An apparatus for preparing polycrystalline silicon rods

Abstract

This invention discloses an apparatus for preparing polycrystalline silicon rods, comprising a copper boat fixed inside a rectangular tube, with a sample loaded on the outer surface of the copper boat; both ends of the rectangular tube are connected to a first track; mullite is disposed on a second track; a preheater is embedded in the mullite and sleeved on the outside of the rectangular tube; and an induction coil is sleeved on the rectangular tube and connected to an electrical cabinet. Thus, this invention enables the horizontal preparation of polycrystalline silicon rods, is easy to operate, and requires less space or height.

Description

Technical Field

[0001] This utility model relates to the field of machinery, and in particular to an apparatus for preparing polycrystalline silicon rods. Background Technology

[0002] In the process of realizing this utility model, it was found that the existing particle silicon zone melting polymerization device is a vertical device that melts particle silicon into rod-shaped polycrystalline silicon. The device has a bracket for vertical support, the upper end uses an upper shaft material clamp to fix the seed crystal, and the lower end is designed with a groove and sealing ring to support the quartz tube. The existing vertical zone melting device has higher requirements for space height when preparing polycrystalline silicon rods, which is not conducive to personnel operation, and the operation is difficult and costly. Utility Model Content

[0003] In view of this, the present invention provides an apparatus for preparing polycrystalline silicon rods, which can prepare polycrystalline silicon rods laterally, is easy to operate, and has less space height requirement.

[0004] To achieve the above objectives, an apparatus for preparing polycrystalline silicon rods is provided according to an embodiment of the present invention, comprising a first track, a second track, a copper boat, a rectangular tube, a preheater, and an induction coil; wherein, the copper boat is fixedly placed inside the rectangular tube, and a sample is loaded on the outer surface of the copper boat, and both ends of the rectangular tube are respectively connected to the first track; mullite is disposed on the second track, the preheater is embedded in the mullite and sleeved on the outside of the rectangular tube; the induction coil is sleeved on the rectangular tube and connected to an electrical cabinet.

[0005] Optionally, flanges are included, wherein the flanges are disposed at both ends of the rectangular tube for securing the rectangular tube to the first track and for placing the copper boat inside the rectangular tube.

[0006] Optionally, the flange surface has two holes, one for the copper boat to pass through and the other for delivering argon gas into the rectangular tube.

[0007] Optionally, this includes maintaining a preset distance between the induction coil and the preheater.

[0008] Optionally, the copper boat is placed inside the rectangular tube in a piston-like manner.

[0009] Optionally, the interior of the copper boat is hollow with a threaded shaft for the passage of cooling water.

[0010] Optionally, the outer surface of the copper boat is provided with grooves for loading external samples.

[0011] Optionally, the first track and the second track are respectively provided with a first bracket and a second bracket.

[0012] Optionally, the first track and the second track are designed as threaded shafts.

[0013] One embodiment of the above-mentioned utility model has the following advantages or beneficial effects: The present utility model provides a zone melting polymerization device for preparing polycrystalline silicon rods in a horizontal manner that requires little space and is easy to operate horizontally. The positions of the moving induction coil and the copper boat are controlled by the first track and the second track respectively. A seed crystal is placed at the front end of the device for preparing polycrystalline silicon rods (for example: 1 cm from the front end). The seed crystal is melted by induction heating (for example: high-frequency induction heating in an argon atmosphere) to form a local melting zone of a certain length (for example: about 15 mm in length). The particulate silicon is then melted into polycrystalline silicon rods by moving the position of the copper boat at a uniform speed.

[0014] The further effects of the aforementioned unconventional alternative methods will be explained below in conjunction with specific implementation methods. Attached Figure Description

[0015] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:

[0016] Figure 1 This is a schematic diagram of the apparatus for preparing polycrystalline silicon rods according to an embodiment of the present invention. Detailed Implementation

[0017] The following description, in conjunction with the accompanying drawings, illustrates exemplary embodiments of the present invention, including various details to aid understanding. These embodiments should be considered merely exemplary. Therefore, those skilled in the art will recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present invention. Similarly, for clarity and brevity, descriptions of well-known functions and structures are omitted in the following description.

[0018] At least one embodiment of this utility model provides an apparatus for preparing polycrystalline silicon rods, such as... Figure 1 As shown, the apparatus for preparing polycrystalline silicon rods may include a first track 1, a second track 2, a copper boat 4, a rectangular tube 5, a preheater 6, and an induction coil 7. In an embodiment, the copper boat 4 is fixedly placed inside the rectangular tube 5, and the outer surface of the copper boat 4 is loaded with a sample. Both ends of the rectangular tube 5 are respectively connected to the first track 1. Thus, the first track 1 can fix and support the movement of the rectangular tube 5 and control the position of the rectangular tube 5.

[0019] Furthermore, the second track 2 is provided with mullite, and the preheater 6 is embedded in the mullite and sleeved on the rectangular tube 5. For example, the second track 2 can fix the preheater 6 and control the movement of the preheater 6. The preheater 6 absorbs electromagnetic energy and emits infrared light, which irradiates the surface of the silicon core seed.

[0020] In addition, the induction coil 7 is sleeved on the rectangular tube 5 and connected to the electrical cabinet, and releases electromagnetic energy after being energized.

[0021] Preferably, the induction coil 7 can be made of copper. Furthermore, the preheater 6 can be made of graphite, silicon carbide, or a preheating ring. The rectangular tube 5 can be made of a high-temperature resistant material, such as a quartz tube.

[0022] It is worth noting that the mullite has a rectangular shape with a hollow center, and the preheater is embedded in the mullite.

[0023] In some preferred embodiments, the induction coil 7 and the preheater 6 of this invention maintain a preset distance. Preferably, the preset distance between the induction coil 7 and the preheater 6 is 3mm-8mm, for example: the distance between the induction coil 7 and the preheater 6 is about 5mm.

[0024] As other embodiments of this utility model, such as Figure 1 As shown, the apparatus for preparing polycrystalline silicon rods according to this invention also includes flanges 3. In an embodiment, the flanges 3 are disposed at both ends of the rectangular tube 5, for fastening the rectangular tube 5 to the first track 1 and for placing the copper boat 4 inside the rectangular tube 5.

[0025] In a further embodiment, the flange 3 has two holes pre-drilled on its surface, one hole for the copper boat 4 to pass through, and the other hole for conveying argon gas into the rectangular tube 5 (e.g., Figure 1 (marked B in the text).

[0026] In some embodiments of this utility model, the interior of the copper boat 4 is hollow with a threaded shaft for the passage of cooling water (e.g., Figure 1 (marked A in the diagram). The outer surface of the copper boat is provided with grooves for loading external samples. In addition, the copper boat 4 is piston-type placed inside the rectangular tube 5.

[0027] In some embodiments of this utility model, the first track 1 and the second track 2 are respectively provided with a first bracket and a second bracket. In a further embodiment, the first track 1 and the second track 2 are respectively designed as threaded shafts, for rotating and moving the rectangular tube 5 and for rotating and moving the preheater 6, respectively. In a preferred embodiment, the first track 1 and the second track 2 are installed horizontally and parallel to each other, and each is set with an effective movement range of 40cm-50cm, for example: 45cm.

[0028] For example, in use, the hollow copper boat 4 is piston-shaped and placed inside the rectangular tube 5 to facilitate sample loading. Flowing water is circulated inside the copper boat 4 to maintain a stable temperature. The copper boat 4 is pulled out of the rectangular tube 5, and the groove of the copper boat 4 is filled with sample (about 20g-30g). A seed crystal about 1cm above the sample is placed at the front end of the copper boat 4. The position is adjusted so that the induction coil 7 and the preheater 6 are kept about 5mm apart, with the seed crystal positioned exactly between the induction coil 7 and the preheater 6. Afterwards, the air inside the rectangular tube 5 is replaced with argon gas at a flow rate of 10-12 l / min for 5-10 min. The argon gas flow rate is adjusted to between 3.5-4.2 l / min to create a slightly positive pressure inside the rectangular tube. The induction coil 7 is energized and pressurized. The preheater 6 absorbs electromagnetic energy and emits infrared light, which irradiates the surface of the seed crystal. After absorbing heat, the seed crystal reaches the coupling temperature and directly absorbs the electromagnetic energy of the induction coil 7, forming a liquid state locally. The second track 2 is controlled to move the graphite preheater 6 away. The first track 1 begins to move backward at a uniform speed of 6 mm / min. After the length of the polycrystalline silicon rod reaches the standard, the pressure is slowly reduced and the movement of the first track 1 is stopped. After the sample cools down, the polycrystalline silicon rod is removed, and the first track 1 and the second track 2 return to their initial positions.

[0029] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can occur depending on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. An apparatus for producing a polysilicon rod, characterized by comprising: It includes a first track, a second track, a copper boat, a rectangular tube, a preheater, and an induction coil; among which, The copper boat is fixed inside the rectangular tube, and the outer surface of the copper boat is loaded with a sample. The two ends of the rectangular tube are respectively connected to the first track. The second track is provided with mullite, and the preheater is embedded in the mullite and sleeved on the outside of the rectangular tube; The induction coil is sleeved on the rectangular tube and connected to the electrical cabinet.

2. The apparatus for producing a polysilicon rod according to claim 1, wherein Includes flanges, wherein the flanges are disposed at both ends of the rectangular tube for securing the rectangular tube to the first track and for placing the copper boat inside the rectangular tube.

3. The apparatus for producing a polysilicon rod according to claim 2, wherein include: The flange has two holes pre-drilled on its surface. One hole is for the copper boat to pass through, and the other hole is for delivering argon gas into the rectangular tube.

4. The apparatus for producing a polysilicon rod according to claim 1, wherein include: A preset distance is maintained between the induction coil and the preheater.

5. The apparatus for producing a polysilicon rod according to claim 1, wherein include: The copper boat is placed inside the rectangular tube using a piston-like mechanism.

6. The apparatus for producing a polysilicon rod according to claim 1, wherein include: The interior of the copper boat is hollow with a threaded shaft for the passage of cooling water.

7. The apparatus for producing a polysilicon rod according to claim 1, wherein include: The outer surface of the copper boat is provided with grooves for loading external samples.

8. The apparatus for producing a polysilicon rod according to claim 1, wherein include: The first track and the second track are respectively provided with a first bracket and a second bracket.

9. The apparatus for producing a polysilicon rod according to claim 1, wherein include: The first track and the second track are designed as threaded shafts.

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