Furnace bottom heat preservation structure for single crystal furnace and single crystal furnace

Abstract

This utility model relates to a furnace bottom insulation structure for a single crystal furnace and the single crystal furnace itself. The furnace bottom insulation structure includes: a furnace bottom pressure plate body, assembled to the furnace bottom of the single crystal furnace, having a bottom wall and side walls rising from the periphery of the bottom wall, with multiple through-holes on the bottom wall; at least one sheath, each sheath corresponding to each functional hole, integrated on the bottom wall of the furnace bottom pressure plate body to rise from the bottom wall, wherein the bottom wall, side walls, and outer walls of the sheaths of the furnace bottom pressure plate body form an accommodating space, into which the furnace bottom insulation medium is filled; and a support plate, the support plate covering a portion of the upper surface of the furnace bottom insulation medium, wherein an insulation cylinder is disposed at the edge of the support plate, the support plate including a plate-shaped support plate body and one or more support plate holes, the support plate holes penetrating the support plate body in the thickness direction. This utility model's furnace bottom insulation structure can prevent silicon leakage from burning through the furnace bottom and causing an explosion, thus improving silicon leakage safety.

Description

Technical Field

[0001] This disclosure relates to a furnace bottom insulation structure for a single crystal furnace and the single crystal furnace itself. Background Technology

[0002] The furnace bottom insulation structure is a key aspect of the furnace thermal design, used to isolate the water-cooled area at the furnace bottom from the high-temperature areas inside the furnace. Currently, the furnace bottom insulation structures of most single-crystal silicon growth furnaces consist of sequentially laying a supporting molding felt, a soft felt for better insulation, and a protective pressure plate to achieve the desired insulation effect.

[0003] Although the existing furnace bottom insulation structure is relatively simple, it poses a risk that if silicon leakage occurs, the high-temperature molten silicon will flow directly to the bottom of the single crystal furnace, scalding the bottom and causing an explosion when it comes into contact with the cooling water at the bottom of the single crystal furnace. Utility Model Content

[0004] To address the technical problems of existing single crystal furnaces, this disclosure provides a furnace bottom insulation structure and a single crystal furnace, which can avoid the risk of explosion after silicon leakage and improve the protection against silicon leakage at the furnace bottom.

[0005] Specifically, the first aspect of this disclosure provides a furnace bottom insulation structure for a single crystal furnace, comprising: a furnace bottom pressure plate body, the furnace bottom pressure plate body being assembled to the furnace bottom of the single crystal furnace, and having a bottom wall and a side wall rising from the periphery of the bottom wall, the bottom wall having a plurality of through functional holes; at least one sheath, each sheath corresponding to each of the functional holes, integrated on the bottom wall of the furnace bottom pressure plate body to rise from the bottom wall, wherein the bottom wall, the side wall, and the outer side wall of the sheath of the furnace bottom pressure plate body form an accommodating space, and a furnace bottom insulation medium is used to fill the accommodating space; and a support plate, the support plate covering a portion of the upper surface of the furnace bottom insulation medium, wherein an insulation cylinder is disposed at the edge of the support plate, the support plate comprising a plate-shaped support plate body and one or more support plate holes, the support plate holes extending through the support plate body in the thickness direction.

[0006] According to the furnace bottom insulation structure with the above-described configuration, since the furnace bottom of the single crystal furnace is equipped with a furnace bottom pressure plate body, and the furnace bottom pressure plate body has a bottom wall and side walls rising from the periphery of the bottom wall, it serves as a container to collect leaked silicon. Furthermore, the support plate has multiple support plate holes, so even if silicon accidentally leaks during the single crystal silicon growth process, the leaked silicon will enter the furnace bottom pressure plate body through the support plate holes and be contained within the furnace bottom pressure plate body without contacting the furnace bottom. This avoids the risk of leaked silicon burning through the furnace bottom and causing an explosion, thus achieving silicon leakage protection. Moreover, the support plate is supported by a sheath, which allows for improved insulation materials and enhanced insulation performance.

[0007] Accordingly, the furnace bottom insulation structure disclosed herein can achieve silicon leakage protection and improve safety performance.

[0008] Preferably, the support plate is detachably supported on the sheath and located below the top of the sheath.

[0009] With the furnace bottom insulation structure configured as described above, the removable support plate facilitates the filling of insulation material. Furthermore, since the support plate is located below the top of the sheath, it effectively prevents the risk of molten silicon entering the sheath after silicon leakage occurs.

[0010] Preferably, in the furnace bottom insulation structure of the first aspect of this disclosure, at least one support ring is further included, each support ring comprising: a cylindrical main body portion fitted onto the sheath; an engaging portion protruding radially inward from the inner circumferential surface of the main body portion on the upper side of the main body portion; and a support portion protruding radially outward from the outer circumferential surface of the main body portion on the lower side of the main body portion, wherein the engaging portion is connected to the top end of the sheath and the support plate is supported by the support portion.

[0011] With the furnace bottom insulation structure having the above configuration, the support ring can reliably integrate the support plate onto the sheath.

[0012] Preferably, in the furnace bottom insulation structure of the first aspect of this disclosure, the engaging part is detachable from the top of the sheath and / or the support plate is detachable from the support part.

[0013] With the furnace bottom insulation structure having the above configuration, since the locking part and the sheath, as well as the support plate and the support part, are all detachable structures, the insulation material filling operation can be easily carried out.

[0014] Preferably, in the furnace bottom insulation structure of the first aspect of this disclosure, the support plate further includes: a mounting hole penetrating the main body of the support plate in the thickness direction, the mounting hole being formed at a position corresponding to the sheath for the sheath to be inserted through, wherein, when the sheath is inserted through the mounting hole of the support plate, the periphery of the mounting hole abuts against the support portion, so that the support plate is supported by the support ring.

[0015] With the furnace bottom insulation structure configured as described above, the support plate can be abutted and installed on the support ring simply by inserting the sheath through the corresponding mounting hole. The assembly operation is simple and offers excellent ease of assembly. Furthermore, the support plate can be installed on the support ring after the insulation material has been filled, ensuring that the support plate does not obstruct the filling process and facilitating it.

[0016] Preferably, in the furnace bottom insulation structure of the first aspect of this disclosure, the main body of the support plate is provided with a notch, and the support portion is fitted into the notch.

[0017] According to the furnace bottom insulation structure with the above configuration, by making the support part fit into the notch of the support plate body, the support plate can be positioned more reliably, and the surface of the support plate and the support part can be basically flush and at basically equal height, minimizing the height occupation and achieving better space planning.

[0018] Preferably, in the furnace bottom insulation structure of the first aspect of this disclosure, the sheath includes: a base portion integrated on the bottom wall of the furnace bottom pressure plate body to stand upright from the bottom wall; and a replaceable portion assembled at the top of the base portion, wherein the support plate is supported on the base portion of the sheath.

[0019] Based on the furnace bottom insulation structure with the above configuration, the sheath is divided into a base section and a replaceable section that can be assembled together. The base section is integrated into the main body of the furnace bottom pressure plate. Since the main body of the furnace bottom pressure plate is in close contact with the water-cooled furnace bottom, the base section is less prone to thermal damage. In contrast, the replaceable section at the upper end of the sheath is close to the high-temperature zone of the thermal field and may be damaged due to overheating. In this case, only the replaceable section needs to be replaced, ensuring a long service life and low cost for the furnace bottom. Moreover, by using replaceable sections of different heights, the furnace bottom insulation height can be adjusted to meet different insulation requirements.

[0020] Preferably, in the furnace bottom insulation structure of the first aspect of this disclosure, a first recess and / or a first protrusion are formed on the upper end surface of the base portion, and a second protrusion and / or a second recess are formed on the lower end surface of the replaceable portion. The second protrusion engages with the first recess and / or the second recess engages with the first protrusion, thereby the replaceable portion is assembled to the top of the base portion.

[0021] Based on the furnace bottom insulation structure with the above configuration, the installation between the replaceable part and the base part can be easily achieved by using the convex and concave fit of the protrusions and depressions, and disassembly is convenient.

[0022] Preferably, in the furnace bottom insulation structure of the first aspect of this disclosure, the sheath is integrally formed with the bottom wall of the furnace bottom pressure plate body.

[0023] According to the furnace bottom insulation structure with the above configuration, at least the bottom of the sheath is integrally formed with the bottom wall of the furnace bottom pressure plate body, which can significantly improve the structural strength and stability, eliminate stress concentration and weak points in sealing caused by joints, and simplify the assembly process. Moreover, the sheath can more reliably support the support plate, thereby improving the insulation material and enhancing the insulation performance.

[0024] A second aspect of this disclosure provides a single-crystal furnace having the furnace bottom insulation structure of the first aspect. The single-crystal furnace of the second aspect can achieve the same technical effect as the furnace bottom insulation structure of the first aspect.

[0025] The basic structure and effects of the furnace bottom insulation structure of the first aspect of this disclosure and the single crystal furnace of the second aspect have been described above. The details will now be described in conjunction with the accompanying drawings for better understanding. Attached Figure Description

[0026] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:

[0027] Figure 1 This is a schematic perspective view of the integrated body of the furnace bottom pressure plate and the sheath of the furnace bottom insulation structure according to the first embodiment of this disclosure;

[0028] Figure 2 In order to be in Figure 1 A schematic 3D diagram showing a support plate assembled on the integrated body;

[0029] Figure 3 In order to be in Figure 2 A schematic 3D diagram showing an insulation cylinder supported on a support plate;

[0030] Figure 4 for Figure 3 A schematic cross-sectional view;

[0031] Figure 5 This is a schematic cross-sectional view of the furnace bottom insulation structure according to the second embodiment of this disclosure.

[0032] List of reference numerals

[0033] 1. Furnace bottom

[0034] 10. Main body of the furnace bottom pressure plate

[0035] 101 bottom wall

[0036] 102 Sidewall

[0037] 103 Functional Hole

[0038] 11 Sheath

[0039] 21 Support ring

[0040] 211 Support section

[0041] 212 Main Body

[0042] 213 Card Section

[0043] 22 Support levels

[0044] 221 Notch

[0045] 23 Support plate holes

[0046] 24 mounting holes

[0047] 31 Insulation Container

[0048] 41 Furnace bottom insulation medium

[0049] 42 side insulation medium

[0050] 50 base part

[0051] 501 Depression

[0052] 51 Replaceable parts

[0053] 511 Protrusion Detailed Implementation

[0054] The technical solution of the present invention will be explained more clearly below by referring to the accompanying drawings and describing specific embodiments of the present invention.

[0055] It should be noted that the accompanying drawings of this utility model are merely schematic diagrams for clearly illustrating the parts related to the solution of this utility model, and do not show some unnecessary parts. Therefore, these drawings should not be construed as limiting the utility model, and may differ from the actual structure in use. Furthermore, it should be understood that terms indicating orientation or position such as "up," "down," "left," "right," "front," and "rear" that may appear in the following description are for convenience of explanation and not restrictive. Similarly, for clarity and brevity, descriptions of well-known functions and structures are omitted in the following description.

[0056] Unless otherwise specified, all embodiments and optional embodiments of this utility model can be combined with each other to form new technical solutions. Unless otherwise specified, all technical features and optional technical features of this utility model can be combined with each other to form new technical solutions. Unless otherwise specified, the terms "comprising" and "including" mentioned in this utility model are open-ended or closed-ended. For example, "comprising" and "including" may mean that other components not listed may also be included, or only the listed components may be included.

[0057] <First Embodiment>

[0058] Figure 1 This is a schematic perspective view of the integrated furnace bottom pressure plate body 10 and sheath 11 of the furnace bottom insulation structure according to the first embodiment of this disclosure. Specifically, as shown... Figure 1As shown, the furnace bottom insulation structure for a single crystal furnace according to an embodiment of this disclosure includes: a furnace bottom pressure plate body 10, which is used to assemble into the furnace bottom 1 of the single crystal furnace (see...). Figure 4 The furnace bottom pressure plate body 10 has a bottom wall 101 and side walls 102 rising from the periphery of the bottom wall 101. The bottom wall 101 has one or more (seven in this embodiment, but not limiting) through functional holes 103. It also has one or more (seven in this embodiment, but not limiting) sheaths 11 integrated into the bottom wall 101 and rising from it, with each sheath corresponding to one of the functional holes 103. Because the furnace bottom pressure plate body 10 has a bottom wall 101 and side walls 102, its shape is similar to a bowl or barrel-shaped container. Specifically, the bottom wall 101, side walls 102, and the outer wall of the sheaths 11 of the furnace bottom pressure plate body 10 form an accommodating space, into which the furnace bottom insulation medium is filled to provide insulation.

[0059] like Figure 1 and Figure 2 As shown in the illustration, for the seven functional holes 103 in this embodiment, the central functional hole 103 is for the crucible shaft to pass through, the larger holes on both sides of this hole are for connecting the vacuum pump to evacuate the vacuum, and the remaining four smaller holes are for the electrode posts to pass through. However, it should be noted that the number and layout of the functional holes can be adjusted according to the needs of the single crystal furnace.

[0060] for Figure 1 The furnace bottom insulation structure shown is an integrated structure of the furnace bottom pressure plate body 10 and the sheath 11. The main body structure can be made of hard, high-temperature resistant materials such as graphite, carbon-carbon or carbon ceramic, tungsten, or molybdenum, which do not react significantly with molten silicon at high temperatures. The materials of the furnace bottom pressure plate body 10 and the sheath 11 can be the same or different. In this embodiment, for example, a carbon-carbon furnace bottom pressure plate body 10 and a carbon-carbon sheath 11 are used. The outer diameter of the furnace bottom pressure plate body 10 is configured to be close to the inner diameter of the single crystal furnace. In this embodiment, for example, a 1600-type single crystal furnace is used, with an inner diameter of 1600 mm and an outer diameter of 1595 mm. Of course, it should be understood that the type of single crystal furnace and the values ​​of the inner diameter and outer diameter of the furnace bottom pressure plate body mentioned here are merely examples, and other suitable values ​​can be used, which are not limited here. The close fit between the furnace bottom pressure plate body 10 and the single crystal furnace ensures the alignment of the furnace bottom and also partially isolates the single crystal furnace body from water cooling, which is beneficial to improving the thermal insulation of the thermal field. At the same time, even if the volume of the stored molten silicon increases after cooling, the single crystal furnace will not be damaged because there is a gap between the furnace bottom pressure plate body 10 and the single crystal furnace.

[0061] Since the positions of the vent holes and electrode posts at the bottom of the same type of single crystal furnace are identical, the furnace bottom insulation structure in this embodiment... Figure 1 The integrated circuit shown can be used in different thermal fields of the same single crystal furnace, exhibiting excellent versatility. For example... Figure 1 As shown, the heights of the furnace bottom pressure plate body 10 and various sheaths 11 can be configured to be close to each other. The specific height is determined by statistically calculating the amount of hot zone material fed, the actual storage capacity of silicon material, and the height of the hot zone. In this embodiment, the height of the furnace bottom pressure plate body 10 is, for example, 200 mm, but this is merely an example and not a limitation. When silicon leakage occurs, the furnace bottom pressure plate body 10 can serve to hold the molten silicon. The sufficiently large diameter of the furnace bottom pressure plate body 10 also enables it to store a large amount of molten silicon after a large-scale silicon leakage occurs.

[0062] like Figure 2 As shown, the furnace bottom insulation structure of this embodiment also includes a support plate 22 that is vertically spaced from the bottom wall 101 of the furnace bottom pressure plate body 10. Figure 2 It shows in Figure 1 A schematic perspective view of the support plate 22 assembled on the integrated assembly. The support plate 22 covers a portion of the upper surface of the furnace bottom insulation medium, for example, the support plate 22 covers the upper surface of the circular middle portion of the furnace bottom insulation medium. The support plate 22 is detachably supported on each sheath 11 and located below the top of the sheath 11, as shown in the diagram. Figure 2 The shape shown can be configured as a plate. Those skilled in the art will understand that the plate shape mentioned here is not limited to a flat plate with parallel upper and lower surfaces, but also includes plates with uneven surfaces, non-parallel surfaces, holes in the plate body, multi-layered plates, etc.; that is, as long as the main body is plate-shaped. Since the support plate 22 is detachably supported by the sheath 11, the insulation material (described later) is improved by using a material with better insulation performance to enhance the insulation effect.

[0063] The support plate 22 may include a plate-shaped support plate body and one or more support plate holes 23. The support plate holes 23 penetrate the support plate body in the thickness direction, so that the upper space and the lower space of the support plate body are connected through the support plate holes 23. In the event of silicon leakage, the silicon liquid leaking from the crucible flows to the upper space of the support plate body, and then enters the lower space of the support plate body through the support plate holes 23. It can then be housed in the accommodating space formed by the bottom wall 101, side wall 102 and outer wall of the sleeve 11 of the furnace bottom pressure plate body 10. The furnace bottom pressure plate body 10 isolates the silicon liquid from the furnace bottom, preventing the silicon liquid from burning through the furnace bottom and exploding when it encounters cooling water.

[0064] In this embodiment, as Figure 2As shown, in order to detachably support the support plate 22 to the sheath 11, the furnace bottom insulation structure for the single crystal furnace also includes at least one support ring 21, which is installed on the sheath 11 and the support plate 22 is installed on the support ring 21. The support plate 22 can be detachably supported to the sheath 11 through the support ring 21.

[0065] The support ring 21 and the support disk 22 can also be made of hard, high-temperature resistant materials such as graphite, carbon-carbon, or carbon ceramic, which do not react significantly with the silicon melt at high temperatures. The materials of the support ring 21 and the support disk 22 can be the same or different from each other.

[0066] The above reference Figure 1 and Figure 2 The basic configuration of the furnace bottom insulation structure according to an embodiment of this disclosure is described. According to the furnace bottom insulation structure having the above configuration, on the one hand, since a furnace bottom pressure plate body 10 is disposed at the bottom of the single crystal furnace, and the furnace bottom pressure plate body 10 has a bottom wall 101 and side walls 102 rising from the periphery of the bottom wall 101, the furnace bottom pressure plate body 10 functions as a container for leaking silicon. Even if silicon is accidentally leaked during the single crystal silicon growth process, the leaked silicon will be contained in the furnace bottom pressure plate body 10 and will not contact the furnace bottom 1, avoiding the risk of the leaked silicon burning through the furnace bottom 1 and causing an explosion, thus achieving silicon leakage protection. Furthermore, since the support plate 22 is supported at a position lower than the top of the sheath 11, the risk of molten silicon entering the interior of the sheath 11 from the top after a silicon leakage occurs can also be effectively prevented.

[0067] Furthermore, at least the bottom of the sheath 11 is integrally formed with the bottom wall 101 of the furnace bottom pressure plate body 10, so that when the leaked silicon is contained in the furnace bottom pressure plate body 10, it will not enter the interior of the sheath 11 from the bottom of the sheath 11, thereby reducing the risk of leaked silicon.

[0068] On the other hand, according to reference Figure 1 and Figure 2The basic structure of the furnace bottom insulation structure described in this disclosure embodiment includes a support plate 22 arranged above the furnace bottom pressure plate body 10 via a sheath 11 and a support ring 21. Unlike the prior art where the pressure plate is supported by molded felt as insulation material, and where a high density is required to ensure support, leading to reduced insulation, this disclosure embodiment allows the sheath 11 to support the support plate 22. This allows the support plate 22 to support insulation components such as the insulation cylinder 31 described later. Therefore, the support function does not need to be considered when selecting insulation materials. A soft insulation material with good insulation properties, such as adhesive-based soft felt, aerogel, or alumina, can be filled into the internal space of the furnace bottom pressure plate body 10, improving the insulation effect. Furthermore, this soft insulation material makes close contact with the sidewall of the sheath 11, avoiding gaps between the molded felt and the sheath 11 compared to the rigid solid felt in the prior art. This allows the insulation material to adhere tightly to the sheath, further enhancing the insulation effect of the thermal field.

[0069] Each component of the furnace bottom insulation structure in this embodiment is mounted on the furnace bottom pressure plate body 10, and can be disassembled and reassembled as a whole, which facilitates cleaning and installation / removal and improves the efficiency of hot zone disassembly and cleaning.

[0070] Accordingly, the furnace bottom insulation structure of this embodiment can take into account both insulation performance and silicon leakage protection, and also improves disassembly and cleaning efficiency.

[0071] Figure 3 In order to be in Figure 2 A schematic three-dimensional view showing an insulation cylinder 31 supported on a support plate 22. (See diagram below.) Figure 3 As shown, the insulation cylinder 31 can be erected on the periphery of the support plate 22 in the furnace bottom insulation structure of this embodiment. The insulation cylinder 31 can be simply mounted on the support plate 22, or it can be fixed to the support plate 22 by bonding, snapping, or other means. The material of the insulation cylinder 31 can also be graphite, carbon-carbon or carbon ceramic, tungsten, molybdenum, or other hard materials that are resistant to high temperatures and do not react significantly with molten silicon at high temperatures.

[0072] By vertically mounting the insulation cylinder 31 around the support plate 22 in the furnace bottom insulation structure of this embodiment, heat loss through the furnace bottom 1 to the outside can be effectively blocked, and uneven heat distribution at the furnace bottom can be reduced. This helps maintain the stability of the overall thermal field inside the furnace, providing a more uniform temperature environment for monocrystalline silicon growth and reducing crystal growth defects caused by thermal field fluctuations. Furthermore, the insulation cylinder 31 can be wrapped with soft felt, and the support plate 22 is located inside, so no separate covering is required.

[0073] like Figure 2 and Figure 3As shown, the number, shape, and arrangement of the support holes 23 are merely examples and not limitations; other designs may be used.

[0074] The support plate hole 23 provided in the support plate 22 can prevent the support plate 22 from expanding under high temperature. At the same time, when silicon leakage occurs, the support plate hole 23 can guide the silicon melt to the integrated container-shaped furnace bottom pressure plate body 10. The silicon melt is stored in the container-shaped furnace bottom pressure plate body 10, so that the silicon melt will not accumulate on the support plate 22.

[0075] In addition to the support plate hole 23, the support plate 22 is also provided with a through mounting hole 24. The mounting hole 24 is located at a position corresponding to the sheath 11, so that the support plate 22 can be installed by passing through the sheath 11 using the mounting hole 24. When the sheath 11 is inserted through the mounting hole 24 of the support plate 22, the periphery of the mounting hole 24 abuts against the support part 211, so that the support plate 22 is supported on the sheath 11.

[0076] The above is for reference only. Figures 1-3 The general structure of the furnace bottom insulation structure according to an embodiment of this disclosure has been described. Reference will now be made to... Figure 4 Describe the details of its composition.

[0077] like Figure 4 As shown, in this embodiment, the support ring 21 is nested and installed on the top end of the sheath 11. The support ring 21 includes: a cylindrical main body 212, the inner diameter of which matches the outer diameter of the sheath 11 to be fitted onto the sheath 11; a locking portion 213, which protrudes radially inward from the inner circumferential surface of the main body 212 on the upper side (upper end in this embodiment); and a support portion 211, which protrudes radially outward from the outer circumferential surface of the main body 212 on the lower side (lower end in this embodiment). The locking portion 213 is connected to the top end of the sheath 11, and the support plate 22 is supported by the support portion 211. It should be noted that although the engaging part 213 is formed at the upper end of the main body part 212 in this embodiment, this is not a limitation. It can also be formed at a position lower than the upper end. Similarly, the support part 211 can also be formed at a position higher than the lower end, as long as the engaging part 213 and the support part 211 are formed on the upper and lower sides of the main body part 212, respectively.

[0078] The engaging portion 213 is detachable from the top of the sheath 11, and / or the support plate 22 is detachable from the support portion 211. That is, at least one connection point between the engaging portion 213 of the support ring 21 and the top of the sheath 11, and between the support portion 211 of the support ring 21 and the support plate 22, is designed to be detachable, ensuring the detachability of the support plate 22 relative to the sheath 11. This detachability of the support plate 22 relative to the sheath 11 facilitates the filling of the furnace bottom insulation medium within the furnace bottom pressure plate body, and also facilitates disassembly and cleaning in the event of silicon leakage.

[0079] See Figure 4 In this embodiment, the engaging portion 213 of the support ring 21 is detachable from the top end of the sheath 11. The support portion 211 of the support ring 21 and the support plate 22 are integral, meaning that the support plate 22 extends radially outward from the support portion 211 integrally, thereby supporting the support portion 211. By supporting the support plate 22 in a manner that makes the support plate 22 integral with the support portion 211 of the support ring 21, the step of assembling the support plate 22 separately is eliminated, simplifying the assembly process. Moreover, since the integral connection also eliminates the connection points when the parts are set separately, the outer peripheral surface of the support portion 211 and the inner peripheral surface of the mounting hole of the support plate 22 are integral without any seams. This effectively avoids the problem of decreased structural stability caused by loosening or wear of the connection points, and improves the overall structural strength.

[0080] Using the support ring 21 and support plate 22 of this embodiment, when installing onto the sheath 11, the support ring 21 is nested onto the sheath 11 via the main body 212 and the engaging part 213. This facilitates assembly and provides excellent operability. Furthermore, the nesting ensures stable load-bearing capacity using each sleeve 11, thereby guaranteeing the support function of the support plate 22 for the insulation cylinder 31. Additionally, the support ring 21 can be nested onto the sheath 11 after the insulation material has been filled, preventing it from obstructing the filling process and facilitating the filling operation.

[0081] In the furnace bottom insulation structure of this embodiment, since the support plate 22 is detachably supported by the sheath 11 as described above, a furnace bottom insulation medium 41 with excellent insulation performance can be installed to improve the insulation performance. Specifically, it is located in the accommodating space formed by the bottom wall 101 of the furnace bottom pressure plate body 10, the side wall 102, and the outer side wall of the sheath 11, and its height is flush with the lower surface of the support plate 22. The furnace bottom insulation medium 41 can achieve effective insulation. Moreover, since the furnace bottom insulation medium 41 is located in the aforementioned accommodating space between the furnace bottom pressure plate body 10 and the support plate 22 and is higher than and flush with the lower surface of the support plate 22, the furnace bottom insulation medium 41 does not need to play a supporting role, which can eliminate the problem of insufficient tightness between conventional hard felt and sheath 11. At the same time, since the furnace bottom insulation medium 41 only plays an insulation role, the insulation medium with the best insulation performance can be selected to ensure the maximization of thermal insulation performance.

[0082] For the material of the furnace bottom insulation medium 41, adhesive-based soft felt, silica powder, aerogel, alumina, etc. can be selected. In this embodiment, carbon aerogel is used as an example to fill the furnace bottom insulation medium 41. Carbon aerogel has a low thermal conductivity and good insulation performance. At the same time, when silicon leakage occurs, the low density of carbon aerogel provides more space to hold the molten silicon. In addition, the reaction of carbon aerogel with silicon at high temperature to form silicon carbide is an endothermic reaction, and the products are harmless and can help cool the molten silicon.

[0083] <Second Embodiment>

[0084] Below, we will refer to Figure 5 The following describes a furnace bottom insulation structure according to a second embodiment of this disclosure. The second embodiment differs from the first embodiment in that: instead of the integral sheath 11 in the first embodiment, the sheath 11 in the second embodiment is divided into two parts; and instead of the integrally formed support ring 21 and support disk 22 in the first embodiment, the support ring 21 and support disk 22 in the second embodiment are detachable separate structures, which are assembled together for use. The remaining components of the second embodiment are the same as those of the first embodiment and will not be described in detail here.

[0085] like Figure 5 As shown, the support ring 21 in the second embodiment also includes a support portion 211, a main body portion 212, and a locking portion 213. However, the support portion 211 supports the support disk 22 not by making the support portion 211 and the support disk 22 integrally formed, but by locking the support disk 22 onto the support portion 211. With the sheath 11 inserted through the mounting hole 24 of the support disk 22, the periphery of the mounting hole 24 abuts against the support portion 211, so that the support disk 22 is supported on the support portion 211 of the support ring 21.

[0086] like Figure 5As shown, the main body of the support disk 22 is provided with a notch 221. The notch 221 may be formed by removing a portion of the thickness of the support disk 22 from a portion of the inner circumferential surface of the mounting hole 24 of the support disk 22 radially outward. The size of the notch 221 matches the size of the support portion 211 of the support ring 21, so that the support portion 211 can fit into the notch 221, thereby the support ring 21 stably supports the support disk 22.

[0087] In use, the support ring 21 can be nested and installed into each sleeve 11 first, and then the mounting hole 24 of the support plate 22 can be passed through the main body 212 of the support ring 21 and fitted into the support part 211 to complete the installation. Alternatively, the support ring 21 and the support plate 22 can be assembled together first, and then the assembly can be nested into the sleeve 11. Therefore, by simply inserting the sleeve 11 through the corresponding mounting hole 24 of the support plate 22, the support plate 22 can be abutted against and installed on the support ring 21, making the assembly operation simple and providing excellent assembly operability. In addition, the installation of the support plate 22 can also be carried out after the insulation material is filled, so that the support plate 22 will not become an obstacle during the filling operation, which is beneficial to the filling operation.

[0088] See Figure 5 The second embodiment of the sheath 11 differs from the first embodiment in its construction. The sheath 11 is divided into a base portion 50 and a replaceable portion 51 assembled to the upper end of the base portion 50. The base portion 50 is integrated into the bottom wall 101 of the furnace bottom pressure plate body 10 so as to stand upright from the bottom wall 101. The replaceable portion 51 has an inner diameter and thickness substantially equal to that of the base portion 50, but it may also have a thickness slightly larger than that of the base portion 50 to improve heat resistance. A first recess 501 and / or a first protrusion are formed on the upper end surface of the base portion 50, and a second protrusion 511 and / or a second recess are formed on the lower end surface of the replaceable portion 51. The second protrusion 511 engages with the first recess 501 and / or the second recess engages with the first protrusion, thereby assembling the replaceable portion 51 to the top of the base portion 50. For example, a protrusion 511 is formed on the lower end surface of the replaceable portion 51, and a recess 501 is formed on the upper end surface of the base portion 50. The protrusion 511 engages with the recess 501 of the base portion 50, thereby assembling the replaceable portion 51 to the base portion 50. The engagement between the recess and the protrusion ensures stability during installation. Alternatively, a protrusion can be formed on the upper end surface of the base portion 50, and a recess can be formed on the lower end surface of the replaceable portion 51 to engage with it. Alternatively, both protrusions and depressions can be formed on the upper end face of the base portion 50, and both depressions and protrusions can be formed on the end face of the replaceable portion to engage with it. That is, as long as the engagement between the base portion and the replaceable portion can be achieved, there are no restrictions on the location, shape, or number of the depressions and protrusions.

[0089] In the furnace bottom insulation structure of the second embodiment, the sheath 11 is divided into a base portion 50 and a replaceable portion 51 that can be assembled together. The base portion 50 is integrated into the furnace bottom pressure plate body 10. Since the furnace bottom pressure plate body 10 is in close contact with the furnace bottom water cooling system, the base portion 50 is less prone to thermal damage. In contrast, the replaceable portion 51 at the upper end of the sheath 11 is close to the high-temperature zone of the thermal field and may be damaged due to overheating. In this case, even if the replaceable portion 51 is damaged, only the replaceable portion 51 needs to be replaced, ensuring a long service life and low cost for the furnace bottom 1. Moreover, by using replaceable portions 51 of different heights, the insulation height of the furnace bottom 1 can be adjusted to meet different insulation requirements.

[0090] After the replaceable part 51 is assembled to the base part 50, a sleeve 11 similar to that in the first embodiment is formed. The support ring 21 can be installed to the replaceable part 51 of the sleeve 11 in a nesting manner, just like in the first embodiment.

[0091] In this embodiment, the bottom of the base portion 50 is integrally formed with the bottom wall 101 of the furnace bottom pressure plate body 10.

[0092] <Other Embodiments>

[0093] In the second embodiment, the support portion 211 and the support plate 22 are supported by providing a notch 221 near the mounting hole 24 of the support plate 22 and engaging the notch 221 with the support portion 211 of the support ring 21. However, this is not limiting. For example, the notch 221 may not be provided, and the lower surface of the support plate 22 may be directly supported on the support portion 211 of the support ring 21. However, since the support portion 211 is engaged with the notch 221, the support plate 22 can be positioned more reliably, and the surfaces of the support plate 22 and the support portion 211 can be made more even. Figure 5 The notch is more preferable because the two are basically flush and at roughly the same height, minimizing height occupation and achieving better space planning.

[0094] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can occur depending on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A heat retaining structure for a furnace bottom of a single crystal furnace, characterized by comprising: include: The furnace bottom pressure plate body (10) is used to be assembled to the furnace bottom (1) of the single crystal furnace, and has a bottom wall (101) and a side wall (102) erected from the periphery of the bottom wall (101). A plurality of through functional holes (103) are provided on the bottom wall (101). At least one sheath (11), each of the sheaths (11) corresponding to each of the functional holes (103), is integrated on the bottom wall (101) of the furnace bottom pressure plate body (10) to stand upright from the bottom wall (101), wherein the bottom wall (101), the side wall (102) of the furnace bottom pressure plate body (10) and the outer side wall of the sheath (11) form an accommodating space, and the furnace bottom insulation medium is used to fill the accommodating space; as well as A support plate (22) covers part of the upper surface of the furnace bottom insulation medium, wherein an insulation cylinder (31) is disposed at the edge of the support plate (22), the support plate (22) includes a plate-shaped support plate body and one or more support plate holes (23), the support plate holes (23) penetrating the support plate body in the thickness direction.

2. The furnace bottom insulation structure according to claim 1, characterized in that, The support plate (22) is detachably supported on the sleeve (11) and located below the top of the sleeve (11).

3. The hearth insulation structure according to claim 2, characterized by It further includes at least one support ring (21), Each of the support rings (21) includes: a cylindrical body portion (212) fitted onto the sheath (11); an engaging portion (213) protruding radially inward from the inner circumferential surface of the body portion (212) on the upper side; and a support portion (211) protruding radially outward from the outer circumferential surface of the body portion (212) on the lower side. The engaging part (213) is connected to the top of the sheath (11) and the support plate (22) is supported on the support part (211).

4. The furnace bottom insulation structure according to claim 3, characterized in that, The locking part (213) is detachable from the top of the sleeve (11) and / or the support plate (22) is detachable from the support part (211).

5. The furnace bottom insulation structure according to claim 4, characterized in that, The support plate (22) further includes a mounting hole (24) penetrating the body of the support plate in the thickness direction. The mounting hole (24) is formed at a position corresponding to the sheath (11) so that the sheath (11) can be inserted through it. With the sleeve (11) inserted through the mounting hole (24) of the support plate (22), the periphery of the mounting hole (24) abuts against the support part (211), so that the support plate (22) is supported by the support ring (21).

6. The furnace bottom insulation structure according to claim 5, characterized in that, The main body of the support plate is provided with a notch (221), and the support part (211) is fitted into the notch (221).

7. The furnace bottom insulation structure according to claim 2, characterized in that, The sheath (11) includes: a base portion (50) integrated on the bottom wall (101) of the furnace bottom pressure plate body (10) to stand upright from the bottom wall (101); and a replaceable portion (51) assembled on the top of the base portion (50), wherein the support plate (22) is supported on the base portion (50) of the sheath (11).

8. The hearth insulation structure according to claim 7, wherein A first recess (501) and / or a first protrusion are formed on the upper end surface of the base portion (50), and a second protrusion (511) and / or a second recess are formed on the lower end surface of the replaceable portion (51). The second protrusion (511) engages with the first recess (501) and / or the second recess engages with the first protrusion, thereby the replaceable portion (51) is assembled to the top of the base portion (50).

9. The hearth insulation structure according to claim 1, wherein At least the bottom of the sheath (11) is integrally formed with the bottom wall (101) of the furnace bottom pressure plate body (10).

10. A single crystal furnace characterized by comprising: include: The furnace bottom insulation structure according to any one of claims 1 to 9.

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