A type of heat insulation cylinder for the hot zone of a single crystal furnace

Abstract

This utility model relates to the field of single crystal furnace technology, specifically a heat-insulating cylinder for the hot zone of a single crystal furnace. It includes a single crystal furnace outer shell body, with a first annular groove at the bottom inside the outer shell body. The heat-insulating cylinder outer shell body is housed inside the first annular groove. A furnace bottom tray is installed at the bottom inside the outer shell body, and a second threaded hole is provided inside the furnace bottom tray. A positioning and fixing component is installed inside the second threaded hole. A crucible drive shaft assembly penetrating the bottom of the single crystal furnace outer shell body is installed at the bottom of the furnace bottom tray. This utility model firstly allows a lifting block to slide on the outer wall of a vertical rod via a connecting plate, compressing a high-temperature, high-pressure spring to deform. This causes the lifting block to rise and fall, thereby raising and lowering a limiting rod to engage with the limiting groove. This facilitates the installation and disassembly of the heat-insulating cylinder outer shell body by operators, reducing their workload.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, and in particular to a heat-insulating cylinder for the hot zone of a single crystal furnace. Background Technology

[0002] A single crystal furnace is a device that melts polycrystalline silicon and other materials through a graphite heater under the protection of an inert gas (such as nitrogen or helium) to grow dislocation-free single crystals using the Czochralski method. It is primarily used in semiconductor manufacturing and the photovoltaic industry. The furnace melts polycrystalline silicon raw materials at high temperatures (above 1450°C) and, in a low vacuum and gas-protected environment, induces supercooled growth through the insertion of amethysts into the melt, ultimately forming a single crystal rod. The production process includes steps such as raw material loading, heating and melting, necking growth, shoulder growth, constant diameter growth, and tail growth. The furnace insulation cylinder is a key component for the furnace's thermal field, primarily used to insulate the lower part of the crucible. By reducing heat loss and regulating temperature distribution, it lowers the reaction rate between the crucible and the molten silicon, thereby improving the quality of the single crystal growth.

[0003] Currently available insulation cylinders for single crystal furnace hot zones require disassembly and maintenance after prolonged use. This inconveniences operators and increases their workload during installation and disassembly. Furthermore, existing insulation cylinders are not convenient for operators to install and disassemble the heaters, causing further inconvenience. Therefore, a new type of insulation cylinder for single crystal furnace hot zones is needed to meet these user needs. Utility Model Content

[0004] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the present invention.

[0005] Given that the existing single crystal furnace hot zone insulation cylinders on the market require disassembly and maintenance during long-term use, the installation and disassembly of the insulation cylinders cause inconvenience to operators and increase their labor intensity. At the same time, the existing single crystal furnace hot zone insulation cylinders are not convenient for operators to install and disassemble the heaters, thus causing inconvenience to operators. Therefore, there is a need for a new type of single crystal furnace hot zone insulation cylinder to meet people's usage needs.

[0006] Therefore, the purpose of this utility model is to provide a heat-insulating cylinder for the hot zone of a single crystal furnace.

[0007] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a heat-insulating cylinder for the hot zone of a single crystal furnace, comprising a single crystal furnace outer shell body, a first annular groove being formed at the bottom of the inner part of the single crystal furnace outer shell body, and a heat-insulating cylinder outer shell body being disposed inside the first annular groove, a furnace bottom tray being installed at the bottom of the inner part of the single crystal furnace outer shell body, and a second threaded hole being formed inside the furnace bottom tray, with a positioning and fixing component disposed inside the second threaded hole, a crucible drive shaft assembly penetrating the bottom of the single crystal furnace outer shell body being installed at the bottom of the furnace bottom tray, a second annular groove being formed at the bottom of the inner part of the single crystal furnace outer shell body, a crucible body being installed at the bottom of the inner part of the single crystal furnace outer shell body, and a graphite heater being sleeved on the outer wall of the crucible body, the graphite heater cooperating with the second annular groove, a limit groove being formed at the top of the heat-insulating cylinder outer shell body, an installation and disassembly component being installed on the inner wall of the single crystal furnace outer shell body, and a sealing cap body being provided at the top of the single crystal furnace outer shell body.

[0008] As a preferred embodiment of the heat insulation cylinder for the hot zone of a single crystal furnace according to this utility model, the installation and disassembly assembly includes a rectangular groove, which is opened on the inner wall of the main body of the single crystal furnace shell. A lifting block is provided inside the rectangular groove, and a connecting plate is installed on one side wall of the lifting block. A limit rod is installed at the bottom end of the connecting plate, and a U-shaped frame is installed at the top end of the connecting plate. A first through hole is opened inside the lifting block.

[0009] By adopting the above technical solution, this solution uses a welded integrated structure of connecting plate and limiting rod, so that the lifting block can drive the connecting plate and limiting rod to lift simultaneously.

[0010] As a preferred embodiment of the heat insulation cylinder for the hot zone of a single crystal furnace according to this utility model, the top and bottom ends of the rectangular groove are fixedly installed with vertical rods penetrating the first through hole, and the outer walls of the vertical rods are all fitted with high temperature and high pressure springs, and the two ends of the high temperature and high pressure springs are respectively fixedly connected to the lifting block and the side wall of the rectangular groove.

[0011] By adopting the above technical solution, this solution uses the sliding of the lifting block on the outer wall of the vertical rod to compress the high-temperature and high-pressure spring, causing deformation. The elastic recovery of the high-temperature and high-pressure spring then drives the lifting block to reciprocate up and down on the outer wall of the vertical rod.

[0012] As a preferred embodiment of the heat insulation cylinder for the hot zone of a single crystal furnace according to this utility model, the outer wall of the limiting rod is equipped with an anti-slip pad, and the limiting rod and the limiting groove cooperate with each other.

[0013] By adopting the above technical solution, an anti-slip pad is installed on the outer wall of the limiting rod, so that the limiting rod fits into the limiting groove through the anti-slip pad, thereby improving the sliding effect of the limiting rod inside the limiting groove.

[0014] As a preferred embodiment of the heat insulation cylinder for the hot zone of a single crystal furnace according to this utility model, the positioning and fixing assembly includes a bolt rod body, the bolt rod body is threadedly connected to the inside of the second thread hole, one end of the bolt rod body is rotatably mounted with a positioning plate through a bearing, and the outer wall of the positioning plate is provided with anti-slip texture, and a disc body is mounted at the end of the bolt rod body away from the positioning plate.

[0015] By adopting the above technical solution, the bolt rod body is threadedly connected to the second threaded hole, allowing the bolt rod body to rotate and slide inside the second threaded hole.

[0016] As a preferred embodiment of the heat insulation cylinder for the hot zone of a single crystal furnace according to this utility model, the positioning plate is in the shape of a semi-circular arc, the side wall of the positioning plate is equipped with a wear-resistant pad, and the material of the positioning plate is a nickel-based alloy.

[0017] By adopting the above technical solution, wear-resistant pads are installed on the side walls of the positioning plate, thereby improving the positioning and fixing effect of the positioning plate through the design of the wear-resistant pads.

[0018] As a preferred embodiment of the heat insulation cylinder for the hot zone of a single crystal furnace according to this utility model, a first flange is installed at the top of the main body of the single crystal furnace shell, and the first flange is provided with a first threaded hole inside.

[0019] By adopting the above technical solution, the diameter of the first flange is larger than the diameter of the main body of the single crystal furnace shell, and the first flange and the sealing cover body cooperate with each other, thereby improving the assembly effect between the sealing cover body and the first flange.

[0020] As a preferred embodiment of the heat insulation cylinder for the hot zone of a single crystal furnace according to this utility model, the sealing cover body has a third threaded hole inside, and a screw fixing pin is threadedly connected inside the third threaded hole. The screw fixing pin is threadedly connected to the first threaded hole, and a seed crystal shaft tube is installed at the top of the sealing cover body.

[0021] By adopting the above technical solution, the sealing cover body and the single crystal furnace outer shell body are installed and disassembled by rotating the screw fixing pins, which are connected to the third thread hole and the first thread hole respectively.

[0022] The heat insulation cylinder for the hot zone of a single crystal furnace according to this utility model has the following beneficial effects:

[0023] This invention firstly uses screws to connect to the third and first threaded holes respectively, allowing the sealing cover body and the single crystal furnace outer shell body to be disassembled and opened by rotating the screws. Simultaneously, the outer shell body of the insulation barrel cooperates with the first annular groove, allowing the outer shell body of the insulation barrel to be inserted into the inner part of the first annular groove. At the same time, the limiting groove and the limiting rod cooperate with each other, allowing the connecting plate to drive the lifting block to slide on the outer wall of the vertical rod and compress the high-temperature and high-pressure spring to deform, thereby causing the lifting block to rise and fall, which in turn drives the limiting rod to rise and fall and not engage with the limiting groove. This facilitates the installation and disassembly of the outer shell body of the insulation barrel by the operator, reducing the labor intensity of the operator.

[0024] This invention firstly designs a graphite heater, which cooperates with the second annular groove and is threaded to the main body of the bolt rod through the second threaded hole. The main body of the bolt rod is rotatably connected to the positioning plate through a bearing, allowing the main body of the bolt rod to rotate and slide inside the second threaded hole, thereby driving the positioning plate to slide and positioning and fixing the graphite heater. This makes it easier for operators to position and fix the graphite heater, thus facilitating operation and reducing the labor intensity of operators. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0026] Figure 1 This is a cross-sectional schematic diagram of the internal structure of a heat-insulating cylinder used in the hot zone of a single crystal furnace;

[0027] Figure 2 A type of heat insulation cylinder for the hot zone of a single crystal furnace Figure 1 Enlarged structural diagram at point A in the middle;

[0028] Figure 3 This is a schematic diagram of the positioning and fixing component structure of a heat insulation cylinder for a single crystal furnace hot zone;

[0029] Figure 4 This is a schematic diagram of the installation and disassembly assembly structure of a heat insulation cylinder for a single crystal furnace hot zone;

[0030] Figure 5 A schematic diagram of a graphite heater structure for a heat-insulating cylinder in the hot zone of a single crystal furnace;

[0031] Figure 6 This is a schematic diagram of the internal structure of the main body of a single crystal furnace shell, which is used as a heat insulation cylinder in the hot zone of a single crystal furnace.

[0032] Figure 7 This is a schematic diagram of the main structure of a heat-insulating cylinder used in the hot zone of a single crystal furnace.

[0033] The attached diagram lists the components represented by each number as follows:

[0034] 1. Single crystal furnace outer shell body; 101. First annular groove; 102. First flange; 103. First threaded hole; 2. Insulation tank outer shell body; 201. Limiting groove; 3. Furnace bottom tray; 301. Second annular groove; 302. Second threaded hole; 303. Crucible drive shaft assembly; 4. Graphite heater; 5. Crucible body; 6. Installation and disassembly assembly; 601. Rectangular groove; 602. Lifting block; 6021. First through hole; 603. Connecting plate; 604. Limiting rod; 605. U-shaped frame; 606. Vertical rod; 607. High temperature and high pressure resistant spring; 7. Positioning and fixing assembly; 701. Bolt rod body; 702. Positioning plate; 7021. Wear-resistant pad; 703. Disc body; 8. Sealing cover body; 801. Third threaded hole; 802. Screw fixing nail; 803. Seed crystal shaft tube. Detailed Implementation

[0035] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0036] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0037] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0038] Example 1: Refer to Figures 1-7This is the first embodiment of the present invention, which provides a heat insulation cylinder for the hot zone of a single crystal furnace. It addresses the problem that existing heat insulation cylinders for the hot zone of single crystal furnaces on the market require disassembly and maintenance during prolonged use, causing inconvenience and increasing the workload for operators. Furthermore, existing heat insulation cylinders for the hot zone of single crystal furnaces are not convenient for operators to install and disassemble the heater, thus causing inconvenience. The first embodiment includes a single crystal furnace outer shell body 1, with a first annular groove 101 formed at the bottom inside the outer shell body 1, and a heat insulation device is provided inside the first annular groove 101. The main body 2 of the heat preservation barrel and the main body 1 of the single crystal furnace are equipped with a furnace bottom tray 3 at the bottom. The furnace bottom tray 3 has a second threaded hole 302 inside. The bottom of the furnace bottom tray 3 is equipped with a crucible drive shaft assembly 303 that penetrates the bottom of the main body 1 of the single crystal furnace. The bottom of the furnace bottom tray 3 has a second annular groove 301 inside. The bottom of the main body 1 of the single crystal furnace is equipped with a crucible body 5. The outer wall of the crucible body 5 is fitted with a graphite heater 4. The graphite heater 4 and the second annular groove 301 cooperate with each other. The top of the main body 2 of the heat preservation barrel is provided with a limit groove 201. The inner wall of the main body 1 of the single crystal furnace is equipped with an installation and disassembly assembly 6.

[0039] Combination Figure 1 , Figure 4 and Figure 6 In an embodiment of this utility model, the installation and disassembly assembly 6 includes a rectangular groove 601. The rectangular groove 601 is formed on the inner wall of the single crystal furnace outer shell 1. A lifting block 602 is provided inside the rectangular groove 601, and a connecting plate 603 is installed on one side wall of the lifting block 602. A limit rod 604 is installed at the bottom end of the connecting plate 603, and a U-shaped frame 605 is installed at the top end of the connecting plate 603. A first through hole 6021 is formed inside the lifting block 602, and through holes 6021 are fixedly installed at the top and bottom ends of the rectangular groove 601. The vertical rod 606 of 6021 is fitted with a high-temperature and high-pressure resistant spring 607 on its outer wall. The two ends of the high-temperature and high-pressure resistant spring 607 are fixedly connected to the side wall of the lifting block 602 and the rectangular groove 601, respectively. The outer wall of the limiting rod 604 is equipped with an anti-slip pad. The limiting rod 604 and the limiting groove 201 cooperate with each other. The anti-slip pad on the outer wall of the limiting rod 604 makes the limiting rod 604 fit against the limiting groove 201, thereby making the sliding effect of the limiting rod 604 inside the limiting groove 201 better.

[0040] The specific working principle is as follows: When it is necessary to install and disassemble the outer shell body 2 of the heat preservation bucket, the screw fixing pin 802 is first threadedly connected to the third threaded hole 801 and the first threaded hole 103 respectively. Rotating the screw fixing pin 802 allows the sealing cover body 8 to be disassembled and opened from the single crystal furnace outer shell body 1. At the same time, the outer shell body 2 of the heat preservation bucket cooperates with the first annular groove 101, thereby inserting the outer shell body 2 of the heat preservation bucket into the interior of the first annular groove 101. Simultaneously, the limiting groove 201 cooperates with the limiting rod 604, so that the connecting plate 603 can drive the lifting block 602 to slide on the outer wall of the vertical rod 606 and compress the high temperature and high pressure spring 607 to deform, thereby causing the lifting block 602 to rise and fall, which in turn drives the limiting rod 604 to rise and fall and not engage with the limiting groove 201. This facilitates the installation and disassembly of the outer shell body 2 of the heat preservation bucket by the operator and reduces the labor intensity of the operator.

[0041] Example 2: Refer to Figures 1-7 This is the first embodiment of the present invention. This embodiment provides a middle insulation cylinder for the hot zone of a single crystal furnace. It addresses the issue that existing middle insulation cylinders for the hot zone of single crystal furnaces on the market require disassembly and maintenance during prolonged use, causing inconvenience and increasing the workload for operators. Furthermore, existing middle insulation cylinders for the hot zone of single crystal furnaces are not convenient for operators to install and disassemble the heater, thus causing inconvenience. A positioning and fixing component 7 is provided inside the second threaded hole 302. The positioning and fixing component 7 includes a bolt rod body 701, and a bolt... The main body 701 is threaded into the second threaded hole 302. One end of the main body 701 is rotatably mounted with a positioning plate 702 via a bearing, and the outer wall of the positioning plate 702 is provided with anti-slip texture. The end of the main body 701 away from the positioning plate 702 is mounted with a disc body 703. The positioning plate 702 is semi-circular in shape, and a wear-resistant pad 7021 is installed on the side wall of the positioning plate 702. The positioning plate 702 is made of nickel-based alloy. The design of the wear-resistant pad 7021 improves the positioning and fixing effect of the positioning plate 702.

[0042] Combination Figure 1 , Figure 6 and Figure 7In this embodiment of the present invention, a sealing cover body 8 is provided at the top of the single crystal furnace shell body 1. A first flange 102 is installed at the top of the single crystal furnace shell body 1, and a first threaded hole 103 is opened inside the first flange 102. A third threaded hole 801 is opened inside the sealing cover body 8, and a screw fixing pin 802 is threadedly connected inside the third threaded hole 801. The screw fixing pin 802 is threadedly connected to the first threaded hole 103. A seed crystal shaft tube 803 is installed at the top of the sealing cover body 8. The diameter of the first flange 102 is larger than the diameter of the single crystal furnace shell body 1, and the first flange 102 and the sealing cover body 8 cooperate with each other to improve the assembly effect of the sealing cover body 8 and the first flange 102.

[0043] The specific working principle is as follows: when the graphite heater 4 needs to be installed and disassembled, the screw fixing pin 802 is first threadedly connected to the third threaded hole 801 and the first threaded hole 103 respectively. Rotating the screw fixing pin 802 allows the sealing cover body 8 to be disassembled and opened from the single crystal furnace outer shell body 1. At the same time, through the design of the graphite heater 4, and through the interaction between the graphite heater 4 and the second annular groove 301, and through the threaded connection between the second threaded hole 302 and the bolt rod body 701, and through the bearing rotational connection between the bolt rod body 701 and the positioning plate 702, the bolt rod body 701 rotates and slides inside the second threaded hole 302, driving the positioning plate 702 to slide, thereby positioning and fixing the graphite heater 4. This makes it easier for the operator to position and fix the graphite heater 4, thus facilitating the operation and reducing the labor intensity of the operator.

[0044] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A middle insulation cylinder for a heat field of a single crystal furnace, characterized by: include, The single crystal furnace outer shell body (1) has a first annular groove (101) at the bottom inside, and a heat preservation barrel outer shell body (2) is installed inside the first annular groove (101). A furnace bottom tray (3) is installed at the bottom inside the single crystal furnace outer shell body (1), and a second threaded hole (302) is opened inside the furnace bottom tray (3). A positioning and fixing component (7) is installed inside the second threaded hole (302). A crucible drive shaft assembly (30) penetrating the bottom of the single crystal furnace outer shell body (1) is installed at the bottom of the furnace bottom tray (3). 3) The bottom of the furnace bottom tray (3) is provided with a second annular groove (301). The bottom of the single crystal furnace shell body (1) is provided with a crucible body (5). The outer wall of the crucible body (5) is fitted with a graphite heater (4). The graphite heater (4) and the second annular groove (301) cooperate with each other. The top of the heat preservation barrel shell body (2) is provided with a limiting groove (201). The inner wall of the single crystal furnace shell body (1) is provided with an installation and disassembly assembly (6). The top of the single crystal furnace shell body (1) is provided with a sealing cover body (8).

2. The heat-insulating cylinder for the hot zone of a single crystal furnace as described in claim 1, characterized in that: The installation and disassembly assembly (6) includes a rectangular groove (601), which is opened on the inner wall of the single crystal furnace shell body (1). A lifting block (602) is provided inside the rectangular groove (601), and a connecting plate (603) is installed on one side wall of the lifting block (602). A limit rod (604) is installed at the bottom end of the connecting plate (603), and a U-shaped frame (605) is installed at the top end of the connecting plate (603). A first through hole (6021) is opened inside the lifting block (602).

3. The heat-insulating cylinder for the hot zone of a single crystal furnace as described in claim 2, characterized in that: The top and bottom ends of the rectangular groove (601) are fixedly installed with vertical rods (606) that pass through the first through hole (6021). The outer walls of the vertical rods (606) are all fitted with high temperature and high pressure springs (607), and the two ends of the high temperature and high pressure springs (607) are fixedly connected to the lifting block (602) and the side wall of the rectangular groove (601), respectively.

4. The heat-insulating cylinder for the hot zone of a single crystal furnace as described in claim 2, characterized in that: The outer wall of the limiting rod (604) is equipped with an anti-slip pad, and the limiting rod (604) cooperates with the limiting groove (201).

5. The heat-insulating cylinder for the hot zone of a single crystal furnace as described in claim 1, characterized in that: The positioning and fixing assembly (7) includes a bolt rod body (701), which is threaded into the interior of the second threaded hole (302). One end of the bolt rod body (701) is rotatably mounted with a positioning plate (702) via a bearing, and the outer wall of the positioning plate (702) is provided with anti-slip texture. A disc body (703) is mounted on the end of the bolt rod body (701) away from the positioning plate (702).

6. The heat-insulating cylinder for the hot zone of a single crystal furnace as described in claim 5, characterized in that: The positioning plate (702) is semi-circular in shape, and wear-resistant pads (7021) are installed on the side walls of the positioning plate (702). The material of the positioning plate (702) is nickel-based alloy.

7. The heat-insulating cylinder for the hot zone of a single crystal furnace as described in claim 6, characterized in that: The top of the single crystal furnace shell body (1) is equipped with a first flange (102), and the first flange (102) is provided with a first thread hole (103) inside.

8. The heat-insulating cylinder for the hot zone of a single crystal furnace as described in claim 1, characterized in that: The sealing cap body (8) has a third threaded hole (801) inside, and a screw fixing pin (802) is threaded inside the third threaded hole (801). The screw fixing pin (802) is threadedly connected to the first threaded hole (103). A seed crystal shaft tube (803) is installed at the top of the sealing cap body (8).

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