Gas injection device

Abstract

This utility model provides a gas injection device, including a cover, air inlets, and gas supply pipes. The cover has several sets of mounting structures. Several air inlets are provided, each detachably mounted to the cover via one or more sets of mounting structures. Each air inlet includes a guide section and a spray section, with each spray section detachably mounted to the bottom surface of the cover via mounting structures. The guide section penetrates the cover from the top surface and connects to the spray section. Several gas supply pipes are provided, each corresponding to one of the guide sections. This application allows for the selection of spray sections with different structures and the arrangement of air inlets according to process requirements for gas distribution, resulting in more flexible and versatile combinations that can meet various process needs and greatly enhance the ability to regulate gas distribution.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a gas injection device. Background Technology

[0002] Gas injection devices are key components of semiconductor processing equipment, such as metal-organic chemical vapor deposition (MOCVD) equipment. Source gas enters the process chamber through the gas injection device, diffuses onto the substrate surface, and grows into a semiconductor material layer under specific temperature and pressure. The structural design of the gas injection device, such as orifice diameter, orifice spacing, and arrangement, determines the uniformity of gas distribution, directly affecting the thickness uniformity, crystal quality, and defect density of the semiconductor material layer.

[0003] Some semiconductor material layers, such as large-size epitaxial wafers and light-emitting diode (LED) epitaxial wafers, require high uniformity in epitaxial layer thickness. Existing gas injection devices typically integrate a multi-cavity structure internally, regulating gas distribution by controlling the type, flow rate, injection sequence, and duration of the source gas flowing through each cavity. However, this method has limited ability to regulate gas distribution. Utility Model Content

[0004] The purpose of this invention is to provide a gas injection device that allows for the selection of spray sections with different structures and the arrangement of air inlets according to the process requirements for gas distribution. This makes the combination more flexible and versatile, meets a variety of different process needs, and greatly enhances the ability to regulate gas distribution.

[0005] To achieve the above objectives, the gas injection device of this utility model includes a cover, gas supply pipes, and several gas inlets; several sets of mounting structures are arranged sequentially on the bottom surface of the cover, and each gas inlet is detachably mounted to the cover through one or more sets of mounting structures; each gas inlet includes a guide section and a spray section, and each spray section is detachably mounted to the bottom surface of the cover through the mounting structure, and the guide section passes through the top surface of the cover and communicates with the spray section; several gas supply pipes are provided and are connected to each of the guide sections one by one.

[0006] Preferably, the gas injection device further includes a purge gas pipe that connects to the interior of the cover body from the side wall of the cover body. The cover body is a hollow structure, and the bottom surface of the cover body is provided with a plurality of purge gas outlets, which are arranged between adjacent mounting structures.

[0007] Preferably, each of the air inlets includes at least two air guides, each of the air guides sealingly penetrating the cover.

[0008] Preferably, the gas injection device further includes several sealing components, which are detachably disposed at the purge gas outlet to block the purge gas outlet.

[0009] Preferably, each set of the installation structure includes a first snap-fit ​​structure, and the spray section is provided with a second snap-fit ​​structure that is detachably adapted to the first snap-fit ​​structure; and the first snap-fit ​​structure and the second snap-fit ​​structure are detachably adapted to each other in a concave-convex fit manner.

[0010] Preferably, the gas injection device further includes a locking member, the outer wall of the gas guide portion is provided with an external thread structure, the inner wall of the locking member is provided with an internal thread structure adapted to the external thread structure, and the locking member is sleeved on the gas guide portion to fix the relative positional relationship between the gas guide portion and the cover.

[0011] Preferably, the axial length of the air guide is greater than the distance between the end face of the locking member away from the cover and the base disposed in the reaction chamber.

[0012] Preferably, the top surface of the cover is provided with a fixing member, and the air guide portion is provided through the fixing member in a dynamic sealing manner; the outer wall of the air guide portion is provided with a number of sets of spaced height positioning members along the axial direction of the air guide portion so that the height positioning members can protrude from the outer wall of the air guide portion and be housed in the air guide portion; the fixing member is provided with a number of sets of through hole structures along the axial direction of the air guide portion to fix the corresponding height positioning members by snap-fit.

[0013] Preferably, the height positioning component includes a plurality of receiving grooves and a plurality of elastic snap-fit ​​structures. The plurality of receiving grooves are spaced apart circumferentially along the air guide portion. The plurality of elastic snap-fit ​​structures are correspondingly disposed in the receiving grooves so as to retract into the receiving grooves when subjected to force, and to protrude from the outer wall of the air guide portion after the external force is removed. The outer diameter of the snap-fit ​​ring structure formed by the plurality of elastic snap-fit ​​structures protruding from the outer wall of the air guide portion is larger than the inner diameter of the fixing component, so that the snap-fit ​​ring structure of the height positioning component can be snapped and fixed to the corresponding through hole structure of the fixing component.

[0014] Preferably, the cover has a square structure, and each of the mounting structures has a rectangular or square structure and is arranged along the length or width direction of the cover.

[0015] The beneficial effects of the gas injection device of this utility model are as follows: (1) This application can select different structures of the spray section according to the process requirements for gas distribution, and set the air inlet to different arrangements, making the combination more flexible and versatile, improving the configuration flexibility, and meeting a variety of different process requirements; (2) Each of the spray units is detachably mounted on the bottom surface of the cover through each of the mounting structures, so that the air inlet can be flexibly arranged and combined according to the process requirements for gas distribution and then installed in the corresponding position of the cover, which greatly enhances the ability to adjust the gas distribution and makes the gas injection device universally applicable to different process requirements, especially different gas distribution process requirements, and has a wider range of applications. (3) This application is beneficial to improving the uniformity of gas distribution, which is beneficial to improving the film quality and avoiding the impact of uneven gas distribution on the thickness uniformity and crystal quality of semiconductor material layers, as well as the resulting defect density. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the gas injection device disposed in the reaction chamber according to an embodiment of the present invention.

[0017] Figure 2 This is a schematic diagram of the air inlet component in the gas injection device according to an embodiment of the present invention.

[0018] Figure 3 This is a cross-sectional view of the air inlet component in the gas injection device according to an embodiment of the present invention.

[0019] Figure 4 This is a schematic diagram of the projection structure of the air inlet component on the cover in the gas injection device of this utility model embodiment.

[0020] Figure 5 This is a schematic diagram of the structure of the cover in the gas injection device according to an embodiment of the present invention. Figure 1 .

[0021] Figure 6 This is a schematic diagram of the structure of the cover in the gas injection device according to an embodiment of the present invention. Figure 2 .

[0022] Figure 7 This is a schematic diagram of the gas injection device according to an embodiment of the present invention.

[0023] Figure 8 This is a schematic diagram of the locking component in the gas injection device according to an embodiment of the present invention.

[0024] Figure 9 This is a first-view structural diagram of the air inlet and cover in the gas injection device according to an embodiment of the present invention.

[0025] Figure 10This is a second-view structural diagram of the air inlet and cover in the gas injection device according to an embodiment of the present invention.

[0026] Figure 11 This is a schematic diagram of the structure of the gas injection device in the first position according to an embodiment of the present invention.

[0027] Figure 12 This is a schematic diagram of the gas injection device in an embodiment of the present invention, showing the gas inlet component located in the second position.

[0028] Figure 13 A schematic diagram of the structure of the gas injection device according to an embodiment of the present invention, showing the cover having a purge gas outlet.

[0029] Figure 14 This is a schematic diagram of the gas flow direction when the cover of the gas injection device in this embodiment of the present invention has a purge gas outlet.

[0030] Explanation of reference numerals in the attached figures: 1. Cover; 11. Mounting structure; 111. Through section; 112. Frame-shaped groove; 113. Locking element; 12. Mounting slot; 2. Air inlet; 201. First air inlet; 202. Second air inlet; 203. Third air inlet; 204. Fourth air inlet; 205. Fifth air inlet; 21. Air guide section; 211. External thread structure; 212. Height positioning element; 2121. First height positioning element; 212 2. Second height positioning component; 213. Elastic snap-fit ​​structure; 214. Receiving groove; 22. Spray section; 221. First spray section; 222. Second spray section; 223. Spray hole; 224. First source gas; 225. Second source gas; 3. Reaction chamber; 31. Base; 4. Fixing component; 41. Through hole structure; 5. Purge gas outlet; 51. Purge gas inlet; 52. Purge gas; 6. Sealing component. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0032] To overcome the problems existing in the prior art, this utility model provides a gas injection device that can select spray sections with different structures and set the air inlet components in different arrangements according to the process requirements for gas distribution. The combination is more flexible and versatile, which can meet a variety of different process requirements and greatly enhance the ability to adjust the gas distribution.

[0033] In some embodiments of this utility model, reference is made to Figures 1 to 14 The gas injection device includes a cover 1, an air inlet 2, and an air supply pipe (not shown in the figure); several sets of mounting structures 11 are arranged sequentially on the bottom surface of the cover 1; several air inlets 2 are provided, and each air inlet 2 is detachably mounted on the cover 1 through one or more sets of mounting structures 11. Each air inlet 2 includes an air guide 21 and a spray section 22. Each spray section 22 is detachably mounted on the bottom surface of the cover 1 through the mounting structure 11. The air guide 21 passes through the top surface of the cover 1 and communicates with the spray section 22, that is, the air guide 21 communicates with the interior of the spray section 22 through the top of the spray section 22; several air supply pipes (not shown in the figure) are provided and are connected to each air guide 21 in a one-to-one manner.

[0034] The modular design of the air inlet 2 in this application, and the detachable mounting of each spray section 22 to the bottom surface of the cover 1 via each mounting structure 11, allows for the selection of different structures of the spray sections 22 and the arrangement of the air inlet 2 according to the process requirements for gas distribution. This results in more flexible and varied combinations, improving configuration flexibility and meeting a variety of different process needs. Furthermore, the air inlet 2 can be flexibly arranged and combined according to the process requirements for gas distribution and installed at the corresponding positions on the cover 1, greatly enhancing the ability to adjust the gas distribution. This makes the gas injection device universally applicable to different process requirements, especially different gas distribution process requirements, with a wider range of adaptability. Moreover, this application is beneficial for improving the uniformity of gas distribution, which is beneficial for improving film formation quality and avoiding the impact of uneven gas distribution on the thickness uniformity and crystal quality of semiconductor material layers, as well as causing defect density.

[0035] In this embodiment, the cover 1 covers the top of the reaction chamber 3, the spray section 22 is disposed on the side of the cover 1 facing the reaction chamber 3, and the air guide section 21 penetrates the cover 1 and extends into the reaction chamber 3 to connect with the spray section 22.

[0036] In some embodiments of this utility model, the cover 1 is circular, and each mounting structure 11 is rectangular or square and arranged radially along the cover 1.

[0037] In some embodiments of this utility model, the cover 1 has a square structure, and each mounting structure 11 has a rectangular or square structure and is arranged along the length or width direction of the cover 1. In some specific embodiments, the cover 1 has a rectangular or square structure, and the specific structure and size specifications are flexibly adapted according to the process requirements for gas injection. Compared with a circular cover, a square cover is easier to adapt to the rectangular or square mounting structures, which is beneficial for flexibly adjusting the arrangement of each air inlet 2 and improving the utilization efficiency of its installation space.

[0038] In some embodiments of this utility model, the spray section 22 has a hollow structure, the air guide section 21 penetrates the cover 1 and extends into the reaction chamber 3, penetrates the top of the spray section 22 and communicates with the interior of the spray section 22, and the bottom of the spray section 22 is provided with an air inlet channel.

[0039] In some embodiments of this utility model, the gas supply pipe is provided with a plurality of pipes and is connected to each of the gas guides 21 in a one-to-one manner. Each of the gas inlets 2 is connected to the same or different gas supply ends through the gas supply pipes. The structures of the spray sections 22 of any two gas inlets 2 connected to the same gas supply ends are the same or different. The structures of the spray sections 22 of any two gas inlets 2 connected to different gas supply ends are the same or different.

[0040] In some embodiments of this utility model, reference is made to Figure 3 The spray section 22 faces the side of the reaction chamber 3 (e.g., Figure 3The air inlet channel (at the bottom of the spray section 22) includes a plurality of spray holes 223. Different structures of the spray section 22 include at least one difference in the size of the spray section 22, the diameter of the spray holes 223, the shape of the spray holes 223, the arrangement of the spray holes 223, and the spacing between adjacent spray holes 223. Different process gases (such as etching gases and deposition gases) may require different flow rates, uniformity, or reaction rates. This application allows for the selection of spray sections 22 with different structures according to the process requirements for gas distribution. For example, large-diameter spray holes 223 can be used to increase the flow rate of the injected gas. This allows for zone control of the spray area to match different process requirements by adjusting the structural features of the spray section 22 and the arrangement of the air inlet 2, greatly enhancing the ability to regulate gas distribution and making the gas injection device universally applicable to different process requirements, especially different gas distribution process requirements. The spacing between adjacent spray holes 223 is the density of the spray holes 223 provided in the spray section 22. Specifically, the dimensions of the spray section 22, the diameter of the spray holes 223, the shape and structure of the spray holes 223, the arrangement of the spray holes, and the spacing between adjacent spray holes 223 in each of the air inlet components 2 are determined according to the process requirements for gas distribution. For example, the arrangement of the spray holes may include a rectangular array or a grid arrangement. Different arrangement of the spray holes will affect the uniformity of gas diffusion and must be coordinated with the process requirements.

[0041] In some embodiments of this utility model, the air inlet channel provided at the bottom of the spray section 22 is not limited to spray holes, but can also be a strip-shaped gap structure, or a combination of a strip-shaped gap structure and a hole structure.

[0042] In some specific embodiments of this utility model, the air intake component 2 includes a first air intake component 201 and a second air intake component 202. The size of the spray section 22 in the first air intake component 201 is the same as the size of the spray section 22 in the second air intake component 202. Figure 4As shown, the spray nozzle 223 structures of the spray section 22 in the first air intake 201 and the spray nozzle 223 structures of the spray section 22 in the second air intake 202 are different. The spray nozzle 223 structure includes at least one of the following: the aperture of the spray nozzle 223, the shape of the spray nozzle 223, the arrangement of the spray nozzles, and the spacing between adjacent spray nozzles 223. In other specific embodiments of this utility model, the dimensions of the spray section 22 in the first air intake 201 and the spray section 22 in the second air intake 202 are different, and the spray nozzle 223 structures of the spray section 22 in the first air intake 201 and the spray nozzle 223 structures of the spray section 22 in the second air intake 202 are also different. In some specific embodiments of this utility model, the size of the spray section 22 in the first air inlet 201 is the same as the size of the spray section 22 in the second air inlet 202, and the structure of the spray orifice 223 of the spray section 22 in the first air inlet 201 is the same as the structure of the spray orifice 223 of the spray section 22 in the second air inlet 202. In some specific embodiments of this utility model, the size of the spray section 22 in the first air inlet 201 is different from the size of the spray section 22 in the second air inlet 202, but the structure of the spray orifice 223 of the spray section 22 in the first air inlet 201 is the same as the structure of the spray orifice 223 of the spray section 22 in the second air inlet 202. That is, it can be freely arranged and combined as needed to adapt to the gas distribution requirements of different processes. For example, if etching gas (the spray orifice 223 needs to be set to small diameter and high density) and inert gas (the spray orifice 223 needs to be set to large diameter and low density) are introduced at the same time, differentiated design is required.

[0043] In some embodiments of this utility model, the air intake component 2 is provided in a one-to-one correspondence with the mounting structure 11, and each of the spray sections 22 is detachably mounted on the bottom surface of the cover 1 through each of the mounting structures 11.

[0044] In other embodiments of this utility model, each of the spray sections 22 is detachably mounted on the bottom surface of the cover 1 via multiple sets of the mounting structures 11.

[0045] In some embodiments of this utility model, reference is made to Figure 4 The air intake component 2 includes a first air intake component 201 and a second air intake component 202, and the first air intake component 201 and the second air intake component 202 are respectively disposed on the cover 1 through a set of the mounting structures 11. In other embodiments of this utility model, refer to... Figure 4The air intake component 2 includes a first air intake component 201 and a fourth air intake component 204. The first air intake component 201 is disposed on the cover 1 through a set of mounting structures 11, and the fourth air intake component 204 is disposed on the cover 1 through multiple sets of mounting structures 11. Whether each air intake component 2 is disposed on the cover 1 through a set of mounting structures 11 or multiple sets of mounting structures 11 depends on the process gas requirements. For example, in some embodiments, refer to... Figure 4 The first air inlet 201 is connected to a first process gas supply end that provides the first source gas through the air supply pipe, and the second air inlet 202 is connected to a second process gas supply end that provides the second source gas through the air supply pipe. The first source gas and the second source gas are different. If the process requires the first source gas and the second source gas to be in the same ratio, then the air inlet 2 of the spray section 22 with the same structure can be selected as the first air inlet 201 and the second air inlet 202. The first air inlet 201 and the second air inlet 202 are set on the cover 1 through the same number of mounting structures 11, that is, the first air inlet 201 and the second air inlet 202 have the same size. In other embodiments, where the process requires the amount of the first source gas to be less than the amount of the second source gas, the air inlet 2 with different structures of the spray section 22 can be selected as the first air inlet 201 and the second air inlet 202. For example, the size of the spray section 22 of the first air inlet 201 can be set to be smaller than the size of the spray section 22 of the second air inlet 202. In this case, the first air inlet 201 is installed through one set of the mounting structure 11, and the second air inlet 202 is installed through multiple sets of the mounting structure 11. In still other embodiments, where the process requires the amount of the first source gas to be less than the amount of the second source gas, the diameter of the spray holes 223 in the spray section 22 of the first air inlet 201 can be set to be smaller than the diameter of the spray holes 223 in the spray section 22 of the second air inlet 202. Alternatively, the spacing between adjacent spray holes 223 in the spray section 22 of the first air inlet 201 can be set to be larger than the spacing between adjacent spray holes 223 in the spray section 22 of the second air inlet 202. Specifically, this application can select different structures of the spray section 22 as needed, freely arrange and combine the air inlet 2, and install the air inlet 2 on the cover 1 through one or more sets of the installation structure 11 to match different process requirements, thereby greatly enhancing the ability to adjust the gas distribution.

[0046] In some embodiments of this utility model, the adjacent air inlets 2 on the cover 1 are connected to the same or different gas supply ends. In some specific embodiments of this utility model, refer to... Figure 4The adjacent air inlet components 2 include a first air inlet component 201 and a second air inlet component 202. The first air inlet component 201 is connected to a first process gas supply end providing a first source gas through the gas supply pipe, and the second air inlet component 202 is connected to a second process gas supply end providing a second source gas through the gas supply pipe. The first source gas and the second source gas are different. Further, when there are only two types of air inlet components 2 connected to different gas supply ends, these two types of air inlet components 2 can be alternately arranged on the cover 1. In other specific embodiments of this utility model, the adjacent first air inlet component 201 and second air inlet component 202 are both connected to the first process gas supply end providing the first source gas through the gas supply pipe. That is, this application allows for free arrangement and combination of the air inlet components 2 as needed to adapt to the gas distribution requirements of different processes.

[0047] In some embodiments of this utility model, a plurality of air inlets 2 arranged continuously on the cover 1 are connected to the same gas supply end. In some specific embodiments of this utility model, refer to... Figure 4 The cover 1 has a plurality of air inlets 2 arranged continuously, including a first air inlet 201, a second air inlet 202, and a third air inlet 203, which are connected to the same gas supply end. The air inlets can be freely arranged and combined as needed to adapt to the gas distribution requirements of different processes.

[0048] In other embodiments of this utility model, a plurality of air inlets 2 arranged continuously on the cover 1 are connected to different gas supply ends. In some specific embodiments of this utility model, see reference... Figure 4 The cover 1 contains a plurality of air inlets 2 arranged continuously, including a third air inlet 203, a fourth air inlet 204, and a fifth air inlet 205, which are respectively connected to different gas supply terminals. Further, in some embodiments, the third air inlet 203, the fourth air inlet 204, and the fifth air inlet 205 form a first group of air inlet components, and the cover 1 contains multiple groups of the first group of air inlet components arranged continuously, i.e., a plurality of third air inlets 203, a plurality of fourth air inlets 204, and a plurality of fifth air inlets 205 are arranged in a sequential order. That is, this application allows for free arrangement and combination of air inlets as needed to adapt to the gas distribution requirements of different processes.

[0049] In some embodiments of this utility model, reference is made to Figures 1 to 7 , Figures 9 to 14Each of the air inlets 2 includes at least two air guides 21, and each air guide 21 seals through the cover 1. The inclusion of at least two air guides 21 in each air inlet 2 helps to ensure the uniformity of gas injection into the spray section 22.

[0050] In some specific embodiments of this utility model, the cover 1 is a solid plate structure, and the cover 1 is provided with a plurality of through portions 111, with the air guide portion 21 corresponding to each of the through portions 111. Furthermore, the cover 1 is provided with at least two through portions 111 to install each of the air intake components 2, which helps to improve the stability and firmness of the installation of the air intake components 2.

[0051] In some other specific embodiments of this utility model, the cover 1 is a hollow structure, and the top plate and bottom plate of the cover 1 are provided with corresponding through portions 111 for the air guide 21 to pass through. That is, the top plate and bottom plate of the cover 1 are provided with at least two sets of through portions 111 to install each of the air intake components 2, which is beneficial to improve the stability and firmness of the installation of the air intake components 2.

[0052] In some embodiments of this utility model, reference is made to Figure 1 The air guide 21 is fitted with a sealing element 6, which is disposed in the through part 111 to further seal and fix the air guide 21 and the through part 111 of the cover body 1, ensuring that each air inlet 2 and the cover body 1 are sealed and airtight.

[0053] In some embodiments of this utility model, the sealing element 6 includes a rubber ring.

[0054] In some embodiments of this utility model, reference is made to Figure 6 Each set of mounting structures 11 further includes a first snap-fit ​​structure, which is disposed on the working end face of the cover 1 facing the reaction chamber 3. The working end face of the spray section 22 facing the cover 1 is provided with a second snap-fit ​​structure that is detachably adapted to the first snap-fit ​​structure, and the first snap-fit ​​structure and the second snap-fit ​​structure are detachably adapted to each other in a concave-convex fit. This allows the air intake component 2 to be detachably installed on the cover 1 through the snap-fit ​​structure, which is simple in structure and convenient for installation and disassembly.

[0055] In some embodiments of this utility model, the first snap-fit ​​structure includes a frame-shaped groove 112 (e.g., ...). Figure 6The first snap-fit ​​structure includes at least one of the following: a long strip groove along the length direction of the cover 1, a long strip groove along the width direction of the cover 1, and a plurality of spaced recesses; the second snap-fit ​​structure includes at least one of the following: a frame-shaped boss, a long strip boss along the length direction of the spray section 22, a long strip boss along the width direction of the spray section 22, and a plurality of spaced protrusions. In other embodiments of the present invention, the first snap-fit ​​structure includes at least one of the following: a frame-shaped boss, a long strip boss along the length direction of the cover 1, a long strip boss along the width direction of the cover 1, and a plurality of spaced protrusions; the second snap-fit ​​structure includes at least one of the following: a frame-shaped groove, a long strip groove along the length direction of the spray section 22, a long strip groove along the width direction of the spray section 22, and a plurality of spaced recesses. The mounting structure 11 enables the cover 1 and the air intake 2 to achieve a concave-convex fit through a snap-fit ​​structure, which helps to strengthen the connection between the two and allows the mounting structure 11 to meet the installation requirements of air intake 2 with different structures. For example, when the first snap-fit ​​structure is a long strip groove provided along the length direction of the cover 1, a long strip groove provided along the width direction of the cover 1, or a number of recesses provided at intervals, the air intake 2 can be detachably mounted on the cover 1 through multiple sets of mounting structures 11.

[0056] In some specific embodiments of this utility model, the first snap-fit ​​structure includes a frame-shaped groove and a plurality of spaced recesses, the plurality of spaced recesses being circumferentially arranged around the frame-shaped groove; the second snap-fit ​​structure includes a frame-shaped boss adapted to the frame-shaped groove and a plurality of spaced protrusions adapted to the plurality of spaced recesses, the plurality of spaced protrusions being circumferentially arranged around the frame-shaped boss, which is beneficial to improving the connection firmness between the cover 1 and the air inlet 2.

[0057] In some embodiments of this utility model, reference is made to Figures 7 to 10 The gas injection device further includes a locking member 113. The outer wall of the gas guide 21 is provided with an external thread structure 211, and the inner wall of the locking member 113 is provided with an internal thread structure adapted to the external thread structure 211. The locking member 113 is sleeved on the gas guide 21 to fix the relative positional relationship between the gas guide 21 and the cover 1. That is, the working end face of the gas guide 21 and the cover 1 facing away from the reaction chamber 3 can abut against each other to lock the gas guide 21 and squeeze the cover 1 to achieve locking and sealing. This helps to strengthen the connection between the air inlet 2 and the cover 1 and ensure the stability of the air inlet 2 when it intakes and sprays gas.

[0058] In some embodiments of this utility model, reference is made to Figure 8The locking member 113 is provided with a through hole through which the air guide 21 passes, and the outer wall of the locking member 113 is provided with a recess so that the tool can clamp the recess and rotate to tighten the locking member 113.

[0059] In some embodiments of this utility model, the axial length of the air guide 21 is greater than the distance between the end face of the locking member 113 away from the cover 1 and the base 31 located inside the reaction chamber 3. The air inlet 2 is connected to the cover 1 through the locking member 113, so that the height of the air guide 21 extending out of the locking member 113 can be adjusted as needed by rotation, that is, the length of each air guide 21 extending into the reaction chamber 3 can be adjusted, so as to adjust the distance between the spray section 22 connecting each air guide 21 and the substrate on the base 31. Moreover, combined with the modular arrangement of the air inlet 2, the distance between the spray section 22 in each air inlet 2 and the substrate on the base 31 can be freely adjusted according to different process requirements, which greatly enhances the ability to adjust the gas distribution.

[0060] In other embodiments of this utility model, reference is made to Figure 11 and Figure 12 The top surface of the cover 1 (the side of the cover 1 facing away from the reaction chamber 3 when it is installed in the reaction chamber 3) is provided with a fixing member 4. The gas guide 21 is provided through the fixing member 4 in a dynamic sealing manner, that is, the end of the gas guide 21 located on the side of the cover 1 facing away from the reaction chamber 3 is provided through the fixing member 4. The outer wall of the gas guide 21 is provided with a number of sets of spaced height positioning members 212 along the axial direction of the gas guide 21, so that the height positioning members 212 can protrude from the outer wall of the gas guide 21 and be housed in the gas guide 21. The fixing member 4 is provided with a number of sets of through hole structures 41 along the axial direction of the gas guide 21 to fix the corresponding height positioning members 212 by snap-fit. This design allows for individual adjustment of the distance between the spray section 22 in each air inlet 2 and the substrate on the base 31 according to different process requirements, greatly enhancing the ability to regulate gas distribution. Furthermore, several sets of height positioning components 212 are fixedly positioned at different heights on the air guide section 21, enabling precise control of the distance between the spray section 22 in each air inlet 2 and the substrate on the base 31. This results in more precise gas distribution adjustment and improved uniformity. The fixing component 4 has several sets of through-hole structures 41 along the axial direction of the air guide section 21, allowing the height positioning components 212 to be more securely engaged in the through-hole structures 41 of the fixing component 4, thus improving the stability of the air inlet components.

[0061] In some embodiments of this utility model, reference is made to Figure 11 and Figure 12The height positioning component 212 includes a plurality of receiving grooves 214 and a plurality of elastic snap-fit ​​structures 213. The plurality of receiving grooves 214 are arranged at intervals along the circumference of the air guide portion 21. The plurality of elastic snap-fit ​​structures 213 are arranged one-to-one with the receiving grooves 214 so as to retract into the receiving grooves 214 when subjected to force, and to protrude from the outer wall of the air guide portion 21 after the external force is removed. The outer diameter of the snap-fit ​​ring structure formed by the plurality of elastic snap-fit ​​structures 213 protruding from the outer wall of the air guide portion 21 is larger than the inner diameter of the fixing component 4, so that the snap-fit ​​ring structure of the height positioning component 212 can be radially snapped and fixed to the corresponding through hole structure 41 of the fixing component 4. A plurality of receiving grooves 214 are provided at circumferential intervals along the air guide section 21. When the elastic buckle structure 213 is radially fixed to the corresponding through hole structure 41 of the fixing member 4, the elastic buckle structure 213 can sufficiently support and bear the weight of the entire air intake member 2, while also avoiding the opening of the receiving grooves 214 causing the diameter of the air guide section 21 to become thinner and affecting the support capacity of the air guide section 21.

[0062] In this embodiment, when an external force, such as the squeezing force of the fastener 4 or the cover 1, is applied, the elastic buckle structure 213 is compressed, and the entire structure retracts into the receiving groove 214, such as... Figure 12 As shown, the first height positioning member 2121 retracts into the receiving groove 214 under the pressure of the cover, so that this section of the air guide 21 can move freely through the fixing member 4 or the cover 1. When an external force removes the air guide 21 from the fixing member 4, the elastic latching structure 213 of this section of the air guide 21 is no longer subjected to the pressure of the fixing member 4, causing the elastic latching structure 213 to return to its original shape, that is, the elastic latching structure 213 protrudes from the outer wall of the air guide 21, such as... Figure 11 As shown. The specific structure and principle of the elastic snap-fit ​​structure 213 are common knowledge in this field and will not be described in detail here.

[0063] In some embodiments of this utility model, the outer diameter of the snap ring structure is larger than the outer diameter of the fixing member 4, so that the height positioning member 212 can be more firmly snapped into the through hole structure 41 of the fixing member 4, which is beneficial to improving the stability of the air intake member.

[0064] In some embodiments of this utility model, reference is made to Figure 11 and Figure 12The outer wall of the air guide 21 is provided with four sets of height positioning members 212 along the axial direction of the air guide 21. When the upper surface of the spray section 22 of the air inlet 2 and the lower surface of the cover 1 are in contact, the elastic snap-fit ​​structures 213 of the four sets of height positioning members 212 all protrude from the outer wall of the air guide 21. The first height positioning member 2121 is radially engaged and fixed to the first set of through-hole structures near the cover 1 of the fixing member 4, and the second height positioning member 2122 is radially engaged and fixed to the second set of through-hole structures away from the cover 1 of the fixing member 4. Figure 11 As shown; when it is necessary to adjust the distance between a certain spray section 22 and the substrate on the base 31 according to process requirements, the air guide section 21 connected to the spray section 22 can be moved toward the reaction chamber 3, thereby driving the spray section 22 to move toward the substrate on the base 31. When the spray section 22 is adjusted to the required height, such as when the distance that the spray section 22 needs to be adjusted is equal to the distance between the second height positioning member 2122 and the first height positioning member 2121, the second height positioning member 2122 of the air guide section 21 is radially fixed to the first set of through holes in the fixing member 4, and the third height positioning member of the air guide section 21 is radially fixed to the second set of through holes in the fixing member 4. At this time, the elastic buckle structure 213 in the first height positioning member 2121 will be compressed by the cover 4 and retract into the receiving groove 214. Figure 12 As shown.

[0065] In some embodiments of this utility model, reference is made to Figure 11 and Figure 12 Several sets of height positioning components 212 are set at equal intervals, or height positioning components 212 are set at different heights of the air guide section 21 according to the distance between the spray section 22 and the substrate on the base 31.

[0066] In some embodiments of this utility model, the fixing member 4 can be the locking member 113, that is... Figures 7 to 10 When the locking member 113 is sleeved on the outer wall of the air guide 21 to lock the air guide 21 and squeeze the cover 1 to achieve locking and sealing, the outer wall of the air guide 21 is provided with several sets of spaced height positioning members 212 along the axial direction of the air guide 21, and the locking member 113 is provided with a corresponding through hole structure.

[0067] In some embodiments of this utility model, reference is made to Figures 9 to 12The cover 1 has a plurality of mounting grooves 12 on the side facing the reaction chamber 3. The spray section 22 is disposed in the mounting groove 12 and is fitted to the cover 1. The side facing the reaction chamber 3 of the spray section 22 is flush with the side facing the reaction chamber 3 of the cover 1 to prevent the gas sprayed from the spray section 22 from accumulating on the lower surface of the cover 1 to form deposits.

[0068] In some embodiments, the first and second source gases, which have strong reactivity, may pre-react near the cover 1 if they meet too early under the temperature and pressure conditions of the reaction chamber. If the pre-reaction is severe, it will significantly consume and affect the utilization rate of the source gases, and also affect the film formation quality. In some embodiments of this invention, reference is made to… Figure 13 and Figure 14 The gas injection device further includes a purge gas pipe that connects to the inside of the cover 1 from the side wall of the cover 1. The purge gas pipe is connected to the purge gas supply end. The cover 1 is a hollow structure, and the bottom surface of the cover 1 is provided with a plurality of purge gas outlets 5. That is, the purge gas outlets 5 are located on the working end face of the cover 1 facing the reaction chamber 3, and the purge gas outlets 5 are arranged between adjacent mounting structures 11. The air inlet 2 installed on adjacent mounting structures 11 is connected to different gas supply ends through the gas supply pipe. This allows for the application of purge gas in adjacent spray sections 22 (such as...). Figure 14 When the first spray section 221 and the second spray section 222 shown are respectively introduced with first source gas 224 and second source gas 225 that can react with each other, the purge gas 52 introduced by the purge gas pipe in the cover 1 enters the reaction chamber 3 through the purge gas outlet 5 set between the adjacent mounting structures 11. This allows the purge gas 52 to isolate the first source gas 224 and the second source gas 225 sprayed from the two adjacent spray sections 22, thereby preventing the first source gas 224 and the second source gas 225 from mixing and pre-reacting near the cover 1 immediately after being sprayed. This helps to reduce consumption and affect the utilization rate of the source gas, and improves the film formation quality.

[0069] In some embodiments of this utility model, reference is made to Figure 14 The cover 1 has a purge gas inlet 51 on its side wall, which connects to the purge gas pipe and the purge gas supply end. The cover 1 is hollow inside, meaning that the purge gas 52 enters directly into the hollow cavity inside the cover 1 from the purge gas inlet 51.

[0070] In some embodiments of this utility model, the gas injection device further includes several sealing components, which are detachably disposed at the purge gas outlet 5 to block the purge gas outlet 5. If the spray section 22 is large and the air inlet 2 needs to be installed through multiple sets of mounting structures 11, the purge gas outlet 5 between the multiple sets of mounting structures 11 is blocked by sealing components to prevent the purge gas 52 output from the purge gas outlet 5 between the multiple sets of mounting structures 11 from flowing from the gap between the spray section 22 and the cover 1 to the purge gas channel between adjacent spray sections 22, thereby affecting the flow field of the purge gas 52 ejected from the purge gas outlet 5 between adjacent spray sections 22. Of course, the purge gas outlet 5 between the multiple sets of mounting structures 11 can also be retained, which can be set according to process requirements.

[0071] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A gas injection device, characterized by, include: The cover has several sets of mounting structures arranged sequentially on its bottom surface; A plurality of air intake components are provided, each of which is detachably mounted on the cover via one or more sets of mounting structures. Each air intake component includes an air guide and a spray section. Each spray section is detachably mounted on the bottom surface of the cover via the mounting structure. The air guide penetrates the cover from the top surface and communicates with the spray section. The gas supply pipeline is provided in several parts and is connected to each of the aforementioned gas guides.

2. The gas injection device of claim 1, wherein, It also includes a purge gas pipe that connects to the inside of the cover body from the side wall of the cover body. The cover body is a hollow structure, and the bottom surface of the cover body is provided with a plurality of purge gas outlets, which are arranged between adjacent mounting structures.

3. The gas injection device according to claim 1, characterized in that, Each of the air inlets includes at least two air guides, each of which is sealed through the cover.

4. The gas injection device according to claim 2, characterized in that, It also includes several sealing components, which are detachably disposed at the purge gas outlet to block the purge gas outlet.

5. The gas injection device according to claim 1, characterized in that, Each set of installation structures includes a first snap-fit ​​structure, and the spray section is provided with a second snap-fit ​​structure that is detachably adapted to the first snap-fit ​​structure; and the first snap-fit ​​structure and the second snap-fit ​​structure are detachably adapted to each other in a concave-convex fit manner.

6. The gas injection device according to claim 1, characterized in that, It also includes a locking component. The outer wall of the air guide is provided with an external thread structure, and the inner wall of the locking component is provided with an internal thread structure that is adapted to the external thread structure. The locking component is sleeved on the air guide to fix the relative positional relationship between the air guide and the cover.

7. The gas injection device according to claim 6, characterized in that, The axial length of the air guide is greater than the distance between the end face of the locking member away from the cover and the base located inside the reaction chamber.

8. The gas injection device according to claim 1, characterized in that, The top surface of the cover is provided with a fixing member, and the air guide is provided through the fixing member in a dynamic sealing manner; the outer wall of the air guide is provided with a number of sets of spaced height positioning members along the axial direction of the air guide so that the height positioning members can protrude from the outer wall of the air guide and be housed in the air guide; the fixing member is provided with a number of sets of through hole structures along the axial direction of the air guide to fix the corresponding height positioning members by snap-fit.

9. The gas injection device according to claim 8, characterized in that, The height positioning component includes several receiving grooves and several elastic snap-fit ​​structures. The receiving grooves are spaced apart circumferentially along the air guide portion. The elastic snap-fit ​​structures are correspondingly arranged in the receiving grooves so that they retract into the receiving grooves when subjected to force and protrude from the outer wall of the air guide portion after the external force is removed. The outer diameter of the snap-fit ​​ring structure formed by the elastic snap-fit ​​structures protruding from the outer wall of the air guide portion is larger than the inner diameter of the fixing component, so that the snap-fit ​​ring structure of the height positioning component can be snapped and fixed to the corresponding through hole structure of the fixing component.

10. The gas injection device according to claim 1, characterized in that, The cover is square in shape, and each of the mounting structures is rectangular or square and is arranged along the length or width of the cover.

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