A raw material conveying device
By installing a vibration generator and a temperature control component in the raw material storage silo, the problem of unstable raw material transmission was solved, the stability of the raw material conveying process and the temperature control of the reaction environment were achieved, and the reliability of the process reaction was improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGSU TANKEBLUE SEMICON CO LTD
- Filing Date
- 2025-09-16
- Publication Date
- 2026-07-31
AI Technical Summary
In the existing mechanical transport process of raw materials, the unstable supply of raw materials leads to irregular fluctuations in the ratio of raw materials in the process reaction, which affects the stability of the transport.
A vibration generator is used to drive the raw material storage bin to vibrate at a preset frequency. Combined with mechanical transmission components and temperature control components, this ensures stable delivery of raw materials and a constant temperature in the reaction chamber, preventing the generation of by-products.
It improves the stability of mechanical transport of raw materials, ensures the stability of raw material ratios and the consistency of temperature in the reaction environment, and reduces the generation of by-products.
Smart Images
Figure CN224578342U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of chemical vapor deposition processes, and in particular to a raw material transport device. Background Technology
[0002] Currently, raw material conveying is divided into two main categories: pneumatic conveying and mechanical conveying. Mechanical conveying mainly uses mechanical transmission components to push raw materials to the target area. However, in existing mechanical raw material conveying, the supply of raw materials often varies significantly under different process conditions, leading to unstable raw material transmission per unit time and causing irregular fluctuations in the raw material ratio during the process reaction.
[0003] Therefore, how to improve the stability of mechanical transmission of raw materials is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content
[0004] This application proposes a raw material conveying device that improves the stability of mechanical conveying of raw materials.
[0005] To achieve the above objectives, this application discloses the following technical solutions:
[0006] A raw material conveying device includes a raw material storage bin, a vibration generator, a mechanical transmission component, a reaction chamber, and a temperature control component. The raw material storage bin is used to carry raw materials. The vibration generator is driven to the raw material storage bin to drive the raw material storage bin to vibrate at a preset frequency. The mechanical transmission component connects the raw material storage bin and the reaction chamber. The temperature control component is arranged in the reaction chamber to keep the reaction chamber at a constant temperature.
[0007] In some embodiments, the vibration generator is disposed on the outer wall and / or the inner wall of the raw material storage bin.
[0008] In some embodiments, at least two vibration generators are arranged along the circumference of the raw material storage bin.
[0009] In some embodiments, at least two vibration generators are evenly arranged along the circumference of the raw material storage bin;
[0010] And / or at least two sets of vibration generators are arranged at least at intervals along the height direction of the raw material storage bin.
[0011] In some embodiments, the mechanical transfer assembly includes a feed line, at least a portion of which is located within the reaction chamber.
[0012] In some embodiments, the feed line includes an interconnected vertical section and a bend section, the vertical section being connected to the outlet of the raw material storage silo, and the bend section being located inside the reaction chamber.
[0013] In some embodiments, the bending angle between the vertical section and the bent section is not less than 90°.
[0014] In some embodiments, the temperature control assembly includes at least two heating sections that are evenly arranged within the reaction chamber.
[0015] In some embodiments, the thermostat assembly further includes a heat insulation section to ensure temperature stability within the reaction chamber. In some embodiments, the thermostat assembly further includes a temperature sensor for measuring the temperature of the reaction chamber.
[0016] As can be seen from the above technical solution, when conveying raw materials, the raw material conveying device provided in this application can be used. The vibration generator is set in the raw material storage bin to promote the raw material storage bin to vibrate at a preset frequency. The mechanical transmission component drives at a stable speed, and the constant temperature component ensures that the conveying environment temperature is stable and prevents the generation of by-products, thereby improving the stability of the raw material conveying process. Attached Figure Description
[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely some examples or embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort, and this application can be applied to other similar scenarios based on the provided drawings, all of which fall within the scope of protection of this utility model. Unless obvious from the linguistic context or otherwise specified, the same reference numerals in the drawings represent the same structure or operation.
[0018] Figure 1 This is a schematic diagram of a raw material conveying device provided in an embodiment of this application;
[0019] Among them: 10 - Raw material conveying device;
[0020] 100 - Raw material storage bin; 200 - Vibration generator; 300 - Mechanical transmission assembly; 400 - Reaction chamber; 500 - Temperature control assembly;
[0021] 310 - Material conveying pipeline; 311 - Vertical section; 312 - Bend section. Detailed Implementation
[0022] The present application will now be described in further detail with reference to the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are merely illustrative of the application and not intended to limit it. The described embodiments are only a part of the embodiments of the present application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present application without inventive effort are within the scope of protection of the present application.
[0023] To address the problem of unstable raw material conveying in existing systems, this application describes the structure of the raw material conveying device 10 in detail with reference to the accompanying drawings:
[0024] like Figure 1 As shown, this application provides a raw material conveying device 10, including a raw material storage bin 100, a vibration generator 200, a mechanical transmission component 300, a reaction chamber 400, and a temperature control component 500; the raw material storage bin 100 is used to carry raw materials; the vibration generator 200 is connected to the raw material storage bin 100 to drive the raw material storage bin 100 to vibrate at a preset frequency; the mechanical transmission component 300 connects the raw material storage bin 100 and the reaction chamber 400; the temperature control component 500 is arranged at the reaction chamber 400 to keep the reaction chamber 400 at a constant temperature.
[0025] When conveying raw materials, the raw material conveying device 10 provided in this application can be used. The vibration generator 200 is set in the raw material storage bin 100 to promote the raw material storage bin 100 to vibrate at a preset frequency. The mechanical transmission component 300 drives at a stable speed, and the constant temperature component 500 ensures that the conveying environment temperature is stable and prevents the generation of by-products, thereby improving the stability of the raw material conveying process.
[0026] It should be explained that the raw material storage bin 100 is used to hold raw materials, ensuring a continuous supply of raw materials from the discharge port. The function of the vibration generator 200 is to cause the raw material storage bin 100 to vibrate at a preset frequency through its own periodic vibration. The structural features of the vibration generator 200 are described in detail below.
[0027] like Figure 1 As shown, the vibration generator 200 is typically installed on the side wall of the raw material storage silo 100. Optionally, the vibration generator 200 can be installed on the outer wall and / or the inner wall of the raw material storage silo 100. Taking the installation of the vibration generator 200 on the outer wall of the raw material storage silo 100 as an example, when the raw material is corrosive or wet and sticky, affecting maintenance, placing the vibration generator 200 on the outer wall of the raw material storage silo 100 can effectively extend the service life of the vibration generator 200. At the same time, installing it on the outer wall does not occupy the space of the raw material storage silo 100, increasing the storage capacity of the raw material storage silo 100.
[0028] In particular, if the raw material particles are large or have a high density, the vibration generator 200 can be installed on the inner wall of the raw material storage bin 100 to reduce vibration attenuation, promote stronger vibration of the raw material, prevent raw material blockage, and thus ensure stable falling of the raw material.
[0029] When a more stable vibration effect is required, vibration generators 200 can be installed on both the outer and inner walls of the raw material storage silo 100. For example, when the volume and perimeter of the raw material storage silo 100 are large, it is extremely difficult for the vibration from the periphery to reach the center of the raw material storage silo 100. In this case, vibration generators 200 can be installed on both the outer and inner walls to make the raw material vibration more uniform and the feeding more stable.
[0030] The relative positional relationship between the vibration generator 200 and the raw material storage bin 100 has been described above. The number of vibration generators 200 will be described in detail below.
[0031] To ensure uniform vibration, at least two vibration generators 200 are typically required, and these generators are evenly distributed around the circumference of the raw material storage bin 100. For example, when two vibration generators 200 are installed on the outer wall of the raw material storage bin 100, with a circumference of 360°, the angle between the center of the bin and the two vibration generators is 180°. Similarly, when three vibration generators 200 are installed on the outer wall of the bin, the angle between the center of the bin and the two vibration generators is 120°. This arrangement ensures more uniform vibration received in all directions within the raw material storage bin 100, thereby making the raw material feeding more stable.
[0032] Specifically, to ensure uniform vibration across all layers of the raw material storage silo 100 along its height, the vibration generators 200 can be arranged in layers, with one set per layer and at least two vibration generators 200 per set evenly distributed along the circumference of the raw material storage silo 100. At least two sets of vibration generators 200 can be installed according to the specific height of the raw material storage silo 100. This arrangement prevents material blockage due to layer breaks, thereby ensuring more stable material feeding from the raw material storage silo 100 as a whole.
[0033] The above describes the structural features of the vibration generator 200. Next, we will describe the structure of the mechanical transmission component 300 in detail.
[0034] See Figure 1 The mechanical transfer assembly 300 includes a conveying pipeline 310, at least a portion of which is located within the reaction chamber 400. After the raw material reaction is completed, the conveying pipeline 310 can carry the reacted raw material to the next process.
[0035] To ensure the raw materials react fully within the reaction chamber 400, the conveying pipeline 310 can be designed with interconnected vertical sections 311 and bends 312. The vertical section 311 connects to the outlet of the raw material storage bin 100. The purpose of the vertical section 311 is to allow the raw materials to directly connect to the conveying pipeline 310 after exiting the outlet, ensuring the continuity and stability of the raw material delivery. At the same time, the longer vertical section 311 can prevent spatial interference between the raw material storage bin 100 and the reaction chamber. The bend 312 connects to the vertical section 311 and is located within the reaction chamber 400. The bending angle between the vertical section 311 and the bend 312 is not less than 90°. The advantage of this is that the large-angle bend can prevent raw material congestion.
[0036] Preferably, in order to prolong the reaction time of the raw materials in the reaction chamber 400, the bending section 312 can be set as a wave shape with a bending angle of not less than 90°.
[0037] The above describes the structural features of the mechanical transmission component 300. Next, we will introduce the structure of the constant temperature component 500 in detail.
[0038] See Figure 1 The temperature control component 500 includes at least two heating sections, which are evenly distributed within the reaction chamber 400. This is done to achieve zoned control, dividing the reaction chamber 400 into multiple independent temperature control zones. By controlling the temperature of each zone, the temperature of each zone is kept the same, thus maintaining a constant overall temperature within the reaction chamber 400. Typically, the heating sections can employ resistance heating wires, electromagnetic induction coils, or infrared lamps. The working principle of the heating section will be explained below using resistance heating wires as an example:
[0039] Taking three heating sections as an example, the reaction chamber 400 typically includes an inlet, an intermediate section, and an outlet. Because the inlet and outlet are in contact with the doors, end caps, flanges, etc., of the reaction chamber 400, temperature typically dissipates quickly. The intermediate section experiences slower temperature dissipation. Therefore, the heating sections are divided into an inlet heating section, an intermediate heating section, and an outlet heating section. Correspondingly, the inlet and outlet heating sections use higher-powered resistance heating wires to offset some of the temperature loss, while the intermediate heating section uses lower-powered resistance heating wires. This ensures that the temperature of the raw material remains constant from entering to exiting the reaction chamber 400. The zoning principle of electromagnetic induction coils and infrared lamp irradiation is similar to that of resistance heating wires and will not be elaborated upon here.
[0040] Of course, while maintaining constant internal heating is important, preventing heat loss is also crucial. The reaction chamber 400 typically includes a reaction area and an outer protective shell. To prevent temperature loss from the reaction chamber 400 and causing overall temperature instability, the temperature control component 500 also includes an insulation section. This insulation section is in direct contact with the reaction area and isolates the outer protective shell of the reaction chamber 400 from the reaction area, thus sealing the temperature of the reaction area within the outer protective shell and preventing heat loss. Furthermore, in some embodiments, the insulation section also includes multiple insulation layers separated by a vacuum layer. Through these layers, heat is essentially intercepted as it travels from the central reaction area to the outer protective shell. This not only reduces heat loss and heating power but also keeps the temperature of the outer protective shell of the reaction chamber 400 at a normal temperature, preventing damage to electrical control instruments and burns to operators.
[0041] Having introduced the heating section and the insulation section, we will now introduce the key component that ensures a constant temperature in the reaction chamber at 400°C: the temperature sensor.
[0042] To ensure a constant temperature, the thermostat assembly 500 also includes a temperature sensor. The function of the temperature sensor is to control whether the heating section of the reaction chamber 400 is heated by measuring the temperature inside the reaction chamber 400. When the measured temperature inside the reaction chamber 400 is lower than the set value, the temperature sensor sends a signal to the heating section, and the heating section continues to heat. When the temperature inside the reaction chamber 400 reaches the set value, the temperature sensor sends a signal to the heating section, and the heating section stops heating. This cycle is repeated to dynamically control the temperature inside the reaction chamber 400 to remain constant. Due to the harsh environment inside the reaction chamber 400, temperature sensors can be categorized into contact and non-contact types. Contact temperature sensors, such as thermocouple sensors, can be located inside the reaction chamber 400. In this case, the temperature measured by the thermocouple sensor itself is the actual temperature inside the reaction chamber 400. Its advantages include a wide measurement range and fast response. Non-contact temperature sensors, such as infrared pyrometers, can be located outside the reaction chamber 400. The infrared pyrometer is installed on the observation window of the reaction chamber 400, and the temperature of the reaction chamber 400 is calculated from the infrared energy radiated through the observation window. Its advantages include direct and real-time temperature measurement of the reaction chamber 400, unaffected by the thermal inertia of the heater. Of course, to more accurately measure the temperature of the reaction chamber 400 and maintain a constant temperature inside the reaction chamber 400, contact and non-contact temperature sensors can be combined to achieve the most accurate and stable temperature control.
[0043] In the above context, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.
[0044] In the description of the embodiments of this application, unless otherwise stated, " / " means "or". For example, A / B can mean A or B. "And / or" in this article is merely a description of the relationship between related objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, A and B exist simultaneously, and B exists alone.
[0045] It should be noted that, for ease of description, only the parts relevant to the application are shown in the accompanying drawings. Unless otherwise specified, the embodiments and features described in this application can be combined with each other.
[0046] The above description is merely a preferred embodiment of this application and an explanation of the technical principles employed, and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. The scope of this application is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the above-described application concept. For example, technical solutions formed by substituting the above features with (but not limited to) technical features with similar functions disclosed in this application.
Claims
1. A raw material conveying device characterized by comprising: It includes a raw material storage bin (100), a vibration generator (200), a mechanical transmission assembly (300), a reaction chamber (400), and a temperature control assembly (500). The raw material storage bin (100) is used to hold raw materials; The vibration generator (200) is connected to the raw material storage bin (100) to drive the raw material storage bin (100) to vibrate at a preset frequency; The mechanical transfer assembly (300) connects the raw material storage bin (100) and the reaction chamber (400). The thermostatic component (500) is arranged in the reaction chamber (400) to keep the reaction chamber (400) at a constant temperature.
2. The raw material conveying apparatus according to claim 1, wherein The vibration generator (200) is disposed on the outer wall of the raw material storage bin (100) and / or the inner wall of the raw material storage bin (100).
3. The raw material conveying apparatus according to claim 1, wherein At least two vibration generators (200) are provided along the circumference of the raw material storage bin (100).
4. The raw material conveying apparatus according to claim 3, wherein At least two of the vibration generators (200) are evenly arranged along the circumference of the raw material storage bin (100); Two sets of vibration generators (200) are arranged at least at intervals along the height direction of the raw material storage bin (100).
5. The raw material conveying apparatus according to claim 1, wherein The mechanical transfer assembly (300) includes a feed line (310) at least a portion of which is located within the reaction chamber (400).
6. The raw material conveying apparatus according to claim 5, wherein The conveying pipeline (310) includes a vertical section (311) and a bent section (312) connected to each other. The vertical section (311) is connected to the outlet of the raw material storage bin (100), and the bent section (312) is located inside the reaction chamber (400).
7. The raw material conveying apparatus according to claim 6, wherein The bending angle between the vertical segment (311) and the bent segment (312) is not less than 90°.
8. The raw material delivery apparatus according to claim 1, wherein The constant temperature component (500) includes at least two heating sections, which are uniformly arranged within the reaction chamber (400).
9. The raw material delivery apparatus according to claim 1, wherein The thermostatic component (500) also includes a heat insulation section to ensure that the temperature inside the reaction chamber (400) is stable.
10. The raw material delivery apparatus according to claim 1, wherein The thermostat assembly (500) also includes a temperature sensor for measuring the temperature of the reaction chamber (400).