Slide valve sealing structure and vacuum slide valve

Abstract

A sealing structure for a slide gate valve is provided, including a valve body and a valve plate. The valve body includes an opening and a channel communicating with the opening. The valve plate includes a connecting portion and a sealing portion. A rolling element is provided on the side of the connecting portion perpendicular to the reciprocating motion direction, so that the connecting portion rolls against the inner wall of the valve body. A sealing ring is disposed on the valve plate, so that the sealing portion achieves non-direct contact with the valve body through the sealing ring. This vacuum slide gate valve sealing structure provides a reliable vacuum seal while effectively preventing the generation of metal particles. A vacuum slide gate valve is also provided.

Description

Technical Field

[0001] This utility model relates to the field of valves, specifically to the field of gate valves. Background Technology

[0002] In the semiconductor and vacuum coating industries, traditional valves use wedge-type or steel ball-lifted valve plates for sealing. When closing or opening, vibrations are generated, and metal-to-metal friction produces particulate matter. These metal particles can lead to contamination of the vacuum chamber and coating chamber. Utility Model Content

[0003] One objective of this invention is to provide a vacuum slide valve sealing structure that can significantly reduce the generation of particulate matter.

[0004] To achieve the above objectives, the gate valve sealing structure includes a valve body and a valve plate. The valve body includes an opening and a channel communicating with the opening. The valve plate includes a connecting part and a sealing part. A rolling element is provided on the side of the connecting part perpendicular to the reciprocating motion direction so that the connecting part rolls against the inner wall of the valve body. A sealing ring is provided on the valve plate so that the sealing part does not directly contact the valve body through the sealing ring.

[0005] In one or more embodiments, the connecting portion and the closing portion form a first side surface and a second side surface perpendicular to the reciprocating motion direction, the first side surface being a plane and the second side surface being a stepped surface; the opening portion includes a through hole and a stepped structure, and the second side surface cooperates with the stepped structure.

[0006] In one or more embodiments, the connecting portion includes a protruding portion that protrudes to one side along the axial direction of the opening, the protruding portion including a first curved surface, and the periphery of the closing portion forming a second curved surface; the stepped structure includes a protruding portion and a recessed portion, the recessed portion being recessed to one side along the axial direction of the through hole and including a fourth curved surface adjacent to the through hole, and the protruding portion protruding to the other side along the axial direction of the through hole and including a third curved surface adjacent to the through hole; wherein the first curved surface and the fourth curved surface fit together, and the second curved surface and the third curved surface fit together, so that the closing portion blocks the through hole.

[0007] In one or more embodiments, the protrusion and the recess form a connecting end face at the connection point, and the connecting end face contacts the bottom end face of the connecting portion.

[0008] In one or more embodiments, the sealing ring is disposed on the first curved surface, the second curved surface, and the bottom end face.

[0009] In one or more embodiments, the sealing ring is a single piece.

[0010] In one or more embodiments, the center of the third curved surface is offset from the center of the through hole.

[0011] In one or more embodiments, the gate valve closure structure further includes baffles detachably disposed on both sides of the valve body, the baffles having openings facing each other.

[0012] In one or more embodiments, the rolling element is a non-metallic element.

[0013] Another objective of this invention is to provide a vacuum slide gate valve, which includes the aforementioned slide gate valve sealing structure and a drive component connected to the valve plate connection portion.

[0014] The aforementioned gate valve sealing structure, through sealing rings and rolling elements, prevents direct contact between the metal valve plate and valve body, thus providing a reliable vacuum seal while effectively avoiding the generation of metal particles. Attached Figure Description

[0015] The above and other features, properties and advantages of this utility model will become more apparent from the following description taken in conjunction with the accompanying drawings and embodiments, wherein:

[0016] Figure 1 This is a side cross-sectional view of a vacuum slide gate valve;

[0017] Figure 2 This is a disassembled diagram of the vacuum slide gate valve parts;

[0018] Figure 3 This is a schematic diagram of the valve plate blocking the through hole;

[0019] Figure 4 This is a schematic diagram of the connecting part and the closing part;

[0020] Figure 5 This is a schematic diagram of the valve body;

[0021] Figure 6 This is a front view of the opening;

[0022] Figure 7 This is a side sectional view of the valve body.

[0023] Symbol marking explanation

[0024] 1 Valve body

[0025] 2 Valve Plate

[0026] 3. Drive components

[0027] 4 Connectors

[0028] 5. Valve stem

[0029] 6. Bellows assembly

[0030] 7 Rolling parts

[0031] 8. Sealing ring

[0032] 9 Valve cover

[0033] 11. Opening

[0034] 12 channels

[0035] 21 Connecting part

[0036] 22 Enclosed section

[0037] 31 Upper cylinder head

[0038] 32-cylinder block

[0039] 33 Cylinder head

[0040] 34 Pistons

[0041] 71 bearing

[0042] 101 First Surface

[0043] 102 Second Surface

[0044] 103 Third Surface

[0045] 104 Fourth Surface

[0046] 111 Through Hole

[0047] 112 Protrusion

[0048] 113 Depression

[0049] 115 Connection end face

[0050] 120 Inner Wall

[0051] 210 Cavity

[0052] 215 Bottom end face Detailed Implementation

[0053] The present invention will be further described below with reference to specific embodiments and accompanying drawings. More details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention can obviously be implemented in many other ways different from those described herein. Those skilled in the art can make similar extensions and derivations based on actual application situations without departing from the spirit of the present invention. Therefore, the scope of protection of the present invention should not be limited by the content of this specific embodiment.

[0054] It should be noted that these and other accompanying drawings are merely examples and are not drawn to scale, and should not be used as a limitation on the scope of protection of this utility model.

[0055] Figure 1 and Figure 2 This shows the basic structure of a slide gate valve. Figure 3 This is a cross-sectional view of the valve body and valve plate in their mating state. Figure 4 A partial schematic diagram of the valve plate is shown. Figure 5 A schematic diagram of the valve body is shown. Figure 6 The structure of the opening is shown. Figure 7 This is a lateral cross-sectional view of the opening.

[0056] Reference Figure 1 and Figure 2 As shown, the slide gate valve includes a valve body 1, a valve plate 2, and a drive component 3 for moving the valve plate 2. The valve body 1 includes an opening 11 and a channel 12 communicating with the opening 11. The valve plate 2 reciprocates in the Z direction within the channel 12 to open and close the opening 11. Figure 2 In the schematic diagram shown, the orientation of the valve plate 2 is only for illustration. It is not inserted into the channel 12 in the orientation shown in the diagram, but rather in the opposite direction to the orientation shown in the diagram.

[0057] In some embodiments, the driving component is a cylinder 3, which includes an upper cylinder head 31, a cylinder body 32, a lower cylinder head 33, and a piston 34. The cylinder 3 is further connected to the valve plate 2 via a connector 4, a valve cover, and a valve stem 5. Furthermore, the valve stem 5 is fitted with a bellows assembly 6. The lower part of the valve stem 5 is placed inside the bellows assembly 6, passes through the connector 4 and the valve cover 9, and is tightened with connecting screws before being inserted into the valve plate. The upper part of the valve stem 5 passes through the lower cylinder head 33 and the piston 34 and is locked with a nut. Air pipe connector holes are provided at the upper cylinder head 31 and the lower cylinder head 33, and an "O"-ring seal is provided at the piston 34 to allow compressed air to pass through. The valve plate 2 opens or closes the valve body 1 during the up-and-down movement of the piston.

[0058] That is, the cylinder uses compressed air from the air compressor as its power source. When the air is compressed and delivered to the cylinder, the piston inside the cylinder begins to move under pressure. By controlling the compressed air, the valve plate is driven to move downward or upward in the Z direction within the piston to close or open the valve body 1, including the opening 11, thereby achieving the cut-off or conduction of the medium.

[0059] To avoid the generation of metal particles during the reciprocating motion of the valve plate, this disclosure proposes a sealing structure for a slide gate valve, which can reduce the direct contact between the metal valve plate and the valve body while ensuring sealing, thereby preventing the generation of metal particles.

[0060] like Figure 2 and Figure 3 As shown, the valve plate 2 includes a connecting portion 21 and a closing portion 22. A rolling element 7 is provided on the side of the connecting portion 21 perpendicular to the reciprocating motion direction Z. Specifically, as... Figure 4 As shown, the connecting part 21 provides a cavity 210 to accommodate the rolling element 7. The rolling element 7 is placed inside the cavity 210 and fixed inside the valve plate by a bearing 71, a retaining ring, and a wheel and axle structure. The rolling element 7 enables the connecting part 21 to achieve a rolling fit with the inner wall 120 of the valve body 1, such as... Figure 1 As shown, during the reciprocating motion of the valve plate 2 along the Z direction, direct metal-to-metal contact between the valve body 1 and the valve plate 2 is avoided.

[0061] The rolling element 7 is preferably made of PEEK (polyetheretherketone) wheel body, which, when combined with the bearing, allows the valve plate 2 to slide easily inside the valve body without metal-to-metal friction. Those skilled in the art will understand that the rolling element can also be other non-metallic parts with superior hardness and corrosion resistance.

[0062] The gate valve sealing structure also includes a sealing ring 8 disposed on the valve plate 2, see reference. Figure 4 As shown. The sealing ring 8 ensures that the sealing part 22 does not directly contact the valve body 1, thereby further preventing the generation of metal particles.

[0063] The valve plate 2 and the opening 11 of the valve body 1 are also fitted together by a specific stepped shape to ensure both sealing effect and anti-metal friction effect.

[0064] The connecting portion 21 and the closing portion 22 form a first side surface 23 and a second side surface 24 perpendicular to the reciprocating motion direction. The first side surface 23 is a plane, and the second side surface 24 is a stepped surface. The opening portion 11 includes... Figure 5 The through hole 111 and the stepped structure shown are matched with the second side 24 to ensure a sealing effect.

[0065] Furthermore, such as Figures 2 to 5 As shown, the connecting portion 21 of the valve plate 2 protrudes to one side relative to the closing portion 22 along the axial direction S of the opening portion 11, forming a protruding portion 211, which includes a first curved surface 101. A second curved surface 102 is formed at the bottom periphery of the closing portion 22. Figure 2 and Figure 4 The back side of the valve plate 2 shown is the first side surface 23, which is a plane.

[0066] Continue to refer to Figure 5As shown, the stepped structure of the opening 11 includes a protrusion 112 and a recess 113. The protrusion 112 protrudes to one side along the axis S of the through hole, and the recess 113 is recessed to the other side along the axis S of the through hole. The protrusion 112 forms a third curved surface 103 adjacent to the through hole 111, and the recess 113 forms a fourth curved surface 104 adjacent to the through hole 111. To ensure a sealing effect, the protrusion 112 and the recess 113 are not adjacent to the through hole 111, but have a certain buffer area G as the wall forming the through hole 111.

[0067] Optionally, the first, second, third, and fourth surfaces can be curved surfaces.

[0068] The first curved surface 101 is shaped to fit the fourth curved surface 104, and the second curved surface 102 is shaped to fit the third curved surface 103, so that the sealing portion 22 tightly seals the through hole 111, providing a reliable vacuum seal. When the sealing portion 22 seals the through hole 111, the plane of the first side surface 23 is coplanar with the protrusion 112, as shown below. Figure 1 As shown. In the blocked state, the rolling element 7 located on the connecting part 21 engages with the inner wall of the valve body 1 located above the recessed part 113.

[0069] Based on the above embodiments, referring to Figure 4 and Figure 5 As shown, the protrusion 112 and the recess 113 form a connecting end face 115 at the connection point, and the connecting end face 115 contacts the bottom end face 215 of the connecting part 21. The sealing ring 8 is simultaneously provided on the first curved surface 101, the second curved surface 102, and the bottom end face 215, so that no part of the valve plate 2 comes into contact with the valve body 1, thereby avoiding the generation of metal particles.

[0070] In this way, the valve plate 2 and the valve body 1 are vacuum sealed using the principle of tangent arcs. When closed, the rubber ring on the valve plate fits tightly against the arc on the valve plate surface, effectively sealing while preventing direct contact between metal materials. At the same time, the rolling element 7 is in the valve body cavity, avoiding metal contact between components, which can effectively reduce the generation of particulate matter and reduce the impact on the valve.

[0071] The sealing ring 8 is preferably a single piece. The first curved surface 101, the second curved surface 102, and the bottom end face 215 are provided with curved grooves to accommodate the sealing ring 8, and the sealing ring 8 rotates at the bottom end face 215. In some embodiments, the sealing ring 8 protrudes a certain height from the surface of the valve plate 2, for example, 2mm to 1cm, to ensure that no part of the valve plate 2 will directly contact the valve body 1 under significant external force. Furthermore, the sealing ring 8 also acts as a buffer when closed, thereby reducing the impact on the valve.

[0072] exist Figure 6In the illustrated embodiment, the connecting end faces 115 are located on both sides of the center of the through hole 111, making the protrusions and recesses generally symmetrical vertically. In other embodiments, the protrusions and recesses may also be configured as asymmetrical structures.

[0073] In some embodiments, the third curved surface 103 is eccentrically positioned relative to the through hole 111, meaning the center of the third curved surface 103 is offset from the center of the through hole 111. Figure 6 As shown.

[0074] exist Figure 6 In the embodiment shown, the width of the buffer region G between the protrusion 112 and the through hole 111 is greater than the width of the buffer region G' between the recess 113 and the through hole 111.

[0075] Back Figure 1 The sealing structure of the slide gate valve also includes baffles 14 that are detachably disposed on both sides of the valve body 1. The baffles 14 are provided with openings and face each other to the openings 11.

[0076] Those skilled in the art will understand that the step structure is not limited to the step structure described in the above embodiments, and there may be more steps in other embodiments.

[0077] The following describes the movement process of the sealing structure of the slide gate valve.

[0078] When air is compressed and delivered to the cylinder, the piston inside the cylinder begins to move under pressure and drives the valve plate 2 to move downward in the Z direction via the valve stem 5. During the movement, the rolling element 7 located on the connecting part 21 rolls with the inner wall 120 of the valve body 1 located above the recess 113.

[0079] During the downward movement of the valve plate 2, the second curved surface 102 at the bottom of the sealing part 22 approaches the third curved surface 103, and finally achieves the fit between the first curved surface 101 and the fourth curved surface 104, and the fit between the second curved surface 102 and the third curved surface 103. The sealing ring 8 located on the first curved surface 101, the second curved surface 102 and the bottom end face 215 ensures that no part of the valve plate 2 comes into contact with the valve body 1.

[0080] When the piston inside the cylinder is subjected to pressure and begins to move in the opposite direction, the valve plate 2 moves up along the Z direction, the first curved surface 101 separates from the fourth curved surface 104, and the second curved surface 102 separates from the third curved surface 103. During the movement, the rolling element 7 located on the connecting part 21 rolls and engages with the inner wall 120 of the valve body 1 located above the recessed part 113 to prevent friction between the metal parts.

[0081] In the above process, especially in applications requiring low particle generation and low impact sensitivity, this valve provides a reliable vacuum seal through a special stepped structure. At the same time, by using a ring of seals and rolling elements in multiple locations, there is no area of ​​direct metal-to-metal contact between the valve plate and the valve body when sealing the through hole, thus effectively avoiding the generation of metal particles.

[0082] There is no metal-to-metal contact between the valve plate and the valve body cavity, and the sealing ring provides a buffering effect when closed, thereby reducing the impact on the valve.

[0083] The multi-layered stepped structure formed by through holes, protrusions, and recesses can also ensure a sealing effect after cutting.

[0084] Based on the above description of the gate valve sealing structure, it can be understood that a vacuum gate valve including the above gate valve sealing structure can effectively avoid the generation of metal particles and maintain a reliable vacuum sealing effect when applied to the semiconductor and vacuum coating industries.

[0085] It should be noted that the use of terms such as "first" and "second" to define the components in the above content is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this application.

[0086] In the description of this application, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is usually based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this application; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0087] Furthermore, this application uses specific terms to describe embodiments of the application. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic related to at least one embodiment of the application. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of the application can be appropriately combined.

[0088] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make possible variations and modifications without departing from the spirit and scope of the present invention. Therefore, any modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the protection scope defined by the claims of the present invention.

Claims

1. A gate valve closure structure, comprising a valve body and a valve plate, wherein the valve body includes an opening and a channel communicating with the opening, characterized in that, The valve plate includes a connecting portion and a closing portion. A rolling element is provided on the side of the connecting portion perpendicular to the reciprocating motion direction, so that the connecting portion rolls against the inner wall of the valve body; and A sealing ring is disposed on the valve plate so that the sealing part can achieve non-direct contact with the valve body through the sealing ring.

2. The plug valve closure structure of claim 1, wherein, The connecting part and the closing part form a first side and a second side perpendicular to the reciprocating motion direction. The first side is a plane and the second side is a stepped surface. The opening includes a through hole and a stepped structure, and the second side surface mates with the stepped structure.

3. The plug valve closure structure of claim 2, wherein, The connecting portion includes a protruding part that protrudes to one side along the axial direction of the opening, the protruding part including a first curved surface, and the periphery of the closed portion forming a second curved surface; The stepped structure includes a protrusion and a recess. The recess is recessed to one side along the axis of the through hole and includes a fourth curved surface adjacent to the through hole. The protrusion is protruded to the other side along the axis of the through hole and includes a third curved surface adjacent to the through hole. The first curved surface fits the fourth curved surface, and the second curved surface fits the third curved surface, so that the sealing part blocks the through hole.

4. The plug valve closure structure of claim 3, wherein, The protrusion and the recess form a connecting end face at the connection point, and the connecting end face contacts the bottom end face of the connecting part.

5. The plug valve closure structure of claim 4, wherein, The sealing ring is disposed on the first curved surface, the second curved surface, and the bottom end face.

6. The plug valve closure structure of claim 5, wherein, The sealing ring is a single piece.

7. The plug valve closure structure of claim 3, wherein, The center of the third curved surface is offset from the center of the through hole.

8. The plug valve closure structure of claim 1, wherein, The sealing structure of the slide gate valve also includes baffles that are detachably disposed on both sides of the valve body, the baffles having openings and facing each other.

9. The plug valve closure structure of claim 1, wherein, The rolling element is a non-metallic component.

10. Vacuum plug valve, characterized in that The valve includes the gate valve sealing structure as described in any one of claims 1-9, and further includes a drive component connected to the valve plate connection portion.

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