Long life constant cv value membrane valve for ald processes

Abstract

This utility model discloses a long-life constant CV value diaphragm valve for ALD processes, comprising a main body, a locking cylinder screwed into the upper part of the main body, a connecting nut screwed into the outer wall of the locking cylinder, a connecting member inside the connecting nut, a fixing seat inside the connecting member, and a sealing shell screwed into the outer wall of the fixing seat. This long-life constant CV value diaphragm valve for ALD processes utilizes a Venturi-type throttling orifice. The medium passes through the orifice at a small radius, reducing the flow rate, and then re-enters at a larger radius. This reduction followed by expansion reduces the impact force of the medium on the valve seat, decreases valve seat wear, and extends the valve seat's service life.

Description

Technical Field

[0001] This utility model relates to the field of diaphragm valve technology, specifically a long-life constant CV value diaphragm valve for ALD process. Background Technology

[0002] A diaphragm valve is a type of valve that uses the deformation of a flexible diaphragm to control the flow of a medium. Its main function is to control the flow and volume of fluids. A diaphragm valve separates the valve body from the fluid medium through an elastic diaphragm, and controls the fluid flow by changing the displacement of the diaphragm. When the diaphragm is subjected to fluid pressure, it deforms accordingly, thereby changing the degree of valve opening and achieving precise control of the fluid flow rate.

[0003] Existing diaphragm valves all have the same diameter for the medium inlet channel. After the medium enters the channel, it directly impacts the valve seat, resulting in a large impact force. The valve seat is easily worn. Furthermore, the flow restriction is achieved using a 400N compression spring, which results in a large spring pressure, making the valve seat easily deformed. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a long-life constant CV value diaphragm valve for ALD processes, solving the problems mentioned in the background section.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution: a long-life constant CV value diaphragm valve for ALD process, comprising a main body, a locking cylinder screwed into the upper part of the main body, a connecting nut screwed into the outer wall of the locking cylinder, a connecting member provided inside the connecting nut, a fixing seat provided inside the connecting member, and a sealing shell screwed into the outer wall of the fixing seat. The fixed base has a push rod inside, and a tensioning block is fixed to the bottom of the push rod. The mother body has a slider seat below the locking cylinder inside, and a slider is slidably connected inside the slider seat. The mother body has a diaphragm below the slider seat inside, and a valve seat is fixed to the bottom of the diaphragm. The valve seat is fixedly connected to the slider by a screw. The locking cylinder presses the slider seat and the diaphragm. The connecting nut presses the connecting piece. The bottom of the main body is provided with a Venturi-type throttling orifice, and discharge holes are provided on both the left and right sides of the Venturi-type throttling orifice at the bottom of the main body. The top of the tension block and the slider are fixedly connected. A 300N compression spring is sleeved on the outside of the top rod inside the connecting member. A valve groove is integrally formed inside the main body, and the valve seat is located inside the valve groove.

[0006] Preferably, a fixed valve sleeve is pressed between the sealing shell and the fixed seat.

[0007] Preferably, the outer side wall of the push rod is fixed with a movable valve sleeve both above and below the fixed valve sleeve.

[0008] Preferably, a bushing is fixed inside the fixing seat, and the top rod is located inside the bushing.

[0009] Preferably, the outer wall of the mother body, the outer wall of the connecting nut, and the outer wall of the fixing seat are all provided with flat grooves.

[0010] Preferably, the bottom left and right sides of the mother body are provided with multiple mounting holes. Beneficial effects

[0011] This invention provides a long-life, constant CV value diaphragm valve for ALD processes. Compared with existing technologies, it has the following advantages: 1. The ALD process uses a long-life constant CV value diaphragm valve. By setting a Venturi-type throttling orifice, the medium passes through the small radius of the Venturi-type throttling orifice, reducing the flow rate. After passing through, it enters the large radius again. This reduction and expansion can reduce the impact force of the medium on the valve seat, reduce valve seat wear, and improve the service life of the valve seat.

[0012] 2. The ALD process uses a long-life constant CV value diaphragm valve. By setting a 300N compression spring, the impact force is small after the medium flow is limited. This allows the use of a compression spring with less elasticity, reducing the pressure on the valve seat, extending the service life of the valve seat, and reducing the deformation of the valve seat caused by the spring force after pressing the valve seat. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a cross-sectional structural diagram of the present invention; Figure 3 This is a schematic diagram of the structure of the parent body in this utility model; Figure 4 This is a cross-sectional view of the slider seat in this utility model.

[0014] In the diagram: 1. Main body; 2. Connecting nut; 3. Connecting piece; 4. Sealing shell; 5. Venturi-type throttling orifice; 6. Slider seat; 7. Locking cylinder; 8. 300N compression spring; 9. Push rod; 10. Fixed valve sleeve; 11. Valve groove; 12. Valve seat; 13. Diaphragm; 14. Slider; 15. Tensioning block; 16. Fixed seat; 17. Discharge hole; 18. Moving valve sleeve; 19. Flat groove; 20. Mounting hole; 21. Bushing. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] Please see Figures 1-4 This utility model provides a technical solution: a long-life constant CV value diaphragm valve for ALD process, including a main body 1. A locking cylinder 7 is screwed into the upper part of the main body 1. A connecting nut 2 is screwed into the outer wall of the locking cylinder 7. A connecting piece 3 is provided inside the connecting nut 2. A fixing seat 16 is provided inside the connecting piece 3. A sealing shell 4 is screwed into the outer wall of the fixing seat 16. A push rod 9 is provided inside the fixing seat 16. A tensioning block 15 is fixed at the bottom of the push rod 9. A slider seat 6 is provided inside the main body 1 below the locking cylinder 7. A slider 14 is slidably connected inside the slider seat 6. A diaphragm 13 is provided inside the main body 1 below the slider seat 6. A valve seat 12 is fixed at the bottom of the diaphragm 13. The valve seat 12 is fixedly connected to the slider 14 by screws. The locking cylinder 7 presses the slider seat 6 and the diaphragm 13. The connecting nut 2 presses the connecting piece 3. The bottom of the main body 1 has an opening. The venturi-type throttling orifice 5 has discharge holes 17 on both the left and right sides of the bottom of the mother body 1. The top of the tension block 15 and the slider 14 are fixedly connected. A 300N compression spring 8 is sleeved on the outside of the push rod 9 inside the connecting piece 3. The mother body 1 has an integrally formed valve groove 11. The valve seat 12 is located inside the valve groove 11. This reduces the wear of the valve seat 12 and also reduces the deformation of the valve seat 12, increasing the service life of the valve seat 12. A fixed valve sleeve 10 is pressed between the sealing shell 4 and the fixed seat 16, which plays a sealing role. The outer wall of the push rod 9 is fixed with movable valve sleeves 18 above and below the fixed valve sleeve 10, which further seals and limits the push rod 9. A bushing 21 is fixed inside the fixed seat 16. The push rod 9 is located inside the bushing 21, which can reduce the wear of the push rod 9.

[0017] Furthermore, flat grooves 19 are provided on the outer side wall of the mother body 1, the outer side wall of the connecting nut 2, and the outer side wall of the fixing seat 16, which facilitates installation using a wrench.

[0018] Furthermore, multiple mounting holes 20 are provided on both the left and right sides of the bottom of the mother body 1, so that the device can be installed.

[0019] During operation, the medium enters the Venturi-type throttling orifice 5 and passes through the small radius, reducing the flow rate. After passing through, it enters the large radius again. This process of reducing and expanding reduces the impact force of the medium on the valve seat 12, reduces the wear of the valve seat 12, and improves the service life of the valve seat 12. The medium pushes open the valve seat 12, deforming the diaphragm 13, and then discharges from the discharge hole 17.

[0020] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0021] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, the phrase "comprising an element defined as..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0022] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A long life constant CV value membrane valve for ALD process comprising a matrix (1), characterized in that: The mother body (1) has a locking cylinder (7) screwed into the upper part of the mother body (1), and a connecting nut (2) screwed into the outer wall of the locking cylinder (7). The connecting nut (2) has a connecting piece (3) inside, and a fixing seat (16) is provided inside the connecting piece (3). A sealing shell (4) is screwed into the outer wall of the fixing seat (16). The fixed base (16) is provided with a top rod (9) inside, and a tensioning block (15) is fixed at the bottom of the top rod (9). The mother body (1) is provided with a slider seat (6) below the locking cylinder (7) inside, and a slider (14) is slidably connected inside the slider seat (6). The mother body (1) is provided with a diaphragm (13) below the slider seat (6) inside, and a valve seat (12) is fixed at the bottom of the diaphragm (13). The valve seat (12) is fixedly connected to the slider (14) by screws. The locking cylinder (7) presses the slider seat (6) and the diaphragm (13) together. The connecting nut (2) presses the connecting piece (3). The bottom of the mother body (1) is provided with a Venturi-type throttling orifice (5). The bottom of the mother body (1) is provided with discharge holes (17) on both the left and right sides of the Venturi-type throttling orifice (5). The top of the tension block (15) and the slider (14) are fixedly connected. The outside of the top rod (9) is fitted with a 300N compression spring (8) inside the connector (3). The inside of the mother body (1) is integrally formed with a valve groove (11). The valve seat (12) is located inside the valve groove (11).

2. The long-life constant CV value membrane valve for ALD process according to claim 1, characterized in that: A fixed valve sleeve (10) is pressed between the sealing shell (4) and the fixed seat (16).

3. The long-life constant CV value membrane valve for ALD processes according to claim 2, characterized in that: The outer side wall of the top rod (9) is fixed with movable valve sleeves (18) above and below the fixed valve sleeve (10).

4. The long-life constant CV value membrane valve for ALD processes according to claim 3, characterized in that: The bushing (21) is fixed inside the fixed seat (16), and the top rod (9) is located inside the bushing (21).

5. The long-life constant CV value membrane valve for ALD processes according to claim 4, characterized in that: The outer side wall of the mother body (1), the outer side wall of the connecting nut (2) and the outer side wall of the fixing seat (16) are all provided with flat grooves (19).

6. The long-life constant CV value membrane valve for ALD processes according to claim 5, characterized in that: Multiple mounting holes (20) are provided on both the left and right sides of the bottom of the mother body (1).

Images