assembly 110 includes a main frame 111, a first clamping assembly 112a and a second clamping assembly 112b respectively disposed inside the main frame 111, and a substrate fixing position 120 disposed in the main frame 111. The first clamping assembly 112a and the second clamping assembly 112b are respectively disposed on opposite sides of the substrate fixing position 120, and the substrate product is clamped and fixed by the first clamping assembly 112a and the second clamping assembly 112b. The main frame 111 also has a third auxiliary sliding surface 1110 located on the upper side of the substrate fixing position 120, and the third auxiliary sliding surface 1110 is provided on both sides of the main frame 111. In this embodiment, the... The main frame 111 has a third auxiliary sliding surface 1110 on both the front and rear sides. The third auxiliary sliding surface 1110 can be formed by the outer wall surface of the front and rear sides of the main frame 111. Correspondingly, the conveying device 200 also includes a plurality of guide wheel assemblies 240 disposed on one side of the substrate holder receiving cavity 210. The guide wheel assembly 240 is disposed above the substrate holder receiving cavity 210, and the guide wheel assembly 240 includes an axially rotatable guide wheel 241. When the substrate holder 100 moves in the conveying device 200, sliding friction is generated between the guide wheel 241 and the third auxiliary sliding surface 1110 to further improve the conveying efficiency of the substrate holder 100.

[0038] As an optional embodiment of the main frame 111, such as Figure 3As shown, the main frame 111 includes a first assembly plate 1111 and a second assembly plate 1112 arranged vertically opposite each other, and a first vertical rod 1113 and a second vertical rod 1114 arranged horizontally opposite each other. The first assembly plate 1111, the first vertical rod 1113, the second assembly plate 1112 and the second vertical rod 1114 enclose the substrate fixing position 120. The bottom of the first assembly plate 1111 is provided with a plurality of first clamping components 112a, and the top of the second assembly plate 1112 is provided with a plurality of second clamping components 112b. The first clamping assembly 112a and the second clamping assembly 112b are arranged in a one-to-one correspondence, and the substrate product is fixed between the first clamping assembly 112a and the second clamping assembly 112b. The third auxiliary sliding surface 1110 is provided on the outer wall of the first assembly plate 1111. The frame assembly 110 has a simple structure, which is conducive to the disassembly and maintenance of the frame assembly 110, so as to improve the coating quality of the product, extend the service life of the substrate holder 100, and reduce the overall weight of the substrate holder 100, thereby reducing the transportation burden of the substrate holder 100.

[0039] Further optional, such as Figure 4 As shown, the connecting plate 1311 is installed on the lower part of the second assembly plate 1112 via a first connecting accessory 150. The connecting assembly 150 includes the first connecting accessory, which passes through the second assembly plate 1112 and the connecting plate 1311 along the height direction of the substrate holder 100. The second assembly plate 1112 has a first clearance opening 1115 corresponding to the connecting assembly 150 to facilitate the installation of the first connecting accessory. The connecting assembly 150 has a simple structure and is easy to assemble and disassemble the drive assembly 130. Further, optionally, the connecting assembly 150 has several components spaced apart along the length direction of the substrate holder 100 to enhance the installation stability of the drive assembly 130. Optionally, the first connecting accessory can be configured as a connecting pin, screw, bolt, or other connecting accessory suitable for the installation of the substrate holder 100. This utility model does not impose specific limitations.

[0040] To reduce the production cost and difficulty of the substrate holder, the first clamping assembly 112a and the second clamping assembly 112b adopt similar structures. As an optional embodiment of the first clamping assembly 112a and the second clamping assembly 112b, the following description uses the first clamping assembly 112a as an example. Figure 3As shown, the first clamping assembly 112a includes a mounting bracket 1121 connected to the main frame 111, a mounting base 1122 connected to the mounting bracket 1121, and a second connecting accessory 1123 connected to the mounting base 1122. One end of the second connecting accessory can extend into the substrate fixing position to contact the substrate product, thereby clamping and fixing the substrate product through the first clamping assembly 112a and the second clamping assembly 112b, which helps to improve the conveying stability of the substrate product and reduce the difficulty of loading and unloading the substrate product. Furthermore, the mounting base 1122 is provided with a second clearance opening 1124 to facilitate the installation of the second connecting accessory 1123. The second clearance opening 1124 is provided through the thickness direction of the mounting base 1122. Optionally, the second connecting accessory 1123 can be set as a connecting pin, bolt, or other connecting accessory suitable for the installation of the substrate holder 100. This utility model does not make specific limitations, and the end of the second connecting accessory that contacts the substrate product can be set as a PEEK contact end, which helps to protect the substrate product.

[0041] Example 2: Based on the above-described embodiment one, this utility model also provides another optional embodiment of the substrate holder 100, such as... Figure 3 and Figure 13 As shown, the substrate holder 100 also includes a baffle 140 detachably disposed in the substrate fixing position 120. The baffle 140 divides the substrate fixing position 120 into a first fixing position 121 and a second fixing position 122, which is beneficial for adjusting the size and number of substrate fixing positions 120 according to different specifications of substrates, thereby improving the versatility and adaptability of the substrate holder 100. In practical applications, when the baffle 140 is removed, the substrate fixing position 120 increases in size, and the substrate holder 100 can carry larger-sized substrates. When the baffle 140 is installed in the substrate fixing position 120, it helps to divide the larger space of the substrate fixing position 120 into two smaller spaces, the first fixing position 121 and the second fixing position 122. In this case, the substrate holder 100 can carry smaller-sized substrates and can transport two smaller-sized substrates at once.

[0042] Furthermore, the main frame is provided with corresponding first mounting part 1131 and second mounting part 1132 on its upper and lower sides, respectively. For example, the first mounting part 1131 is located in the first assembly plate 1111, and the second mounting part 1132 is located in the second assembly plate 1112 and is opposite to the first mounting part. The stop bar 140 is detachably arranged between the first mounting part 1131 and the second mounting part 1132. Optionally, the two ends of the stop bar 140 can be connected to the first mounting part 1131 and the second mounting part 1132 respectively by connecting pins, screws or bolts. The first mounting part 1131 and the second mounting part 1132 can be set as corresponding internal threaded holes. This utility model does not make specific limitations.

[0043] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A substrate holder for vacuum coating, characterized by The substrate holder (100) includes a frame assembly (110), a substrate fixing position (120) disposed in the frame assembly (110), and a drive assembly (130) connected to the frame assembly (110) and disposed on one side of the substrate fixing position (120). The substrate holder (100) is connected to the conveying device (200) via the drive assembly (130) to drive the substrate holder (100) to move in the conveying device (200).

2. The substrate holder for vacuum coating according to claim 1, wherein The drive assembly (130) includes an assembly assembly (131) located at the bottom of the frame assembly (110) and a drive member (133) connected to the assembly assembly (131). The drive member (133) extends at least partially to the underside of the assembly assembly (131) and is connected to the conveying device (200) in a transmission manner.

3. The substrate holder for vacuum coating according to claim 2, wherein The drive member (133) has a meshing part (1331) at the bottom. The meshing part (1331) extends along the length of the drive member (133). The meshing part (1331) can extend to the lower side of the assembly (131) and is connected to the conveying device (200) through the meshing part (1331). The meshing part (1331) has a first guide part (1332) at at least one end. The first guide part (1332) and the meshing part (1331) have a first preset angle (S1). The meshing part (1331) is guided to be connected to the conveying device (200) through the first guide part (1332).

4. The substrate holder for vacuum coating according to claim 2, wherein The assembly assembly (131) includes a connecting plate (1311) disposed between the drive member (133) and the frame assembly (110), and a mounting assembly (1312) disposed between the connecting plate (1311) and the drive member (133). The bottom of the connecting plate (1311) is provided with a mounting groove (13111) for mounting the drive member (133). The drive member (133) is fixedly mounted in the mounting groove (13111) by the mounting assembly (1312), and the drive member (133) extends at least partially to the underside of the mounting groove (13111).

5. The substrate holder for vacuum coating according to claim 4, wherein The assembly assembly (131) further includes a positioning assembly (132) disposed between the connecting plate (1311) and the drive member (133). The positioning assembly (132) includes a first mounting hole (1321) disposed in the connecting plate (1311) and communicating with the mounting groove (13111), and a positioning rod (1322) cooperating with the first mounting hole (1321). The positioning rod (1322) extends at least partially into the mounting groove (13111).

6. The substrate holder for vacuum coating as claimed in claim 4, wherein The mounting assembly (1312) includes a connecting rod (13121) passing through the connecting plate (1311) and the driving member (133), and a stop connector (13122) connected to the connecting rod (13121). The connecting plate (1311) is also provided with second mounting holes (13112) located on both sides of the mounting groove (13111), and the driving member (133) is provided with a third mounting hole (1333) corresponding to the second mounting holes (13112). The two second mounting holes (13112) and the third mounting hole (1333) are used for the connecting rod (13121) to pass through. One end of the connecting rod (13121) is provided with a limiting part (131211). The stop connector (13122) is provided at the end of the connecting rod (13121) away from the limiting part (131211). The connecting rod (13121) is fixed by the limiting part (131211) and the stop connector (13122).

7. The substrate holder for vacuum coating as claimed in claim 4, wherein The bottom of the connecting plate (1311) is also provided with a first auxiliary sliding surface (13113) located on at least one side of the mounting groove (13111). At least one end of the first auxiliary sliding surface (13113) is provided with a second guide part (13114). The second guide part (13114) and the bottom of the connecting plate (1311) have a second preset angle (S2).

8. The substrate holder for vacuum coating as claimed in claim 4, wherein The connecting plate (1311) is also provided with a second auxiliary sliding surface (13115) on both sides. At least one end of the second auxiliary sliding surface (13115) is provided with a third guide part (13116). The third guide part (13116) and the second auxiliary sliding surface (13115) have a third preset angle (S3).

9. The substrate holder for vacuum coating as claimed in claim 1, wherein The frame assembly (110) includes a main frame (111), a first clamping assembly (112a) and a second clamping assembly (112b) respectively disposed inside the main frame (111), a substrate fixing position (120) disposed in the main frame (111), the first clamping assembly (112a) and the second clamping assembly (112b) respectively disposed on opposite sides of the substrate fixing position (120), the main frame (111) is also provided with a third auxiliary sliding surface (1110) located on the upper side of the substrate fixing position (120), and the third auxiliary sliding surface (1110) is provided on both sides of the main frame (111).

10. A substrate holder for vacuum coating as claimed in any one of claims 1 to 9, characterized in that The substrate holder (100) also includes a baffle (140) detachably disposed in the substrate fixing position (120), which divides the substrate fixing position (120) into a first fixing position (121) and a second fixing position (122).

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