High vacuum pneumatic slide gate valve

By installing a cleaning mechanism in the high-vacuum pneumatic slide gate valve, the aging of seals and contaminants are cleaned using an elastic arc plate and a cleaning scraper. This solves the problems of seal aging and contaminant accumulation, enabling normal valve opening and closing, extending maintenance cycles, and reducing maintenance costs and noise.

CN224579780UActive Publication Date: 2026-07-31CORE MATERIAL CORE (CHANGSHU) SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
CORE MATERIAL CORE (CHANGSHU) SEMICONDUCTOR TECHNOLOGY CO LTD
Filing Date
2025-09-30
Publication Date
2026-07-31

AI Technical Summary

Technical Problem

Existing high-vacuum pneumatic slide gate valves suffer from aging seals and contaminant buildup after prolonged use, leading to delayed valve opening and closing, high maintenance frequency, and increased costs and downtime.

Method used

A high-vacuum pneumatic slide gate valve was designed, equipped with a cleaning mechanism including a sliding base, an elastic arc plate, and a cleaning scraper. The elastic arc plate contacts the inner wall of the valve body, and the cleaning scraper cleans the aging seals and contaminants during the movement of the valve core, preventing accumulation and ensuring normal valve opening and closing.

Benefits of technology

It effectively avoids aging of seals and accumulation of contaminants, extends valve maintenance cycles, reduces maintenance costs, improves valve response speed, reduces noise, and improves the working environment.

✦ Generated by Eureka AI based on patent content.

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Abstract

This utility model discloses a high-vacuum pneumatic slide gate valve, relating to the field of slide gate valve technology. The utility model includes a valve body, a cleaning mechanism, and a valve core. A movable frame is installed inside the valve body, and the valve core is installed inside the movable frame. A transmission mechanism is provided outside the valve body. A sealing gasket is installed inside the valve body, and a sealing cover is installed outside the valve body. A sliding base is installed outside the movable frame, and an elastic arc plate is provided on the side wall of the sliding base. By incorporating a cleaning mechanism, this utility model not only cleans the inner wall of the valve body during the movement of the valve core, preventing aging of seals and accumulation of contaminants inside the valve body that could affect its normal opening and closing, but also allows for adjustment of the cleaning force of the cleaning mechanism according to the cleaning requirements of the contaminants inside the valve body, facilitating the removal of different types of attached contaminants.
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Description

Technical Field

[0001] This utility model belongs to the field of slide gate valve technology, and in particular relates to a high vacuum pneumatic slide gate valve. Background Technology

[0002] A high-vacuum pneumatic slide gate valve is a type of valve used in high-vacuum systems. Its working principle is to use compressed air as a power source, and change the direction of the air path through an electromagnetic reversing valve, so that the cylinder piston rod pushes or pulls the valve core assembly in a linear motion, thereby realizing the opening or closing of the valve.

[0003] Most existing slide gate valves rely heavily on compressed air for operation. After prolonged use, the seals may age. This aging can lead to the accumulation of contaminants inside the valve body, which can cause sluggish cylinder movement or even jamming. This results in delayed valve opening and closing, high maintenance frequency, and increased costs and downtime. Utility Model Content

[0004] The purpose of this invention is to provide a high-vacuum pneumatic slide gate valve. By setting a cleaning mechanism, the inner wall of the valve body can be cleaned, which can prevent the aging of seals and the accumulation of contaminants inside the valve body from affecting the normal opening and closing of the valve. Furthermore, the cleaning force of the cleaning mechanism can be adjusted according to the cleaning needs of contaminants inside the valve body, so as to clean different types of attached contaminants. This solves the existing problem of contaminants accumulating inside the valve body and affecting the normal opening and closing of the valve.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution: This utility model relates to a high-vacuum pneumatic slide gate valve, comprising a valve body, a cleaning mechanism, and a valve core. A movable frame is installed inside the valve body, and the valve core is installed inside the movable frame. A transmission mechanism is provided outside the valve body. A sealing gasket is installed inside the valve body, and a sealing cover is installed outside the valve body. The cleaning mechanism includes a sliding base installed outside the movable frame. An elastic arc plate is provided on the side wall of the sliding base, and the elastic arc plate is located on both sides of the sliding base in a mirror-symmetrical structure. The sliding base and the elastic arc plate are integrally formed. The elastic arc plate has a certain degree of elasticity. A cleaning scraper is provided at one end of the elastic arc plate, and an arc-shaped baffle is provided on the outer wall of the cleaning scraper. The cleaning scraper is C-shaped and integrally formed with the elastic arc plate. The cleaning scraper contacts the inner wall of the valve body through the elastic arc plate. By adopting the above technical solution: the elastic arc plate is an arc-shaped plate made of metal, which has a certain degree of elasticity. The elastic arc plate is set on both sides of the sliding base and has a mirror symmetrical structure. The cleaning scraper is C-shaped, and the elastic arc plate and the cleaning scraper are integrated into one structure. The cleaning scraper contacts the inner wall of the valve body through the elasticity of the elastic arc plate. During the movement of the valve core in the valve body, it can clean the aging of the seals and contaminants, which can prevent the aging of the seals and the accumulation of contaminants inside the valve body from affecting the normal movement of the valve core and ensuring the normal opening and closing of the valve. The arc baffle is C-shaped and located on the outer wall of the cleaning scraper, which can make the contaminants cleaned by the cleaning scraper adhere to the outer wall of the valve core.

[0006] Furthermore, the outer wall of the arc-shaped baffle is provided with an arc-shaped pull plate, one end of the arc-shaped pull plate is provided with an adjusting slide plate, the sliding base is provided with an adjusting groove, and the adjusting slide plate is slidably sleeved inside the adjusting groove; By adopting the above technical solution: the arc-shaped pull plate is an arc-shaped plate made of metal. The arc-shaped pull plate is located on the outer wall of the arc-shaped baffle. By adjusting the position of the arc-shaped pull plate, the position of the arc-shaped baffle and the cleaning scraper can be adjusted. Thus, the distance between the cleaning scraper and the inner wall of the valve body can be adjusted according to the needs, thereby ensuring the cleaning effect of the cleaning scraper on the inner wall of the valve body.

[0007] Furthermore, a limit block is provided at the top of the adjusting slide plate, and a limit slot is provided inside the adjusting slide groove that matches the shape of the limit block. The limit block is fixedly sleeved inside the limit slot. By adopting the above technical solution: the limiting block is located at the top of the adjusting slide plate and is distributed in a linear array, the limiting slot is located on the inner wall of the adjusting slide groove, and the shape of the limiting block is adapted to the shape of the limiting slot. By fixing the limiting block inside the limiting slot, it is beneficial to lock the position of the adjusting slide plate inside the adjusting slide groove, which can prevent the position of the adjusting slide plate from sliding and affecting the cleaning effect of the cleaning scraper on the inner wall of the valve body.

[0008] Furthermore, an elastic support plate is provided at one end of the adjusting slide plate, and the elastic support plate is an arc-shaped plate. By adopting the above technical solution: the elastic support plate is an arc-shaped plate made of metal and has a certain degree of elasticity. The adjusting slide plate is set at both ends of the elastic support plate and has a mirror symmetrical structure. By setting the elastic support plate between the two adjusting slide plates, the adjusting slide plates can be pushed outward, which helps to fix the limiting block in the limiting slot. This can lock the position of the adjusting slide plate inside the adjusting groove and prevent the adjusting slide plate from sliding and affecting the cleaning effect of the cleaning scraper on the inner wall of the valve body.

[0009] Furthermore, a fixing plate is provided at the bottom of the sliding base, and the fixing plate is provided on both sides of the bottom of the sliding base and is symmetrical to each other; By adopting the above technical solution: the fixing plate is an arc-shaped plate located on both sides of the bottom of the sliding base and is symmetrical to each other. The fixing plate makes it easy to fix the sliding base to the outside of the mobile frame.

[0010] This utility model has the following beneficial effects: This invention, by setting up a cleaning mechanism, can not only clean the inner wall of the valve body, but also adjust the cleaning force according to the cleaning needs. This setting has two advantages: firstly, it can clean the inner wall of the valve body during the movement of the valve core, which can prevent the aging of the seals and the accumulation of contaminants inside the valve body, thus avoiding affecting the normal opening and closing of the valve; secondly, it can adjust the cleaning force of the cleaning mechanism on the contaminants according to the cleaning needs of the contaminants inside the valve body, so as to clean different attached contaminants.

[0011] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0012] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0013] Figure 1 This is a three-dimensional appearance structure diagram of the present utility model; Figure 2 This is a three-dimensional structural diagram of the valve body of this utility model; Figure 3 This is a three-dimensional structural diagram of the valve core and the moving frame of this utility model; Figure 4 This is a three-dimensional structural diagram of the cleaning mechanism of this utility model; Figure 5 This is a three-dimensional cross-sectional structural diagram of the cleaning mechanism of this utility model; Figure 6 This utility model Figure 5 A three-dimensional magnified structural diagram of A.

[0014] The attached diagram lists the components represented by each number as follows: 1. Valve body; 2. Cleaning mechanism; 201. Sliding base; 202. Elastic arc plate; 203. Cleaning scraper; 204. Arc baffle; 205. Arc pull plate; 206. Adjusting slide plate; 207. Limiting block; 208. Elastic support plate; 209. Adjusting slide groove; 210. Limiting slot; 211. Fixing plate; 3. Valve core; 4. Transmission mechanism; 5. Moving frame; 6. Sealing cover plate; 7. Sealing gasket. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0016] Please see Figure 1-6 This utility model is a high-vacuum pneumatic slide gate valve, comprising a valve body 1, a cleaning mechanism 2, and a valve core 3. A movable frame 5 is installed inside the valve body 1, and the valve core 3 is installed inside the movable frame 5. A transmission mechanism 4 is provided outside the valve body 1. A sealing gasket 7 is installed inside the valve body 1, and a sealing cover plate 6 is installed outside the valve body 1. The cleaning mechanism 2 includes a sliding base 201, which is installed outside the movable frame 5. An elastic arc plate 202 is provided on the side wall of the sliding base 201, and the elastic arc plate 202 is located on both sides of the sliding base 201 in a mirror-symmetrical structure. The sliding base 201 and the elastic arc plate 202 are an integral structure. The elastic arc plate 202 has a certain elasticity. A cleaning scraper 203 is provided at one end of the elastic arc plate 202, and an arc-shaped baffle 204 is provided on the outer wall of the cleaning scraper 203. The cleaning scraper 203 is C-shaped. The cleaning scraper 203 and the elastic arc plate 202 are an integral structure. The valve body 1 has a unique structure. The cleaning scraper 203 contacts the inner wall of the valve body 1 via an elastic arc plate 202. The elastic arc plate 202 is an arc-shaped plate made of metal and has a certain degree of elasticity. The elastic arc plate 202 is located on both sides of the sliding base 201 and has a mirror-symmetrical structure. The cleaning scraper 203 is C-shaped, and the elastic arc plate 202 and the cleaning scraper 203 are an integral structure. The cleaning scraper 203 contacts the inner wall of the valve body 1 through the elasticity of the elastic arc plate 202. During the movement of the valve core 3 in the valve body 1, it can clean the aging of the seals and contaminants, which can prevent the aging of the seals and the accumulation of contaminants inside the valve body 1 from affecting the normal movement of the valve core 3 and ensuring the normal opening and closing of the valve. The arc baffle 204 is C-shaped and located on the outer wall of the cleaning scraper 203, which allows the contaminants cleaned by the cleaning scraper 203 to adhere to the outer wall of the valve core 3.

[0017] An arc-shaped pull plate 205 is provided on the outer wall of the arc-shaped baffle 204. An adjusting slide plate 206 is provided at one end of the arc-shaped pull plate 205. An adjusting slide groove 209 is provided inside the sliding base 201. The adjusting slide plate 206 is slidably sleeved inside the adjusting slide groove 209. The arc-shaped pull plate 205 is an arc-shaped plate and is made of metal. The arc-shaped pull plate 205 is located on the outer wall of the arc-shaped baffle 204. By adjusting the position of the arc-shaped pull plate 205, the position of the arc-shaped baffle 204 and the cleaning scraper 203 can be adjusted. Thus, the distance between the cleaning scraper 203 and the inner wall of the valve body 1 can be adjusted according to the needs, thereby ensuring the cleaning effect of the cleaning scraper 203 on the inner wall of the valve body 1.

[0018] The top of the adjusting slide plate 206 is provided with a limiting block 207, and the inside of the adjusting slide groove 209 is provided with a limiting groove 210 that matches the shape of the limiting block 207. The limiting block 207 is fixedly fitted inside the limiting groove 210. The limiting blocks 207 are located on the top of the adjusting slide plate 206 and are distributed in a linear array. The limiting groove 210 is located on the inner wall of the adjusting slide groove 209. The shape of the limiting block 207 matches the shape of the limiting groove 210. By fixing the limiting block 207 inside the limiting groove 210, it is beneficial to lock the position of the adjusting slide plate 206 inside the adjusting slide groove 209, which can prevent the adjusting slide plate 206 from sliding and affecting the cleaning effect of the cleaning scraper 203 on the inner wall of the valve body 1.

[0019] One end of the adjusting slide plate 206 is provided with an elastic support plate 208, which is an arc-shaped plate. The elastic support plate 208 is made of metal and has a certain degree of elasticity. The adjusting slide plate 206 is set at both ends of the elastic support plate 208 and has a mirror symmetrical structure. By setting the elastic support plate 208 between the two adjusting slide plates 206, the adjusting slide plate 206 can be pushed outward, which helps to fix the limiting block 207 inside the limiting slot 210. This can lock the position of the adjusting slide plate 206 inside the adjusting slide groove 209 and prevent the adjusting slide plate 206 from sliding and affecting the cleaning effect of the cleaning scraper 203 on the inner wall of the valve body 1.

[0020] The bottom of the sliding base 201 is provided with a fixing plate 211. The fixing plate 211 is located on both sides of the bottom of the sliding base 201 and is symmetrical to each other. The fixing plate 211 is an arc-shaped plate located on both sides of the bottom of the sliding base 201 and is symmetrical to each other. The fixing plate 211 makes it easy to fix the sliding base 201 to the outside of the movable frame 5.

[0021] A specific application of this embodiment is as follows: by fixing the sliding base 201 inside the moving frame 5 using the fixing plate 211, the valve core 3 is then installed inside the moving frame 5. Then, by controlling the transmission mechanism 4, the valve core 3 is driven to slide inside the valve body 1, while the sliding base 201 moves on the inner wall of the valve body 1. During the movement of the inner wall of the cleaning scraper 203, the aging of the seals and contaminants are cleaned, which can prevent the aging of the seals and the accumulation of contaminants inside the valve body 1 from affecting the normal movement of the valve core 3, and can ensure the normal opening and closing of the valve. The self-cleaning and anti-jamming design reduces the accumulation of contaminants. Combined with the long-life sealing structure, the valve maintenance cycle is extended to 24-36 months, the single maintenance time is shortened to 1-2 hours, and the overall maintenance cost is reduced by more than 60%.

[0022] The valve body and process chamber are connected by flanges, using rubber O-rings (Viton fluororubber) with a compression rate of approximately 15%-25%. It is essential to ensure the flange surface is free of scratches. The valve body and chamber are made of stainless steel to prevent galvanic corrosion. For the valve plate and sealing assembly, when the valve plate is closed, its rectangular sealing groove (2.2mm deep, 6mm wide) presses against the metal sealing ring on the valve body (e.g., an aluminum ring with a cross-sectional dimension of 2mm × 5mm). The sealing surface must be precision ground (flatness ≤ 0.01mm) and a metal-to-metal seal is achieved through bolt pre-tightening (surface pressure ≥ 10MPa). A secondary seal (e.g., a Viton O-ring) is typically designed around the valve plate to provide redundant protection in case of primary seal failure. A magnetohydrodynamic seal is used at the connection between the valve plate and the drive rod to prevent leakage.

[0023] The composite sealing structure reduces the leakage rate from 1×10 -9 Pa·L / s decreased to 1×10 -11 Pa·L / s, with vacuum holding time extended by more than 3 times. Actual testing showed that after 12 months of continuous operation, the sealing performance still met the requirements of PVD equipment, far exceeding the 6-12 month replacement cycle of traditional seals. The intelligent pneumatic drive system reduced the failure rate due to air supply issues from 25% to below 5%, improved valve response speed by 40% (from 0.5-1 seconds to less than 0.3 seconds), and reduced noise to below 55dB, significantly improving the workshop working environment. The low-temperature adaptive structure effectively solved the jamming problem in low-temperature environments, allowing normal opening and closing even under extreme conditions of -30℃, eliminating the need for an additional independent heating device and reducing system complexity and energy consumption by approximately 30%.

[0024] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0025] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A high-vacuum pneumatic slide gate valve, comprising a valve body (1), a cleaning mechanism (2), and a valve core (3), characterized in that: The valve body (1) is equipped with a movable frame (5), the valve core (3) is installed inside the movable frame (5), and the valve body (1) is equipped with a transmission mechanism (4) on the outside. The cleaning mechanism (2) includes a sliding base (201), which is installed outside the movable frame (5). The side wall of the sliding base (201) is provided with an elastic arc plate (202), and one end of the elastic arc plate (202) is provided with a cleaning scraper (203). The outer wall of the cleaning scraper (203) is provided with an arc-shaped baffle (204).

2. The high vacuum aerodynamic insertion valve of claim 1, wherein, The outer wall of the arc-shaped baffle (204) is provided with an arc-shaped pull plate (205), and one end of the arc-shaped pull plate (205) is provided with an adjusting slide plate (206). The sliding base (201) is provided with an adjusting slide groove (209), and the adjusting slide plate (206) is slidably sleeved inside the adjusting slide groove (209).

3. The high vacuum aerodynamic flapper valve of claim 2, wherein, The top of the adjusting slide plate (206) is provided with a limiting block (207), and the inside of the adjusting slide groove (209) is provided with a limiting groove (210) that matches the shape of the limiting block (207). The limiting block (207) is fixedly fitted inside the limiting groove (210).

4. The high vacuum aerodynamic insertion valve of claim 3, wherein, One end of the adjusting slide plate (206) is provided with an elastic support plate (208), which is an arc-shaped plate.

5. The high vacuum aerodynamic insertion valve of claim 1, wherein, The elastic arc plate (202) is disposed on both sides of the sliding base (201) and has a mirror symmetrical structure. The sliding base (201) and the elastic arc plate (202) are an integral structure. The elastic arc plate (202) has a certain elasticity.

6. The high vacuum aerodynamic insertion valve of claim 1, wherein, The cleaning scraper (203) is C-shaped and is an integral structure with the elastic arc plate (202). The cleaning scraper (203) contacts the inner wall of the valve body (1) through the elastic arc plate (202).

7. The high vacuum aerodynamic flapper valve of claim 5, wherein, The bottom of the sliding base (201) is provided with a fixing plate (211), which is located on both sides of the bottom of the sliding base (201) and is symmetrical to each other.

8. The high vacuum aerodynamic insertion valve of claim 1, wherein, A sealing gasket (7) is installed inside the valve body (1), and a sealing cover plate (6) is installed outside the valve body (1).