Tail gas dilution system

Abstract

This utility model discloses a tail gas dilution system for diluting the working gas discharged from a surface treatment device. The system includes an extraction device and a storage container. At least one extraction device is used to extract the working gas from inside the surface treatment device. The extraction device has a purge inlet, a surface treatment inlet, and a vacuum outlet. The purge inlet connects to an external purge gas source, the surface treatment inlet connects to the surface treatment device, and the extraction outlet connects to a tail gas treatment device. The storage container stores the purge gas discharged from the extraction device. It has a storage inlet and a storage outlet, both connected to the vacuum outlet. The tail gas dilution system provided in this application can recover the inert gas used during purging and reuse it when diluting the working gas, thus saving on the amount of inert gas used.

Description

Technical Field

[0001] This application relates to the field of battery production equipment technology, and in particular to an exhaust gas dilution system. Background Technology

[0002] In the photovoltaic and semiconductor manufacturing industries, vacuum pumping devices are widely used in plasma-enhanced chemical vapor deposition processes for vacuuming chambers and transporting working gases. Traditional vacuum pumping systems require purging with inert gas during operation to prevent shutdown due to lack of working gas. Additionally, when the working gas contains hazardous components, diluting inert gas must be introduced into the exhaust pipe to reduce gas concentration and prevent pipe blockage or explosion risks.

[0003] However, existing technologies do not distinguish between working and non-working conditions. Regardless of whether the surface treatment equipment is running or not, it relies on high-purity inert gas for purging, resulting in huge consumption of inert gas and high costs. Utility Model Content

[0004] This utility model discloses an exhaust gas dilution system that recovers the purging gas used for purging through a gas storage container and reuses it when diluting the working gas, thereby saving the amount of purging gas used.

[0005] To achieve the above objectives, the first aspect of this utility model discloses an exhaust gas dilution system for diluting the working gas discharged from surface treatment equipment. The exhaust gas dilution system includes:

[0006] An extraction device, comprising at least one device, is provided for extracting working gas from inside the surface treatment equipment. The extraction device has a purge inlet, a surface treatment inlet, and a vacuum outlet. The purge inlet is connected to an external purge gas source, the surface treatment inlet is connected to the surface treatment equipment, and the extraction outlet is connected to an exhaust gas treatment device. The purge inlet, the surface treatment inlet, and the vacuum outlet are all connected together.

[0007] A gas storage container is used to store the purge gas discharged by the pumping device. The gas storage container has a gas storage inlet and a gas storage outlet. The gas storage inlet is connected to the vacuum outlet, and the gas storage outlet is connected to the vacuum outlet.

[0008] As an optional implementation, the exhaust gas dilution system further includes a piping unit, which includes: an intake pipe for connecting the external purge gas source to the purge inlet; an intake valve disposed on the intake pipe for controlling the opening and closing of the intake pipe; an exhaust pipe for connecting the vacuum outlet to the exhaust gas treatment equipment; and an exhaust valve disposed on the exhaust pipe for controlling the opening and closing of the exhaust pipe.

[0009] As an optional implementation, the pipeline unit further includes: a gas storage pipeline connecting the gas storage inlet and the vacuum outlet; a gas storage valve disposed on the gas storage pipeline for controlling the opening and closing of the gas storage pipeline; a connecting pipeline connecting the gas storage outlet and the vacuum outlet; and a connecting valve disposed on the connecting pipeline for controlling the opening and closing of the connecting pipeline.

[0010] As an optional implementation, the piping unit further includes: an outlet pipe, which is connected to the connecting pipe and the vacuum outlet; a three-way valve, the first port of which is connected to the vacuum outlet via the outlet pipe, the second port of which is connected to the exhaust gas treatment equipment via the tailpipe, and the third port of which is connected to the gas storage container via the gas storage pipe.

[0011] As an optional implementation, the pipeline unit further includes: a circulation pipeline connecting the gas storage outlet and the gas inlet pipeline; and a circulation valve disposed in the circulation pipeline for controlling the opening and closing of the circulation pipeline.

[0012] As an optional implementation, the pipeline unit further includes: a gas supply pipeline, which is connected to the external purging gas source and the connecting pipeline; and a gas supply valve, which is disposed in the gas supply pipeline and is used to control the opening and closing of the gas supply pipeline.

[0013] As an optional implementation, the exhaust gas dilution system further includes a filter element disposed in the gas storage pipeline, the filter element being used to filter the gas flowing through the gas storage pipeline.

[0014] As an optional implementation, the surface treatment equipment includes a first surface treatment equipment and a second surface treatment equipment, the air extraction device includes a first air extraction device and a second air extraction device, the first air extraction device and the first surface treatment equipment are correspondingly arranged, and the second air extraction device and the second surface treatment equipment are correspondingly arranged; the pipeline unit includes a first pipeline unit corresponding to the first air extraction device and a second pipeline unit corresponding to the second air extraction device.

[0015] As an optional implementation, the gas storage pipeline of the first pipeline unit is connected to the gas inlet pipeline of the second pipeline unit so that the purging gas discharged from the first extraction device can purge the second extraction device.

[0016] As an optional implementation, the pumping device includes a first vacuum pump and a second vacuum pump. The first vacuum pump has a purge inlet, a surface treatment inlet, and an outlet, while the second vacuum pump has a vacuum outlet. The outlet of the first vacuum pump is connected to the inlet of the second vacuum pump, and the purge inlet of the first vacuum pump serves as the purge inlet of the pumping device, the surface treatment inlet of the first vacuum pump serves as the surface treatment inlet of the pumping device, and the vacuum outlet of the second vacuum pump serves as the outlet of the pumping device.

[0017] Compared with the prior art, the beneficial effects of this application are:

[0018] The exhaust gas dilution system provided in this application overcomes the limitation of traditional exhaust gas dilution systems, which continuously consume large amounts of high-purity inert gas regardless of whether the surface treatment equipment is operating, by coordinating multiple ports of the extraction device and the energy storage of the gas storage container. During operation, the purge gas supply can be stopped, and the working gas can be diluted using the gas in the storage container, reducing operating costs. The exhaust gas dilution system optimizes the utilization efficiency of the purge gas, improves the reliability and economy of exhaust gas dilution, and ensures efficient, energy-saving, and environmentally friendly operation of the entire production process. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the exhaust gas dilution system provided in the embodiments of this application;

[0021] Figure 2 This is a schematic diagram of the connection structure of the pipeline unit provided in the embodiments of this application;

[0022] Figure 3 This is a simplified structural diagram of the air extraction device provided in the embodiments of this application.

[0023] Explanation of reference numerals in the attached figures:

[0024] 100 - Exhaust gas dilution system; 200 - Surface treatment equipment; 201 - First surface treatment equipment; 202 - Second surface treatment equipment; 300 - External purging gas source; 400 - Exhaust gas treatment equipment; 1 - Extraction device; 1a - First extraction device; 1b - Second extraction device; 11 - First vacuum pump; 12 - Second vacuum pump; 2 - Gas storage container; 3 - Piping unit; 3a - First piping unit; 3b - Second piping unit; 31 - Inlet pipe; 311 - Inlet valve; 32 - Tail exhaust pipe; 321 - Tail exhaust valve; 33 - Gas storage pipe; 331 - Gas storage valve; 34 - Connecting pipe; 341 - Connecting valve; 35 - Outlet pipe; 36 - Three-way valve; 37 - Circulation pipe; 371 - Circulation valve; 38 - Make-up gas pipe; 381 - Make-up gas valve; 4 - Filter element. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0026] In this application, the terms "upper," "lower," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.

[0027] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0028] Furthermore, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0029] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0030] In the photovoltaic and semiconductor manufacturing fields, plasma-enhanced chemical vapor deposition (PECVD) is one of the core processes for preparing functional thin films. PECVD utilizes a vacuum system to achieve rapid evacuation of the deposition chamber, precise delivery of process gases, and safe removal of reaction byproducts. Traditional evacuation systems typically consist of a vacuum pump unit, gas path control valves, and an exhaust gas treatment unit.

[0031] In existing technologies, the evacuation device requires a continuous flow of inert gas (such as nitrogen or argon) for purging during operation. This is primarily to prevent the vacuum pump from operating in a "dry running" state due to a lack of working gas. Dry running of the vacuum pump can lead to rapid wear of internal mechanical components due to lack of lubrication and cooling, and may even cause equipment shutdown. Furthermore, when the process gas contains flammable or explosive components (such as hydrogen or silane) or easily condensable byproducts, diluting inert gas must be injected into the exhaust pipeline to reduce the concentration of hazardous gases and prevent pipeline blockage or explosion risks.

[0032] However, current technology does not differentiate between working and non-working conditions. Regardless of whether the surface treatment equipment is running, it relies on continuous purging with high-purity inert gas. This directly leads to high inert gas consumption, resulting in high production costs, imposing an economic burden on enterprises, and to some extent limiting the industry's development towards more efficient and economical methods.

[0033] In view of this, this application discloses a tail gas dilution system, which collects the purge gas from the purge extraction device through a gas storage container, and uses the purge gas collected in the gas storage container when it is necessary to dilute the process gas, thereby realizing the secondary utilization of the purge gas, saving the amount of purge gas used, and thus reducing the production cost.

[0034] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0035] Please see Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of the exhaust gas dilution system 100 provided in the embodiments of this application. Figure 2This is a schematic diagram of the connection structure of the pipeline unit 3 provided in the embodiment of this application. This utility model discloses a tail gas dilution system 100 for diluting the working gas discharged from a surface treatment device 200. The tail gas dilution system 100 includes: an extraction device 1, at least one extraction device 1, used to extract the working gas inside the surface treatment device 200; the extraction device 1 has a purge inlet, a surface treatment inlet, and a vacuum outlet; the purge inlet is connected to an external purge gas source 300; the surface treatment inlet is connected to the surface treatment device 200; and the extraction outlet is connected to a tail gas treatment device 400. The purge inlet, surface treatment inlet, and vacuum outlet are all connected. A gas storage container 2 is used to store the purge gas discharged from the extraction device 1. The gas storage container 2 has a gas storage inlet and a gas storage outlet; the gas storage inlet is connected to the vacuum outlet, and the gas storage outlet is connected to the vacuum outlet.

[0036] It is understood that the air extraction device 1 is equipped with a purge inlet, a surface treatment inlet, and a vacuum outlet. Through the interconnection design of the purge inlet, the surface treatment inlet, and the vacuum outlet, external purge gas and the working gas to be treated can be introduced into the air extraction device 1 to achieve efficient gas delivery.

[0037] When the purging device 1 is purged, the purging gas can stably deliver the intake gas and form a continuous airflow circulation. This not only effectively prevents the purging device 1 from shutting down due to pressure imbalance caused by fluctuations or instantaneous interruptions in the working gas flow, but also maintains a stable vacuum environment inside the purging device 1, ensuring the continuity of the chemical vapor deposition process.

[0038] During normal operation, when faced with working gases containing hazardous components, the purging gas can be mixed with the harmful gas to reduce the concentration of harmful components in the exhaust gas to below the safety threshold, thereby reducing the risk of blockage caused by the accumulation of hazardous gases in the pipeline and suppressing the possibility of the concentration of combustible gases reaching the explosion limit, thus improving the safety of system operation.

[0039] Furthermore, the exhaust device 1 can precisely control the flow rate ratio of the purge inlet, surface treatment inlet, and vacuum outlet to achieve real-time regulation of the exhaust gas composition, meeting the differentiated requirements for exhaust gas dilution at different process stages. For example, the proportion of purge gas can be increased in the initial stage of the process to quickly dilute hazardous gases, while the proportion can be reduced in the stabilization stage to optimize gas utilization.

[0040] Optionally, the pumping device 1 can be a multi-stage vacuum pump system, a modular gas processing unit, or an intelligent control vacuum unit, etc., and the embodiments of this application do not limit this.

[0041] The gas storage container 2 is connected to the vacuum outlet of the pumping device 1 and has a gas storage inlet and a gas storage outlet. It can store the excess purging gas discharged by the pumping device 1 and can also serve as a backup gas source to ensure the temporary operation of the system when the external purging gas source 300 is not supplied, thereby enhancing the stability of the system.

[0042] The gas storage container 2 allows excess purging gas to be temporarily stored and recycled when the gas source is restored or the operating conditions change. This avoids the waste of purging gas caused by excessive purging in traditional systems, and at the same time balances the gas volume fluctuation of the tail gas dilution system 100, preventing the process of the surface treatment equipment 200 from being affected by the instantaneous shortage of purging gas source.

[0043] In addition, the gas storage container 2 forms an airflow stabilizing chamber by temporarily storing gas, which can effectively absorb the airflow pulsation generated when the gas extraction device 1 is working, further improving the pressure stability of the entire exhaust gas dilution system 100 and extending the service life of the exhaust gas dilution system 100.

[0044] Optionally, the gas storage container 2 can be a buffer gas storage tank, a gas recovery and circulation system, or a gas storage module, etc., and this application embodiment does not limit this.

[0045] In practice, purge gas is introduced into the extraction device 1 to maintain its normal operation and prevent it from shutting down. The purge gas after purging the extraction device 1 is temporarily stored in the gas storage container 2. After the working gas completes the coating process in the surface treatment equipment 200, it is discharged from the extraction device 1 through the vacuum outlet. After the working gas is discharged from the vacuum outlet, the purge gas released from the gas storage container 2 is mixed with the working gas to complete the dilution.

[0046] Thus, the exhaust gas dilution system 100 provided in this application, through the multi-port coordination of the extraction device 1 and the energy storage of the gas storage container 2, solves the limitation of traditional exhaust gas dilution systems 100 that continuously consume large amounts of high-purity inert gas regardless of whether the surface treatment equipment 200 is operating. During operation, the purge gas supply can be stopped, and the working gas can be diluted using the gas in the gas storage container 2, reducing operating costs. The exhaust gas dilution system 100 optimizes the utilization efficiency of the purge gas, improves the reliability and economy of exhaust gas dilution, and ensures efficient, energy-saving, and environmentally friendly operation of the entire production process.

[0047] Please see Figure 2In some embodiments, the exhaust gas dilution system 100 further includes a piping unit 3, which includes: an intake pipe 31 for connecting an external purge gas source 300 to a purge gas inlet; an intake valve 311 disposed on the intake pipe 31 for controlling the opening and closing of the intake pipe 31; an exhaust pipe 32 for connecting a vacuum outlet to an exhaust gas treatment device 400; and an exhaust valve 321 disposed on the exhaust pipe 32 for controlling the opening and closing of the exhaust pipe 32.

[0048] The intake pipe 31 connects the external purging gas source 300 with the purging gas inlet of the extraction device 1, ensuring a stable supply of purging gas. The intake valve 311 installed in the intake pipe 31 controls the gas flow rate and can adjust the amount of purging gas delivered according to the actual working conditions, avoiding excessive use of purging gas, thereby saving purging gas resources and reducing operating costs.

[0049] The tailpipe 32 connects the vacuum outlet of the extraction device 1 to the tail gas treatment equipment 400, allowing the tail gas to be smoothly discharged and enter the subsequent treatment stage. The tail valve 321 is installed in the tailpipe 32. By controlling the opening and closing of the tailpipe 32, the tail gas emission process can be effectively managed, ensuring that the tail gas is discharged only when needed, avoiding unnecessary tail gas emission. At the same time, it can work with the intake valve 311 to achieve precise control of the gas pressure and flow rate of the entire tail gas dilution system 100.

[0050] Furthermore, the synergistic effect of the intake valve 311 and the exhaust valve 321 enables the exhaust gas dilution system 100 to flexibly adjust the gas flow and pressure according to different operating conditions, optimize the exhaust gas dilution effect, reduce the waste of purging gas, and improve the efficiency and safety of exhaust gas treatment.

[0051] It is understandable that the exhaust gas dilution system 100 achieves precise control over the purge gas and exhaust gas emissions. The inlet valve 311 can adjust the purge gas flow rate according to actual needs, avoiding resource waste and reducing operating costs; while the exhaust valve 321 can effectively manage exhaust gas emissions, ensuring the efficiency and safety of exhaust gas treatment.

[0052] Please see Figure 2 In some embodiments, the pipeline unit 3 further includes: a gas storage pipeline 33, which connects a gas storage inlet and a vacuum outlet; a gas storage valve 331, which is disposed on the gas storage pipeline 33 and is used to control the opening and closing of the gas storage pipeline 33; a connecting pipeline 34, which connects a gas storage outlet and a vacuum outlet; and a connecting valve 341, which is disposed on the connecting pipeline 34 and is used to control the opening and closing of the connecting pipeline 34.

[0053] Specifically, the gas storage pipeline 33 connects the gas storage inlet and the vacuum outlet, and works in conjunction with the gas storage valve 331 to control the storage of the purging gas. The purging gas that has been purged by the pumping device 1 can enter the gas storage container 2 through the gas storage pipeline 33 to avoid resource waste; when it is necessary to dilute the working gas, the gas storage valve 331 can be opened to release the gas in the gas storage container 2, which is then mixed with the working gas discharged from the pumping device 1 for dilution.

[0054] Connecting pipe 34 connects the gas storage outlet and the vacuum outlet, while connecting valve 341 controls the opening and closing of connecting pipe 34. This allows the purge gas in gas storage container 2 to be transported to the vacuum outlet as needed, so that the purge gas can be mixed and diluted with the working gas discharged from the vacuum outlet, achieving the recycling of the purge gas. When the demand for tail gas dilution treatment is low or during non-working conditions, connecting valve 341 can be closed to reduce the flow of purge gas and reduce energy consumption.

[0055] By controlling the gas storage valve 331 and the connecting valve 341, the storage, release, and recycling of the purge gas can be rationally arranged. While ensuring the dilution effect of the exhaust gas, the consumption of purge gas is minimized, reducing production costs. At the same time, it avoids the waste of purge gas and environmental pressure caused by excessive purging.

[0056] The gas storage valve 331 and the connecting valve 341 can flexibly adjust the gas flow direction and flow rate according to different operating conditions. When the exhaust gas composition changes or the treatment requirements are different, the opening of the gas storage valve 331 or the connecting valve 341 can be adjusted to adapt to the new process conditions, achieve precise exhaust gas dilution control, and meet diverse production needs.

[0057] Please see Figure 2 In some embodiments, the pipeline unit 3 further includes: an exhaust pipeline 35, which is connected to the connecting pipeline 34 and the vacuum outlet; a three-way valve 36, the first port of which is connected to the vacuum outlet through the exhaust pipeline 35, the second port of which is connected to the exhaust gas treatment device 400 through the tailpipe pipeline 32, and the third port of which is connected to the gas storage container 2 through the gas storage pipeline 33.

[0058] The design of the three-way valve 36 makes the exhaust gas dilution system 100 more flexible in controlling the gas flow direction. Through the first, second, and third ports of the three-way valve 36, which are respectively connected to the vacuum outlet, the exhaust gas treatment equipment 400, and the gas storage container 2, the exhaust gas dilution system 100 can quickly switch the gas flow path according to different operating conditions. For example, when the working gas needs to be directly discharged to the exhaust gas treatment equipment 400, the port connected to the gas storage container 2 can be closed; while when the purging gas needs to be stored, it can be switched to the direction of the gas storage container 2. This flexible switching capability allows the system to better adapt to various changes in the production process, including fluctuations in exhaust gas composition and flow rate, as well as changes in the operating status of the surface treatment equipment 200.

[0059] Meanwhile, the introduction of the three-way valve 36 simplifies the design and operation of the piping unit 3. The three-way valve 36 enables switching between multiple gas flow paths, reducing the need for multiple valves and complex piping in a traditional exhaust gas dilution system 100. This not only reduces the construction and maintenance costs of the exhaust gas dilution system 100 but also reduces the risk of errors and malfunctions that may arise from the coordinated operation of multiple valves, thus improving the reliability and operability of the exhaust gas dilution system 100.

[0060] Please see Figure 2 In some embodiments, the pipeline unit 3 further includes: a circulation pipeline 37, which connects the gas storage outlet and the gas inlet pipeline 31; and a circulation valve 371, which is disposed in the circulation pipeline 37 and is used to control the opening and closing of the circulation pipeline 37.

[0061] The circulation pipeline 37 connects the gas storage outlet and the inlet pipeline 31. When the purge gas inside the gas storage container 2 is sufficient, the purge gas inside the gas storage container 2 can enter the inlet pipeline 31 through the circulation pipeline 37 to purge the pumping device 1 again. The circulation pipeline 37 reduces the dependence on the external purge gas source 300, thereby reducing the consumption of high-purity inert gas and production costs.

[0062] Meanwhile, by recycling the purge gas, the overall emissions of exhaust gas are reduced, the environmental impact is mitigated, and the environmental performance is improved. This purge gas recycling method enhances the flexibility and adaptability of the exhaust gas dilution system 100, allowing for flexible adjustments to the purge gas usage strategy based on actual operating conditions, thereby achieving efficient resource utilization and stable system operation.

[0063] Please see Figure 2 In some embodiments, the pipeline unit 3 further includes: a gas supply pipeline 38, which is connected to an external purge gas source 300 and a connecting pipeline 34; and a gas supply valve 381, which is disposed on the gas supply pipeline 38 and is used to control the opening and closing of the gas supply pipeline 38.

[0064] In actual production, the amount of gas in the gas storage container 2 will gradually decrease due to the continuous operation of the system. When the gas pressure in the gas storage container 2 is lower than the set value, the gas replenishment valve 381 can open in time, and replenish the gas from the external purging gas source 300 through the gas replenishment pipeline 38 to ensure that the gas storage container 2 maintains sufficient gas volume and pressure. This effectively avoids pressure fluctuations in the tail gas dilution system 100 caused by insufficient gas in the gas storage container 2, ensures the continuity of gas supply during the tail gas dilution process, and enables the entire tail gas dilution system 100 to operate stably.

[0065] Specifically, through the control of the gas replenishment pipeline 38 and the gas replenishment valve 381, the exhaust gas dilution system 100 can flexibly adjust the amount of gas replenishment according to actual needs. When the gas storage container 2 has sufficient gas, the gas replenishment valve 381 can be closed to prioritize the use of stored gas, reducing dependence on the external purging gas source 300 and lowering operating costs. When the gas storage container 2 has insufficient gas and the exhaust gas treatment demand is urgent, the gas replenishment valve 381 can be opened to replenish gas, achieving rational utilization of resources and avoiding unnecessary gas waste. This flexible gas replenishment strategy not only improves resource utilization efficiency but also makes the system's operating costs more controllable.

[0066] Please see Figure 2 In some embodiments, the exhaust gas dilution system 100 further includes a filter element 4, which is disposed in the gas storage pipeline 33 and is used to filter the gas flowing through the gas storage pipeline 33.

[0067] The filter element 4 removes impurities and particulate matter from the purge gas, ensuring the purity of the purge gas entering the gas storage container 2 and the purge gas being recycled. High-purity purge gas helps maintain the performance of the pumping device 1, prevents impurities from depositing inside the pumping device 1, avoids affecting the pumping efficiency and vacuum level of the pumping device 1, and ensures the stable operation of the tail gas dilution system 100.

[0068] By filtering impurities, filter element 4 reduces the wear of particulate matter on the gas storage container 2, valves and pipeline inner walls, reduces the risk of failure of the extraction device 1, extends the service life of the extraction device 1, reduces maintenance frequency and replacement costs, and improves production efficiency.

[0069] Furthermore, the filtered gas helps enhance the dilution effect of exhaust gas, preventing impurities from interfering with the dilution process and ensuring that the concentration of hazardous components in the exhaust gas is reduced to a safe level. At the same time, it reduces the amount of harmful impurities entering the exhaust gas treatment equipment, improving treatment efficiency and environmental performance, and reducing the risk of environmental pollution.

[0070] Please see Figure 1In some embodiments, the surface treatment device 200 includes a first surface treatment device 200 and a second surface treatment device 202, the air extraction device 1 includes a first air extraction device 1a and a second air extraction device 1b, the first air extraction device 1a and the first surface treatment device 200 are correspondingly arranged, and the second air extraction device 1b and the second surface treatment device 202 are correspondingly arranged; the pipeline unit 3 includes a first pipeline unit 3a corresponding to the first air extraction device 1a and a second pipeline unit 3b corresponding to the second air extraction device 1b.

[0071] The first extraction device 1a and the first pipeline unit 3a are configured for the first surface treatment equipment 200, and the second extraction device 1b and the second pipeline unit 3b are configured for the second surface treatment equipment 202. This correspondence allows each extraction device 1 and its pipeline unit 3 to be independently optimized according to the specific process requirements of the connected surface treatment equipment 200, such as gas flow rate, pressure, and purging frequency, thereby better adapting to the personalized requirements of different surface treatment equipment 200 in different processes and improving the effect of exhaust gas dilution and treatment.

[0072] Each surface treatment device 200 and its corresponding extraction device 1 and piping unit 3 can operate independently, enabling the system to flexibly respond to adjustments in the production plan. When one surface treatment device 200 needs maintenance or adjustment, the other surface treatment devices 200 and their corresponding extraction devices 1 and piping units 3 can still operate normally without affecting the overall production progress.

[0073] Optionally, the second pipeline unit 3b can be connected to the liquid storage container and the external purge gas source 300 through the first pipeline unit 3a, and a corresponding switching valve can be provided between the first pipeline unit 3a and the second pipeline unit 3b so that the first pipeline unit 3a and the second pipeline unit 3b can be controlled independently, ensuring the flexibility of the exhaust gas dilution system 100.

[0074] Optionally, there can be multiple second pipeline units 3b, and multiple second pipeline units 3b are connected in series with the first pipeline unit 3a, thereby improving the utilization rate of the purging gas. The number of second pipeline units 3b is not limited in the embodiments of this application.

[0075] Please see Figure 1 In some embodiments, the gas storage pipeline 33 of the first pipeline unit 3a is connected to the air inlet pipeline 31 of the second pipeline unit 3b so that the purging gas discharged from the first pumping device 1a can purge the second pumping device 1b.

[0076] The gas storage pipe 33 of the first pipeline unit 3a is connected to the gas inlet pipe 31 of the second pipeline unit 3b, so that the excess purging gas discharged by the first extraction device 1a can be reused by the second extraction device 1b. This design makes full use of the gas resources inside the system, reduces the dependence on the external purging gas source 300, and reduces the consumption of high-purity inert gas, thereby significantly reducing production costs.

[0077] When the exhaust gas volume of the first extraction device 1a is large or the purging gas supply is sufficient, the excess gas can be guided to the second extraction device 1b for secondary utilization, effectively balancing the gas supply and demand relationship within the system. This flexibility allows the system to better adapt to changes in gas demand under different operating conditions, avoiding operational problems caused by insufficient or excessive gas supply.

[0078] By using the purging gas discharged from the first extraction device 1a to purge the second extraction device 1b, the impact of gas flow fluctuations or supply interruptions on the second extraction device 1b can be reduced. This internal gas recycling mechanism helps maintain stable system pressure, ensures the continuity and reliability of the tail gas dilution process, and thus improves the stability of the entire system.

[0079] It is understandable that during the use of the exhaust gas dilution system 100, when purging of the extraction device 1 is required, the purging gas first enters the extraction device 1 through the purging inlet via the inlet pipe 31. After purging inside the extraction device 1, the purging gas flows from the vacuum outlet into the outlet pipe 35 and then into the storage container 2 via the storage pipe 33. When dilution of the working gas is required, the purging gas in the storage container 2 can be mixed with the working gas discharged from the extraction device 1 through the connecting pipe 34. The mixed gas can then enter the exhaust gas treatment device through the tailpipe 32 for subsequent exhaust gas treatment.

[0080] At the same time, the purging gas of the first purging device 1a can also flow into the air inlet pipe 31 of the second pipe unit 3b through the gas storage pipe 33 in the first pipe unit 3a, so as to purge the second purging device 1b.

[0081] In addition, the gas in the gas storage container 2 can also flow into the air intake pipe 31 through the circulation pipe 37 to purge the air extraction device 1, and the external purging gas source 300 can flow into the connecting pipe 34 through the replenishment pipe 38 to dilute the working gas.

[0082] Please see Figure 3 , Figure 3This is a simplified structural diagram of the vacuum pumping device 1 provided in an embodiment of this application. In some embodiments, the vacuum pumping device 1 has a first vacuum pump 11 and a second vacuum pump 12. The first vacuum pump 11 has a purge inlet, a surface treatment inlet, and an outlet, and the second vacuum pump 12 has a vacuum outlet. The outlet of the first vacuum pump 11 is connected to the inlet of the second vacuum pump 12, and the purge inlet of the first vacuum pump 11 serves as the purge inlet of the vacuum pumping device 1, the surface treatment inlet of the first vacuum pump 11 serves as the surface treatment inlet of the vacuum pumping device 1, and the vacuum outlet of the second vacuum pump 12 serves as the outlet of the vacuum pumping device 1.

[0083] The coordinated operation of the first vacuum pump 11 and the second vacuum pump 12 enables the evacuation device 1 to achieve higher evacuation efficiency and a deeper vacuum. The first vacuum pump 11 is responsible for initially evacuating the gas within the surface treatment equipment 200 and introducing purge gas through its purge inlet for preliminary purging and dilution. Subsequently, the gas is discharged to the inlet of the second vacuum pump 12, which further evacuates and compresses the gas to ensure efficient gas discharge from the system. This two-stage evacuation method effectively improves the evacuation capacity and vacuum maintenance capability of the exhaust gas dilution system 100, and is particularly suitable for surface treatment processes with high vacuum requirements.

[0084] The second vacuum pump 12 provides additional stability assurance for the exhaust gas dilution system 100. Even if the first vacuum pump 11 malfunctions or its pumping capacity is insufficient, the second vacuum pump 12 can still maintain a certain pumping function, ensuring continuous exhaust gas discharge and avoiding the risk of exhaust gas accumulation and surface treatment equipment 200 shutdown due to pumping interruption. The dual-pump design enhances the fault tolerance of the exhaust gas dilution system 100 and improves the reliability of exhaust gas treatment.

[0085] The dual-pump design allows the extraction device 1 to more flexibly meet different exhaust gas treatment needs. By adjusting the operating parameters of the first vacuum pump 11 and the second vacuum pump 12, such as the extraction speed and pressure, the extraction and dilution process of the exhaust gas can be precisely controlled. This flexibility enables the exhaust gas dilution system 100 to adapt to various surface treatment equipment 200 and process conditions, meeting the exhaust gas treatment requirements under different operating conditions.

[0086] The second vacuum pump 12 further extracts and compresses the gas, helping to mix the purge gas and exhaust gas more evenly. Before the gas is discharged from the system, the second vacuum pump 12 ensures that the exhaust gas and purge gas are fully mixed, improving the dilution effect and reducing the concentration of harmful components in the exhaust gas. This not only improves the safety of exhaust gas treatment but also reduces the pollution of the exhaust gas to the environment.

[0087] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. An exhaust gas dilution system for diluting a working gas discharged from a surface treatment apparatus, characterized by, The exhaust gas dilution system includes: An extraction device, comprising at least one device, is provided for extracting working gas from inside the surface treatment equipment. The extraction device has a purge inlet, a surface treatment inlet, and a vacuum outlet. The purge inlet is connected to an external purge gas source, the surface treatment inlet is connected to the surface treatment equipment, and the extraction outlet is connected to an exhaust gas treatment device. The purge inlet, the surface treatment inlet, and the vacuum outlet are all connected together. A gas storage container is used to store the purge gas discharged by the pumping device. The gas storage container has a gas storage inlet and a gas storage outlet. The gas storage inlet is connected to the vacuum outlet, and the gas storage outlet is connected to the vacuum outlet.

2. The exhaust gas dilution system of claim 1, wherein, The exhaust gas dilution system further includes a piping unit, which includes: An air intake pipe, wherein the air intake pipe is used to connect the external purge air source and the purge air inlet; An intake valve is provided in the intake pipe, and the intake valve is used to control the opening and closing of the intake pipe; Tail exhaust pipe, the tail exhaust pipe being used to connect the vacuum outlet to the exhaust gas treatment equipment; A tailpipe valve is installed in the tailpipeline and is used to control the opening and closing of the tailpipeline.

3. The exhaust gas dilution system of claim 2, wherein, The piping unit also includes: A gas storage pipeline, wherein the gas storage pipeline connects the gas storage inlet and the vacuum outlet; A gas storage valve is installed in the gas storage pipeline, and the gas storage valve is used to control the opening and closing of the gas storage pipeline; A connecting pipe, wherein the connecting pipe connects the gas storage outlet and the vacuum outlet; A connecting valve is provided in the connecting pipeline, and the connecting valve is used to control the opening and closing of the connecting pipeline.

4. The exhaust gas dilution system of claim 3, wherein, The piping unit also includes: An exhaust pipe, wherein the exhaust pipe is connected to the connecting pipe and the vacuum outlet; The three-way valve has its first port connected to the vacuum outlet via an outlet pipe, its second port connected to the exhaust gas treatment equipment via an exhaust pipe, and its third port connected to the gas storage container via a gas storage pipe.

5. The exhaust gas dilution system of claim 2, wherein, The piping unit also includes: A circulation pipeline, wherein the circulation pipeline connects the gas storage outlet and the gas inlet pipeline; A circulation valve is installed in the circulation pipeline, and the circulation valve is used to control the opening and closing of the circulation pipeline.

6. The exhaust gas dilution system of claim 3, wherein, The piping unit also includes: A purge gas pipeline, wherein the purge gas pipeline is connected to the external purging gas source and the connecting pipeline; An air supply valve is installed in the air supply pipeline, and the air supply valve is used to control the opening and closing of the air supply pipeline.

7. The exhaust gas dilution system of claim 3, wherein, The exhaust gas dilution system also includes: A filter element is disposed in the gas storage pipeline and is used to filter the gas flowing through the gas storage pipeline.

8. The exhaust gas dilution system according to any one of claims 2-7, characterized in that, The surface treatment equipment includes a first surface treatment equipment and a second surface treatment equipment, and the air extraction device includes a first air extraction device and a second air extraction device. The first air extraction device and the first surface treatment equipment are respectively arranged, and the second air extraction device and the second surface treatment equipment are respectively arranged. The piping unit includes a first piping unit corresponding to the first air extraction device and a second piping unit corresponding to the second air extraction device.

9. The exhaust gas dilution system according to claim 8, characterized in that, The gas storage pipeline of the first pipeline unit is connected to the gas inlet pipeline of the second pipeline unit so that the purging gas discharged from the first gas extraction device can purge the second gas extraction device.

10. The exhaust gas dilution system according to any one of claims 1-7, characterized in that, The air extraction device has a first vacuum pump and a second vacuum pump. The first vacuum pump has a purge inlet, a surface treatment inlet and an outlet. The second vacuum pump has a vacuum outlet. The outlet of the first vacuum pump is connected to the inlet of the second vacuum pump, and the purge inlet of the first vacuum pump serves as the purge inlet of the pumping device, the surface treatment inlet of the first vacuum pump serves as the surface treatment inlet of the pumping device, and the vacuum outlet of the second vacuum pump serves as the outlet of the pumping device.

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