A precursor administration device

Abstract

This utility model discloses a precursor supply device, relating to the field of semiconductor technology. It includes a main pipeline connected to a nitrogen source, on which a pressure gauge and a flow controller are installed. The outlet of the main pipeline is connected to two pipelines, Pipeline 1 and Pipeline 2, respectively, and the outlets of Pipeline 1 and Pipeline 2 are connected to a reaction chamber. Pipeline 1 is equipped with a valve 1 and a control valve 3 in sequence. Pipeline 2 is equipped with a control valve 1 and a control valve 2 in sequence, and a precursor container is connected to Pipeline 2 via branch pipes 1 and 2. A flow meter is also installed on either Pipeline 1 or Pipeline 2. The device provided by this utility model can accurately monitor the flow rate of the corresponding pipeline in real time. Combined with the flow controller on the main pipeline, it can ensure the precise controllability of the carrier gas flow rate, especially the flow rate of Pipeline 2 carrying the precursor.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically, to a precursor supply device. Background Technology

[0002] In precision manufacturing fields such as semiconductor thin film deposition and material surface modification, the precise supply of precursors plays a decisive role in product quality. Processes that utilize carrier gases (such as nitrogen) to carry precursors into the reaction chamber (RC) are widely used.

[0003] In existing technology, in the precursor delivery device, nitrogen (N2) is introduced from the main pipeline and, after flow regulation, split into two streams: pipeline one and pipeline two. Pipeline one is equipped with valve one, and the flow rate of nitrogen in pipeline two can be roughly adjusted by changing the opening of valve one. The nitrogen in pipeline two, which is the carrier gas for the precursor, directly affects the dosage of the precursor and is a very important parameter.

[0004] However, in existing precursor supply devices, the pressure of pipeline one and pipeline two can only be independently regulated by the pressure gauge on the main pipeline. It is impossible to accurately know the amount of carrier gas entering pipeline two, that is, it is difficult to achieve precise control of the carrier gas flow rate, especially the flow rate of pipeline two carrying the precursor. Utility Model Content

[0005] In view of this, the purpose of this utility model is to provide an improved precursor delivery device to solve the problems existing in the prior art.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: A precursor supply device includes a main pipeline connected to a nitrogen source, and a pressure gauge and a flow controller are installed on the main pipeline; The outlet end of the main pipeline is connected to pipeline one and pipeline two respectively, and the outlet ends of pipeline one and pipeline two are connected to the reaction chamber. The pipeline is equipped with valve one and control valve three in sequence. Control valve one and control valve two are sequentially installed on the second pipeline. The second pipeline is also connected to the precursor container through branch pipe one and branch pipe two. A flow meter is also installed on either pipe one or pipe two.

[0007] Furthermore, the flow meter is installed on the first pipeline and located between the first valve and the third control valve.

[0008] Furthermore, a valve is also installed on the second pipeline.

[0009] Furthermore, the second valve is located at the front end of the first control valve.

[0010] Furthermore, both valve one and valve two are needle valves.

[0011] Furthermore, the flow meter is a mass flow meter.

[0012] The beneficial effects of this utility model are as follows: For the ALD process, the carrier gas directly affects the amount of precursor supplied, requiring precise control of the carrier gas flow rate. Therefore, accurate flow rate knowledge is essential. This invention adds a flow meter to either pipeline one or pipeline two, enabling accurate real-time monitoring of the flow rate in the corresponding pipeline. Combined with the flow controller on the main pipeline, it ensures precise controllability of the carrier gas flow rate, especially the flow rate in pipeline two carrying the precursor. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other embodiments can be obtained based on these drawings.

[0014] Figure 1 This is a schematic diagram of the structure of this utility model.

[0015] Explanation of reference numerals in the attached figures: 1. Nitrogen source; 2. Main pipeline; 3. Pressure gauge; 4. Flow controller; 5. Pipeline 1; 6. Pipeline 2; 7. Reaction chamber; 8. Valve 1; 9. Control valve 3; 10. Control valve 1; 11. Control valve 2; 12. Branch pipe 1; 13. Branch pipe 2; 14. Precursor container; 15. Flow meter; 16. Valve 2. Detailed Implementation

[0016] The structure provided by this utility model will be explained and described in detail below with reference to the accompanying drawings.

[0017] refer to Figure 1 As shown, this embodiment specifically discloses a precursor supply device, including a main pipeline 2 connected to a nitrogen source 1, and a pressure gauge 3 and a flow controller 4 are installed on the main pipeline 2; in the illustrated embodiment, the flow controller 4 is selected as a mass flow controller (MFC), which has the effects of wide range and high precision, and can be adapted to multiple process requirements. The outlet of the main pipeline 2 is connected to pipeline 5 and pipeline 6 respectively, and the outlets of pipeline 5 and pipeline 6 are connected to the reaction chamber 7. Pipeline 5 is equipped with valve 8 and control valve 9 in sequence; Control valve 10 and control valve 21 are sequentially installed on pipeline 26. Pipeline 26 is also connected to precursor container 14 through branch pipe 12 and branch pipe 23. A flow meter 15 is also installed on either pipe 1 (5) or pipe 2 (6).

[0018] In this embodiment, nitrogen from nitrogen source 1 is transported through main pipeline 2. Pressure gauge 3 on main pipeline 2 monitors the total pressure in real time, and flow controller 4 precisely regulates the total flow of nitrogen to ensure a stable total amount of nitrogen entering the device.

[0019] The stabilized nitrogen gas is split into two streams at the outlet of main pipeline 2: Pipeline 15: The branch resistance is adjusted by valve 18 and the on / off state is controlled by control valve 39. It can be used as a "balancing branch" or "purging branch". The pressure and flow of pipeline 26 are indirectly stabilized by adjusting its flow rate.

[0020] Pipeline 2 6: As a "precursor carrier gas branch", the carrier gas path is controlled by control valve 1 10 and control valve 2 11; nitrogen enters the precursor container 14 through branch pipe 1 12, carries the precursor, and returns to pipeline 2 6 through branch pipe 2 13, and together they enter the reaction chamber 7 to participate in the reaction.

[0021] The flow meter 15 on pipeline 5 or pipeline 6 is used to monitor the flow of the corresponding pipeline in real time. Combined with the flow controller 4 and valve adjustment, a closed-loop control is formed to ensure that the carrier gas flow (especially the flow of pipeline 6 carrying the precursor) is accurate and controllable.

[0022] In the illustrated embodiment, control valve 10, control valve 11, and control valve 9 are all pneumatic valves. The actuators of pneumatic valves operate rapidly, with response times typically in the millisecond range, enabling precise control of the on / off timing of pipeline 26 and pipeline 15. For example, when switching between "precursor supply" and "system purging" modes, the pneumatic valves can instantly close the corresponding passage of the precursor container (pipeline 26) while simultaneously opening pipeline 15, avoiding flow fluctuations or precursor residue during the switching between the two operating conditions and ensuring a stable process environment within the reaction chamber 7.

[0023] Since precursors often possess characteristics such as corrosivity, easy condensation, and high viscosity, in some preferred embodiments, the flow meter 15 is installed on pipeline 5 and located between valve 8 and control valve 9. Pipeline 5 only transports pure nitrogen (without any precursor components), and the medium is stable, non-corrosive, and not easily condensed. The flow meter 15 operates in this environment without concerns about material compatibility, can maintain high-precision measurement for a long time, and has a longer maintenance cycle, which can indirectly realize flow monitoring of pipeline 6.

[0024] Furthermore, in the illustrated embodiment, the flow meter 15 is a mass flow meter (MFM). Due to its inherent characteristics, the MFM device has no control function and only performs signal reading, thus responding quickly and having a significant cost advantage compared to the MFC.

[0025] Continue to refer to Figure 1 As shown, a valve 2 16 is also installed on the second pipeline 6, and the valve 2 16 is located in front of the control valve 10. By adjusting the valve 2 16, the pressure of the second pipeline can be increased, so as to avoid the excessive pressure difference between the first pipeline and the second pipeline causing the nitrogen in the first pipeline 5 to be drawn back, thus ensuring the airflow stability of the first pipeline 5.

[0026] In a preferred embodiment, both valve 8 and valve 16 are needle valves. The needle valve can generate significant resistance in the fluid channel, thus throttling and reducing the pressure and flow rate of the fluid. This keeps the pressure difference between pipeline 5 and pipeline 6 within a reasonable range, generally set between 50 and 150 torr, which can prevent the precursor in pipeline 6 from flowing back into pipeline 5 and also prevent excessive nitrogen from being drawn into pipeline 6. Furthermore, the needle valve has a high adjustment accuracy, significantly better than other conventional valves, which can ensure the stability of the device operation.

[0027] The following is in conjunction with the appendix Figure 1 The principle of the device in this embodiment will be explained in detail: ① First, adjust the opening of needle valve control valve 10 and control valve 21 to the maximum; connect nitrogen gas from end 2 of the main pipeline, and control the total flow rate to Flow0 using flow controller 4 (MFM); ② Close all control valves in pipeline 26 (including control valve 10, control valve 21, and control valves on branch pipe 12 and branch pipe 23), open control valve 39 on pipeline 15, and read the pressure gauge 3 reading as P10; adjust valve 18 clockwise to increase the pressure gauge 3 reading to a certain experimental value, the reading is P11; ③ Close control valve 39 in pipeline 5, open control valve 10 and control valve 21 on pipeline 6, and read the pressure gauge 3 reading as P20; under normal circumstances, due to the valve blocking effect in pipeline 6, P20 is slightly higher than P10; adjust valve 216 clockwise to increase the pressure gauge reading to a certain experimental value, the reading is P21; ④ To avoid the precursor being drawn back into pipe 5, the difference between P11 and P21 is 50 < ΔP < 150 torr; ⑤ Simultaneously open control valve 10, control valve 21, and control valve 39 in pipeline 1 (5) and pipeline 2 (6), and read the real-time MFM value Flow1. The real-time flow rate of the carrier gas in pipeline 2 (6) is Flow2 = Flow0 - Flow1.

[0028] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0029] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0032] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and simple improvements made on the substantive content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A precursor administration device, characterized by, It includes a main pipeline (2) connected to a nitrogen source (1), and a pressure gauge (3) and a flow controller (4) are installed on the main pipeline (2); The outlet end of the main pipeline (2) is connected to pipeline one (5) and pipeline two (6) respectively, and the outlet ends of pipeline one (5) and pipeline two (6) are connected to the reaction chamber (7). The pipeline 1 (5) is provided with valve 1 (8) and control valve 3 (9) in sequence; Control valve 1 (10) and control valve 2 (11) are sequentially installed on the second pipeline (6). The second pipeline (6) is also connected to the precursor container (14) through branch pipe 1 (12) and branch pipe 2 (13). A flow meter (15) is also installed on the first (5) or the second (6) pipeline.

2. The precursor administration device of claim 1, wherein, The flow meter (15) is installed on the pipeline (5) and located between the valve (8) and the control valve (9).

3. The precursor administration device of claim 2, wherein, The second pipeline (6) is also equipped with a second valve (16).

4. The precursor administration device of claim 3, wherein, The second valve (16) is located at the front end of the first control valve (10).

5. The precursor administration device of claim 3, wherein, Both valve one (8) and valve two (16) are needle valves.

6. The precursor administration device of claim 1, wherein, The flow meter (15) is a mass flow meter.

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